JP2012000702A - Cutting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting apparatus that facilitates an adjustment to the angle of a nozzle for feeding a cutting fluid toward a circumference of a cutting blade from the radially outer side of the cutting blade.SOLUTION: The cutting apparatus includes: a body block 40 including a nozzle body rotation support shaft 48 and a female screw part 49; a rotation adjustment nozzle body 50 including an injector 53, and in the peripheral surface thereof, a cum plate 55 in which a cum hole 56 is formed; and an adjustment screw 60 for being screwed into the female screw part 49 to define a positional relation with the cum plate 55 so as to adjust a rotational position of the rotation adjustment nozzle body 50, in a first outer circumference cutting fluid feeder 12 mounted to a blade cover.

Description

  The present invention relates to a cutting apparatus for cutting a workpiece such as a semiconductor wafer.

  For example, in a semiconductor device manufacturing process, circuits such as ICs and LSIs are formed in a large number of regions arranged in a grid on the surface of a substantially disc-shaped semiconductor wafer, and each region is defined as a predetermined street (cutting line). The individual semiconductor chips are manufactured by cutting along. Thus, in a precision cutting apparatus that cuts a semiconductor wafer, for example, a dicing apparatus, a workpiece such as a semiconductor wafer is cut using a cutting blade mounted on the tip of a spindle that rotates at high speed. In such a dicing apparatus, a blade cover is disposed so as to cover the outer periphery of the cutting blade. The blade cover is provided with a pair of side nozzles that supply cutting fluid from both side surfaces (front and back surfaces in the Y-axis direction) of the cutting blade in order to cool the cutting blade and the processing point and to flush away the cutting waste. A blade cooler nozzle) is provided. And what was provided with the outer periphery nozzle (shower nozzle) which supplies a cutting fluid from the radial direction outer side with respect to the outer peripheral surface of a cutting blade is known (for example, refer patent document 1). This outer peripheral nozzle is normally disposed in front of the cutting direction so as to face the outer peripheral surface of the cutting blade.

JP 2006-187849 A

  However, when the above-mentioned outer peripheral nozzle is installed, it is necessary to adjust the outer peripheral nozzle to have various angles in order to supply cutting water in a state most suitable for the cutting blade. Performing proper angle adjustment is complicated and requires improvement.

  The present invention has been made in view of the above, and provides a cutting device that can easily adjust the angle of a nozzle that supplies a cutting fluid from the radially outer side of a cutting blade toward the periphery of the cutting blade. Objective.

  In order to solve the above-described problems and achieve the object, a cutting apparatus according to the present invention includes a holding unit that holds a workpiece, and a disk that rotates the workpiece held by the holding unit about the Y direction as a rotation axis. A cutting device comprising: a cutting means for processing with a shaped cutting blade; and a cutting fluid supply means for supplying a cutting fluid to the cutting blade, wherein the cutting fluid supply means is a radially outer peripheral side of the cutting blade. A nozzle having a jet part for jetting the cutting fluid from the nozzle toward the cutting blade, a rotating part in which the jet part is formed, and a nozzle for rotatably supporting the rotary part with the Y direction as a rotation axis A support portion and an angle adjustment portion for adjusting a rotation angle of the rotation portion, and the angle adjustment portion is formed on an outer periphery of the rotation portion, and has a height outward in the radial direction with respect to the rotation of the rotation portion. A rotating shaft of the rotating part A plate portion formed so as to draw a spiral, a through hole formed on the plate portion in an arc shape with respect to the rotation axis of the rotating portion, and a through hole penetrating the through hole of the plate member And a shaft formed on both ends of the penetrating portion, the flange sandwiching the plate portion from both sides in a state in which the penetrating portion penetrates the through hole, and a shaft formed with a male screw portion having a rotation axis in the Y direction, A male screw part screwed into the female screw part of the shaft support part, and a female screw part screwed into the male screw part, and a shaft support part formed at a position corresponding to the through hole. , And the flange portion is moved forward and backward in the Y direction, whereby the flange and the plate portion slide, and the rotating portion rotates about the Y direction as a rotation axis.

  According to the present invention, it is possible to realize a cutting apparatus that can easily adjust the angle of a nozzle that supplies a cutting fluid from the radially outer side of the cutting blade toward the periphery of the cutting blade.

FIG. 1 is a perspective view of a cutting apparatus according to an embodiment of the present invention. FIG. 2 is a perspective view of the cutting means in the cutting apparatus according to the embodiment of the present invention. FIG. 3 is an exploded perspective view of the cutting fluid supply means in the cutting apparatus according to the embodiment of the present invention. FIG. 4A is a plan view illustrating the rotation adjustment nozzle body and the adjustment screw in a state where the distance from the adjustment screw support plate portion to the penetrating portion is the longest. FIG. 4B is a plan view of the rotation adjustment nozzle body and the adjustment screw in a state where the distance from the adjustment screw support plate portion to the penetration portion is moderately long. FIG. 4-3 is a plan view illustrating the rotation adjustment nozzle body and the adjustment screw in a state where the distance from the adjustment screw support plate portion to the through portion is the shortest. FIG. 5 is a side view showing a state in which the cutting fluid supply means in the state shown in FIG. 4A is viewed from the Y direction. FIG. 6 is a side view showing a state in which the cutting fluid supply means is viewed from the Y direction in the state shown in FIG. 4-2 and the main body block moved downward with respect to the first blade cover. .

  Below, the cutting device which is a form for carrying out the present invention is explained with reference to drawings. However, the drawings include schematic ones, and include portions having different dimensional relationships and ratios between the drawings.

  As shown in FIG. 1, a cutting apparatus 1 according to the present embodiment cuts a chuck table 3 as a holding unit that holds a workpiece 2 made of a silicon wafer, and the workpiece 2 held on the chuck table 3. First cutting means 4 and second cutting means 5 are provided.

  As shown in FIG. 1, the chuck table 3 can fix the position of the work 2, and is provided with a suction means (not shown) that sucks and holds the work 2 on the mounting surface. The chuck table 3 side is guided by a pair of guide rails 1B and 1C formed along the X direction on the apparatus base 1A, and is coaxial with a pulse motor 14 provided on the apparatus base 1A. It can be screwed into a ball screw 15 that rotates in the forward and backward directions to move in the X direction.

  The cutting apparatus 1 according to the present embodiment includes a fixed base 16 that is formed in a gate shape that crosses the upper side of the chuck table 3 in the Y direction, and is erected on the apparatus base 1A. The fixed base 16 is provided with a first support base 18 for supporting the first elevating plate 17 provided with the first cutting means 4 and a second elevating position provided with the second cutting means 5. A second support base 20 that supports the plate 19 is provided. The first support base 18 side and the second support base 20 are guided in the Y direction by a pair of parallel guide rails 21A and 21B formed on the fixed base 16 along the Y direction (width direction). It has become.

  As shown in FIG. 1, a pair of guide rails 22 </ b> A and 22 </ b> B is formed in the first support base 18 along the Z direction (vertical direction), and the second support base 20 is also formed in the Z direction (vertical direction). A pair of guide rails 23A and 23B are formed along the line. The first elevating plate 17 is guided in the Z direction by a pair of guide rails 22 </ b> A and 22 </ b> B formed on the first support base 18. The second elevating plate 19 is guided in the Z direction on the pair of guide rails 23 </ b> A and 23 </ b> B formed on the second support base 20. The first elevating plate 17 and the second elevating plate 19 are driven in the Z direction by pulse motors 24 and 25 and ball screws 26 and 27.

  As shown in FIG. 2, the first cutting means 4 is provided with a disk-shaped first cutting blade 6 and a first cutting blade 6 so as to rotate coaxially with the first cutting blade 6. A first spindle 7 that rotationally drives the blade 6 and a first blade cover 8 that covers the first cutting blade 6 are provided. As shown in FIG. 1, the second cutting means 5 includes a disc-shaped second cutting blade (not shown), a second spindle 9 that rotationally drives the second cutting blade, and a second cutting blade. And a second blade cover 10 covering the.

  As shown in FIG. 2, the first blade cover 8 has a pair of first side nozzles 11 that supply cutting fluid to both sides of the first blade 6, and a cut on the outer peripheral surface of the first blade 6. First peripheral cutting fluid supply means 12 for supplying the fluid is provided. As shown in FIG. 1, in the second blade cover 10 as well, a second peripheral cutting fluid that supplies a cutting fluid to a pair of second side nozzles (not shown) and an outer peripheral surface of the second blade (not shown). Supply means 13 are provided.

  The axis of the first spindle 7 and the second spindle 9, that is, the rotation axis of the cutting blade is the Y direction that is the indexing feed direction (the direction in which the first cutting blade 6 and the second cutting blade approach and separate from each other). ) In parallel with Here, the first cutting blade 6 and the second cutting blade (not shown) are arranged to face each other in the Y direction, and are configured as a facing dicer. The first cutting blade 6 and the second cutting blade (not shown) may be of the same type for dual cutting or different types for step cutting.

  As described above, the first cutting means 4 and the second cutting means 5 have substantially the same configuration except that they are arranged opposite to each other and have opposite directions. The first side nozzle 11 and the first outer peripheral cutting fluid supply means 12 in the first cutting means 4 will be described, and the second side nozzle and the second outer peripheral cutting fluid supply means 13 in the second cutting means 5 will be described. The description of the configuration is omitted.

  As shown in FIG. 2, the pair of first side nozzles 11 are attached to one end of the first blade cover 8 in the X direction, and are arranged on both sides so as to sandwich the first cutting blade 6. ing. The first side surface nozzle 11 is connected to a cutting fluid supply pipe (not shown), and is fixed to an end of the first blade cover 8 and a lower end side position of the first cutting blade 6. And the nozzle forming pipe 11 </ b> B extended to the end. As shown in FIG. 2, a nozzle (not shown) is opened at a portion facing the first cutting blade 6 at the tip of the nozzle forming pipe 11B. The arrow w shown in FIG. 2 indicates the cutting fluid ejected from the tip of the nozzle forming pipe 11B.

  As shown in FIGS. 2 and 3, the first peripheral cutting fluid supply means 12 includes a main body block 40, a rotation adjustment nozzle body 50 as a nozzle, and an adjustment screw 60 as a shaft. .

  As shown in FIGS. 2 and 3, the main body block 40 has a nozzle support plate portion 42 as a nozzle support portion and a shaft support portion shorter than the nozzle support plate portion 42, which are parallel to each other at a predetermined interval. The screw support plate portion 43 is formed so as to extend integrally with the lower end portion of the rectangular parallelepiped block portion 41. That is, the adjustment screw support plate portion 43 is shorter in the nozzle support plate portion 42 and the adjustment screw support plate portion 43 that extend below the block portion 41. The adjustment screw support plate portion 43 and the adjustment screw 60 constitute an angle adjustment portion.

  A pair of long holes 44 that are long in the vertical direction are formed in the block portion 41 at a predetermined interval in the Y direction. These long holes 44 are formed so as to penetrate the block portion 41 in the X direction. In addition, a nozzle body rotation support shaft 48 projects from the lower portion of the nozzle support plate portion 42 toward the adjustment screw support plate portion 43 side (along the Y direction). The nozzle body rotation support shaft 48 is fitted in a rotation support shaft fitting port 52 that passes through a rotation shaft of a rotation adjustment nozzle body 50 described later. At this time, the adjustment screw support plate portion 43 is set so as not to interfere with the rotation of the rotation adjustment nozzle body 50.

  As shown in FIG. 3, a cutting fluid flow passage 47 indicated by a two-dot chain line through which cutting fluid passes is formed in the block portion 41, the nozzle support plate portion 42, and the nozzle body rotation support shaft 48. A coupling joint 45 is attached to the upper end portion of the cutting fluid flow passage 47 at the upper end of the block portion 41 using a connection nut 46. A pipe (not shown) is connected to the coupling joint 45 so that the cutting fluid is supplied to the nozzle body rotation support shaft 48 side. The cutting fluid is supplied from the nozzle body rotation support shaft 48 to the rotation adjustment nozzle body 50 by using a known swivel joint structure or the like.

  The rotation adjusting nozzle body 50 has a substantially cylindrical shape, and a center passing through the rotation axis is a rotation part 51 formed with a rotation support shaft fitting port 52 passing therethrough, and a circumferential surface of the rotation part 51 is parallel to the rotation axis. An injection part 53 for injecting cutting fluid and a cam plate 55 as a plate part provided on the peripheral surface of the rotation part 51 via an attachment base 54 are provided. As described above, the rotation adjustment nozzle body 50 is mounted so that the nozzle body rotation support shaft 48 projecting from the nozzle support plate portion 42 is fitted to the rotation support shaft fitting port 52 and is rotatable. Yes. At this time, the cutting fluid is supplied from the nozzle body rotation support shaft 48 to the rotation adjustment nozzle body 50 by a well-known swivel joint structure, and the cutting fluid flow passage 47 formed in the nozzle body rotation support shaft 48 is In addition, the injection unit 53 is guided through a flow path (not shown) in the rotation unit 51. As shown in FIGS. 5 and 6, the injection unit 53 is configured to inject the cutting fluid w from the radially outer peripheral side of the first cutting blade 6 toward the cutting blade 6.

  As shown in FIG. 3, the cam plate 55 is formed on the outer periphery of the rotating portion 51, has a height outward in the radial direction with respect to the rotation of the rotating portion 51, and draws a spiral with respect to the rotation axis of the rotating portion 51. Is formed. As shown in FIGS. 5 and 6, the cam plate 55 is formed with a cam hole 56 as a through hole formed in an arc shape when viewed from the rotation axis direction with respect to the rotating portion 51.

  The adjustment screw 60 is screwed into a female screw portion 49 formed on the adjustment screw support plate portion 43 of the main body block 40. The adjustment screw 60 is set so as to correspond to the cam hole 56 of the rotation adjustment nozzle body 50 in a state where the adjustment screw 60 is screwed into the female screw portion 49. As shown in FIG. 3, the adjustment screw 60 includes a head 61 in which an adjustment recess 61 </ b> A that is adjusted with a hexagon wrench, a male screw part 62 that is screwed into the female screw part 49, and a male screw part 62. The through-hole 63 is formed to be thin and inserted into the cam hole 56, and the flange 64 is formed at the end of the through-hole 63 and has the same diameter as the male screw 62.

  As described above, in the adjustment screw 60, the adjustment screw 60 is inserted into the cam plate by sandwiching the penetration portion 63 inserted into the cam hole 56 between the male screw portion 62 and the flange portion 64 having a diameter larger than that of the penetration portion 63. The structure does not deviate from 55.

  As shown in FIGS. 4A to 4C, in this embodiment, the adjustment recess 61A of the head 61 of the adjustment screw 60 screwed into the female screw portion 49 of the adjustment screw support plate portion 43 is used. When the male screw 62 is rotated, the penetrating part 63 moves forward and backward in the axial direction, and the penetrating part 63 and the cam plate 55 slide. Since the positional relationship with the cam plate 55 is uniquely determined by the distance from the adjustment screw support plate portion 43 to the through portion 63, the rotating portion 51 is axially moved by sliding between the cam plate 55 and the through portion 63 ( (Y direction) as a rotation axis. By such an action, the angle of the injection unit 53 provided in the rotating unit 51 with respect to the first cutting blade 6 can be changed.

  The first peripheral cutting fluid supply means 12 having the above-described configuration is configured such that the end of the first blade cover 8 provided with the fixing portion 11A of the first side nozzle 11 and the opposite end sandwiching the first cutting blade 6 are sandwiched. The main body block 40 is fixed to the portion with a pair of screws 70. The height position of the main body block 40 can be adjusted by adjusting the position of the pair of screws 70 in the long hole 44.

  The state shown in FIG. 4A is the state in which the distance from the adjustment screw support plate portion 43 to the penetration portion 63 is the longest, and at this time, the injection portion 53 of the rotating portion 51 is set to be relatively downward. Has been. In addition to the state of FIG. 4-1, the state shown in FIG. 5 is adjusted to a state where the main body block 40 is at a high position so that the screw 70 is located at the lower end of the elongated hole 44 shown in FIG. Yes. In this case, as shown in FIG. 5, the cutting fluid w sprayed from the spray unit 53 is sprayed toward the front side of the first cutting blade 6 (side facing the rotating unit 51).

  The state shown in FIG. 4-2 is a state in which the distance from the adjustment screw support plate portion 43 to the penetration portion 63 is intermediate between the long distance and the short distance, and the injection portion 53 of the rotating portion 51 is in the state shown in FIG. Has been adjusted upwards. 6 is adjusted to a state in which the main body block 40 is in a low position so that the screw 70 is positioned at the upper end portion of the elongated hole 44 shown in FIG. 3 in addition to the state shown in FIG. Yes. In this case, as shown in FIG. 6, the cutting fluid w sprayed from the spraying unit 53 is sprayed downward of the first cutting blade 6.

  The state shown in FIG. 4-3 is a state in which the distance from the adjustment screw support plate portion 43 to the through portion 63 is the shortest distance, and the injection portion 53 of the rotating portion 51 faces upward from the state of FIG. 4-3. It has been adjusted.

  In this way, by rotating the adjustment screw 60, the injection direction of the injection unit 53 to be injected can be adjusted, and the positional relationship between the elongated hole 44 and the screw 70 in the elongated hole 44 can be adjusted. The vertical position can also be adjusted. For this reason, in the cutting apparatus 1 according to the present embodiment, the cutting fluid injection direction is changed according to the purpose of cooling the cutting blade and the processing point, pushing away the cutting waste, and the like. Adjustments such as changing the injection direction according to the change of the height can be easily performed with the adjusting screw 60.

  The first cutting means 4 in the cutting apparatus 1 has been described above, but the second cutting means 5 has the same configuration. Therefore, in the cutting apparatus 1 according to this embodiment, the angle adjustment of the injection unit 53 that supplies the cutting fluid w from the radially outer side of the first and second cutting blades toward the peripheral edge of the cutting blade is performed for adjustment. This can be easily performed by simply rotating the screw 60.

(Other embodiments)
The embodiment of the present invention has been described above. However, the description and the drawings, which constitute a part of the disclosure of the above embodiment, do not limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

For example, in the above-described embodiment, a silicon wafer is used as a workpiece, but other semiconductor wafers such as gallium hirsode (GaAs) and silicon carbide (SiC) can be applied. In addition to the semiconductor wafer, the workpiece may be an adhesive member such as DAF (Die Attach Film) provided on the back surface of the wafer for chip mounting, or a semiconductor product package, ceramic, glass, sapphire (Al ₂ O ₃ ), Examples include various inorganic components, various electronic components such as liquid crystal display drivers, and various processing materials that require micron-order processing position accuracy.

  Moreover, in the said embodiment, although distribution | circulation of the cutting fluid of the main body block 40 and the rotation adjustment nozzle body 50 was made into the swivel joint structure, it is good also as a rotary joint structure in addition to this, rotation of the rotation adjustment nozzle body 50 Since the angle range is relatively small, it is of course possible to supply cutting fluid using a flexible pipe.

  Further, in the above embodiment, the cam plate 55 is used as the plate portion and the cam hole 56 is formed as the through hole. However, instead of the through hole, the cam plate 55 has a flange portion at the tip of the adjustment screw 60 as the shaft. A cam groove having a concave groove shape that is accommodated so as not to come out 64 is formed, and the adjustment screw 60 is rotated to relatively move the flange portion 64 along the longitudinal direction of the cam groove. It is good also as a structure which can adjust the angle of the rotation adjustment nozzle body 50 by sliding.

  As described above, the cutting apparatus according to the present invention is useful for cutting a semiconductor wafer, and is particularly suitable for a precision cutting apparatus such as a dicing apparatus.

1 Cutting device 2 Workpiece 3 Chuck table (holding means)
4 1st cutting means 5 2nd cutting means 6 1st cutting blade 8 1st blade cover 12 1st outer periphery cutting fluid supply means 13 2nd outer periphery cutting fluid supply means 40 Main body block 42 Nozzle support Plate part (nozzle support part)
43 Screw support plate for adjustment (shaft support)
48 Nozzle body rotation support shaft 49 Female thread part 50 Rotation adjustment nozzle body (nozzle)
51 Rotating part 53 Injecting part 55 Cam plate (plate part)
56 Cam hole (penetrating part)
60 Adjustment screw (shaft)
62 Male thread part 63 Through part 64 Flange part

Claims (1)

A holding means for holding the work, a cutting means for working the work held by the holding means with a disk-shaped cutting blade rotating around the Y direction as a rotation axis, and a cutting fluid for supplying a cutting fluid to the cutting blade A cutting device including a supply means,
The cutting fluid supply means includes
A nozzle having a jet part for jetting the cutting fluid from the radially outer peripheral side of the cutting blade toward the cutting blade, and a rotating part in which the jet part is formed;
A nozzle support portion for rotatably supporting the rotating portion of the nozzle about the Y direction as a rotation axis;
An angle adjustment unit for adjusting the rotation angle of the rotation unit,
The angle adjustment unit is
A plate portion formed on the outer periphery of the rotating portion, having a height radially outward with respect to the rotation of the rotating portion, and formed in a spiral with respect to the rotation axis of the rotating portion;
On the plate portion, a through hole formed in an arc shape with respect to the rotation axis of the rotating portion;
A through portion that penetrates the through hole of the plate member, a flange that is formed at both ends of the through portion and sandwiches the plate portion from both sides in a state in which the through portion penetrates the through hole, and a rotation direction in the Y direction A shaft formed with a male thread part to be
A shaft support portion in which a female screw portion screwed into the male screw portion is formed at a position corresponding to the through hole;
Have
By rotating the male screw portion screwed into the female screw portion of the shaft support portion and moving the flange portion forward and backward in the Y direction, the flange and the plate portion slide, and the rotating portion is Cutting device that rotates around Y direction.

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