JP2011500480A5 - - Google Patents

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Publication number
JP2011500480A5
JP2011500480A5 JP2010530402A JP2010530402A JP2011500480A5 JP 2011500480 A5 JP2011500480 A5 JP 2011500480A5 JP 2010530402 A JP2010530402 A JP 2010530402A JP 2010530402 A JP2010530402 A JP 2010530402A JP 2011500480 A5 JP2011500480 A5 JP 2011500480A5
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JP
Japan
Prior art keywords
web
guide device
coating
guiding
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010530402A
Other languages
English (en)
Japanese (ja)
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JP2011500480A (ja
Filing date
Publication date
Priority claimed from EP07020927A external-priority patent/EP2053663A1/en
Application filed filed Critical
Publication of JP2011500480A publication Critical patent/JP2011500480A/ja
Publication of JP2011500480A5 publication Critical patent/JP2011500480A5/ja
Pending legal-status Critical Current

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JP2010530402A 2007-10-25 2008-10-15 ウェブコーティングプロセスにおける浮上クッションによるウェブの搬送 Pending JP2011500480A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US98263507P 2007-10-25 2007-10-25
EP07020927A EP2053663A1 (en) 2007-10-25 2007-10-25 Hover cushion transport for webs in a web coating process
PCT/EP2008/063902 WO2009053289A1 (en) 2007-10-25 2008-10-15 Hover cushion transport for webs in a web coating process

Publications (2)

Publication Number Publication Date
JP2011500480A JP2011500480A (ja) 2011-01-06
JP2011500480A5 true JP2011500480A5 (cg-RX-API-DMAC7.html) 2011-12-01

Family

ID=38824994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010530402A Pending JP2011500480A (ja) 2007-10-25 2008-10-15 ウェブコーティングプロセスにおける浮上クッションによるウェブの搬送

Country Status (7)

Country Link
US (1) US20090110809A1 (cg-RX-API-DMAC7.html)
EP (1) EP2053663A1 (cg-RX-API-DMAC7.html)
JP (1) JP2011500480A (cg-RX-API-DMAC7.html)
KR (1) KR20100091984A (cg-RX-API-DMAC7.html)
CN (1) CN101836303A (cg-RX-API-DMAC7.html)
TW (1) TW200933788A (cg-RX-API-DMAC7.html)
WO (1) WO2009053289A1 (cg-RX-API-DMAC7.html)

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JP5662334B2 (ja) * 2008-12-04 2015-01-28 ビーコ・インストゥルメンツ・インコーポレイテッド 化学気相成長用の流入口要素及び化学気相成長方法
KR101629776B1 (ko) * 2009-07-15 2016-06-13 도요 고한 가부시키가이샤 웹 부상 반송장치 및 그 제조방법
EP2299473A1 (en) * 2009-09-22 2011-03-23 Applied Materials, Inc. Modular substrate processing system and method
US20110097494A1 (en) * 2009-10-27 2011-04-28 Kerr Roger S Fluid conveyance system including flexible retaining mechanism
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
US9073250B2 (en) 2011-09-08 2015-07-07 Corning Incorporated Apparatus and methods for producing a ceramic green body
JP2013082959A (ja) * 2011-10-07 2013-05-09 Sony Corp 自己停止反応成膜装置及び自己停止反応成膜方法
SE537252C2 (sv) * 2011-12-15 2015-03-17 Andritz Tech & Asset Man Gmbh Torklåda som har blåslådor för torkning av en bana av cellulosamassa
JP5931091B2 (ja) * 2012-01-16 2016-06-08 株式会社アルバック 成膜装置
JP2013212919A (ja) * 2012-04-03 2013-10-17 Sakurai Graphic Syst:Kk 枚葉シート搬送装置及び印刷機
EP2765218A1 (en) * 2013-02-07 2014-08-13 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and apparatus for depositing atomic layers on a substrate
NZ715286A (en) * 2013-06-11 2020-03-27 Univ Houston Fixed and portable coating apparatuses and methods
DE102014113047A1 (de) * 2013-09-19 2015-03-19 Von Ardenne Gmbh Vakuumbeschichtungsanlage und Verfahren zur Beschichtung bandförmiger Substrate
US9937705B2 (en) * 2015-12-02 2018-04-10 Eastman Kodak Company Liquid ejection hole configuration for web guide
JP7422488B2 (ja) * 2016-06-02 2024-01-26 アプライド マテリアルズ インコーポレイテッド ローラーデバイスとその利用、及びウェブの温度を制御するための方法
CN107745579B (zh) * 2016-11-10 2019-05-28 北京航空航天大学 一种具有气浮支撑功能的卷对卷印刷电子喷墨加工平台
EP3894363A2 (en) 2018-12-13 2021-10-20 Corning Incorporated Conveying apparatus and conveying ribbon
CN110911335B (zh) * 2019-11-13 2022-05-31 深圳市华星光电半导体显示技术有限公司 气浮支撑平台
WO2022225731A1 (en) * 2021-04-21 2022-10-27 Applied Materials, Inc. Material deposition apparatus, method of depositing material on a substrate, and material deposition system
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
US20220356027A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
CN116067158B (zh) * 2023-02-07 2023-07-04 无锡爱德旺斯科技有限公司 一种气浮烘箱
JP7731926B2 (ja) * 2023-02-17 2025-09-01 プライムプラネットエナジー＆ソリューションズ株式会社 シート搬送装置
EP4530240A1 (en) * 2023-09-29 2025-04-02 CUSTOMCELLS Holding GmbH A system, plant, and method for processing a bendable foil, a plant for obtaining a metalated battery electrode and a method of producing a battery cell
CN120288561B (zh) * 2025-06-13 2025-08-12 福建省爱珈图服装发展有限公司 一种铺布机模块化磁吸式压布导辊

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