JP2011516892A5 - - Google Patents

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Publication number
JP2011516892A5
JP2011516892A5 JP2011504197A JP2011504197A JP2011516892A5 JP 2011516892 A5 JP2011516892 A5 JP 2011516892A5 JP 2011504197 A JP2011504197 A JP 2011504197A JP 2011504197 A JP2011504197 A JP 2011504197A JP 2011516892 A5 JP2011516892 A5 JP 2011516892A5
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JP
Japan
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ray
optical system
source
microfocus
ray irradiation
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JP2011504197A
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English (en)
Japanese (ja)
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JP2011516892A (ja
JP5531009B2 (ja
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Priority claimed from PCT/US2009/040178 external-priority patent/WO2009126868A1/en
Publication of JP2011516892A publication Critical patent/JP2011516892A/ja
Publication of JP2011516892A5 publication Critical patent/JP2011516892A5/ja
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JP2011504197A 2008-04-11 2009-04-10 ポリキャピラリ光学系を有するｘ線発生装置 Active JP5531009B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4414808P 2008-04-11 2008-04-11
US61/044,148 2008-04-11
PCT/US2009/040178 WO2009126868A1 (en) 2008-04-11 2009-04-10 X-ray generator with polycapillary optic

Publications (3)

Publication Number Publication Date
JP2011516892A JP2011516892A (ja) 2011-05-26
JP2011516892A5 true JP2011516892A5 (OSRAM) 2014-04-10
JP5531009B2 JP5531009B2 (ja) 2014-06-25

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ID=40834348

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JP2011504197A Active JP5531009B2 (ja) 2008-04-11 2009-04-10 ポリキャピラリ光学系を有するｘ線発生装置

Country Status (5)

Country Link
US (2) US7933383B2 (OSRAM)
EP (1) EP2263238B1 (OSRAM)
JP (1) JP5531009B2 (OSRAM)
CA (1) CA2720776C (OSRAM)
WO (1) WO2009126868A1 (OSRAM)

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JP5531009B2 (ja) * 2008-04-11 2014-06-25 リガク イノベイティブ テクノロジーズ インコーポレイテッド ポリキャピラリ光学系を有するｘ線発生装置
FR2958858B1 (fr) * 2010-04-15 2012-06-29 Joel Kerjean Dispositif de guidage de photons pour appareil de radiotherapie
JP2013528804A (ja) * 2010-05-19 2013-07-11 シルヴァー，エリック，エイチ ハイブリッドｘ線光学機器および方法
CN102543243B (zh) * 2010-12-28 2016-07-13 Ge医疗系统环球技术有限公司 集成毛细管式平行x射线聚焦透镜
JP6175436B2 (ja) * 2011-08-06 2017-08-02 リガク イノベイティブ テクノロジーズ インコーポレイテッド Ｘ線光子及び中性子を導くナノチューブ素材の装置
CN103137233A (zh) * 2011-12-02 2013-06-05 佳能株式会社 X射线波导和x射线波导系统
JP6016386B2 (ja) * 2012-03-09 2016-10-26 キヤノン株式会社 Ｘ線光学装置
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EP2898361A4 (en) * 2012-09-24 2016-06-01 Convergent R N R Ltd X-RAY REFLECTIVE LENS ARRANGEMENT
CN202905197U (zh) * 2012-10-09 2013-04-24 北京师范大学 用于聚焦同步辐射光源的光学器件
US20140161233A1 (en) * 2012-12-06 2014-06-12 Bruker Axs Gmbh X-ray apparatus with deflectable electron beam
US9846132B2 (en) * 2013-10-21 2017-12-19 Kla-Tencor Corporation Small-angle scattering X-ray metrology systems and methods
US9885962B2 (en) * 2013-10-28 2018-02-06 Kla-Tencor Corporation Methods and apparatus for measuring semiconductor device overlay using X-ray metrology
JP6069609B2 (ja) * 2015-03-26 2017-02-01 株式会社リガク 二重湾曲ｘ線集光素子およびその構成体、二重湾曲ｘ線分光素子およびその構成体の製造方法
CN108028089B (zh) * 2015-09-25 2021-07-06 国立大学法人大阪大学 X射线显微镜
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
CN109313145A (zh) * 2016-07-15 2019-02-05 株式会社理学 X射线检测设备、x射线薄膜检测方法和测量摇摆曲线的方法
JP6857400B2 (ja) * 2018-03-01 2021-04-14 株式会社リガク Ｘ線発生装置、及びｘ線分析装置
CN116194760A (zh) * 2020-07-15 2023-05-30 丹麦技术大学 基于实验室的3D扫描X射线劳厄微衍射系统和方法（Lab3DμXRD）

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