JP2011141285A5 - - Google Patents
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- JP2011141285A5 JP2011141285A5 JP2011023349A JP2011023349A JP2011141285A5 JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5 JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5
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- 239000000758 substrate Substances 0.000 claims description 57
- 230000010287 polarization Effects 0.000 claims description 29
- 238000007689 inspection Methods 0.000 claims description 16
- 238000005286 illumination Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000000284 extract Substances 0.000 claims description 4
- 230000007547 defect Effects 0.000 description 14
- 238000001514 detection method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011023349A JP5287891B2 (ja) | 2011-02-04 | 2011-02-04 | 欠陥検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011023349A JP5287891B2 (ja) | 2011-02-04 | 2011-02-04 | 欠陥検査方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004322905A Division JP4901090B2 (ja) | 2003-03-26 | 2004-10-06 | 欠陥検査方法及び欠陥検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011141285A JP2011141285A (ja) | 2011-07-21 |
| JP2011141285A5 true JP2011141285A5 (enrdf_load_stackoverflow) | 2011-12-22 |
| JP5287891B2 JP5287891B2 (ja) | 2013-09-11 |
Family
ID=44457208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011023349A Expired - Lifetime JP5287891B2 (ja) | 2011-02-04 | 2011-02-04 | 欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5287891B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9612212B1 (en) | 2015-11-30 | 2017-04-04 | Samsung Electronics Co., Ltd. | Ellipsometer and method of inspecting pattern asymmetry using the same |
| KR102368435B1 (ko) * | 2017-07-28 | 2022-03-02 | 삼성전자주식회사 | 기판 검사 장치, 기판 검사 방법 및 이를 이용한 반도체 소자의 제조 방법 |
| CN107682693B (zh) * | 2017-11-07 | 2023-07-14 | 歌尔科技有限公司 | 一种图像传感器坏点亮点检测装置及检测方法 |
| CN109856155A (zh) * | 2019-01-18 | 2019-06-07 | 北京兆维电子(集团)有限责任公司 | 一种基于偏振光的液晶显示屏表面检测装置及方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10325805A (ja) * | 1997-05-23 | 1998-12-08 | Nikon Corp | 半導体ウエハの自動検査装置 |
| JP3982017B2 (ja) * | 1997-08-05 | 2007-09-26 | 株式会社ニコン | 欠陥検査装置 |
| JP4184543B2 (ja) * | 1999-06-10 | 2008-11-19 | 株式会社日立製作所 | 光学像検出方法および外観検査装置 |
| JP3769996B2 (ja) * | 1999-09-20 | 2006-04-26 | 三菱電機株式会社 | 欠陥検査用半導体基板、半導体基板の検査方法および半導体基板検査用モニター装置 |
| JP4153652B2 (ja) * | 2000-10-05 | 2008-09-24 | 株式会社東芝 | パターン評価装置及びパターン評価方法 |
| JP4183492B2 (ja) * | 2002-11-27 | 2008-11-19 | 株式会社日立製作所 | 欠陥検査装置および欠陥検査方法 |
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2011
- 2011-02-04 JP JP2011023349A patent/JP5287891B2/ja not_active Expired - Lifetime