JP4548030B2 - Liquid dispensing device - Google Patents

Liquid dispensing device Download PDF

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JP4548030B2
JP4548030B2 JP2004221050A JP2004221050A JP4548030B2 JP 4548030 B2 JP4548030 B2 JP 4548030B2 JP 2004221050 A JP2004221050 A JP 2004221050A JP 2004221050 A JP2004221050 A JP 2004221050A JP 4548030 B2 JP4548030 B2 JP 4548030B2
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liquid
passage
discharge
piston
storage chamber
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JP2006035149A (en
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晃平 長谷川
佳宏 中田
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L24/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/741Apparatus for manufacturing means for bonding, e.g. connectors
    • H01L2224/743Apparatus for manufacturing layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06Polymers
    • H01L2924/078Adhesive characteristics other than chemical
    • H01L2924/07802Adhesive characteristics other than chemical not being an ohmic electrical conductor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Die Bonding (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fixed amount of liquid ejecting apparatus which can eject fixed amount of liquid with good accuracy and can prevent liquid sagging and stringiness. <P>SOLUTION: The fixed amount of liquid ejecting apparatus is provided with a housing chamber 11 for housing liquid, an extrusion piston 15 for extruding liquid housed in the housing chamber to an exhaust port by every predetermined volume, a 1st passage 21 having an ejection nozzle 26 for ejecting the liquid at one end and an opening 25 at a flank, a 2nd passage 19 which connects the opening of the 1st passage with the exhaust port of the housing chamber, an ejection piston 22 which reciprocates in the 1st passage with freely sliding to open/close the opening 25 and to eject whole amount of the liquid in the 1st passage 21 from the ejection nozzle 26 and an ultrasonic wave application means 23 which applies ultrasonic vibration to the ejection nozzle 26 to heighten discreteness of the liquid from the ejection nozzle. Since the ejection piston 22 plays a role of a valve for preventing spillover of the liquid in the housing chamber 11, whole amount of the liquid in the 1st passage 21 can be ejected with accuracy without being influenced by residual amount and viscosity change of the liquid in the housing chamber 11. <P>COPYRIGHT: (C)2006,JPO&amp;NCIPI

Description

本発明は導電ペースト、接着剤、半田ペーストなどの粘性のある液体を定量ずつ間欠的に吐出するのに適した液体定量吐出装置に関するものである。 The present invention relates to a liquid dispensing apparatus suitable for dispensing a viscous liquid such as a conductive paste, an adhesive, and a solder paste intermittently in a constant amount.

従来、電子部品などの表面に、液状樹脂や接着剤などの液体を所定量正確に吐出させる装置として、特許文献1に記載のような定量吐出装置が知られている。
この定量吐出装置は、図3に示すように、シリンジ52に液体50を充填し、ピストン54を押すことによりシリンジ52内の液体50を所定量吐出するように構成されている。ピストン54は、例えばステッピングモータ56とボールネジ58により駆動される。液体50の必要供給量に対応したステップ数だけステッピングモータ56を回転させることにより、ピストン54が図中下方へ移動され、液体50が吐出ノズル53の先端から吐出される。
特開平5−34184号公報
2. Description of the Related Art Conventionally, a quantitative discharge device as described in Patent Document 1 is known as a device that accurately discharges a predetermined amount of liquid such as liquid resin or adhesive onto the surface of an electronic component or the like.
As shown in FIG. 3, the fixed volume discharge device is configured to discharge a predetermined amount of the liquid 50 in the syringe 52 by filling the syringe 52 with the liquid 50 and pushing the piston 54. The piston 54 is driven by a stepping motor 56 and a ball screw 58, for example. By rotating the stepping motor 56 by the number of steps corresponding to the required supply amount of the liquid 50, the piston 54 is moved downward in the figure, and the liquid 50 is discharged from the tip of the discharge nozzle 53.
Japanese Patent Laid-Open No. 5-34184

このような定量吐出装置の場合、ピストン54によって一定量の液体を押し出しても、様々な条件の影響を受け、実際に塗布される液体の量は一定にならない。つまり、液体の粘度、表面張力などによって吐出ノズル53に液体が残留するため、実際に被塗布物に塗布される量はピストン54によって押し出された量のうち、吐出ノズル53に残留する部分を差し引いた量となる。この吐出ノズル53に残留した部分は一定せず、塗布ばらつきが発生する。また、シリンジ52内に存在する液体の残圧のため、ピストン54が停止しても液体の流出が続き、液体の流出が終了するまである程度の時間が必要である。それ故、ピストン54が停止した直後に吐出ノズル53を引き上げると、実際の塗布量は狙いとする塗布量より少なくなり、引き上げたノズル53から液垂れや糸曳き現象を生じるという不具合が発生する。 In the case of such a quantitative discharge device, even if a fixed amount of liquid is pushed out by the piston 54, the amount of liquid actually applied is not constant due to the influence of various conditions. That is, since the liquid remains in the discharge nozzle 53 due to the viscosity, surface tension, etc. of the liquid, the amount actually applied to the object to be coated is subtracted from the amount pushed out by the piston 54 that remains in the discharge nozzle 53. Amount. The portion remaining in the discharge nozzle 53 is not constant, and application variation occurs. Further, due to the residual pressure of the liquid existing in the syringe 52, the liquid continues to flow out even when the piston 54 is stopped, and a certain amount of time is required until the liquid outflow is completed. Therefore, if the discharge nozzle 53 is lifted immediately after the piston 54 is stopped, the actual application amount becomes smaller than the target application amount, and a problem of dripping or stringing occurs from the raised nozzle 53 occurs.

また、別の定量吐出装置として、特許文献2には電子回路基板上の定められた位置に接着剤を塗布する装置が提案されている。この装置は、図4に示すように吐出ノズル60の近傍に超音波振動子61を取り付け、超音波振動子61から放射される超音波振動により、接着剤62の粘度を低下させながら基板64に塗布することにより、糸曳きによる塗布ばらつきを解消するものである。
特開平5−220433号公報
Further, as another quantitative discharge device, Patent Document 2 proposes a device for applying an adhesive at a predetermined position on an electronic circuit board. In this apparatus, an ultrasonic vibrator 61 is attached in the vicinity of the discharge nozzle 60 as shown in FIG. 4, and the ultrasonic wave emitted from the ultrasonic vibrator 61 is applied to the substrate 64 while reducing the viscosity of the adhesive 62. By applying, application variation due to stringing is eliminated.
JP-A-5-220433

接着剤62の粘度を低下させながら塗布することにより、糸曳き性は低減するが、接着剤62を収容した容器63と吐出ノズル60とを結ぶ通路が常に開いているため、接着剤62の粘度変化や容器63内の接着剤残量の影響を受け、吐出量が大きくばらつくという問題がある。また、超音波振動が吐出ノズル60だけでなく容器63にも伝播するため、容器63内の接着剤の粘度も低下し、吐出精度悪化の原因となる。そのため、定量性を保証することができない。 By applying the adhesive 62 while reducing the viscosity of the adhesive 62, the stringing property is reduced. However, since the passage connecting the container 63 containing the adhesive 62 and the discharge nozzle 60 is always open, the viscosity of the adhesive 62 is reduced. There is a problem that the discharge amount greatly varies under the influence of the change and the remaining amount of adhesive in the container 63. Further, since the ultrasonic vibration propagates not only to the discharge nozzle 60 but also to the container 63, the viscosity of the adhesive in the container 63 is also reduced, which causes deterioration of the discharge accuracy. As a result, quantitativeness cannot be guaranteed.

そこで、本発明の目的は、液体を一定量精度よく吐出でき、かつ液垂れや糸曳きを防止できる液体定量吐出装置を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid dispensing apparatus that can discharge liquid with a certain amount of accuracy and can prevent dripping and stringing.

上記目的を達成するため、本発明は、液体を収容し、上記液体の排出口を備える収容室と、上記収容室内を摺動自在に往復移動し、上記収容室に収容された液体を排出口から所定量ずつ押し出す押出ピストンと、一端に液体を吐出する吐出ノズルを有し、側面に開口部を有する第1の通路と、上記第1の通路の開口部と上記収容室の排出口とを接続する第2の通路と、上記第1の通路内を摺動自在に往復移動し、後退位置で上記開口部を開き、前進位置で上記開口部を閉じるとともに、第1の通路内の液体の全量を吐出ノズルから吐出させる吐出ピストンと、上記吐出ピストンを往復駆動させる駆動手段と、上記吐出ノズルからの液体の分離性を高める超音波振動を吐出ノズルに印加する超音波印加手段と、を備えたことを特徴とする液体定量吐出装置を提供する。 In order to achieve the above object, the present invention includes a storage chamber for storing a liquid and having a discharge port for the liquid , and a reciprocating slidable movement in the storage chamber to discharge the liquid stored in the storage chamber. An extrusion piston that extrudes a predetermined amount at a time, a discharge nozzle that discharges liquid at one end, a first passage having an opening on a side surface, an opening of the first passage, and a discharge port of the storage chamber The second passage to be connected and the inside of the first passage are slidably reciprocated, the opening is opened at the retracted position, the opening is closed at the advanced position, and the liquid in the first passage is closed. A discharge piston that discharges the entire amount from the discharge nozzle; a drive unit that drives the discharge piston to reciprocate; and an ultrasonic application unit that applies ultrasonic vibration to the discharge nozzle to improve the separation of the liquid from the discharge nozzle. Liquid characteristics characterized by To provide a discharge device.

本発明では、まず吐出ピストンを後退させた状態で、押出ピストンによって収容室から所定量ずつ液体を押し出す。押し出された液体は、第2の通路を通って第1の通路の開口部から第1の通路へ流れ込む。次に、吐出ピストンを前進させると、開口部は吐出ピストンで閉じられ、第1の通路へ流れ込んだ液体は第2の通路から分離されるとともに、吐出ノズルから強制的に吐出される。つまり、吐出ピストンが収容室内の液体の流出を防止する弁の役割を果たすので、収容室内の液体の残量や粘度変化の影響を受けることなく、第1の通路内の液体の全量を正確に吐出ノズルから吐出できる。
また、第1の通路内の液体は吐出ピストンによって全量吐出されるが、吐出ノズルの先端面や側面に液体が残留したり、液垂れや糸曳きが発生する可能性がある。しかし、吐出ノズルに対し超音波振動を印加する超音波印加手段が設けられているので、吐出ノズルから液体が分離し易くなり、液体の残留を防止できるとともに、液垂れや糸曳きの発生も防止できる。
超音波振動は吐出ノズルだけでなく、第2の通路や収容室にも伝播する可能性がある。その場合でも、第1の通路の開口部を吐出ピストンが閉じているので、第2の通路から第1の通路への液体の流出を防ぎ、吐出精度を低下させることがない。
以上のことから、液体を一定量精度よく吐出でき、かつ液垂れや糸曳きを防止できる。
In the present invention, first, with the discharge piston retracted, the liquid is pushed out from the storage chamber by a predetermined amount by the push-out piston . The extruded liquid flows through the second passage from the opening of the first passage into the first passage. Next, when the discharge piston is advanced, the opening is closed by the discharge piston, and the liquid flowing into the first passage is separated from the second passage and forcibly discharged from the discharge nozzle. In other words, since the discharge piston serves as a valve that prevents the liquid from flowing out of the storage chamber, the total amount of the liquid in the first passage can be accurately measured without being affected by the remaining amount of the liquid in the storage chamber or a change in viscosity. Can be discharged from the discharge nozzle.
Further, the entire amount of the liquid in the first passage is discharged by the discharge piston, but there is a possibility that the liquid may remain on the front end surface or the side surface of the discharge nozzle, or dripping or stringing may occur. However, since an ultrasonic application means for applying ultrasonic vibration to the discharge nozzle is provided, it is easy to separate the liquid from the discharge nozzle, and it is possible to prevent the liquid from remaining and also prevent the occurrence of dripping and stringing. it can.
The ultrasonic vibration may propagate not only to the discharge nozzle but also to the second passage and the storage chamber. Even in that case, since the discharge piston closes the opening of the first passage, the liquid is prevented from flowing out from the second passage to the first passage, and the discharge accuracy is not lowered.
From the above, liquid can be ejected with a certain amount of accuracy, and dripping and stringing can be prevented.

第2の通路を構成する部材と第1の通路を構成する部材との間に、超音波印加手段が発生する超音波振動が収容室に伝播するのを抑制する弾性体よりなる振動抑制手段を設けてもよいし、第2の通路を構成する部材は、超音波印加手段が発生する超音波振動が収容室に伝播するのを抑制する軟質材料で形成されていてもよい。
上記のように第1の通路の開口部を吐出ピストンが閉じているので、超音波振動が収容室に伝播しても、第1の通路に液体が流れ込むことはないが、収容室内の液体の粘度が変化し、押出手段によって収容室の液体を第1の通路へ押し出す際に、その流入量に影響を及ぼす可能性がある。
この問題は、第2の通路に超音波振動の伝播を抑制する振動抑制手段を設けることで解消できる。
振動抑制手段としては、例えば第1の通路を構成する部材と第2の通路を構成する部材との間にOリングなどの弾性手段を介在させることで構成できる。Oリングは超音波振動の方向に対し垂直な方向に配置するのが有効である。また、第2の通路を構成する部材を樹脂材料のような軟質材料で形成することで、超音波振動の伝播を抑制することもできる。
Vibration suppression means comprising an elastic body that suppresses propagation of ultrasonic vibration generated by the ultrasonic wave application means to the accommodating chamber between the member constituting the second passage and the member constituting the first passage. The member constituting the second passage may be formed of a soft material that suppresses propagation of ultrasonic vibration generated by the ultrasonic wave application means to the storage chamber.
As described above, since the discharge piston closes the opening of the first passage, the liquid does not flow into the first passage even if the ultrasonic vibration propagates to the storage chamber. When the viscosity changes and the liquid in the storage chamber is pushed out to the first passage by the pushing means, there is a possibility that the inflow amount is affected.
This problem can be solved by providing vibration suppression means for suppressing propagation of ultrasonic vibration in the second passage.
The vibration suppressing means can be configured, for example, by interposing an elastic means such as an O-ring between a member constituting the first passage and a member constituting the second passage. It is effective to arrange the O-ring in a direction perpendicular to the direction of ultrasonic vibration. In addition, the propagation of ultrasonic vibration can be suppressed by forming the member constituting the second passage with a soft material such as a resin material.

液体を貯留する液体貯留容器を設け、この液体貯留容器の液体に所定の加圧力を与えて押し出す加圧手段を設け、加圧手段によって液体貯留容器から押し出された液体を収容室に導く第3の通路を設け、押出ピストンが1ステップ前進する毎に収容室内の液体を所定量ずつ排出口から押し出すように、押出ピストンの移動量を制御可能な駆動手段を設け、第3の通路の途中に、収容室に液体貯留容器から液体が補充されるときのみ開かれる開閉手段を設けるのがよい。
収容室の上流に液体貯留容器を設け、この液体貯留容器と収容室とを第3の通路を介して接続することで、収容室の液体が空になった時、液体貯留容器から補充することが可能になり、多数回の液体吐出を連続的に行うことが可能になる。また、収容室に多量の液体を貯留する必要がないので、液体の圧縮性や残量の影響が少ない容積に制限することもできる。例えば、収容室の容積を1回の吐出量の数倍〜数百倍程度に設定すれば、液体の圧縮性や残量の影響を少なくできる。液体貯留容器と収容室とを結ぶ第3の通路には開閉手段が設けられているので、押出ピストンを作動させる際、液体が液体貯留容器側へ逆流することがなく、かつ収容室の圧力が液体貯留容器の液体残量や液圧の影響を受けない。
押出ピストンを前進させる際、吐出ピストンを後退位置としておくことで、収容室内の液体は抵抗なく第2の通路を介して第1の通路へ流れ込む。第1の通路へ流れ込む液体の量は押出ピストンの1回の前進量によって決定されるので、押出ピストンの1回の前進量を高精度に制御することで、1回の吐出量を正確に設定できる。
A liquid storage container for storing the liquid is provided, and a pressurizing means for applying and pushing a predetermined pressure to the liquid in the liquid storage container is provided, and the liquid pushed out of the liquid storage container by the pressurizing means is guided to the storage chamber. the passageway is provided, the extrusion piston to push through the discharge port by a predetermined amount of liquid accommodating chamber each time advances one step, the controllable drive means the amount of movement of the extrusion piston is provided, in the middle of the third passageway The storage chamber may be provided with opening / closing means that is opened only when the liquid is replenished from the liquid storage container.
By providing a liquid storage container upstream of the storage chamber and connecting the liquid storage container and the storage chamber via the third passage, when the liquid in the storage chamber becomes empty, the liquid storage container is replenished. This makes it possible to continuously perform liquid discharge a large number of times. In addition, since it is not necessary to store a large amount of liquid in the storage chamber, the volume can be limited to a volume that is less affected by the compressibility of the liquid and the remaining amount. For example, if the volume of the storage chamber is set to several times to several hundred times the discharge amount at one time, the influence of the liquid compressibility and the remaining amount can be reduced. Since the third passage connecting the liquid storage container and the storage chamber is provided with an opening / closing means, when operating the extrusion piston, the liquid does not flow back to the liquid storage container side, and the pressure in the storage chamber is reduced. It is not affected by the amount of liquid remaining or the liquid pressure in the liquid storage container.
When the push-out piston is advanced, the discharge piston is set in the retracted position, so that the liquid in the storage chamber flows into the first passage through the second passage without resistance. Since the amount of liquid flowing into the first passage is determined by the amount of one advancement of the extrusion piston, the amount of one discharge can be accurately set by controlling the amount of one advancement of the extrusion piston with high accuracy. it can.

吐出ピストンおよび押出ピストンを往復駆動させる駆動手段としては、電動モータとボールネジとの組み合わせ、流体圧シリンダ、ボイスコイルモータなど種々の直動型アクチュエータを用いることができる。
この中で、押出ピストンを駆動する駆動手段としては、ボイスコイルモータを用いるのが望ましい。押出ピストンの制御には、その位置制御だけでなく、速度制御や推力制御も同時に実施するのが望ましいが、このような制御をボイルコイルモータであれば容易に実施できるからである。
As a driving means for reciprocatingly driving the discharge piston and the extrusion piston, various direct acting actuators such as a combination of an electric motor and a ball screw, a fluid pressure cylinder, and a voice coil motor can be used.
Of these, it is desirable to use a voice coil motor as the driving means for driving the extrusion piston. For the control of the push-out piston, it is desirable to perform not only the position control but also the speed control and the thrust control at the same time, because such a control can be easily performed with a boil coil motor.

以上のように、本発明によれば、吐出ピストンを前進させることで、開口部を閉じ、第1の通路へ流れ込んだ液体を第2の通路から分離するため、収容室内の液体の残量や液体の粘度変化などの影響を受けることなく、第1の通路内の液体だけが吐出ノズルから吐出される。しかも、吐出ピストンのストロークによって第1の通路の液体の全量が吐出されるので、常に一定量の吐出精度を維持できる。
また、吐出ノズルに対し超音波振動を印加する超音波印加手段が設けられているので、吐出ノズルからの液体の分離性を高め、吐出ノズルへの液体の残留を防止できるとともに、液垂れや糸曳きの発生も防止できる。
さらに、超音波振動が収容室に伝播しても、第1の通路と第2の通路との間を吐出ピストンが閉じているので、収容室からの液体の流出を防ぎ、吐出精度を低下させることがない。
As described above, according to the present invention, by moving the discharge piston forward, the opening is closed and the liquid flowing into the first passage is separated from the second passage. Only the liquid in the first passage is discharged from the discharge nozzle without being affected by the change in the viscosity of the liquid. In addition, since the entire amount of the liquid in the first passage is discharged by the stroke of the discharge piston, it is possible to always maintain a certain amount of discharge accuracy.
In addition, since ultrasonic application means for applying ultrasonic vibration to the discharge nozzle is provided, it is possible to improve the separation of the liquid from the discharge nozzle, prevent the liquid from remaining in the discharge nozzle, Generation of whispering can also be prevented.
Further, even if ultrasonic vibration propagates to the storage chamber, the discharge piston is closed between the first passage and the second passage, so that liquid outflow from the storage chamber is prevented and discharge accuracy is reduced. There is nothing.

以下に、本発明の実施の形態を、実施例を参照して説明する。 Embodiments of the present invention will be described below with reference to examples.

図1は本発明にかかる液体定量吐出装置の一例を示す。
この定量吐出装置は、貯留部Aと計量部Bと吐出部Cとで構成され、ロボットの可動部などに取り付けられている。ロボットをX,Y,Z方向に操作して後述する吐出ノズル26を塗布対象物Wの直上へ移動させることができる。
FIG. 1 shows an example of a liquid dispensing apparatus according to the present invention.
This fixed quantity discharge device is composed of a storage part A, a metering part B, and a discharge part C, and is attached to a movable part of a robot. By operating the robot in the X, Y, and Z directions, a discharge nozzle 26 (to be described later) can be moved directly above the application target W.

貯留部Aは、液体Lを貯留するシリンジと呼ばれる液体貯留容器1と、液体Lを押し出すピストン2と、エアーシリンダなどの加圧手段3とを備えている。加圧手段3は、ピストン2に対して押し出し方向への一定圧力を加え、液体貯留容器1から液体Lを一定圧力で押し出すものである。液体貯留容器1の出口部4は第3通路5を介して計量部Bに接続されている。 The storage part A includes a liquid storage container 1 called a syringe that stores the liquid L, a piston 2 that pushes out the liquid L, and a pressurizing means 3 such as an air cylinder. The pressurizing means 3 applies a constant pressure in the pushing direction to the piston 2 to push out the liquid L from the liquid storage container 1 at a constant pressure. The outlet part 4 of the liquid storage container 1 is connected to the measuring part B via the third passage 5.

計量部Bを構成する計量部本体10には、上下方向に管状の計量室(収容室)11が設けられ、この計量室11に対して横方向から第3通路5が接続されている。計量室11と通路5との接続部が流入口12であり、計量室11の下端部が排出口13となっている。流入口12は押出ピストン15の下死点より下方に設けるのがよい。計量室11は1回の吐出量の数倍〜数百倍程度の容積を有するよう、その断面積が後述する第1通路21より大きく設定されている。第3通路5の途中には、計量室11に貯留部Aから液体Lが補充されるときのみ開かれる開閉バルブ14が設けられている。この実施例の開閉バルブ14は回転式バルブであるが、開位置と閉位置の2位置に切替可能なバルブであれば、軸方向に移動して通路を開閉するスプールバルブや、その他のバルブでもよい。 The measuring unit main body 10 constituting the measuring unit B is provided with a tubular measuring chamber (accommodating chamber) 11 in the vertical direction, and the third passage 5 is connected to the measuring chamber 11 from the lateral direction. A connecting portion between the measuring chamber 11 and the passage 5 is an inflow port 12, and a lower end portion of the measuring chamber 11 is an outlet 13. The inlet 12 is preferably provided below the bottom dead center of the extrusion piston 15. The cross-sectional area of the measuring chamber 11 is set to be larger than that of the first passage 21 to be described later so that the measuring chamber 11 has a volume that is several times to several hundred times as large as one discharge amount. In the middle of the third passage 5, there is provided an opening / closing valve 14 that is opened only when the liquid L is replenished from the reservoir A to the measuring chamber 11. The on-off valve 14 of this embodiment is a rotary valve. However, as long as the valve can be switched between the open position and the closed position, a spool valve that moves in the axial direction to open and close the passage and other valves can be used. Good.

計量室11には押出ピストン15が上下方向に摺動自在に挿入されており、押出ピストン15の頭部は作動アーム16を介して駆動装置17に連結されている。この実施例では、駆動装置17として、押出ピストン15の移動量を正確に制御でき、かつ押出ピストン15の移動速度も自在に制御できるボイスコイルモータが用いられる。押出ピストン15の1回分の移動量が液体Lの1回の吐出量を決定する。押出ピストン15の移動量は、ボイスコイルモータ16に取り付けられたリニアエンコーダなどの変位センサによって検出され、フィードバックされる。計量室11の排出口13は、連結部材18に設けられた第2通路19を介して吐出部Cに接続されている。押出ピストン15が降下するに従い、計量室11内の液体は排出口13から第2通路19へと押し出される。連結部材18としては、後述する吐出ヘッド20からの超音波振動の伝播を抑制するため、フッ素樹脂などの樹脂材料を用いてもよい。 An extrusion piston 15 is inserted into the measuring chamber 11 so as to be slidable in the vertical direction. The head of the extrusion piston 15 is connected to a drive device 17 via an operating arm 16. In this embodiment, a voice coil motor that can accurately control the movement amount of the extrusion piston 15 and can freely control the movement speed of the extrusion piston 15 is used as the driving device 17. The amount of movement of the extrusion piston 15 for one time determines the single discharge amount of the liquid L. The amount of movement of the extrusion piston 15 is detected and fed back by a displacement sensor such as a linear encoder attached to the voice coil motor 16. The discharge port 13 of the measuring chamber 11 is connected to the discharge part C via a second passage 19 provided in the connecting member 18. As the extrusion piston 15 descends, the liquid in the measuring chamber 11 is pushed out from the discharge port 13 to the second passage 19. As the connecting member 18, a resin material such as a fluororesin may be used in order to suppress the propagation of ultrasonic vibration from an ejection head 20 described later.

吐出部Cは、連結部材18の支持穴18aに上下方向に摺動自在に支持された吐出ヘッド20と、吐出ヘッド20の中心部に上下方向に貫通形成された第1通路21と、第1通路21に摺動自在に挿入された吐出ピストン22と、吐出ヘッド20の上端部に固定されたドーナツ型の超音波振動子23と、吐出ピストン22を上下にストロークさせる駆動装置24とで構成されている。吐出ピストン22の上端部は超音波振動子23の中を貫通して駆動装置24と連結されている。駆動装置24としては、電動モータとボールネジとの組み合わせ、流体圧シリンダ、ボイスコイルモータなど種々のアクチュエータを用いることができるが、ここではエアーシリンダを用いた。第1通路21の途中には横方向に開口した開口部25が設けられ、この開口部25に第2通路19が接続されている。吐出ピストン22が前進位置(下死点)にあるとき開口部25が閉じられ、吐出ピストン22が後退位置(上死点)にあるとき開口部25が開かれる。特に、開口部25は吐出ピストン22の上死点近傍に設けるのがよい。吐出ヘッド20の下端部には、一体または別体の吐出ノズル26が設けられており、吐出ピストン22が下死点にあるとき、吐出ピストン22の先端が吐出ノズル26の先端と略同一位置になるように調整されている。吐出ヘッド20は、超音波振動子23が発生する超音波振動の振幅を拡大し、吐出ノズル26に伝える超音波ホーンを兼ねている。 The discharge section C includes a discharge head 20 that is slidably supported in the vertical direction in the support hole 18a of the connecting member 18, a first passage 21 that is formed through the central portion of the discharge head 20 in the vertical direction, and a first passage 21. The discharge piston 22 is slidably inserted into the passage 21, a donut-shaped ultrasonic vibrator 23 fixed to the upper end of the discharge head 20, and a drive device 24 that strokes the discharge piston 22 up and down. ing. The upper end portion of the discharge piston 22 passes through the ultrasonic vibrator 23 and is connected to the drive device 24. As the driving device 24, various actuators such as a combination of an electric motor and a ball screw, a fluid pressure cylinder, and a voice coil motor can be used. Here, an air cylinder is used. In the middle of the first passage 21, an opening 25 that opens in the lateral direction is provided, and the second passage 19 is connected to the opening 25. The opening 25 is closed when the discharge piston 22 is in the forward position (bottom dead center), and the opening 25 is opened when the discharge piston 22 is in the backward position (top dead center). In particular, the opening 25 is preferably provided in the vicinity of the top dead center of the discharge piston 22. An integrated or separate discharge nozzle 26 is provided at the lower end of the discharge head 20, and when the discharge piston 22 is at the bottom dead center, the tip of the discharge piston 22 is positioned substantially at the same position as the tip of the discharge nozzle 26. It has been adjusted to be. The ejection head 20 also serves as an ultrasonic horn that expands the amplitude of the ultrasonic vibration generated by the ultrasonic transducer 23 and transmits it to the ejection nozzle 26.

吐出ヘッド20は連結部材18に設けられた支持穴18aに上下動自在に嵌合されており、吐出ヘッド20と連結部材18との間には液漏れを防止するためのOリング27が設けられている。このOリング27は、超音波振動子23の振動方向の変位を許容できる向きに配置されており、超音波振動が吐出ヘッド20から連結部材18を介して計量部Bに伝播するのを抑制する役割も果たす。
ここでは、超音波振動の方向が上下方向の例を示すが、水平方向であってもよい。
The discharge head 20 is fitted in a support hole 18 a provided in the connecting member 18 so as to be movable up and down, and an O-ring 27 for preventing liquid leakage is provided between the discharge head 20 and the connecting member 18. ing. The O-ring 27 is disposed in a direction that allows the displacement in the vibration direction of the ultrasonic transducer 23 to be suppressed, and the ultrasonic vibration is prevented from propagating from the ejection head 20 to the measuring unit B via the connecting member 18. Also plays a role.
Here, an example in which the direction of ultrasonic vibration is the vertical direction is shown, but it may be a horizontal direction.

次に、上記液体定量吐出装置の作動を図2に従って説明する。
まず最初に、図2の(a)のように吐出ピストン22を下死点位置とし、開口部25を閉じるとともに、押出ピストン15を上死点まで上昇させ、開閉バルブ14を開く。そのため、液体貯留容器1から一定圧で押し出された液体Lは、第3通路5を通り、流入口12から計量室11に導入される。この時、液体貯留容器1から供給される流量に比べて、押出ピストン15の上昇速度とピストン15の断面積との積を小さくすることで、計量室11内が負圧になるのを防ぎ、気泡の発生を防ぐことができる。こうして計量室11が液体Lで満たされる。
Next, the operation of the liquid dispensing apparatus will be described with reference to FIG.
First, as shown in FIG. 2A, the discharge piston 22 is set to the bottom dead center position, the opening 25 is closed, the push piston 15 is raised to the top dead center, and the open / close valve 14 is opened. Therefore, the liquid L pushed out from the liquid storage container 1 at a constant pressure passes through the third passage 5 and is introduced into the measuring chamber 11 from the inlet 12. At this time, by reducing the product of the rising speed of the extrusion piston 15 and the cross-sectional area of the piston 15 compared to the flow rate supplied from the liquid storage container 1, it is possible to prevent the inside of the measuring chamber 11 from becoming negative pressure, Generation of bubbles can be prevented. Thus, the measuring chamber 11 is filled with the liquid L.

次に、図2の(b)のように開閉バルブ14を閉じ、計量室11を密閉する。その後、吐出ピストン22を上昇させ、第1通路21の開口部25を開く。開口部25が開かれた時、開閉バルブ14が既に閉じられているので、第3通路5の圧力は計量室11や第2通路19には作用せず、開口部25から第1通路21へ液体Lが流入することは殆どない。開口部25を開くことにより、計量室11から吐出ノズル26まで流路がつながる。 Next, as shown in FIG. 2B, the open / close valve 14 is closed, and the measuring chamber 11 is sealed. Thereafter, the discharge piston 22 is raised, and the opening 25 of the first passage 21 is opened. Since the opening / closing valve 14 is already closed when the opening 25 is opened, the pressure in the third passage 5 does not act on the measuring chamber 11 and the second passage 19, and from the opening 25 to the first passage 21. The liquid L hardly flows in. By opening the opening 25, the flow path is connected from the measuring chamber 11 to the discharge nozzle 26.

次に、図2の(c)のように押出ピストン15を液体Lの1回の吐出量に応じた分だけ降下させる。このとき、液体Lの圧縮性の影響を受けない程度の低速度で降下させれば、ピストンストローク分の体積がそのまま押し出されるため、狙いとする吐出量に高精度に制御できる。押出ピストン15の降下により、計量室11内の液体は第2通路19、開口部25を通り第1通路21へ導入される。図2の(c)では、押出ピストン15を1回分だけ前進させた時、吐出ノズル26から液体Lが吐出されない例を示したが、1回の吐出量が第1通路21の容積よりも大きい場合でも、液体Lの一部が吐出ノズル26から吐出されるが、狙いとする吐出量に高精度に制御できる。 Next, as shown in FIG. 2C, the extrusion piston 15 is lowered by an amount corresponding to the single discharge amount of the liquid L. At this time, if the liquid L is lowered at a low speed that is not affected by the compressibility of the liquid L, the volume corresponding to the piston stroke is pushed out as it is, so that the target discharge amount can be controlled with high accuracy. As the extrusion piston 15 is lowered, the liquid in the measuring chamber 11 is introduced into the first passage 21 through the second passage 19 and the opening 25. FIG. 2C shows an example in which the liquid L is not discharged from the discharge nozzle 26 when the extrusion piston 15 is moved forward by one time. However, the discharge amount per time is larger than the volume of the first passage 21. Even in this case, a part of the liquid L is ejected from the ejection nozzle 26, but the target ejection amount can be controlled with high accuracy.

次に、図2の(d)のように超音波振動子23を作動させ、吐出ヘッド20によってその振幅を増幅させて吐出ノズル26に伝達すると同時に、吐出ピストン22を降下させ、第1通路21内の液体の全量を吐出ノズル26から吐出する。吐出ピストン22が降下すると、直ちに開口部25が閉じられるので、第1通路21内の液体と第2通路19内の液体とが分断される。吐出ピストン22が計量室11内の液体の流出を防止する弁の役割を果たすので、第1通路21内の液体のみが吐出される。また、超音波振動の効果により、吐出ノズル26の先端面や側面への液体の残留や液体の糸曳き現象が防止され、一定量の液体Lが塗布対象物Wへ確実に塗布される。 Next, as shown in FIG. 2D, the ultrasonic transducer 23 is operated, the amplitude is amplified by the discharge head 20 and transmitted to the discharge nozzle 26, and at the same time, the discharge piston 22 is lowered, and the first passage 21. The entire amount of the liquid inside is discharged from the discharge nozzle 26. When the discharge piston 22 descends, the opening 25 is immediately closed, so that the liquid in the first passage 21 and the liquid in the second passage 19 are separated. Since the discharge piston 22 serves as a valve that prevents the liquid from flowing into the measuring chamber 11, only the liquid in the first passage 21 is discharged. Further, the effect of ultrasonic vibration prevents the liquid from remaining on the tip and side surfaces of the discharge nozzle 26 and the stringing phenomenon of the liquid, and a certain amount of the liquid L is reliably applied to the application object W.

1回の吐出が終了すれば、塗布対象物Wを移動させるか、あるいは定量塗布装置を別の位置へ動かし、図2の(c)〜(d)の動作を、押出ピストン15が下死点に到達するまで(計量室11内の液体がなくなるまで)繰り返す。押出ピストン15が下死点に到達した後、再び図2の(a)の状態に戻り、以後、同様の動作を繰り返す。 When one discharge is completed, the application object W is moved or the quantitative application device is moved to another position, and the operation of (c) to (d) in FIG. Is repeated until the liquid in the measuring chamber 11 is exhausted. After the extrusion piston 15 reaches the bottom dead center, the state returns to the state of FIG. 2A again, and thereafter the same operation is repeated.

本発明にかかる定量吐出装置は上記実施例に限定されるものではない。
上記実施例では、計量室(収容室)11の上流側にシリンジ1を設け、押出ピストン15が下死点まで到達した時(計量室が空になった時)、シリンジ1から液体を補給するように構成したが、計量室11をシリンジのような使い切りの密閉構造とし、その上流側のシリンジ1を省略してもよい。
また、第2通路19を吐出ヘッド20と計量室本体10とを連結する連結部材18の中に設けた例を示したが、第2通路を樹脂の可撓性ホースや金属パイプで構成することもできる。特に、可撓性ホースの場合、超音波振動が収容室11へ伝播するのを抑制する振動抑制効果が高い。
本発明で用いられる液体としては、導電性接着剤、封止用樹脂、絶縁性接着剤、半田ペースト、シリコーンオイル、セラミックスラリーのような常温で液状のものに限らず、常温では固体であるが、加熱によって液状となるもの(例えばワックスなど)でもよい。
The fixed amount dispensing apparatus according to the present invention is not limited to the above-described embodiment.
In the above embodiment, the syringe 1 is provided on the upstream side of the measuring chamber (accommodating chamber) 11, and when the push piston 15 reaches the bottom dead center (when the measuring chamber is emptied), the liquid is supplied from the syringe 1. However, the measuring chamber 11 may be a single-use sealed structure such as a syringe, and the upstream syringe 1 may be omitted.
Moreover, although the example which provided the 2nd channel | path 19 in the connection member 18 which connects the discharge head 20 and the measurement chamber main body 10 was shown, you may comprise a 2nd channel | path with a resin flexible hose or a metal pipe. You can also. In particular, in the case of a flexible hose, a vibration suppressing effect that suppresses propagation of ultrasonic vibration to the storage chamber 11 is high.
The liquid used in the present invention is not limited to liquids at room temperature such as conductive adhesives, sealing resins, insulating adhesives, solder pastes, silicone oils, and ceramic slurries, but is solid at room temperature. Alternatively, it may be liquid (for example, wax) that becomes liquid upon heating.

本発明にかかる定量吐出装置の一例の構成図である。It is a block diagram of an example of the fixed-quantity discharge apparatus concerning this invention. 本発明の定量吐出装置の動作説明図である。It is operation | movement explanatory drawing of the fixed quantity discharge apparatus of this invention. 従来の定量吐出装置の一例の断面図である。It is sectional drawing of an example of the conventional fixed volume discharge apparatus. 従来の定量吐出装置の他の例の部分断面図である。It is a fragmentary sectional view of the other example of the conventional quantitative discharge apparatus.

符号の説明Explanation of symbols

A 貯留部
B 計量部
C 吐出部
L 液体
1 液体貯留容器(シリンジ)
3 加圧手段
5 第3通路
11 計量室(収容室)
12 流入口
13 排出口
14 開閉バルブ(開閉手段)
15 押出ピストン
17 ボイスコイルモータ(駆動手段)
18 連結部材
19 第2通路
20 吐出ヘッド
21 第1通路
22 吐出ピストン
23 超音波振動子
24 エアーシリンダ(駆動手段)
25 開口部
26 吐出ノズル
A storage part B measuring part C discharge part L liquid 1 liquid storage container (syringe)
3 Pressurizing means 5 Third passage 11 Weighing chamber (accommodating chamber)
12 Inlet 13 Discharge 14 Open / close valve (open / close means)
15 Extrusion piston 17 Voice coil motor (drive means)
18 connecting member 19 second passage 20 discharge head 21 first passage 22 discharge piston 23 ultrasonic transducer 24 air cylinder (driving means)
25 Opening 26 Discharge nozzle

Claims (5)

液体を収容し、上記液体の排出口を備える収容室と、
上記収容室内を摺動自在に往復移動し、上記収容室に収容された液体を排出口から所定量ずつ押し出す押出ピストンと、
一端に液体を吐出する吐出ノズルを有し、側面に開口部を有する第1の通路と、
上記第1の通路の開口部と上記収容室の排出口とを接続する第2の通路と、
上記第1の通路内を摺動自在に往復移動し、後退位置で上記開口部を開き、前進位置で上記開口部を閉じるとともに、第1の通路内の液体の全量を吐出ノズルから吐出させる吐出ピストンと、
上記吐出ピストンを往復駆動させる駆動手段と、
上記吐出ノズルからの液体の分離性を高める超音波振動を吐出ノズルに印加する超音波印加手段と、を備えたことを特徴とする液体定量吐出装置。
A storage chamber for storing a liquid and having a discharge port for the liquid;
An extruding piston that slidably reciprocates in the storage chamber, and extrudes the liquid stored in the storage chamber by a predetermined amount from the discharge port;
A first passage having a discharge nozzle for discharging liquid at one end and an opening on a side surface;
A second passage connecting the opening of the first passage and the outlet of the storage chamber;
A discharge that slidably reciprocates in the first passage, opens the opening in the retracted position, closes the opening in the forward position, and discharges the entire amount of the liquid in the first passage from the discharge nozzle. A piston,
Drive means for reciprocating the discharge piston;
An apparatus for quantitatively dispensing liquid, comprising: an ultrasonic wave application unit that applies ultrasonic vibration to the discharge nozzle to improve the separation of the liquid from the discharge nozzle.
上記第2の通路を構成する部材と上記第1の通路を構成する部材との間に、上記超音波印加手段が発生する超音波振動が上記収容室に伝播するのを抑制する弾性体よりなる振動抑制手段が設けられていることを特徴とする請求項1に記載の液体定量吐出装置。 Between the member constituting the second passage and the member constituting the first passage, an elastic body that suppresses propagation of ultrasonic vibration generated by the ultrasonic application means to the storage chamber is formed. 2. The liquid dispensing apparatus according to claim 1, further comprising vibration suppressing means. 上記第2の通路を構成する部材は、上記超音波印加手段が発生する超音波振動が上記収容室に伝播するのを抑制する軟質材料で形成されていることを特徴とする請求項1に記載の液体定量吐出装置。The member constituting the second passage is formed of a soft material that suppresses propagation of ultrasonic vibration generated by the ultrasonic wave application means to the storage chamber. Liquid dispensing device. 液体を貯留する液体貯留容器が設けられ、
この液体貯留容器の液体に所定の加圧力を与えて押し出す加圧手段が設けられ、
上記加圧手段によって液体貯留容器から押し出された液体を上記収容室に導く第3の通路が設けられ、
上記押出ピストンが1ステップ前進する毎に上記収容室内の液体を所定量ずつ排出口から押し出すように、上記押出ピストンの移動量を制御可能な駆動手段が設けられ、
上記第3の通路の途中に、上記収容室に液体貯留容器から液体が補充されるときのみ開かれる開閉手段が設けられていることを特徴とする請求項1ないし3のいずれかに記載の液体定量吐出装置。
A liquid storage container for storing the liquid is provided;
Pressurizing means for applying a predetermined pressure to the liquid in the liquid storage container and pushing it out is provided,
A third passage is provided for guiding the liquid pushed out of the liquid storage container by the pressurizing means to the storage chamber;
To push the liquid in the storage chamber each time the extruding piston is advanced by one step from a predetermined amount by the discharge port, the controllable drive means is provided a moving amount of the extrusion piston,
The liquid according to any one of claims 1 to 3, wherein an opening / closing means that is opened only when the liquid is replenished from the liquid storage container to the storage chamber is provided in the middle of the third passage. Constant discharge device.
上記押出ピストンを駆動する駆動手段は、ボイスコイルモータであることを特徴とする請求項に記載の液体定量吐出装置。 The liquid dispensing apparatus according to claim 4 , wherein the driving means for driving the extrusion piston is a voice coil motor.
JP2004221050A 2004-07-29 2004-07-29 Liquid dispensing device Expired - Lifetime JP4548030B2 (en)

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