JP5409470B2 - ニュートラライザ及びこれを備えたイオンビーム装置 - Google Patents

ニュートラライザ及びこれを備えたイオンビーム装置 Download PDF

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JP5409470B2
JP5409470B2 JP2010067920A JP2010067920A JP5409470B2 JP 5409470 B2 JP5409470 B2 JP 5409470B2 JP 2010067920 A JP2010067920 A JP 2010067920A JP 2010067920 A JP2010067920 A JP 2010067920A JP 5409470 B2 JP5409470 B2 JP 5409470B2
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electrode
relay
neutralizer
cathode
keeper
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JP2011204369A (ja
JP2011204369A5 (enExample
Inventor
勉 廣石
行人 中川
信二 高城
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Canon Anelva Corp
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Canon Anelva Corp
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  • Electron Sources, Ion Sources (AREA)
JP2010067920A 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置 Active JP5409470B2 (ja)

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JP2010067920A JP5409470B2 (ja) 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置

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JP2010067920A JP5409470B2 (ja) 2010-03-24 2010-03-24 ニュートラライザ及びこれを備えたイオンビーム装置

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JP2011204369A JP2011204369A (ja) 2011-10-13
JP2011204369A5 JP2011204369A5 (enExample) 2013-05-09
JP5409470B2 true JP5409470B2 (ja) 2014-02-05

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015088218A (ja) * 2011-12-28 2015-05-07 キヤノンアネルバ株式会社 イオンビーム処理装置及び中和器
US9064671B2 (en) * 2012-05-09 2015-06-23 Arcam Ab Method and apparatus for generating electron beams
CN112635287A (zh) * 2020-12-23 2021-04-09 长沙元戎科技有限责任公司 一种新型离子源等离子体中和器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2570772B2 (ja) * 1987-10-17 1997-01-16 日新電機株式会社 イオンビーム照射装置
JPH04351838A (ja) * 1991-05-28 1992-12-07 Hitachi Ltd イオンビーム装置の中性化器
JP3053505B2 (ja) * 1993-03-30 2000-06-19 三菱電機株式会社 ホローカソード
JP2003173757A (ja) * 2001-12-04 2003-06-20 Nissin Electric Co Ltd イオンビーム照射装置

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