CN101932903A - 用于测量表面形状轮廓的方法和装置 - Google Patents

用于测量表面形状轮廓的方法和装置 Download PDF

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Publication number
CN101932903A
CN101932903A CN2008801207100A CN200880120710A CN101932903A CN 101932903 A CN101932903 A CN 101932903A CN 2008801207100 A CN2008801207100 A CN 2008801207100A CN 200880120710 A CN200880120710 A CN 200880120710A CN 101932903 A CN101932903 A CN 101932903A
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CN
China
Prior art keywords
light beam
light source
thin material
shape profile
material flitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2008801207100A
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English (en)
Chinese (zh)
Inventor
X·陈
A·刘
周乃越
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Corning Inc
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Corning Inc
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Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN101932903A publication Critical patent/CN101932903A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN2008801207100A 2007-11-09 2008-11-06 用于测量表面形状轮廓的方法和装置 Pending CN101932903A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/983,464 2007-11-09
US11/983,464 US8402785B2 (en) 2007-11-09 2007-11-09 Method and apparatus for measuring surface shape profile
PCT/US2008/012527 WO2009061438A1 (en) 2007-11-09 2008-11-06 Method and apparatus for measuring surface shape profile

Publications (1)

Publication Number Publication Date
CN101932903A true CN101932903A (zh) 2010-12-29

Family

ID=40258254

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008801207100A Pending CN101932903A (zh) 2007-11-09 2008-11-06 用于测量表面形状轮廓的方法和装置

Country Status (6)

Country Link
US (1) US8402785B2 (enExample)
JP (1) JP2011503574A (enExample)
KR (1) KR20100103500A (enExample)
CN (1) CN101932903A (enExample)
TW (1) TW200936983A (enExample)
WO (1) WO2009061438A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106198397A (zh) * 2016-08-16 2016-12-07 京东方科技集团股份有限公司 一种光电检测装置、方法和光刻胶涂覆设备
CN106524953A (zh) * 2017-01-04 2017-03-22 南通沃特光电科技有限公司 一种定子叠片的平整度检测方法
CN106524954A (zh) * 2016-12-21 2017-03-22 南通沃特光电科技有限公司 一种转子叠片的平整度检测方法

Families Citing this family (6)

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Publication number Priority date Publication date Assignee Title
JP5646861B2 (ja) * 2010-02-26 2014-12-24 株式会社ニコン 計測装置および計測方法
JP2017501951A (ja) * 2013-11-25 2017-01-19 コーニング インコーポレイテッド 実質的に柱面を成す鏡面反射面の形状を決定するための方法
US9546962B2 (en) 2014-02-12 2017-01-17 Kla-Tencor Corporation Multi-spot scanning collection optics
JP6369300B2 (ja) * 2014-11-20 2018-08-08 日本電気硝子株式会社 ガラスリボンの形状監視方法、ガラス物品の製造方法、及びガラス物品の製造装置
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
US10446423B2 (en) * 2016-11-19 2019-10-15 Applied Materials, Inc. Next generation warpage measurement system

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Publication number Priority date Publication date Assignee Title
US3338696A (en) 1964-05-06 1967-08-29 Corning Glass Works Sheet forming apparatus
BE757057A (fr) 1969-10-06 1971-04-05 Corning Glass Works Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree
US4853777A (en) * 1987-07-07 1989-08-01 Ashland Oil, Inc. Method for evaluating smooth surfaces
US5523889A (en) * 1994-05-16 1996-06-04 National Research Council Of Canada Beam expanding lens
US5757496A (en) 1997-03-07 1998-05-26 Mitutoyo Corporation Method of surface roughness measurement using a fiber-optic probe
US6621581B1 (en) * 1998-10-16 2003-09-16 Ade Corporation Method and apparatus for mapping surface topography of a substrate
US6999183B2 (en) * 1998-11-18 2006-02-14 Kla-Tencor Corporation Detection system for nanometer scale topographic measurements of reflective surfaces
US6211488B1 (en) 1998-12-01 2001-04-03 Accudyne Display And Semiconductor Systems, Inc. Method and apparatus for separating non-metallic substrates utilizing a laser initiated scribe
TW434399B (en) 2000-06-08 2001-05-16 Ind Tech Res Inst Multi-range fiber-optic reflective displacement micrometer
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
CN1950669A (zh) 2004-05-10 2007-04-18 皇家飞利浦电子股份有限公司 光学精密测量装置和方法
US7231786B2 (en) 2004-07-29 2007-06-19 Corning Incorporated Process and device for manufacturing glass sheet
US20070039990A1 (en) 2005-05-06 2007-02-22 Kemmerer Marvin W Impact induced crack propagation in a brittle material
US20060261118A1 (en) 2005-05-17 2006-11-23 Cox Judy K Method and apparatus for separating a pane of brittle material from a moving ribbon of the material
DE102006013584B4 (de) 2006-03-22 2014-07-10 Benteler Automobiltechnik Gmbh Vorrichtung zum Vermessen von Bauteilen
WO2008028246A1 (en) 2006-09-07 2008-03-13 Bluescope Steel Limited Monitoring of profiled sheets

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106198397A (zh) * 2016-08-16 2016-12-07 京东方科技集团股份有限公司 一种光电检测装置、方法和光刻胶涂覆设备
CN106198397B (zh) * 2016-08-16 2020-01-03 京东方科技集团股份有限公司 一种光电检测装置、方法和光刻胶涂覆设备
CN106524954A (zh) * 2016-12-21 2017-03-22 南通沃特光电科技有限公司 一种转子叠片的平整度检测方法
CN106524953A (zh) * 2017-01-04 2017-03-22 南通沃特光电科技有限公司 一种定子叠片的平整度检测方法

Also Published As

Publication number Publication date
JP2011503574A (ja) 2011-01-27
US20090120134A1 (en) 2009-05-14
KR20100103500A (ko) 2010-09-27
WO2009061438A1 (en) 2009-05-14
TW200936983A (en) 2009-09-01
US8402785B2 (en) 2013-03-26

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Application publication date: 20101229