JP2011503574A - 表面形状プロファイルを測定するための方法および装置 - Google Patents

表面形状プロファイルを測定するための方法および装置 Download PDF

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Publication number
JP2011503574A
JP2011503574A JP2010533096A JP2010533096A JP2011503574A JP 2011503574 A JP2011503574 A JP 2011503574A JP 2010533096 A JP2010533096 A JP 2010533096A JP 2010533096 A JP2010533096 A JP 2010533096A JP 2011503574 A JP2011503574 A JP 2011503574A
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JP
Japan
Prior art keywords
sheet material
light beam
light source
positions
shape profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
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JP2010533096A
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English (en)
Japanese (ja)
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JP2011503574A5 (enExample
Inventor
チェン，シン
リュー，アンピン
ジョウ，ナイイェ
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Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of JP2011503574A publication Critical patent/JP2011503574A/ja
Publication of JP2011503574A5 publication Critical patent/JP2011503574A5/ja
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010533096A 2007-11-09 2008-11-06 表面形状プロファイルを測定するための方法および装置 Abandoned JP2011503574A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/983,464 US8402785B2 (en) 2007-11-09 2007-11-09 Method and apparatus for measuring surface shape profile
PCT/US2008/012527 WO2009061438A1 (en) 2007-11-09 2008-11-06 Method and apparatus for measuring surface shape profile

Publications (2)

Publication Number Publication Date
JP2011503574A true JP2011503574A (ja) 2011-01-27
JP2011503574A5 JP2011503574A5 (enExample) 2012-08-23

Family

ID=40258254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010533096A Abandoned JP2011503574A (ja) 2007-11-09 2008-11-06 表面形状プロファイルを測定するための方法および装置

Country Status (6)

Country Link
US (1) US8402785B2 (enExample)
JP (1) JP2011503574A (enExample)
KR (1) KR20100103500A (enExample)
CN (1) CN101932903A (enExample)
TW (1) TW200936983A (enExample)
WO (1) WO2009061438A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016098137A (ja) * 2014-11-20 2016-05-30 日本電気硝子株式会社 ガラスリボンの形状監視方法、ガラス物品の製造方法、及びガラス物品の製造装置
JP2020019706A (ja) * 2013-11-25 2020-02-06 コーニング インコーポレイテッド 実質的に柱面を成す鏡面反射面の形状を決定するための方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5646861B2 (ja) * 2010-02-26 2014-12-24 株式会社ニコン 計測装置および計測方法
US9546962B2 (en) 2014-02-12 2017-01-17 Kla-Tencor Corporation Multi-spot scanning collection optics
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
CN106198397B (zh) * 2016-08-16 2020-01-03 京东方科技集团股份有限公司 一种光电检测装置、方法和光刻胶涂覆设备
US10446423B2 (en) * 2016-11-19 2019-10-15 Applied Materials, Inc. Next generation warpage measurement system
CN106524954A (zh) * 2016-12-21 2017-03-22 南通沃特光电科技有限公司 一种转子叠片的平整度检测方法
CN106524953A (zh) * 2017-01-04 2017-03-22 南通沃特光电科技有限公司 一种定子叠片的平整度检测方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3338696A (en) 1964-05-06 1967-08-29 Corning Glass Works Sheet forming apparatus
BE757057A (fr) 1969-10-06 1971-04-05 Corning Glass Works Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree
US4853777A (en) * 1987-07-07 1989-08-01 Ashland Oil, Inc. Method for evaluating smooth surfaces
US5523889A (en) * 1994-05-16 1996-06-04 National Research Council Of Canada Beam expanding lens
US5757496A (en) 1997-03-07 1998-05-26 Mitutoyo Corporation Method of surface roughness measurement using a fiber-optic probe
US6621581B1 (en) * 1998-10-16 2003-09-16 Ade Corporation Method and apparatus for mapping surface topography of a substrate
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
US6211488B1 (en) 1998-12-01 2001-04-03 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a laser initiated scribe
TW434399B (en) 2000-06-08 2001-05-16 Ind Tech Res Inst Multi-range fiber-optic reflective displacement micrometer
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
CN1950669A (zh) 2004-05-10 2007-04-18 皇家飞利浦电子股份有限公司 光学精密测量装置和方法
US7231786B2 (en) 2004-07-29 2007-06-19 Corning Incorporated Process and device for manufacturing glass sheet
US20070039990A1 (en) 2005-05-06 2007-02-22 Kemmerer Marvin W Impact induced crack propagation in a brittle material
US20060261118A1 (en) 2005-05-17 2006-11-23 Cox Judy K Method and apparatus for separating a pane of brittle material from a moving ribbon of the material
DE102006013584B4 (de) 2006-03-22 2014-07-10 Benteler Automobiltechnik Gmbh Vorrichtung zum Vermessen von Bauteilen
WO2008028246A1 (en) 2006-09-07 2008-03-13 Bluescope Steel Limited Monitoring of profiled sheets

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020019706A (ja) * 2013-11-25 2020-02-06 コーニング インコーポレイテッド 実質的に柱面を成す鏡面反射面の形状を決定するための方法
JP2016098137A (ja) * 2014-11-20 2016-05-30 日本電気硝子株式会社 ガラスリボンの形状監視方法、ガラス物品の製造方法、及びガラス物品の製造装置

Also Published As

Publication number Publication date
US20090120134A1 (en) 2009-05-14
KR20100103500A (ko) 2010-09-27
WO2009061438A1 (en) 2009-05-14
TW200936983A (en) 2009-09-01
CN101932903A (zh) 2010-12-29
US8402785B2 (en) 2013-03-26

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