CN106714982B - Coating method and coating apparatus - Google Patents
Coating method and coating apparatus Download PDFInfo
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- CN106714982B CN106714982B CN201580050338.0A CN201580050338A CN106714982B CN 106714982 B CN106714982 B CN 106714982B CN 201580050338 A CN201580050338 A CN 201580050338A CN 106714982 B CN106714982 B CN 106714982B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/28—Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers
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- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The ink coating method is used for forming a multi-layer ink layer (22a) by executing a plurality of steps of attaching ink (22) to a front end part (24a) of a coating needle (24), arranging the coating needle (24) at a preset position above a target area (35a) of a substrate (35), and lowering and raising the coating needle (24) to coat the ink (22) on the target area (35a), thereby forming the ink layer (22a), wherein, as the number of the executed steps is increased, the distance of the lowering of the coating needle (24) from the preset position to the target area (35a) is reduced. Therefore, when ink is applied, the impact applied to the target region (35a) from the tip of the application needle (24) via the ink layer (22a) can be alleviated.
Description
Technical Field
The present invention relates to a coating method and a coating apparatus, and more particularly to a coating method and a coating apparatus for coating a liquid material on an object.
Background
In the past, since a technique of applying a liquid material such as ink using an application needle having a tip diameter of several tens of μm, a technique of processing a pattern using a laser having a spot diameter of several μm to several tens of μm, and a technique of precisely positioning on a micrometer scale have been combined, the above-mentioned techniques have been used for a correction operation of a flat panel display, a scribing operation of a solar cell, and the like (for example, see japanese patent laid-open No. 2007 and 268354 (patent document 1), japanese patent laid-open No. 2009 and 122259 (patent document 2), and japanese patent laid-open No. 2012 and 006077 (patent document 3)).
In particular, the technique using a coating needle enables coating even with high viscosity ink which is not good at a dispenser, and therefore, has recently been used for forming a thick film of 10 μm or more which is thicker than a pattern of a flat panel display. This technique can be used for forming an electronic circuit pattern or printed wiring of a semiconductor device such as a MEMS (Micro Electro Mechanical Systems) or a sensor. In addition, patterns produced by future promising manufacturing technologies, namely printed electronics, are also classified as thick films. Therefore, a technique of coating a liquid material with a coating needle is a processing technique expected to expand future applications.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open No. 2007-268354
Patent document 2: japanese patent laid-open No. 2009-122259
Patent document 3: japanese patent laid-open No. 2012-006077
Disclosure of Invention
Technical problem to be solved by the invention
As a method of forming a thick ink film on the surface of a mechanism portion provided in the MEMS, for example, a method of laminating a plurality of ink layers by repeatedly applying a high-viscosity ink using a coating needle is conceivable. However, in this coating method, each time ink is applied, an impact is applied to the mechanism portion of the MEMS from the tip of the coating needle, and the mechanism portion of the MEMS may be damaged.
Accordingly, a main object of the present invention is to provide a coating method and a coating apparatus capable of coating a high-viscosity liquid material thickly without damaging an object.
Technical scheme for solving technical problem
The coating method of the present invention is a method for forming a liquid material layer composed of a liquid material by performing a step of attaching the liquid material to a tip portion of a coating needle a plurality of times, disposing the coating needle at a predetermined position above an object, and lowering and raising the coating needle to coat the liquid material on the object, thereby forming a plurality of liquid material layers, wherein a distance of lowering the coating needle from the predetermined position toward the object is decreased as the number of times of performing the step is increased.
Preferably, the distance for lowering the coating needle in the present step is smaller than the distance for lowering the coating needle in the previous step by the thickness of the liquid material layer formed in the previous step.
Preferably, the method comprises: a container having a hole opened at a bottom thereof and into which a liquid-like material is injected; and an application needle having a tip portion with substantially the same diameter as the hole, the application needle being lowered, the tip portion of the application needle being caused to protrude from the hole to adhere the liquid material to the tip portion, and the application needle being disposed at a predetermined position.
Further, the coating apparatus of the present invention includes: an application unit that attaches the liquid material to a tip portion of the application needle; a positioning device that moves the coating unit and the object relative to each other and disposes the tip of the coating needle at a predetermined position above the object; a first driving device that lowers and raises the coating needle; and a control device that controls the coating unit and the first drive device, and that performs a step of coating the liquid material on the object a plurality of times to form a liquid material layer made of the liquid material, thereby stacking a plurality of liquid material layers. The control device controls the first driving device to reduce the distance of the coating needle descending from the preset position to the object along with the increase of the number of the executed processes.
Preferably, the control device reduces the distance by which the coating needle is lowered in the current process by the thickness of the liquid material layer formed in the previous process, from the distance by which the coating needle is lowered in the previous process.
Preferably, the coating unit includes: a container having a hole opened at a bottom thereof and into which a liquid-like material is injected; an application needle having a tip end portion having substantially the same diameter as the hole; and a second driving device for lowering and raising the coating needle, wherein the control device controls the second driving device to lower the coating needle and to project the tip portion of the coating needle from the hole to adhere the liquid material to the tip portion.
Effects of the invention
In the coating method and the coating apparatus of the present invention, since the distance of lowering the coating needle is reduced as the number of coating steps to be performed increases, the impact applied to the object from the tip of the coating needle via the liquid material layer can be alleviated. Therefore, the high-viscosity liquid material can be applied thickly without damaging the object.
Drawings
Fig. 1 is a diagram showing an overall configuration of an ink application apparatus used in an ink application method according to an embodiment of the present invention.
Fig. 2 is a sectional view showing a structure of a coating unit included in the coating mechanism section shown in fig. 1.
Fig. 3 is a sectional view showing the structure of the container and the coating needle shown in fig. 2.
Fig. 4 is a sectional view illustrating a coating process using the ink coating apparatus shown in fig. 1 to 3.
Fig. 5 is a view showing a method of forming a thick film by performing the coating process shown in fig. 4a plurality of times.
Detailed Description
Fig. 1 is a diagram showing the overall configuration of an ink application apparatus 1 used in an ink application method according to an embodiment of the present invention. In fig. 1, an ink application apparatus 1 includes: an observation optical system 2, the observation optical system 2 observing the surface of the substrate; a display 3, the display 3 reflecting an observed image; a cutting laser unit 4 for irradiating the substrate with laser light via the observation optical system 2 to cut the unnecessary portion by the cutting laser unit 4; an application mechanism unit 5 for applying ink to a target region of a substrate by attaching the ink to a tip portion of an application needle by the application mechanism unit 5; a substrate heating unit 6 that heats the ink applied to the target area by the substrate heating unit 6; an image processing unit 7, the image processing unit 7 recognizing the target region; a main control computer 8, wherein the main control computer 8 controls the whole device; and a control computer 9, wherein the control computer 9 controls the operation of the device mechanism. Further, in addition to this, the ink application apparatus 1 is provided with: an XY stage 10 that moves the substrate having the target region in XY directions (horizontal directions); a chuck unit 11, the chuck unit 11 holding a substrate on the XY stage 10; and a Z stage 12 and the like, the Z stage 12 moving the observation optical system 2 and the coating mechanism section 5 in the Z direction (vertical direction).
The XY stage 10 is used to relatively move the substrate to an appropriate position when the ink is applied to a target area by the application mechanism section 5 or when the surface of the substrate is observed by the observation optical system 2. The XY stage 10 shown in fig. 1 has a structure in which two one-axis stages are overlapped in the vertical direction. However, the XY stage 10 is not limited to the configuration of the XY stage 10 shown in fig. 1 as long as the substrate can be moved relative to the observation optical system 2 or the coating mechanism section 5. In the case where the substrate size is large, a gantry-type (japanese: ガントリー -type) XY stage that can move independently in the X-axis direction and the Y-axis direction, respectively, may also be used.
Fig. 2(a) is a sectional view showing the structure of the coating unit 20 included in the coating mechanism section 5 shown in fig. 1. In fig. 2(a), the coating unit 20 includes: a tank 21 having a first hole 21a opened at a bottom of the tank 21, and into which ink 22 is supplied from the tank 21; a lid 23, the lid 23 being opened with a second hole 23a, and the lid 23 sealing the container 21; and a coating needle 24, the coating needle 24 having substantially the same diameter as the first hole 21a and the second hole 23 a. The distal end portion of the application needle 24 penetrates the second hole 23a and is immersed in the ink 22.
Fig. 3 is an enlarged view of a part of the applicator needle 24 and the container 21, and is a view showing a dimensional relationship between the first hole 21a opened in the bottom of the container 21, the second hole 23a opened in the lid 23, and the applicator needle 24. Assuming that the diameter of the first hole 21a is Dd, the diameter of the second hole 23a is Du, and the diameter of the coating needle 24 is D, Dd and Du are larger than D, and have a relationship Dd > Du > D. In addition, the above relational expression is established when the coating needle 24 is of a straight type, not of a stepped type.
Further, when Δ D is a half of the difference between the diameter Dd of the first hole 21a and the diameter D of the application needle 24 (one-side clearance) and Δ u is a half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 24 (one-side clearance), Δ D > Δ u is satisfied, and the clearance between the first hole 21a opened in the bottom of the container 21 and the application needle 24 is set to be larger than the clearance between the second hole 23a opened in the cover 23 and the application needle 24. Therefore, the posture of the container 21 can be held by the second hole 23a and the application needle 24, and even in a state where the application needle 24 is in contact with the inner surface of the second hole 23a, since the application needle 24 is not in contact with the inner surface of the first hole 21a, deformation due to abrasion of the first hole 21a can be suppressed. Therefore, the amount of the ink 22 adhering to the distal end portion 24a of the application needle 24 does not change, and stable application can be achieved.
Returning to fig. 2, the proximal end portion of the application needle 24 is fixedly supported by the application needle fixing plate 25. The applicator fixing plate 25 is fixed to the sliding portion 26b of the linear guide member 26, and the rail portion 26a of the linear guide member 26 is fixed to the support base 29. The linear guide member 26 has a rolling guide structure in which rolling elements (balls or the like) are interposed between the rail portion 26a and the slide portion 26b, and the rail portion 26a and the slide portion 26b constitute a linear guide that can linearly move freely with an extremely small force. In order to improve the coating accuracy, a light pre-pressure may be applied.
An air cylinder 30 is provided on the support base 29, and an output shaft 30a of the air cylinder 30 faces upward. A drive plate 31 is fixed horizontally to the front end of the output shaft 30a of the cylinder 30, and the drive plate 31 is fixed to a pin 31a at the front end and moves up and down integrally with the output shaft 30 a. As shown in fig. 2(B), the pin 31a approaches the coating needle fixing plate 25 from below the notch 25a provided in the coating needle fixing plate 25, and the pin 31a has a function of moving the coating needle fixing plate 25 up and down by the vertical movement of the output shaft 30a of the air cylinder 30.
The container 21 is made of a resin such as a polypropylene resin, a fluororesin, or a polyacetal resin, and a protrusion 21b is provided on a side portion of the container 21. The pin 32 of the magnetic body is fixed to the protrusion 21b so as to protrude upward from the protrusion 21 b. The container 21 can be made by injection moulding, in which case the pin 32 can also be integrally formed during injection moulding.
A magnet 33 is fixed to the lower end surface of the support base 29 to which the linear guide 26 is fixed. The upper end surface of the pin 32 fixed to the container 21 is attracted to the lower end surface of the magnet 33, whereby the container 21 is supported on the support base 29 in a single-point suspended state, and the application needle 24 is inserted through the second hole 23a opened in the cover 23, so that the gap Δ u is small, and the container 21 is held at a predetermined position. Further, by setting the clearance Δ d between the first hole 21a opened in the bottom of the container 21 and the application needle 24 sufficiently larger than Δ u, the application needle 24 can be moved up and down without contacting the first hole 21 a. For example, Δ d is set to 200 μm and Δ u is set to 100 μm.
When the application needle 24 is inserted into the second hole 23a opened in the lid 23 of the container 21, the posture of the container 21 is restrained to some extent by the application needle 24 and the second hole 23a, and the posture of the container 21 is determined so as to maintain the posture thereof.
Since the first hole 21a opened at the bottom of the container 21 is not in contact with the application needle 24, the generation of waste can be prevented, and the waste can be suppressed from entering the ink 22. Further, since the container 21 is supported on one surface only by the attraction force of the magnet 33 and the pin 32 fixed to the container 21, the application needle 24 is less affected by the application needle 24 because the container 21 is adjusted in the fixing method even if the application needle 24 comes into contact with the second hole 23 a. The faces of the pins 32 in contact with the magnets 33 are substantially flat and they have a diameter of approximately around 3 mm. The contact surface between the pin 32 and the magnet 33 is set so that a reference line connecting the center of the first hole 21a and the center of the second hole 23a substantially coincides with the center line of the application needle 24.
Fig. 4(a) - (D) are diagrams illustrating a process of applying the ink 22 to the target region 35a on the surface of the substrate 35 using the ink applying apparatus 1 illustrated in fig. 1-3. The coating mechanism section 5 includes a sub Z stage 34, and the sub Z stage 34 lowers and raises the coating unit 20 in the Z-axis direction (vertical direction, longitudinal direction of the coating needle 24). The sub Z table 34 has a drive shaft 34a extending and contracting in the Z axis direction, and a front end portion of the drive shaft 34a is fixed to an upper end portion of the support table 29. The sub Z stage 34 has a coordinate in the Z axis direction, and has a function of moving the drive shaft 34a from an arbitrary first coordinate to an arbitrary second coordinate at a desired speed. First, as shown in fig. 4(a), the coating unit 20 and the substrate 35 are moved relative to each other by using the XY stage 10 and the Z stage 12, and the tip of the coating needle 24 is arranged above the target region 35a of the substrate 35.
Next, as shown in fig. 4B, the output shaft 30a of the air cylinder 30 is moved downward (in the drawing, in a direction in which the output shaft 30a is pulled), and the drive plate 31 that moves integrally with the output shaft 30a is moved downward. The pin 31a fixed to the tip of the drive plate 31 approaches the notch 25a provided in the applicator pin fixing plate 25 from below, and the applicator pin fixing plate 25 moves downward along the linear guide member 26 by the lowering of the drive plate 31. In conjunction with this, the application needle 24 also moves downward so that the tip end portion 24a of the application needle 24 protrudes from the first hole 21a opened in the bottom of the container 21. In this state, the ink 22 is attached to the tip end portion 24a of the application needle 24, and the application is possible. At this time, the tip of the application needle 24 is disposed directly above the target region 35a, and the distance between the tip of the application needle 24 and the surface of the target region 35a is set to a predetermined distance. That is, the tip of the application needle 24 is arranged at a predetermined position above the target region 35 a.
Thereafter, as shown in fig. 4(C), the entire application unit 20 is lowered at a predetermined speed using the sub Z stage 34, and the tip of the application needle 24 to which the ink 22 is attached is brought into contact with the target region 35a of the substrate 35. Thereby, the ink 22 applied to the needle tip 24a is applied to the target region 35a to form the ink layer 22 a.
Further, even if the application unit 20 continues to be lowered after the tip of the application needle 24 comes into contact with the target region 35a, the slide portion 26b is retracted upward along the rail portion 26a, and therefore an excessive load is not applied to the tip of the application needle 24. Therefore, the load applied to the substrate 35 during coating is a combined weight of the sliding portion 26b, the coating needle fixing plate 25, and the coating needle 24, and is, for example, a light load of about 10 g.
After the tip of the application needle 24 is brought into contact with the target region 35a for a certain period of time, as shown in fig. 4(D), the output shaft 30a of the air cylinder 30 is moved upward (in the drawing, in the direction in which the output shaft 30a protrudes) to return the tip 24a of the application needle 24 to the state of being immersed in the ink 22 in the tank 21, and the drive shaft 34a of the sub Z stage 34 is moved upward to move the entire application unit 20 upward, thereby completing one application operation.
In addition, although the sub Z stage 34 is used to lower the coating unit 20, the Z stage 12 provided with the observation optical system 2 may be used to lower the coating unit 20.
In the case where a thick film is formed by stacking a plurality of ink layers 22a by using the coating apparatus 1, if the coating steps shown in fig. 4(a) to (D) are simply repeated, an impact is applied to the target region 35a (for example, a mechanism portion of the MEMS) from the tip of the coating needle 24 via the ink layer 22a every time the ink layer 22a is coated, and the target region 35a may be damaged by the impact.
Therefore, in the ink application method of the present embodiment, the distance (the amount of decrease) d by which the application needle 24 is lowered from the predetermined position shown in fig. 4B toward the target region 35a is reduced according to the number of times of the application process performed, and the impact applied to the target region 35a from the tip of the application needle 24 via the ink layer 22a can be alleviated.
Fig. 4(B) shows a state in which the tip end portion 24a of the application needle 24 protrudes from the first hole 21a opened in the bottom of the container 21, the ink 22 adheres to the tip end portion 24a, and the tip end of the application needle 24 is disposed at a predetermined position above the surface of the target region 35 a. Fig. 5(a) shows the tip end portion 24a of the application needle 24 to which the ink 22 is attached in fig. 4 (B). At this time, the coordinate of the sub Z-stage 34 in the Z-axis direction is corrected to 0. The positive direction of the coordinates of the sub Z table 34 is set to the direction in which the coating needle 24 is lowered.
The distance d0 between the tip of the coating needle 24 and the surface of the target area 35a in this state is a known value measured in advance and stored in the host computer 8. The distance between the tip of the coating needle 24 and the surface of the substrate 35 is adjusted by using the observation optical system 2 or the like, and the distance d0 is obtained from the Z-axis coordinate of the sub Z-stage 34 when the tip of the coating needle 24 is substantially in contact with the surface of the substrate 35, and is stored in the host computer 8. Further, since there is a variation in the length of the application needle 24 or the thickness of the substrate 35, the distance d0 can be corrected appropriately.
In the first coating step, as shown in fig. 4(C), the sub Z stage 34 is controlled to lower the tip of the coating needle 24 to which the ink 22 is attached by the first distance d1, and to wait for a certain period of time. In this case, as shown in fig. 5(B), the ink layer 22a is formed between the tip of the application needle 24 and the surface of the target region 35 a. If the film thickness of the ink layer 22a of the first layer is α 1, d1 is d0- α 1.α 1 is a known value obtained by an experiment in advance, and is stored in the main control computer 8. In this coating step, since the tip of the coating needle 24 does not directly collide with the target region 35a, the impact applied to the target region 35a from the tip of the coating needle 24 via the ink layer 22a can be minimized.
In the second coating step, as shown in fig. 4(C), the sub Z stage 34 is controlled to lower the tip of the coating needle 24 to which the ink 22 is attached by a second distance d2 smaller than the first distance d1, and to stand by for a certain period of time. In this case, as shown in fig. 5(C), two ink layers 22a are laminated between the tip of the application needle 24 and the surface of the target region 35 a. When the film thickness of the ink layer 22a of the second layer is α 2, d2 ═ d0- α 1- α 2 ═ d 1- α 2.α 2 is a known value obtained by an experiment in advance, and is stored in the main control computer 8. In this second coating step, the amount d2 of lowering the coating needle 24 is made smaller than the amount d1 of lowering in the first coating step by the film thickness α 2 of the ink layer 22a of the second layer, so that the impact applied to the target region 35a from the tip of the coating needle 24 via the ink layer 22a can be minimized.
In the third coating step, as shown in fig. 4(C), the sub Z stage 34 is controlled to lower the tip of the coating needle 24 to which the ink 22 is attached by a third distance d3 smaller than the second distance d2, and to stand by for a certain period of time. In this case, as shown in fig. 5(D), three ink layers 22a are stacked between the tip of the application needle 24 and the surface of the target region 35 a. If the film thickness of the ink layer 22a in the third layer is α 3, d3 ═ d0- α 1- α 2- α 3 ═ d 2- α 3.α 3 is a known value obtained by an experiment in advance, and is stored in the main control computer 8. In the third coating step, the amount of decrease d3 of the coating needle 24 is made smaller than the amount of decrease d2 in the second coating step by the film thickness α 3 of the ink layer 22a in the third layer, so that the impact applied to the target region 35a from the tip of the coating needle 24 via the ink layer 22a can be minimized.
As described above, in the present embodiment, since the amount d of lowering of the application needle 24 is reduced as the number of times of the application steps is increased, it is possible to alleviate the impact applied to the target region 35a from the tip of the application needle 24 via the ink layer 22a when applying the ink. Therefore, the high-viscosity ink 22 can be applied thick without damaging the target region 35a of the substrate 35 (for example, a mechanism portion of the MEMS).
It is to be understood that the embodiments disclosed herein are illustrative of all points and are not limiting. The scope of the present invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.
(symbol description)
1 Pattern correction device
2 Observation optical system
3 display
4 laser part for cutting
5 coating mechanism part
6 substrate heating part
7 image processing part
8 main control computer
9 computer for control
10 XY stage
11 chuck part
12Z platform
20 coating unit
21 container
21a first hole
22 ink
23 cover
23a second hole
24 coating needle
24a front end portion
25 coating needle fixing plate
25a notch part
26 linear motion guide member
26a track part
26b sliding part
27. 28 stop
29 supporting table
30 cylinder
30a output shaft
31 drive plate
31a, 32 pins
33 magnet
35 base plate
35a object region.
Claims (6)
1. A coating method for forming a liquid material layer composed of a liquid material by performing a step of depositing the liquid material on a tip portion of a coating needle a plurality of times, disposing the coating needle at a predetermined position above an object, and lowering and raising the coating needle to coat the liquid material on the object, thereby forming the liquid material layer, characterized in that the liquid material layer is laminated in a plurality of layers,
decreasing a distance by which the application needle descends from the predetermined position toward the object as the number of the processes performed increases,
the distance for lowering the coating needle in the current step is shorter than the distance for lowering the coating needle in the previous step.
2. The coating method according to claim 1,
the distance by which the coating needle is lowered in the present step is reduced by an amount corresponding to the thickness of the liquid material layer formed in the previous step, as compared to the distance by which the coating needle is lowered in the previous step.
3. The coating method according to claim 1 or 2, comprising:
a container having a hole opened at a bottom thereof and into which the liquid-like material is injected; and
the coating needle, the front end portion of which has substantially the same diameter as the hole,
the coating method includes lowering the coating needle, protruding a tip portion of the coating needle from the hole, attaching the liquid material to the tip portion, and disposing the coating needle at the predetermined position.
4. A coating apparatus is characterized by comprising:
an application unit that attaches the liquid material to a tip portion of the application needle;
a positioning device that moves the coating unit and an object relative to each other and disposes a tip of the coating needle at a predetermined position above the object;
a first driving device that lowers and raises the coating needle; and
a control device that controls the application unit and the first drive device to perform a step of applying the liquid material to the object a plurality of times to form a liquid material layer made of the liquid material, thereby stacking a plurality of the liquid material layers,
the control device controls the first driving device to decrease a distance by which the application needle descends from the predetermined position toward the object as the number of times of the processes performed increases,
the control device reduces a distance by which the coating needle is lowered in the current process as compared with a distance by which the coating needle is lowered in the previous process.
5. A coating apparatus as in claim 4,
the control device may decrease a distance by which the coating needle is lowered in the current step by an amount corresponding to a thickness of the liquid material layer formed in the previous step, as compared with a distance by which the coating needle is lowered in the previous step.
6. A coating apparatus as in claim 4 or 5,
the coating unit includes:
a container having a hole opened at a bottom thereof and into which the liquid-like material is injected;
the coating needle, the front end of the coating needle has approximately the same diameter as the hole; and
a second driving device that descends and ascends the coating needle,
the control device controls the second driving device to lower the coating needle, and causes a tip portion of the coating needle to protrude from the hole to attach the liquid material to the tip portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-192530 | 2014-09-22 | ||
| JP2014192530A JP6404654B2 (en) | 2014-09-22 | 2014-09-22 | Coating method and coating apparatus |
| PCT/JP2015/075293 WO2016047423A1 (en) | 2014-09-22 | 2015-09-07 | Application method and application device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106714982A CN106714982A (en) | 2017-05-24 |
| CN106714982B true CN106714982B (en) | 2021-05-25 |
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| CN201580050338.0A Active CN106714982B (en) | 2014-09-22 | 2015-09-07 | Coating method and coating apparatus |
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|---|---|
| JP (1) | JP6404654B2 (en) |
| CN (1) | CN106714982B (en) |
| WO (1) | WO2016047423A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2019051489A (en) * | 2017-09-15 | 2019-04-04 | Ntn株式会社 | Liquid material application method, liquid material application mechanism, and liquid material application device |
| US20200263119A1 (en) * | 2017-11-02 | 2020-08-20 | Osaka University | Cell chip and three-dimensional tissue chip, and method for producing same |
| JP7142841B2 (en) * | 2018-06-08 | 2022-09-28 | 国立大学法人大阪大学 | METHOD FOR MANUFACTURING CELL CHIP AND CELL TISSUE CHIP |
| JP7024970B2 (en) * | 2018-06-08 | 2022-02-24 | 国立大学法人大阪大学 | Coating unit and fine coating equipment |
| WO2019235513A1 (en) * | 2018-06-08 | 2019-12-12 | 国立大学法人大阪大学 | Coating unit, microcoating device, and method for producing cell chips and cell tissue chips |
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| JP3663448B2 (en) * | 1999-12-07 | 2005-06-22 | 株式会社ヒラノテクシード | Coating equipment using capillary action |
| JP2008192901A (en) * | 2007-02-06 | 2008-08-21 | Ntn Corp | Pattern-modifying apparatus and coating unit used therefor |
| JP2010062385A (en) * | 2008-09-04 | 2010-03-18 | Ntn Corp | Flux application apparatus and flux application method |
| JP2012101175A (en) * | 2010-11-10 | 2012-05-31 | Ntn Corp | Coater mechanism, coating method, and coating apparatus |
| JP2015205226A (en) * | 2014-04-17 | 2015-11-19 | 芝浦メカトロニクス株式会社 | Coating applicator, manufacturing method for adhesive-coated workpiece, manufacturing apparatus for display device component, and manufacturing method for display device component |
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2014
- 2014-09-22 JP JP2014192530A patent/JP6404654B2/en active Active
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2015
- 2015-09-07 CN CN201580050338.0A patent/CN106714982B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101047090A (en) * | 2006-03-30 | 2007-10-03 | Ntn株式会社 | Image correction device and coating unit thereof |
| JP2011173029A (en) * | 2008-08-13 | 2011-09-08 | Applied Micro Systems Inc | Liquid substance discharge device and method |
| CN101846884A (en) * | 2009-03-26 | 2010-09-29 | 东丽工程株式会社 | Coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016059909A (en) | 2016-04-25 |
| JP6404654B2 (en) | 2018-10-10 |
| WO2016047423A1 (en) | 2016-03-31 |
| CN106714982A (en) | 2017-05-24 |
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