TWI581958B - Production method of metal laminated sheet, printed wiring board, metal sheet, and manufacturing method of printed wiring board - Google Patents

Production method of metal laminated sheet, printed wiring board, metal sheet, and manufacturing method of printed wiring board Download PDF

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Publication number
TWI581958B
TWI581958B TW105132824A TW105132824A TWI581958B TW I581958 B TWI581958 B TW I581958B TW 105132824 A TW105132824 A TW 105132824A TW 105132824 A TW105132824 A TW 105132824A TW I581958 B TWI581958 B TW I581958B
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metal
thickness
conductor circuit
insulating layer
reinforcing material
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TW105132824A
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TW201808621A (en
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福住浩之
小山雅也
宇野稔
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松下知識產權經營股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/036Multilayers with layers of different types
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/14Layered products comprising a layer of metal next to a fibrous or filamentary layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/18Layered products comprising a layer of metal comprising iron or steel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/061Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/32Layered products comprising a layer of synthetic resin comprising polyolefins
    • B32B27/322Layered products comprising a layer of synthetic resin comprising polyolefins comprising halogenated polyolefins, e.g. PTFE
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/34Layered products comprising a layer of synthetic resin comprising polyamides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/06Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/02Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/025Electric or magnetic properties
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0271Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0366Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement reinforced, e.g. by fibres, fabrics
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • H05K3/025Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2260/00Layered product comprising an impregnated, embedded, or bonded layer wherein the layer comprises an impregnation, embedding, or binder material
    • B32B2260/04Impregnation, embedding, or binder material
    • B32B2260/046Synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/02Synthetic macromolecular fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/02Synthetic macromolecular fibres
    • B32B2262/0223Vinyl resin fibres
    • B32B2262/0238Vinyl halide, e.g. PVC, PVDC, PVF, PVDF
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/02Synthetic macromolecular fibres
    • B32B2262/0261Polyamide fibres
    • B32B2262/0269Aromatic polyamide fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/02Synthetic macromolecular fibres
    • B32B2262/0276Polyester fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2262/00Composition or structural features of fibres which form a fibrous or filamentary layer or are present as additives
    • B32B2262/10Inorganic fibres
    • B32B2262/101Glass fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/732Dimensional properties
    • B32B2307/734Dimensional stability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Laminated Bodies (AREA)

Description

附金屬之積層板、印刷配線板、附金屬之積層板之製造方法及印刷配線板之製造方法Metal-clad laminate, printed wiring board, metal-clad laminate manufacturing method, and printed wiring board manufacturing method

發明領域 本發明是有關於一種附金屬之積層板、印刷配線板、附金屬之積層板之製造方法及印刷配線板之製造方法。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal-clad laminate, a printed wiring board, a method of manufacturing a metal-clad laminate, and a method of manufacturing a printed wiring board.

發明背景 近年來,伴隨著電子機器的高功能化、高密度化,電子零件有越來越小型化、高集成化、高速化、多插腳化的傾向。伴隨於此,印刷配線板的高密度化、小徑化、輕量化、薄板化的要求也提高。特別是,厚度薄的印刷配線板容易發生翹曲。Background of the Invention In recent years, with the increase in the functionality and density of electronic devices, electronic components have become more and more compact, highly integrated, high-speed, and multi-pin. Along with this, the demand for higher density, smaller diameter, lighter weight, and thinnerness of the printed wiring board is also improved. In particular, a printed wiring board having a small thickness is likely to be warped.

作為即使厚度薄也不容易發生翹曲的附銅之積層板,在專利文獻1、2中,揭示有一種附銅之積層板,其重疊複數片含有無機填充材之預浸體,且在其一面或兩面上配置銅箔,藉由多段真空壓製法積層成形而製得。 先前技術文獻As a copper-clad laminate which is less likely to warp even if the thickness is thin, Patent Literatures 1 and 2 disclose a copper-clad laminate in which a plurality of prepregs containing an inorganic filler are stacked, and A copper foil is disposed on one or both sides and is formed by multi-stage vacuum pressing. Prior technical literature

專利文獻 專利文獻1:日本專利特開2011-195476號公報 專利文獻2:日本專利特開2012-052110號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2011-195476. Patent Document 2: Japanese Patent Laid-Open Publication No. 2012-052110

發明概要 但是,如專利文獻1、2記載之藉由多段真空壓製法得到的附銅之積層板,恐有無法充分地因應薄板化的要求之虞。SUMMARY OF THE INVENTION However, as for the copper-clad laminate obtained by the multi-stage vacuum pressing method described in Patent Documents 1 and 2, there is a fear that the demand for thinning cannot be sufficiently satisfied.

又,在多層印刷配線板的製造中,必須將內層基板的導體電路埋入至絕緣層內。藉由多段真空壓製法得到的多層印刷配線板,有時會有內層基板的導體電路對絕緣層內的埋入不充分,而在絕緣層內發生氣泡殘留的情況。恐有此情況成為原因而導致在焊接組裝時發生層間剝離之虞。過去,為了防止此種層間剝離的發生,必須增加構成絕緣層之樹脂的量,其結果是,絕緣層的厚度增加,多層印刷配線板的薄板化有其極限。再者,由於增加了構成絕緣層之樹脂的量,恐有彈性率降低,多層印刷配線板的翹曲變得容易發生之虞。Further, in the manufacture of a multilayer printed wiring board, it is necessary to embed the conductor circuit of the inner layer substrate in the insulating layer. In the multilayer printed wiring board obtained by the multi-stage vacuum pressing method, the conductor circuit of the inner layer substrate may be insufficiently buried in the insulating layer, and bubbles may remain in the insulating layer. It is feared that this is the cause of the occurrence of delamination during the assembly of the solder. In the past, in order to prevent the occurrence of such interlayer peeling, it is necessary to increase the amount of the resin constituting the insulating layer. As a result, the thickness of the insulating layer is increased, and the thickness of the multilayer printed wiring board is limited. In addition, since the amount of the resin constituting the insulating layer is increased, the elastic modulus is lowered, and the warpage of the multilayer printed wiring board is likely to occur.

因此,本發明提供一種附金屬之積層板、印刷配線板、附金屬之積層板之製造方法及印刷配線板之製造方法,其可作成能充分地因應薄板化,即使厚度較薄,在焊接組裝時也不容易發生層間剝離,而且能抑制因溫度變化造成的翹曲量之印刷配線板。Therefore, the present invention provides a metal-clad laminate, a printed wiring board, a method of manufacturing a metal-clad laminate, and a method of manufacturing a printed wiring board, which can be made to sufficiently conform to thinning, even if the thickness is thin, in solder assembly It is also difficult to cause interlayer peeling and a printed wiring board capable of suppressing the amount of warpage caused by temperature changes.

第一發明之附金屬之積層板具備:絕緣層,其具有第一面及第二面;第一金屬層,其積層於絕緣層的第一面上;第二金屬層,其積層於絕緣層的第二面上。絕緣層包含補強材及含浸於補強材的熱固性樹脂組成物之硬化物,第一金屬層及第二金屬層的層間厚度Ta1與補強材的厚度Tb1的關係為:0≦Ta1-Tb1≦2μm。The metal-clad laminate of the first invention comprises: an insulating layer having a first surface and a second surface; a first metal layer laminated on the first surface of the insulating layer; and a second metal layer laminated on the insulating layer On the second side. The insulating layer includes a reinforcing material and a cured product of the thermosetting resin composition impregnated with the reinforcing material, and the relationship between the interlayer thickness Ta1 of the first metal layer and the second metal layer and the thickness Tb1 of the reinforcing material is 0≦Ta1-Tb1≦2 μm.

第二發明之附金屬之積層板具備:第一絕緣層;導體電路,其積層於第一絕緣層上;第二絕緣層,其積層於第一絕緣層及導體電路上;金屬層,其積層於第二絕緣層上。第二絕緣層包含補強材及含浸於補強材的熱固性樹脂組成物之硬化物,導體電路及金屬層的層間厚度Ta2與補強材的厚度Tb2的關係為:0≦Ta2-Tb2≦2μm。The metal-clad laminate of the second invention comprises: a first insulating layer; a conductor circuit laminated on the first insulating layer; a second insulating layer laminated on the first insulating layer and the conductor circuit; and a metal layer laminated thereon On the second insulating layer. The second insulating layer includes a reinforcing material and a cured product of the thermosetting resin composition impregnated with the reinforcing material, and the relationship between the interlayer thickness Ta2 of the conductor circuit and the metal layer and the thickness Tb2 of the reinforcing material is 0≦Ta2-Tb2≦2 μm.

第三發明之印刷配線板具備:第一絕緣層;第一導體電路,其積層於第一絕緣層上;第二絕緣層,其積層於第一絕緣層及第一導體電路上;第二導體電路,其積層於第二絕緣層上。第二絕緣層包含補強材及含浸於補強材的熱固性樹脂組成物之硬化物,第一導體電路及第二導體電路的層間厚度Ta3與補強材的厚度Tb3的關係為:0≦Ta3-Tb3≦2μm。A printed wiring board according to a third aspect of the invention includes: a first insulating layer; a first conductor circuit laminated on the first insulating layer; a second insulating layer laminated on the first insulating layer and the first conductor circuit; and a second conductor A circuit that is laminated on the second insulating layer. The second insulating layer comprises a reinforcing material and a cured product of the thermosetting resin composition impregnated with the reinforcing material, and the relationship between the interlayer thickness Ta3 of the first conductor circuit and the second conductor circuit and the thickness Tb3 of the reinforcing material is: 0≦Ta3-Tb3≦ 2 μm.

第四發明之附金屬之積層板之製造方法包含:準備步驟,準備在兩面或一面上已具備導體電路的芯基板;積層步驟,藉由在具備導體電路的面上依序積層預浸體及金屬箔,以製作積層物;加熱加壓成形步驟,連續地將積層物供給至轉動的一對環形帶間,並在一對環形帶間加熱加壓成形積層物。預浸體包含補強材及含浸於補強材的熱固性樹脂組成物,加熱加壓成形後的導體電路及金屬箔的層間厚度Ta2與補強材的厚度Tb2的關係為:0≦Ta2-Tb2≦2μm。A method for manufacturing a metal-clad laminate according to a fourth aspect of the invention includes: a preparation step of preparing a core substrate having a conductor circuit on both sides or one side; and a laminating step of sequentially laminating the prepreg on a surface having the conductor circuit The metal foil is used to form a laminate; the heat and pressure forming step is continuously supplied between the pair of rotating endless belts, and the laminated body is heated and pressed between the pair of endless belts. The prepreg includes a reinforcing material and a thermosetting resin composition impregnated with the reinforcing material, and the relationship between the interlayer thickness Ta2 of the conductor circuit and the metal foil after heating and press forming and the thickness Tb2 of the reinforcing material is 0≦Ta2-Tb2≦2 μm.

第五發明之印刷配線板之製造方法是以附金屬之積層板之製造方法製造附金屬之積層板,且對金屬箔實施配線形成處理。In the method of manufacturing a printed wiring board according to a fifth aspect of the invention, a metal-clad laminate is produced by a method of manufacturing a metal-clad laminate, and a wiring formation process is performed on the metal foil.

根據本發明,可作成能充分地因應薄板化,即使厚度較薄,在焊接組裝時也不容易發生層間剝離,而且能抑制因溫度變化造成的翹曲量之印刷配線板。According to the present invention, it is possible to produce a printed wiring board capable of sufficiently reducing the amount of warpage caused by temperature change even when the thickness is thin, and the interlayer peeling is not easily caused during soldering and assembly.

較佳實施例之詳細說明 以下,說明本發明之實施形態。 [第一實施形態之附金屬之積層板100]DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described. [Metal-attached laminated board 100 of the first embodiment]

圖1是本發明的第一實施形態之附金屬之積層板100的概略截面圖。Fig. 1 is a schematic cross-sectional view showing a metal-clad laminate 100 according to a first embodiment of the present invention.

附金屬之積層板100如圖1所示,具備:絕緣層10,其具有第一面10a以及與第一面10a相反側之第二面10b;第一金屬層20;第二金屬層30。第一金屬層20是積層於絕緣層10的第一面10a上。第二金屬層30是積層於絕緣層10的第二面10b上。絕緣層10包含補強材11以及含浸於補強材11的熱固性樹脂組成物之硬化物12。As shown in FIG. 1, the metal-clad laminate 100 includes an insulating layer 10 having a first surface 10a and a second surface 10b opposite to the first surface 10a, a first metal layer 20, and a second metal layer 30. The first metal layer 20 is laminated on the first surface 10a of the insulating layer 10. The second metal layer 30 is laminated on the second surface 10b of the insulating layer 10. The insulating layer 10 includes a reinforcing material 11 and a cured product 12 of a thermosetting resin composition impregnated with the reinforcing material 11.

在第一實施形態中,如圖1所示,第一金屬層20及第二金屬層30的層間厚度Ta1與補強材11的厚度Tb1之厚度差(Ta1-Tb1)為0≦Ta1-Tb1≦2μm,且較佳是1μm≦Ta1-Tb1≦2μm。若厚度差(Ta1-Tb1)超過2μm,則恐有無法充分地因應印刷配線板的薄板化之虞。又,若厚度差(Ta1-Tb1)的範圍為1μm以上及2μm以下,補強材11與第一金屬層20及第二金屬層30(以下,有直接稱為金屬層20、30的情況)則不易接觸,附金屬之積層板100會在電性的可靠性上更加優異。In the first embodiment, as shown in FIG. 1, the thickness difference (Ta1-Tb1) between the interlayer thickness Ta1 of the first metal layer 20 and the second metal layer 30 and the thickness Tb1 of the reinforcing material 11 is 0≦Ta1-Tb1≦. 2 μm, and preferably 1 μm ≦Ta1-Tb1≦2 μm. When the thickness difference (Ta1-Tb1) exceeds 2 μm, there is a fear that the thinning of the printed wiring board cannot be sufficiently satisfied. In addition, when the range of the thickness difference (Ta1-Tb1) is 1 μm or more and 2 μm or less, the reinforcing material 11 and the first metal layer 20 and the second metal layer 30 (hereinafter, referred to simply as the metal layers 20 and 30) It is difficult to contact, and the metal-clad laminate 100 is more excellent in electrical reliability.

層間厚度Ta1及補強材11的厚度Tb1,可利用同樣於實施例記載的方法去測定。要使厚度差(Ta1-Tb1)在上述範圍內,例如,如後述的方法,藉由可將加熱溫度急遽上升的雙帶壓製法,製作附金屬之積層板100即可。又,當絕緣層10是將重疊有複數片預浸體的積層體加以硬化者,且該預浸體包含補強材11及含有於補強材11的熱固性樹脂組成物之半硬化物(B階段狀態)的情況下,補強材11的厚度Tb1是指複數個補強材的厚度以及鄰接的補強材間之熱固性樹脂組成物之硬化物的厚度的合計,與上述補強材11的厚度Tb1同樣的測定即可。The interlayer thickness Ta1 and the thickness Tb1 of the reinforcing material 11 can be measured by the same method as described in the examples. In order to make the thickness difference (Ta1-Tb1) within the above range, for example, a metal-clad laminate 100 may be produced by a double-belt pressing method in which the heating temperature is rapidly increased by a method described later. Further, when the insulating layer 10 is cured by laminating a plurality of prepregs, the prepreg contains the reinforcing material 11 and the semi-cured material of the thermosetting resin composition contained in the reinforcing material 11 (B-stage state) In the case of the thickness Tb1 of the reinforcing material 11, the total thickness of the plurality of reinforcing materials and the thickness of the cured product of the thermosetting resin composition between the adjacent reinforcing materials is the same as the thickness Tb1 of the reinforcing material 11 described above. can.

附金屬之積層板100的板厚較佳是14~90μm,更佳是16~87μm。第一金屬層20與第二金屬層30的層間厚度Ta1較佳是10~50μm,更佳是12~47μm。第一金屬層20與補強材11之間的厚度,以及第二金屬層30與補強材11之間的厚度關係,只要厚度差(Ta1-Tb1)在上述範圍內的話,並無特別限定。例如,可列舉下列情況:第一金屬層20與補強材11之間的厚度,以及第二金屬層30與補強材11之間的厚度為相同的情況;第一金屬層20與補強材11之間的厚度為2μm,第二金屬層30與補強材11之間的厚度為0μm的情況;第一金屬層20與補強材11之間的厚度為0μm,第二金屬層30與補強材11之間的厚度為2μm的情況等。The thickness of the metal-clad laminate 100 is preferably 14 to 90 μm, more preferably 16 to 87 μm. The interlayer thickness Ta1 of the first metal layer 20 and the second metal layer 30 is preferably 10 to 50 μm, more preferably 12 to 47 μm. The thickness between the first metal layer 20 and the reinforcing member 11 and the thickness relationship between the second metal layer 30 and the reinforcing member 11 are not particularly limited as long as the thickness difference (Ta1 - Tb1) is within the above range. For example, a case where the thickness between the first metal layer 20 and the reinforcing member 11 and the thickness between the second metal layer 30 and the reinforcing member 11 are the same may be cited; the first metal layer 20 and the reinforcing member 11 The thickness is 2 μm, the thickness between the second metal layer 30 and the reinforcing material 11 is 0 μm; the thickness between the first metal layer 20 and the reinforcing material 11 is 0 μm, and the second metal layer 30 and the reinforcing material 11 are The case where the thickness is 2 μm or the like.

附金屬之積層板100的焊接耐熱性較佳是260℃以上,更佳是288℃以上。若附金屬之積層板100的焊接耐熱性在上述範圍內,則可作成在焊接組裝時更不易發生層間剝離之印刷配線板。焊接耐熱性可利用同樣於實施例記載的方法去測定。The solder heat resistance of the metal-clad laminate 100 is preferably 260 ° C or higher, more preferably 288 ° C or higher. When the solder heat resistance of the metal-clad laminate 100 is within the above range, it is possible to form a printed wiring board which is less likely to cause interlayer peeling during solder assembly. The solder heat resistance can be measured by the same method as described in the examples.

附金屬之積層板100的翹曲量較佳是20mm以下,更佳是10mm以下。若附金屬之積層板100的翹曲量在上述範圍內,則可作成更能抑制因溫度變化造成的翹曲量之印刷配線板。翹曲量可利用同樣於實施例記載的方法去測定。 (絕緣層10)The amount of warpage of the metal-clad laminate 100 is preferably 20 mm or less, more preferably 10 mm or less. When the amount of warpage of the metal-clad laminate 100 is within the above range, a printed wiring board capable of suppressing the amount of warpage due to temperature change can be formed. The amount of warpage can be measured by the same method as described in the examples. (insulation layer 10)

絕緣層10包含補強材11及含浸於補強材11的熱固性樹脂組成物之硬化物12。The insulating layer 10 includes a reinforcing material 11 and a cured product 12 of a thermosetting resin composition impregnated with the reinforcing material 11.

作為補強材11,例如,可利用下列材料:由玻璃纖維構成的織布或不織布;由芳綸纖維、PBO(聚對伸苯基苯並二噁唑)纖維、PBI(聚苯並咪唑)纖維、PTFE(聚四氟乙烯)纖維、PBZT(聚對伸苯基苯並二噻唑)纖維、全芳族聚酯纖維等有機纖維構成的織布或不織布;由玻璃纖維以外的無機纖維構成的織布或不織布等。補強材11的織法並無特別的限定,例如可列舉如平織、綾織等。作為玻璃纖維的玻璃組成,例如,可列舉如E玻璃、D玻璃、S玻璃、NE玻璃、T玻璃、石英等。補強材11可以是施加過開纖處理者,也可以是藉由矽烷偶合劑等施加過表面處理者。As the reinforcing material 11, for example, the following materials may be used: a woven fabric or a non-woven fabric composed of glass fibers; aramid fiber, PBO (polyparaphenylene benzobisoxazole) fiber, PBI (polybenzimidazole) fiber , woven fabric or non-woven fabric composed of organic fibers such as PTFE (polytetrafluoroethylene) fiber, PBZT (polyparaphenylene benzobisthiazole) fiber, or wholly aromatic polyester fiber; woven fabric composed of inorganic fibers other than glass fiber Cloth or non-woven cloth, etc. The weaving method of the reinforcing material 11 is not particularly limited, and examples thereof include plain weave and weaving. Examples of the glass composition of the glass fiber include E glass, D glass, S glass, NE glass, T glass, and quartz. The reinforcing material 11 may be a person who has applied the fiber opening treatment, or may be a surface treated person by a decane coupling agent or the like.

構成熱固性樹脂組成物之硬化物12的熱固性樹脂組成物含有熱固性樹脂,除了熱固性樹脂之外,也可以含有硬化劑、硬化促進劑、無機填充材、阻燃劑等。作為熱固性樹脂,例如,可利用環氧樹脂、聚醯亞胺樹脂、酚樹脂、雙馬來醯亞胺三嗪樹脂等。作為硬化劑,可利用一級胺或二級胺等二胺系硬化劑、二官能基以上之酚系硬化劑、酸酐系硬化劑、雙氰胺、低分子量聚苯醚化合物等。作為硬化促進劑,例如,可利用2-乙基-4-甲基咪唑(2E4MZ)等咪唑系化合物、三級胺系化合物、有機膦化合物、金屬皂等。作為無機填充材,例如,可列舉二氧化矽、三氧化鉬等鉬化合物、氫氧化鋁、氫氧化鎂、矽酸鋁、矽酸鎂、滑石、黏土、雲母等。可以單獨地使用這些材料,也可以混合2種以上材料來使用。無機填充材的含有量相對於熱固性樹脂及硬化劑之總質量100質量份,較佳是20~200質量份。作為阻燃劑,可以利用含溴化合物等鹵素系阻燃劑、含磷化合物及含氮化合物等非鹵素系阻燃劑等。 (第一金屬層20、第二金屬層30)The thermosetting resin composition constituting the cured product 12 of the thermosetting resin composition contains a thermosetting resin, and may contain a curing agent, a curing accelerator, an inorganic filler, a flame retardant, or the like in addition to the thermosetting resin. As the thermosetting resin, for example, an epoxy resin, a polyimide resin, a phenol resin, a bismaleimide triazine resin, or the like can be used. As the curing agent, a diamine curing agent such as a primary amine or a secondary amine, a phenolic curing agent having a difunctional or higher group, an acid anhydride curing agent, dicyandiamide or a low molecular weight polyphenylene ether compound can be used. As the curing accelerator, for example, an imidazole compound such as 2-ethyl-4-methylimidazole (2E4MZ), a tertiary amine compound, an organic phosphine compound, or a metal soap can be used. Examples of the inorganic filler include molybdenum compounds such as cerium oxide and molybdenum trioxide, aluminum hydroxide, magnesium hydroxide, aluminum silicate, magnesium citrate, talc, clay, and mica. These materials may be used singly or in combination of two or more materials. The content of the inorganic filler is preferably 20 to 200 parts by mass based on 100 parts by mass of the total mass of the thermosetting resin and the curing agent. As the flame retardant, a halogen-based flame retardant such as a bromine-containing compound, a non-halogen flame retardant such as a phosphorus-containing compound or a nitrogen-containing compound, or the like can be used. (first metal layer 20, second metal layer 30)

第一金屬層20及第二金屬層30是由箔狀的金屬構成。換言之,金屬層20、30是由未被圖案化的面狀之金屬構成。第一金屬層20與第二金屬層30,可以是相同的構成,也可以是彼此相異的構成。The first metal layer 20 and the second metal layer 30 are made of a foil-like metal. In other words, the metal layers 20, 30 are composed of a planar metal that is not patterned. The first metal layer 20 and the second metal layer 30 may have the same configuration or may be different from each other.

作為構成金屬層20、30的材質,例如,可使用銅、鋁、不鏽鋼等,其中較佳是使用銅。金屬層20、30的材質為銅的情況下,電解銅或壓延銅的任一者均可。金屬層20、30的厚度較佳是2~40μm,更佳是2~20μm。As the material constituting the metal layers 20 and 30, for example, copper, aluminum, stainless steel or the like can be used, and among them, copper is preferably used. When the material of the metal layers 20 and 30 is copper, either electrolytic copper or rolled copper may be used. The thickness of the metal layers 20, 30 is preferably 2 to 40 μm, more preferably 2 to 20 μm.

金屬層20、30較佳是至少一面為霧面。在此情況下,金屬層20、30的一面為霧面,金屬層20、30的另一面為亮面亦可,金屬層20、30的兩面也可以均為霧面。若金屬層20、30的霧面配置為朝向預浸體而加熱加壓成形,在附金屬之積層板中,可藉由錨定效果,提高第一金屬層20與絕緣層10之剝離強度,以及第二金屬層30與絕緣層10之剝離強度。Preferably, the metal layers 20, 30 are matte on at least one side. In this case, one surface of the metal layers 20 and 30 is a matte surface, and the other surfaces of the metal layers 20 and 30 may be bright surfaces, and both surfaces of the metal layers 20 and 30 may be matte surfaces. When the matte surfaces of the metal layers 20 and 30 are arranged to be heated and pressed toward the prepreg, in the metal-clad laminate, the peeling strength of the first metal layer 20 and the insulating layer 10 can be improved by the anchoring effect. And the peel strength of the second metal layer 30 and the insulating layer 10.

霧面的十點平均粗糙度(RZJIS)並無特別限定,較佳是0.5~5.0μm。亮面的十點平均粗糙度(RZJIS)並無特別限定,較佳是0.5~2.5μm。和亮面相比較之下,在霧面上形成有較多更加緻密的凹凸。The ten-point average roughness (RZJIS) of the matte surface is not particularly limited, but is preferably 0.5 to 5.0 μm. The ten-point average roughness (RZJIS) of the glossy surface is not particularly limited, but is preferably 0.5 to 2.5 μm. Compared with the glossy surface, more dense and uneven bumps are formed on the matte surface.

在此,所謂十點平均粗糙度(RZJIS)是由JISB 0601-2013所規定,是從粗糙度曲線中在其平均線的方向上只取出基準長度,並將從此取出部分的平均線在縱向倍率的方向上測定的從最高的山頂到第5高的山頂之標高(Yp)的絕對值之平均值,與從最低的谷底到第5低的谷底之標高(Yv)的絕對值之平均值的和求出,且以微米(μm)表示此值。 [第二實施形態之附金屬之積層板101]Here, the ten-point average roughness (RZJIS) is defined by JIS B 0601-2013, and only the reference length is taken out from the roughness curve in the direction of its average line, and the average line from which the part is taken out is in the longitudinal magnification. The average value of the absolute value of the elevation (Yp) from the highest peak to the fifth highest peak measured in the direction, and the average value of the absolute value (Yv) from the lowest valley to the fifth lowest valley. And find and express this value in micrometers (μm). [Metal-attached laminated board 101 of the second embodiment]

圖2是本發明的第二實施形態之附金屬之積層板101的概略截面圖。Fig. 2 is a schematic cross-sectional view showing a metal-clad laminate 101 according to a second embodiment of the present invention.

附金屬之積層板101如圖2所示,具備:第一絕緣層40,其具有相互對向的第一面40a及第二面40b;導體電路50;第二絕緣層60;金屬層21(以下,稱為第一金屬層21);金屬層31(以下,稱為第二金屬層31)。導體電路50是積層於第一絕緣層40上(以下,稱為第一面40a上)。第二絕緣層60是積層於第一面40a及導體電路50上。第一金屬層21是積層於第二絕緣層60上。第二金屬層31是積層於第一絕緣層40的第二面40b上。第一絕緣層40包含補強材41以及含浸於補強材41的熱固性樹脂組成物之硬化物42。第二絕緣層60包含補強材61以及含浸於補強材61的熱固性樹脂組成物之硬化物62。As shown in FIG. 2, the metal-clad laminate 101 includes a first insulating layer 40 having a first surface 40a and a second surface 40b opposed to each other, a conductor circuit 50, a second insulating layer 60, and a metal layer 21 ( Hereinafter, it is referred to as a first metal layer 21) and a metal layer 31 (hereinafter referred to as a second metal layer 31). The conductor circuit 50 is laminated on the first insulating layer 40 (hereinafter referred to as the first surface 40a). The second insulating layer 60 is laminated on the first surface 40a and the conductor circuit 50. The first metal layer 21 is laminated on the second insulating layer 60. The second metal layer 31 is laminated on the second surface 40b of the first insulating layer 40. The first insulating layer 40 includes a reinforcing material 41 and a cured product 42 of a thermosetting resin composition impregnated with the reinforcing material 41. The second insulating layer 60 includes a reinforcing material 61 and a cured product 62 of a thermosetting resin composition impregnated with the reinforcing material 61.

在第二實施形態中,如圖2所示,導體電路50及第一金屬層21的層間厚度Ta2與補強材61的厚度Tb2之厚度差(Ta2-Tb2)為0≦Ta2-Tb2≦2μm,且較佳是1μm≦Ta2-Tb2≦2μm。若厚度差(Ta2-Tb2)超過2μm,則恐有無法充分地因應印刷配線板的薄板化之虞。又,若厚度差(Ta2-Tb2)為1μm以上及2μm以下,補強材61與第一金屬層21及導體電路50則不易接觸,附金屬之積層板101會在電性的可靠性上更加優異。又,根據同樣的理由,導體電路50及第二金屬層31的層間厚度Tc與補強材41的厚度Td之厚度差(Tc-Td)為0≦Tc-Td≦2μm,且較佳是1μm≦Tc-Td≦2μm。In the second embodiment, as shown in FIG. 2, the thickness difference (Ta2-Tb2) between the interlayer thickness Ta2 of the conductor circuit 50 and the first metal layer 21 and the thickness Tb2 of the reinforcing member 61 is 0≦Ta2-Tb2≦2 μm. And preferably 1 μm ≦Ta2-Tb2≦2 μm. When the thickness difference (Ta2-Tb2) exceeds 2 μm, there is a fear that the thinning of the printed wiring board cannot be sufficiently satisfied. Further, when the thickness difference (Ta2-Tb2) is 1 μm or more and 2 μm or less, the reinforcing material 61 is less likely to come into contact with the first metal layer 21 and the conductor circuit 50, and the metal laminated board 101 is more excellent in electrical reliability. . Further, for the same reason, the thickness difference (Tc - Td) between the interlayer thickness Tc of the conductor circuit 50 and the second metal layer 31 and the thickness Td of the reinforcing member 41 is 0 ≦ Tc - Td ≦ 2 μm, and preferably 1 μm ≦ Tc-Td ≦ 2 μm.

層間厚度Ta2的測定方法與層間厚度Ta1的測定方法相同。補強材61的厚度Tb2之測定方法與補強材11的厚度Tb1之測定方法相同。The method of measuring the interlayer thickness Ta2 is the same as the method of measuring the interlayer thickness Ta1. The method of measuring the thickness Tb2 of the reinforcing material 61 is the same as the method of measuring the thickness Tb1 of the reinforcing material 11.

附金屬之積層板101的板厚較佳是26~160μm,更佳是30~150μm。導體電路50與第一金屬層21的層間厚度Ta2較佳是10~50μm,更佳是12~47μm。導體電路50與第二金屬層31的層間厚度Tc較佳是10~50μm,更佳是12~47μm。導體電路50與補強材61之間的厚度,以及第一金屬層21與補強材61之間的厚度關係,只要厚度差(Ta2-Tb2)在上述範圍內的話,並無特別限定。例如,可列舉下列情況:導體電路50與補強材61之間的厚度,以及第一金屬層21與補強材61之間的厚度為相同的情況;導體電路50與補強材61之間的厚度為2μm,第一金屬層21與補強材61之間的厚度為0μm的情況;導體電路50與補強材61之間的厚度為0μm,第一金屬層21與補強材61之間的厚度為2μm的情況等。The thickness of the metal-clad laminate 101 is preferably 26 to 160 μm, more preferably 30 to 150 μm. The interlayer thickness Ta2 of the conductor circuit 50 and the first metal layer 21 is preferably 10 to 50 μm, more preferably 12 to 47 μm. The interlayer thickness Tc of the conductor circuit 50 and the second metal layer 31 is preferably 10 to 50 μm, more preferably 12 to 47 μm. The thickness between the conductor circuit 50 and the reinforcing member 61 and the thickness relationship between the first metal layer 21 and the reinforcing member 61 are not particularly limited as long as the thickness difference (Ta2-Tb2) is within the above range. For example, a case where the thickness between the conductor circuit 50 and the reinforcing member 61 and the thickness between the first metal layer 21 and the reinforcing member 61 are the same may be cited; the thickness between the conductor circuit 50 and the reinforcing member 61 is 2 μm, the thickness between the first metal layer 21 and the reinforcing member 61 is 0 μm; the thickness between the conductor circuit 50 and the reinforcing member 61 is 0 μm, and the thickness between the first metal layer 21 and the reinforcing member 61 is 2 μm. Situation, etc.

附金屬之積層板101的焊接耐熱性較佳是260℃以上,更佳是288℃以上。若附金屬之積層板101的焊接耐熱性在上述範圍內,則可作成在焊接組裝時更不易發生層間剝離之印刷配線板。焊接耐熱性可利用同樣於實施例記載的方法去測定。The solder heat resistance of the metal-clad laminate 101 is preferably 260 ° C or higher, more preferably 288 ° C or higher. When the solder heat resistance of the metal-clad laminate 101 is within the above range, a printed wiring board which is less likely to cause interlayer peeling during soldering can be formed. The solder heat resistance can be measured by the same method as described in the examples.

附金屬之積層板101的翹曲量較佳是20mm以下,更佳是10mm以下。若附金屬之積層板101的翹曲量在上述範圍內,則可作成更能抑制因溫度變化造成的翹曲量之印刷配線板。翹曲量可利用同樣於實施例記載的方法去測定。翹曲量可利用同樣於實施例記載的方法去測定。 (第一絕緣層40、第二絕緣層60)The amount of warpage of the metal-clad laminate 101 is preferably 20 mm or less, more preferably 10 mm or less. When the amount of warpage of the metal-clad laminate 101 is within the above range, a printed wiring board capable of suppressing the amount of warpage due to temperature change can be formed. The amount of warpage can be measured by the same method as described in the examples. The amount of warpage can be measured by the same method as described in the examples. (first insulating layer 40, second insulating layer 60)

第一絕緣層40包含補強材41及含浸於補強材41的熱固性樹脂組成物之硬化物42。第二絕緣層60包含補強材61及含浸於補強材61的熱固性樹脂組成物之硬化物62。第一絕緣層40與第二絕緣層60可以是相同的構成,也可以是彼此相異的構成。The first insulating layer 40 includes a reinforcing material 41 and a cured product 42 of a thermosetting resin composition impregnated with the reinforcing material 41. The second insulating layer 60 includes a reinforcing material 61 and a cured material 62 of a thermosetting resin composition impregnated with the reinforcing material 61. The first insulating layer 40 and the second insulating layer 60 may have the same configuration or may be different from each other.

補強材41、61並無特別限定,例如,可使用與作為補強材11而舉例所示之內容同樣的材質。構成第一絕緣層40的熱固性樹脂組成物及構成第二絕緣層60的熱固性樹脂組成物並無特別限定,例如,可使用與作為構成絕緣層10的熱固性樹脂組成物而舉例所示之內容同樣的材質。The reinforcing members 41 and 61 are not particularly limited, and for example, the same materials as those exemplified as the reinforcing member 11 can be used. The thermosetting resin composition constituting the first insulating layer 40 and the thermosetting resin composition constituting the second insulating layer 60 are not particularly limited, and for example, the same as those exemplified as the thermosetting resin composition constituting the insulating layer 10 can be used. Material.

補強材41的厚度Td較佳是10~48μm,更佳是12~45μm。補強材61的厚度Tb2較佳是8~50μm,更佳是12~45μm。 (導體電路50)The thickness Td of the reinforcing member 41 is preferably from 10 to 48 μm, more preferably from 12 to 45 μm. The thickness Tb2 of the reinforcing material 61 is preferably 8 to 50 μm, more preferably 12 to 45 μm. (conductor circuit 50)

導體電路50是已圖案化的層,其作為內層導體圖案層而發揮功能。作為導體電路50,除了圖案化之外,例如,可使用與作為金屬層20、30而舉例所示之內容同樣的材質。導體電路50的厚度A較佳是2~20μm。導體電路50的圖案並無特別限定,因應印刷配線板的使用用途作適當調整即可。 (第一金屬層21、第二金屬層31)The conductor circuit 50 is a patterned layer that functions as an inner layer conductor pattern layer. As the conductor circuit 50, in addition to the patterning, for example, the same material as that exemplified as the metal layers 20 and 30 can be used. The thickness A of the conductor circuit 50 is preferably 2 to 20 μm. The pattern of the conductor circuit 50 is not particularly limited, and may be appropriately adjusted depending on the intended use of the printed wiring board. (first metal layer 21, second metal layer 31)

第一金屬層21及第二金屬層31(以下,有稱為金屬層21、31的情況)是由箔狀的金屬構成。換言之,金屬層21、31是由未被圖案化的面狀之金屬所構成。作為金屬層21、31,例如,可使用與作為金屬層20、30而舉例所示之內容同樣的材質。The first metal layer 21 and the second metal layer 31 (hereinafter referred to as the metal layers 21 and 31) are made of a foil-like metal. In other words, the metal layers 21, 31 are composed of a planar metal that is not patterned. As the metal layers 21 and 31, for example, the same materials as those exemplified as the metal layers 20 and 30 can be used.

此外,在第二實施形態中,具有第二金屬層31,其積層在第一絕緣層40的第二面40b上,但本發明並不限定於此。本發明之附金屬之積層板,例如,也可以是除了不具有第二金屬層31之外,其他為與附金屬之積層板101同樣的構成之附金屬之積層板。又,本發明之附金屬之積層板,也可以是不具有第二金屬層31,而導體電路及絕緣層以此順序複數層形成在第二面40b上之外,其他為與附金屬之積層板101同樣的構成之附金屬之積層板。又,在第二實施形態中,第一絕緣層40雖包含補強材41,但本發明並不限定於此,第一絕緣層也可以不包含補強材。 [實施形態之印刷配線板200]Further, in the second embodiment, the second metal layer 31 is laminated on the second surface 40b of the first insulating layer 40, but the present invention is not limited thereto. The metal-clad laminate of the present invention may be, for example, a metal-clad laminate having the same structure as the metal-clad laminate 101 except for the second metal layer 31. Moreover, the metal-clad laminate of the present invention may not have the second metal layer 31, and the conductor circuit and the insulating layer may be formed on the second surface 40b in plural layers in this order, and the other layers may be laminated with the metal. The plate 101 is similarly constructed of a metal laminated plate. Further, in the second embodiment, the first insulating layer 40 includes the reinforcing member 41. However, the present invention is not limited thereto, and the first insulating layer may not include the reinforcing member. [Printed wiring board 200 of the embodiment]

圖3是本發明的實施形態之印刷配線板200的概略截面圖。在圖3中,與圖2所示之第二實施形態之附金屬之積層板101的構成構件相同的構成構件,是附加上相同符號而省略說明。Fig. 3 is a schematic cross-sectional view showing a printed wiring board 200 according to an embodiment of the present invention. In FIG. 3, the same constituent members as those of the metal-clad laminate 101 of the second embodiment shown in FIG. 2 are denoted by the same reference numerals and will not be described.

印刷配線板200具備:第一絕緣層40、第一導體電路50、第二絕緣層60、第二導體電路22、第三導體電路32。第一導體電路50積層於第一絕緣層40的第一面40a上(以下,稱為第一面40a上)。第二絕緣層60積層於第一面40a及第一導體電路50上。第二導體電路22積層於第二絕緣層60上。第三導體電路32積層於第一絕緣層40的第二面40b上。第一絕緣層40包含補強材41以及含浸於補強材41的熱固性樹脂組成物之硬化物42。第二絕緣層60包含補強材61以及含浸於補強材61的熱固性樹脂組成物之硬化物62。The printed wiring board 200 includes a first insulating layer 40, a first conductor circuit 50, a second insulating layer 60, a second conductor circuit 22, and a third conductor circuit 32. The first conductor circuit 50 is laminated on the first surface 40a of the first insulating layer 40 (hereinafter referred to as the first surface 40a). The second insulating layer 60 is laminated on the first surface 40a and the first conductor circuit 50. The second conductor circuit 22 is laminated on the second insulating layer 60. The third conductor circuit 32 is laminated on the second face 40b of the first insulating layer 40. The first insulating layer 40 includes a reinforcing material 41 and a cured product 42 of a thermosetting resin composition impregnated with the reinforcing material 41. The second insulating layer 60 includes a reinforcing material 61 and a cured product 62 of a thermosetting resin composition impregnated with the reinforcing material 61.

在本實施形態中,如圖3所示,導體電路50及第二導體電路22的層間厚度Ta3與補強材61的厚度Tb3之厚度差(Ta3-Tb3)為0≦Ta3-Tb3≦2μm,且較佳是1μm≦Ta3-Tb3≦2μm。若厚度差(Ta3-Tb3)超過2μm,在將印刷配線板200的厚度變薄的情況下,焊接組裝時恐有容易發生層間剝離,或是溫度變化造成的翹曲量變大之虞。甚至恐有無法充分地因應薄板化之虞。又,若厚度差(Ta3-Tb3)為1μm以上及2μm以下,補強材61與第一導體電路50及第二導體電路22則不易接觸,印刷配線板200會在電性的可靠性上更加優異。層間厚度Ta3是對應於層間厚度Ta2,厚度Tb3是對應於厚度Tb2。又,根據同樣的理由,第一導體電路50及第三導體電路32的層間厚度Tc與補強材41的厚度Td之厚度差(Tc-Td)為0≦Tc-Td≦2μm,且較佳是1μm≦Tc-Td≦2μm。 (第二導體電路22、第三導體電路32)In the present embodiment, as shown in FIG. 3, the thickness difference (Ta3-Tb3) between the interlayer thickness Ta3 of the conductor circuit 50 and the second conductor circuit 22 and the thickness Tb3 of the reinforcing material 61 is 0≦Ta3-Tb3≦2 μm, and It is preferably 1 μm ≦Ta3-Tb3≦2 μm. When the thickness difference (Ta3-Tb3) exceeds 2 μm, when the thickness of the printed wiring board 200 is made thin, it is feared that interlayer peeling easily occurs during soldering assembly, or the amount of warpage caused by temperature change becomes large. There is even a fear that it will not be able to fully respond to the thinning. In addition, when the thickness difference (Ta3-Tb3) is 1 μm or more and 2 μm or less, the reinforcing material 61 is less likely to come into contact with the first conductor circuit 50 and the second conductor circuit 22, and the printed wiring board 200 is more excellent in electrical reliability. . The interlayer thickness Ta3 corresponds to the interlayer thickness Ta2, and the thickness Tb3 corresponds to the thickness Tb2. Further, for the same reason, the thickness difference (Tc-Td) between the interlayer thickness Tc of the first conductor circuit 50 and the third conductor circuit 32 and the thickness Td of the reinforcing member 41 is 0 ≦ Tc - Td ≦ 2 μm, and preferably 1 μm ≦Tc-Td ≦ 2 μm. (second conductor circuit 22, third conductor circuit 32)

第二導體電路22及第三導體電路32(以下,有稱為導體電路22、32的情況)分別是已圖案化的層,均作為外層導體圖案層而發揮功能。第二導體電路22與第三導體電路32可以是相同的構成,也可以是彼此相異的構成。作為導體電路22、32,除了圖案化之外,例如,可使用與作為金屬層20、30而舉例所示之內容同樣的材質。導體電路22、32的厚度較佳是1~20μm。導體電路22、32的圖案並無特別限定,因應印刷配線板的使用用途作適當調整即可。Each of the second conductor circuit 22 and the third conductor circuit 32 (hereinafter referred to as conductor circuits 22 and 32) is a patterned layer and functions as an outer conductor pattern layer. The second conductor circuit 22 and the third conductor circuit 32 may have the same configuration or may be different from each other. As the conductor circuits 22 and 32, in addition to the patterning, for example, the same materials as those exemplified as the metal layers 20 and 30 can be used. The thickness of the conductor circuits 22, 32 is preferably 1 to 20 μm. The pattern of the conductor circuits 22 and 32 is not particularly limited, and may be appropriately adjusted depending on the intended use of the printed wiring board.

此外,在本實施形態中,雖具有第三導體電路32,其積層在第一絕緣層40的第二面40b上,但本發明並不限定於此。本發明之印刷配線板,例如,也可以是除了不具有第三導體電路32之外,其他為與印刷配線板200同樣的構成之印刷配線板。又,本發明之印刷配線板,也可以是不具有第三導體電路32,而導體電路及絕緣層以此順序複數層形成在第二面40b上之外,其他為與印刷配線板200同樣的構成之印刷配線板。又,在本實施形態中,第一絕緣層40雖包含補強材41,但本發明並不限定於此,第一絕緣層也可以不包含補強材。 [第三實施形態之附金屬之積層板之製造方法]Further, in the present embodiment, the third conductor circuit 32 is laminated on the second surface 40b of the first insulating layer 40, but the present invention is not limited thereto. The printed wiring board of the present invention may be, for example, a printed wiring board having the same configuration as that of the printed wiring board 200 except that the third conductor circuit 32 is not provided. Further, the printed wiring board of the present invention may not have the third conductor circuit 32, and the conductor circuit and the insulating layer may be formed on the second surface 40b in plural layers in this order, and the other is the same as the printed wiring board 200. A printed wiring board. Further, in the present embodiment, the first insulating layer 40 includes the reinforcing member 41. However, the present invention is not limited thereto, and the first insulating layer may not include the reinforcing member. [Manufacturing method of metal-clad laminate according to third embodiment]

圖4A~圖4D是用來說明本發明的第三實施形態之附金屬之積層板之製造方法(以下,稱為第三實施形態之製造方法)的說明圖。此外,第三實施形態之製造方法是用來製造第二實施形態之附金屬之積層板之製造方法。圖5是顯示雙帶壓製裝置300的概略圖。在圖4A~圖4D中,與圖2之第二實施形態所示的構成構件相同的構成構件,是附加上相同符號而省略說明。4A to 4D are explanatory views for explaining a method of manufacturing a metal-clad laminate according to a third embodiment of the present invention (hereinafter referred to as a manufacturing method of the third embodiment). Further, the manufacturing method of the third embodiment is a method for producing a metal-clad laminate according to the second embodiment. FIG. 5 is a schematic view showing the double belt pressing device 300. In FIGS. 4A to 4D, the same constituent members as those of the second embodiment shown in FIG. 2 are denoted by the same reference numerals, and their description is omitted.

第三實施形態之製造方法包含準備步驟、積層步驟、加熱加壓成形步驟。在準備步驟中,準備在一面40a(以下,有稱為第一面40a的情況)上已具備有導體電路50的芯基板110。在積層步驟中,藉由在具備導體電路50的第一面40a上依序積層預浸體60a及金屬箔(金屬層)21,以製作圖4D所示之構成的積層物101a。在加熱加壓成形步驟中,如圖5所示,連續地將積層物101a供給至轉動的一對環形帶310、310之間,並在一對環形帶310、310間加熱加壓成形積層物101a。預浸體60a包含補強材61以及含浸於補強材61的熱固性樹脂組成物之半硬化物62a(B階段狀)。The manufacturing method of the third embodiment includes a preparation step, a lamination step, and a heat and pressure forming step. In the preparation step, the core substrate 110 having the conductor circuit 50 is prepared on the one surface 40a (hereinafter, referred to as the first surface 40a). In the laminating step, the prepreg 60a and the metal foil (metal layer) 21 are sequentially laminated on the first surface 40a including the conductor circuit 50 to form the laminate 101a having the configuration shown in Fig. 4D. In the heat and pressure forming step, as shown in FIG. 5, the laminated body 101a is continuously supplied between the pair of rotating endless belts 310, 310, and the laminated body is heated and pressed between the pair of endless belts 310, 310. 101a. The prepreg 60a includes a reinforcing material 61 and a semi-cured material 62a (B-stage shape) of the thermosetting resin composition impregnated with the reinforcing material 61.

此外,如上述第二實施形態之附金屬之積層板101的構成(參照圖2)所示,加熱加壓成形後的導體電路50及第一金屬層21的層間厚度Ta2與補強材61的厚度Tb2之厚度差(Ta2-Tb2)為0≦Ta2-Tb2≦2μm,且較佳是 1μm≦Ta2-Tb2≦2μm。 (準備步驟)Further, as shown in the configuration of the metal-clad laminate 101 of the second embodiment (see FIG. 2), the interlayer thickness Ta2 of the conductor circuit 50 and the first metal layer 21 after the heat and pressure molding and the thickness of the reinforcing member 61 are as shown in FIG. The thickness difference (Ta2-Tb2) of Tb2 is 0≦Ta2-Tb2≦2 μm, and preferably 1 μm≦Ta2-Tb2≦2 μm. (preparation step)

在準備步驟中,準備圖4B所示之在一面40a上已具備導體電路50的芯基板110。此準備步驟在具體上包含預備步驟及電路形成步驟。在預備步驟中,準備圖4A所示之附金屬之積層板110a,其中,第一絕緣層40的第一面40a上具備導體電路形成用的金屬層50a,第一絕緣層40的與第一面40a相反的面40b(以下,稱為第二面40b)上具備第二金屬層31。在電路形成步驟中,對導體電路形成用的金屬層50a實施配線形成處理,而得到圖4B所示之芯基板110。In the preparation step, the core substrate 110 having the conductor circuit 50 on the one surface 40a shown in Fig. 4B is prepared. This preparation step specifically includes a preliminary step and a circuit forming step. In the preliminary step, the metal-clad laminate 110a shown in FIG. 4A is prepared, wherein the first surface 40a of the first insulating layer 40 is provided with a metal layer 50a for forming a conductor circuit, and the first insulating layer 40 is first. The second metal layer 31 is provided on the surface 40b opposite to the surface 40a (hereinafter referred to as the second surface 40b). In the circuit forming step, the wiring formation process is performed on the metal layer 50a for forming a conductor circuit, and the core substrate 110 shown in FIG. 4B is obtained.

在預備步驟中,作為準備附金屬之積層板110a的方法,例如,將對應於導體電路形成用之金屬層50a的上側金屬箔、對應於第一絕緣層40的預浸體、對應於第二金屬層31的下側金屬箔加以積層,並加熱加壓成形即可。構成此預浸體的材質,例如,可使用與作為構成第一絕緣層40的材質而舉例所示之內容同樣的材質。加熱加壓成形的方法可以舉出與後述之加熱加壓成形步驟中作為加熱加壓成形之方法而舉例所示的方法同樣的方法。在電路形成步驟中的配線形成處理之方法並無特別限定,例如,可舉:減成法(subtractive)、半加成法(semi-additive)等已知的電路形成方法等。 (積層步驟)In the preliminary step, as a method of preparing the metal-clad laminate 110a, for example, an upper metal foil corresponding to the metal layer 50a for forming a conductor circuit, a prepreg corresponding to the first insulating layer 40, corresponding to the second The lower metal foil of the metal layer 31 may be laminated and heated and pressure molded. As the material constituting the prepreg, for example, the same material as that exemplified as the material constituting the first insulating layer 40 can be used. The method of the heat and pressure molding may be the same as the method exemplified as the method of the heat and pressure molding in the heat and pressure molding step described later. The method of forming the wiring in the circuit forming step is not particularly limited, and examples thereof include a known circuit forming method such as a subtractive method and a semi-additive method. (layering step)

在積層步驟中,如圖4C所示,藉由在具備導體電路50的第一面40a上依序積層預浸體60a及金屬箔(金屬層)21,以製作圖4D所示之積層物101a。積層的方法因應後述之加熱加壓成形的方法而作適當調整即可。In the lamination step, as shown in FIG. 4C, the prepreg 60a and the metal foil (metal layer) 21 are sequentially laminated on the first surface 40a including the conductor circuit 50 to form the laminate 101a shown in FIG. 4D. . The method of laminating may be appropriately adjusted in accordance with the method of heating and press forming described later.

預浸體60a包含補強材61以及含有於補強材61的熱固性樹脂組成物之半硬化物62a。預浸體60a的厚度較佳是10~50μm,更佳是12~47μm。預浸體60a的硬化時間(Geltime)較佳是60~600秒,更佳是60~300秒。預浸體60a的揮發物含量(Volatile content)較佳是1.5%以下,更佳是1.0%以下。預浸體60a的厚度、樹脂含量、樹脂流動性、硬化時間及揮發物含量的測定方法是遵循JIS 6521。此外,硬化時間(Geltime)是在170℃下測定的情況。補強材61的厚度較佳是10~50μm,更佳是12~45μm。補強材61的厚度之測定方法可藉由同樣於實施例所記載的方法去測定。The prepreg 60a includes a reinforcing material 61 and a semi-cured material 62a of a thermosetting resin composition contained in the reinforcing material 61. The thickness of the prepreg 60a is preferably from 10 to 50 μm, more preferably from 12 to 47 μm. The hardening time (Geltime) of the prepreg 60a is preferably from 60 to 600 seconds, more preferably from 60 to 300 seconds. The volatile content (Volatile content) of the prepreg 60a is preferably 1.5% or less, more preferably 1.0% or less. The method for measuring the thickness, resin content, resin fluidity, hardening time, and volatile matter content of the prepreg 60a is in accordance with JIS 6521. Further, the gelation time (Geltime) was measured at 170 °C. The thickness of the reinforcing member 61 is preferably 10 to 50 μm, more preferably 12 to 45 μm. The method for measuring the thickness of the reinforcing member 61 can be measured by the same method as described in the examples.

構成預浸體60a的材質可使用與作為構成絕緣層60的材質而舉例所示之內容同樣的材質。As the material constituting the prepreg 60a, the same material as that exemplified as the material constituting the insulating layer 60 can be used.

在加熱加壓成形之前,較佳是預備加熱積層物101a。所謂預備加熱,是指在後述之雙帶壓製法中,如圖5所示,從給料機340、350、360側的一組滾筒320、320到熱壓裝置330、330為止之間距L的加熱。預備加熱條件,例如,在加熱溫度80~250℃,加熱時間5~200秒(s)的條件下進行即可。 (加熱加壓成形步驟)It is preferable to preheat the laminate 101a before the heat and pressure forming. The term "preheating" means that in the double-belt pressing method to be described later, as shown in Fig. 5, the heating from the group of the rollers 320, 320 on the side of the feeders 340, 350, 360 to the hot-pressing devices 330, 330 is L. . The preliminary heating conditions may be carried out, for example, at a heating temperature of 80 to 250 ° C and a heating time of 5 to 200 seconds (s). (heating and press forming step)

在加熱加壓成形步驟中,如圖5所示,連續地將積層物101a供給至轉動的一對環形帶310、310間,並在一對環形帶310、310間加熱加壓成形積層物101a。藉此,可得到附金屬之積層板101。In the heat and pressure forming step, as shown in FIG. 5, the laminated body 101a is continuously supplied between the pair of rotating endless belts 310, 310, and the laminated body 101a is heated and pressed between the pair of endless belts 310, 310. . Thereby, the metal-clad laminate 101 can be obtained.

加熱加壓成形如上所述地,是以雙帶壓製法來進行,其是將1或數片程度的少量積層物101a連續地供給至環形帶310、310間,並藉由環形帶310、310對積層物101a施加面壓並同時加熱。藉此,可以使加熱加壓成形後的厚度差(Ta2-Tb2)(參照圖2)成為多段真空壓製法中無法實現之2μm以下,可充分地因應印刷配線板的薄板化。此外,所謂多段真空壓製法,是指在常溫下透過鏡面板多段地堆疊積層物而得到積層構造物,再將得到的積層構造物插入熱板間,以熱板加熱並同時加壓的方法。The heat press molding is carried out as described above by a double belt pressing method in which a small amount of the laminate 101a of a degree of 1 or several sheets is continuously supplied between the endless belts 310, 310, and by the endless belts 310, 310 A surface pressure is applied to the laminate 101a while heating. In this way, the thickness difference (Ta2-Tb2) (see FIG. 2) after the heat and pressure molding can be made 2 μm or less which cannot be realized in the multi-stage vacuum pressing method, and the thinning of the printed wiring board can be sufficiently performed. In addition, the multi-stage vacuum pressing method is a method in which a laminated structure is stacked in a plurality of stages through a mirror panel at a normal temperature to obtain a laminated structure, and the obtained laminated structure is inserted between hot plates and heated by a hot plate and pressurized at the same time.

多段真空壓製法中,熱從積層構造物的外側(熱板側)傳導到積層物的堆疊方向之中央側需要一定的時間。其結果是,無法對積層構造物急遽地加熱,而變得要以漸進的升溫速度來加熱。對積層構造物加熱下去,而達到熱固性樹脂的熔融溫度後,熱固性樹脂組成物會熔融而黏度降低,若再進一步加熱的話則會成為熔融狀態而黏度更加降低。但是,由於是以漸進的升溫速度來加熱,故在到達峰值溫度之前的升溫途中,預浸體中的熱固性樹脂也會進行熱硬化反應。熱固性樹脂的熱硬化反應進行了一定程度後而到達峰值溫度時,在峰值溫度下的黏度降低並不充分。因此,例如,若以多段真空壓製法製作附金屬之積層板101,則導體電路50對絕緣層60的埋入會變得不充分,在焊接組裝時,恐有發生層間剝離之虞。為了抑制此種層間剝離的發生,增加構成絕緣層60的熱固性樹脂組成物之硬化物62的量雖然有效,但如此則不能充分地因應印刷配線板的薄板化。再者,多段真空壓製法中,恐有厚度較薄的印刷配線板之翹曲量的抑制不充分之虞。In the multi-stage vacuum pressing method, it takes a certain time for heat to be conducted from the outer side (hot plate side) of the laminated structure to the center side in the stacking direction of the laminated body. As a result, the laminated structure cannot be heated rapidly, and it is heated at a gradual temperature increase rate. When the laminated structure is heated and the melting temperature of the thermosetting resin is reached, the thermosetting resin composition is melted and the viscosity is lowered, and if it is further heated, it becomes molten and the viscosity is further lowered. However, since it is heated at a gradual temperature increase rate, the thermosetting resin in the prepreg also undergoes a thermosetting reaction during the temperature rise before reaching the peak temperature. When the thermosetting reaction of the thermosetting resin reaches a certain temperature and reaches a peak temperature, the viscosity at the peak temperature is not sufficiently lowered. Therefore, for example, when the metal-clad laminate 101 is produced by the multi-stage vacuum pressing method, the conductor circuit 50 is insufficiently embedded in the insulating layer 60, and delamination may occur during soldering assembly. In order to suppress the occurrence of such interlayer peeling, it is effective to increase the amount of the cured product 62 of the thermosetting resin composition constituting the insulating layer 60. However, this does not sufficiently respond to the thinning of the printed wiring board. Further, in the multi-stage vacuum pressing method, there is a fear that the suppression of the amount of warpage of the printed wiring board having a small thickness is insufficient.

相對於此,雙帶壓製法中,預浸體60a中的熱固性樹脂組成物之熱硬化反應不會進行,且能以峰值溫度對積層物101a加熱,可確保在峰值溫度下的預浸體60a中的熱固性樹脂的黏度充分地降低。因此,可以在黏度足夠低的狀態下對積層物101a施加壓力,而可藉由滾筒320、320將預浸體60a的內部發生的氣體擠出到預浸體60a的外部。其結果是,皺褶等不會產生,且絕緣層60內不會有氣泡殘留,而可作成埋入有導體電路50的附金屬之積層板101。因此,可作成能充分地因應薄板化,即使厚度較薄,在焊接組裝時也不容易發生層間剝離,而且能抑制因溫度變化造成的翹曲量之印刷配線板。 <雙帶壓製法>On the other hand, in the double-belt pressing method, the thermosetting reaction of the thermosetting resin composition in the prepreg 60a does not proceed, and the laminate 101a can be heated at the peak temperature to ensure the prepreg 60a at the peak temperature. The viscosity of the thermosetting resin in the film is sufficiently lowered. Therefore, it is possible to apply pressure to the laminate 101a in a state where the viscosity is sufficiently low, and the gas generated inside the prepreg 60a can be extruded to the outside of the prepreg 60a by the rollers 320, 320. As a result, wrinkles and the like do not occur, and no bubbles remain in the insulating layer 60, and the metal-clad laminate 101 in which the conductor circuit 50 is embedded can be formed. Therefore, it is possible to produce a printed wiring board which can sufficiently reduce the amount of warpage caused by temperature change even when the thickness is thin and the interlayer peeling is not easily caused during soldering and assembly. <Double belt pressing method>

在雙帶壓製法中,是利用雙帶壓製裝置300。雙帶壓製裝置300如圖5所示,具備:一對環形帶310、310;2組的一對滾筒320、320;熱壓裝置330、330。再者,雙帶壓製裝置300的材料供給側上,設有:給料機340,其令長條的預浸體60a捲繞成線圈狀;給料機350,其令長條的金屬箔(金屬層)21捲繞成線圈狀;給料機360,其令長條的芯基板110捲繞成線圈狀。在雙帶壓製裝置300的材料導出側設有捲取機370,其將長條的附金屬之積層板101捲取成線圈狀。In the double belt pressing method, the double belt pressing device 300 is utilized. As shown in FIG. 5, the double belt pressing device 300 includes a pair of endless belts 310 and 310, two sets of two pairs of rollers 320 and 320, and hot pressing devices 330 and 330. Further, on the material supply side of the double belt pressing device 300, there is provided a feeder 340 which winds the long prepreg 60a into a coil shape, and a feeder 350 which has a long metal foil (metal layer) 21 is wound into a coil shape; a feeder 360 that winds the long core substrate 110 into a coil shape. On the material lead-out side of the double belt pressing device 300, a winder 370 is provided which winds a long metal-clad laminate 101 into a coil shape.

一對滾筒320、320上掛架有環形帶310,其配置為令環形帶310藉由滾筒320的旋轉而轉動。2組的一對滾筒320、320配置為令供給至環形帶310、310之間的積層物101a的兩面與環形帶310、310面接觸,且對積層物101a施加面壓。熱壓裝置330、330分別配置在環形帶310、310的內側,以透過環形帶310對被供給至環形帶310、310之間的積層物101a加熱。給料機340、350、360配置為分別連續地送出預浸體60a、金屬箔(金屬層)21及芯基板110。捲取機370配置為連續地捲取附金屬之積層板101。The pair of rollers 320, 320 are hung with an endless belt 310 configured to rotate the endless belt 310 by rotation of the drum 320. The pair of rollers 320 and 320 of the two groups are disposed such that both surfaces of the laminate 101a supplied between the endless belts 310 and 310 are in surface contact with the endless belts 310 and 310, and a surface pressure is applied to the laminate 101a. The hot pressing devices 330, 330 are disposed inside the endless belts 310, 310, respectively, to heat the laminate 101a supplied between the endless belts 310, 310 through the endless belt 310. The feeders 340, 350, 360 are arranged to continuously feed the prepreg 60a, the metal foil (metal layer) 21, and the core substrate 110, respectively. The winder 370 is configured to continuously wind up the metal-clad laminate 101.

藉由雙帶壓製法進行的加熱加壓成形並非多段式地堆疊大量的積層物101a,具體而言是如以下的方式進行。The heat and pressure forming by the double belt pressing method does not stack a large number of laminates 101a in a multi-stage manner, specifically, in the following manner.

首先,從各給料機340、350、360送出長條的預浸體60a、金屬箔(金屬層)21及芯基板110,且連續地供給至轉動的環形帶310、310之間。供給至環形帶310、310之間的預浸體60a、金屬箔(金屬層)21及芯基板110,如圖4C所示,在芯基板110之具備導體電路50的面40a上,依序堆疊預浸體60a及金屬箔(金屬層)21,而構成積層物101a。一對環形帶310、310是以與預浸體60a、金屬箔(金屬層)21及芯基板110的搬送速度同步的速度在轉動。此時,環形帶310、310面接觸於積層物101a的兩面,對積層物101a施加面壓。First, a long prepreg 60a, a metal foil (metal layer) 21, and a core substrate 110 are fed from the respective feeders 340, 350, and 360, and are continuously supplied between the rotating endless belts 310, 310. The prepreg 60a, the metal foil (metal layer) 21, and the core substrate 110 supplied between the endless belts 310 and 310 are sequentially stacked on the surface 40a of the core substrate 110 having the conductor circuit 50 as shown in FIG. 4C. The prepreg 60a and the metal foil (metal layer) 21 constitute a laminate 101a. The pair of endless belts 310 and 310 are rotated at a speed synchronized with the conveyance speed of the prepreg 60a, the metal foil (metal layer) 21, and the core substrate 110. At this time, the endless belts 310 and 310 are in surface contact with both surfaces of the laminate 101a, and a surface pressure is applied to the laminate 101a.

接著,積層物101a在被一對環形帶310、310夾持的狀態下,通過熱壓裝置330配置的區域(以下,稱為加熱加壓區域)。積層物101a通過此加熱加壓區域時,積層物101a藉由熱壓裝置330而透過環形帶310被施加面壓且同時被加熱,令熔融或軟化的預浸體60a與金屬箔(金屬層)21以及芯基板110熱壓接合。Next, the layered product 101a is placed in a region (hereinafter referred to as a heating and pressurizing region) that is placed by the hot press device 330 in a state of being sandwiched by the pair of endless belts 310 and 310. When the laminate 101a passes through the heated and pressurized region, the laminate 101a is applied with a surface pressure by the heat pressing device 330 through the endless belt 310 and simultaneously heated to melt or soften the prepreg 60a and the metal foil (metal layer). 21 and the core substrate 110 are thermocompression bonded.

接著,從雙帶壓製裝置300導出的積層物101a被冷卻後,成為附金屬之積層板101,而藉由捲取機370被捲取為線圈狀。Then, the laminated product 101a which is led out from the double-belt pressing apparatus 300 is cooled, and becomes a metal-clad laminated board 101, and is wound up in a coil shape by the winder 370.

作為環形帶310的材質,例如可使用不鏽鋼等。作為熱壓裝置330的加壓機構,例如,可列舉如作為雙帶壓製裝置之加壓機構而一般常用的加壓輥、油壓、滑動加壓盤之加壓等。作為熱壓裝置330的加熱形式,例如,可列舉如加熱介質循環方式、感應加熱方式等。As the material of the endless belt 310, for example, stainless steel or the like can be used. As the pressurizing means of the hot press device 330, for example, a pressurizing roller, a hydraulic pressure, a pressurization of a sliding pressurizing disk, and the like which are generally used as a pressurizing mechanism of a double belt pressing device can be cited. Examples of the heating form of the hot press device 330 include a heating medium circulation method, an induction heating method, and the like.

雙帶壓製法的加熱加壓條件,例如,可為下列所述之內容。若加熱溫度、加壓力及加熱加壓時間在下列範圍內,即可容易地作成已埋入導體電路50的附金屬之積層板101。The heating and pressurizing conditions of the double belt pressing method can be, for example, the contents described below. If the heating temperature, the pressing pressure, and the heating and pressing time are within the following ranges, the metal-clad laminate 101 in which the conductor circuit 50 is embedded can be easily formed.

加熱溫度的下限較佳是構成預浸體60a之熱固性樹脂的熔點溫度,更佳是相對於熱固性樹脂的熔點而高出3℃的溫度。加熱溫度的上限較佳是相對於熱固性樹脂的熔點高出20℃的溫度,更佳是相對於熱固性樹脂的熔點高出15℃的溫度。將積層物101a加熱至熱固性樹脂的硬化溫度時之升溫速度較佳是2℃/秒(s)以上,更佳是3~5℃/秒(s)。加壓力的下限較佳是0.49MPa,更佳是2MPa。加壓力的上限較佳是5.9MPa,更佳是5MPa。加熱加壓時間的下限較佳是90秒,更佳是120秒。加熱加壓時間的上限較佳是360秒,更佳是240秒。The lower limit of the heating temperature is preferably the melting point temperature of the thermosetting resin constituting the prepreg 60a, and more preferably the temperature higher than the melting point of the thermosetting resin by 3 °C. The upper limit of the heating temperature is preferably a temperature higher than the melting point of the thermosetting resin by 20 ° C, more preferably 15 ° C higher than the melting point of the thermosetting resin. The temperature increase rate when the laminate 101a is heated to the curing temperature of the thermosetting resin is preferably 2 ° C / sec (s) or more, more preferably 3 to 5 ° C / sec (s). The lower limit of the pressing force is preferably 0.49 MPa, more preferably 2 MPa. The upper limit of the pressing force is preferably 5.9 MPa, more preferably 5 MPa. The lower limit of the heating and pressing time is preferably 90 seconds, more preferably 120 seconds. The upper limit of the heating and pressing time is preferably 360 seconds, more preferably 240 seconds.

此外,在第三實施形態之製造方法中,雖使用在第一絕緣層40的第二面40b上已具備第二金屬層31的芯基板110,但本發明並不限定於此,在本發明中,也可以使用在第一絕緣層40的第二面40b上不具備金屬層的芯基板。 [第四實施形態之附金屬之積層板之製造方法]Further, in the manufacturing method of the third embodiment, the core substrate 110 including the second metal layer 31 on the second surface 40b of the first insulating layer 40 is used, but the present invention is not limited thereto, and the present invention is not limited thereto. In the middle, a core substrate having no metal layer on the second surface 40b of the first insulating layer 40 may be used. [Manufacturing method of metal-clad laminate according to fourth embodiment]

圖6A~圖6D是用來說明本發明的第四實施形態之附金屬之積層板之製造方法(以下,稱為第四實施形態之製造方法)的說明圖。圖7是本發明的第五實施形態之附金屬之積層板102的概略截面圖。在圖6A~圖6D、圖7中,與圖4A~圖4D之第三實施形態之製造方法所示之構成構件相同的構成構件,是附加上相同符號而省略說明。6A to 6D are explanatory views for explaining a method of manufacturing a metal-clad laminate according to a fourth embodiment of the present invention (hereinafter, referred to as a manufacturing method of the fourth embodiment). Fig. 7 is a schematic cross-sectional view showing a metal-clad laminate 102 according to a fifth embodiment of the present invention. In FIGS. 6A to 6D and FIG. 7 , the same components as those shown in the manufacturing method of the third embodiment of FIGS. 4A to 4D are denoted by the same reference numerals, and description thereof will be omitted.

第四實施形態之製造方法包含準備步驟、積層步驟、加熱加壓成形步驟。藉此,可得到圖7所示之構成的附金屬之積層板102。在準備步驟中,準備在相互對向的第一面40a及第二面40b上,分別已具備第一導體電路50、第二導體電路51的芯基板120。在積層步驟中,藉由在芯基板120的第一面40a上依序積層預浸體60a及第一金屬箔(金屬層)21,在芯基板120的第二面40b上依序積層預浸體70a及第二金屬箔(金屬層)31,以製作圖6D所示之構成的積層物102a。在加熱加壓成形步驟中,加熱加壓成形積層物102a。預浸體60a包含補強材61以及含浸於補強材61的熱固性樹脂組成物之半硬化物62a(B階段狀)。預浸體70a包含補強材71以及含浸於補強材71的熱固性樹脂組成物之半硬化物72a(B階段狀)。預浸體70a與預浸體60a可以是相同的構成,也可以是彼此相異的構成。The manufacturing method of the fourth embodiment includes a preparation step, a lamination step, and a heat and pressure forming step. Thereby, the metal-clad laminate 102 having the configuration shown in Fig. 7 can be obtained. In the preparation step, the core substrate 120 including the first conductor circuit 50 and the second conductor circuit 51 is prepared on the first surface 40a and the second surface 40b which face each other. In the laminating step, the prepreg 60a and the first metal foil (metal layer) 21 are sequentially laminated on the first surface 40a of the core substrate 120, and the prepreg is sequentially laminated on the second surface 40b of the core substrate 120. The body 70a and the second metal foil (metal layer) 31 are used to form the laminate 102a having the configuration shown in Fig. 6D. In the heat and pressure forming step, the laminate 102a is heated and pressed. The prepreg 60a includes a reinforcing material 61 and a semi-cured material 62a (B-stage shape) of the thermosetting resin composition impregnated with the reinforcing material 61. The prepreg 70a includes a reinforcing material 71 and a semi-cured material 72a (B-stage shape) of the thermosetting resin composition impregnated with the reinforcing material 71. The prepreg 70a and the prepreg 60a may have the same configuration or may be different from each other.

附金屬之積層板102,如圖7所示,具備:第一絕緣層40、第一導體電路50、第二絕緣層60、第一金屬層21、第二導體電路51、第三絕緣層70、第二金屬層31。導體電路50積層於第一絕緣層40的第一面40a上(以下,稱為第一面40a上)。第二絕緣層60積層於第一面40a及導體電路50上。第一金屬層21積層於第二絕緣層60上。第二導體電路51積層於第一絕緣層40的第二面40b上。第三絕緣層70積層於第二面40b及導體電路51上。第二金屬層31積層於第三絕緣層70上。第二絕緣層60包含補強材61以及含浸於補強材61的熱固性樹脂組成物之硬化物62。第三絕緣層70包含補強材71以及含浸於補強材71的熱固性樹脂組成物之硬化物72。As shown in FIG. 7, the metal-clad laminate 102 includes a first insulating layer 40, a first conductor circuit 50, a second insulating layer 60, a first metal layer 21, a second conductor circuit 51, and a third insulating layer 70. And a second metal layer 31. The conductor circuit 50 is laminated on the first surface 40a of the first insulating layer 40 (hereinafter referred to as the first surface 40a). The second insulating layer 60 is laminated on the first surface 40a and the conductor circuit 50. The first metal layer 21 is laminated on the second insulating layer 60. The second conductor circuit 51 is laminated on the second face 40b of the first insulating layer 40. The third insulating layer 70 is laminated on the second surface 40b and the conductor circuit 51. The second metal layer 31 is laminated on the third insulating layer 70. The second insulating layer 60 includes a reinforcing material 61 and a cured product 62 of a thermosetting resin composition impregnated with the reinforcing material 61. The third insulating layer 70 includes a reinforcing material 71 and a cured product 72 of a thermosetting resin composition impregnated with the reinforcing material 71.

加熱加壓成形後的第一導體電路50及第一金屬層21的層間厚度Ta5與補強材61的厚度Tb5之厚度差(Ta5-Tb5)為0≦Ta5-Tb5≦2μm,且較佳是 1μm≦Ta5-Tb5≦2μm。又,加熱加壓成形後的第二導體電路51及第二金屬層31的層間厚度Ta6與補強材71的厚度Tb6之厚度差(Ta6-Tb6)為0≦Ta6-Tb6≦2μm,且較佳是1μm≦Ta6-Tb6≦2μm。在第四實施形態之製造方法中,層間厚度Ta5是對應於層間厚度Ta2,厚度Tb5是對應於厚度Tb2。層間厚度Ta6的測定方法與層間厚度Ta1的測定方法相同。補強材71的厚度Tb6之測定方法與補強材11的厚度Tb1之測定方法相同。 (準備步驟)The thickness difference (Ta5-Tb5) between the interlayer thickness Ta5 of the first conductor circuit 50 and the first metal layer 21 and the thickness Tb5 of the reinforcing material 61 after heating and press forming is 0 ≦ Ta5 - Tb 5 ≦ 2 μm, and preferably 1 μm. ≦Ta5-Tb5≦2μm. Further, the thickness difference (Ta6-Tb6) between the interlayer thickness Ta6 of the second conductor circuit 51 and the second metal layer 31 after the heat and pressure molding and the thickness Tb6 of the reinforcing material 71 is 0 ≦ Ta6 - Tb 6 ≦ 2 μm, and preferably. It is 1 μm ≦Ta6-Tb6≦2 μm. In the manufacturing method of the fourth embodiment, the interlayer thickness Ta5 corresponds to the interlayer thickness Ta2, and the thickness Tb5 corresponds to the thickness Tb2. The method of measuring the interlayer thickness Ta6 is the same as the method of measuring the interlayer thickness Ta1. The method of measuring the thickness Tb6 of the reinforcing material 71 is the same as the method of measuring the thickness Tb1 of the reinforcing material 11. (preparation step)

在準備步驟中,如圖6B所示,準備芯基板120,其在第一面40a上已具備第一導體電路50,且在第二面40b上已具備第二導體電路51。此準備步驟在具體上包含預備步驟及電路形成步驟。在預備步驟中,準備圖6A所示之附金屬之積層板110a,其中,第一絕緣層40的第一面40a上具備第一導體電路形成用的金屬層50a,第二面40b上具備第二導體電路形成用的金屬層31。在電路形成步驟中,對第一導體電路形成用的金屬層50a及第二導體電路形成用的金屬層31分別實施配線形成處理,而得到圖6B所示之芯基板120。In the preparation step, as shown in FIG. 6B, the core substrate 120 is prepared, which has the first conductor circuit 50 on the first surface 40a and the second conductor circuit 51 on the second surface 40b. This preparation step specifically includes a preliminary step and a circuit forming step. In the preliminary step, the metal-clad laminate 110a shown in FIG. 6A is prepared, wherein the first surface 40a of the first insulating layer 40 is provided with a metal layer 50a for forming a first conductor circuit, and the second surface 40b is provided with a first layer 40a. A metal layer 31 for forming a two-conductor circuit. In the circuit forming step, the metal layer 50a for forming the first conductor circuit and the metal layer 31 for forming the second conductor circuit are respectively subjected to a wiring forming process, and the core substrate 120 shown in FIG. 6B is obtained.

在預備步驟中,作為準備附金屬之積層板110a的方法,例如,將對應於第一導體電路形成用的金屬層50a之上側金屬箔、對應於第一絕緣層40之預浸體、對應於第二導體電路形成用之金屬層31的下側金屬箔加以積層,並加熱加壓成形即可。構成此預浸體的材質,例如,可使用與作為構成第一絕緣層40的材質而舉例所示之內容同樣的材質。加熱加壓成形的方法可以舉出與第三實施形態之製造方法的加熱加壓成形步驟中作為加熱加壓成形方法而舉例所示的方法同樣的方法。在電路形成步驟中,配線形成處理的方法並無特別限定,例如,可舉:減成法、半加成法等已知的電路形成方法等。 (積層步驟)In the preliminary step, as a method of preparing the metal-clad laminate 110a, for example, a metal foil corresponding to the upper side of the metal layer 50a for forming the first conductor circuit, a prepreg corresponding to the first insulating layer 40, corresponding to The lower metal foil of the metal layer 31 for forming the second conductor circuit may be laminated and heated and formed. As the material constituting the prepreg, for example, the same material as that exemplified as the material constituting the first insulating layer 40 can be used. The method of the heat and pressure molding may be the same as the method exemplified as the heat and pressure molding method in the heat and pressure molding step of the production method of the third embodiment. In the circuit formation step, the method of forming the wiring is not particularly limited, and examples thereof include known circuit formation methods such as a subtractive method and a semi-additive method. (layering step)

在積層步驟中,如圖6C所示,藉由在具備導體電路50的第一面40a上依序積層預浸體60a及金屬箔(金屬層)21的同時,在具備導體電路51的第二面40b上依序積層預浸體70a及金屬箔(金屬層)31,以製作積層物102a。積層的方法因應後述之加熱加壓成形的方法作適當調整即可。In the lamination step, as shown in FIG. 6C, the prepreg 60a and the metal foil (metal layer) 21 are sequentially laminated on the first surface 40a including the conductor circuit 50, and the second conductor circuit 51 is provided. A prepreg 70a and a metal foil (metal layer) 31 are sequentially laminated on the surface 40b to form a laminate 102a. The method of laminating may be appropriately adjusted in accordance with the method of heating and press forming described later.

構成預浸體60a、70a的材質,例如,可使用與作為構成絕緣層60的材質而舉例所示之內容同樣的材質。The material constituting the prepregs 60a and 70a can be, for example, the same material as that exemplified as the material constituting the insulating layer 60.

在加熱加壓成形之前,較佳是預備加熱積層物102a。預備加熱條件,例如,在加熱溫度80~250℃、加熱時間5~200秒(s)的條件下進行即可。 (加熱加壓成形步驟)It is preferable to preheat the laminate 102a before the heat and pressure forming. The preliminary heating conditions may be carried out, for example, at a heating temperature of 80 to 250 ° C and a heating time of 5 to 200 seconds (s). (heating and press forming step)

在加熱加壓成形步驟中,加熱加壓成形積層物102a。藉此,可得到圖7所示之附金屬之積層板102。In the heat and pressure forming step, the laminate 102a is heated and pressed. Thereby, the metal-clad laminate 102 shown in Fig. 7 can be obtained.

加熱加壓成形的方法,例如,可以舉出與第一實施形態之製造方法中,作為加熱加壓成形的方法而舉例所示的方法同樣的方法。 [實施形態之印刷配線板之製造方法]The method of the heat press molding may be, for example, the same method as the method exemplified as the method of the heat and pressure molding in the production method of the first embodiment. [Method of Manufacturing Printed Wiring Board of Embodiment]

實施形態之印刷配線板之製造方法,是以上述實施形態之附金屬之積層板之製造方法來製造附金屬之積層板101、102,並對金屬箔(金屬層)21、31實施配線形成處理。藉此,可得到印刷配線板。配線形成處理的方法並無特別限定,例如,可舉:減成法、半加成法等已知的電路形成方法等。 實施例In the method for producing a printed wiring board according to the embodiment, the metal-clad laminates 101 and 102 are produced by the method for manufacturing a metal-clad laminate according to the above embodiment, and the metal foils (metal layers) 21 and 31 are subjected to wiring formation treatment. . Thereby, a printed wiring board can be obtained. The method of forming the wiring is not particularly limited, and examples thereof include a known circuit forming method such as a subtractive method and a semi-additive method. Example

以下,藉由實施例具體地說明本發明。 [實施例1] [準備步驟]Hereinafter, the present invention will be specifically described by way of examples. [Example 1] [Preparation step]

使用下列長條的預浸體、長條的下側金屬箔(對應於第二金屬層31)及長條的上側金屬箔(對應於導體電路形成用的金屬層50a),並利用圖5所示之製造裝置,得到圖4A所示之構成之長條的附金屬之積層板110a。雙帶壓製裝置300中的預備加熱條件,是在加熱溫度100℃、加熱時間30秒(s)的條件下進行。雙帶壓製裝置300中的加熱加壓,是在加熱溫度300℃、加壓力40MPa及加熱加壓時間3分鐘的條件下進行。 (長條的預浸體)The following long prepreg, the long lower metal foil (corresponding to the second metal layer 31) and the long upper metal foil (corresponding to the metal layer 50a for forming a conductor circuit) are used, and the use of FIG. 5 is used. In the manufacturing apparatus shown, a metal-clad laminate 110a of the long shape shown in Fig. 4A is obtained. The preliminary heating conditions in the double belt pressing device 300 were carried out under the conditions of a heating temperature of 100 ° C and a heating time of 30 seconds (s). The heating and pressurization in the double belt pressing device 300 was carried out under the conditions of a heating temperature of 300 ° C, a pressing force of 40 MPa, and a heating and pressing time of 3 minutes. (long strip of prepreg)

作為預浸體,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:12μm)。「R-1410E」即便板厚相異,其是一種將含有環氧樹脂、酚系硬化劑及二氧化矽等無機填充料的樹脂組成物含浸於玻璃布(玻璃組成:E玻璃)之後,使樹脂組成物乾燥至成為半硬化狀態為止而製造出的產品。相對於環氧樹脂及酚系硬化劑之100質量份,無機填充料的混合比例為100質量份。 (長條的下側金屬箔)As the prepreg, the product number "R-1410E" (sheet thickness: 12 μm) manufactured by Panasonic Co., Ltd. was used. "R-1410E" is a resin composition containing an epoxy resin, a phenolic curing agent, and an inorganic filler such as cerium oxide, which is impregnated with a glass cloth (glass composition: E glass). The composition was dried to a product which was produced in a semi-hardened state. The mixing ratio of the inorganic filler is 100 parts by mass based on 100 parts by mass of the epoxy resin and the phenolic curing agent. (long strip of metal foil)

作為下側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm)。 (長條的上側金屬箔)As the lower metal foil, the product number "3EC-M2S-VLP" (thickness: 12 μm) manufactured by Mitsui Mining & Mining Co., Ltd. was used. (long strip of upper metal foil)

作為上側金屬箔,是使用三井金屬礦業(股)製的產品編號「MicroThin Ex5」(厚度:5μm,與預浸體側的面相反的面之表面粗糙度(Rzjis):2μm)。As the upper metal foil, the product number "MicroThin Ex5" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 5 μm, surface roughness (Rzjis) of the surface opposite to the surface on the prepreg side: 2 μm) was used.

以蝕刻對所得到的長條的附金屬之積層板110a中的導體電路形成用的金屬層50a進行配線形成處理,形成導體電路50,而得到圖4B所示之構成的芯基板110。此時的殘銅率為80%。以下,電路圖案是以同樣的電路來評估。 [積層步驟、加熱加壓成形步驟]The metal layer 50a for forming a conductor circuit in the obtained metal-clad laminate 110a obtained by the etching is subjected to wiring formation processing to form the conductor circuit 50, and the core substrate 110 having the configuration shown in FIG. 4B is obtained. The residual copper ratio at this time was 80%. Below, the circuit pattern is evaluated by the same circuit. [Lamination step, heating and press forming step]

使用長條的芯基板110、下列長條的預浸體60a、長條的金屬箔(對應於第一金屬層21),藉由圖4C及圖4D所示之製造步驟,並利用圖5所示之製造裝置,而得到圖2所示之長條的附金屬之積層板101。雙帶壓製裝置300中的預備加熱條件,是在加熱溫度230℃、加熱時間30秒(s)的條件下進行。雙帶壓製裝置300中的加熱加壓,是以升溫速度3℃/秒(s)從200℃加熱到300℃後,在加熱溫度300℃、加壓力40MPa及加熱加壓時間3分鐘的條件下進行。 (長條的預浸體60a)Using a long core substrate 110, the following long prepreg 60a, a long metal foil (corresponding to the first metal layer 21), by the manufacturing steps shown in FIGS. 4C and 4D, and using FIG. The long manufacturing metal-clad laminate 101 shown in Fig. 2 is obtained by the manufacturing apparatus shown. The preliminary heating conditions in the double belt pressing device 300 were carried out under the conditions of a heating temperature of 230 ° C and a heating time of 30 seconds (s). The heating and pressurization in the double belt pressing device 300 is carried out at a heating rate of 3 ° C / sec (s) from 200 ° C to 300 ° C, at a heating temperature of 300 ° C, a pressing force of 40 MPa, and a heating and pressing time of 3 minutes. get on. (long strip of prepreg 60a)

作為預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:12μm、補強材61的厚度:12μm、樹脂含量:54%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)。樹脂含量、樹脂流動性、硬化時間及揮發物含量的數值為目錄值,關於以下所示之樹脂含量、樹脂流動性、硬化時間及揮發物含量的數值也是相同的。 (長條的金屬箔)As the prepreg 60a, the product number "R-1410E" manufactured by Panasonic Co., Ltd. was used (thickness: 12 μm, thickness of the reinforcing material 61: 12 μm, resin content: 54%, resin fluidity: 30%, hardening time) : 150 seconds, volatile content: 0.5%). The values of the resin content, the resin fluidity, the hardening time, and the volatile matter content are the list values, and the values of the resin content, the resin fluidity, the hardening time, and the volatile matter content shown below are also the same. (long strip of metal foil)

作為金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm、預浸體側的面之表面粗糙度(Rzjis):2μm)。 [印刷配線板200的製作]As the metal foil, the product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 12 μm, surface roughness (Rzjis) of the surface on the prepreg side: 2 μm) was used. [Production of Printed Wiring Board 200]

以蝕刻對所得到的長條的附金屬之積層板101的兩面之金屬層21、31進行配線形成處理,形成第二導體電路22及第三導體電路32,而得到圖3所示之構成之長條的印刷配線板200。 [實施例2]The metal layers 21 and 31 on both sides of the obtained metal-clad laminate 101 are subjected to wiring formation processing by etching to form the second conductor circuit 22 and the third conductor circuit 32, and the composition shown in FIG. 3 is obtained. A long printed wiring board 200. [Embodiment 2]

除了在[積層步驟、加熱加壓成形步驟]中,作為長條的預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:14μm、補強材61的厚度:12μm、樹脂含量:61%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與實施例1相同,而得到圖3所示之構成的印刷配線板200。 [實施例3]In the [layering step, heating and press forming step], the long prepreg 60a is a product number "R-1410E" manufactured by Panasonic (thickness: 14 μm, thickness of the reinforcing member 61: 12 μm, resin content: 61%, resin fluidity: 30%, hardening time: 150 seconds, volatile content: 0.5%), the other portions were the same as in Example 1, and the printed wiring having the configuration shown in FIG. 3 was obtained. Board 200. [Example 3]

除了在[準備步驟]中,作為長條的上側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:20μm、與預浸體側的面相反的面之表面粗糙度(Rzjis):2μm),且在[積層步驟、加熱加壓成形步驟]中,作為長條的預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:45μm、補強材61的厚度:45μm、樹脂含量:48%、樹脂流動性:10%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與實施例1相同,而得到圖3所示之構成的印刷配線板200。 [實施例4]In the [preparation step], the upper metal foil of the long strip is a product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 20 μm, the surface opposite to the surface on the prepreg side) The surface roughness (Rzjis): 2 μm), and in the [layering step, heat and pressure forming step], the product number "R-1410E" manufactured by Panasonic Co., Ltd. is used as the long prepreg 60a ( The thickness of the plate: 45 μm, the thickness of the reinforcing member 61: 45 μm, the resin content: 48%, the resin fluidity: 10%, the hardening time: 150 seconds, and the volatile content: 0.5%), the other portions were the same as in the first embodiment, The printed wiring board 200 having the configuration shown in FIG. 3 is obtained. [Example 4]

除了在[積層步驟、加熱加壓成形步驟]中,作為長條的預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:47μm、補強材61的厚度:45μm、樹脂含量:50%、樹脂流動性:10%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與實施例3相同,而得到圖3所示之構成的印刷配線板200。 [實施例5]In the [layering step, heat and pressure forming step], the long prepreg 60a is made of Panasonic product number "R-1410E" (thickness: 47 μm, thickness of the reinforcing material 61: 45 μm, resin content: 50%, resin fluidity: 10%, hardening time: 150 seconds, volatile content: 0.5%), the other portions were the same as in Example 3, and the printed wiring having the configuration shown in FIG. 3 was obtained. Board 200. [Example 5]

使用下列長條的預浸體、長條的下側金屬箔(對應於第二金屬層30)及長條的上側金屬箔(對應於第一金屬層20),並利用圖5所示之製造裝置,而得到圖1所示之構成的附金屬之積層板100。雙帶壓製裝置300中的預備加熱條件,是在加熱溫度100℃、加熱時間30秒(s)的條件下進行。雙帶壓製裝置300中的加熱加壓,是以升溫溫度3℃/秒(s)從200℃加熱到300℃後,在加熱溫度300℃、加壓力40MPa及加熱加壓時間3分鐘的條件下進行。 (長條的預浸體)The following long prepreg, the long lower metal foil (corresponding to the second metal layer 30) and the long upper metal foil (corresponding to the first metal layer 20) are used, and are manufactured using the same as shown in FIG. The device is obtained to obtain a metal-clad laminate 100 constructed as shown in FIG. The preliminary heating conditions in the double belt pressing device 300 were carried out under the conditions of a heating temperature of 100 ° C and a heating time of 30 seconds (s). The heating and pressurization in the double belt pressing device 300 is carried out at a heating temperature of 3 ° C / sec (s) from 200 ° C to 300 ° C, at a heating temperature of 300 ° C, a pressing pressure of 40 MPa, and a heating and pressing time of 3 minutes. get on. (long strip of prepreg)

作為預浸體,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:12μm、對應於補強材11之補強材的厚度:12μm、樹脂含量:54%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)。 (長條的下側金屬箔、上側金屬箔)As the prepreg, the product number "R-1410E" manufactured by Panasonic Co., Ltd. (thickness: 12 μm, thickness of the reinforcing material corresponding to the reinforcing material 11: 12 μm, resin content: 54%, resin flowability: 30) %, hardening time: 150 seconds, volatile content: 0.5%). (long metal foil on the lower side, upper metal foil)

作為下側金屬箔及上側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm、預浸體側的面之表面粗糙度(Rzjis):2μm)。 [實施例6]As the lower metal foil and the upper metal foil, the product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 12 μm, surface roughness (Rzjis) of the surface on the prepreg side: 2 μm) . [Embodiment 6]

除了作為長條的預浸體,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:14μm、對應於補強材11之補強材的厚度:12μm、樹脂含量:59%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與實施例5相同,而得到圖1所示之構成的附金屬之積層板100。 [比較例1] [準備步驟]In addition to the long prepreg, the product number "R-1410E" manufactured by Panasonic Co., Ltd. (thickness: 14 μm, thickness of the reinforcing material corresponding to the reinforcing material 11: 12 μm, resin content: 59%, resin) The fluidity: 30%, hardening time: 150 seconds, volatile matter content: 0.5%), the other portions were the same as in Example 5, and a metal-clad laminate 100 having the composition shown in Fig. 1 was obtained. [Comparative Example 1] [Preparation step]

使用預浸體、下側金屬箔(對應於第二金屬層31)及上側金屬箔(對應於導體電路形成用的金屬層50a),藉由多段真空壓製法,得到圖4A所示之構成的附金屬之積層板110a。多段真空壓製法中的加熱加壓,是在下列條件下進行。Using the prepreg, the lower metal foil (corresponding to the second metal layer 31), and the upper metal foil (corresponding to the metal layer 50a for forming a conductor circuit), the composition shown in FIG. 4A is obtained by a multi-stage vacuum pressing method. A metal laminated board 110a is attached. The heating and pressurization in the multi-stage vacuum pressing method was carried out under the following conditions.

施加在積層構造物的單位壓力,從加熱加壓成形開始的20~30分鐘之間為0.49~0.98MPa(5~10kg/cm 2)(一次壓力),接著,到製品溫度成為120℃為止升壓為2.94MPa(30kg/cm 2)(二次壓力)。之後,到加熱加壓成形的處理結束為止,維持二次壓力。 The unit pressure applied to the laminated structure is 0.49 to 0.98 MPa (5 to 10 kg/cm 2 ) (primary pressure) between 20 and 30 minutes from the start of the heat and pressure molding, and then the product temperature is raised to 120 ° C. The pressure was 2.94 MPa (30 kg/cm 2 ) (secondary pressure). Thereafter, the secondary pressure is maintained until the treatment of the heat and pressure forming is completed.

製品溫度從加熱加壓成形開始到製品溫度成為160℃為止,是以1~3℃/分鐘的升溫速度加熱,之後,維持製品溫度在160℃以上的狀態50分鐘。此時的製品溫度之最高溫度為170~180℃。之後,以2~6℃/分鐘的冷卻速度,將積層板的溫度冷卻至室溫為止。The product temperature was heated from a heating press molding to a product temperature of 160 ° C, and was heated at a temperature increase rate of 1 to 3 ° C / min. Thereafter, the product temperature was maintained at 160 ° C or higher for 50 minutes. The maximum temperature of the product at this time is 170 to 180 °C. Thereafter, the temperature of the laminate was cooled to room temperature at a cooling rate of 2 to 6 ° C /min.

氣體環境是在製品溫度成為130~140℃為止維持在13.3kPa(100Torr)以下的氣體環境,之後,暴露在大氣環境。 (預浸體)The gas atmosphere is maintained in a gas atmosphere of 13.3 kPa (100 Torr) or less until the product temperature is 130 to 140 ° C, and then exposed to the atmosphere. (prepreg)

作為預浸體,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:15μm、樹脂含量:61%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%秒以下)。 (下側金屬箔)As a prepreg, the product number "R-1410E" manufactured by Panasonic Co., Ltd. (sheet thickness: 15 μm, resin content: 61%, resin fluidity: 30%, hardening time: 150 seconds, volatile matter content: 0.5) % seconds or less). (lower metal foil)

作為下側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm)。 (上側金屬箔)As the lower metal foil, the product number "3EC-M2S-VLP" (thickness: 12 μm) manufactured by Mitsui Mining & Mining Co., Ltd. was used. (upper metal foil)

作為上側金屬箔,是使用三井金屬礦業(股)製的產品編號「MicroThinEX5」(厚度:5μm、與預浸體側的面相反的面之表面粗糙度(Rzjis):2μm)。As the upper metal foil, the product number "MicroThinEX5" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 5 μm, surface roughness (Rzjis) of the surface opposite to the surface on the prepreg side: 2 μm) was used.

以蝕刻對所得到的附金屬之積層板110a中的導體電路形成用的金屬層50a進行配線形成處理,形成導體電路50,而得到圖4B所示之構成的芯基板110。 [積層步驟、加熱加壓成形步驟]The metal layer 50a for forming a conductor circuit in the obtained metal-clad laminate 110a is subjected to wiring formation processing by etching to form the conductor circuit 50, whereby the core substrate 110 having the configuration shown in FIG. 4B is obtained. [Lamination step, heating and press forming step]

使用芯基板110、下列預浸體60a、金屬箔(對應於第一金屬層21),藉由多段真空壓製法,得到圖2所示之附金屬之積層板101。多段真空壓製法中的加熱加壓條件,是在下列條件下進行。Using the core substrate 110, the following prepreg 60a, and the metal foil (corresponding to the first metal layer 21), the metal-clad laminate 101 shown in Fig. 2 is obtained by a multi-stage vacuum pressing method. The heating and pressurizing conditions in the multi-stage vacuum pressing method were carried out under the following conditions.

施加在積層構造物的單位壓力,從加熱加壓成形開始的20~30分鐘之間為0.49~0.98MPa(5~10kg/cm 2)(一次壓力),接著,到製品溫度成為120℃為止升壓為2.94MPa(30kg/cm 2)(二次壓力)。之後,到加熱加壓成形的處理結束為止,維持二次壓力。 In the laminated structure is applied to the unit pressure, the heat and pressure molding is 0.49 ~ 0.98MPa (5 ~ 10kg / cm 2) ( primary pressure) starts between 20 to 30 minutes, and then, the product reaches a temperature of 120 deg.] C liters The pressure was 2.94 MPa (30 kg/cm 2 ) (secondary pressure). Thereafter, the secondary pressure is maintained until the treatment of the heat and pressure forming is completed.

製品溫度從加熱加壓成形開始到製品溫度成為160℃為止,是以1~3℃/分鐘的升溫速度加熱,之後,維持製品溫度在160℃以上的狀態50分鐘。此時的製品溫度之最高溫度為170~180℃。之後,以2~6℃/分鐘的冷卻速度,將積層板的溫度冷卻至室溫為止。The product temperature was heated from a heating press molding to a product temperature of 160 ° C, and was heated at a temperature increase rate of 1 to 3 ° C / min. Thereafter, the product temperature was maintained at 160 ° C or higher for 50 minutes. The maximum temperature of the product at this time is 170 to 180 °C. Thereafter, the temperature of the laminate was cooled to room temperature at a cooling rate of 2 to 6 ° C /min.

氣體環境是在製品溫度成為130~140℃為止維持在13.3kPa(100Torr)以下的氣體環境,之後,暴露在大氣環境。 (預浸體60a)The gas atmosphere is maintained in a gas atmosphere of 13.3 kPa (100 Torr) or less until the product temperature is 130 to 140 ° C, and then exposed to the atmosphere. (prepreg 60a)

作為預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:15μm、補強材61的厚度:12μm、樹脂含量:63%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)。 (金屬箔)As the prepreg 60a, the product number "R-1410E" manufactured by Panasonic Co., Ltd. was used (thickness: 15 μm, thickness of the reinforcing material 61: 12 μm, resin content: 63%, resin fluidity: 30%, hardening time) : 150 seconds, volatile content: 0.5%). (metal foil)

作為金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm、預浸體側的面之表面粗糙度(Rzjis):2μm)。 [印刷配線板200的製作]As the metal foil, the product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 12 μm, surface roughness (Rzjis) of the surface on the prepreg side: 2 μm) was used. [Production of Printed Wiring Board 200]

以蝕刻對所得到的附金屬之積層板101的兩面之金屬層21、31進行配線形成處理,形成第二導體電路22及第三導體電路32,而得到圖3所示之構成的印刷配線板200。 [比較例2]The metal layers 21 and 31 on both sides of the obtained metal-clad laminate 101 are subjected to wiring formation processing by etching to form the second conductor circuit 22 and the third conductor circuit 32, thereby obtaining a printed wiring board having the configuration shown in FIG. 200. [Comparative Example 2]

除了在[積層步驟、加熱加壓成形步驟]中,作為預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:17μm、補強材61的厚度:12μm、樹脂含量:67%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與比較例1相同,而得到印刷配線板200。 [比較例3]In the [layering step, heating and press forming step], the product number "R-1410E" manufactured by Panasonic Co., Ltd. is used as the prepreg 60a (thickness: 17 μm, thickness of the reinforcing material 61: 12 μm, resin) The printed wiring board 200 was obtained in the same manner as in Comparative Example 1, except that the content was 67%, the resin fluidity: 30%, the hardening time: 150 seconds, and the volatile content: 0.5%. [Comparative Example 3]

除了在[準備步驟]中,作為上側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:20μm、預浸體側的面之表面粗糙度(Rzjis):2μm),且在[積層步驟、加熱加壓成形步驟]中,作為預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:48μm、補強材61的厚度:45μm、樹脂含量:50%、樹脂流動性:10%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與實施例1相同,而得到圖3所示之構成的印刷配線板200。 [比較例4]In the [preparation step], the product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 20 μm, surface roughness of the surface on the prepreg side (Rzjis)) is used as the upper metal foil. 2 μm), in the [layering step, heating and press forming step], the product number "R-1410E" manufactured by Panasonic Co., Ltd. (thickness: 48 μm, thickness of the reinforcing material 61) is used as the prepreg 60a. : 45 μm, resin content: 50%, resin fluidity: 10%, hardening time: 150 seconds, volatile matter content: 0.5%), the other portions were the same as in Example 1, and the composition shown in FIG. 3 was obtained. Wiring board 200. [Comparative Example 4]

除了在[積層步驟、加熱加壓成形步驟]中,作為預浸體60a,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:55μm、補強材61的厚度:45μm、樹脂含量:55%、樹脂流動性:10%、硬化時間:150秒、揮發物含量:0.5%)之外,其他部分與比較例3相同,而得到印刷配線板200。 [比較例5]In the [layering step, heating and press forming step], as the prepreg 60a, the product number "R-1410E" manufactured by Panasonic Co., Ltd. (sheet thickness: 55 μm, thickness of the reinforcing material 61: 45 μm, resin) The printed wiring board 200 was obtained in the same manner as in Comparative Example 3 except that the content was 55%, the resin fluidity: 10%, the hardening time: 150 seconds, and the volatile content: 0.5%. [Comparative Example 5]

使用下列預浸體、下側金屬箔(對應於第二金屬層30)及上側金屬箔(對應於第一金屬層20),藉由多段真空壓製法,得到圖1所示之構成的附金屬之積層板100。多段真空壓製法中的加熱加壓是在與比較例1之[準備步驟]中的加熱加壓條件相同的條件下進行。 (預浸體)Using the following prepreg, the lower metal foil (corresponding to the second metal layer 30) and the upper metal foil (corresponding to the first metal layer 20), the metal attached as shown in FIG. 1 is obtained by a multi-stage vacuum pressing method. The laminate board 100. The heating and pressurization in the multi-stage vacuum pressing method was carried out under the same conditions as those in the [preparation step] of Comparative Example 1. (prepreg)

作為預浸體,是使用Panasonic(股)製的產品編號「R-1410E」(板厚:15μm、對應於補強材11之補強材的厚度:12μm、樹脂含量:61%、樹脂流動性:30%、硬化時間:150秒、揮發物含量:0.5%)。 (下側金屬箔、上側金屬箔)As the prepreg, the product number "R-1410E" manufactured by Panasonic Co., Ltd. (thickness: 15 μm, thickness of the reinforcing material corresponding to the reinforcing material 11: 12 μm, resin content: 61%, resin flowability: 30) %, hardening time: 150 seconds, volatile content: 0.5%). (lower metal foil, upper metal foil)

作為下側金屬箔及上側金屬箔,是使用三井金屬礦業(股)製的產品編號「3EC-M2S-VLP」(厚度:12μm、預浸體側的面之表面粗糙度(Rzjis):2μm)。 [厚度之測定]As the lower metal foil and the upper metal foil, the product number "3EC-M2S-VLP" manufactured by Mitsui Mining & Mining Co., Ltd. (thickness: 12 μm, surface roughness (Rzjis) of the surface on the prepreg side: 2 μm) . [Measurement of thickness]

在實施例1~4及比較例1~4中得到的附金屬之積層板101中,導體電路50及第一金屬層21的層間厚度Ta,是藉由數位顯微鏡(股份公司Keyence製的「VH-Z500」,以下相同),進行附金屬之積層板101的截面觀察而測定。也就是說,如圖2所示,在附金屬之積層板101的厚度方向上,藉由數位顯微鏡,將第一金屬層21的第二絕緣層60側之前端部與導體電路50的第二絕緣層60側之前端部這2點間的長度放大2000倍而利用計測功能進行計算測定。在此,所謂第一金屬層21的第二絕緣層60側之前端部,如圖2所示,是指在第一金屬層21的下面,在銅箔凸部3點的平均位置上繪製直線定出的位置。所謂導體電路50的第二絕緣層60側之前端部,如圖2所示,是指在導體電路50的上面,在銅箔凸部3點的平均位置上繪製直線定出的位置。In the metal-clad laminate 101 obtained in the first to fourth embodiments and the comparative examples 1 to 4, the interlayer thickness Ta of the conductor circuit 50 and the first metal layer 21 is by a digital microscope ("VH by the company Keyence". -Z500", the same applies hereinafter, and measuring the cross section of the metal-clad laminate 101. That is, as shown in FIG. 2, the front end portion of the second insulating layer 60 side of the first metal layer 21 and the second portion of the conductor circuit 50 are in the thickness direction of the metal-clad laminate 101 by a digital microscope. The length between the two points on the side of the insulating layer 60 was magnified 2000 times, and the measurement function was used for calculation and measurement. Here, the front end portion of the first metal layer 21 on the second insulating layer 60 side, as shown in FIG. 2, means that a straight line is drawn on the lower surface of the copper foil convex portion at the point of the first metal layer 21 below the first metal layer 21. The location is determined. As shown in FIG. 2, the front end portion of the conductor circuit 50 on the second insulating layer 60 side is a position where a straight line is drawn on the upper surface of the copper foil convex portion at the point where the copper foil convex portion 3 is located on the upper surface of the conductor circuit 50.

在實施例1~4及比較例1~4中得到的附金屬之積層板101中,補強材61的厚度Tb,是藉由數位顯微鏡,進行附金屬之積層板101的截面觀察,如圖2所示,在附金屬之積層板101的厚度方向上,將補強材61的第一金屬層21側之前端部與補強材61的導體電路50側之前端部這2點間的長度,利用數位顯微鏡的計測功能進行計算測定。在此,所謂補強材61的第一金屬層21側之前端部,如圖2所示,是指在補強材61的上面,在構成補強材61之縱線61a的纖維方向上被研磨的最上部61c上繪製直線定出的位置。所謂補強材61的導體電路50側之前端部,如圖2所示,是指在補強材61的下面,在構成補強材61之縱線61a的纖維方向上被研磨的最下部61d上繪製直線定出的位置。在補強材61的厚度Tb之測定時,不是將構成補強材61的橫線61b而是將縱線61a作為基準使用,是因為在附金屬之積層板101的截面觀察中,如圖2所示,構成補強材61之橫線61b的截面形狀為圓形,難以區別橫線61b與無機填充料的緣故。在補強材11的厚度Tb、補強材61的厚度、對應於補強材11之補強材的厚度之測定時也是相同的。In the metal-clad laminate 101 obtained in Examples 1 to 4 and Comparative Examples 1 to 4, the thickness Tb of the reinforcing member 61 is a cross-sectional view of the metal-clad laminate 101 by a digital microscope, as shown in FIG. As shown in the thickness direction of the metal-clad laminate 101, the length between the front end portion of the reinforcing member 61 on the first metal layer 21 side and the front end portion of the reinforcing member 61 on the conductor circuit 50 side is represented by a digit. The measurement function of the microscope is calculated and measured. Here, the front end portion of the reinforcing member 61 on the first metal layer 21 side is the most polished on the upper surface of the reinforcing member 61 in the fiber direction of the vertical line 61a constituting the reinforcing member 61, as shown in Fig. 2 . A position determined by a straight line is drawn on the upper portion 61c. As shown in FIG. 2, the front end portion of the reinforcing member 61 on the side of the conductor circuit 50 is a straight line drawn on the lowermost portion 61d which is polished in the fiber direction of the longitudinal line 61a of the reinforcing member 61, as shown in FIG. The location is determined. In the measurement of the thickness Tb of the reinforcing material 61, the vertical line 61a is not used as the reference instead of the horizontal line 61b constituting the reinforcing material 61, because the cross-sectional observation of the metal-clad laminate 101 is as shown in FIG. The cross-sectional shape of the horizontal line 61b constituting the reinforcing material 61 is circular, and it is difficult to distinguish the horizontal line 61b from the inorganic filler. The same applies to the measurement of the thickness Tb of the reinforcing member 11, the thickness of the reinforcing member 61, and the thickness of the reinforcing member corresponding to the reinforcing member 11.

在實施例5、6及比較例5中得到的附金屬之積層板100中,第一金屬層20及第二金屬層30的層間厚度Ta,是藉由數位顯微鏡,進行附金屬之積層板100的截面觀察而測定。也就是說,如圖1所示,在附金屬之積層板100的厚度方向上,藉由數位顯微鏡,將第一金屬層20的絕緣層10側之前端部與第二金屬層30的絕緣層10側之前端部這2點間的長度放大2000倍而利用計測功能進行計算測定。在此,所謂第一金屬層20的絕緣層10側之前端部,如圖1所示,是指在第一金屬層20下面,在銅箔凸部3點的平均位置上繪製直線定出的位置。所謂第二金屬層30的絕緣層10側之前端部,如圖1所示,是指在第一金屬層30的上面,在銅箔凸部3點的平均位置上繪製直線定出的位置。In the metal-clad laminate 100 obtained in the fifth and sixth embodiments and the comparative example 5, the interlayer thickness Ta of the first metal layer 20 and the second metal layer 30 is a metal-clad laminate 100 by a digital microscope. The cross section was observed and measured. That is, as shown in FIG. 1, the insulating layer of the first metal layer 20 on the side of the insulating layer 10 and the insulating layer of the second metal layer 30 are formed by a digital microscope in the thickness direction of the metal-clad laminate 100. The length between the two points on the 10 side front end is enlarged by 2000 times, and the measurement function is used for calculation and measurement. Here, the front end portion of the first metal layer 20 on the side of the insulating layer 10, as shown in FIG. 1, means that a straight line is formed on the lower surface of the copper foil convex portion at the average position of the copper foil convex portion 3 under the first metal layer 20. position. The front end portion of the second metal layer 30 on the side of the insulating layer 10 as shown in FIG. 1 means a position where a straight line is drawn on the upper surface of the first metal layer 30 at an average position of the copper foil convex portion.

在實施例5、6及比較例5中得到的附金屬之積層板100中,補強材11的厚度Tb,是藉由數位顯微鏡,進行附金屬之積層板100的截面觀察,如圖1所示,在附金屬之積層板100的厚度方向上,藉由數位顯微鏡,將補強材11的第一金屬層20側之前端部與補強材11的第二金屬層30側之前端部這2點間的長度,放大2000倍而利用計測功能進行計算測定。在此,所謂補強材11的第一金屬層20側之前端部,如圖1所示,是指在補強材11的上面,在構成補強材11之縱線11a的纖維方向上被研磨的最上部11c上繪製直線定出的位置。所謂補強材11的第二金屬層30側之前端部,如圖1所示,是指在補強材11的下面,在構成補強材11之縱線11b的纖維方向上被研磨的最下部11d上繪製直線定出的位置。In the metal-clad laminate 100 obtained in Examples 5 and 6 and Comparative Example 5, the thickness Tb of the reinforcing member 11 is a cross-sectional view of the metal-clad laminate 100 by a digital microscope, as shown in FIG. In the thickness direction of the metal-clad laminate 100, the front end portion of the first metal layer 20 side of the reinforcing material 11 and the front end portion of the second metal layer 30 side of the reinforcing material 11 are fixed by a digital microscope. The length is magnified 2000 times and the measurement function is used for calculation and measurement. Here, the front end portion of the reinforcing member 11 on the first metal layer 20 side is the most polished on the upper surface of the reinforcing member 11 in the fiber direction of the vertical line 11a constituting the reinforcing member 11, as shown in Fig. 1 . The position of the straight line is drawn on the upper portion 11c. As shown in Fig. 1, the front end portion of the reinforcing member 11 on the second metal layer 30 side is referred to as the lowermost portion 11d which is polished in the fiber direction of the longitudinal line 11b constituting the reinforcing member 11 on the lower surface of the reinforcing member 11. Draw the position where the line is fixed.

在實施例1~4及比較例1~4中所用的補強材61之厚度,是藉由數位顯微鏡,進行預浸體60a的截面觀察, 在補強材61的厚度方向上,計算測定補強材61的第一金屬層21側之前端部與補強材61的導體電路50側之前端部這2點間的長度。在此,所謂補強材61的第一金屬層21側之前端部,是與上述補強材61的厚度Tb2及補強材11的厚度Tb1之測定同樣地,如圖2所示,是在補強材61的上面,在構成補強材61之縱線的纖維方向上被研磨的最上部上繪製直線定出的位置。所謂補強材61的導體電路50側之前端部,如圖2所示,是指在補強材61的下面,在構成補強材61之縱線的纖維方向上被研磨的最下部上繪製直線定出的位置。In the thicknesses of the reinforcing members 61 used in the first to fourth embodiments and the comparative examples 1 to 4, the cross-section of the prepreg 60a was observed by a digital microscope, and the reinforcing member 61 was calculated and measured in the thickness direction of the reinforcing member 61. The length between the front end portion of the first metal layer 21 side and the front end portion of the reinforcing material 61 on the conductor circuit 50 side. Here, the front end portion of the reinforcing member 61 on the first metal layer 21 side is the same as the thickness Tb2 of the reinforcing member 61 and the thickness Tb1 of the reinforcing member 11, as shown in FIG. The upper surface is drawn at a position where the straight line is drawn on the uppermost portion of the fiber constituting the longitudinal direction of the reinforcing member 61. As shown in FIG. 2, the front end portion of the reinforcing member 61 on the side of the conductor circuit 50 is defined as a straight line on the lowermost portion of the reinforcing member 61 which is polished in the fiber direction of the longitudinal direction of the reinforcing member 61. s position.

對應於實施例5、6及比較例5中所用的補強材11之補強材的厚度,是藉由數位顯微鏡,進行預浸體的截面觀察,在補強材的厚度方向上,計算測定補強材的上側金屬箔側之前端部與補強材的下側金屬箔側之前端部這2點間的長度。在此,所謂補強材的上側金屬箔側之前端部,是與上述補強材61的厚度Tb及補強材11的厚度Tb之測定同樣地,是在補強材的上面,在構成補強材之縱線的纖維方向上被研磨的最上部上繪製直線定出的位置。所謂補強材的下側金屬箔側之前端部,是與上述補強材61的厚度Tb及補強材11的厚度Tb之測定同樣地,是在補強材的下面,在構成補強材之縱線的纖維方向上被研磨的最下部上繪製直線定出的位置。 [焊接耐熱性]Corresponding to the thickness of the reinforcing material of the reinforcing material 11 used in Examples 5 and 6 and Comparative Example 5, the cross-sectional observation of the prepreg was performed by a digital microscope, and the measurement of the reinforcing material was performed in the thickness direction of the reinforcing material. The length between the front end portion of the upper metal foil side and the front end portion of the lower side metal foil side of the reinforcing material. Here, the front end portion of the upper side metal foil side of the reinforcing material is the vertical line of the reinforcing material on the upper surface of the reinforcing material, similarly to the measurement of the thickness Tb of the reinforcing material 61 and the thickness Tb of the reinforcing material 11 The position of the straight line is drawn on the uppermost portion of the fiber direction that is ground. The front end portion of the lower side metal foil side of the reinforcing material is a fiber constituting the longitudinal line of the reinforcing material on the lower surface of the reinforcing material, similarly to the measurement of the thickness Tb of the reinforcing material 61 and the thickness Tb of the reinforcing material 11 A position where a straight line is drawn on the lowermost portion that is ground in the direction. [Welding heat resistance]

將各實施例及比較例中得到的兩面附金屬之積層板作為試驗片,遵循JIS C6481,如下列的方式,評估焊接耐熱性。使熔融焊料的溫度從200℃開始約每10℃地上升。使熔融焊料的溫度上升的階段中,在各溫度下將試驗片放置在熔融焊料浴上60秒。之後,從熔融焊料浴取出試料片,將試驗片冷卻至室溫。藉由目視來確認試驗片的膨脹及層間剝離的有無。將未確認到膨脹、層間剝離之焊料的最高溫度作為評估結果。 [翹曲量評估]The two-sided metal-clad laminate obtained in each of the examples and the comparative examples was used as a test piece, and the solder heat resistance was evaluated in accordance with JIS C6481 in the following manner. The temperature of the molten solder was raised from about 200 ° C to about every 10 ° C. In the stage where the temperature of the molten solder was raised, the test piece was placed on the molten solder bath at each temperature for 60 seconds. Thereafter, the sample piece was taken out from the molten solder bath, and the test piece was cooled to room temperature. The presence or absence of swelling of the test piece and peeling of the interlayer was confirmed by visual observation. The highest temperature of the solder in which the expansion and interlayer peeling were not confirmed was taken as the evaluation result. [warpage evaluation]

切斷在各實施例及比較例中得到的附金屬之積層板,得到平面視角尺寸20cm×20cm的試驗片。藉由蝕刻完全除去此試驗片的兩面之金屬層後,將此試驗片在200℃下加熱1小時。The metal-clad laminate obtained in each of the examples and the comparative examples was cut to obtain a test piece having a plane viewing angle of 20 cm × 20 cm. After the metal layers on both sides of the test piece were completely removed by etching, the test piece was heated at 200 ° C for 1 hour.

接著,在實施例1~4及比較例1~4中得到的試驗片中,配置試驗片以令源自於芯基板110之第一絕緣層40位於上方。在此狀態下,測定試驗片的翹曲量。翹曲量在試驗片朝上方凸狀地產生翹曲的情況下,是定義為正值,且在朝下方凸狀地產生翹曲的情況下,是定義為負值。將其結果顯示於表1。Next, in the test pieces obtained in Examples 1 to 4 and Comparative Examples 1 to 4, test pieces were placed so that the first insulating layer 40 derived from the core substrate 110 was positioned above. In this state, the amount of warpage of the test piece was measured. The amount of warpage is defined as a positive value when the test piece is warped convexly upward, and is defined as a negative value when it is defined as a positive value and warped convexly downward. The results are shown in Table 1.

[表1] <TABLE border="1" borderColor="#000000" width="_0001"><TBODY><tr><td>   </td><td> 實施例 1 </td><td> 實施例 2 </td><td> 實施例 3 </td><td> 實施例 4 </td><td> 實施例 5 </td><td> 實施例 6 </td><td> 比較例 1 </td><td> 比較例 2 </td><td> 比較例 3 </td><td> 比較例 4 </td><td> 比較例 5 </td></tr><tr><td> 附 金 屬 之 積 層 板 </td><td> 構造 </td><td> 圖2 </td><td> 圖2 </td><td> 圖2 </td><td> 圖2 </td><td> 圖1 </td><td> 圖1 </td><td> 圖2 </td><td> 圖2 </td><td> 圖2 </td><td> 圖2 </td><td> 圖1 </td></tr><tr><td> 金屬層的層數 </td><td> 3層 </td><td> 3層 </td><td> 3層 </td><td> 3層 </td><td> 2層 </td><td> 2層 </td><td> 3層 </td><td> 3層 </td><td> 3層 </td><td> 3層 </td><td> 2層 </td></tr><tr><td> 加熱加壓成形方式 </td><td> 雙帶壓製法 </td><td> 雙帶壓製法 </td><td> 雙帶壓製法 </td><td> 雙帶壓製法 </td><td> 雙帶壓製法 </td><td> 雙帶壓製法 </td><td> 多段式熱壓法 </td><td> 多段式熱壓法 </td><td> 多段式熱壓法 </td><td> 多段式熱壓法 </td><td> 多段式熱壓法 </td></tr><tr><td> 厚度 </td><td> 層間厚度(Ta) (μm) </td><td> 12 </td><td> 14 </td><td> 45 </td><td> 47 </td><td> 12 </td><td> 14 </td><td> 15 </td><td> 17 </td><td> 48 </td><td> 55 </td><td> 15 </td></tr><tr><td> 補強材的 厚度(Tb) (μm) </td><td> 12 </td><td> 12 </td><td> 45 </td><td> 45 </td><td> 12 </td><td> 12 </td><td> 12 </td><td> 12 </td><td> 45 </td><td> 45 </td><td> 12 </td></tr><tr><td> Ta-Tb(μm) </td><td> 0 </td><td> 2 </td><td> 0 </td><td> 2 </td><td> 0 </td><td> 2 </td><td> 3 </td><td> 5 </td><td> 3 </td><td> 10 </td><td> 3 </td></tr><tr><td> 導體電路的厚度(A) (μm) </td><td> 5 </td><td> 5 </td><td> 20 </td><td> 20 </td><td> — </td><td> — </td><td> 5 </td><td> 5 </td><td> 20 </td><td> 20 </td><td> — </td></tr><tr><td> 合計板厚(μm) </td><td> 53 </td><td> 55 </td><td> 101 </td><td> 103 </td><td> 36 </td><td> 38 </td><td> 56 </td><td> 58 </td><td> 104 </td><td> 111 </td><td> 39 </td></tr><tr><td> 評估 </td><td> 焊接耐熱性 試驗(℃) </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 200 </td><td> 288 </td><td> 200 </td><td> 288 </td><td> 200 </td></tr><tr><td> 翹曲量評估(μm) </td><td> -10 </td><td> -10 </td><td> -10 </td><td> -10 </td><td> 0 </td><td> 0 </td><td> -30 </td><td> -30 </td><td> -30 </td><td> -30 </td><td> 0 </td></tr></TBODY></TABLE>[Table 1]         <TABLE border="1" borderColor="#000000" width="_0001"><TBODY><tr><td> </td><td> Example 1 </td><td> Example 2 </ Td><td> Example 3 </td><td> Example 4 </td><td> Example 5 </td><td> Example 6 </td><td> Comparative Example 1 </ Td><td> Comparative Example 2 </td><td> Comparative Example 3 </td><td> Comparative Example 4 </td><td> Comparative Example 5 </td></tr><tr>< Td> metal-clad laminate</td><td> construction</td><td> Figure 2 </td><td> Figure 2 </td><td> Figure 2 </td><td> 2 </td><td> Figure 1 </td><td> Figure 1 </td><td> Figure 2 </td><td> Figure 2 </td><td> Figure 2 </td> <td> Figure 2 </td><td> Figure 1 </td></tr><tr><td> Number of layers in the metal layer</td><td> 3 layers</td><td> 3 Layer </td><td> 3 layers </td><td> 3 layers </td><td> 2 layers </td><td> 2 layers </td><td> 3 layers </td> <td> 3 layers</td><td> 3 layers</td><td> 3 layers</td><td> 2 layers</td></tr><tr><td> Heated pressure forming Mode </td><td> double belt pressing method</td><td> double belt pressing method</td><td> double belt pressing method</td><td> double belt pressing method</td>< Td> double belt pressing method</td><td> double belt pressing method</td><td> multi-stage hot pressing method</td><td> multi-stage heat Method</td><td> Multi-stage hot pressing method</td><td> Multi-stage hot pressing method</td><td> Multi-stage hot pressing method</td></tr><tr><td > Thickness</td><td> Interlayer Thickness (Ta) (μm) </td><td> 12 </td><td> 14 </td><td> 45 </td><td> 47 < /td><td> 12 </td><td> 14 </td><td> 15 </td><td> 17 </td><td> 48 </td><td> 55 </td ><td> 15 </td></tr><tr><td> Thickness of reinforcing material (Tb) (μm) </td><td> 12 </td><td> 12 </td>< Td> 45 </td><td> 45 </td><td> 12 </td><td> 12 </td><td> 12 </td><td> 12 </td><td> 45 </td><td> 45 </td><td> 12 </td></tr><tr><td> Ta-Tb(μm) </td><td> 0 </td>< Td> 2 </td><td> 0 </td><td> 2 </td><td> 0 </td><td> 2 </td><td> 3 </td><td> 5 </td><td> 3 </td><td> 10 </td><td> 3 </td></tr><tr><td> Thickness of conductor circuit (A) (μm) < /td><td> 5 </td><td> 5 </td><td> 20 </td><td> 20 </td><td> — </td><td> — </td ><td> 5 </td><td> 5 </td><td> 20 </td><td> 20 </td><td> — </td></tr><tr><td > Total plate thickness (μm) </td><td> 53 </td><td> 55 </td><td> 101 </td><td> 103 </td><td> 36 </td ><td> 38 </td><td> 56 </td><td> 58 </td><td> 104 </ Td><td> 111 </td><td> 39 </td></tr><tr><td> Evaluation</td><td> Solder heat resistance test (°C) </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 288 </td><td> 200 < /td><td> 288 </td><td> 200 </td><td> 288 </td><td> 200 </td></tr><tr><td> Warpage Assessment ( Mm) </td><td> -10 </td><td> -10 </td><td> -10 </td><td> -10 </td><td> 0 </td> <td> 0 </td><td> -30 </td><td> -30 </td><td> -30 </td><td> -30 </td><td> 0 </ Td></tr></TBODY></TABLE>

100、101、110a、102‧‧‧附金屬之積層板
10‧‧‧絕緣層
10a、40a‧‧‧第一面
10b、40b‧‧‧第二面
110、120‧‧‧芯基板
101a、102a‧‧‧積層物
11、41、61、71‧‧‧補強材
12、42、62、72‧‧‧硬化物
200‧‧‧印刷配線板
20、21‧‧‧第一金屬層
22‧‧‧第二導體電路
30、31‧‧‧第二金屬層
32‧‧‧第三導體電路
40‧‧‧第一絕緣層
50‧‧‧導體電路(第一導體電路)
51‧‧‧第二導體電路
50a‧‧‧金屬層
60‧‧‧第二絕緣層
60a、70a‧‧‧預浸體
62a、72a‧‧‧半硬化物
61a、11a、11b‧‧‧縱線
11c、61c‧‧‧最上部
11d、61d‧‧‧最下部
61b‧‧‧橫線
70‧‧‧第三絕緣層
300‧‧‧雙帶壓製裝置
310‧‧‧環形帶
320‧‧‧滾筒
330‧‧‧熱壓裝置
340、350、360‧‧‧給料機
370‧‧‧捲取機
L‧‧‧間距
Ta1、Ta2、Ta3、Tc、Ta5、Ta6‧‧‧層間厚度
Tb1、Tb2、Tb3、Td、A、Tb5、Tb6‧‧‧厚度
100, 101, 110a, 102‧‧‧ metal-clad laminate
10‧‧‧Insulation
10a, 40a‧‧‧ first side
10b, 40b‧‧‧ second side
110, 120‧‧‧ core substrate
101a, 102a‧‧‧layers
11, 41, 61, 71‧‧‧ reinforcing materials
12, 42, 62, 72‧‧‧ hardened materials
200‧‧‧Printed wiring board
20, 21‧‧‧ first metal layer
22‧‧‧Second conductor circuit
30, 31‧‧‧ second metal layer
32‧‧‧ Third conductor circuit
40‧‧‧First insulation
50‧‧‧Conductor circuit (first conductor circuit)
51‧‧‧Second conductor circuit
50a‧‧‧metal layer
60‧‧‧Second insulation
60a, 70a‧‧‧ prepreg
62a, 72a‧‧‧ semi-hardened
61a, 11a, 11b‧‧‧ vertical line
11c, 61c‧‧‧ top
11d, 61d‧‧‧ lowermost
61b‧‧‧ horizontal line
70‧‧‧ third insulation layer
300‧‧‧Double belt pressing device
310‧‧‧Ring belt
320‧‧‧Roller
330‧‧‧Hot pressure device
340, 350, 360‧‧‧ feeders
370‧‧‧Winding machine
L‧‧‧ spacing
Interlayer thickness of Ta1, Ta2, Ta3, Tc, Ta5, Ta6‧‧
Tb1, Tb2, Tb3, Td, A, Tb5, Tb6‧‧‧ thickness

圖1是本發明的第一實施形態之附金屬之積層板的概略截面圖。 圖2是本發明的第二實施形態之附金屬之積層板的概略截面圖。 圖3是本發明的實施形態之印刷配線板的概略截面圖。 圖4A是用來說明本發明的第三實施形態之製造方法的圖式。 圖4B是用來說明本發明的第三實施形態之製造方法的圖式。 圖4C是用來說明本發明的第三實施形態之製造方法的圖式。 圖4D是用來說明本發明的第三實施形態之製造方法的圖式。 圖5是雙帶壓製裝置的概略圖。 圖6A是用來說明本發明的第四實施形態之製造方法的圖式。 圖6B是用來說明本發明的第四實施形態之製造方法的圖式。 圖6C是用來說明本發明的第四實施形態之製造方法的圖式。 圖6D是用來說明本發明的第四實施形態之製造方法的圖式。 圖7是本發明的第五實施形態之附金屬之積層板的概略截面圖。Fig. 1 is a schematic cross-sectional view showing a metal-clad laminate according to a first embodiment of the present invention. Fig. 2 is a schematic cross-sectional view showing a metal-clad laminate according to a second embodiment of the present invention. Fig. 3 is a schematic cross-sectional view showing a printed wiring board according to an embodiment of the present invention. Fig. 4A is a view for explaining a manufacturing method of a third embodiment of the present invention. Fig. 4B is a view for explaining a manufacturing method of a third embodiment of the present invention. Fig. 4C is a view for explaining a manufacturing method of a third embodiment of the present invention. Fig. 4D is a view for explaining a manufacturing method of a third embodiment of the present invention. Fig. 5 is a schematic view of a double belt pressing device. Fig. 6A is a view for explaining a manufacturing method of a fourth embodiment of the present invention. Fig. 6B is a view for explaining a manufacturing method of a fourth embodiment of the present invention. Fig. 6C is a view for explaining a manufacturing method of a fourth embodiment of the present invention. Fig. 6D is a view for explaining a manufacturing method of a fourth embodiment of the present invention. Fig. 7 is a schematic cross-sectional view showing a metal-clad laminate according to a fifth embodiment of the present invention.

100‧‧‧附金屬之積層板 100‧‧‧Metal laminate with metal

10‧‧‧絕緣層 10‧‧‧Insulation

10a‧‧‧第一面 10a‧‧‧ first side

10b‧‧‧第二面 10b‧‧‧ second side

11‧‧‧補強材 11‧‧‧ reinforcing materials

11a、11b‧‧‧縱線 11a, 11b‧‧‧ vertical line

11c‧‧‧最上部 11c‧‧‧ top

11d‧‧‧最下部 11d‧‧‧Bottom

12‧‧‧硬化物 12‧‧‧ hardened material

20‧‧‧第一金屬層 20‧‧‧First metal layer

30‧‧‧第二金屬層 30‧‧‧Second metal layer

Ta1‧‧‧層間厚度 Ta1‧‧‧ interlayer thickness

Tb1‧‧‧厚度 Tb1‧‧‧ thickness

Claims (6)

一種附金屬之積層板,其具備:第一絕緣層;導體電路,積層於前述第一絕緣層上;第二絕緣層,積層於前述第一絕緣層及前述導體電路上;及金屬層,積層於前述第二絕緣層上,前述第二絕緣層包含補強材及含浸於前述補強材的熱固性樹脂組成物之硬化物,前述導體電路及前述金屬層的層間厚度Ta2與前述補強材的厚度Tb2之關係為:0≦Ta2-Tb2≦2μm,前述導體電路的厚度為3~20μm,前述層間厚度Ta2為10~50μm,前述補強材的厚度Tb2為8~50μm。 A metal-clad laminate comprising: a first insulating layer; a conductor circuit laminated on the first insulating layer; a second insulating layer laminated on the first insulating layer and the conductor circuit; and a metal layer, laminated In the second insulating layer, the second insulating layer includes a reinforcing material and a cured product of the thermosetting resin composition impregnated with the reinforcing material, and an interlayer thickness Ta2 of the conductor circuit and the metal layer and a thickness Tb2 of the reinforcing material The relationship is: 0≦Ta2-Tb2≦2 μm, the thickness of the conductor circuit is 3 to 20 μm, the interlayer thickness Ta2 is 10 to 50 μm, and the thickness Tb2 of the reinforcing material is 8 to 50 μm. 一種印刷配線板,其具備:第一絕緣層;第一導體電路,積層於前述第一絕緣層上;第二絕緣層,積層於前述第一絕緣層及前述第一導體電路上;及第二導體電路,積層於前述第二絕緣層上,前述第二絕緣層包含補強材及含浸於前述補強材的熱固性樹脂組成物之硬化物,前述第一導體電路及前述第二導體電路的層間厚度 Ta3與前述補強材的厚度Tb3之關係為:0≦Ta3-Tb3≦2μm,前述第一導體電路的厚度為3~20μm,前述層間厚度Ta3為10~50μm,前述補強材的厚度Tb3為8~50μm。 A printed wiring board comprising: a first insulating layer; a first conductor circuit laminated on the first insulating layer; a second insulating layer laminated on the first insulating layer and the first conductor circuit; and a second a conductor circuit laminated on the second insulating layer, the second insulating layer comprising a reinforcing material and a cured product of the thermosetting resin composition impregnated with the reinforcing material, and an interlayer thickness of the first conductor circuit and the second conductor circuit The relationship between Ta3 and the thickness Tb3 of the reinforcing material is 0≦Ta3-Tb3≦2 μm, the thickness of the first conductor circuit is 3 to 20 μm, the interlayer thickness Ta3 is 10 to 50 μm, and the thickness Tb3 of the reinforcing material is 8~. 50 μm. 一種附金屬之積層板之製造方法,其包含:準備步驟,準備在兩面或一面上已具備導體電路的芯基板;積層步驟,藉由在具備前述導體電路的面上依序積層預浸體及金屬箔,以製作積層物;及加熱加壓成形步驟,連續地將前述積層物供給至轉動的一對環形帶間,並在前述一對環形帶間加熱加壓成形前述積層物,前述預浸體包含補強材及含浸於前述補強材的熱固性樹脂組成物,加熱加壓成形後的前述導體電路及前述金屬箔的層間厚度Ta2與前述補強材的厚度Tb2之關係為:0≦Ta2-Tb2≦2μm,前述導體電路的厚度為3~20μm,前述層間厚度Ta2為10~50μm,前述補強材的厚度Tb2為8~50μm。 A method for manufacturing a metal-clad laminate comprising: a preparation step of preparing a core substrate having a conductor circuit on both sides or one side; and a laminating step of sequentially laminating a prepreg on a surface having the conductor circuit and a metal foil for forming a laminate; and a heat and pressure forming step of continuously supplying the laminate to a rotating pair of endless belts, and heating and press-forming the laminate between the pair of endless belts, the prepreg The body includes a reinforcing material and a thermosetting resin composition impregnated with the reinforcing material, and the relationship between the interlayer thickness Ta2 of the conductor circuit and the metal foil after the heat and pressure molding and the thickness Tb2 of the reinforcing material is: 0≦Ta2-Tb2≦ 2 μm, the thickness of the conductor circuit is 3 to 20 μm, the interlayer thickness Ta2 is 10 to 50 μm, and the thickness Tb2 of the reinforcing material is 8 to 50 μm. 如請求項3之附金屬之積層板之製造方法,其中在前述加熱加壓成形步驟中,是以3℃/s以上的升溫速度,將前述積層物從常溫加熱到前述熱固性樹脂組成 物的硬化溫度為止。 The method for producing a laminated metal sheet according to claim 3, wherein in the heating and press forming step, the laminate is heated from a normal temperature to a thermosetting resin at a temperature elevation rate of 3 ° C/s or more. The hardening temperature of the object. 如請求項3之附金屬之積層板之製造方法,其中在前述加熱加壓成形步驟之前,預備加熱前述積層物。 A method of producing a metal laminate according to claim 3, wherein the laminate is preheated before the heat and pressure forming step. 一種印刷配線板之製造方法,其藉由如請求項3~5中任一項之方法製造附金屬之積層板,且對前述金屬箔實施配線形成處理。 A method of manufacturing a printed wiring board, which comprises producing a metal-clad laminate by the method according to any one of claims 3 to 5, and subjecting the metal foil to a wiring forming treatment.
TW105132824A 2016-03-18 2016-10-12 Production method of metal laminated sheet, printed wiring board, metal sheet, and manufacturing method of printed wiring board TWI581958B (en)

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