JP2011173029A - Liquid substance discharge device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid discharge device capable of continuously discharging only a small quantity of a liquid substance at high speed even in the case of the liquid substance having high viscosity. <P>SOLUTION: The liquid substance discharge device 1 has a tubular container 6, a needle 31 and an actuator 10 as basic components. A casing 60 has an airtight structure to which air pressure is applied, the tubular containing 6 has a flow passage control valve 73, and a displacement expanding mechanism 11 is added to the actuator for reciprocating the needle. A linear guide mechanism 20 is arranged to be parallel to the reciprocation track of the needle, and a gauge sensor 33 is arranged in a needle part. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a mechanism for improving the coating speed of a liquid material ejecting apparatus for ejecting a liquid material. The present invention relates to a mechanism for replenishing a liquid tip reliably and accurately with the aid of pneumatic pressure when a needle is reciprocated at high speed. The present invention includes a method for using the liquid material discharge device.

  In recent years, devices that can eject liquid materials include color filter repair, circuit pattern drawing and repair, solder / adhesive coating, mask / thin film formation, LED phosphor coating, dispensing / spotter in the bio field, grease / oil filling, It is used in applications such as inker marking. The liquid material discharge device is generally called a dispenser, and there is a device that discharges a liquid material at high pressure from a fine hole at the tip of a nozzle. In addition, an apparatus that attaches a liquid material to the tip of the needle by another method and transfers the liquid material to the adherend is called a needle-type dispenser, and the importance of the device is attracting more and more attention.

  Among the above-mentioned apparatuses, in particular, in a needle-type dispenser, it is a concern to increase the productivity by increasing the speed of liquid discharge as the production time for liquid crystal panel manufacture and advanced electronic component manufacture is shortened.

  If the reciprocating time required for discharging the liquid material is long, it is necessary to increase the number of liquid material discharging devices used, leading to an increase in production cost.

  In addition to the demand for high speed, the needle in the liquid material discharge device does not bend during reciprocating movement, and it can be linearly reciprocated accurately and straight without any distortion, bending, or twisting. A certain amount of liquid material is attached to the tip of the needle properly and accurately and is transported to the adherend, and the accuracy, quality, etc. Expectations for improvement are increasing.

    Conventionally, it has been difficult to continuously discharge a high-viscosity liquid material by a constant amount. In a general dispenser, the coating liquid is pushed out by air pressure, and the amount and variation depend on the accuracy of air pressure control. It is difficult to accurately control the air pressure, and there are many fluctuations due to temperature changes. However, many high-viscosity liquid materials are also used at manufacturing sites, and various demands for coating these liquid materials are increasing.

Even with a needle-type dispenser, it is difficult to accurately replenish the tip of the needle with an appropriate amount because the liquid cannot follow the movement of the needle when the needle reciprocates at high speed. Patent Document 1 (FIG. 1) is shown as an example of a system for transferring a liquid material to an adherend with a needle, but in reality, when the needle slides in the liquid material as shown in FIG. Dragged by the needle. As a result, a gap is generated at the needle tip, and a liquid material is not replenished at the needle tip.
Japanese Patent Laid-Open No. 2001-46062

    The present invention has been made in view of such a problem, and an object of the present invention is to provide a liquid material discharge device capable of continuously executing a very small amount of liquid material even at a high speed even if it is a highly viscous liquid material.

  The liquid material ejection device according to the first aspect of the present invention is provided in the housing by maintaining the internal pressure by making the housing including at least the cylindrical container, the needle and the actuator of the liquid material ejection device into a sealed structure. The pressure of the air inserted through the air hole applies pressure to the liquid when the needle slides back and forth, and the liquid is reliably supplied to the tip of the needle and discharged to the adherend by being discharged by the needle. The In particular, as the reciprocating sliding speed of the needle increases, air enters from the lower end of the cylindrical container and a gap is generated. As a result, there is a phenomenon in which the amount of liquid remaining at the tip of the needle is reduced and the original dispenser function is reduced. In order to make up for this drawback, the casing including the operation part of the liquid material discharge device has a hermetically sealed structure, so that the supply amount of the liquid material to the tip can be secured and the coating satisfying both the quality and the amount can be performed.

    In the liquid material discharge device according to the second aspect of the present invention, the liquid material can be stably supplied to the tip of the needle with assistance by pneumatic pressure by disposing a flow path control valve in the cylindrical container holding the liquid material. It becomes possible. At the moment when the needle is stored in the cylindrical container, the micropores of the cylindrical container are prevented by the flow path control valve, thereby preventing air from entering.

The liquid material ejection device according to the third aspect of the present invention uses the displacement magnifying mechanism to guide the minute movement of the piezoelectric actuator to a larger operation. An example plan view of a piezoelectric actuator with a displacement magnifying mechanism is shown in FIG. For example, a piezoelectric actuator with a displacement enlarging mechanism as shown in Patent Document 2 has been adopted in the field of precision machinery, for example, an early printer, and has been used for other devices thereafter. Applying the piezoelectric actuator with a displacement magnifying mechanism to drive the needle of the liquid material discharge device results in a higher propulsion speed while ensuring a large reciprocation of the needle.
JP 2008-99399 A

    In the liquid material discharge device according to the fourth aspect of the present invention, the linear guide can be linearly reciprocated in a straight line more accurately without being bent, distorted, bent, twisted or the like by being guided left and right in one direction. This linear guide is used as a guide for the needle of the liquid material discharge device to ensure that the needle can reciprocate stably.

    Further, since the use of the linear guide restrains unnecessary movement of the needle, the needle can be easily replaced.

    In the liquid material ejection device according to the fifth aspect of the present invention, the strain gauge sensor detects and detects the elongation and twist of the plate material and bar material, and the sensor is applied to the needle portion of the liquid material ejection device. Thus, in the unlikely event that the needle is distorted, bent or twisted, it is possible to prevent the needle tip from being damaged and to prevent the object from being damaged by reciprocating motion to avoid collision with the object.

    In the liquid material ejection method according to the sixth aspect of the present invention, the output of the strain gauge sensor is amplified by an amplifier and fed back to the control device. By adopting a method that detects the change in the strain gauge sensor output that is caused when a large force is applied to the needle, such as when the needle sticks to the adherent, and stops the reciprocating movement of the needle, Helps prevent distortion, deflection, and twisting.

A liquid discharge method according to a seventh aspect of the present invention includes a pump for assisting pneumatic pressure, a syringe for storing liquid, a liquid level sensor for detecting the amount of liquid in a cylindrical container, and the pump And a liquid body discharge device comprising a control main body section for issuing a control command. In order to continuously drive the liquid material discharge device for a long time, it is necessary to always store a certain amount of liquid material in the cylindrical container without interruption. If the amount decreases, the amount of liquid in the cylindrical container can be stored in a constant amount by supplying from a syringe holding a large amount of liquid.

    In the liquid material discharge method according to the eighth aspect of the present invention, in order to drive the liquid material discharge device, a pump for feeding compressed air into the main body sealing structure, a drive control unit for reciprocating the needle, a pump, It consists of a control main body that issues a control command to the drive controller. After the operation of the drive control unit reaches the maximum value, it is possible to control the increase / decrease in the amount of liquid adhering to the needle tip by operating the pump at a certain timing when it starts to decrease and adding air pressure assistance I understand.

    According to the present invention, by adjusting the pressure inside the casing of the liquid material discharge device, the liquid material is stably supplied to the needle tip regardless of the viscosity. The liquid material is instantly transferred to the adherend by a needle driven by an actuator that can be driven at high speed. As a result, according to the present invention, it is possible to provide a liquid material ejecting apparatus capable of stably ejecting a liquid material in a wide viscosity range from a low viscosity to a high viscosity by a very small amount at a high speed.

  In the liquid container discharge apparatus comprising at least a cylindrical container for holding a discharged liquid substance, a needle disposed in the cylindrical container so as to be reciprocally movable, and an actuator for reciprocating the needle. The liquid material is ejected by the pressure of the air inserted from the air hole by the liquid material discharge device of the present invention comprising the housing for sealing the needle and the actuator inside, and the air hole provided in the housing. Enable.

    In the liquid material discharge device, by disposing a flow path control valve in the cylindrical container holding the liquid material, it is possible to prevent the tip of the reciprocating needle from having a gap.

    In the liquid material discharge device, the actuator and the displacement magnifying mechanism are configured, and the needle is reciprocated, whereby the needle can be steadily reciprocated.

  In the liquid material discharge device, a linear guide mechanism is disposed in parallel with the reciprocating locus of the needle, and the needle is reciprocated in parallel with the axial direction of the needle, thereby enabling a straight needle reciprocating motion.

  In the liquid material ejecting apparatus, a strain gauge sensor is disposed in the needle portion, and it is possible to detect at least one of distortion, bending, and twisting phenomenon of the needle.

  In the liquid material discharge device, the electric signal of the strain gauge sensor is amplified, and the output of the amplified amplifier is fed back to the control device that sends a command to the actuator with the displacement magnifying mechanism that drives the needle, and the needle is distorted. Detects the electrical signal that changes when at least one phenomenon of bending and twisting occurs, stops or zeros the command from the control device to the actuator with the displacement magnifying mechanism, and warps, warps, and twists the needle Enables a method to prevent at least one of the phenomena.

    A pump for assisting air pressure in the liquid material discharge device, a cylinder for storing the liquid material, a liquid level sensor for detecting the amount of the liquid material in the cylindrical container, and a control main body for issuing a control command to the pump, In the apparatus for continuously supplying the liquid material from the cylinder to the cylindrical container, the phenomenon of the liquid material is determined by comparing with a reference value when the output of the liquid level sensor changes, The liquid from the cylinder can be fed into the cylindrical container by the pressure from the pump.

    In a device comprising: a pump for assisting air pressure in a liquid material discharge device; a drive control unit for reciprocating a needle; and a control main body unit for issuing a control command to the pump and the drive control unit. By operating the pump when the voltage signal becomes smaller than the maximum value, it is possible to control the increase or decrease in the amount of liquid adhering to the needle tip.

    Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 4 to 5 are sectional views of the liquid material discharge apparatus according to an embodiment of the present invention. FIG. 4 shows a state in which the piezoelectric actuator is most contracted, that is, a state where the needle is most accommodated in the cylindrical container, and FIG. 5 shows a state in which the piezoelectric actuator is most extended, that is, the needle protrudes farthest from the cylindrical container. Indicates the state of transferring an object.

    4 and 5, the liquid material discharge device 1 includes a cylindrical container 6 that stores the liquid material 7. An application needle unit 30 is inserted into the cylindrical container 6, and the application needle unit 30 is fixed to the slider 22 of the linear guide 20 by a set screw 24. The slider 22 of the linear guide 20 is driven by the piezoelectric actuator 10 with an enlargement mechanism.

    The cylindrical container 6 can be easily attached and detached manually without using a special tool due to the structure 8 such as a double thread screw. The inside of the cylindrical container 6 has a tapered shape that gradually becomes thinner from the attachment portion toward the tip. If the inner shape is as described above, the outer shape is not a problem. With this structure, even if the application needle unit 30 is bent, it surely protrudes from the lower end hole. The inner diameter of the attachment portion is, for example, φ2 mm, and the inner diameter of the tip portion can be about φ0.2 mm.

    As a material of the cylindrical container 6, for example, a resin such as polypropylene, a metal such as glass or stainless steel can be used. Further, in order to control wettability, a surface treatment may be performed on the inner surface.

    The casing 60 of the liquid material discharge apparatus 1 has a sealed structure so that the internal pressure can be freely changed. Air of an appropriate pressure is sent from the pneumatic connector 50 so that the pressure inside the liquid material discharge device 1 can be adjusted. The signal line connector 53 is for airtight passage and does not change the internal pressure.

    In the liquid material discharge device 1 of the present invention, as the gas for applying pressure so that the liquid material can stably flow into the tip of the needle, a gas that does not easily cause a chemical reaction, such as a rare gas, is used in addition to air. May be.

    The piezoelectric actuator 10 with a displacement magnifying mechanism is an actuator that outputs a displacement that is enlarged by the displacement magnifying mechanism 11 using a piezoelectric element 12 that exhibits a larger displacement as a larger voltage is applied as a drive source.

    The displacement portion of the piezoelectric actuator with displacement magnifying mechanism 10 and the slider 22 are connected to the slider 22 of the linear guide 20 via a displacement-absorbing mechanism 2 such as a plate spring or a bar spring, for example. Even if the displacement direction of the actuator 10 and the operation direction of the slider 22 are slightly different, the displacement absorbing mechanism 2 can absorb the difference. When the piezoelectric actuator 10 with displacement magnifying mechanism expands and contracts, the slider 22 and the application needle unit 30 connected to the slider 22 reciprocate accordingly.

    When the application needle unit 30 is lowered by the piezoelectric actuator 10 with a displacement enlarging mechanism, the tip of the needle 31 jumps out from the lower end hole of the cylindrical container 6. The liquid material is transferred to the adherend by bringing the liquid, needle, or both attached to the tip of the protruding needle into contact with the adherend.

    The piezoelectric actuator with displacement magnifying mechanism 10 can be expanded and contracted with high accuracy and high speed, and realizes high-speed reciprocation of the needle, for example, 10 Hz or more.

    A flow path control valve 73 that can open and close the distal end hole is attached to the distal end of the cylindrical container 6. The flow path control valve 73 opens and closes the lower end hole of the cylindrical container 6 by the actuator 72. The opening / closing operation is linked with the operation of the application needle unit 30.

    The linear guide 20 is attached to hold the application needle unit 30 and to make the application needle unit 30 reciprocate linearly. The rail 21 of the linear guide 20 is fixed to the housing 60. The slider 22 is restrained from moving in a direction other than one direction (the vertical direction in the figure) with respect to the rail 21, thereby realizing that the application needle unit 30 reliably performs only the vertical movement (reciprocating movement).

    Furthermore, since operations other than the vertical direction are fixed by the slider 22, there is also an effect that the set screw 7 can be easily attached and detached when the application needle unit 30 is replaced.

    The needle 31 portion of the application needle unit 30 adheres a liquid substance and carries it to the adherend, and the outer shape may include a cylindrical shape, a tapered shape, or both shapes.

    The needle 31 of the application needle unit 30 is inserted and fixed to the housing 32. A strain gauge sensor 33 is affixed to the housing 32. When at least one phenomenon of distortion, deflection, or twist occurs in the application needle unit 30 or the needle 31, the output of the strain gauge sensor 33 changes.

    As the material of the needle 31, a metal such as resin, glass, or tungsten can be used. Further, in order to control the wettability, a surface treatment may be performed on the end surface or side surface of the needle 31 or both.

    A liquid level sensor 3 for detecting the height of the liquid level 5 of the liquid 7 is attached to the casing 60. In order to accurately detect the liquid level 5, a shielding plate 4 is provided which floats on the liquid level 5 and changes its height according to the height of the liquid level 5. The liquid level sensor 3 detects the height of the shielding plate 4 and is controlled so that the amount of the liquid material 7 is always within a certain range. However, if the liquid level sensor 3 can directly detect the height of the liquid level 5 and the evaporation of the liquid 7 is not a problem, the shielding plate 4 is not necessary. The liquid level sensor 3 only needs to be able to detect the distance to the object, and for example, a reflective photocoupler can be used.

    The inside of the cylindrical container 6 is connected to the syringe 40 through the flow path 9. The syringe 40 can hold a larger amount of liquid than the cylindrical container 6.

    The syringe 40 is connected to the housing 60 via a connecting portion 42, for example, in a double thread structure, and can be easily attached and detached manually.

    Compressed air is sent from the air hole 45, and the piston 44 is pushed by the pressure. By this action, the liquid material 7 is fed into the cylindrical container 6 through the flow path 9.

    Examples of the liquid material 7 discharged using the liquid material discharge apparatus 1 include an adhesive and a metal paste. The adhesive as the liquid material 7 is used, for example, to temporarily fix the electronic component to the substrate when the electronic component is mounted. This adhesive includes one that is cured by heat or light. The metal paste is a paste obtained by mixing fine particles such as copper and silver into a liquid. Further, the liquid material 7 is not limited to a liquid and may include a solid or the like as long as it has fluidity.

    The discharged liquid 7 has a viscosity within a range of 1 to 500,000 cP at a rotation speed of 1 rpm with respect to the viscosity measured by an E-type viscometer in an environment of an ambient temperature of 23 ° C. and a relative humidity of 50%. It may be a liquid material.

    FIG. 6 is a schematic configuration diagram of the liquid material discharge apparatus 1 including a control system. FIG. 7 is a block diagram including the control system of the liquid material discharge apparatus 1. The overall configuration will be described with reference to FIGS. 1 to 3, 6, and 7. A signal for operating the piezoelectric actuator 10 with the displacement magnifying mechanism is output from the control device 200, and after the output is amplified by the amplifier 104, the signal is sent to the piezoelectric actuator 10 with the displacement magnifying mechanism to reciprocate the application needle unit 30. A signal for operating the flow path control valve unit 70 is sent directly from the control device 200 to the flow path control valve unit 70 to open and close the valve. The output of the strain gauge sensor 33 that detects the strain of the needle or the like is amplified by the amplifier 109 and input to the control device 200. The output of the liquid level sensor is input to the control device 200 through the cable 108. The compressed air from the pump 105 is branched in two directions on the way, one of which is input to the housing 60 via the electromagnetic valve 102 and used as an auxiliary for pushing out the liquid material 7. The opening and sealing of the electromagnetic valve 102 is performed by a signal from the control device 200. The pressure is adjusted by the regulator 106. The other compressed air is input to the syringe 40 via the electromagnetic valve 103 and is used to supply the liquid material 7 from the syringe 40 to the cylindrical container 6. The opening and sealing of the electromagnetic valve 103 is performed by a signal from the control device 200. The pressure is adjusted by the regulator 107.

    FIG. 2 is a detailed view showing a problem of a gap generated when the application needle unit 30 expands and contracts at a high speed in the liquid discharge apparatus 1. When the application needle unit 30 is reduced from the extended state as shown in FIG. 2A, a gap 300 is generated as shown in FIG. 2B. This phenomenon becomes more prominent as the viscosity of the liquid material is higher and the operating speed of the application needle unit 30 is higher. When the gap is generated, the amount of the liquid material 7 adhering to the tip of the application needle unit 30 varies, and as a result, the transfer amount of the liquid material 7 to the adherend is varied.

    Therefore, by applying pressure from the upper end of the cylindrical container 6 as shown in FIG. 8A, the liquid 7 is pushed downward, and the liquid is supplied to the tip of the needle, so that the above problem is solved. . Further, as shown in FIG. 8B, when the application needle unit 30 is raised, the flow path control valve 73 can block the lower end hole of the cylindrical container 6 to prevent the generation of a void.

    The effect of controlling the pressure inside the liquid material discharge device 1 will be described with reference to FIGS. FIG. 8 shows the effect obtained by solving the void generated in the liquid 7 inside the cylindrical container 6 when the application needle unit 30 reciprocates at high speed. FIG. 9 is a graph showing the timing of each signal for carrying out the present invention.

    As shown in FIG. 8A, when the application needle unit 30 is contracted, compressed air is sent to the housing 60, and the liquid material 7 is pushed by the pressure to move the liquid material 7 to the tip of the application needle unit 30. To do. As shown in FIG. 9A, in accordance with the change of the applied voltage signal 400 to the piezoelectric actuator 10 with the magnifying mechanism, the electromagnetic valve 102 only for the time 403 after the time 402 when the application needle unit 30 starts to rise from the re-lowering point. Is opened and the liquid 7 is pushed out to the tip of the application needle unit 30 by sending compressed air to the housing 60. After time 403, the electromagnetic valve 102 is sealed, and air pressure assistance to the housing 60 is stopped. The greater the time 403 or the greater the pressure of the compressed air, the greater the amount of liquid 7 flowing into the tip of the application needle unit 30 and consequently the greater the amount transferred to the adherend. Time 402 and time 403 depend on the properties of the liquid 7, the shape and properties of the cylindrical container 6, and the cross-sectional area of the application needle unit 30.

    On the other hand, FIG. 8B shows a method for preventing the generation of voids in the cylindrical container 6 by controlling the flow path control valve 73. As shown in FIG. 9B, the flow path control valve 73 is opened when the application needle unit 30 starts to descend and time 405 is reached, and the lower end hole of the cylindrical container 6 is opened. The flow path control valve 73 is sealed at the moment when the tip of the application needle unit 30 starts to rise after the application needle unit 30 jumps out of the lower end hole and reaches the lower end hole of the cylindrical container 6. Thereby, entry of air into the cylindrical container 6 can be prevented.

    Next, in the liquid material discharge device 1 of the present invention, a method of detecting the distortion, bending, and twisting phenomenon of the needle 31 by using the output of the strain gauge sensor 33 to prevent the needle 31 and the adherend from being damaged. Will be described with reference to the flowcharts shown in FIGS. In the present embodiment, a case where the output of the strain gauge sensor 33 is set to increase when a phenomenon such as distortion, flexure, or twist occurs in the needle 31 will be described.

    First, in step P1, the output of the strain gauge sensor 33 amplified by the sensor amplifier 109 is read from the strain detector 202. The timing for reading the output of the strain gauge sensor 33 may be during the reciprocating motion of the needle, when it is stopped, or both.

    Next, the reference value is read (step P2). It is assumed that the reference value is stored in the storage unit 201b of the control device 200 and can be read at any time. The reference value can be changed depending on the condition of the needle 31 and the like.

    Next, the output of the strain gauge sensor 33 is compared with the reference value in the control main body 201 (step P3). When the sensor output is larger than the reference value, it means that the needle 31 is distorted, bent, or twisted, and the application needle unit 30 needs to be stopped. In this case, the process proceeds to Step P4. When the sensor output is smaller than the reference value, the needle 31 is normal without any distortion, bending, or twisting phenomenon. In this case, the process from step P1 is repeated without performing the process.

    In step P4, a command for reducing the displacement of the actuator 10 with the displacement enlarging mechanism is sent through the drive control unit 203. Or it is good also as operation | movement which stops a displacement as it is. Thereafter, the process returns to Step P1.

    Next, in order to keep the amount of the liquid substance 7 in the cylindrical container 6 in the liquid container discharge apparatus 1 of the present invention in an almost constant amount, the liquid substance 7 is automatically supplied from the syringe 40 when the amount decreases. Will be described with reference to the flowcharts shown in FIGS. In the present embodiment, a case will be described in which the output of the liquid level sensor 3 is set to decrease when the amount of the liquid material 7 decreases.

    First, in step S1, the output of the liquid level sensor 3 is read. The timing of reading the output of the liquid level sensor 3 may be during the reciprocating motion of the needle, when it is stopped, or both.

    The reference value is read (step S2). It is assumed that the reference value is stored in the memory of the control device and can be read at any time. This reference value is a value that determines the amount of the liquid 7 to be stored in the cylindrical container 6 and can be freely changed.

    Next, the liquid level sensor output and the reference value are compared in the control device (step 3). When the sensor output is smaller than the reference value, it means that the amount of the liquid substance 7 in the cylindrical container 6 is reduced, and the liquid substance 7 needs to be supplied from the syringe 40 to the cylindrical container 6. In this case, the process proceeds to step S4. When the sensor output is not smaller than the reference value, there is sufficient liquid 7 in the cylindrical container 6, and therefore supply of the liquid 7 is not necessary. In this case, the process from step S1 is repeated without performing the process.

    In step S4, the electromagnetic valve 103 is opened, the compressed air from the pump 105 is sent to the syringe 40, the liquid 7 in the syringe 40 is pushed out and supplied to the cylindrical container 6.

    In step S5, a waiting time is provided for a predetermined opening time of the solenoid valve 103 and the opening is continued. The amount of the liquid material 7 sent from the syringe 40 to the cylindrical container 6 is determined by the waiting time and the air pressure set by the air pressure regulator 107. For example, when a solenoid valve is opened for 20 ms at an air pressure of 0.1 MPa, 0.001 cc of liquid material can be supplied. After the waiting time, the electromagnetic valve is sealed in step S6, and the supply of the liquid material 7 from the syringe 40 to the cylindrical container 6 is stopped. Thereafter, the process returns to step S1 and is repeated.

    In the above-described embodiment, a series of processing flow is shown continuously, but there is no limit to the timing and number of times of performing this repeated processing, and it is desirable to perform it when the load on the control device 200 is small.

    As described above, according to the liquid material discharge apparatus 1 according to the present embodiment, the liquid material can be discharged at high speed regardless of the viscosity of the liquid material 7, and the liquid material can be continuously supplied. Therefore, stable coating can be realized over a long period of time.

    In the liquid material discharge device 1 of the present invention, the syringe 40 for storing the liquid material, the liquid material conveyance path 9, the cylindrical container 6 and the like may be added with devices capable of cooling, keeping warm, and heating.

    By making the internal pressure of the sealed structure negative, unnecessary sagging of the liquid material 7 from the cylindrical container 6 can be controlled.

    Next, with reference to FIG. 12 thru | or FIG. 13, the specific usage example of the liquid discharge apparatus 1 is demonstrated. 12 to 13 are perspective views for explaining specific examples of use of the liquid material discharge device 1.

    FIG. 12 shows an operation of applying the liquid material 7 to the substrate 502. The liquid material 7 is applied onto the substrate 502 by using the liquid material discharge device 1 at a predetermined interval or at an arbitrary position. As means for moving the relative positions of the substrate 502 and the liquid material discharge device 1, only the substrate 502 may be moved, or only the liquid material discharge device 1 may be moved, and both the substrate 502 and the liquid material discharge device 1 may be moved. It may be moved.

    FIG. 13 shows an operation of applying the liquid material 7 to each part. For example, electronic parts 503 arranged on a table 505 such as a belt conveyor are sequentially sent, and the liquid material 7 is applied to the electronic parts 503 at one place.

This is a conventional example in which a needle reciprocates in a cylindrical container. FIG. 4 is a detailed view showing a phenomenon to be improved by the present invention, that is, a state in which a gap is generated at the needle tip and a liquid material is not replenished at the needle tip. It is an example of an actuator with a displacement magnifying mechanism. It is sectional drawing of one Example of this invention in the state in which the needle was most accommodated in the cylindrical container. It is sectional drawing of one Example of this invention in the state which the needle protruded most from the cylindrical container. It is a schematic block diagram of the liquid discharge apparatus including the control system of this invention. It is a block diagram including the control system of the liquid discharge apparatus of this invention. It is detail drawing by which a liquid substance is stably supplied to the application needle tip by this invention. FIG. 6 is a signal timing chart for realizing the function shown in FIG. 5. It is a follow chart which concerns on one Example of this invention. It is a follow chart concerning one example of the present invention. It is a perspective view for demonstrating an example of the manufacturing method of the electronic device using the liquid discharge apparatus concerning one Example of this invention. FIG. 4 is a perspective view for explaining an example of a manufacturing method of an electronic device using a liquid material discharge device according to another embodiment of the present invention shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Liquid substance discharge apparatus 3 Liquid level sensor 4 Shielding plate 5 Liquid level 6 Cylindrical container 7 Liquid substance 10 Piezoelectric actuator with an expansion mechanism 11 Displacement expansion mechanism 12 Piezoelectric element 14 To-be-adhered object 20 Linear guide 30 Coating needle unit 31 Needle 33 Strain Gauge sensor 40 Syringe 45 Air hole 50 Pneumatic connector 60 Housing
70 Flow Control Valve Unit 73 Flow Control Valve 102 Solenoid Valve 103 Solenoid Valve 104 Amplifier 105 Pump 106 Regulator 107 Pneumatic Regulator 109 Sensor Amplifier 200 Control Device 201 Control Main Body 201a Main Control Unit 201b Storage Unit 201c Determination Unit 202 Strain Detection Unit 203 Drive control unit 204 Drive control unit 205 Electromagnetic valve control unit 206 Liquid level detection unit 207 Electromagnetic valve control unit 208 Communication unit 209 External trigger 300 Air gap 400 Voltage signal 401 Electromagnetic valve drive pulse 402 Time 403 Time 404 Flow path valve drive pulse 405 hours 406 hours 503 electronic components 505 table

Claims (8)

  In the liquid container discharge apparatus comprising at least a cylindrical container for holding a discharged liquid substance, a needle disposed in the cylindrical container so as to be reciprocally movable, and an actuator for reciprocating the needle. A liquid material discharge comprising: a housing for sealing the needle and the actuator inside; and an air hole provided in the housing, wherein the liquid material is pushed out by pressure of air inserted through the air hole. apparatus.     2. The liquid material discharge device according to claim 1, wherein a liquid material without a gap is supplied to a tip of a reciprocating needle by disposing a flow path control valve in the cylindrical container holding the liquid material. .     The liquid material discharge device according to claim 1, wherein the liquid material discharge device is configured by the actuator and a displacement magnifying mechanism, and the needle is reciprocated.   The liquid material discharge device according to any one of claims 1 to 3, wherein a linear guide mechanism is disposed in parallel with the reciprocating locus of the needle, and the needle is reciprocated in parallel with the axial direction of the needle.   The strain gauge sensor according to any one of claims 1 to 4, wherein a strain gauge sensor is disposed in the needle portion to detect at least one of a strain, a flexure, and a twist phenomenon of the needle. Any one liquid material discharge device.   6. The liquid material discharge apparatus according to claim 1, wherein an electric signal of the strain gauge sensor is amplified and a command is sent to the actuator with the displacement magnifying mechanism that drives the needle with the output of the amplified amplifier. Return to the device, detect the electrical signal that changes when at least one phenomenon of distortion, flexure or twist occurs in the needle, and stop or zero the command from the control device to the actuator with displacement magnifying mechanism And preventing at least one of the needle distortion, deflection, and twisting phenomenon.     Liquid discharge comprising a pump for assisting air pressure, a syringe for storing liquid, a liquid level sensor for detecting the amount of liquid in the cylindrical container, and a control main body for issuing a control command to the pump. When the output of the liquid level sensor changes, the apparatus determines a phenomenon of the liquid substance by comparing with a reference value, and the liquid substance in the syringe is removed by the pressure from the pump. A method of discharging liquid material that can be fed into the inside. An apparatus comprising: a pump for assisting air pressure in a liquid discharge device; a drive control unit for reciprocating a needle; and a control main body unit for issuing a control command to the pump and the drive control unit,
A method for ejecting a liquid material, wherein the pump is operated when a voltage signal to the drive control unit becomes smaller than a maximum value, whereby increase / decrease in the amount of liquid adhering to the needle tip can be controlled.