JP2006187849A - Blade cover device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a blade cover device capable of easily adjusting the position of a jet port of a built-in outer peripheral nozzle in the axial direction of a spindle from the front face side of the blade cover device. <P>SOLUTION: The blade cover device 40 for covering a cutting blade mounted to the tip of the spindle is provided in a cutting device. The blade cover device 40 is provided with the outer peripheral nozzle 60, which is built in the blade cover device 40, arranged oppositely to the outer peripheral face of the cutting blade 22, and supplies a cutting fluid to the cutting blade 22, and a jet port position adjusting means 70 which moves the jet port 62 of the outer peripheral nozzle 60 in the axial direction (the Y-axis direction) of the spindle and can be operated from the front face side of the blade cover device 40. By such a constitution, an operator can adjust the position of the jet port 62 of the outer peripheral nozzle 60 in the axial direction of the spindle by operating the jet port position adjusting means 70 even when the outer peripheral nozzle 60 is built in the blade cover device 40. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a blade cover device that covers a cutting blade of a cutting device.

  In a precision cutting device, for example, a dicing device, a workpiece such as a semiconductor wafer is cut using a cutting blade attached to the tip of a spindle that rotates at high speed. In such a cutting apparatus, as shown in FIG. 7, a blade cover 140 is provided so as to cover the outer periphery of the cutting blade 122. The blade cover 140 is supplied with a pair of cutting fluids supplied from both side surfaces (front and back surfaces in the Y-axis direction) of the cutting blade 122 in order to cool the cutting blade 122 and processing points and to flush away the cutting waste. A side nozzle (blade cooler nozzle) 127 is provided.

  Further, when the cutting fluid cannot be sufficiently supplied by the side nozzle 127 alone, an outer peripheral nozzle (shower nozzle) 164 for supplying the cutting fluid to the outer peripheral surface of the cutting blade 122 is additionally installed. The outer peripheral nozzle 164 is usually disposed in front of the cutting direction so as to face the outer peripheral surface of the cutting blade. When this outer peripheral nozzle 164 is additionally installed, a method of attaching the outer peripheral nozzle unit 160 to the blade cover 140 is generally used.

  When the outer peripheral nozzle unit 160 is externally attached, the outer peripheral nozzle unit 160 is fixed to the blade cover 140 with bolts 150 from the side of the blade cover 140 as shown in FIG. In this fixing method, the position in the spindle axial direction (Y-axis direction) of the injection port 162 of the outer peripheral nozzle 164 needs to be accurately matched with the position of the outer peripheral surface of the cutting blade 122. If the position of the injection port 162 and the position of the outer peripheral surface of the cutting blade 122 do not match exactly, the cooling effect by the outer peripheral nozzle 164 is reduced, and there is a problem that large chipping occurs on the workpiece. . Therefore, the bolt through hole of the outer peripheral nozzle unit 160 is a long hole parallel to the Y-axis direction so that the position can be adjusted in the Y-axis direction. The outer peripheral nozzle unit 160 is fixed with bolts 150 from the side surface side of the blade cover 140 after fine adjustment so that is positioned at an appropriate Y-axis position.

  However, in the case of a cutting machine having a small installation area, as shown in FIG. 7, an obstacle 111 such as a wall of the cutting machine body or a cover exists in the vicinity of the blade cover 140. There is only a very narrow space. For this reason, a special tool is required for the work of attaching the outer peripheral nozzle unit 160, and the work is difficult. Therefore, there is a problem that it cannot be attached unless an operator who is skilled to some extent.

  In order to solve this problem, as described in Patent Documents 1 and 2, a configuration in which the outer peripheral nozzle unit and the blade cover are integrated and the outer peripheral nozzle is built in the blade cover is conceivable. This is because by incorporating the outer peripheral nozzle in the blade cover in this way, the operator's work of attaching the outer peripheral nozzle unit later becomes unnecessary.

JP 2003-59864 A Japanese Patent Laid-Open No. 11-114949

  However, in the conventional blade cover with the built-in outer peripheral nozzle, for example, the outer peripheral surface of the cutting blade and the injection port of the outer peripheral nozzle are accurately aligned at the time of initial setting, and the outer peripheral nozzle is built-in. Even when different types of cutting blades are used, there is a problem in that the position of the outer nozzle nozzle and the outer peripheral surface of the cutting blade in the Y-axis direction are shifted after the cutting blade is replaced. More specifically, the cutting apparatus requires a cutting accuracy of several μm level, but it is difficult to satisfy the quality of the cutting blade and the mount member for fixing the cutting blade. For this reason, thickness variation due to the tightening force of the mount nut and the quality of the cutting blade, and furthermore, it is difficult to produce a tapered surface that joins the spindle and mount member with high precision, and errors are likely to occur. For this reason, when the cutting blade was replaced, the Y-axis direction position of the nozzle outlet of the outer peripheral nozzle and the outer peripheral surface of the cutting blade inevitably shifted. As a result, the cooling effect of the cutting fluid sprayed from the outer peripheral nozzle is reduced, and chipping may occur in the workpiece.

  In addition, in the blade cover with the outer peripheral nozzle unit attached, the entire position of the outer peripheral nozzle unit 160 is finely adjusted in the Y-axis direction. In such an adjustment method, there has been a problem that the position of the injection port of the outer peripheral nozzle cannot be adjusted in the Y-axis direction.

  Furthermore, if the position adjustment operation of the injection nozzle of the outer peripheral nozzle is performed from the side of the blade cover, a special tool is required and the operation becomes difficult. For this reason, there has been a demand for a blade cover that can easily adjust the position of the injection nozzle of the outer peripheral nozzle from the front side of the blade cover.

  Accordingly, the present invention has been made in view of such problems, and an object of the present invention is to provide a nozzle cover of the outer peripheral nozzle from the front side of the blade cover apparatus in the blade cover apparatus incorporating the outer peripheral nozzle. It is an object of the present invention to provide a new and improved blade cover device capable of easily adjusting its position in the spindle axial direction.

  In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided a blade cover device that covers a cutting blade attached to the tip of a spindle: An outer peripheral nozzle that is disposed opposite to the nozzle and supplies the cutting fluid to the cutting blade; an injection port that can be operated from the front side in the axial direction of the spindle of the blade cover device that moves the position of the injection port of the outer peripheral nozzle in the axial direction of the spindle A blade cover device comprising: a position adjusting means;

  With such a configuration, even when the outer peripheral nozzle is built in the blade cover device, the operator can adjust the position of the outer nozzle in the spindle axis direction by operating the outlet position adjusting means. For this reason, even when the cutting blade is replaced, the position of the injection nozzle of the outer peripheral nozzle can be adjusted to the position of the cutting blade, so that the cooling effect by the cutting fluid from the outer peripheral nozzle is improved and a suitable state is achieved. You can perform cutting. Therefore, chipping does not occur on the workpiece, and the machining quality is improved.

  In addition, since the operator can operate the injection port position adjusting means from the front side of the blade cover device, the position of the injection port of the outer peripheral nozzle can be adjusted easily and quickly in the axial direction of the spindle without using a special tool. Can do. The front surface of the blade cover device is the surface on the near side of the spindle axis direction of the blade cover device (the surface on the operator side). On the other hand, the back surface of the blade cover device is a surface on the back side in the spindle axial direction of the blade cover device (surface opposite to the operator).

  Further, the injection port position adjusting means moves the injection port of the outer peripheral nozzle in the axial direction of the spindle by elastically deforming a portion in which the outer peripheral nozzle of the blade cover device is built in the axial direction of the spindle. Thereby, the structure of the injection port position adjusting means can be simplified. In addition, it is preferable that the material of the part in which the outer peripheral nozzle of the blade cover device is built is preferably a material that is elastically deformable, for example, a synthetic resin such as plastic.

  Further, the upper side of the blade cover device is integrally formed, and the lower side of the blade cover device is arranged in the axial direction of the spindle with a blade cover front portion having a built-in outer peripheral nozzle, a blade cover front portion and a predetermined portion. The nozzle position adjusting means passes through the blade cover front part in the axial direction of the spindle from the front side of the blade cover device, and is separated from the blade cover rear part. A holding bolt that engages with the front surface of the blade cover, and is inserted into the front portion of the blade cover in the axial direction of the spindle from the front side of the blade cover device. A retaining bolt and / or a retaining bolt and / or an abutting bolt rotated from the front side of the blade cover device. The position of the injection port of the nozzle may be moved in the axial direction of the spindle.

  With this configuration, the butting bolt and the holding bolt can be operated from the front side of the blade cover device. By tightening the abutting bolt and screwing it deeply into the front part of the blade cover, and / or loosening the holding bolt and screwing it shallowly into the rear part of the blade cover, the front part of the blade cover is axially front side of the spindle. It is possible to move the nozzle of the outer peripheral nozzle to the front side in the axial direction of the spindle. Also, loosen the abutting member and screw it into the front of the blade cover shallowly, and / or tighten the holding bolt and screw it deeply into the rear of the blade cover, so that the front of the blade cover is back in the axial direction of the spindle. It is possible to move the nozzle outlet of the outer peripheral nozzle to the back side in the axial direction of the spindle. In this way, the position of the injection port of the outer peripheral nozzle can be easily adjusted from the front side of the blade cover device by using the injection port position adjusting means having a relatively simple structure.

  As described above, according to the present invention, even if the outer peripheral nozzle is built in the blade cover device, the position of the injection port of the outer peripheral nozzle can be adjusted in the spindle axial direction. Even so, the position of the injection port of the outer peripheral nozzle can be matched with the position of the outer peripheral surface of the cutting blade. For this reason, the cooling effect by the cutting fluid injected from the outer peripheral nozzle can be improved, and cutting can be executed in a suitable state. Therefore, chipping can be prevented from occurring on the workpiece due to the cutting process, and the processing quality can be improved.

  Further, since the operator can operate the injection port position adjusting means from the front side of the blade cover device, the position of the injection port of the outer peripheral nozzle can be easily adjusted without requiring a special tool.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
First, based on FIG. 1, the whole structure of the dicing apparatus 10 which is an example of the cutting device concerning the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment.

  As shown in FIG. 1, the dicing apparatus 10 includes, for example, a cutting unit 20 that is a cutting unit that cuts a workpiece such as a semiconductor wafer, and a chuck table that is a workpiece holding unit that holds the workpiece. (Not shown), a cutting unit moving mechanism (not shown), and a chuck table moving mechanism (not shown).

  The cutting unit 20 includes a cutting blade 22 attached to a spindle. The cutting unit 20 cuts the workpiece to form an extremely thin kerf (cut groove) by cutting the workpiece 22 while rotating the cutting blade 22 at a high speed.

  The chuck table is, for example, a disk-shaped table whose upper surface is substantially flat, and is provided with a vacuum chuck (not shown) on the upper surface. On the chuck table, for example, a workpiece supported by a frame (not shown) is placed via a wafer tape (not shown). The chuck table stably holds the workpiece by vacuum suction.

  The cutting unit moving mechanism moves the cutting unit 20 in the Y-axis direction. The Y-axis direction is a horizontal direction orthogonal to the cutting direction (X-axis direction), and coincides with the axial direction of the spindle extending in the cutting unit 20. By moving the cutting unit 20 in the Y-axis direction, the cutting edge of the cutting blade 22 can be aligned with the cutting position (cutting line) of the workpiece. Further, when exchanging the cutting blade 22 or adjusting the nozzle position of the outer peripheral nozzle described later, the cutting unit 20 is moved forward in the Y-axis direction (operator side), that is, the front side (front side) of the dicing apparatus 10. Thus, the cutting unit 20 can be arranged at a position where the operator can easily work. Further, the cutting unit moving mechanism moves the cutting unit 20 also in the Z-axis direction (vertical direction). Thereby, the cutting depth of the cutting blade 22 with respect to a workpiece can be adjusted.

  The chuck table moving mechanism reciprocates the chuck table holding the workpiece in the cutting direction (X-axis direction) at the time of cutting and causes the cutting edge of the cutting blade 22 to act on the workpiece along a linear locus. .

  The dicing apparatus 10 having such a configuration moves a cutting unit 20 and a chuck table relative to each other while cutting the cutting blade 22 that rotates at a high speed into the work piece, thereby providing a plurality of work pieces arranged in a lattice pattern. Cut the cutting line. Thus, the workpiece can be diced and divided into a plurality of chips.

  By the way, the dicing apparatus 10 as shown in FIG. 1 is devised so as to reduce the installation area, and has a relatively long structure. For this reason, since the walls 11 covering the cutting unit 20 are arranged in the vicinity of the cutting unit 20 on both sides in the X-axis direction of the cutting unit 20, there is only a narrow space on the side of the cutting unit 20. . Therefore, it is difficult for the operator to access the cutting unit 20 from the side surface side (both sides in the X-axis direction) of the cutting unit 20 and perform various adjustments and maintenance operations. Therefore, in the cutting unit 20 according to the present embodiment, the operator accesses from the front side (front side in the Y-axis direction) of the cutting unit 20 and sets the position of the nozzle of the outer peripheral nozzle in the axial direction of the spindle (Y-axis direction). It is characterized in that it has been improved so that it can be adjusted. The details of the injection port position adjusting means will be described later.

  Next, based on FIG. 2, the structure of the cutting unit 20 concerning this embodiment is demonstrated in detail. FIG. 2 is a perspective view showing the cutting unit 20 according to the present embodiment.

  As shown in FIG. 2, the cutting unit 20 mainly includes, for example, a flange 21, a cutting blade 22, a nut 24, a spindle 25, a spindle housing 26, a side nozzle 27, and a blade cover device 40. Prepare.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a substantially ring shape. The cutting blade 22 is attached to the tip portion 25a of the spindle 25 by, for example, a flange 21 and a nut 24. The cutting blade 22 according to the present embodiment is configured by, for example, a so-called washer blade, and is configured to be pivotally attached to the spindle 25 by sandwiching both sides thereof with flanges 21 and fixing with nuts 24. However, the cutting blade 22 is not limited to such an example, and the cutting blade 22 is configured integrally with a cutting blade portion that is a cutting grindstone disposed on the outer peripheral portion and a base portion for pivotally mounting the cutting blade portion to the spindle 25. Hub blades may also be configured.

  The spindle 25 is a rotating shaft for transmitting, for example, a rotational driving force of a motor (not shown) to the cutting blade 22, and the mounted cutting blade 22 can be rotated at a high speed of, for example, 30,000 rpm. it can. Most of the spindle 25 is covered with the spindle housing 26, but the tip 25a is exposed from the spindle housing 26, and the cutting blade 22 and the like are mounted on the tip 25a. The spindle 25 extends in the Y-axis direction orthogonal to the cutting direction (X-axis direction).

  The spindle housing 26 is a housing provided so as to cover the outer periphery of the spindle 25. The spindle housing 26 rotatably supports the spindle 25 by an air bearing (not shown) provided inside.

  The side nozzle 27 is attached to the blade cover device 40, for example, and is disposed adjacent to the lower portion of the side surface of the cutting blade 22 (referred to as a flat surface on the Y-axis direction side of the cutting blade 22). Supply nozzle. The side nozzle 27 is a general term for a front nozzle 27a disposed on the front side of the cutting blade 22 and a back nozzle 27b disposed on the back side of the cutting blade 22, as shown in FIG. The side nozzle 27 injects a cutting fluid (for example, cutting water) toward the lower portion of the side surface of the cutting blade 22 and the machining point. By supplying the cutting fluid in this way, the cutting blade 22 and the processing point can be cooled, and chipping can be prevented from occurring on the workpiece during the cutting process. Further, the cutting waste generated by the cutting process can be washed away by supplying the cutting fluid.

  The blade cover device 40 is disposed so as to cover the outer periphery of the cutting blade 22 and is fixed to the tip end portion of the spindle housing 26. The blade cover device 40 protects the cutting blade 22 and prevents the cutting fluid, cutting waste, broken blade pieces, and the like accompanying the cutting from scattering outside the cutting unit 20. As will be described in detail below, the blade cover device 40 incorporates an outer peripheral nozzle as a cutting fluid supply nozzle, and is provided with injection port position adjusting means for adjusting the position of the injection port of the outer peripheral nozzle. Characterized by points.

  Next, the blade cover device 40 according to the present embodiment will be described in detail with reference to FIGS. FIG. 3 is a front view (a) and a right side view (b) showing the blade cover device 40 according to the present embodiment.

  As shown in FIGS. 2 and 3, the blade cover device 40 is roughly divided, for example, a fixed base portion 44 fixed to the spindle housing 26 and covering the outer periphery of the cutting blade 22, and an upper portion of the fixed base portion 44. And a moving cover portion 42 slidably mounted in the X-axis direction.

  The fixed base portion 44 is a substantially rectangular parallelepiped member made of a synthetic resin such as plastic, and is fixed to the front surface of the spindle housing 26. A substantially circular recess 442 having a diameter slightly larger than the diameter of the cutting blade 22 is formed in a recessed portion at the center of the front surface (surface on the front side in the Y-axis direction) of the fixed base portion 44. By disposing the cutting blade 22 in the recess 442, a portion of the outer periphery of the cutting blade 22 excluding the lower portion to be cut into the workpiece is covered with the fixed base portion 44. As a result, the fixed base portion 44 can protect the cutting blade 22 and prevent scattering of cutting fluid, cutting waste, and the like during cutting.

  Further, as shown in FIG. 3, an outer peripheral nozzle 60 is built in the fixed base portion 44. The outer peripheral nozzle 60 is disposed so as to face the outer peripheral surface of the cutting blade 22, and is a cutting fluid supply nozzle (shower nozzle) that injects the cutting fluid from the front in the cutting direction (X-axis positive direction) to the outer periphery of the cutting blade 22. ).

  The outer peripheral nozzle 60 is formed inside a part of the fixed base part 44 on the front side in the cutting direction (blade cover front part 46 described later). The outer peripheral nozzle 60 includes, for example, a substantially circular injection port 62 that injects the cutting fluid, and a flow path 64 that communicates with the injection port 62. The injection port 62 is formed at a position facing the outer peripheral surface of the cutting blade 22 on the side surface on the front side in the cutting direction of the concave portion 442 of the fixed base portion 44. The flow path 64 is formed to extend in the vertical direction inside the blade cover front portion 46 of the fixed base portion 44, and guides the cutting fluid supplied from the outside to the injection port 62.

  Further, a hose connecting portion 52 is provided on one upper side of the fixed base portion 44, and a cutting fluid supply means (not shown) provided outside the blade cover device 40 is provided in the hose connecting portion 52. The liquid supply hose 521 communicated with the liquid supply hose 521 is connected. With this configuration, the cutting fluid supplied via the liquid supply hose 521 passes through the flow path 64 of the outer peripheral nozzle 60 formed inside the fixed base portion 44 and passes from the injection port 62 to the outer peripheral surface of the cutting blade 22. It is injected towards.

  As described above, in the blade cover device 40 according to the present embodiment, the outer peripheral nozzle unit is not externally attached to the fixed base portion 44 as in the prior art, but the injection port 62 and the flow path are formed in the fixed base portion 44 itself. By forming 64, the outer peripheral nozzle 60 is built-in (in other words, the outer peripheral nozzle unit and the fixed base portion 44 are integrated). Thereby, the number of parts of the blade cover device 40 can be reduced, and the configuration for installing the outer peripheral nozzle 60 can be simplified.

  Further, as shown in FIG. 2, the movable cover portion 42 is made of, for example, a metal such as stainless steel, and the entire upper surface of the fixed base portion 44 and upper portions of the front and back surfaces of the fixed base portion 44 in the Y-axis direction. And the upper portion of one side surface of the fixed base portion 44 in the X-axis direction. The movable cover portion 42 has a long hole 425 extending in the X-axis direction on the upper surface thereof, and the fixed base portion 44 is inserted into the fixed base portion 44 by a clamp bolt 53 inserted into the long hole 425 and screwed into the fixed base portion 44. It is fixed against. With this configuration, the movable cover portion 42 can be slid in the X-axis direction with respect to the fixed base portion 44 by loosening the clamp bolt 53.

  Further, as shown in FIG. 3, the two side nozzles 27 (the front nozzle 27a and the back nozzle 27b) are attached to the lower part on one side of the moving cover portion. Further, for example, two hose connecting portions 51 are provided on one side upper portion of the moving cover portion 42, and a liquid supply hose 511 communicated with the cutting fluid supply means is connected to each hose connecting portion 51. Is done. With such a configuration, the cutting fluid supplied via the liquid supply hose 511 reaches each side nozzle 27 through the flow path 426 formed inside the movable cover portion 42, and from each side nozzle 27 to the cutting blade 22. It is injected toward the lower part of both side surfaces (front and back) and the processing point.

  Next, the nozzle position adjusting means 70 for adjusting the position of the nozzle 62 of the outer peripheral nozzle 60 in the blade cover device 40 having the above configuration will be described with reference to FIGS. FIG. 4 is a partially enlarged cross-sectional view taken along the line AA in FIG.

  The injection port position adjusting means 70 according to the present embodiment elastically deforms the portion of the blade cover device 40 where the outer peripheral nozzle 60 is formed in the axial direction of the spindle 25 (hereinafter referred to as “Y-axis direction”). The nozzle 42 of the outer peripheral nozzle 60 is moved in the Y-axis direction to adjust the position so as to match the position of the outer peripheral surface of the cutting blade 22.

  As shown in FIGS. 2 to 4, for example, the injection port position adjusting means 70 includes a blade cover front portion formed by dividing the lower side of the fixed base portion 44 of the blade cover device 40 in the Y-axis direction. 46 and a blade cover rear portion 48, a holding bolt 74, and a butting bolt 76.

  As shown in FIGS. 2 and 3B, the fixed base portion 44 of the blade cover device 40 has at least a portion on the lower side including a portion where the jet nozzle 62 of the outer peripheral nozzle 60 is disposed in a vertical direction. The slit-like gap 72 extends to divide the blade cover front portion 46 located on the front side of the blade cover device 40 and the blade cover rear portion 48 located on the back side of the blade cover device 40. Among these, the outer peripheral nozzle 60 is built in the blade cover front part 46.

  The gap 72 is formed, for example, by slitting the lower surface of the fixed base portion 44 to a predetermined height in the vertical direction. The formation position of the gap 72 in the Y-axis direction is, for example, the center position of the fixed base portion 44 in the Y-axis direction, and the width of the gap 72 in the Y-axis direction is the position of the injection port 32 of the outer peripheral nozzle 60. It is determined according to the adjustment width (for example, about 1 mm at the maximum). Further, the length of the gap 72 in the Z-axis direction is a length that reaches at least the upper part of the nozzle 32 of the outer peripheral nozzle 60 from the lower surface of the fixed base portion 44, and the blade cover front part divided by the gap 72 The length 46 is determined to be sufficiently elastically deformable in the Y-axis direction.

  Further, a circular widening hole 721 having a diameter larger than the width of the gap 72 in the Y-axis direction is formed at the upper end portion of the gap 72. When the blade cover front portion 46 is elastically deformed in the Y-axis direction with respect to the blade cover rear portion 48 by the circular widening hole 721, stress at the upper end portion of the gap 72 is relieved. The base part 44 can be prevented from being damaged, and the blade cover front part 46 can be smoothly elastically deformed in the Y-axis direction.

  As shown in FIG. 4, the holding bolt 74 penetrates the bolt passage hole 462 of the blade cover front portion 46 in the Y-axis direction from the front side of the blade cover device 40 (that is, the front surface 461 side of the blade cover front portion 46). Then, it is screwed into the female screw hole 482 of the blade cover rear portion 48. A washer 741 is interposed between the head 74 a of the holding bolt 74 and the front surface 461 of the blade cover front portion 46 so that the front surface 461 of the blade cover front portion 46 is not damaged by the rotation of the holding bolt 74. It has become.

  The bolt through hole 462 of the blade cover front part 46 is formed so as to penetrate the blade cover front part 46 in the Y-axis direction. The inner diameter of the bolt through hole 462 is larger than the diameter of the male screw portion 74 b of the holding bolt 74. For this reason, the male screw portion 74b of the holding bolt 74 and the blade cover front portion 46 are not engaged, but the blade cover front portion 46 is engaged toward the blade cover rear portion 48 side by the head portion 74a of the holding bolt 74. Stopped.

  On the other hand, as shown in FIG. 4, the abutting bolt 76 extends from the front surface side of the blade cover device 40 (that is, the front surface 461 side of the blade cover front portion 46) to the female screw hole 464 of the blade cover front portion 46. Inserted in the direction. The male screw portion 76b of the abutting bolt 76 is screwed into a female screw hole 464 formed through the blade cover front portion 46 in the Y-axis direction.

  Further, the front end portion 76 c of the abutting bolt 76 is abutted against the front surface 481 of the blade cover rear portion 48 in the gap 72. As shown in FIG. 4, even if the front end portion 76c of the abutting bolt 76 is abutted against the front surface 481 of the blade cover rear portion 48 in a state where the blade cover front portion 46 is not elastically deformed, the head of the abutting bolt 76 is obtained. The length of the male screw portion 76b is adjusted so that the portion 76a and the front surface 461 of the blade cover front portion 46 are separated from each other by a predetermined distance. For this reason, it is possible to rotate the butting bolt 76 in the fastening direction from the state of FIG.

  Using the holding bolt 74 and the abutting bolt 76 configured as described above, the position of the injection port 62 can be adjusted by moving it back and forth in the Y-axis direction.

  Specifically, when the position of the injection port 62 is moved rearward in the Y-axis direction, the abutting bolt 76 is rotated in the loosening direction, and the male thread portion 76b of the abutting bolt 76 is moved to the female portion of the blade cover front portion 46. The screw bolt 464 is screwed shallowly and the holding bolt 74 is rotated in the fastening direction so that the male screw portion 74 b of the holding bolt 74 is screwed deeply into the female screw hole 482 of the blade cover rear portion 48. As a result, the blade cover front part 46 is pressed rearward in the Y-axis direction by the holding bolt 74, so that the blade cover front part 46 is elastically deformed rearward in the Y-axis direction so as to approach the blade cover rear part 48. At this time, since there is a gap 72 between the blade cover front part 46 and the blade cover rear part 48, the blade cover front part 46 can be elastically deformed toward the blade cover rear part 48 by the width of the gap 72. In this way, the injection hole 62 of the outer peripheral nozzle 60 provided in the blade cover front part 46 can be moved to the back side (Y-axis direction rear side) of the blade cover device 40.

  On the other hand, when the position of the injection port 62 is moved forward in the Y-axis direction, the abutting bolt 76 is rotated in the fastening direction, and the male threaded portion 76b of the abutting bolt 76 is replaced with the female threaded hole 464 in the blade cover front portion 46. Then, the holding bolt 74 is rotated in the loosening direction, and the male screw portion 74b of the holding bolt 74 is screwed shallowly into the female screw hole 482 of the blade cover rear portion 48. As a result, the front end portion 76 c of the abutting bolt 76 presses the front surface 481 of the blade cover rear portion 48, so that the blade cover front portion 46 is elastically deformed forward in the Y-axis direction so as to be separated from the blade cover rear portion 48. Thereby, the injection hole 62 of the outer peripheral nozzle 60 provided in the blade cover front part 46 can be moved to the blade cover device 40 front side (front in the Y-axis direction).

  In the case of fine adjustment, it is possible to move the injection hole 62 of the outer peripheral nozzle 60 to some extent forward / backward in the Y-axis direction only by rotating either the holding bolt 74 or the butting bolt 76. .

(Second Embodiment)
Next, a blade cover device 40 according to a second embodiment of the present invention will be described. The blade cover device 40 according to the second embodiment differs from the blade cover device 40 according to the first embodiment described above only in the configuration of the injection port position adjusting means 70 in the following points. The other functional configurations are substantially the same as those in the first embodiment, and a detailed description thereof will be omitted.

  Below, based on FIG.5 and FIG.6, the blade cover apparatus 40 concerning 2nd Embodiment is demonstrated. FIG. 5 is a front view (a) and a right side view (b) showing the blade cover device 40 according to the second embodiment. FIG. 6 is a partially enlarged cross-sectional view taken along line BB in FIG.

  As shown in FIGS. 5 and 6, the fixed base portion 44 of the blade cover device 40 is perpendicular to the front blade cover front portion 46 in which the outer peripheral nozzle 60 is built and the rear blade cover rear portion 48. The blade cover front part 46 and the blade cover rear part 48 are configured as separate parts. The blade cover front part 46 and the blade cover rear part 48 thus completely separated are connected and fixed by, for example, two connecting bolts 78 with a spacer 79 having a predetermined thickness interposed therebetween.

  As shown in FIG. 6, the connecting bolt 78 is inserted in the Y-axis direction from the front side of the blade cover device 40 (that is, the front surface 461 side of the blade cover front part 46), and the blade cover front part 46 and the spacer 79 are connected. It penetrates to the blade cover rear part 48. The male screw portion 78 b of the connecting bolt 78 is screwed into the female screw hole 466 of the blade cover front portion 46 and the female screw hole 486 of the blade cover rear portion 48, and the head portion 78 a of the connecting bolt 78 is connected to the blade cover front portion 46. The front 461 side is locked. In this way, the connecting bolt 78 connects and fixes the divided blade cover front part 46 and the blade cover rear part 48.

  Between the blade cover front part 46 and the blade cover rear part 48 connected and fixed in this manner, a spacer 79 is interposed on the upper side from the vicinity of the connection bolt 78. For this reason, the blade cover front part 46 and A gap 72 corresponding to the width in the Y-axis direction of the spacer 79 exists on the lower side between the blade cover rear portion 48. The presser bolts 74 and the abutting bolts 76 described above are disposed at locations where the gaps 72 exist. Since the holding bolt 74 and the abutting bolt 76 have substantially the same functional configuration as that of the first embodiment, detailed description thereof will be omitted.

  As described above, in the injection port position adjusting means 70 according to the second embodiment, the slit base 72 is partially formed by forming the slit-like gap 72 in the fixed base portion 44 as in the first embodiment. The fixed base portion 44 is completely divided into a blade cover front portion 46 and a blade cover rear portion 48, and a spacer 79 is interposed between them with a connecting bolt 78. By connecting, a gap 72 necessary for elastic deformation of the blade cover front portion 46 is formed.

  Even in such a structure, the blade cover front portion 45 is elastically deformed in the Y-axis direction by fastening / relaxing the holding bolt 74 and / or the abutting bolt 76 as in the first embodiment. Thus, the position of the injection port 62 of the outer peripheral nozzle 60 can be adjusted in the Y-axis direction. Further, by separating the blade cover front portion 46 and the blade cover rear portion 48 into separate parts, the fixed base portion 44 provided with the gap 72 can be manufactured relatively easily.

  The injection port position adjusting means 70 provided in the outer peripheral nozzle built-in type blade cover device 40 according to the first and second embodiments has been described above. By using the injection port position adjusting means 70, the position of the injection port 62 of the outer peripheral nozzle 60 can be finely adjusted in the Y-axis direction so that it can be easily and accurately aligned with the outer peripheral surface of the cutting blade 22.

  Specifically, when the injection port 62 of the outer peripheral nozzle 60 is moved to the back side (the right side in FIG. 4) of the blade cover device 40, the abutting bolt 76 is moved using a general tool such as a hexagon wrench. Loosen and tighten the holding bolt 74. As a result, the blade cover front portion 46 in which the outer peripheral nozzle 60 is incorporated is elastically deformed rearward in the Y-axis direction, and the injection port 62 of the outer peripheral nozzle 60 is moved rearward in the Y-axis direction so as to be positioned on the outer peripheral surface of the cutting blade 22. Can be combined.

  On the other hand, when the injection port 62 of the outer peripheral nozzle 60 is moved to the front side (left side in FIG. 4) of the blade cover device 40, the holding bolt 74 is loosened by using the above general tool, and the abutting bolt 76 is moved. Is concluded. Thereby, the blade cover front portion 46 is elastically deformed forward in the Y-axis direction, and the injection port 62 of the outer peripheral nozzle 60 is moved forward in the Y-axis direction to be aligned with the outer peripheral surface of the cutting blade 22.

  Therefore, when the cutting blade 22 is replaced due to damage or wear, the position of the injection port 62 of the outer peripheral nozzle 60 can be accurately adjusted to the outer peripheral position of the cutting blade 22 by the injection port position adjusting means 70. . For this reason, since the cutting fluid can be supplied from the outer peripheral nozzle 60 to an appropriate position to improve the cooling effect of the cutting blade 22 and the processing point, occurrence of chipping in the workpiece can be prevented.

  In this position adjustment, the operator can operate from the front side of the blade cover device 40 and operate the injection port position adjusting means 70 (fastening / relaxing the holding bolt 74 and the abutting bolt 76). For this reason, the operator can easily and quickly adjust the position of the injection port 62 of the outer peripheral nozzle 60 in the Y-axis direction without using a special tool, and does not require skill of work.

  Further, since the outer peripheral nozzle 60 is built in the blade cover device 40, the work of an operator for retrofitting a conventional outer peripheral nozzle unit is not required, and the structure of the blade cover device 40 can be simplified.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this example. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are of course within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the dicing apparatus 10 has been described as an example of the cutting apparatus, but the present invention is not limited to such an example. For example, as long as it is a device that cuts the workpiece using the cutting blade 22 that rotates at high speed by the spindle 25, for example, various cutting devices that perform cutting processing other than dicing processing may be used.

  In the above embodiment, the blade cover device 40 is configured by the moving cover portion 42 and the fixed base portion 44. However, the present invention is not limited to such an example, and the moving cover portion 42 and the fixed base portion. 44 may be integrated, or the side nozzle 27 may be installed on the fixed base portion 44 and the moving cover portion 42 may be omitted.

  Moreover, in the said embodiment, although the material of the fixed base part 44 of the blade cover apparatus 40 was synthetic resins, such as a plastics, this invention is not limited to this example. The material of the fixed base portion 44 may be any material such as metal as long as the blade cover front portion 46 in which the outer peripheral nozzle 60 is formed can be elastically deformed by the maximum position adjustment width. It's okay.

  Further, in the blade cover device 40 according to the above embodiment, the holding bolt 74 and the abutting bolt 76 are arranged adjacent to each other in the vertical direction so that the holding bolt 74 is located on the upper side in the Z-axis direction. Is not limited to such an example. For example, the holding bolt 74 and the butting bolt 76 may be arranged upside down, or may be arranged side by side in the horizontal direction or in the oblique direction.

  In the above embodiment, one holding bolt 74 and one abutting bolt 76 are installed, but the present invention is not limited to this example, and a plurality of holding bolts 74 and abutting bolts 76 may be installed.

  In the above embodiment, both the holding bolt 74 and the butting bolt 76 are rotated in the fastening / relaxation direction to adjust the position of the injection port 62 in the Y-axis direction. However, the present invention is not limited to this example. For example, by rotating either the holding bolt 74 or the abutting bolt 76 in the fastening / relaxation direction, the position of the injection port 62 can be moved in the Y-axis direction to some extent for fine adjustment.

  The present invention is applicable to a blade cover device that covers a cutting blade in a cutting device.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a perspective view which shows the cutting unit concerning the embodiment. It is the front view (a) and right view (b) which show the blade cover apparatus concerning the embodiment. It is a partial expanded sectional view in the AA line of Fig.3 (a). It is the front view (a) and right view (b) which show the blade cover apparatus concerning the 2nd Embodiment of this invention. It is the elements on larger scale in the BB line of Fig.5 (a). It is a front view which shows the conventional blade cover apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10: Dicing apparatus 20: Cutting unit 22: Cutting blade 25: Spindle 27: Side nozzle 40: Blade cover apparatus 42: Moving cover part 44: Fixed base part 46: Blade cover front part 48: Blade cover rear part 60: Outer peripheral nozzle 62: Injecting port 70: Injecting port position adjusting means 72: Clearance 74: Holding bolt 76: Abutting bolt 78: Connecting bolt

Claims (2)

A blade cover device that covers a cutting blade mounted at the tip of a spindle, comprising:
An outer peripheral nozzle built in the blade cover device, disposed opposite to the outer peripheral surface of the cutting blade, and supplying cutting fluid to the cutting blade;
Spray port position adjusting means operable to move from the front side in the axial direction of the spindle of the blade cover device to move the position of the spray port of the outer peripheral nozzle in the axial direction of the spindle;
A blade cover device comprising: The upper side of the blade cover device is integrally formed, and the lower side of the blade cover device is formed in the axial direction of the spindle, a blade cover front portion in which the outer peripheral nozzle is built, a blade cover front portion, It is divided into the blade cover rear part with a predetermined gap,
The injection port position adjusting means includes:
A holding bolt that passes through the blade cover front portion in the axial direction of the spindle from the front side of the blade cover device and is screwed with the blade cover rear portion;
An abutting bolt that is inserted into the front portion of the blade cover in the axial direction of the spindle from the front side of the blade cover device and is screwed with the front portion of the blade cover, and a tip of which abuts against the front surface of the rear portion of the blade cover; ;
With
2. The position of the injection port of the outer peripheral nozzle is moved in the axial direction of the spindle by rotating the holding bolt and / or the abutting bolt from the front side of the blade cover device. The blade cover device described in 1.

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