JP2000196238A - Manufacture of multilayer metal foil laminate board with inner circuit - Google Patents
Manufacture of multilayer metal foil laminate board with inner circuitInfo
- Publication number
- JP2000196238A JP2000196238A JP37258298A JP37258298A JP2000196238A JP 2000196238 A JP2000196238 A JP 2000196238A JP 37258298 A JP37258298 A JP 37258298A JP 37258298 A JP37258298 A JP 37258298A JP 2000196238 A JP2000196238 A JP 2000196238A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- metal mirror
- mirror plate
- metal
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Press Drives And Press Lines (AREA)
- Laminated Bodies (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は多層プリント配線板
の製造に使用する内層回路入り多層金属箔張り積層板の
製造法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer metal foil-clad laminate having an inner layer circuit used for manufacturing a multilayer printed wiring board.
【0002】[0002]
【従来の技術】内層回路入り多層金属箔張り積層板は、
回路形成されたコア基板の両側にプリプレグ層と金属箔
を内側から外側へこの順序で重ねた積層構成体の複数組
を積み重ねてプレス熱盤一段間に投入し、加熱加圧成形
することにより製造される。ひとつの積層構成体を構成
するコア基板が複数枚あるときは、コア基板同士の間に
もプリプレグ層を介在させる。プリプレグ中の樹脂は前
記加熱加圧成形時に溶融し、積層構成体を一体化するた
めの接着層の機能を果たす。また、溶融した樹脂は、コ
ア基板のプリント配線間凹部に流入し凹部を埋める。各
積層構成体を離隔するために、積層構成体間には、金属
鏡面板を介在させる。複数組を積み重ねた積層構成体の
上側と下側の金属鏡面板とプレス熱盤との間には、それ
ぞれクッション材を介在させて加熱加圧成形を実施す
る。2. Description of the Related Art Multilayer metal foil-clad laminates containing an inner circuit are:
Manufactured by stacking multiple sets of laminated structures in which a prepreg layer and metal foil are stacked in this order from the inside to the outside on both sides of the circuit-formed core substrate, put it in one press hot platen, and heat and press mold Is done. When there are a plurality of core substrates constituting one laminated structure, a prepreg layer is also interposed between the core substrates. The resin in the prepreg is melted at the time of the heat and pressure molding, and functions as an adhesive layer for integrating the laminated structure. Further, the molten resin flows into the recess between the printed wirings of the core substrate and fills the recess. In order to separate each laminated structure, a metal mirror plate is interposed between the laminated structures. Heat and pressure molding is performed between the upper and lower metal mirror plates and the press hot plate of the laminated structure in which a plurality of sets are stacked with a cushion material interposed therebetween.
【0003】一回の加熱加圧成形で多くの製品を製造し
ようとする場合、多層金属箔張り積層板の製造サイズを
大きくするか、プレス熱盤一段間に投入する積層構成体
の組数を多くすることが考えられる。一つの積層構成体
を構成するコア基板が複数枚あるときに製造サイズを大
きくすると、プリント配線の層間位置決め精度が悪くな
るため、徒に製造サイズを大きくすることはできない。
特に、プリント配線の層数が多くなるほど、製造サイズ
の上限は小さく制限される。プレス熱盤一段間に投入す
る積層構成体の組数を多くしようとする場合、プレス熱
盤一段の間隔は一定であるから、積層構成体を離隔する
ために配置する金属鏡面板の厚みを薄くしないと、積層
構成体の投入組数を増やすことができない。When a large number of products are to be manufactured by one heat and pressure molding, the production size of a multilayer metal foil-clad laminate is increased, or the number of sets of laminated components to be put in one stage of a hot platen is reduced. More is conceivable. If the manufacturing size is increased when there are a plurality of core substrates constituting one laminated structure, the accuracy of positioning the printed wiring between layers deteriorates, so that the manufacturing size cannot be increased.
In particular, as the number of printed wiring layers increases, the upper limit of the manufacturing size is limited to a smaller value. When trying to increase the number of sets of laminated components to be put into one press hot platen, the thickness of the metal mirror plate to be arranged to separate the laminated components should be thin because the interval of one press hot platen is constant. Otherwise, the number of input sets of the laminated structure cannot be increased.
【0004】金属鏡面板の厚みは1〜1.2mmが一般的
であるが、投入組数を多くするために厚み0.8mm以下
の金属鏡面板を使用する試みがある。しかし、金属鏡面
板を薄くすると、クッション材に最も近い位置で成形さ
れる多層金属箔張り積層板表面に、金属鏡面板を通して
クッション材の表面性状が転写される心配がある。さら
には、プレス熱盤一段間に投入する積層構成体の組数が
多くなってくると、加熱加圧成形時にコア基板のプリン
ト配線の凹凸によって金属鏡面板が変形し、その結果、
金属鏡面板を介して隣接する多層金属箔張り積層板表面
に前記凹凸が転写される心配もある。多層金属箔張り積
層板表面に前記の転写があると、後工程において表面の
プリント配線形成のためにラミネートする感光性樹脂フ
ィルムの密着不良や、部品の実装不良等につながる。上
記の転写を回避する手段として、積層構成体を加熱加圧
成形する際の圧力を低圧に設定することが考えられる。
しかし、圧力不足によって、加熱加圧成形時に溶融した
樹脂でコア基板のプリント配線間凹部を十分に埋められ
ない懸念があり、プリプレグ特性を変更してプリプレグ
中の樹脂が溶融したときの流動性をよくする必要があ
る。他方、このようなプリプレグ特性の変更は、金属箔
引剥がし強さ、耐熱性、板厚精度等の製品性能の低下に
つながる。生産性を上げるために、金属鏡面板の厚みを
薄く変更し、変更前と同等に製品性能を保持することは
困難であった。The thickness of a metal mirror plate is generally 1 to 1.2 mm, but there is an attempt to use a metal mirror plate having a thickness of 0.8 mm or less in order to increase the number of sets. However, when the metal mirror plate is made thin, there is a concern that the surface properties of the cushion material may be transferred to the surface of the multilayer metal foil-clad laminate formed at the position closest to the cushion material through the metal mirror plate. Furthermore, when the number of sets of laminated components to be put into one press heating plate increases, the metal mirror plate is deformed due to the unevenness of the printed wiring of the core substrate at the time of heating and pressing, and as a result,
There is also a concern that the irregularities may be transferred to the surface of the adjacent multilayer metal foil-clad laminate via the metal mirror plate. If the above-mentioned transfer is present on the surface of the multilayer metal foil-clad laminate, poor adhesion of a photosensitive resin film to be laminated for forming printed wiring on the surface in a later step, mounting failure of components, and the like will result. As a means for avoiding the above-mentioned transfer, it is conceivable to set the pressure at the time of heating and pressing the laminated structure to a low pressure.
However, due to insufficient pressure, there is concern that the resin interposed between the printed wiring of the core substrate and the resin melted during the heat and pressure molding may not be sufficiently filled, and the prepreg characteristics may be changed to improve the fluidity when the resin in the prepreg is melted. It needs to be better. On the other hand, such a change in prepreg characteristics leads to a decrease in product performance such as metal foil peeling strength, heat resistance, and thickness accuracy. In order to increase the productivity, it was difficult to change the thickness of the metal mirror plate to be thin, and to maintain the same product performance as before the change.
【0005】[0005]
【発明が解決しようとする課題】本発明が解決しようと
する課題は、金属鏡面板として厚み0.8mm以下のもの
を使用した場合にも、殊更プリプレグ特性を変更するこ
となく、クッション材やコア基板のプリント配線に起因
する凹凸が表面に転写されない内層回路入り多層金属箔
張り積層板を製造することである。The problem to be solved by the present invention is that even when a metal mirror plate having a thickness of 0.8 mm or less is used, a cushion material or a core material can be used without changing the prepreg characteristics. An object of the present invention is to manufacture a multilayer metal foil-clad laminate having an inner layer circuit in which unevenness due to printed wiring of a substrate is not transferred to the surface.
【0006】[0006]
【課題を解決するための手段】回路形成されたコア基板
の両側にプリプレグ層と金属箔を内側から外側へこの順
序で重ねた積層構成体の複数組を積み重ねてプレス熱盤
一段間に投入し加熱加圧成形するに際し、前記積層構成
体間には厚み0.8mm以下の金属鏡面板を介在させる。
このような場合に、前記複数組を積み重ねた積層構成体
の上側と下側には厚み1mm以上の金属鏡面板を配置する
ことを特徴とする。厚み1mm以上の金属鏡面板を配置す
ることにより、クッション材の表面性状が成形中の内層
回路入り多層金属箔張り積層板の表面に伝わらないよう
にすることができる。A plurality of sets of a laminated structure in which a prepreg layer and a metal foil are stacked in this order from the inside to the outside on both sides of a core substrate on which a circuit is formed are stacked and put into one stage of a press hot platen. During the heat and pressure molding, a metal mirror plate having a thickness of 0.8 mm or less is interposed between the laminated structures.
In such a case, a metal mirror plate having a thickness of 1 mm or more is arranged on the upper and lower sides of the laminated structure in which the plurality of sets are stacked. By arranging a metal mirror plate having a thickness of 1 mm or more, it is possible to prevent the surface properties of the cushion material from being transmitted to the surface of the multilayer metal foil-clad laminate containing the inner layer circuit during molding.
【0007】プレス熱盤一段間に投入する積層構成体の
組数が多くなると、コア基板のプリント配線の凹凸が累
積され、その凹凸が内層回路入り多層金属箔張り積層板
の表面に転写されやすくなる。そこで、プレス熱盤一段
間に積み重ねた積層構成体の上側と下側に加えて、積み
重ねた積層構成体の所定組数毎の間に厚み1mm以上の金
属鏡面板を追加して配置することにより、コア基板のプ
リント配線の凹凸に起因して発生する内層回路入り多層
金属箔張り積層板表面の凹凸も回避することができる。[0007] When the number of sets of the laminated structure to be put into one stage of the press heating plate increases, the unevenness of the printed wiring of the core substrate is accumulated, and the unevenness is easily transferred to the surface of the multi-layer metal foil-clad laminate having the inner layer circuit. Become. Therefore, in addition to the upper and lower sides of the stacked structure stacked in one stage of the press hot platen, a metal mirror plate having a thickness of 1 mm or more is additionally arranged between a predetermined number of stacked stacked structures. Also, it is possible to avoid unevenness on the surface of the multilayer metal foil-clad laminate containing the inner layer circuit, which is caused by unevenness of the printed wiring of the core substrate.
【0008】[0008]
【発明の実施の形態】本発明に係る方法では、プリプレ
グの特性を何ら変更する必要はない。上記のような厚み
1mm以上の金属鏡面板を部分的に追加配置するだけで、
金属箔引剥がし強さ、耐熱性、厚み等の製品の性能を落
とすことなく、表面に凹凸のない内層回路入り多層金属
張り積層板を製造することができる。厚み0.8mm以下
の金属鏡面板は、ステンレス、鉄、アルミニウム等の材
質からなるものであり特に制限はない。アルミニウム等
の硬度の低い材質からなる金属鏡面板であっても支障な
く使用することができ、本発明に係る方法は特に硬度の
低い材質からなる金属鏡面板を使用する場合に有効であ
る。The method according to the invention does not require any change in the properties of the prepreg. Just by partially adding a metal mirror plate with a thickness of 1 mm or more as described above,
It is possible to manufacture a multilayer metal-clad laminate having an inner layer circuit with no unevenness on the surface without deteriorating the product performance such as metal foil peeling strength, heat resistance and thickness. The metal mirror plate having a thickness of 0.8 mm or less is made of a material such as stainless steel, iron, and aluminum, and is not particularly limited. Even a metal mirror plate made of a material having a low hardness such as aluminum can be used without any trouble. The method according to the present invention is particularly effective when a metal mirror plate made of a material having a low hardness is used.
【0009】積層構成体のプレス熱盤間への投入は、例
えば、図1に示すように実施する。すなわち、積層構成
体1を0.8mm厚以下金属鏡面板2で挟み、その複数組
をプレス熱盤(図示せず)一段間に投入する。積層構成
体1と0.8mm厚以下金属鏡面板2を交互に積み重ねた
構成となる。前記積み重ねた積層構成体の上側と下側に
は1mm厚以上金属鏡面板3とクッション材4を内側から
外側へこの順序で配置する。The charging of the laminated structure between press hot plates is performed, for example, as shown in FIG. That is, the laminated structure 1 is sandwiched between metal mirror plates 2 having a thickness of 0.8 mm or less, and a plurality of sets are put into one stage of a hot platen (not shown). The laminated structure 1 and the metal mirror plate 2 having a thickness of 0.8 mm or less are alternately stacked. On the upper and lower sides of the stacked structure, a metal mirror plate 3 and a cushion material 4 having a thickness of 1 mm or more are arranged in this order from inside to outside.
【0010】[0010]
【実施例】実施例1 プリプレグとして厚み0.1mmのガラス繊維織布基材エ
ポキシ樹脂プリプレグ(ANSIグレード FR−4相
当)を準備した。また、コア基板として、ガラス繊維織
布基材エポキシ樹脂両面銅張り積層板(ANSIグレー
ド FR−4相当1.2mm厚,銅箔厚35μm)をプリ
ント配線加工したものを準備した。前記コア基板の両側
に前記プリプレグを介して厚み18μmの銅箔を配置し
て積層構成体1とし、これを図1において説明したよう
にプレス熱盤間に投入し加熱加圧成形を行なって一体化
し、厚み1.6mmの内層回路入り4層銅張り積層板を得
た。プレス熱盤一段間に投入する積層構成体1の組数は
10〜20の範囲とした。0.8mm厚以下金属鏡面板2
はアルミニウム製0.8mm厚であり、1mm厚以上金属鏡
面板3はステンレス製1.2mm厚である。クッション材
4は厚み0.2mmのクラフト紙を10枚重ねたものであ
る。Example 1 A 0.1 mm thick glass fiber woven base epoxy resin prepreg (equivalent to ANSI grade FR-4) was prepared as a prepreg. Further, as a core substrate, a glass fiber woven base epoxy resin double-sided copper-clad laminate (1.2 mm thick corresponding to ANSI grade FR-4, copper foil thickness 35 μm) was prepared by printed wiring processing. A copper foil having a thickness of 18 μm is arranged on both sides of the core substrate via the prepreg to form a laminated structure 1, which is inserted between press hot plates as described in FIG. Then, a four-layer copper-clad laminate having an inner circuit having a thickness of 1.6 mm was obtained. The number of sets of the laminated structure 1 to be put in between one stage of the press hot platen was in the range of 10 to 20. 0.8mm thick metal mirror plate 2
Is 0.8 mm thick made of aluminum, and the metal mirror plate 3 is 1 mm thick or more and 1.2 mm thick made of stainless steel. The cushion material 4 is formed by stacking ten kraft papers each having a thickness of 0.2 mm.
【0011】実施例2 実施例1において、0.8mm厚以下金属鏡面板2をアル
ミニウム製0.4mm厚とし、1mm厚以上金属鏡面板3を
ステンレス製1.0mm厚とした。また、プレス熱盤一段
間に投入する積層構成体1の組数は10〜12の範囲と
した。そのほかは実施例1と同様である。Example 2 In Example 1, the metal mirror plate 2 having a thickness of 0.8 mm or less was made 0.4 mm thick made of aluminum, and the metal mirror plate 3 having a thickness of 1 mm or more was made 1.0 mm thick made of stainless steel. Further, the number of sets of the laminated structure 1 to be put in between the press hot plates was set in a range of 10 to 12. The rest is the same as the first embodiment.
【0012】実施例3 コア基板として、ガラス繊維織布基材エポキシ樹脂両面
銅張り積層板(ANSIグレード FR−4相当0.4
mm厚,銅箔厚35μm)をプリント配線加工したものを
準備した。前記コア基板の両側に実施例1のプリプレグ
を介して厚み18μmの銅箔を配置して積層構成体1と
し、これを図2に示したように20〜30組の範囲で積
み重ねる。すなわち、プレス熱盤一段間に積み重ねた積
層構成体1の上側と下側に加えて、積み重ねた積層構成
体を二分する位置にも1mm厚以上金属鏡面板3を追加し
て配置する。実施例1と同様に加熱加圧成形を行なって
一体化し、厚み0.8mmの内層回路入り4層銅張り積層
板を得た。0.8mm厚以下金属鏡面板2をアルミニウム
製0.4mm厚とし、1mm厚以上金属鏡面板3をステンレ
ス製1.2mm厚とした。Example 3 A double-sided copper-clad laminate made of glass fiber woven base epoxy resin (0.4 equivalent to ANSI grade FR-4) was used as a core substrate.
mm thickness, copper foil thickness 35 μm) were prepared by printed wiring processing. A copper foil having a thickness of 18 μm is arranged on both sides of the core substrate via the prepreg of Example 1 to form a laminated structure 1, which is stacked in a range of 20 to 30 sets as shown in FIG. 2. That is, in addition to the upper and lower sides of the stacked structure 1 stacked between the press hot plates, the metal mirror plate 3 having a thickness of 1 mm or more is additionally arranged at a position where the stacked structure is bisected. In the same manner as in Example 1, heat and pressure molding was performed to integrate the resultant into a 0.8-mm thick 4-layer copper-clad laminate with an inner circuit. The metal mirror plate 2 having a thickness of 0.8 mm or less was made 0.4 mm thick made of aluminum, and the metal mirror plate 3 having a thickness of 1 mm or more was made 1.2 mm thick stainless steel.
【0013】実施例4 コア基板として、ガラス繊維織布基材エポキシ樹脂両面
銅張り積層板(ANSIグレード FR−4相当0.0
6mm厚,銅箔厚18μm)をプリント配線加工したもの
を準備した。前記コア基板の両側に実施例1のプリプレ
グを介して厚み18μmの銅箔を配置して積層構成体と
し、これを30〜40組の範囲で積み重ねる。プレス熱
盤一段間に積み重ねた積層構成体の上側と下側に加え
て、積み重ねた積層構成体を三分する位置にも1mm厚以
上金属鏡面板3を追加して配置する。実施例1と同様に
加熱加圧成形を行なって一体化し、厚み0.3mmの内層
回路入り4層銅張り積層板を得た。0.8mm厚以下金属
鏡面板2をアルミニウム製0.4mm厚とし、1mm厚以上
金属鏡面板3をステンレス製1.2mm厚とした。Example 4 A double-sided copper-clad laminate of glass fiber woven base epoxy resin (ANSI grade FR-4 equivalent 0.0
6 mm thick, 18 μm thick copper foil) were prepared by printed wiring. A copper foil having a thickness of 18 μm is arranged on both sides of the core substrate via the prepreg of Example 1 to form a laminated structure, which is stacked in a range of 30 to 40 sets. In addition to the upper and lower sides of the stacked structure stacked between the press hot plates, a metal mirror plate 3 having a thickness of 1 mm or more is additionally arranged at a position where the stacked structure is divided into three. In the same manner as in Example 1, heat and pressure molding was performed and integrated to obtain a 0.3-mm thick 4-layer copper-clad laminate with an inner circuit. The metal mirror plate 2 having a thickness of 0.8 mm or less was made 0.4 mm thick made of aluminum, and the metal mirror plate 3 having a thickness of 1 mm or more was made 1.2 mm thick stainless steel.
【0014】比較例 実施例1において、プレス熱盤一段間に積み重ねた積層
構成体の上側と下側から1mm厚以上金属鏡面板3を省略
した構成とした。Comparative Example In the first embodiment, the metal mirror plate 3 having a thickness of 1 mm or more was omitted from the upper and lower sides of the laminated structure stacked between the press hot plates.
【0015】従来例 実施例1において、0.8mm厚以下金属鏡面板2を1mm
厚以上金属鏡面板3(ステンレス製1.2mm厚)に置き
換えた構成とし、これを10〜16組の範囲でプレス熱
盤一段間に積み重ねた。尚、プレス熱盤一段間に積み重
ねた積層構成体の上側と下側に配置した1mm厚以上金属
鏡面板3は1枚である。Conventional Example In the first embodiment, the metal mirror plate 2 having a thickness of 0.8 mm or less is 1 mm.
The metal mirror plate 3 (thickness: 1.2 mm, stainless steel) was replaced with a metal plate having a thickness of not less than 10 mm. It should be noted that there is one metal mirror plate 3 having a thickness of 1 mm or more disposed on the upper side and the lower side of the laminated structure stacked between the press hot plates.
【0016】上記各例で製造した内層回路入り4層銅張
り積層板の表面凹凸有無を目視で確認した結果を表1に
示す。比較例では、プレス熱盤に最も近い位置で成形さ
れた内層回路入り4層銅張り積層板のプレス熱盤側面
に、クッション材から転写された微細な凹凸があった。Table 1 shows the results of visually confirming the presence or absence of surface irregularities of the four-layer copper-clad laminate containing the inner layer circuit manufactured in each of the above examples. In the comparative example, fine irregularities transferred from the cushion material were present on the side surface of the press hot plate of the four-layer copper-clad laminate with the inner layer circuit formed at the position closest to the press hot plate.
【0017】[0017]
【表1】 [Table 1]
【0018】[0018]
【発明の効果】表1から明らかなように、本発明に係る
方法によれば、厚み0.8mm以下の薄い金属鏡面板を用
いつつ、殊更プリプレグ特性を変更することなく、クッ
ション材やコア基板のプリント配線に起因する凹凸の転
写がない内層回路入り多層金属箔張り積層板を製造する
ことことができる。As is clear from Table 1, according to the method according to the present invention, the cushioning material and the core substrate can be used without changing the prepreg characteristics, using a thin metal mirror plate having a thickness of 0.8 mm or less. It is possible to manufacture a multi-layer metal foil-clad laminate having an inner layer circuit without transfer of unevenness due to the printed wiring.
【図1】積層構成体をプレス熱盤間で加熱加圧成形する
本発明に係る発明の実施の形態を示す説明図である。FIG. 1 is an explanatory view showing an embodiment of the invention according to the present invention in which a laminated structure is heated and pressed between press hot plates.
【図2】積層構成体をプレス熱盤間で加熱加圧成形する
本発明に係る他の発明の実施の形態を示す説明図であ
る。FIG. 2 is an explanatory view showing another embodiment of the present invention in which a laminated structure is heated and pressed between press hot plates.
1は積層構成体 2は0.8mm厚以下金属鏡面板 3は1mm厚以上金属鏡面板 4はクッション材 1 is a laminated structure 2 is a metal mirror plate of 0.8 mm or less in thickness 3 is a metal mirror plate of 1 mm or more in thickness 4 is a cushion
Claims (2)
グと金属箔を内側から外側へこの順序で重ねた積層構成
体の複数組を積み重ねてプレス熱盤一段間に投入し、各
積層構成体を加熱加圧成形により一体化するに際し、 前記各積層構成体間には厚み0.8mm以下の金属鏡面板
を介在させ、プレス熱盤一段間に積み重ねた積層構成体
の上側と下側には厚み1mm以上の金属鏡面板を配置する
ことを特徴とする内層回路入り多層金属張り積層板の製
造法。1. A plurality of sets of a laminated structure in which a prepreg and a metal foil are laminated in this order from the inside to the outside on both sides of a core substrate on which a circuit is formed, are stacked and put into a press hot platen, and each laminated structure is placed. When integrating by heat and pressure molding, a metal mirror plate having a thickness of 0.8 mm or less is interposed between the respective laminated components, and the upper and lower sides of the laminated components stacked in one stage of the press hot platen are provided. A method for producing a multilayer metal-clad laminate having an inner circuit, wherein a metal mirror plate having a thickness of 1 mm or more is arranged.
て、積み重ねた積層構成体の所定組数毎の間に厚み1mm
以上の金属鏡面板を追加して配置することを特徴とする
請求項1記載の内層回路入り多層金属張り積層板の製造
法。2. In addition to the upper and lower sides of the stacked structure, a thickness of 1 mm is set between a predetermined number of sets of the stacked structure.
The method for producing a multilayer metal-clad laminate with an inner layer circuit according to claim 1, wherein the metal mirror plate is additionally arranged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP37258298A JP3428480B2 (en) | 1998-12-28 | 1998-12-28 | Manufacturing method of multi-layer metal foil-clad laminate with inner layer circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP37258298A JP3428480B2 (en) | 1998-12-28 | 1998-12-28 | Manufacturing method of multi-layer metal foil-clad laminate with inner layer circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000196238A true JP2000196238A (en) | 2000-07-14 |
JP3428480B2 JP3428480B2 (en) | 2003-07-22 |
Family
ID=18500695
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP37258298A Expired - Lifetime JP3428480B2 (en) | 1998-12-28 | 1998-12-28 | Manufacturing method of multi-layer metal foil-clad laminate with inner layer circuit |
Country Status (1)
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JP (1) | JP3428480B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005297071A (en) * | 2005-06-22 | 2005-10-27 | Meiki Co Ltd | Apparatus and method for laminate molding |
WO2006059428A1 (en) * | 2004-12-03 | 2006-06-08 | Sony Chemical & Information Device Corporation | Process for producing multilayer wiring board |
-
1998
- 1998-12-28 JP JP37258298A patent/JP3428480B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006059428A1 (en) * | 2004-12-03 | 2006-06-08 | Sony Chemical & Information Device Corporation | Process for producing multilayer wiring board |
US8112881B2 (en) | 2004-12-03 | 2012-02-14 | Tessera Interconnect Materials, Inc. | Method for manufacturing multilayer wiring board |
JP2005297071A (en) * | 2005-06-22 | 2005-10-27 | Meiki Co Ltd | Apparatus and method for laminate molding |
JP4577613B2 (en) * | 2005-06-22 | 2010-11-10 | 株式会社名機製作所 | Lamination molding apparatus and lamination molding method for laminating a buildup substrate |
Also Published As
Publication number | Publication date |
---|---|
JP3428480B2 (en) | 2003-07-22 |
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