JP2011503772A - 伝導性組成物、および半導体デバイスの製造における使用方法：Ｍｇ含有添加剤 - Google Patents

伝導性組成物、および半導体デバイスの製造における使用方法：Ｍｇ含有添加剤 Download PDF

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Publication number
JP2011503772A
JP2011503772A JP2010530106A JP2010530106A JP2011503772A JP 2011503772 A JP2011503772 A JP 2011503772A JP 2010530106 A JP2010530106 A JP 2010530106A JP 2010530106 A JP2010530106 A JP 2010530106A JP 2011503772 A JP2011503772 A JP 2011503772A
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Japan
Prior art keywords
composition
thick film
glass
glass frit
firing
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Withdrawn
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JP2010530106A
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English (en)
Japanese (ja)
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JP2011503772A5 (enExample
Inventor
ジョン シェフィールド ヤング リチャード
ローズ マイケル
リチャード ミケシュカ カート
フレデリック キャロル アラン
ウォーレン ハン ケネス
グレーム プリンス アリステア
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication of JP2011503772A publication Critical patent/JP2011503772A/ja
Publication of JP2011503772A5 publication Critical patent/JP2011503772A5/ja
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • C03C8/18—Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/14—Conductive material dispersed in non-conductive inorganic material
    • H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2225—Diffusion sources
    • H10P32/19—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31536—Including interfacial reaction product of adjacent layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Conductive Materials (AREA)
  • Photovoltaic Devices (AREA)
  • Glass Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2010530106A 2007-10-18 2008-10-16 伝導性組成物、および半導体デバイスの製造における使用方法：Ｍｇ含有添加剤 Withdrawn JP2011503772A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98091607P 2007-10-18 2007-10-18
PCT/US2008/080133 WO2009052266A1 (en) 2007-10-18 2008-10-16 Conductive compositions and processes for use in the manufacture of semiconductor devices: mg-containing additive

Publications (2)

Publication Number Publication Date
JP2011503772A true JP2011503772A (ja) 2011-01-27
JP2011503772A5 JP2011503772A5 (enExample) 2011-11-17

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JP2010530106A Withdrawn JP2011503772A (ja) 2007-10-18 2008-10-16 伝導性組成物、および半導体デバイスの製造における使用方法：Ｍｇ含有添加剤

Country Status (7)

Country Link
US (2) US7790065B2 (enExample)
EP (1) EP2193526A1 (enExample)
JP (1) JP2011503772A (enExample)
KR (1) KR20100080614A (enExample)
CN (1) CN101816044A (enExample)
TW (1) TW200931449A (enExample)
WO (1) WO2009052266A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015511205A (ja) * 2011-12-22 2015-04-16 ヘレウス プレシャス メタルズ ノース アメリカ コンショホーケン エルエルシー 低抵抗接点の太陽電池ペースト
KR20160034957A (ko) 2013-07-25 2016-03-30 나믹스 가부시끼가이샤 도전성 페이스트 및 결정계 실리콘 태양 전지의 제조 방법
JP2018078120A (ja) * 2011-12-23 2018-05-17 ヘレウス ドイチェラント ゲーエムベーハー ウント カンパニー カーゲー 酸化アンチモンを含有する厚膜組成物および半導体デバイスの製造におけるその使用
US10475938B2 (en) 2012-05-22 2019-11-12 Namics Corporation Process for producing conductive pastes for forming solar cell electrodes

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* Cited by examiner, † Cited by third party
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EP1997941B1 (en) * 2006-03-01 2014-12-17 Mitsubishi Gas Chemical Company, Inc. PROCESS FOR PRODUCING ZnO SINGLE CRYSTAL ACCORDING TO METHOD OF LIQUID PHASE GROWTH
JP5151150B2 (ja) * 2006-12-28 2013-02-27 株式会社日立製作所 導電性焼結層形成用組成物、これを用いた導電性被膜形成法および接合法
KR20110003360A (ko) * 2008-04-09 2011-01-11 이 아이 듀폰 디 네모아 앤드 캄파니 반도체 소자의 제조에 사용하기 위한 전도성 조성물 및 방법
US8076777B2 (en) * 2008-06-26 2011-12-13 E. I. Du Pont De Nemours And Company Glass compositions used in conductors for photovoltaic cells
KR101144810B1 (ko) * 2009-07-06 2012-05-11 엘지전자 주식회사 태양전지용 전극 페이스트, 이를 이용한 태양전지, 및 태양전지의 제조방법
WO2011033826A1 (ja) * 2009-09-18 2011-03-24 信越化学工業株式会社 太陽電池、その製造方法及び太陽電池モジュール
US8252204B2 (en) * 2009-12-18 2012-08-28 E I Du Pont De Nemours And Company Glass compositions used in conductors for photovoltaic cells
KR101041603B1 (ko) * 2010-12-31 2011-06-15 (주)알가 진공 유리 패널 및 그 제조 방법
US9129725B2 (en) 2010-12-17 2015-09-08 E I Du Pont De Nemours And Company Conductive paste composition containing lithium, and articles made therefrom
US8486308B2 (en) 2010-12-17 2013-07-16 E I Du Pont De Nemours And Company Conductive paste composition containing lithium, and articles made therefrom
KR20120077439A (ko) * 2010-12-30 2012-07-10 주식회사 동진쎄미켐 태양전지의 전극 형성용 페이스트 조성물 및 이를 이용한 전극
CN102157219B (zh) * 2011-01-12 2012-06-27 西安银泰新能源材料科技有限公司 晶体硅太阳能电池正面电极银浆及其制备方法
WO2013130516A1 (en) * 2012-02-27 2013-09-06 E. I. Du Pont De Nemours And Company Silver paste and use thereof in the production of solar cells
WO2015026483A1 (en) * 2013-08-21 2015-02-26 Gtat Corporation Using an active solder to couple a metallic article to a photovoltaic cell
CN103943168B (zh) * 2014-04-18 2016-04-27 西安交通大学 一种Ag(Ti,Zr)/稀土晶体硅太阳电池复合浆料及其制备方法
WO2018174898A1 (en) * 2017-03-24 2018-09-27 Heraeus Precious Metals North America Conshohocken Llc Low etching and non-contact glasses for electroconductive paste compositions
TWI745562B (zh) * 2017-04-18 2021-11-11 美商太陽帕斯特有限責任公司 導電糊料組成物及用其製成的半導體裝置
CN112041994B (zh) * 2018-03-30 2022-06-21 深圳市首骋新材料科技有限公司 晶硅太阳能电池正面导电浆料及其制备方法和太阳能电池
CN117276364B (zh) * 2023-11-22 2024-04-12 天合光能股份有限公司 太阳能电池及其制备方法、光伏系统

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US4416932A (en) 1981-08-03 1983-11-22 E. I. Du Pont De Nemours And Company Thick film conductor compositions
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JPH0565456A (ja) * 1991-09-09 1993-03-19 Sumitomo Bakelite Co Ltd 気密封止用樹脂ペースト
US5296413A (en) 1991-12-03 1994-03-22 E. I. Du Pont De Nemours And Company Automotive glass thick film conductor paste
JPH06136298A (ja) 1992-10-26 1994-05-17 Asahi Chem Ind Co Ltd 銅系内部導体を有する低温焼成多層回路基板外部導体用ペースト
JP3209089B2 (ja) 1996-05-09 2001-09-17 昭栄化学工業株式会社 導電性ペースト
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US7435361B2 (en) * 2005-04-14 2008-10-14 E.I. Du Pont De Nemours And Company Conductive compositions and processes for use in the manufacture of semiconductor devices
US7611645B2 (en) 2005-04-25 2009-11-03 E. I. Du Pont De Nemours And Company Thick film conductor compositions and the use thereof in LTCC circuits and devices
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TW200933653A (en) * 2007-10-18 2009-08-01 Du Pont Lead-free conductive compositions and processes for use in the manufacture of semiconductor devices: flux materials
WO2009052271A1 (en) * 2007-10-18 2009-04-23 E. I. Du Pont De Nemours And Company Lead-free conductive compositions and processes for use in the manufacture of semiconductor devices: mg-containing additive

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015511205A (ja) * 2011-12-22 2015-04-16 ヘレウス プレシャス メタルズ ノース アメリカ コンショホーケン エルエルシー 低抵抗接点の太陽電池ペースト
JP2018078120A (ja) * 2011-12-23 2018-05-17 ヘレウス ドイチェラント ゲーエムベーハー ウント カンパニー カーゲー 酸化アンチモンを含有する厚膜組成物および半導体デバイスの製造におけるその使用
US10475938B2 (en) 2012-05-22 2019-11-12 Namics Corporation Process for producing conductive pastes for forming solar cell electrodes
KR20160034957A (ko) 2013-07-25 2016-03-30 나믹스 가부시끼가이샤 도전성 페이스트 및 결정계 실리콘 태양 전지의 제조 방법
KR102175305B1 (ko) 2013-07-25 2020-11-06 나믹스 가부시끼가이샤 도전성 페이스트 및 결정계 실리콘 태양 전지의 제조 방법

Also Published As

Publication number Publication date
US20100275997A1 (en) 2010-11-04
US20090104461A1 (en) 2009-04-23
CN101816044A (zh) 2010-08-25
US7790065B2 (en) 2010-09-07
EP2193526A1 (en) 2010-06-09
US7998371B2 (en) 2011-08-16
WO2009052266A1 (en) 2009-04-23
KR20100080614A (ko) 2010-07-09
TW200931449A (en) 2009-07-16

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