JP2011224795A - Method for producing multilayer copper-clad laminated sheet - Google Patents

Method for producing multilayer copper-clad laminated sheet Download PDF

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JP2011224795A
JP2011224795A JP2010094008A JP2010094008A JP2011224795A JP 2011224795 A JP2011224795 A JP 2011224795A JP 2010094008 A JP2010094008 A JP 2010094008A JP 2010094008 A JP2010094008 A JP 2010094008A JP 2011224795 A JP2011224795 A JP 2011224795A
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multilayer copper
clad laminate
multilayer
copper
laminated sheet
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Takehiro Kawamatsu
武裕 川松
Nobutaka Shibata
信隆 柴田
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method for producing a multilayer copper-clad laminated sheet that prevents warpage, variation of its dimensional accuracy by uniform dimensional shrinkage, and deformation (distortion) of the multilayer copper-clad laminated sheet.SOLUTION: The multilayer copper-clad laminated sheet includes an inner layer circuit board in which a circuit has been formed in advance, an outer layer plate or copper foil, and a prepreg. The method of producing the multilayer copper-clad laminated sheet includes the steps of: superposing the inner layer circuit board with the circuit formed thereon on the outer layer plate or the copper foil through the prepreg to form a laminate; alternately laminating the laminates and metal plates to an allowable height in a press stage; heat-pressing the laminates by a press and bonding them to form a multilayer copper-clad laminated sheet; and immediately after the heat-pressing, extracting the multilayer copper-clad laminated sheet and the metal plates from the inside of the press stage while being alternately laminated, and leaving them to cool down.

Description

本発明は、多層銅張積層板の製造方法に関する。   The present invention relates to a method for producing a multilayer copper clad laminate.

近年、エレクトロニクスの高性能化、高機能化に伴って、プリント配線板の高密度化、高多層化が進み、加工時の寸法変化が少ないものが望まれている。多層プリント配線板の製造においては、その寸法変化を少なくするために、低圧で多層化積層成形をすることが知られている。しかし、低圧成形ではボイド、かすれを発生する問題があり、これを防止するために真空囲い込みのプレスを用いて減圧で積層成形することも行われる。更に、設計の時点で寸法補正を行うことによって、寸法を制御することも行われてきた。
また、多層プリント配線板を加工する際の寸法変化が少ない、多層銅張積層板の製造方法において、加熱加圧後、更に積層成形温度±20℃の温度範囲で熱処理する方法が開示されている(特許文献1参照)。
In recent years, with the increase in performance and functionality of electronics, the density of printed wiring boards has increased and the number of layers has increased. In the production of multilayer printed wiring boards, it is known to perform multilayer lamination molding at low pressure in order to reduce the dimensional change. However, there is a problem of generating voids and blurring in low pressure molding, and in order to prevent this, lamination molding is also performed at a reduced pressure using a vacuum enclosure press. Further, the size has been controlled by correcting the size at the time of design.
In addition, in a method for producing a multilayer copper-clad laminate, in which a dimensional change when processing a multilayer printed wiring board is small, a method is disclosed in which heat treatment is further performed in a temperature range of a lamination molding temperature ± 20 ° C. after heating and pressing. (See Patent Document 1).

特開平5−147058号公報Japanese Patent Laid-Open No. 5-147058

従来の多層銅張積層板の製造方法は、予め回路形成された内層回路板をプリプレグと組合せ最外層に銅箔を組合せた状態とし、それらを金属板を用いてプレス段内の許容範囲の高さまで交互に積載、組合せしプレス機内に挿入した後にプレス機で自動制御により加熱加圧、更には冷却という工程を経て多層銅張積層板を製造していたが、冷却工程での急激な冷却により多層銅張積層板の反り、更には変形(歪み)が発生し、また多層銅張積層板の冷却はプレス段内に組合された多層銅張積層板の最上下からプレス段内の中央側へと順に冷却されるため、プレス段内最上下の多層銅張積層板と中央側の多層銅張積層板に寸法収縮の差すなわちプレス段内での寸法精度のばらつきが発生していた。
本発明は、多層銅張積層板の反りを抑制することが可能であり、寸法収縮を均一に収縮させ寸法精度のばらつきを抑制し、更に多層銅張積層板の変形(歪み)を抑制することが可能である多層銅張積層板の製造方法を提供するものである。
A conventional method for manufacturing a multilayer copper clad laminate is a state in which a pre-circuited inner layer circuit board is combined with a prepreg, and a copper foil is combined with an outermost layer. After stacking, combining and inserting into the press machine, the multilayer copper clad laminate was manufactured through the process of heating and pressurization and further cooling by automatic control by the press machine, but due to the rapid cooling in the cooling process The warp of the multilayer copper clad laminate, and further deformation (distortion) occurs, and the cooling of the multilayer copper clad laminate is from the bottom of the multilayer copper clad laminate combined in the press stage to the center side in the press stage. Therefore, a difference in dimensional shrinkage between the multilayer copper clad laminate at the lowermost position in the press stage and the multilayer copper clad laminate on the center side, that is, variation in dimensional accuracy within the press stage occurred.
The present invention can suppress warping of a multilayer copper-clad laminate, uniformly reduce dimensional shrinkage, suppress variation in dimensional accuracy, and further suppress deformation (distortion) of the multilayer copper-clad laminate. The present invention provides a method for producing a multilayer copper-clad laminate that can be used.

本発明は以下の通りである。
(1) 予め回路形成された内層回路板と、外層板又は銅箔と、プリプレグとからなる多層銅張積層板の製造方法において、予め回路形成された内層回路板と、外層板又は銅箔とをプリプレグを介して重ねて積層体とする工程、前記積層体と、金属板とを、プレス段内の許容範囲の高さまで交互に積載する工程、前記積層体をプレスにて加熱加圧して多層化接着し多層銅張積層板とする工程、加熱加圧直後プレス段内から前記多層銅張積層板と金属板とが交互に積載された形態で抜取りし放置冷却する工程を有する多層銅張積層板の製造方法。
(2) 放置冷却する工程において、多層銅張積層板の冷却速度が3℃/分以下であることを特徴とする(1)記載の多層銅張積層板の製造方法。
The present invention is as follows.
(1) In the manufacturing method of the multilayer copper clad laminated board which consists of the inner-layer circuit board by which the circuit was formed beforehand, the outer-layer board or copper foil, and the prepreg, the inner-layer circuit board by which the circuit was previously formed, the outer-layer board or copper foil, Are stacked through a prepreg to form a laminated body, the laminated body and the metal plate are alternately stacked up to an allowable height in a press stage, and the laminated body is heated and pressed by a press to form a multilayer. Multi-layer copper-clad laminate having a step of forming a multilayer copper-clad laminate by heating and pressurizing, and a step in which the multilayer copper-clad laminate and the metal plate are alternately stacked from the press stage immediately after heating and pressurizing and left to cool A manufacturing method of a board.
(2) The method for producing a multilayer copper-clad laminate according to (1), wherein the cooling rate of the multilayer copper-clad laminate is 3 ° C./min or less in the step of cooling by standing.

本発明により、多層銅張積層板の反りを抑制することが可能であり、寸法収縮を均一に収縮させ寸法精度のばらつきを抑制し、更に多層銅張積層板の変形(歪み)を抑制することが可能である多層銅張積層板の製造方法を提供することが可能となった。   According to the present invention, it is possible to suppress warping of a multilayer copper-clad laminate, uniformly reduce dimensional shrinkage, suppress variation in dimensional accuracy, and further suppress deformation (distortion) of the multilayer copper-clad laminate. It is possible to provide a method for producing a multilayer copper-clad laminate that is possible.

加熱加圧後すなわち冷却する前の高温状態でプレス段内(機内)から抜取り、放置冷却させるときの多層銅張積層板の放置形態・状態を示した模式図である。It is the schematic diagram which showed the leaving form and state of the multilayer copper clad laminated board when extracting from the press stage (inside the machine) in the high temperature state after heating and pressurization, ie, before cooling, and leaving it to cool. 多層銅張積層板をプレス段内(機内)で加熱加圧されている形態のまま抜取り放置し、冷却速度3℃/分以下で放置冷却させたときの多層銅張積層板の温度チャート図である。In the temperature chart of the multilayer copper clad laminate when the multilayer copper clad laminate is left as it is heated and pressurized in the press stage (in-machine) and allowed to cool at a cooling rate of 3 ° C / min or less. is there.

本発明の多層銅張積層板の製造方法は、予め回路形成された内層回路板と、外層板又は銅箔と、プリプレグとからなる多層銅張積層板の製造方法において、予め回路形成された内層回路板と、外層板又は銅箔とをプリプレグを介して重ねて積層体とする工程、前記積層体と、金属板とを、プレス段内の許容範囲の高さまで交互に積載する工程、前記積層体を加熱加圧して多層化接着し多層銅張積層板とする工程、加熱加圧直後プレス段内から前記多層銅張積層板と金属板とが交互に積載された形態で抜取りし放置冷却する工程を有することを特徴とする。   The method for producing a multilayer copper-clad laminate of the present invention is a method for producing a multilayer copper-clad laminate comprising an inner-layer circuit board formed in advance with a circuit, an outer layer board or copper foil, and a prepreg. A step of laminating a circuit board and an outer layer plate or copper foil through a prepreg to form a laminated body, a step of alternately laminating the laminated body and a metal plate to an allowable height in a press stage, and the laminating The process of heating and pressing the body to form a multilayer copper-clad laminate, and immediately after the heating and pressing, the multilayer copper-clad laminate and the metal plate are taken out from the press stage in a stacked form and allowed to cool. It has the process.

本発明の多層銅張積層板の製造方法において、加熱加圧後すなわち冷却する前の高温状態でプレス機内から金属板と交互に積載、組み合わされた多層銅張積層板をプレス機内で加熱加圧されている形態のまま抜取りし放置冷却させる。あるいは、積載された形態のまま抜取りし放置冷却させてもよい。よって、加熱加圧後、プレス段内(機内)で、冷却という工程は行わない。   In the method for producing a multilayer copper-clad laminate of the present invention, the multilayer copper-clad laminate that is alternately stacked with metal plates from the press machine in a high-temperature state after heating and pressing, that is, before cooling, is heated and pressurized in the press machine. It is extracted as it is and allowed to cool. Alternatively, the stacked form may be extracted and left to cool. Therefore, the process of cooling is not performed in the press stage (inside the machine) after heating and pressurization.

また、本発明は、加熱加圧後すなわち冷却する前の高温状態でプレス機内から金属板と交互に積載、組み合わされた多層銅張積層板をプレス機内で加熱加圧されている形態のまま抜取り放置し、冷却速度3℃/分以下で放置冷却させることが好ましい。また、多層銅張積層板の冷却速度は、2℃/分以下がより好ましく、1℃/分以下が特に好ましい。
なお、冷却速度とは、多層銅張積層板の冷却速度であり、熱電対等で測定することが可能である。冷却速度が3℃/分を超えると、冷却が急激であり、多層銅張積層板の反り等が発生しやすくなる。
In addition, the present invention is a method in which a multilayer copper clad laminate is alternately stacked with metal plates from the press machine in a high temperature state after heating and pressing, that is, before cooling, and the combined multilayer copper clad laminates are extracted in the form of being heated and pressed in the press machine. It is preferable to stand and cool at a cooling rate of 3 ° C./min or less. The cooling rate of the multilayer copper clad laminate is more preferably 2 ° C./min or less, and particularly preferably 1 ° C./min or less.
The cooling rate is the cooling rate of the multilayer copper-clad laminate and can be measured with a thermocouple or the like. When the cooling rate exceeds 3 ° C./min, the cooling is rapid and the warp of the multilayer copper-clad laminate tends to occur.

また、本発明は、加熱加圧後すなわち冷却する前の高温状態でプレス機内から金属板と交互に積載、組み合わされた多層銅張積層板をプレス機内で加熱加圧されている形態のまま抜取り放置し、冷却速度3℃/分以下で放置冷却させることで多層銅張積層板の反りを抑制することが可能である。
また、本発明は、加熱加圧後すなわち冷却する前の高温状態でプレス機内から金属板と交互に積載、組み合わされた多層銅張積層板をプレス機内で加熱加圧されている形態のまま抜取り放置し、冷却速度3℃/分以下で放置冷却させることでプレス段内に金属板を用いて組み合わされた多層銅張積層板の寸法収縮を均一に収縮させ寸法精度のばらつきを抑制、更に多層銅張積層板の変形(歪み)を抑制することが可能である。
In addition, the present invention is a method in which a multilayer copper clad laminate is alternately stacked with metal plates from the press machine in a high temperature state after heating and pressing, that is, before cooling, and the combined multilayer copper clad laminates are extracted in the form of being heated and pressed in the press machine. It is possible to suppress warping of the multilayer copper-clad laminate by leaving it to stand and cooling it at a cooling rate of 3 ° C./min or less.
In addition, the present invention is a method in which a multilayer copper clad laminate is alternately stacked with metal plates from the press machine in a high temperature state after heating and pressing, that is, before cooling, and the combined multilayer copper clad laminates are extracted in the form of being heated and pressed in the press machine. By allowing to stand and cooling at a cooling rate of 3 ° C / min or less, the dimensional shrinkage of multilayer copper clad laminates combined with metal plates in the press stage can be uniformly shrunk, and variation in dimensional accuracy can be suppressed. It is possible to suppress deformation (distortion) of the copper-clad laminate.

前記の本発明の多層銅張積層板の製造方法について詳述する。プレス機内で加熱加圧後すなわち冷却する前の高温状態でプレス機内から加熱加圧されている形態のまま抜取りし放置冷却させるが、このときの冷却は3℃/分以下で冷却できるように、通常、多層銅張積層板を放置する環境の外気温を調整する。よって、外気温は、10〜40℃が好ましく、20〜35℃がより好ましい。また、高温状態で抜取った多層銅張積層板は放置形態・状態での影響を受け易く反り発生等に起因する恐れがあるため、放置場所は平坦な場所すなわち多層銅張積層板がフラットな状態になる場所とするのが好ましい。
なおプレスにおける加熱加圧条件は特に限定しないが、通常、1〜10MPa、80〜250℃、20分〜10時間程度である。本発明において、使用される内層回路板、外層板、プリプレグなどの樹脂は、ポリイミド樹脂、エポキシ樹脂、ポリエステル樹脂など一般に多層板に使用される樹脂全般にわたり、また、使用されるプリプレグの基材は、ガラスクロス、ポリエステルクロス、ガラスペ−パ−など多層板に使用する基材全般にわたる。
The manufacturing method of the multilayer copper clad laminate of the present invention will be described in detail. After heating and pressurizing in the press machine, that is, in a high temperature state before cooling, it is extracted from the press machine in the form of being heated and pressurized and allowed to cool, but the cooling at this time can be cooled at 3 ° C./min or less, Usually, the outside temperature of the environment in which the multilayer copper-clad laminate is left is adjusted. Therefore, 10-40 degreeC is preferable and, as for outside temperature, 20-35 degreeC is more preferable. Also, multilayer copper-clad laminates removed at high temperatures are easily affected by neglected form / state and may be caused by warping, etc., so the neglected place is flat, that is, the multilayer copper-clad laminate is flat. It is preferable to be a place where a state is reached.
In addition, although the heating-pressing conditions in a press are not specifically limited, Usually, it is about 1-10 MPa, 80-250 degreeC, 20 minutes-about 10 hours. In the present invention, the inner layer circuit board, the outer layer board, the prepreg and the like used in the resin are generally used for multilayer boards such as polyimide resin, epoxy resin and polyester resin, and the prepreg base material used is , Glass cloth, polyester cloth, glass paper, etc.

以下、本発明の好適な実施例について説明するが、本発明はこれらの実施例に限定されるものではない。
(実施例1)
銅箔厚み35μm、全体の厚み0.28mmのガラス基材エポキシ樹脂両面銅張積層板を試料として、エッチング法によって回路加工し、更に回路の銅箔面を酸化処理した。上記の方法で得た内層回路板の上下に、厚み0.1mmのガラス布に上記内層回路板に用いたと同じエポキシ樹脂を主成分としたワニスを含浸乾燥して樹脂分52%としたプリプレグを各1枚、更にその外側上下に厚み18μmの銅箔を配置し、積層体とした。図1に示すように、キャリア板上に、この積層体(多層銅張積層板)と、金属板とを、プレス段内の許容範囲の高さまで交互に積載し、さらに、上蓋とクッション紙を重ね、この形態にてプレス段内に挿入した。さらに、減圧下で2.94MPa、170℃で90分間加熱加圧成形して4層板(多層銅張積層板)を得た。
更に、冷却プレスをせず、加熱加圧後、前記形態の状態で、プレス段内から抜取りし、25℃の雰囲気中に放置した。多層銅張積層板の温度チャート(図2参照、熱電対にて多層銅張積層板内の温度を測定)に示されたように多層銅張積層板の冷却速度は、3℃/分であった。
EXAMPLES Hereinafter, although the suitable Example of this invention is described, this invention is not limited to these Examples.
Example 1
A glass substrate epoxy resin double-sided copper-clad laminate having a copper foil thickness of 35 μm and a total thickness of 0.28 mm was used as a sample, and the circuit was processed by an etching method, and the copper foil surface of the circuit was further oxidized. A prepreg having a resin content of 52% by impregnating and drying a varnish mainly composed of the same epoxy resin as that used for the inner layer circuit board on a glass cloth having a thickness of 0.1 mm above and below the inner layer circuit board obtained by the above method. A copper foil having a thickness of 18 μm was disposed on each of the sheets and further on the upper and lower sides thereof to form a laminate. As shown in FIG. 1, this laminate (multilayer copper clad laminate) and a metal plate are alternately stacked on a carrier plate up to an allowable height in the press stage, and an upper lid and cushion paper are further mounted. Overlap and insert into the press stage in this form. Furthermore, it was heat-press molded for 90 minutes at 2.94 MPa and 170 ° C. under reduced pressure to obtain a four-layer board (multilayer copper-clad laminate).
Further, without performing a cooling press, after heating and pressurizing, in the state of the above-described form, it was extracted from the press stage and left in an atmosphere of 25 ° C. As shown in the temperature chart of the multilayer copper clad laminate (see FIG. 2, the temperature inside the multilayer copper clad laminate is measured with a thermocouple), the cooling rate of the multilayer copper clad laminate was 3 ° C./min. It was.

(比較例1)
銅箔厚み35μm、全体の厚み0.28mmのガラス基材エポキシ樹脂両面銅張積層板を試料として、エッチング法によって回路加工し、更に回路の銅箔面を酸化処理した。上記の方法で得た内層回路板の上下に、厚み0.1mmのガラス布に上記内層回路板に用いたと同じエポキシ樹脂を主成分としたワニスを含浸乾燥して樹脂分52%としたプリプレグを各1枚、更にその外側上下に厚み18μmの銅箔を配置し、積層体とした。図1に示すように、キャリア板上に、この積層体(多層銅張積層板)と、金属板とを、プレス段内の許容範囲の高さまで交互に積載し、さらに、上蓋とクッション紙を重ね、この形態にてプレス段内に挿入した。さらに、減圧下で2.94MPa、170℃で90分間加熱加圧成形し、その圧力のまま30分間冷却して4層板(多層銅張積層板)を得た。
(Comparative Example 1)
A glass substrate epoxy resin double-sided copper-clad laminate having a copper foil thickness of 35 μm and a total thickness of 0.28 mm was used as a sample, and the circuit was processed by an etching method, and the copper foil surface of the circuit was further oxidized. A prepreg having a resin content of 52% by impregnating and drying a varnish mainly composed of the same epoxy resin as that used for the inner layer circuit board on a glass cloth having a thickness of 0.1 mm above and below the inner layer circuit board obtained by the above method. A copper foil having a thickness of 18 μm was disposed on each of the sheets and further on the upper and lower sides thereof to form a laminate. As shown in FIG. 1, this laminate (multilayer copper clad laminate) and a metal plate are alternately stacked on a carrier plate up to an allowable height in the press stage, and an upper lid and cushion paper are further mounted. Overlap and insert into the press stage in this form. Furthermore, it heat-press-molded for 90 minutes at 2.94 MPa and 170 degreeC under pressure reduction, and it cooled for 30 minutes with the pressure, and obtained the 4 layer board (multilayer copper clad laminated board).

実施例1及び比較例1によって得た4層板(多層銅張積層板)から採った500×500mmの試験片について基板の反り量、寸法変化率を求めた。
寸法変化率については、多層化積層成形後の多層板の寸法を基準として、多層プリント配線板加工におけるソルダ−レベラ−後の変化率を求めた。実施例1の多層板の変化率は、1%であり、比較例1の多層板の変化率は、2%であった。
実施例1の試験片の反り量は、0.15mmであり、比較例1の多層板の反り量は、0.5mmであった。
The amount of warpage and the dimensional change rate of the test piece of 500 × 500 mm taken from the four-layer board (multilayer copper-clad laminate) obtained in Example 1 and Comparative Example 1 were determined.
About the dimensional change rate, the change rate after the solder leveler in multilayer printed wiring board processing was calculated | required on the basis of the dimension of the multilayer board after multilayer lamination molding. The change rate of the multilayer board of Example 1 was 1%, and the change rate of the multilayer board of Comparative Example 1 was 2%.
The warpage amount of the test piece of Example 1 was 0.15 mm, and the warpage amount of the multilayer board of Comparative Example 1 was 0.5 mm.

予め回路形成された内層回路板をプリプレグと組合せ最外層に銅箔を組合せた状態とし、それらを金属板を用いてプレス段内の許容範囲の高さまで交互に積載、組合せし加熱加圧して多層化接着する多層銅張積層板の製造方法において、加熱加圧後すなわち冷却する前の高温状態でプレス機内から金属板と交互に積載、組み合わされた多層銅張積層板をプレス機内で加熱加圧されている形態のまま抜取り放置し、3℃/分以下で放置冷却させることで多層銅張積層板の反り量を従来と比較し約70%低減、さらにプレス段内に金属板を用いて組み合わされた多層銅張積層板の寸法精度のばらつき・変形(歪み)を従来と比較し約50%低減することが可能となった。   Pre-circuited inner layer circuit board is combined with prepreg, and copper foil is combined with outermost layer, and these are stacked alternately with metal plate up to the allowable range in the press stage, combined, heated and pressed to make multilayer In the manufacturing method of multilayer copper clad laminates to be adhesively bonded, the multilayer copper clad laminates that are alternately stacked with metal plates from the press machine in a high temperature state after heating and pressing, that is, before cooling, are heated and pressurized in the press machine. As it is, it is left as it is and allowed to cool at 3 ° C / min or less, so that the amount of warpage of the multilayer copper clad laminate is reduced by about 70% compared to the conventional method. The variation and deformation (distortion) of the dimensional accuracy of the multilayer copper-clad laminate made can be reduced by about 50% compared to the conventional case.

1.上蓋、2.クッション紙、3.金属板、4.多層銅張積層板、5.キャリア板 1. Upper lid, 2. Cushion paper, 3. Metal plate, 4. 4. Multi-layer copper clad laminate, Carrier board

Claims (2)

予め回路形成された内層回路板と、外層板又は銅箔と、プリプレグとからなる多層銅張積層板の製造方法において、予め回路形成された内層回路板と、外層板又は銅箔とをプリプレグを介して重ねて積層体とする工程、前記積層体と、金属板とを、プレス段内の許容範囲の高さまで交互に積載する工程、前記積層体をプレスにて加熱加圧して多層化接着し多層銅張積層板とする工程、加熱加圧直後プレス段内から前記多層銅張積層板と金属板とが交互に積載された形態で抜取りし放置冷却する工程を有する多層銅張積層板の製造方法。   In a method for producing a multilayer copper clad laminate comprising a pre-circuited inner layer circuit board, an outer layer board or copper foil, and a prepreg, the prepreg of the inner layer circuit board and the outer layer board or copper foil pre-formed with a circuit is prepared. A step of laminating and stacking the laminate and the metal plate alternately up to the allowable height in the press stage, and heating and pressurizing the laminate with a press for multilayer adhesion Production of a multilayer copper clad laminate, comprising a step of forming a multilayer copper clad laminate, a step of extracting the multilayer copper clad laminate and the metal plate from the press stage immediately after heating and pressing in a form in which they are alternately stacked, and allowing to cool. Method. 放置冷却する工程において、多層銅張積層板の冷却速度が3℃/分以下であることを特徴とする請求項1記載の多層銅張積層板の製造方法。   2. The method for producing a multilayer copper-clad laminate according to claim 1, wherein the cooling rate of the multilayer copper-clad laminate is 3 [deg.] C./min or less in the step of standing cooling.
JP2010094008A 2010-04-15 2010-04-15 Method for producing multilayer copper-clad laminated sheet Pending JP2011224795A (en)

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