JP2011251345A5 - - Google Patents

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Publication number
JP2011251345A5
JP2011251345A5 JP2011204016A JP2011204016A JP2011251345A5 JP 2011251345 A5 JP2011251345 A5 JP 2011251345A5 JP 2011204016 A JP2011204016 A JP 2011204016A JP 2011204016 A JP2011204016 A JP 2011204016A JP 2011251345 A5 JP2011251345 A5 JP 2011251345A5
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JP
Japan
Prior art keywords
beam irradiation
protective sheet
laser beam
assist gas
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011204016A
Other languages
English (en)
Japanese (ja)
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JP2011251345A (ja
JP5360177B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2011204016A priority Critical patent/JP5360177B2/ja
Priority claimed from JP2011204016A external-priority patent/JP5360177B2/ja
Publication of JP2011251345A publication Critical patent/JP2011251345A/ja
Publication of JP2011251345A5 publication Critical patent/JP2011251345A5/ja
Application granted granted Critical
Publication of JP5360177B2 publication Critical patent/JP5360177B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011204016A 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド Expired - Fee Related JP5360177B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011204016A JP5360177B2 (ja) 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005186047 2005-06-27
JP2005186047 2005-06-27
JP2011204016A JP5360177B2 (ja) 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006551667A Division JP4978195B2 (ja) 2005-06-27 2006-06-20 レーザ加工方法およびレーザ加工ヘッド

Publications (3)

Publication Number Publication Date
JP2011251345A JP2011251345A (ja) 2011-12-15
JP2011251345A5 true JP2011251345A5 (enrdf_load_stackoverflow) 2012-07-12
JP5360177B2 JP5360177B2 (ja) 2013-12-04

Family

ID=37595169

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2006551667A Expired - Fee Related JP4978195B2 (ja) 2005-06-27 2006-06-20 レーザ加工方法およびレーザ加工ヘッド
JP2011204015A Expired - Fee Related JP5360176B2 (ja) 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド
JP2011204016A Expired - Fee Related JP5360177B2 (ja) 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP2006551667A Expired - Fee Related JP4978195B2 (ja) 2005-06-27 2006-06-20 レーザ加工方法およびレーザ加工ヘッド
JP2011204015A Expired - Fee Related JP5360176B2 (ja) 2005-06-27 2011-09-20 レーザ加工方法およびレーザ加工ヘッド

Country Status (5)

Country Link
JP (3) JP4978195B2 (enrdf_load_stackoverflow)
KR (1) KR100853073B1 (enrdf_load_stackoverflow)
CN (3) CN100513049C (enrdf_load_stackoverflow)
TW (1) TWI295206B (enrdf_load_stackoverflow)
WO (1) WO2007000915A1 (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100078418A1 (en) * 2008-09-26 2010-04-01 Electro Scientific Industries, Inc. Method of laser micro-machining stainless steel with high cosmetic quality
JP4896274B2 (ja) 2010-06-14 2012-03-14 三菱電機株式会社 レーザ加工装置、及びレーザ加工方法
GB2482190A (en) * 2010-07-23 2012-01-25 New Transducers Ltd Methods of generating a desired haptic sensation in a touch sensitive device
JP6260136B2 (ja) * 2013-08-07 2018-01-17 株式会社Ｇｓユアサ 蓄電素子の製造方法および蓄電素子
CN103978312A (zh) * 2014-04-16 2014-08-13 苏州萃田精密机械有限公司 一种铝板表面凹槽加工装置
CN104043904A (zh) * 2014-06-09 2014-09-17 江苏大学 一种背面侧吹气体辅助激光切割的方法及装置
DE102015215316A1 (de) * 2015-08-11 2016-06-30 Schuler Automation Gmbh & Co. Kg Verfahren zur Herstellung einer Blechplatine mittels Laserschneiden und Verwendung einer Kunststofffolie
JP6315634B2 (ja) 2016-05-18 2018-04-25 株式会社アマダホールディングス 複合加工システム及びレーザ切断加工方法
CN109759728B (zh) * 2019-01-23 2020-08-14 西安交通大学 一种利用增加保护层改善微孔形貌的方法
CN109877448A (zh) * 2019-03-20 2019-06-14 大族激光科技产业集团股份有限公司 一种柔性膜材的加工系统及加工方法
CN114888454A (zh) * 2022-05-25 2022-08-12 深圳市杰普特光电股份有限公司 一种电池极片的切割方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0543994Y2 (enrdf_load_stackoverflow) * 1985-07-19 1993-11-08
JPH02286327A (ja) * 1989-04-28 1990-11-26 Amada Co Ltd レーザ加工用の金属板
DE4437795C2 (de) * 1993-10-21 1996-12-12 Mitsubishi Electric Corp Bearbeitungskopf mit Haupt- und Neben-Hilfsgasdüsen für eine Laserbearbeitungseinrichtung sowie Laserbearbeitungseinrichtung
JP3405799B2 (ja) * 1994-03-04 2003-05-12 ファナック株式会社 レーザ加工方法
JP3512634B2 (ja) * 1998-05-11 2004-03-31 三菱電機株式会社 レーザ加工方法、被レーザ加工物の生産方法、およびレーザ加工装置、並びに、レーザ加工または被レーザ加工物の生産方法をコンピュータに実行させるプログラムを格納したコンピュータが読取可能な記録媒体
JP4366534B2 (ja) * 2000-02-01 2009-11-18 澁谷工業株式会社 レーザ加工方法
JP4304808B2 (ja) * 2000-02-04 2009-07-29 澁谷工業株式会社 レーザ加工方法
JP4221540B2 (ja) * 2000-06-27 2009-02-12 澁谷工業株式会社 レーザ加工方法およびその装置
JP3425425B2 (ja) * 2000-07-07 2003-07-14 日本車輌製造株式会社 極薄金属板のレーザ切断加工装置
US6423928B1 (en) * 2000-10-12 2002-07-23 Ase Americas, Inc. Gas assisted laser cutting of thin and fragile materials
JP2002283088A (ja) * 2001-03-23 2002-10-02 Sumitomo Heavy Ind Ltd レーザ加工の裏面傷防止方法及びレーザ加工装置
TW524726B (en) * 2001-04-23 2003-03-21 Furukawa Electric Co Ltd Adhesive tape for laser dicing
JP2004322157A (ja) * 2003-04-25 2004-11-18 Nitto Denko Corp 被加工物の加工方法、及びこれに用いる粘着シート
CN1579697A (zh) * 2003-08-07 2005-02-16 鸿富锦精密工业（深圳）有限公司 一种激光加工方法
CN1704213A (zh) * 2004-05-28 2005-12-07 宝丽科技集团有限公司 具双喷嘴的脆性工件切割设备
JP4873863B2 (ja) * 2005-01-14 2012-02-08 日東電工株式会社 レーザー加工品の製造方法及びレーザー加工用粘着シート
JP2006255728A (ja) * 2005-03-15 2006-09-28 Amada Co Ltd レーザ加工装置及びレーザ加工方法

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