JP6243530B2 - Positioning device for moving a substrate - Google Patents

Description

  The present invention relates generally to a positioning device that moves, in particular translates and orients, in particular rotates, a substrate in a two-dimensional plane of movement. Furthermore, the present invention relates to a positioning device which is configured as a magnetic wafer stage and which is formed in particular for moving a large area substrate with particularly high precision. Furthermore, the invention relates to a method for translational movement and / or orientation of a substrate using a corresponding positioning device and a computer program product for driving such a positioning device.

  For example, in order to process a substrate for the purpose of manufacturing semiconductor elements for display applications, a relatively large area substrate should be subjected to various surface treatment processes. For example, the surface of such a substrate should be treated mechanically or chemically in order to form a covering or surface structure on the corresponding substrate. In particular, if surface treatment steps such as sputtering, physical vapor deposition or chemical vapor deposition are to be carried out, possibly with plasma assistance, some surface treatment processes can be carried out under clean room conditions. And even in vacuum.

  Since microstructural features, or even nanometric features, should be formed on the substrate at times, the substrate is positioned with very high precision in and perpendicular to the substrate surface. It is necessary to do.

  Due to the requirement that there should be no particles around the substrate, mounting is required to support the substrate and the corresponding movement or travel drive in a non-contact manner. The air support, however, is only conditionally appropriate for a high purity manufacturing environment, because this can cause an adverse air flow in the vicinity of the substrate, which air flow is This is because it may be contrary to the situation where the accuracy required in processing is maintained.

  In addition, there are so-called magnetic wafer stages or magnetic positioning devices. In this case, generally, a plurality of electromagnets are arranged on a carrier displaceable along the base, and these comprise a position sensor and a control circuit. In use, the carrier can be suspended a predetermined distance relative to the base.

  This type of wafer stage is known from Patent Document 1, for example. This positioning device acting in two movement directions has a base and two units displaced in the Y direction, which are symmetrically fixed to the upper end portion of the base. In the units that are displaced in the Y direction, drive motors are arranged so as to be displaceable, and these drive motors are connected to members that are displaced in the X direction. A table for accommodating the wafer is arranged.

  This type of positioning device has proven very good for substrates with side lengths in the range of a few centimeters or a few decimeters. For handling of relatively large substrates that can have a side length size of more than 50 cm or even in the metric range, where possible, they should be fed to different processing stations using a positioning device and are normally distributed In a positioning device based on a magnetic support, the current technical feasibility limit is quickly reached.

  High strength materials and ruggedness are required to implement a magnetic support that operates in vibration over a relatively large metric range and to maintain the required position accuracy, typically in the range of a few micrometers. It is necessary to use the proper components. On the one hand, the relatively large mass components can suppress the resonance phenomenon that occurs because of the magnetic support, and can be shifted to a frequency region that is not relevant to this application.

  However, if over several meters of travel path, with accuracy of a few micrometers, in the Z direction, ie perpendicular to the substrate surface, or in the direction perpendicular to the travel plane or the travel path of the positioning device, When the substrate moves, it is necessary to manufacture the base of the positioning device and the carrier that is supported by being floated on the base with high accuracy.

  In general, a carrier that is displaceably supported by the base is supported by the base only through two support portions provided at opposite ends of the carrier. This point is disclosed in, for example, Patent Document 1. As shown. However, if the length of the traveling path is required and a carrier size of 1 meter or several meters is required, this type of carrier is produced without deflection if it is supported only on the end side. It is almost impossible.

  Even in the case of a rigid H-shaped steel (Double T-shaped steel: Doppel-T-Stahl) carrier having a length of 2 to 4 meters, its own weight causes deflection in the Z direction, and the required Z The positional accuracy in the direction is already exceeded. Furthermore, employing a relatively large size and thus a large mass carrier has the disadvantage that the manufacturing and assembly costs are enormous and this is practically almost impossible to handle. In order to move this type of mass carrier, very large acceleration and deceleration forces must be provided. The speed at which this type of mass carrier can be moved in the first place also decreases as the mass increases.

US Pat. No. 7,868,488 B2 Specification

  Accordingly, it is an object of the present invention to provide an improved positioning device that translates and / or orients a substrate, while allowing a relatively large travel path and thus handling large size substrates without problems. It is to provide a positioning device that enables the above. Here, this positioning device is to provide a particularly high positioning accuracy, in particular without using particularly high-mass components, irrespective of the required size. In addition to this, the positioning device should be particularly lightweight and simple, so it should be cost-effective to manufacture and assemble. Furthermore, this positioning device should allow simple and intuitive maintenance and disassembly of the individual components.

  This task is achieved by the positioning device according to claim 1 and by the method according to claim 10, wherein the positioning device is used to translate and / or orient the substrate. 14 to achieve the computer program product. Here, each advantageous configuration of the invention is the subject of the dependent patent claims.

  The positioning device provided in this respect is provided for translational movement and / or orientation of the substrate and is formed accordingly. For this purpose, the positioning device has a base that extends on the moving surface (x, y). The base has in this case support rails which are oriented parallel to each other, extend in the longitudinal direction and preset the first displacement direction. The positioning device further includes a carrier, which can be displaced in a non-contact manner along a first displacement direction using a drivable magnetic support, in particular along the support rail at the base. It is supported so that it can be displaced. The carrier is supported on at least three support rails in the base using magnetic supports.

  In other words, the carrier is supported by or supported by the base at at least three locations. At this time, at least three support rails of the base are arranged at a distance from each other in a direction (y) perpendicular to the first displacement direction (x). The first displacement direction (x) is in this case preset by the longitudinal direction of the base, in particular the support rails oriented parallel to each other, and coincides with this longitudinal direction.

  By supporting the carrier at the base in three directions perpendicular to the first displacement direction preset by the support rail, the support for the base of the carrier is inherently excessively determined (UEberstiming). When using conventional supports, such as roller bearings or plain bearings, this type of over-determination can be used to move the carrier relative to the base, and in some cases the carrier to the base. It will be inclined to. By employing a drivable and thus adjustable magnetic support, this type of over-determination can be realized without problems.

  By providing at least three support rails perpendicular to the first displacement direction, the distance between the fulcrums where the carrier is so-called self-supporting can be clearly shortened. By supporting the base at a plurality of locations using at least three support rails, it is therefore possible to effectively counter geometric deformations, for example carrier deflection. Here, the support rails are arranged in a direction perpendicular to the first displacement direction and substantially equidistant from each other, the support rails on the outside support the opposite end portions of the carrier, Thus, it is clear that it is particularly advantageous if the intermediate support rails support the part between or in the middle of the carrier.

  Furthermore, the resonance behavior of the base can be improved by at least three and even more support rails. The use of a plurality of support rails that are also rigidly connectable, for example up and down, is advantageous because the inherent stiffness and thus their resonance behavior can be improved.

  According to a further configuration of the invention, the carrier also has at least three support portions, which extend in the longitudinal direction and are oriented parallel to each other along the base support rail. In addition, at least one magnetic support portion is disposed in each of these support portion portions. By using this at least one magnetic support, each support rail is not relative to its Z position, ie perpendicular to the moving plane (x, y) and perpendicular to the first displacement direction (x). Variously positioned in the direction, so that the carrier can be driven absolutely or relative to the support rail, preferably with particularly high precision and very accurately, by appropriately driving the magnetic support It can be oriented in the horizontal direction, i.e. relative to the plane of movement or parallel to the plane of movement.

  According to a further configuration, at least two or more magnetic support portions arranged at a distance from each other in the displacement direction are arranged in the support portion portion of the carrier. These magnetic supports can also be particularly equidistant in the support part of the carrier and can therefore be arranged equidistantly in the displacement direction (x). When each of the at least three support portions is provided with a plurality of magnetic support portions that are spaced from each other in the displacement direction, when viewed as a whole, the two-dimensional An array is created.

  By appropriately driving the magnetic support or the magnetic support array, the carrier can be oriented precisely horizontally or absolutely horizontally with respect to the base, and thus the base support. The carrier can be moved along the rail.

  In order to move the carrier relative to the base, a generally non-contact drive is provided, for example a magnetic drive is provided on the carrier, which is fixed to extend substantially parallel to the support rail Can cooperate with magnet strip.

  According to a further configuration, in order to change the distance between the base and the carrier at least locally in the Z direction which is perpendicular to the plane of movement (x, y), the magnetic supports are separately and from each other. It can be formed independently and / or driven accordingly. By independently applying the corresponding target value separately to the magnetic support part, for example, in the magnetic support part arranged at one end of the support part part, rather than the opposite end part of the corresponding support part part, A greater or lesser distance can be set for the base to orient the carrier relative to the base.

  Whether the carrier is in the displacement direction (x) or in a direction perpendicular to it (y), in particular a plurality of drivable or controllable magnetic supports over the entire moving surface (x, y) In use, by being supported by the base, the carrier can be lifted or lowered locally, i.e. in the region of the individual magnetic supports, i.e. displaced in the Z direction. . In this respect, geometrical undulations of the carrier and / or base which may possibly occur can be effectively compensated and offset by adaptive control of the magnetic support.

  In this way, the flatness of the carrier or its support rails that do not satisfy the given accuracy requirements in the moving plane can be offset by driving or adaptively driving individual magnetic supports. Is especially possible. In this way, the carrier is positioned relative to the base within the tolerance limits preset for the absolute coordinate system, even though the base is relatively inaccurate and inaccurate. The orientation can be oriented or the carrier can be translated or displaced relative to the base accordingly.

  Thus, the adaptive drive or control of the individual magnetic supports distributed over the carrier surface advantageously increases the geometric tolerance limits for the base and the support rails provided on it. Can be lowered. In this way, the manufacturing and assembly costs and weight of the base and / or carrier can be reduced.

  According to a further configuration, the positioning device further comprises a measuring device, which is formed for measuring the Z position of the carrier along the displacement direction (x). A measuring device, preferably formed in a non-contact manner, can be used to measure the height deviation from the required target value of the base and the carrier which may possibly occur. If the carrier has a surface profile that does not meet one of the required geometrical tolerances, for example, and thus exceeds the tolerance limit, a measuring device can be used along the direction of displacement or for each of the carrier This kind of deflection for the displacement position can be derived and can therefore be used to drive or magnetize each magnetic support to be considered.

  In general, the positioning device further comprises a control unit configured to drive the magnetic support in response to the Z position of the carrier derived using the measuring device. In this case, on the one hand, some kind of calibration can be performed at the start of operation of the positioning device. Assuming that the carrier is reproducibly displaceable relative to the base, the height of the base or its support rail along the first displacement direction or the height profile is determined once. However, it may be sufficient when the derived data is stored in the storage unit.

  In this way, for each possible position in the first displacement direction of the carrier at the base, an offset signal or a corresponding calibration value is calibrated for each magnetic support or for at least some of the magnetic supports. This can be derived during the course of this, which can be used for driving with respect to the carrier position and for correcting the height of the magnetic support during the operation of the positioning device.

  It is of course also conceivable for the measuring device to monitor the Z position of the carrier even during operation of the positioning device instead of or in addition to calibration. If it is desirable for the carrier to take a Z position that is outside the tolerance size and deviates from the target value, the measurement device can be used to quantitatively or qualitatively deflect the target value accordingly. The required tolerance size can be detected using at least one or more magnetic supports by supplying to the controller and local control of the distance between the base and the carrier. Can be used to adaptively protect.

  According to a further configuration, the base support rails have contoured portions on the carrier side, each of which is L-shaped in cross section, and these L-shaped contoured portions of the at least three support rails are They are oriented parallel to each other. Generally, the L-shaped contoured portion extending in the Y direction extends at the upper end of the support rail on the carrier side. The contoured part projecting from the support rail in the form of a flange or L, inter alia, cooperates with the magnetic support arranged in the support, in particular in the support part of the support, whereby the support is preset. It is formed so as to float with respect to the base within the gap size and to be displaceable along the base.

  According to a further configuration, the support portion of the carrier is also formed so that the cross section is L-shaped. In particular, the support part of the carrier projects downwardly on the base side, so that this support part surrounds the contoured part of the support rail which projects in an L-shape. The magnetic support arranged on the support part of the carrier cooperates, inter alia, with the side facing downwards of the L-shaped contoured part projecting to the side of the support rail, ie towards the bottom. .

  A particularly simple assembly and disassembly into the base of the carrier takes place by means of the at least three support parts of the carrier and the support rails of the base correspondingly oriented and arranged in an L-shape relative to each other. sell. In the assembled state, the arm extending in the Y direction of the support portion and the support portion rail overlap in the Z direction.

  By displacing the carrier in the direction of the L-shaped arm, when viewed from the Z direction, the engagement of this arm is substantially disengaged, and as a result, the carrier is displaced in a relatively small lateral direction with respect to the base. The carrier can be mechanically disengaged from the base and the carrier can be lifted up accordingly.

  In order to avoid the natural disengagement of the carrier and the base during normal use of the positioning device, for example, the carrier can be provided with a removable or configurable fixing member This penetrates outside the L-shaped arm of the at least one support rail, thus preventing relative movement of the carrier and the base for the orientation of the support rail. For maintenance or assembly purposes, such a fixing member can be configured accordingly or disassembled.

  According to a further configuration, the carrier itself has at least two carrier rails, which are oriented parallel to each other, extend longitudinally and have a second displacement direction (y). Preset. Further, a stand is supported on these carrier rails in a non-contact manner so as to be displaceable along the second displacement direction (y) using a further drivable magnetic support. Between the carrier and a platform that can be displaced relative to the carrier, a support comparable to the support provided between the carrier and the base can be implemented accordingly.

  Providing at least three carrier rails is not necessary in view of the size of the platform, but can be implemented as described above in connection with support of the carrier and base. Due to the support itself being displaceably supported along the second displacement direction, the support itself can be moved by means of an appropriate displacement relative to the support or a corresponding displacement of the support relative to the base (x, Each position can be taken in y).

  The platform can further be provided with a turntable, so that the substrate held on the turntable not only travels to any point on the moving surface, but is arbitrarily oriented or rotated in the moving surface. Can also be done.

  According to a further aspect, the present invention further relates to a method for translationally moving and / or orienting a substrate using the positioning device described above. In the first method step, the Z position of the carrier relative to the movement plane preset by the base of the positioning device is derived along the first displacement direction of the carrier. In this case, a specific Z position can be derived especially for each position of the carrier in the displacement direction (x).

  This derived Z position is then a measure of the geometric deflection of the position of the carrier from the required target value. After deriving the Z position of the carrier along the first displacement direction (x) over the travel path preset by the base support rail, in a further step, ie the positioning device is started. In this case, the individual magnetic support portions that support the carrier at the base portion so as to be displaceable along the first displacement direction without contact are driven.

  The magnetic support is then driven according to the previously derived Z position of the carrier, so that possible position tolerances in the Z direction can be compensated and can be offset accordingly. In this way, the magnetic support can be magnetized differently depending on the position of the carrier, and is calibrated or geometrically current according to the specific displacement position (x). It is possible to set the combined Z position and, accordingly, the gap distance between the carrier and the base following it.

  According to a further configuration of the method, for the base and / or for the carrier as well, the geometric deviation or tolerance from the preset target geometric value for the position or extension in the Z direction is coupled with the measuring device. The compensated control unit is used to compensate for the adaptive drive of the corresponding magnetic support unit. In this case, not only the tolerance of the generally existing components of the base but also the deflection of the base according to the load which can change with each position of the support can be compensated and canceled out in the same way.

  The adaptive drive of the magnetic support can be performed on-the-fly when the positioning device is activated. In this case, the Z position of the carrier can be monitored using, for example, the above-described measuring device. When the deflection exceeds the required tolerance limit, the corresponding magnetic support can be driven accordingly.

  In an alternative or supplementary arrangement, in this case it is also conceivable that the geometry relating to the extension of the base in the Z direction is detected and stored during the calibration process. In this case, not only the shape of the base but also the change in the shape of the base caused by each position of the carrier in contact with the base can be detected during calibration and stored accordingly. As soon as the carrier has traveled through the previously stored X position, the relevant magnetic support is subjected to an offset signal or calibration signal detected during the course of the calibration, so that the carrier eventually becomes its Z It can be kept within the tolerance limits preset for the position and can be displaced.

  According to a further configuration, the Z position of the carrier is derived using at least one laser beam that is non-contact, oriented substantially parallel to the support rail of the carrier and by a detector arranged on the carrier. . In extreme cases, it is also conceivable here that the support rails are oriented away from the horizontal direction. This kind of geometric deflection of the support rail can be compensated almost or completely by controlling the magnetic support in a position-dependent manner with a laser beam forming a geometric reference. .

  According to a further independent aspect, finally, a computer program product for driving the positioning device described above is provided. In general, the computer program product implemented in the control unit, the program means of which is executed by the processor of the control unit, is at least perpendicular to the plane of movement preset by the base of the positioning device, at least on the carrier. Program means for deriving one Z position along the first displacement direction of the carrier. Therefore, this program means is formed to process the signal generated by the measuring device.

  Furthermore, the computer program product has a program means for driving a magnetic support part which supports the carrier at the base part so as to be displaceable along the first displacement direction without contact. This program means is in this case configured to drive the magnetic support relative to each displacement position of the carrier according to the derived Z position of the carrier, whereby the carrier is required with respect to the Z position. Can be kept within the limits of the allowable tolerance.

  It is further noted here that the method and computer program product described above are configured to operate the positioning device described above in a routine manner. In so far, the features and advantages described in connection with the positioning device apply to the method and the computer program product as well, and vice versa.

  Further objects, features and advantageous aspects of the invention will be described on the basis of embodiments with reference to the drawings.

It is a schematic perspective view of a certain positioning device. It is sectional drawing of the positioning device of FIG. It is a schematic side view of the positioning device provided with the carrier in two different positions, and is a view when the magnetic support is not adaptively driven. FIG. 4 is a view equivalent to FIG. 3, but is a view when the magnetic support unit is adaptively driven. FIG. 6 shows a further embodiment of the positioning device in which a carrier is arranged on the carrier that is movable along a second displacement direction. FIG. 6 is a schematic flowchart schematically and very simply illustrating a method for translationally moving a substrate using the positioning device of FIGS.

  The schematic view of FIG. 1 shows a positioning device 10, which has a base 12 with a base frame 14. This base 12 further has three support rails 16, 18, 20 in the illustrated embodiment, which support rails are oriented parallel to each other and extend longitudinally. In addition, the first displacement direction (x) is preset while being linearly formed. The longitudinal ends of these support rails 16, 18, 20 are in this embodiment structurally connected to one another via transverse cross beams 15a, 15b, so that this base 12 is compared. A stable structure without twisting. In particular, the support rails 16, 18, 20 and the cross beams 15 a, 15 b connected transversely thereto form a base frame 14.

  The support rails 16, 18, and 20 are disposed in the moving surface (x, y) that is widened by the base frame 14. Direction (y) (this direction is in this moving plane (x, y) and is perpendicular to the first displacement direction (x) preset by the longitudinal direction of the support rails 16, 18, 20)) Thus, the support rails 16, 18, and 20 are arranged at a distance from each other. At this time, the support rails 16, 18, 20 are movable in the first displacement direction (x) and form a mounting portion or a support function for the carrier 30 supported by the base 12.

  The carrier 30 is supported in at least three places in the base 12 in the Y direction, i.e. perpendicular to the first displacement direction (x), i.e. both outer support rails 16, 20; It is supported by a central support rail 18. This type of support of the carrier 30 on the base 12 is overdetermined. However, by using the magnetic supports 40, 42, 44 to support the carrier 30 to the base 12 in a non-contact manner, this type of over-determination can be achieved with the individual magnetic supports 40, 42, 44 correspondingly. By driving, it can be almost compensated. Here, the various magnetic supports 40, 42, 44 arranged on the carrier 30 are only suggested in FIG. At least two of these magnetic supports 40, 42 are explicitly shown in the cross section of FIG.

  In order to support the carrier 30 on the base 12, contoured portions 17, 19, 21 that engage or intrude inside each other are provided on the support rails 16, 18, 20 as well as on the carrier 30. Therefore, each of the support rails 16, 18, and 20 has an upper end portion on the side of the carrier 30 having L-shaped contoured portions 17, 19, and 21 in cross section, which are simultaneously A mounting portion for the carrier 30 is formed.

  At a distance from the contoured portions 17, 19, 21 in the horizontal direction, the carrier 30 protrudes downward in correspondence with the contoured portion and is formed with an L-shaped cross section, 34 and 36 are formed. The arms extending in the horizontal direction, i.e. in the XY plane, of the contoured parts 17, 19, 21 to the support part 32, 34, 36, respectively, are in the Z direction, i.e. perpendicular to the movement plane (x, y). Although they overlap, they are arranged at a distance from each other.

  As shown in the sectional view of FIG. 2, magnetic support portions 40, 42, 44 are arranged between the above-described arms of the contoured portions 17, 19, 21 and the support portion portions 32, 34, 36. ing. By correspondingly magnetizing the magnetic supports 40, 42, 44, a force acting upward in the Z direction can be applied to the support parts 32, 34, 36, the carrier 30 being It is lifted from the base 12 in a non-contact manner according to the force, and can float without contact through this force.

  For movement along the first displacement direction (x), the base 12 is provided with a drive rail 48 substantially along the support rail 18 at the center, which is the magnetic drive 46 of the carrier 30. And may cooperate to move the carrier along the first displacement direction (x).

  Since the carrier 30 is supported or supported by the base 12 at a plurality of positions in a direction perpendicular to the first displacement direction (x), the length of the carrier that is self-supporting in the Y direction can be effectively shortened. . In this way, it is possible to effectively counteract the deflection of the carrier 30 that may occur in some cases.

  Support determined excessively by supporting at a plurality of positions can be effectively compensated by adaptively driving the individual magnetic support portions 40, 42, 44. As presented in FIGS. 3 and 4, in particular, each of the longitudinally extending support portions 32, 34, 36 of the carrier 30 is distanced from each other along the first displacement direction (x). A plurality of magnetic support portions 40a, 40b, and 40c are provided so as to be arranged. Furthermore, as presented in FIG. 3, the support rail 16 has a corresponding geometric deflection on the side of the carrier 30 from a certain convex curvature or a completely straight configuration.

  The straight extension implies in this case the laser beam of the measuring device 55 drawn by the reference 51. When the carrier 30 is in a substantially central position along the support rail 16, it is substantially horizontally oriented and thus correctly oriented, but this carrier is displaced in the direction of the right end of the support rail 16. At this right end, as indicated by 30 ', sometimes it is clearly deflected from the target position preset by the laser beam 51.

  In this embodiment, the measuring device 55 schematically shown in FIG. 3 includes a laser 50 formed to generate a laser beam 51. In this case, the laser beam 51 is substantially parallel to the support rail 16. As long as it is oriented, the target position of the carrier 30 in the Z direction is marked and preset. In addition, a position sensor 52 is arranged on the carrier 30, which means that the height of the carrier 30 relative to the laser beam 51 can occur if the carrier 30 is displaced relative to the support rail 16. Register the deflection.

  A sensor signal or control signal that can be generated from the sensor 52 is transmitted to the control unit 54, and on this side of the control unit, the individual magnetic support portions 40a, 40b, 40c of the corresponding support portion 32 are adaptively driven. can do. The result of this type of drive can then be seen in FIG. By measuring the deflection of the carrier 30 from the target value in the Z direction, the individual magnetic supports 40a, 40b, 40c of the support part 32 of the carrier 30 are also correspondingly corresponding to the remaining support parts 34, 36. The magnetic support can also be magnetized to compensate for the geometric deflection of the base 12. As can be recognized on the basis of the position of the carrier 30 ′ displaced in the right direction in FIG. 4, this right edge is the original position of the carrier 30 using the corresponding magnetic support part, for example the magnetic support part 40 a. Lifted against.

  For example, the magnetic support 40a has a greater distance d between the carrier 30 'and the base 12 than this distance in the magnetic support 40c taken from the magnetic support in the first displacement direction (x). Can be set to be larger. As an end effect, by adaptively driving the magnetic support according to the position, the carrier 30 is always held within the limits of the required tolerances in the Z direction and is accordingly relative to the base 12. Moved to.

  The configuration of FIG. 5 shows a further configuration of the positioning device 10, in which the carrier 30 has two carrier rails 60, 62 that are spaced relative to each other in a first displacement direction (x). Provided, they extend in the Y direction, ie perpendicular to the first displacement direction (x) and thus along the second displacement direction (y). Between the carrier rails 60, 62, the platform 70 can be displaced in a non-contact manner in the Y direction using at least two magnetic supports 72, 74 which are only suggested. The platform 70 may further be provided with a turntable 76, which is arranged on the substrate 70, which is not explicitly shown in this figure, on the moving surface (x, It is also possible to rotate or orient in y).

  The adaptive drive of the magnetic support portions 40, 42, 44 of the carrier 30 can be similarly transferred to the magnetic support portions 72, 74 of the base 70.

  Finally, in FIG. 6, the course of a method for translationally moving and / or orienting the substrate using the positioning device 10 is presented in a very simplified manner. In the first step 100, first, the Z position of the carrier 30 to the moving surface (x, y) preset by the base 12 is derived. This position can occur relative to the base and also relative to a reference preset by, for example, the laser beam 51. Depending on the derived Z position, in a subsequent step 102, at least one magnetic support 40, 42, 44 is driven in order to compensate for possible geometric deviations in the Z direction of the carrier. sell. Accordingly, the method returns to step 100 again, and the same control can be performed on the carrier displaced in the X direction with respect to the completion of the method for the first time.

  In contrast to this, the carrier 30 continues in all positions where it can travel along the support rails 16, 18, 20, and at each position, the deflection with respect to the Z position of the carrier 30 is derived with respect to the reference 51. Of course, it can be considered. This type of data set is stored in the storage unit of the control unit 54, and in order to compensate for tolerances of the individual magnetic support units 40, 42, 44 when the carrier advances to the corresponding position. You can read this out.

DESCRIPTION OF SYMBOLS 10 Positioning device 12 Base part 14 Base frame part 15a Cross girder 15b Cross girder 16 Support part rail 17 Contoured part 18 Support part rail 19 Contoured part 20 Support part rail 21 Contoured part 30 Carrier 32 Support part part 34 Support part part 36 Support part 40 Magnetic support part 40a Magnetic support part 40b Magnetic support part 40c Magnetic support part 42 Magnetic support part 44 Magnetic support part 46 Magnetic drive part 48 Drive rail 50 Laser 51 Laser beam 52 Sensor 54 Control part 55 Measuring device 60 Carrier rail 62 Carrier rail 70 units 72 Magnetic support part 74 Magnetic support part 76 Turntable

Claims (13)

A positioning device for translationally moving and / or orienting a substrate,
The positioning device includes:
Oriented parallel to one another, or Tsu first with supporting section rails (16, 18, 20) that extends in one displacement direction (x), a base that extends in a movement plane (x, y) (12) When,
A carrier (30),
The carrier (30) is supported on the base (12) so as to be displaceable along the first displacement direction (x) in a non-contact manner using a drivable magnetic support (40, 42, 44). And
The carrier (30) is supported on at least three support rails (16, 18, 20) of the base (12) using the magnetic support (40, 42, 44),
The at least three support rails (16, 18, 20) are arranged at a distance relative to each other in a second displacement direction (y) perpendicular to the first displacement direction (x) ;
The carrier (30) has support portions (32, 34, 36) extending in the first displacement direction (x) and spaced from each other in the first displacement direction (x). A positioning device , wherein at least two magnetic support portions (40a, 40b, 40c) are arranged on each of the support portion portions (32, 34, 36) . It said carrier (30) has at least three of said supporting portions (32, 34, 36), the support portion is extended in the first displacement direction (x), the base (12) Oriented parallel to each other along the support rails (16, 18, 20), the at least three support portions are each provided with at least one magnetic support (40, 42, 44). The positioning device according to claim 1, wherein In order to change the distance (d) between the base (12) and the carrier (30) at least locally in the Z direction perpendicular to the moving plane (x, y), the magnetic support 3. Positioning device according to claim 1 or 2 , wherein (40, 42, 44) are formed separately and independently of one another and / or can be driven accordingly. Furthermore, the having a carrier (30) measuring device (55) which is formed to the Z position measurement along the first displacement direction (x) of any one of claims 1 to 3 The positioning device described. Furthermore, the control unit (54) formed to drive the magnetic support unit (40, 42, 44) according to the Z position of the carrier (30) derived using the measuring device (55). The positioning device according to claim 4 , comprising: The support rails (16, 18, 20) have contoured portions (17, 19, 21) each having an L-shaped cross section on the carrier (30) side, and the contoured portions are mutually connected. 6. The positioning device according to any one of claims 1 to 5 , which is oriented in parallel. The positioning device according to any one of claims 1 to 6 , wherein the support portion (32, 34, 36) of the carrier (30) is formed to have an L-shaped cross section. The carrier (30) has at least two carrier rails (60, 62), the carrier rails oriented parallel to each other and extending in the second displacement direction (y) ,
Thus the carrier rail (60, 62), base (70), with additional drivable magnetic support (72, 74), said second displaceable displacement direction (y) without contact along the it is supported as it is, the positioning device according to any one of claims 1 to 7. A method for translationally moving and / or orienting a substrate using the positioning device (10) according to any one of claims 1 to 8 , comprising:
At least one Z position of the carrier (30) in a direction perpendicular to the movement plane (x, y) defined by the base (12) of the positioning device (10), the first position of the carrier (30); Deriving along the displacement direction (x);
A magnetic support (40, 42, 44) for supporting the carrier (30) by the base (12) so as to be displaceable along the first displacement direction (x) without contact; look including the step of driving in response to the derived Z position of,
The carrier (30) has support portions (32, 34, 36) extending in the first displacement direction (x) and spaced from each other in the first displacement direction (x). Two or more magnetic support portions (40a, 40b, 40c) are disposed on each of the support portion portions (32, 34, 36).
Method. A geometric deviation or tolerance from a defined target geometric value for the position or extension in the Z direction of the base (12) is determined using a control unit (54) coupled to a measuring device (55). 10. Method according to claim 9 , compensated by adaptive driving of the magnetic support (40, 42, 44). Geometric Studies shape related to stretching in the Z direction of the base portion (12) is detected in the course of the calibration, stored as A method according to 請 Motomeko 9 or 10. The Z position (z) of the carrier (30) is at least one laser beam (51) oriented in a non-contact manner and substantially parallel to the support rail (16, 18, 20) of the carrier (30). with, and, wherein is derived by a carrier arranged detector (30) (52) the method according to any one of the 請 Motomeko 9 11. A computer program product for driving the positioner according to any one of claims 1 to 8,
At least one Z position (z) of the carrier (30) in a direction perpendicular to the movement plane (x, y) defined by the base (12) of the positioning device (10), the carrier (30) Program means for deriving along a first displacement direction (x) of
Magnetic supports (40, 42, 44) for supporting the carrier (30) with the base (12) displaceably in the first displacement direction (x) in a non-contact manner are provided on the carrier (30). Program means for driving according to the derived Z position (z) ,
The carrier (30) has support portions (32, 34, 36) extending in the first displacement direction (x) and spaced from each other in the first displacement direction (x). Two or more magnetic support portions (40a, 40b, 40c) are disposed on each of the support portion portions (32, 34, 36).
Computer program product.

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