JP2011204369A5 - - Google Patents

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Publication number
JP2011204369A5
JP2011204369A5 JP2010067920A JP2010067920A JP2011204369A5 JP 2011204369 A5 JP2011204369 A5 JP 2011204369A5 JP 2010067920 A JP2010067920 A JP 2010067920A JP 2010067920 A JP2010067920 A JP 2010067920A JP 2011204369 A5 JP2011204369 A5 JP 2011204369A5
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JP
Japan
Prior art keywords
relay
electrode
reverse
keeper
neutralizer
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JP2010067920A
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English (en)
Japanese (ja)
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JP5409470B2 (ja
JP2011204369A (ja
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Priority claimed from JP2010067920A external-priority patent/JP5409470B2/ja
Publication of JP2011204369A publication Critical patent/JP2011204369A/ja
Publication of JP2011204369A5 publication Critical patent/JP2011204369A5/ja
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JP2010067920A 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置 Active JP5409470B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010067920A JP5409470B2 (ja) 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010067920A JP5409470B2 (ja) 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置

Publications (3)

Publication Number Publication Date
JP2011204369A JP2011204369A (ja) 2011-10-13
JP2011204369A5 true JP2011204369A5 (enExample) 2013-05-09
JP5409470B2 JP5409470B2 (ja) 2014-02-05

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ID=44880838

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JP2010067920A Active JP5409470B2 (ja) 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置

Country Status (1)

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JP (1) JP5409470B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015088218A (ja) * 2011-12-28 2015-05-07 キヤノンアネルバ株式会社 イオンビーム処理装置及び中和器
US9064671B2 (en) * 2012-05-09 2015-06-23 Arcam Ab Method and apparatus for generating electron beams
CN112635287A (zh) * 2020-12-23 2021-04-09 长沙元戎科技有限责任公司 一种新型离子源等离子体中和器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2570772B2 (ja) * 1987-10-17 1997-01-16 日新電機株式会社 イオンビーム照射装置
JPH04351838A (ja) * 1991-05-28 1992-12-07 Hitachi Ltd イオンビーム装置の中性化器
JP3053505B2 (ja) * 1993-03-30 2000-06-19 三菱電機株式会社 ホローカソード
JP2003173757A (ja) * 2001-12-04 2003-06-20 Nissin Electric Co Ltd イオンビーム照射装置

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