JP2011501745A5 - - Google Patents

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Publication number
JP2011501745A5
JP2011501745A5 JP2010528358A JP2010528358A JP2011501745A5 JP 2011501745 A5 JP2011501745 A5 JP 2011501745A5 JP 2010528358 A JP2010528358 A JP 2010528358A JP 2010528358 A JP2010528358 A JP 2010528358A JP 2011501745 A5 JP2011501745 A5 JP 2011501745A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2010528358A
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JP5538229B2 (ja
JP2011501745A (ja
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Priority claimed from PCT/EP2008/062991 external-priority patent/WO2009047152A1/en
Publication of JP2011501745A publication Critical patent/JP2011501745A/ja
Publication of JP2011501745A5 publication Critical patent/JP2011501745A5/ja
Application granted granted Critical
Publication of JP5538229B2 publication Critical patent/JP5538229B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010528358A 2007-10-10 2008-09-29 スルホニウム塩開始剤 Expired - Fee Related JP5538229B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07118204 2007-10-10
EP07118204.2 2007-10-10
PCT/EP2008/062991 WO2009047152A1 (en) 2007-10-10 2008-09-29 Sulphonium salt initiators

Publications (3)

Publication Number Publication Date
JP2011501745A JP2011501745A (ja) 2011-01-13
JP2011501745A5 true JP2011501745A5 (ja) 2011-11-10
JP5538229B2 JP5538229B2 (ja) 2014-07-02

Family

ID=39171376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010528358A Expired - Fee Related JP5538229B2 (ja) 2007-10-10 2008-09-29 スルホニウム塩開始剤

Country Status (7)

Country Link
US (1) US20100297541A1 (ja)
EP (1) EP2197839B1 (ja)
JP (1) JP5538229B2 (ja)
KR (1) KR101599562B1 (ja)
CN (1) CN102026967B (ja)
TW (1) TWI433833B (ja)
WO (1) WO2009047152A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
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JP7025531B2 (ja) 2017-09-06 2022-02-24 常州強力電子新材料股▲分▼有限公司 スルホニウム塩光開始剤、その製造方法、それを含む光硬化性組成物及びその適用

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EP2502728B1 (en) 2011-03-23 2017-01-04 DSM IP Assets B.V. Lightweight and high strength three-dimensional articles producible by additive fabrication processes
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JP6120574B2 (ja) 2012-01-31 2017-04-26 キヤノン株式会社 感光性ネガ型樹脂組成物、微細構造体、微細構造体の製造方法及び液体吐出ヘッド
CN102672371B (zh) * 2012-06-13 2013-11-20 东莞市剑鑫电子材料有限公司 一种低挥发性高松香助焊剂及其制备方法
WO2015019616A1 (en) 2013-08-07 2015-02-12 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species
WO2015049871A1 (en) * 2013-10-02 2015-04-09 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species
US20160259245A1 (en) * 2013-10-07 2016-09-08 Toyo Gosei Co., Ltd. Reagent for enhancing generation of chemical species and manufacturing apparatus
CN105712917B (zh) * 2016-03-29 2017-12-26 同济大学 具有光引发剂与光敏化剂双重功能的共轭型硫鎓盐光引发剂、制备方法及其应用
JP6720926B2 (ja) * 2016-06-28 2020-07-08 信越化学工業株式会社 レジスト材料及びパターン形成方法
US11009790B2 (en) 2016-07-28 2021-05-18 Samsung Electronics Co., Ltd. Photoacid generator and photoresist composition including the same
CN107698477B (zh) 2016-08-08 2020-05-12 常州强力电子新材料股份有限公司 一种新型阳离子型光引发剂及其制备方法和应用
CN107129451B (zh) * 2017-05-11 2019-12-03 同济大学 新型带氰基二苯乙烯基硫鎓盐制备方法及其应用
TWI834886B (zh) 2019-06-17 2024-03-11 日商日產化學股份有限公司 含有二氰基苯乙烯基之可濕蝕刻之阻劑下層膜形成組成物、經圖案化的基板之製造方法及半導體裝置之製造方法
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7025531B2 (ja) 2017-09-06 2022-02-24 常州強力電子新材料股▲分▼有限公司 スルホニウム塩光開始剤、その製造方法、それを含む光硬化性組成物及びその適用

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