JP2011133937A - Moving device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a moving device capable of maintaining a posture of a mobile body, which is hard to be designed and lacks versatility. <P>SOLUTION: A first linear motor 40 is disposed at a lower side of the mobile body 10A so that a force point Pm where a thrust force Fw is generated is positioned on a straight line Z of a vertical direction for passing through a center of gravity Gw of whole of a movable object 10 including the mobile body 10A which moves along a horizontal straight line axis direction X, then the mobile body 10A is made to be moved after outputting the thrust force Fw into a desired moving direction. A second linear motor 50 is disposed at a position opposing to the mobile body 10A by sandwiching the first linear motor 40 so that a force point Ps which generates a thrust force Fs is made to be positioned on the straight line Z, then a posture of the mobile body 10A is maintained after outputting the thrust force Fs into a direction opposing to the moving direction. A control device supplies a driving current corresponding to the thrust force Fs to be obtained by multiplying a ratio of a distance Lw between the center of gravity Gw and the force point Pm relating to a distance Ls between the center of gravity Gw and the force point Ps by the thrust force Fw to the second linear motor 50. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a moving device having a moving body that is provided in a mechanical device and moves in a horizontal linear axis direction. In particular, the present invention relates to a linear motor drive type moving device in which an actuator that drives the moving body is a linear motor, and relates to a moving device that controls movement of the moving body so as to maintain the posture.

  In a mechanical device including a moving device having a moving body that reciprocates along a horizontal linear axis direction such as a conveying device, a processing machine, an inspection device, and a measuring device, an electric actuator or a hydraulic actuator is widely used as a driving device. . Since electric actuators are superior in controllability compared to hydraulic actuators, electric actuators have been adopted in many moving devices of mechanical devices such as precision mechanical devices. The electric actuator applied to the driving device is mainly a rotary motor and a linear motor.

  In the guide device that guides the movement of the moving body, there is a slight wave-like undulation caused by the limit accuracy that cannot be avoided in the manufacturing process on the guide surface of the guide track. Since the position error due to the waviness of the guide surface affects the position accuracy of the moving body, it is difficult to obtain a position accuracy exceeding the limit accuracy. The linear motor drive type moving device does not require a transmission device to transmit the rotational motion to the linear motion, so there is no backlash and spring element, and speed and response performance compared to the rotary motor driven type moving device. However, since there is no transmission device, the position error due to the waviness of the guide surface directly affects the position accuracy of the moving body.

  Therefore, in a precision machine device having a linear motor drive type moving device that requires high positional accuracy, a fluid bearing using a pressurized fluid such as compressed air or pressurized oil as a bearing of a guide device is widely adopted. ing. In a fluid bearing, since the pressurized fluid that is a bearing has a degree of freedom, the position error due to waviness of the guide surface does not directly affect the moving body by the fluid, and the moving body approximately follows the average value of the receiving surface of the fluid bearing. Guided. In addition, the fluid dynamic bearing reduces frictional resistance generated between the guide body and the guide track. Therefore, higher positional accuracy can be obtained while the moving body can be moved with high acceleration and high response.

  On the other hand, the hydrodynamic bearing is rigid in the rotational direction around the center of gravity of the entire movable object that moves together with the movable body including the movable body and the vertical direction with respect to the horizontal linear axis direction that is the moving direction of the movable body because of its freedom. Is quite low. Therefore, when the moving body tries to move at a high acceleration in the horizontal linear axis direction, as shown by the arrow in FIG. 6, the vertical direction with respect to the horizontal linear axis direction and the center of gravity of the entire movable object. The posture of the moving body is deflected in the rotation direction, or the moving body swings. As a result, it impedes stable conveyance work of the conveyed article, or reduces processing accuracy, inspection accuracy, and measurement accuracy.

  Such a change in the posture of the moving body also occurs in a guide device having a ball bearing such as a linear guide. However, since the fluid bearing is particularly low in rigidity, the posture of the moving body is easily deflected with such a small acceleration. The degree of posture variation tends to be even greater. However, if the moving body can be moved so that the force is accurately applied to the horizontal linear axis direction, which is the moving direction, at the center of gravity of the entire movable object, the moving body can be kept straight while maintaining the posture of the moving body. Can be moved. As a method of moving the moving body without causing a change in the posture of the moving body, for example, the movement control method of the moving body shown in Patent Document 1 or Patent Document 2 is referred to.

Japanese Patent No. 3491540 Japanese Patent No. 3470754

  However, since the center of gravity of the entire movable object varies depending on the size and mass or shape of the load such as the movable body and the transported article, workpiece, specimen, and measured object placed on the movable body, It may be difficult in design to position the force point where the thrust of the driving device is generated near the center of gravity of the entire movable object. In addition, depending on the mechanical device, the size of the load varies greatly from work to work, and the power point of the drive device cannot always be located near the position of the center of gravity of the entire movable object.

  In addition, even in the case of a moving device having the same moving body, a different attachment device may be provided for the moving body in accordance with the specifications required for the mechanical device. The overall mass and center of gravity often vary. In addition, a moving device that is designed to accurately apply thrust to the entire unique movable object so as to correspond to a specific mechanical device is limited in configuration due to the structural limitations of the mechanical device. There is little potential for application to the device. Therefore, the moving device lacks versatility, and it is required to design and manufacture the moving device for each mechanical device.

  By moving the moving body so as to accelerate slowly with a small acceleration and suppressing the thrust and the degree of change in thrust, it is possible to prevent the posture of the moving body from being deflected or swung. However, the moving speed of the moving body is sacrificed, and the high speed performance and high response performance of the linear motor drive type moving device cannot be utilized, and a considerable time is required for operations such as conveyance, processing, inspection, or measurement. Work efficiency is reduced.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has an object to provide a moving device for a linear motor drive system that can maintain the posture of a moving body and is superior in versatility. To do. The advantages of the mobile device of the present invention will be explained each time in the description of the embodiment.

  In order to achieve the object, the moving device of the present invention includes a moving body (10A) that moves on the carriage (20) in the horizontal linear axis direction (X), and a moving body (10A) including the moving body (10A). A desired moving direction is arranged below the moving body (10A) so that the force point (Pm) is positioned on the straight line (Z) in the vertical direction passing through the center of gravity (Gw) of the entire moving object (10) that moves together. A first linear motor (40) for moving the moving body (10A) by outputting a required thrust (Fw) to the vehicle, and a traveling platform (20) so that the force point (Ps) is positioned on the straight line (Z). A predetermined thrust (Fs) is output in a direction opposite to the moving direction, which is disposed at a position facing the moving body (10A) across the first linear motor (40), so that the posture of the moving body (10A) is changed. The second linear motor (50) to be maintained and the center of gravity (G) of the entire movable object (10) ) To the force point (Pm) of the first linear motor (40) from the center of gravity (Gw) of the entire movable object (10) to the distance (Ls) from the force point (Ps) of the second linear motor (50). The second linear motor (50) outputs a predetermined thrust (Fs) in the opposite direction obtained by multiplying the ratio (Lw) by the thrust (Fw) of the first linear motor (40). And a control device (3) for supplying a drive current to the linear motor (50).

  In particular, the control device (3) causes the entire movable object (10) with respect to the distance (Ls−Lw) from the power point (Pm) of the first linear motor (40) to the power point (Ps) of the second linear motor (50). ) On the premise that the thrust (Fs) of the second linear motor (50) does not act on the ratio of the distance (Ls) from the center of gravity (Gw) to the force point (Ps) of the second linear motor (50). A required thrust (Fw) in the moving direction obtained by multiplying the thrust (Fm) required for moving the entire object (10) at the set acceleration (A) is output from the first linear motor (40). Thus, the drive current is supplied to the first linear motor (40).

  Another moving device of the present invention includes a moving body (10A) that moves in the horizontal linear axis direction (X) on the carriage (20), and a load and an attached device that are placed on the moving body (10A). The entire moving body (70) having a predetermined mass (Mm) and the moving point (Pm) is positioned on the vertical straight line (Z) passing through the center of gravity (Gm) of the entire moving body (70). A linear motor (40) which is disposed below the body (10A) and outputs a required thrust (Pm) in a desired moving direction to move the moving body (10A); and a center of gravity (Gs) on the straight line (Z) ) Is a balance body (60) that is detachably disposed at a position facing the moving body (10A) with the traveling table (20) and the linear motor (40) interposed therebetween, and has a force point (Pm). To the distance (Ls-Lm) from the center of gravity (Gs) to the balance body (60) The moving body is adjusted to the mass (Ms) obtained by multiplying the ratio of the distance (Lm) from (Pm) to the center of gravity (Gm) of the entire moving body (70) by the mass (Mm) of the entire moving body (70). A set acceleration (Mw) is set to the total mass (Mw) of the entire movable object (10) including the balance body (60) attached so as to be suspended by (10A) and the entire movable body (70) and the balance body (60). And a control device (3) for supplying a drive current to the linear motor (40) so that a required thrust (Fw) obtained by multiplying A) is output from the linear motor (40). The

  In particular, the control device (3) is configured such that the balance body (60) from the center of gravity (Gm) of the entire moving body (70) with respect to the distance (Ls-Lm) from the power point (Pm) to the center of gravity (Gs) of the balance body (60). The entire movable object (10) obtained by multiplying the ratio of the distance (Ls) to the center of gravity (Gm) by the thrust (Fm) required to move the entire moving body (70) at the set acceleration (A). A drive current is supplied to the linear motor (40) so that a required thrust (Fw) in the moving direction required for moving at the set acceleration (A) is output from the linear motor (40).

  In the moving device of the present invention, a moving linear motor is disposed below the moving body, and a posture maintaining linear motor is additionally provided at a position facing the moving body across the moving linear motor. Because the momentary force acting around the center of gravity of the entire movable object is generated in the linear motor for maintaining the posture, the thrust in the direction opposite to the desired moving direction is generated. In addition, the posture of the moving body does not deflect in the rotation direction around the center of gravity of the entire movable object, and the moving body does not swing.

  Another moving device according to the present invention includes a moving linear motor disposed below the moving body, the moving body and a load placed on the moving body at a position facing the moving body across the linear motor, and Adjust the mass so that the total mass of the entire moving object including the attached device and the balance body for posture maintenance is the mass to which the linear motor thrust is accurately applied at the center of gravity of the entire moving object. Since the balance body is additionally provided, the posture of the moving body is not deflected in the vertical direction with respect to the moving direction of the moving body and the rotation direction around the center of gravity of the entire movable object, and the moving body does not swing.

  Therefore, in a moving device having a guide device including a low rigidity bearing, especially a fluid bearing, an additional linear motor for maintaining the posture is flexibly provided or the mass is adjusted in response to the structural constraints of the mechanical device. Thus, it is possible to maintain the posture of the moving body simply by providing the balance body, and it is possible to obtain higher positional accuracy without losing the advantage of moving the moving body with high acceleration and high response. As a result, it is possible to facilitate the design of a mobile device having high speed performance and high response performance, and to increase the versatility, thereby improving the productivity and economy of the mobile device.

It is a side view and a front view showing an outline of the whole composition in a moving device of the present invention. It is a block diagram which shows an example of a structure of the control apparatus in the moving apparatus of this invention. It is a block diagram which shows an example of a structure of the control apparatus in the moving apparatus of this invention. It is a block diagram which shows an example of a structure of the control apparatus in the moving apparatus of this invention. It is a side view and a front view showing an outline of the whole composition in a moving device of another embodiment of the present invention. It is a side view which shows the deflection | deviation of the attitude | position in the conventional moving apparatus.

  FIG. 1 schematically shows an outline of a moving device of a transport device. The transport apparatus according to the embodiment shown in FIG. 1 is an example of an apparatus that loads a workpiece from a workstation and transports it to another workstation. FIG. 2 shows a configuration of a control device that drives and controls the linear motor of the drive device shown in FIG. Hereinafter, the configuration of the mobile device of the present invention will be described with reference to FIGS. 1 and 2.

  The moving device includes a moving device main body 1, a driving device 2, and a control device 3. The moving apparatus body 1 includes an entire movable object 10 that moves together with the moving body 10A including the moving body 10A, a traveling platform 20 on which the moving body 10A is movably mounted in the horizontal linear axis direction X, and a guide that guides the moving body 10A. Device 30. The driving device 2 outputs the required thrust Fw in the desired movement direction and moves the first linear motor 40 for moving the moving body 10A and the thrust Fs in the direction opposite to the desired movement direction. And a second linear motor 50 for maintaining the posture of the body 10A.

  The entire movable object 10 referred to in the present invention refers to the entire object that reciprocates along the horizontal linear axis direction X including the load and the moving body 10A and the member that moves together with the moving body 10A. Specifically, in the moving device shown in FIG. 1, the entire movable object 10 includes a moving body 10A, a frame 10B, and a mounting block 10C. Further, the movable parts of the first linear motor 40 and the second linear motor 50 of the driving device 2 are included in the entire movable object 10. Unless otherwise specified, the term “moving body 10A” includes a load placed on the moving body 10A and an attachment device that may be attached to the moving body 10A.

  The moving body 10A reciprocates on the traveling platform 20 in the horizontal linear axis direction X. The moving body 10A is attached and fixed to the upper part of the frame 10B. The moving body 10A is moved in the desired moving direction along the horizontal linear axis direction X by the first linear motor 40. With the movement of the moving body 10A, the load placed on the moving body 10A also moves. The frame 10 </ b> B is installed to be movable across the traveling platform 20. The moving body 10A is, for example, a carriage of a conveying device, a table of a processing machine, a stage of an inspection device or a measuring device.

  The traveling base 20 is a base on which the moving body 10A is mounted so as to be able to reciprocate. The traveling table 20 in the moving device according to the embodiment is a base having a structure in which the stators of the first linear motor 40 and the second linear motor 50 of the driving device 2 can be attached and disposed on the lower portion. The traveling platform 20 is horizontally stretched between the support columns so as to be supported by a plurality of support columns (not shown) that are vertically provided on the floor surface. Alternatively, the traveling platform 20 can be suspended horizontally so as to be suspended from the ceiling by an arm member (not shown).

  The guide device 30 includes a guide body 30A provided below the mobile body 10A, a guide track 30B that defines a travel route of the mobile body 10A, and a guide body so as to be interposed between the guide body 30A and the guide track 30B. Bearing 30C accommodated in 30A. A plurality of guide bodies 30A and guide tracks 30B are provided in a range necessary for the mobile body 10A to move stably. In the moving apparatus of the embodiment, two guide bodies 30A are received by one guide track 30B, and twelve guide bodies 30A and six guide tracks 30B are provided.

  The guide body 30A is a guide block that slides with respect to the guide track 30B with a bearing 30C interposed therebetween. The guide body 30A in the moving device of the embodiment is indirectly provided on the moving body 10A with the frame 10B interposed therebetween. Further, the guide body 30A is provided so as to indirectly receive the guide track 30B laid on the traveling platform 20 with the bearing 30C interposed. Therefore, when the moving body 10A moves, the guide body 30A moves integrally, and the moving body 10A moves along the horizontal linear axis direction X along the guide track 30B.

  The guide track 30B is a guide rail. At least two guide tracks 30B are laid in parallel on the upper surface of the traveling platform 20 along the horizontal linear axis direction X which is the moving direction of the moving body 10A. In the moving device according to the embodiment, a plurality of guide tracks 30B are provided on the upper surface, the side surface, and the lower surface of the traveling platform 20 in parallel along the horizontal linear axis direction X.

  The bearing 30 </ b> C is a fluid bearing that uses a pressurized fluid such as compressed air or pressurized oil as a bearing, and is specifically an aerostatic bearing. The already known configuration can be adopted for the aerostatic bearing, and detailed description is omitted. The compressed air is supplied from the guide body 30A to the gap between the guide body 30A and the guide track 30B, for example. The bearing 30C receives the guide surface of the guide track 30B and supports the guide body 30A so as to slide substantially along the guide track 30B. Since the compressed air has a degree of freedom, the bearing 30C does not affect the moving body 10A due to the position error due to the undulation of the guide surface of the guide track 30B.

  The first linear motor 40 is a main electric actuator for movement that outputs a required thrust Fw in a desired movement direction and moves the moving body 10A in the desired movement direction along the horizontal linear axis direction X. The first linear motor 40 is disposed on the lower side of the moving body 10 </ b> A so that the force point Pm that generates the thrust Fw is always located on a straight line in the vertical direction passing through the center of gravity Gw of the entire movable object 10. In the moving device according to the embodiment, the first linear motor 40 is disposed below the traveling table 20 so as to face the moving body 10A with the traveling table 20 interposed therebetween.

  The primary side excitation coil, which is a moving element of the first linear motor 40, is fixedly attached to a mounting block 10C that is integrally provided at a lower portion of the frame 10B. The primary side exciting coil is inserted between the pair of permanent magnets so as to be positioned with a predetermined gap on the secondary side permanent magnet which is the stator of the first linear motor 40. The secondary permanent magnet is attached and fixed to the lower side of the traveling platform 20 so as to be arranged in parallel with the central axis in the horizontal linear axis direction X of the moving body 10A.

  The second linear motor 50 is a posture maintaining electric actuator that assists in maintaining the posture of the moving body 10A by outputting a predetermined thrust Fs in a direction opposite to the desired moving direction. The second linear motor 50 is always positioned so that the force point Ps at which a predetermined thrust Fs is generated is on a vertical straight line Z passing through the center of gravity Gw of the entire movable object 10 and the force point Pm of the first linear motor 40. It is disposed at a position facing the moving body 10 </ b> A with the traveling platform 20 and the first linear motor 40 interposed therebetween.

  The primary side excitation coil that is the moving element of the second linear motor 50 is fixedly attached to the mounting block 10 </ b> C so as to be disposed below the moving element of the first linear motor 40. The primary side excitation coil is inserted between the pair of permanent magnets so as to be positioned with a predetermined gap on the secondary side permanent magnet which is a stator of the second linear motor 50. The secondary permanent magnet that is the stator of the second linear motor 50 is parallel to the central axis in the horizontal linear axis direction X of the moving body 10A and is below the permanent magnet that is the stator of the first linear motor 40. It is attached and fixed to the lower side of the traveling platform 20 so as to be arranged on the side.

  The control device 3 includes a command device 4 and a motor control device 5. The motor control device 5 includes a drive control unit 6 and a drive output unit 7. The drive control unit 6 includes a command calculator 6A, a position compensator 6B, and a speed compensator 6C. The drive output unit 7 includes a current compensator 7A, a power amplifier 7B, a cooperative thrust adjuster 7C, a current compensator 7D, and a power amplifier 7E.

  The command device 4 is a means for outputting position and set acceleration data based on the amount of movement per unit time according to the set speed, or speed data per unit time according to the set speed and set acceleration with respect to a predetermined position. Hereinafter, the data output from the command device 4 to the motor control device 5 is generically referred to as a movement command. The command device 4 includes an operation panel, and has a role of an interface connecting the operator and the drive device 2 through the motor control device 5. The command device 4 corresponds to a numerical control device of a processing machine or a measuring device.

  The command device 4 outputs a movement command based on a command directly given by an operator by operating the operation panel or a command according to a movement program given from an input device provided on the operation panel. The movement program is created in advance in a format unique to the control device 3. The command device 4 notifies the operation information of the mechanical device including the current position information with a lamp, or displays it on a liquid crystal display screen of a display device arranged in parallel with the operation panel.

  The motor control device 5 is means for controlling the first linear motor 40 for movement and the second linear motor 50 for posture control. The drive control unit 6 includes a microcomputer having a central processing unit (CPU) and outputs a real command value based on the movement command and the current position. The drive output unit 7 is means for supplying electric power for driving the motor. The drive output unit 7 has a power amplifier including an operational amplifier composed of a plurality of power transistors and a current sensor, and supplies a drive current to the first linear motor 40 and the second linear motor 50 by inverter control.

  The position detector 8 is a linear encoder. The position detector 8 in the embodiment is a linear scale that analyzes the output signal of the optical sensor 81 provided on the moving body 10A that reads the scale installed on the traveling platform 20 and outputs position data. As the position detector 8, for example, a position detector using a magnetic sensor such as a magnescale or a Hall element that detects a position by a magnetic sensor can be applied. The speed detector 9 inputs the position per unit time from the position detector 8, calculates the speed, and outputs speed data. The motor control device 5 can install the position detector 8 and the speed detector 9 outside the drive control unit 6.

  The drive control unit 6 inputs a movement command output from the command device 4 through the buffer to the command calculator 6A. The command calculator 6A calculates and outputs a target position for each unit time in consideration of speed and acceleration or jerk based on the movement command. The unit time is basically determined depending on the calculation processing speed of the motor control device 5. When a predetermined correction is requested in advance in the positioning control of the moving body 10A, the command calculator 6A outputs the corrected target position for each unit time.

  The position compensator 6B outputs a target speed obtained by adding a predetermined position gain to the deviation between the target position output from the command calculator 6A and the current position output from the position detector 8. When position correction is given to the movement command input to the drive control unit 6, the position compensator 6B inputs the corrected target position and outputs the target speed.

  The speed compensator 6C obtains a target current obtained by adding a predetermined speed gain to the deviation between the target speed output from the position compensator 6B and the current speed output from the speed detector 9. Further, the speed compensator 6C is a thrust required for the first linear motor 40 in order to move the entire movable object 10 in a desired moving direction at a set speed and a set acceleration with respect to a thrust Fm according to a movement command based on a target current. A corrected target current multiplied by the ratio of Fw is output. The ratio of the position gain, the speed gain, and the thrust Fw to the thrust Fm can be changed through the command device 4.

  The drive output unit 7 inputs the target current output from the drive control unit 6 to the current compensator 7A. The current compensator 7A outputs a control voltage signal corresponding to the current command from the target current and the output current of the power amplifier 8B detected by the current sensor. The power amplifier 8B supplies a drive current that amplifies the current command output from the current compensator 7A and generates a thrust Fw according to the current command to the first linear motor 40 for movement control.

  The drive output unit 7 inputs the target current output from the drive control unit 6 to the cooperative thrust adjuster 7C. The cooperative thrust adjuster 7C multiplies the target current input from the speed compensator 6C by the ratio of the thrust Fs of the second linear motor 50 to the thrust Fw of the first linear motor 40 and the first linear motor 40. When the second linear motor 50 is driven, a current command corresponding to the thrust Fs that moves the entire movable object 10 at the set acceleration is output. The ratio of the thrust Fs to the thrust Fw can be changed through the command device 4.

  The thrust Fs of the second linear motor 50 that should be generated in the direction opposite to the desired moving direction in order to maintain the posture of the moving body 10A is the first thrust Fw from the center of gravity Gw of the entire movable object 10 as shown in Equation 1. The ratio of the distance Lw from the center of gravity Gw of the entire movable object 10 to the distance Ls to the force point Ps of the second linear motor to the force point Pm of the first linear motor 40 is obtained by multiplying the thrust Fw of the first linear motor 40. Can do. However, the sign indicates the direction.

  Therefore, a current command corresponding to the thrust Fs obtained by Equation 1 is output from the cooperative thrust adjuster 7C. In the case of a moving device having a structure in which a first linear motor 40 for movement and a second linear motor 50 for posture maintenance are arranged in a layer so as to face the moving body 10A mounted on the traveling base 20, When the second linear motor 50 outputs the thrust force Fs expressed by Equation 1 in the direction opposite to the desired moving direction, the moment force acting around the center of gravity Gw of the entire movable object 10 is expressed as shown in Equation 2. It becomes zero. As a result, the posture of the moving body 10A is not deflected and the moving body 10A does not swing.

  At this time, while the first linear motor 40 generates the thrust Fw at the force point Pm and tries to move the moving body 10A in the desired movement direction, the second linear motor 50 generates the desired force Fs at the force point Ps. Although it tries to pull back the moving body 10A in the direction opposite to the moving direction, the second linear motor 50 is moved while being pulled because the thrust Fw of the first linear motor 40 is larger than the thrust Fs of the second linear motor. The body 10A moves in a desired movement direction with a force corresponding to the thrust Fm according to the movement command, and as a result, the posture is maintained in balance with the center of gravity Gw of the entire movable object 10.

  From the cooperative thrust adjuster 7C, a target current corresponding to the appropriate thrust Fs necessary for maintaining the posture is output. The current compensator 7D outputs a control voltage signal corresponding to the current command from the target current output from the cooperative thrust adjuster 7C and the output current of the power amplifier 7E detected by the current sensor. The power amplifier 7E supplies the drive current for amplifying the current command output from the current compensator 7D and generating the thrust Fs according to the current command to the second linear motor 50 for maintaining the posture.

  The drive output unit 7 in the embodiment includes a current compensator 7A, a thrust adjuster 7C, and a current compensator 7D, which can be provided on the drive control unit 6 side. Further, the drive output unit 7 includes an abnormality detection device and a protection circuit for protecting the drive output unit 7 from an overcurrent due to overload or component abnormality, overheating, or power supply abnormality to prevent damage. The detailed explanation is omitted.

  Here, in the control device 3 in the moving device according to the embodiment, the operator can set the moving body 10A with the first linear motor 40 and the set speed and the set acceleration without being aware of the presence of the second linear motor 50. The command device 4 is configured to move the entire movable object 10 on the premise that the thrust Fs of the second linear motor 50 does not act at the set acceleration. A movement command corresponding to the required thrust Fm is output.

  Therefore, with the thrust Fm according to the movement command, when the second linear motor 50 outputs the thrust Fs in the direction opposite to the desired movement direction, the entire movable object 10 including the moving body 10A is set to the set speed in the desired movement direction. The thrust is insufficient with respect to the thrust Fw required for the first linear motor 40 to move at the set acceleration. Assuming that the thrust Fm according to the movement command and the thrust Fs acting in the direction opposite to the movement direction are balanced, the thrust Fm according to the movement command is expressed by Equation 3.

  Therefore, the thrust Fw required for the first linear motor 40 to move the moving body 10A at the set acceleration when the second linear motor 50 outputs the thrust Fs is as shown in Equation 4 It is directly proportional to the thrust Fm according to the command. Therefore, the thrust Fw is from the center of gravity Gw of the entire movable object 10 to the force point Ps of the second linear motor 50 with respect to the distance Ls−Lw from the force point Pm of the first linear motor 40 to the force point Ps of the second linear motor 50. Is obtained by multiplying the ratio of the distance Ls by the thrust Fm according to the movement command required to move the entire movable object 10 at the set acceleration on the assumption that the thrust Fs of the second linear motor 50 does not act.

  Therefore, in the speed compensator 6C, the control device 3 in the embodiment multiplies the target current according to the movement command obtained by adding a predetermined speed gain to the deviation between the target speed and the current speed by the ratio of the thrust Fw to the thrust Fm, A corrected target current corresponding to the thrust Fw obtained by multiplying the ratio of the distance Ls to the distance Ls-Lw by the thrust Fm is output. Therefore, the target current corresponding to the appropriate thrust Fw of the first linear motor 40 required for moving the entire movable object 10 including the moving body 10A from the drive control unit 6 in the desired movement direction at the set acceleration is output. The

  As described above, the control device 3 requests the first linear motor 40 based on the thrust Fm required to move the moving body 10A in the desired movement direction at the set speed and the set acceleration according to the movement command. The first linear motor 40 is supplied with a driving current for generating a thrust Fs and a driving current for generating a thrust Fs to the second linear motor 50 based on the thrust Fw of the first linear motor 40. As a result, the moving body 10 is moved in the desired moving direction at the set acceleration while maintaining the posture of the moving body 10. Can be made.

  FIG. 3 is a modification of the motor control device 5 of FIG. The control system of the motor control device 5 shown in FIG. 3 can be said to be a parallel method when the control system of the motor control device 5 shown in FIG. 2 is an independent method. The following description will be made in detail only on the parts different from the motor control device 5 in FIG. 2, and the same reference numerals are given to the parts that are essentially the same as those in the motor control apparatus 5 in FIG.

  The drive output unit 7 in the motor control device 5 shown in FIG. 3 sets a target current corresponding to the appropriate thrust Fw required for the first linear motor 40 based on the thrust Fm according to the movement command output from the drive control unit 6. Input to the current compensator 7F. The current compensator 7F outputs a control voltage signal corresponding to the current command from the target current and the output current of the power amplifier 7G detected by the current sensor.

  The power amplifier 7G supplies the first linear motor 40 with a drive current that amplifies the current command output from the current compensator 7F and generates a thrust Fw according to the current command. At the same time, the power amplifier 7G obtains a control voltage signal corresponding to the thrust Fs by multiplying the current command for generating the thrust Fw output from the current compensator 7F by the ratio of the distance Lw to the distance Ls shown in Formula 1. The drive current for amplifying the command and generating the thrust Fs in the direction opposite to the desired moving direction is supplied to the second linear motor 50. The ratio of the thrust Fs to the thrust Fw can be changed through the command device 4.

  The drive output unit 7 of the motor control device 5 shown in FIG. 3 does not have the current compensator 7D in the drive output unit 7 of the motor control device 5 shown in FIG. 2, and the power amplifier 7G has the cooperative thrust adjuster 7C and the power amplifier. It can be considered that the function of 7E is included substantially. Therefore, the motor control device shown in FIG. 3 is substantially the same as the motor control device shown in FIG. 2, and the first linear motor 40 for movement and the second linear motor for posture control additionally provided. 50 can be driven and controlled, and there is an advantage that the number of parts can be greatly reduced.

  FIG. 4 shows another modification of the motor control device 5 of FIG. The control system of the motor control device 5 shown in FIG. 4 can be said to be a serial method when the control system of the motor control device 5 shown in FIG. 3 is a parallel method. The following description will be made in detail only on the parts different from the motor control device 5 in FIG. 2, and the same reference numerals are given to the parts that are essentially the same as those in the motor control apparatus 5 in FIG.

  The drive output unit 7 in the motor control device 5 shown in FIG. 4 has a target current corresponding to the appropriate thrust Fw required for the first linear motor 40 based on the thrust Fm according to the movement command output from the drive control unit 6. Input to the current compensator 7H. The current compensator 7H outputs a control voltage signal corresponding to the current command from the target current and the output current of the power amplifier 7I detected by the current sensor.

  The power amplifier 7I supplies a drive current that amplifies the current command output from the current compensator 7H and generates a thrust Fw in a predetermined movement direction according to the current command to the drive circuit of the first linear motor 40. The power amplifier 7I also obtains a control voltage signal corresponding to the thrust Fs by multiplying the current command for generating the thrust Fw output from the current compensator 7H by the ratio of the distance Lw to the distance Ls shown in Formula 1. The driving current for amplifying the command and generating the thrust Fs in the direction opposite to the desired moving direction is supplied to the driving circuit of the second linear motor 50.

  The drive current supplied to the drive circuit of the first linear motor 40 is distributed to the drive current that generates the thrust Fw and the drive current that generates the thrust Fs. The drive circuit supplies the first linear motor 40 with a drive current corresponding to the thrust Fw to drive the first linear motor 40, and simultaneously causes the second linear motor 50 to thrust in the direction opposite to the desired moving direction. A drive current corresponding to Fs is supplied to drive the second linear motor 50.

  The motor control device 5 shown in FIG. 4 shares a drive circuit for the first linear motor 40 and the second linear motor 50. Therefore, the motor control device shown in FIG. 4 is substantially the same as the motor control device shown in FIG. 2 and the first linear motor 40 for movement and the second linear motor for posture control additionally provided. 50 can be driven and controlled, so that the number of parts can be greatly reduced and the configuration can be simplified.

  FIG. 5 schematically shows an outline of the moving device of the conveying device. The control device for controlling the linear motor shown in FIG. 5 will be described using the control device shown in FIG. Hereinafter, the configuration of the moving apparatus according to different embodiments of the present invention will be described with reference to FIGS. 4 and 5. In addition, the apparatus or member substantially the same as FIG. 1 is demonstrated using the same code | symbol fundamentally.

  The moving device includes a moving device main body 1, a driving device 2, and a control device 3. The moving apparatus body 1 includes an entire movable object 10 that moves together with the moving body 10A including the moving body 10A, a traveling platform 20 on which the moving body 10A is movably mounted in the horizontal linear axis direction X, and a guide that guides the moving body 10A. Device 30. The drive device 2 has a linear motor 40 for moving the moving body 10A by outputting a required thrust Fw in a desired movement direction.

  The entire movable object 10 in the present invention refers to the entire object that reciprocally moves along the horizontal linear axis direction X including the load and the attached device and the moving body 10A and the member that moves together with the moving body 10A. . Specifically, in the moving device shown in FIG. 5, the entire movable object 10 includes a moving body 10 </ b> A, a frame 10 </ b> B, an attachment block 10 </ b> C, and a balance body 60. Further, the movable part of the linear motor 40 of the driving device 2 is included in the entire movable object 10.

  In the mobile device according to the embodiment shown in FIG. 5, the mobile body 70 includes the mobile body 10 </ b> A, a load placed on the mobile body 10 </ b> A and an attachment device that may be attached to the mobile body 10 </ b> A. The entire moving body 70 includes a frame 10B and a mounting block 10C. In other words, the entire moving body 70 indicates the entire moving object excluding the balance body 60 from the entire movable object 10. The entire moving body 70 has a predetermined mass Mm defined by design. However, in the description of the calculation shown below, the frame 10B and the mounting block 10C which are not essential members are omitted.

  The moving body 10A reciprocates on the traveling platform 20 in the horizontal linear axis direction X. The moving body 10A is attached and fixed to the upper part of the frame 10B. The moving body 10 </ b> A is moved in a desired moving direction along the horizontal linear axis direction X by the linear motor 40. With the movement of the moving body 10A, the load placed on the moving body 10A also moves. The frame 10 </ b> B is installed to be movable across the traveling platform 20.

  The traveling base 20 is a base on which the moving body 10A is mounted so as to be able to reciprocate. The traveling table 20 in the moving device according to the embodiment is a base having a structure in which a stator of the linear motor 40 of the driving device 2 can be attached and disposed on a lower portion. The traveling platform 20 is horizontally stretched between the support columns so as to be supported by a plurality of support columns (not shown) that are vertically provided on the floor surface. Alternatively, the traveling platform 20 can be suspended horizontally so as to be suspended from the ceiling by an arm member (not shown).

  The linear motor 40 is an electric actuator that outputs a required thrust Fw in a desired movement direction and moves the moving body 10A along the horizontal linear axis direction X in the desired movement direction. The linear motor 40 is disposed below the moving body 10A so that the force point Pm that generates the thrust Fw is always positioned on the straight line Z passing through the center of gravity Gm of the entire moving body 70. In the moving device of the embodiment, the linear motor 40 is disposed on the lower side of the traveling table 20 so as to face the moving body 10A with the traveling table 20 interposed therebetween.

  The primary side excitation coil, which is a mover of the linear motor 40, is attached and fixed to an attachment block 10C that is integrally provided at a lower portion of the frame 10B. The primary side excitation coil is inserted between the pair of permanent magnets so as to be positioned with a predetermined gap in the secondary side permanent magnet that is a stator of the linear motor 40. The secondary permanent magnet is attached and fixed to the lower side of the traveling platform 20 so as to be arranged in parallel with the central axis in the horizontal linear axis direction X of the moving body 10A.

  The balance body 60 is arranged at a position facing the moving body 10A with the traveling table 20 and the moving linear motor 40 interposed therebetween so that the center of gravity Gs is positioned on a straight line Z passing through the center of gravity Gm of the entire moving body 70. Established. The balance body 60 is adjusted to the mass Ms corresponding to the mass Mm of the entire moving body 70 and is detachably provided on the mounting block 10C. The balance body 60 can be directly attached to the frame 10B depending on the structure of the frame 10B. The balance body 60 is attached so as to be suspended from the moving body 10A like a weight. The balance body 60 moves in the horizontal linear axis direction X with the movement of the moving body 10A.

  Therefore, when the mass of the entire moving body 70 is Mm and the mass of the balance body 60 is Ms, from the force point Pm of the mass Mm and the thrust Fw of the linear motor 40 to the center of gravity Gm of the entire moving body 70 as shown in Equation 5. When the product of the distance Lm is equal to the product of the mass Ms and the distance Ls-Lm from the center of gravity Gm of the entire moving body 70 to the center of gravity Gs of the balance body 60, the balance between the entire moving body 70 of mass Mm and the mass Ms. The center of gravity Gw of the entire movable object 10 having the total mass Mw combined with the body 60 coincides with the force point Pm at which the thrust Fw of the linear motor 40 is generated.

  Assuming that the mass Mm of the entire moving body 70 and the distance Lm from the force point Pm where the thrust Fw of the linear motor 40 is generated to the center of gravity Gm of the entire moving body 70 are determined by the structural restrictions of the mechanical device, What can be substantially changed is the mass Ms of the balance body 60. Therefore, in practice, the center of gravity Gw of the entire movable object 10 including the entire movable body 70 and the balance body 60 is obtained by attaching the balance body 60 so as to adjust the mass of the balance body 60 to the mass Ms in which Equation 5 is established. Can be made to coincide with the power point Pw of the linear motor 40.

  Accordingly, the mass Ms of the balance body 60 to be adjusted and attached so that the power point Pm of the linear motor 40 and the center of gravity Gw of the entire movable object 10 coincide with each other, the mass Fs of the linear motor 40 as shown in Expression 6 below. Can be obtained by multiplying the ratio of the distance Lm from the force point Pm to the center of gravity Gm of the moving object 10 to the distance Ls-Lm from the point of force Pm at which the center of gravity is generated to the center of gravity Gs of the balance body 60 by the mass Mm of the entire moving body 70.

  Since it is difficult to change the mass Ms of the balance body 60 directly, the distance Ls− from the force point Pm of the linear motor 40 to the center of gravity Gs is located on the straight line Z in the vertical direction passing through the center of gravity Gm of the entire moving body 70. A plurality of balance bodies 60 having different masses for which Lm is specified are prepared in advance, a balance body 60 having an appropriate mass Ms is selected corresponding to the mass Mm of the entire moving body 70, and a weight of weight is applied to the moving body 10A. The mounting block 10C is interposed so as to be suspended as described above, and is attached to the lower side of the frame 10B.

  In addition, a number of weight blocks of the same shape and the same mass are prepared in which the center of gravity is located on the vertical straight line Z passing through the center of gravity Gm of the entire moving body 70 and the distance from the force point Pm of the linear motor 40 to the center of gravity is specified. In addition, the weight blocks are combined and attached to the frame 30B corresponding to the mass Mm of the entire moving body 70 so as to have an appropriate mass Ms, and the balance body 60 is formed by a plurality of weight blocks. Can do.

  As described above, the center of gravity Gw of the entire movable object 10 including the entire movable body 70 and the balance body 60 is made to coincide with the force point Pm generated by the thrust Fw of the linear motor 40 for movement. The thrust Fw can be accurately applied at the center of gravity Gw of the whole 10. As a result, the moving body 10A can be moved straight while maintaining the posture of the moving body 10A while moving the moving body 10A in a desired moving direction at a set acceleration.

  The control device in the moving device to which the balance body 60 is attached is similar to the configuration in which the second linear motor 50 and the output to the second linear motor 50 are removed from the control device shown in FIG. The command calculator 6A in the drive control unit 6 of the motor control device 5 calculates the target position for each unit time for moving the entire moving body 70 at the set speed and the set acceleration based on the movement command input from the command device 4. And output. The position compensator 6B gives a predetermined position gain to the deviation between the target position and the current position obtained from the position detector 8, and outputs the target speed.

  The speed compensator 6 obtains a target current by applying a predetermined speed gain to the deviation between the target speed and the current speed obtained from the speed detector 9. Since the target current obtained at this time is a target current corresponding to the thrust required to move the entire moving body 70 according to the movement command at the set speed and the set acceleration, the entire moving body 70 and the balance body 60 are combined. The entire movable object 10 is insufficient as a thrust for moving at a set speed and set acceleration.

  The total mass Mw of the entire movable object 10 including the entire movable body 70 and the balance body 60 is the sum of the mass Mm of the entire movable body 70 and the mass Ms of the balance body 60, and the mass Ms of the balance body 60 is several. Therefore, the total mass Mw of the entire movable object 10 can be expressed as in Equation 7.

  Accordingly, the speed compensator 6C has a thrust required to move the entire movable object 10 with respect to a thrust Fm required to move the entire moving body 70 to a target current in which a predetermined speed gain is given to the speed deviation. The ratio of Fw, in other words, the ratio of the distance Ls from the center of gravity Gm of the entire moving body 70 to the center of gravity Gs of the balance body 60 to the distance Ls-Lm from the power point Pm of the linear motor 40 to the center of gravity Gs of the balance body 60 is multiplied. A corrected target current corresponding to the thrust Fw required to move the entire movable object 10 having the total mass Mw in the desired movement direction at the set acceleration is output.

  The current compensator 7H of the drive output unit 7 inputs the target current output from the drive control unit 6 and outputs a control voltage signal corresponding to the current command to the power amplifier 7I. The power amplifier 7I supplies a drive current that amplifies the current command and generates a thrust Fw according to the current command to the linear motor 40.

  By the way, the thrust Fw of the first linear motor 40 required for moving the entire movable object 10 in the moving apparatus of the embodiment shown in FIG. 1 is represented by the product of the mass of the entire movable object 10 and the acceleration. It is. Further, the thrust Fw of the first linear motor 40 is expressed as in Equation 4. The entire movable object 10 at this time corresponds to the entire moving body 70 in the moving apparatus of the embodiment shown in FIG. Therefore, when the mass Mm of the entire movable object 10 and the set acceleration are A, the thrust Fw of the first linear motor 40 is expressed as in Expression 7.

On the other hand, the thrust Fw of the linear motor 40 required for moving the entire movable object 10 in the moving device provided with the balance body 60 is the product of the total mass and the acceleration of the entire movable object 10. Therefore, if the set acceleration is A, the thrust Fw of the linear motor 40 required to move the entire movable object 10 is expressed by the following equation (9).

  If the thrust Fw expressed by Equation 4 is equal to the mass Mm of the entire movable object 10 in the moving device without the balance body 60 and the mass Mm of the entire movable body 70 in the moving device with the balance body 60 are And the thrust Fw shown in Equation 9 are equivalent. Therefore, the total mass Mw of the entire movable object 10 of the moving apparatus provided with the balance body 60 is considerably larger than that of the moving apparatus without the balance body 60, but the thrust Fw is the same. It can be said that the moving device provided with the balance body 60 is advantageous in that the energy loss is smaller than that of the moving device shown in FIG. 1 provided with the linear motor 50 for maintaining the attitude that outputs the thrust Fm.

  However, since the moving device provided with the linear motor for maintaining the posture shown in FIG. 1 can maintain the posture of the moving body only by the operation of the control device, the balance body is attached while adjusting the mass. Compared to a moving device provided with a necessary balance device, it is excellent in handling, and is still beneficial in that it has less design restrictions and is more versatile. Further, since the mass of the entire movable object is sufficiently small, the rigidity required for the carriage, the bearing, the frame and the like may be relatively low, which is effective in that the moving device main body can be made smaller.

  The present invention is not limited to the configuration of the mobile device specifically described in the embodiment, but includes a mobile device that can be achieved by substantially the same means or technique. Several examples of the mobile device according to the embodiment have already been shown, but modifications can be made without departing from the technical idea of the present invention. Moreover, it can implement in combination with a well-known moving apparatus arbitrarily.

  The moving device of the present invention is widely applied to mechanical devices such as a conveying device, a processing machine, an inspection device, a measuring device, and an industrial machine. The mobile device of the present invention has excellent versatility, and is expected to improve productivity by promoting mass production and improve economy by sharing parts and reducing design burden, contributing to the development of various technical fields. To do.

DESCRIPTION OF SYMBOLS 1 Mobile device main body 2 Drive device 3 Control device 10 Whole movable object 10A Moving body 10B Frame 10C Mounting block 20 Traverse 30 Guide device 30A Guide body 30B Guide track 30C Bearing 40 First linear motor 50 Second linear motor

Claims (4)

  A moving body that moves in the direction of a horizontal linear axis on the platform, and a lower point of the moving body so that the power point is located on a vertical straight line that passes through the center of gravity of the entire movable object that moves together with the moving body including the moving body. A first linear motor which is disposed on the side and outputs a required thrust in a desired moving direction to move the moving body, and the carriage and the first linear motor so that a force point is positioned on the straight line. A second linear motor that is disposed at a position opposite to the moving body with a predetermined output in a direction opposite to the moving direction to maintain the posture of the moving body, and the entire movable object The opposite obtained by multiplying the ratio of the distance from the center of gravity of the entire movable object to the power point of the first linear motor to the distance from the center of gravity to the power point of the second linear motor by the thrust of the first linear motor. Predetermined direction of direction Mobile device but comprising a controller for supplying a drive current to the second linear motor to be outputted from the second linear motor.   The control device has a ratio of the distance from the center of gravity of the entire movable object to the power point of the second linear motor to the distance from the power point of the first linear motor to the power point of the second linear motor. The first linear motor outputs a required thrust in the moving direction obtained by multiplying a thrust required to move the entire movable object at a set acceleration assuming that the thrust of the linear motor does not act. The moving device according to claim 1, wherein a driving current is supplied to the first linear motor.   An entire moving body having a predetermined mass, including a moving body that moves in a horizontal linear axis direction on the carriage, a load and an attachment device mounted on the moving body, and passes through the center of gravity of the entire moving body A linear motor disposed below the moving body so that a force point is positioned on a straight line in a vertical direction and moving the moving body by outputting a required thrust in a desired moving direction; and a center of gravity on the straight line A balance body that is detachably disposed at a position facing the moving body with the traveling table and the linear motor interposed therebetween, from the power point to the distance from the power point to the center of gravity of the balance body A balance body attached to be adjusted to a mass obtained by multiplying a ratio of a distance to the center of gravity of the entire moving body by a mass of the entire moving body and suspended from the moving body, and the entire moving body and the balun A control device that supplies a driving current to the linear motor so that a required thrust obtained by multiplying the total mass of the entire movable object combined with the body by a set acceleration is output from the linear motor. apparatus.   The control device is required to move the entire moving body at a set acceleration in a ratio of a distance from the center of gravity of the entire moving body to the center of gravity of the balance body with respect to the distance from the power point to the center of gravity of the balance body. Supplying a drive current to the linear motor such that a required thrust in the moving direction required for moving the entire movable object obtained by multiplying the thrust by the set acceleration is output from the linear motor. The moving device according to claim 3, wherein

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