JP5733919B2 - 高感度検出器装置 - Google Patents
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/144—Devices controlled by radiation
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- H01L31/02—Details
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Description
例えば、CCDセンサ、光電子増倍管(Photomultiplier Tube,PMT),アヴァランシェ・フォトダイオード(Avalanche−Photodiode,APD)がこれにあたる。しばしば、個別の検出器を組み合わせて1次元または2次元の配置とする(ライン検出器または平面検出器)。その場合、構造上の必要から、個々の検出器素子いわゆる検出器セルは互いに離間している。そのため、通常、この種の検出器装置は均質な受光面を備えていない。受光領域があるが、これは非受光領域によって遮断されている。このような検出器装置に光束が当たった場合、その光のうち、受光領域に当たった部分のみが検出される。非受光領域に当たった光を検出することはできない。そのため、検出器装置の効率が低下する。
更なる解決策が特許文献3に記載されている。ここで、ウェッジミラーが光偏向素子として用いられている。このような装置における欠点は、1つには幅狭のウェッジミラーが機械的に脆弱なことである。他には、ウェッジの間にゴミが沈積して受光領域に影響を与えることもある。
代替実施形態において、本発明は、検出器と、第1および第2光入射面からなる光偏向素子とを有し、第1および第2光入射面が平面として形成され、第2光入射面が第1光入射面に対して傾斜している、検出器装置を含む。
図1は、非受光領域103および受光領域104を有する、1次元(列状)受光器(ライン検出器102)を示す図である。光101は非受光領域103および受光領域104に入射する。したがって、入射光の一部のみが検出できる。
本発明による光偏向素子は、検出すべき波長領域において適切な屈折率と透過性とを備えた透明な材料で製造することができる。これには、ポリメタクリル酸メチル(PMMA)が特に適している。というのは、これは、容易にかつ精密に加工可能であるからである。
図6に、独国特許出願公開第10033180号明細書に基づくレーザ走査型顕微鏡においてPMTライン検出器を用いてスペクトル検出を行うための装置が示されている。この光学的構成は、本質的にツェルニー・ターナー(Cerny Turner)構成を表している。共焦点検出の場合、試料の光Lはピンホール光学系POにより、共焦点絞りPHを通って合焦される。非デスキャン検出で多光子吸収の場合はこの絞りはなくてもよい。第1結像鏡S1は蛍光をコリメートする。続いて、光はライン格子G、例えばミリメートル当たりの線数が651の格子に当たる。この格子は光をその波長に応じてさまざまな方向に曲げる。第2結像鏡S2は、スペクトル分割された個々の波長成分を、PMTライン検出器DE、例えば、浜松ホトニクス社のH7260ライン光電子増倍管(Photomultiplier Tube,PMT)の対応するチャンネル上に合焦させる。この検出器は32のチャンネルを有し高感度である。上記実施形態の自由スペクトル領域は約350nmである。自由スペクトル領域はこの配置においてライン検出器の32本のチャンネル上に一様に分配され、それによって光学的分解能約10nmが得られる。この装置を使用すると、結像システムにおいて有利である。なぜなら、検出されるスペクトル帯域が相対的に広いので、検出チャンネル当たりの信号がなお比較的強いからである。自由スペクトル領域のシフトはさらに、例えば格子を捩る、または検出器を移動させることによって達成できる。
分離帯に当たる場合、検出光は制御されずに、それぞれ隣接する個別チャンネル上に分散する恐れがある。個別チャンネル間の、このいわゆるクロストーク(Cross−Talk)によって測定結果が歪曲されることがある。また、このクロストークは、光偏向素子を使用することによって最小限に抑えることができる。
Claims (9)
- 検出器装置であって、
受光領域を有する1つの検出器と、
第1の入光面および第2の入光面を有する1つの光偏向素子であって、前記第1の入光面および前記第2の入光面が平面として形成され、前記第2の入光面が前記第1の入光面に対して傾斜している、前記光偏向素子と、
1枚のガラス基板であって、前記光偏向素子が、該ガラス基板上に布設されている、前記ガラス基板とを備え、
前記検出器がガラス入射窓を有する冷却PMT検出器であり、前記ガラス基板が、該PMT検出器の該ガラス入射窓に接着されていることを特徴とする検出器装置。 - 前記第2の入光面が、透過の際に、入射光を偏向によって前記検出器の前記受光領域上へと偏向させる請求項1に記載の検出器装置。
- 前記第1の入光面が、透過する際に、入射光に本質的に影響を与えない請求項1または2に記載の検出器装置。
- 前記検出器が、検出器列として形成される請求項1乃至3のいずれか1項に記載の検出器装置。
- 前記検出器が、平面検出器として形成される請求項1乃至3のいずれか1項に記載の検出器装置。
- 前記光偏向素子が、平面形状の複数の入光面を有する1つの関連素子からなる請求項1乃至5のいずれか1項に記載の検出器装置。
- 前記光偏向素子が、複数の個別素子から構成される請求項1乃至6のいずれか1項に記載の検出器装置。
- 前記光偏向素子が、PMMAからなる請求項1乃至7のいずれか1項に記載の検出器装置。
- 請求項1乃至8のいずれか1項に記載の検出器装置を備えた顕微鏡、好ましくはレーザ走査型顕微鏡。
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DE102009038028.0 | 2009-08-18 | ||
DE102009038028A DE102009038028A1 (de) | 2009-08-18 | 2009-08-18 | Detektoranordnung mit erhöhter Empfindlichkeit |
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DE102009038028A1 (de) * | 2009-08-18 | 2011-02-24 | Carl Zeiss Microlmaging Gmbh | Detektoranordnung mit erhöhter Empfindlichkeit |
DE102011114377A1 (de) * | 2011-09-23 | 2013-03-28 | Carl Zeiss Microscopy Gmbh | Vorrichtung und Verfahren zur Durchlichtbeleuchtung für Lichtmikroskope und Mikroskopsystem |
US20150107671A1 (en) * | 2012-01-24 | 2015-04-23 | AMI Research & Development, LLC | Monolithic broadband energy collector with dichroic filters and mirrors embedded in waveguide |
US9281424B2 (en) | 2012-01-24 | 2016-03-08 | AMI Research & Development, LLC | Wideband light energy waveguide and detector |
US9557480B2 (en) | 2013-11-06 | 2017-01-31 | R.A. Miller Industries, Inc. | Graphene coupled MIM rectifier especially for use in monolithic broadband infrared energy collector |
JP2015138078A (ja) * | 2014-01-21 | 2015-07-30 | セイコーエプソン株式会社 | マイクロレンズアレイ、マイクロレンズアレイの製造方法、電気光学装置、及び電子機器 |
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DE102006039073A1 (de) * | 2006-08-09 | 2008-02-14 | Opsolution Gmbh | Vorrichtung zur Untersuchung der spektralen und örtlichen Verteilung einer elektromagnetischen, von einem Gegenstand ausgehenden Strahlung |
DE102007062523A1 (de) * | 2007-12-20 | 2009-07-16 | Erco Gmbh | Prismenscheibe und Leuchte |
DE102008007452A1 (de) * | 2008-01-31 | 2009-08-06 | Carl Zeiss Microimaging Gmbh | Laser-Scanning-Mikroskop und Baugruppe zur non-descannten Detektion |
DE102009038028A1 (de) * | 2009-08-18 | 2011-02-24 | Carl Zeiss Microlmaging Gmbh | Detektoranordnung mit erhöhter Empfindlichkeit |
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US8497464B2 (en) | 2013-07-30 |
DE102009038028A1 (de) | 2011-02-24 |
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