JP2012006115A5 - - Google Patents

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Publication number
JP2012006115A5
JP2012006115A5 JP2010144448A JP2010144448A JP2012006115A5 JP 2012006115 A5 JP2012006115 A5 JP 2012006115A5 JP 2010144448 A JP2010144448 A JP 2010144448A JP 2010144448 A JP2010144448 A JP 2010144448A JP 2012006115 A5 JP2012006115 A5 JP 2012006115A5
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JP
Japan
Prior art keywords
concentration
quality
filtration
coolant
thickener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010144448A
Other languages
English (en)
Japanese (ja)
Other versions
JP5640260B2 (ja
JP2012006115A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010144448A priority Critical patent/JP5640260B2/ja
Priority claimed from JP2010144448A external-priority patent/JP5640260B2/ja
Priority to TW100120660A priority patent/TWI501838B/zh
Priority to KR1020110058125A priority patent/KR101799598B1/ko
Priority to CN201110172424.2A priority patent/CN102294758B/zh
Publication of JP2012006115A publication Critical patent/JP2012006115A/ja
Publication of JP2012006115A5 publication Critical patent/JP2012006115A5/ja
Application granted granted Critical
Publication of JP5640260B2 publication Critical patent/JP5640260B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010144448A 2010-06-25 2010-06-25 クーラント回収方法 Active JP5640260B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010144448A JP5640260B2 (ja) 2010-06-25 2010-06-25 クーラント回収方法
TW100120660A TWI501838B (zh) 2010-06-25 2011-06-14 Coolant recovery method
KR1020110058125A KR101799598B1 (ko) 2010-06-25 2011-06-15 쿨런트 회수 방법
CN201110172424.2A CN102294758B (zh) 2010-06-25 2011-06-23 冷却介质回收方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010144448A JP5640260B2 (ja) 2010-06-25 2010-06-25 クーラント回収方法

Publications (3)

Publication Number Publication Date
JP2012006115A JP2012006115A (ja) 2012-01-12
JP2012006115A5 true JP2012006115A5 (enrdf_load_stackoverflow) 2013-02-28
JP5640260B2 JP5640260B2 (ja) 2014-12-17

Family

ID=45355551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010144448A Active JP5640260B2 (ja) 2010-06-25 2010-06-25 クーラント回収方法

Country Status (4)

Country Link
JP (1) JP5640260B2 (enrdf_load_stackoverflow)
KR (1) KR101799598B1 (enrdf_load_stackoverflow)
CN (1) CN102294758B (enrdf_load_stackoverflow)
TW (1) TWI501838B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013248707A (ja) * 2012-05-31 2013-12-12 Panasonic Corp クーラント廃液の再生方法、クーラント廃液の処理方法、クーラント廃液の処理システム、及び再生クーラント液の製造方法
JP6331474B2 (ja) * 2014-02-28 2018-05-30 ブラザー工業株式会社 工作機械の洗浄液濾過装置
CN105174522B (zh) * 2015-10-09 2017-11-17 浙江瑞翌新材料科技股份有限公司 一种金刚线切割废冷却液的回收方法及系统
CN117774150A (zh) * 2022-09-22 2024-03-29 内蒙古中环光伏材料有限公司 一种去除硅单晶金刚线切片用冷却液中硅粉的方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3249373B2 (ja) * 1996-02-21 2002-01-21 信越半導体株式会社 水溶性スラリー廃液の再利用システム
US5664990A (en) * 1996-07-29 1997-09-09 Integrated Process Equipment Corp. Slurry recycling in CMP apparatus
JP3816200B2 (ja) * 1997-07-18 2006-08-30 東芝セラミックス株式会社 微細粒子を含む液体の処理方法および処理装置
JP3389141B2 (ja) * 1999-04-26 2003-03-24 株式会社スーパーシリコン研究所 スライシング用スラリーの評価方法及びスラリー
JP3314921B2 (ja) * 1999-06-08 2002-08-19 三菱住友シリコン株式会社 半導体材料の切断・加工方法
JP4369054B2 (ja) * 1999-07-01 2009-11-18 エムイーエムシー・エレクトロニック・マテリアルズ・ソシエタ・ペル・アチオニ 使用済グリコール系スラリーの分離、再生および再使用法
JP4609675B2 (ja) * 2007-08-16 2011-01-12 オルガノ株式会社 メタル研磨ｃｍｐ工程排水処理装置及び方法
JP5173945B2 (ja) * 2008-07-02 2013-04-03 シャープ株式会社 クーラント再生方法およびスラリー再生方法
SG172286A1 (en) * 2008-12-20 2011-07-28 Cabot Microelectronics Corp Wiresaw cutting method

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