JP2011507717A5 - - Google Patents
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- Publication number
- JP2011507717A5 JP2011507717A5 JP2010540733A JP2010540733A JP2011507717A5 JP 2011507717 A5 JP2011507717 A5 JP 2011507717A5 JP 2010540733 A JP2010540733 A JP 2010540733A JP 2010540733 A JP2010540733 A JP 2010540733A JP 2011507717 A5 JP2011507717 A5 JP 2011507717A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- structured
- structured abrasive
- abrasive particles
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005296 abrasive Methods 0.000 claims 9
- 239000002245 particle Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 claims 1
- 239000003431 cross linking reagent Substances 0.000 claims 1
Claims (2)
- 裏材の第一主表面に付着された構造化研磨層を含む構造化研磨物品であって、
前記構造化研磨層は、架橋結合剤内の複数の研磨材粒子によって形成された複数の形状化研磨材複合物を含み、
前記構造化研磨層は、外側表面を有し、当該外側表面は複数の精密に露出した研磨材粒子を含む、構造化研磨物品。 - 前記外側表面が表面領域を含み、前記表面領域の約50%未満が、前記複数の精密に露出した研磨材粒子を含む、請求項1に記載の構造化研磨物品。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1804507P | 2007-12-31 | 2007-12-31 | |
US61/018,045 | 2007-12-31 | ||
US9648408P | 2008-09-12 | 2008-09-12 | |
US61/096,484 | 2008-09-12 | ||
PCT/US2008/085843 WO2009088606A2 (en) | 2007-12-31 | 2008-12-08 | Plasma treated abrasive article and method of making same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011507717A JP2011507717A (ja) | 2011-03-10 |
JP2011507717A5 true JP2011507717A5 (ja) | 2011-09-22 |
JP5597140B2 JP5597140B2 (ja) | 2014-10-01 |
Family
ID=40853664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010540733A Expired - Fee Related JP5597140B2 (ja) | 2007-12-31 | 2008-12-08 | プラズマ処理された研磨物品及び同物品の作製方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8444458B2 (ja) |
EP (1) | EP2240298A4 (ja) |
JP (1) | JP5597140B2 (ja) |
CN (1) | CN101925441B (ja) |
WO (1) | WO2009088606A2 (ja) |
Families Citing this family (35)
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EP2662185A1 (en) * | 2012-05-11 | 2013-11-13 | Cerium Group Limited | A lens surfacing pad |
EP2866974B1 (en) | 2012-06-27 | 2017-07-26 | 3M Innovative Properties Company | Abrasive article |
EP2692821A1 (de) * | 2012-08-02 | 2014-02-05 | Robert Bosch Gmbh | Schleifkorn mit Basiskörper und Aufsatzkörper |
CN104736299A (zh) * | 2012-08-02 | 2015-06-24 | 3M创新有限公司 | 具有精确成形特征部的研磨制品及其制造方法 |
EP2692819A1 (de) * | 2012-08-02 | 2014-02-05 | Robert Bosch GmbH | Schleifkorn mit Basisfläche und Erhebungen |
CN102862128B (zh) | 2012-09-20 | 2015-10-21 | 北京国瑞升科技股份有限公司 | 一种凹凸结构磨料制品及其制备方法 |
EP2906392A4 (en) * | 2012-10-15 | 2016-07-13 | Saint Gobain Abrasives Inc | GRINDING PARTICLES WITH SPECIAL FORMS AND METHOD FOR FORMING SUCH PARTICLES |
CN105121096B (zh) * | 2013-03-29 | 2018-10-16 | 3M创新有限公司 | 非织造磨料制品及其制备方法 |
JP6186809B2 (ja) * | 2013-03-29 | 2017-08-30 | 株式会社リコー | 研磨ローラ、定着装置、及び画像形成装置 |
EP3013526A4 (en) | 2013-06-24 | 2017-03-08 | 3M Innovative Properties Company | Abrasive particles, method of making abrasive particles, and abrasive articles |
KR20160071416A (ko) * | 2013-10-18 | 2016-06-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 코팅된 연마 용품 및 그의 제조 방법 |
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WO2015112540A1 (en) * | 2014-01-24 | 2015-07-30 | 3M Innovative Properties Company | Abrasive material having a structured surface |
CN104002252B (zh) * | 2014-05-21 | 2016-06-01 | 华侨大学 | 超细磨料生物高分子柔性抛光膜及其制备方法 |
JP6611414B2 (ja) * | 2014-05-27 | 2019-11-27 | スリーエム イノベイティブ プロパティズ カンパニー | 塗装表面の仕上げ方法及び研磨材料 |
US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
KR102436416B1 (ko) | 2014-10-17 | 2022-08-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 cmp 패드 구성 |
US9776361B2 (en) | 2014-10-17 | 2017-10-03 | Applied Materials, Inc. | Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
CN107073688A (zh) * | 2014-10-28 | 2017-08-18 | 阪东化学株式会社 | 研磨材以及研磨材的制造方法 |
CN113103145B (zh) | 2015-10-30 | 2023-04-11 | 应用材料公司 | 形成具有期望ζ电位的抛光制品的设备与方法 |
US10593574B2 (en) | 2015-11-06 | 2020-03-17 | Applied Materials, Inc. | Techniques for combining CMP process tracking data with 3D printed CMP consumables |
US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
GB201622439D0 (en) * | 2016-12-30 | 2017-02-15 | 3M Innovative Properties Co | Abrasive article and method of use |
GB201622441D0 (en) * | 2016-12-30 | 2017-02-15 | 3M Innovative Properties Co | Abrasive article and method of use |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
WO2019032286A1 (en) * | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
SG11202108831UA (en) * | 2019-02-13 | 2021-09-29 | 3M Innovative Properties Co | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
EP4072783A4 (en) * | 2019-12-10 | 2024-04-24 | Saint-gobain Abrasives, Inc | FIXED ABRASIVE ITEM |
TWI768692B (zh) * | 2021-02-01 | 2022-06-21 | 中國砂輪企業股份有限公司 | 化學機械研磨拋光墊修整器及其製造方法 |
US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
WO2023130059A1 (en) | 2021-12-30 | 2023-07-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
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-
2008
- 2008-12-08 CN CN2008801252939A patent/CN101925441B/zh not_active Expired - Fee Related
- 2008-12-08 EP EP20080870190 patent/EP2240298A4/en not_active Withdrawn
- 2008-12-08 JP JP2010540733A patent/JP5597140B2/ja not_active Expired - Fee Related
- 2008-12-08 US US12/742,349 patent/US8444458B2/en not_active Expired - Fee Related
- 2008-12-08 WO PCT/US2008/085843 patent/WO2009088606A2/en active Application Filing
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