JP2011119325A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011119325A5 JP2011119325A5 JP2009273157A JP2009273157A JP2011119325A5 JP 2011119325 A5 JP2011119325 A5 JP 2011119325A5 JP 2009273157 A JP2009273157 A JP 2009273157A JP 2009273157 A JP2009273157 A JP 2009273157A JP 2011119325 A5 JP2011119325 A5 JP 2011119325A5
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- cavity
- light
- alkali metal
- atomic oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001340 alkali metals Chemical group 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 23
- 229910052783 alkali metal Inorganic materials 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 238000010030 laminating Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000006059 cover glass Substances 0.000 description 21
- 238000005530 etching Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- CJRQAPHWCGEATR-UHFFFAOYSA-N n-methyl-n-prop-2-ynylbutan-2-amine Chemical compound CCC(C)N(C)CC#C CJRQAPHWCGEATR-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009273157A JP5504851B2 (ja) | 2009-12-01 | 2009-12-01 | 原子発振器及び製造方法 |
| EP10192886A EP2333958A1 (en) | 2009-12-01 | 2010-11-29 | Atomic oscillator and manufacturing method |
| US12/956,193 US8710934B2 (en) | 2009-12-01 | 2010-11-30 | Atomic oscillator and manufacturing method |
| CN2010105729819A CN102118165B (zh) | 2009-12-01 | 2010-11-30 | 原子振荡器及制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009273157A JP5504851B2 (ja) | 2009-12-01 | 2009-12-01 | 原子発振器及び製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010057107A Division JP2011119633A (ja) | 2010-03-15 | 2010-03-15 | 原子発振器の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011119325A JP2011119325A (ja) | 2011-06-16 |
| JP2011119325A5 true JP2011119325A5 (enExample) | 2013-01-24 |
| JP5504851B2 JP5504851B2 (ja) | 2014-05-28 |
Family
ID=43502977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009273157A Expired - Fee Related JP5504851B2 (ja) | 2009-12-01 | 2009-12-01 | 原子発振器及び製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8710934B2 (enExample) |
| EP (1) | EP2333958A1 (enExample) |
| JP (1) | JP5504851B2 (enExample) |
| CN (1) | CN102118165B (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5821439B2 (ja) | 2011-02-16 | 2015-11-24 | セイコーエプソン株式会社 | ガスセルの製造方法 |
| US8624682B2 (en) | 2011-06-13 | 2014-01-07 | Honeywell International Inc. | Vapor cell atomic clock physics package |
| CN102323738B (zh) * | 2011-07-20 | 2014-04-02 | 中国科学院上海微系统与信息技术研究所 | 一种采用mems工艺制作的槽型原子气体腔及其构造的原子钟物理系统 |
| US9568565B2 (en) * | 2013-07-23 | 2017-02-14 | Texas Instruments Incorporated | Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices |
| WO2015019471A1 (ja) * | 2013-08-08 | 2015-02-12 | 株式会社日立製作所 | 磁場計測装置 |
| JP2015118962A (ja) * | 2013-12-16 | 2015-06-25 | セイコーエプソン株式会社 | 量子干渉装置、原子発振器、電子機器および移動体 |
| JP6323650B2 (ja) * | 2013-12-20 | 2018-05-16 | セイコーエプソン株式会社 | 面発光レーザーおよび原子発振器 |
| US9454135B2 (en) * | 2014-06-19 | 2016-09-27 | Texas Instruments Incorporated | Manufactureable long cell with enhanced sensitivity and good mechanical strength |
| JP6488599B2 (ja) * | 2014-09-08 | 2019-03-27 | セイコーエプソン株式会社 | 量子干渉装置、原子セルの製造方法および電子機器 |
| US9639062B2 (en) * | 2015-03-30 | 2017-05-02 | Texas Instruments Incorporated | Vapor cell and method for making same |
| US10718661B2 (en) * | 2017-06-14 | 2020-07-21 | Texas Instruments Incorporated | Integrated microfabricated vapor cell sensor with transparent body having two intersecting signal paths |
| US10364144B2 (en) * | 2017-11-17 | 2019-07-30 | Texas Instruments Incorporated | Hermetically sealed package for mm-wave molecular spectroscopy cell |
| US10370760B2 (en) * | 2017-12-15 | 2019-08-06 | Texas Instruments Incorporated | Methods for gas generation in a sealed gas cell cavity |
| US11600581B2 (en) | 2021-04-15 | 2023-03-07 | Texas Instruments Incorporated | Packaged electronic device and multilevel lead frame coupler |
| US12444702B2 (en) | 2021-08-02 | 2025-10-14 | Texas Instruments Incorporated | Flip-chip enhanced quad flat no-lead electronic device with conductor backed coplanar waveguide transmission line feed in multilevel package substrate |
| US12489211B2 (en) | 2023-03-15 | 2025-12-02 | Texas Instruments Incorporated | Electronic device with patch antenna in packaging substrate |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6806784B2 (en) * | 2001-07-09 | 2004-10-19 | The National Institute Of Standards And Technology | Miniature frequency standard based on all-optical excitation and a micro-machined containment vessel |
| US6900702B2 (en) | 2002-08-14 | 2005-05-31 | Honeywell International Inc. | MEMS frequency standard for devices such as atomic clock |
| US7400207B2 (en) * | 2004-01-06 | 2008-07-15 | Sarnoff Corporation | Anodically bonded cell, method for making same and systems incorporating same |
| DE602005027217D1 (de) * | 2004-07-13 | 2011-05-12 | Draper Lab Charles S | Vorrichtung zum aussetzen einer vorrichtung in chipgrösse und einem atomuhrensystem |
| CN100580584C (zh) * | 2005-07-21 | 2010-01-13 | 精工爱普生株式会社 | 便携式钟表以及电子设备 |
| US7468637B2 (en) * | 2006-04-19 | 2008-12-23 | Sarnoff Corporation | Batch-fabricated, RF-interrogated, end transition, chip-scale atomic clock |
| US7619485B2 (en) * | 2007-01-31 | 2009-11-17 | Teledyne Scientific & Imaging, Llc | Compact optical assembly for chip-scale atomic clock |
| CN201266923Y (zh) * | 2008-09-09 | 2009-07-01 | 北京七维航测科技发展有限公司 | Gps组合时间频率仪 |
-
2009
- 2009-12-01 JP JP2009273157A patent/JP5504851B2/ja not_active Expired - Fee Related
-
2010
- 2010-11-29 EP EP10192886A patent/EP2333958A1/en not_active Withdrawn
- 2010-11-30 US US12/956,193 patent/US8710934B2/en active Active
- 2010-11-30 CN CN2010105729819A patent/CN102118165B/zh not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5504851B2 (ja) | 原子発振器及び製造方法 | |
| JP2011119325A5 (enExample) | ||
| CN102025335B (zh) | 压电振动装置以及压电振动装置的制造方法 | |
| JP4707725B2 (ja) | パッケージ型圧電振動子及びパッケージ型圧電振動子の製造方法 | |
| US20110265298A1 (en) | Method for manufacturing piezoelectric resonator device | |
| JP4864152B2 (ja) | 表面実装用の水晶振動子 | |
| JP4938124B2 (ja) | 水晶デバイス | |
| JP2009283526A (ja) | ガスセルの製造方法及びガスセル | |
| JP6780718B2 (ja) | 圧電振動デバイス | |
| JP2019068462A (ja) | 圧電振動デバイス | |
| US11342897B2 (en) | Piezoelectric resonator device and method for manufacturing piezoelectric resonator device | |
| JP5239784B2 (ja) | 圧電振動デバイス | |
| JP2011119633A (ja) | 原子発振器の製造方法 | |
| JP2007251601A (ja) | 小型圧電発振器、小型圧電発振器の製造方法 | |
| JP2008182468A (ja) | 圧電振動デバイスの製造方法 | |
| JP2013026506A (ja) | 電子部品収納用パッケージおよび電子装置 | |
| JP2013009280A (ja) | 圧電振動デバイス用蓋体および当該蓋体を用いた圧電振動デバイス | |
| JP2007235289A (ja) | 圧電発振器 | |
| JP2013120762A (ja) | 蓋体、パッケージ、電子部品及びパッケージの製造方法 | |
| US20230291381A1 (en) | Vibrator device and method for manufacturing vibrator device | |
| JP4780700B2 (ja) | 素子保護用電子部品およびその製造方法 | |
| JP4946329B2 (ja) | 圧電デバイス | |
| JP6077386B2 (ja) | 圧電振動子の製造方法 | |
| JP2010171241A (ja) | 電子デバイス及び電子デバイスの製造方法 | |
| JP2009021726A (ja) | 表面実装用の水晶発振器 |