JP2011143537A5 - - Google Patents

Download PDF

Info

Publication number
JP2011143537A5
JP2011143537A5 JP2011062864A JP2011062864A JP2011143537A5 JP 2011143537 A5 JP2011143537 A5 JP 2011143537A5 JP 2011062864 A JP2011062864 A JP 2011062864A JP 2011062864 A JP2011062864 A JP 2011062864A JP 2011143537 A5 JP2011143537 A5 JP 2011143537A5
Authority
JP
Japan
Prior art keywords
polishing apparatus
ring
polishing
cylinder
ring member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011062864A
Other languages
English (en)
Japanese (ja)
Other versions
JP5291746B2 (ja
JP2011143537A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011062864A priority Critical patent/JP5291746B2/ja
Priority claimed from JP2011062864A external-priority patent/JP5291746B2/ja
Publication of JP2011143537A publication Critical patent/JP2011143537A/ja
Publication of JP2011143537A5 publication Critical patent/JP2011143537A5/ja
Application granted granted Critical
Publication of JP5291746B2 publication Critical patent/JP5291746B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2011062864A 2011-03-22 2011-03-22 研磨装置 Expired - Lifetime JP5291746B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011062864A JP5291746B2 (ja) 2011-03-22 2011-03-22 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011062864A JP5291746B2 (ja) 2011-03-22 2011-03-22 研磨装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005079166A Division JP4817687B2 (ja) 2004-11-01 2005-03-18 研磨装置

Publications (3)

Publication Number Publication Date
JP2011143537A JP2011143537A (ja) 2011-07-28
JP2011143537A5 true JP2011143537A5 (https=) 2013-03-28
JP5291746B2 JP5291746B2 (ja) 2013-09-18

Family

ID=44458845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011062864A Expired - Lifetime JP5291746B2 (ja) 2011-03-22 2011-03-22 研磨装置

Country Status (1)

Country Link
JP (1) JP5291746B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2610991C2 (ru) * 2011-03-21 2017-02-17 ЛОРЕНС ЛИВЕРМОР НЭШНЛ СЕКЬЮРИТИ, ЭлЭлСи Способ и система конвергентного полирования
JP6074985B2 (ja) 2012-09-28 2017-02-08 ソニー株式会社 半導体装置、固体撮像装置、および半導体装置の製造方法
JP5967044B2 (ja) 2013-09-19 2016-08-10 信越半導体株式会社 研磨パッドの評価方法及びウェーハの研磨方法
KR102154022B1 (ko) * 2013-12-24 2020-09-09 주식회사 케이씨텍 화학 기계적 연마장치용 캐리어 헤드
JP6250406B2 (ja) 2014-01-15 2017-12-20 株式会社荏原製作所 基板処理装置の異常検出装置、及び基板処理装置
JP6234325B2 (ja) 2014-05-23 2017-11-22 株式会社荏原製作所 圧力校正用治具、及び、基板処理装置
JP6454199B2 (ja) * 2015-03-25 2019-01-16 株式会社荏原製作所 圧力校正用治具、及び、基板処理装置
WO2023234973A1 (en) * 2022-06-03 2023-12-07 Applied Materials, Inc. Acoustic monitoring of cmp retaining ring

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6024630A (en) * 1995-06-09 2000-02-15 Applied Materials, Inc. Fluid-pressure regulated wafer polishing head
US5738574A (en) * 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
JP2001277098A (ja) * 2000-03-29 2001-10-09 Matsushita Electric Ind Co Ltd 研磨装置および研磨方法
KR20030029145A (ko) * 2000-08-22 2003-04-11 램 리서치 코포레이션 연마 헤드와 반도체 기판 사이의 중첩 영역의 함수로서연마 압력을 제어하기 위한 연마장치 및 방법
JP2002170794A (ja) * 2000-12-04 2002-06-14 Tokyo Seimitsu Co Ltd ウェーハ研磨装置
JP2002187061A (ja) * 2000-12-22 2002-07-02 Matsushita Electric Ind Co Ltd 研磨温度測定方法、研磨方法、ワーク保持機構および研磨装置

Similar Documents

Publication Publication Date Title
JP2011143537A5 (https=)
USD651529S1 (en) Thermostat display
WO2009058021A3 (en) Packer with ribs
JP2010226955A5 (https=)
WO2014067754A3 (en) Sensor and lithographic apparatus
WO2010086796A3 (en) Pin lifting system
IN2014DN09325A (https=)
WO2011019527A3 (en) Liquid friction clutch
JP2011208675A5 (https=)
MX366593B (es) Dispensador de producto de hoja con porción móvil de carga.
JP2015016684A5 (https=)
WO2013076059A3 (de) Temperaturabhängiges schaltwerk
WO2012112283A3 (en) Liquid friction clutch
GB2449282B (en) High speed flywheel containment
JP2013113319A5 (https=)
GB201020697D0 (en) Relief valve
WO2014079433A3 (de) Nehmerzylinder
JP2015507159A5 (https=)
ES2453240B2 (es) Dispositivo de embrague
JP2017148581A5 (https=)
EP2420910A3 (en) Pressure regulator housing assembly
TW200710983A (en) Grooved retaining ring
WO2017034386A3 (en) An improved former holder assembly
JP2017006372A5 (https=)
WO2013126645A3 (en) Adjustable securing mechanism for a space access device