JP2011094189A - Mechanical component and method of manufacturing mechanical component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mechanical component in which eutectoid of a fibrous body is carried out in a state of being uniformly dispersed inside and which exhibits excellent wear resistance. <P>SOLUTION: A conductive film 11 is formed on the surface of a silicon substrate (base material) 10. A mixed layer 14 formed by dispersing the fibrous body 12 inside a photosensitive material 13, that is a photoresist layer having the fibrous body 12 is formed on the conductive film 11. Electroforming grooves 15 in a state that the fibrous bodies 12 are innumerably projected from the inner wall surface are formed by exposure and development. The electroforming is carried out in such a state to remove electroformed bodies 25 overflown from the electroforming grooves 15. Further, the mixed layer 14, the conductive film 11 and the silicon substrate 10 are removed and the excess portion of the fibrous bodies 12 projected from the outer surface of the electroformed body 25 is removed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a machine part, and more particularly to a machine part suitable as a part for a small precision machine such as a watch and a method for manufacturing the machine part.

A mechanical timepiece, which is one of small precision machines, uses a great number of gears that are mechanical parts. As represented by this type of gear, many machine parts are known that are formed in a complicated and precise shape.
Conventionally, this type of mechanical component has been mainly manufactured by machining such as punching, but recently, a method of manufacturing using electroforming has been adopted. This is because the mechanical tolerance is smaller than that of machining, and even a complicated outer shape can be manufactured with high accuracy. Therefore, this method is particularly suitable for manufacturing fine and precise mechanical parts such as a gear for a watch.

  However, the electroformed material has a characteristic that the wear resistance is inferior to that of a normal rolled material. Therefore, when machine parts are manufactured using electroforming, the wear resistance tends to be poor. For this reason, improvements and contrivances for improving the wear resistance have been demanded. In particular, in the case of a timepiece gear, a high wear resistance is required because the number of sliding is very large due to the structure of the timepiece. Therefore, when manufacturing sliding parts using electroforming, increasing the wear resistance is regarded as important.

Therefore, as a measure to increase wear resistance, wear resistance is improved by composite plating (electroforming) in which eutectoids such as fine particles and fibrous bodies are included in the plating solution and these are co-deposited on the grown metal. A method of improving is known (see Patent Document 1).
According to this method, since the eutectoid and the metal can be co-deposited, the strength can be increased and the wear resistance can be increased.

JP 2009-101441 A

By the way, when improving abrasion resistance by the above-mentioned method, it is necessary to co-deposit the eutectoid uniformly without unevenness. For this purpose, the eutectoid must be uniformly dispersed in the plating solution. However, since these eutectoids are likely to behave depending on the flow of the plating solution, it has been difficult to uniformly disperse them.
In particular, when a fibrous body is used as the eutectoid, the length tends to depend on the flow of the plating solution. And it is easy to get entangled by the contact of fiber bodies, and the tendency to aggregate locally is strong. Therefore, it has been particularly difficult to uniformly disperse in the plating solution. In this regard, when fine particles are used as the eutectoid, it is easier to disperse than in the case of a fibrous body, but on the other hand, it is inferior in strength.

  As described above, in order to improve the wear resistance, it is preferable to employ the fibrous body as a eutectoid, but it is difficult to uniformly disperse it in the plating solution. As a result, the wear resistance is insufficient.

In addition, in order to disperse the eutectoid as uniformly as possible in the plating solution, a dispersion liquid such as a surfactant (a solution for preventing the eutectoid from aggregating) may be mixed in the plating solution, or the eutectoid itself. In addition, it is possible to carry out a pretreatment for preventing the above-mentioned aggregation in advance, but it is time-consuming and cannot be performed efficiently.
Further, since the eutectoid is mixed in the plating solution, it is necessary to manage the concentration of the eutectoid, resulting in inconvenience that it is difficult to manage the plating solution. In addition, when the dispersion liquid is mixed in the plating liquid, the management of the plating liquid becomes more difficult.
Furthermore, since it is necessary to stir the plating solution after the eutectoid is mixed in the plating solution, it is difficult to control the amount of the precipitated precipitate in the plating film to determine how much the eutectoid is deposited. .

The present invention has been made in view of such circumstances, and its purpose is to provide a mechanical component in which the fibrous body is eutectoidally dispersed in the interior and can exhibit excellent wear resistance. Is to provide.
In addition, the above machine parts can be efficiently manufactured by a method using electroforming, and can be easily manufactured without mixing of dispersion liquid, pretreatment, management of electroforming liquid and the like as in the past. It is to provide a method for manufacturing a part.

The present invention provides the following means in order to solve the above problems.
The mechanical component according to the present invention includes an electroformed part formed to a predetermined thickness by electroforming, a plurality of fiber bodies dispersed throughout the electroformed part and eutectoid in the electroformed part, It is characterized by having.

  The method of manufacturing a mechanical component according to the present invention includes an electroformed part formed to a predetermined thickness, and a plurality of fiber bodies dispersed throughout the electroformed part and eutectoid in the electroformed part, A forming step of forming a mixed layer in which the fibrous body is dispersed in a photosensitive material on a conductive film formed on a surface of a base material, and through a mask An exposure process for partially exposing the mixed layer; developing the exposed mixed layer to expose the conductive film following the outer shape of the electroformed part; and part of the fibrous body from an inner wall surface A developing step for forming an electroformed groove projecting from the electrode, and performing electroforming using the conductive film as an electrode, while taking in the fibrous body projecting from the inner wall surface onto the conductive film exposed in the electroformed groove It is an electroformed body that deposits metal and at least completely closes the electroformed groove. An electroforming process that grows up to a thickness, and a thickness adjusting process that removes the electroformed body overflowing from the electroformed groove and adjusts the thickness so that the thickness of the remaining electroformed body becomes the thickness of the electroformed part. And removing the excess portion protruding from the outer surface of the electroformed body out of the fibrous body taken into the electroformed body after the thickness-adjusted electroformed body is taken out. It is characterized by.

  In the present invention, first, a forming step of forming a mixed layer in which a fibrous body is dispersed inside a photosensitive material is performed on a conductive film formed on the surface of a substrate. In particular, unlike a plating solution that is a liquid, the photosensitive material is in the form of a paste having a viscosity, so that it does not flow easily, and the fibrous body mixed therein can be uniformly dispersed. Note that the mixed layer is formed so as to have a thickness equivalent to or greater than the thickness of the electroformed part.

Next, an exposure process is performed in which a mask is set above the mixed layer, and the mixed layer is partially exposed through the mask. Next, a development process is performed in which the partially exposed mixed layer is developed to dissolve either the exposed area or the unexposed area. Thereby, the mixed layer is partially removed following the outer shape of the electroformed part, and an electroformed groove in which the conductive film is exposed following the outer shape of the electroformed part can be formed.
In particular, as described above, since the fibrous body is uniformly dispersed in the photosensitive material, the photosensitive material is completely dissolved by development, but the fibrous body remains without being dissolved. Therefore, a part of the fibrous body remains from the inner wall surface of the electroformed groove. That is, it is possible to form an electroformed groove in which a part of the fibrous body protrudes innumerably from the inner wall surface.

  Next, after the whole is immersed in an electroforming solution, an electroforming process is performed in which electroforming is performed using the conductive film as an electrode. Then, a metal deposits on the conductive film exposed in the electroformed groove, and this metal gradually grows. And a metal is made to grow until it becomes the electroformed body which plugs up at least the electroformed groove. At this time, since the electroformed groove follows the outer shape of the electroformed part, the grown electroformed body also follows the outer shape of the electroformed part. In particular, since a part of the fiber bodies protrudes innumerably from the inner wall surface in the electroformed groove, the metal can be deposited while taking in these fiber bodies during electroforming. Therefore, the fiber body co-deposited with the grown metal is contained in the electroformed body in a state of being uniformly dispersed throughout.

Next, after electroforming is completed, a thickness adjustment step is performed in which the electroformed body overflowing from the electroformed groove is removed and the thickness is adjusted by polishing or the like so that the thickness of the remaining electroformed body becomes the thickness of the electroformed part. Do. Finally, after removing the electroformed body whose thickness has been adjusted, a removal step is performed to remove excess portions protruding from the outer surface of the electroformed body from the fibrous body taken into the electroformed body.
As a result, an electroformed part produced by electroforming and a plurality of fiber bodies dispersed throughout the electroformed part and co-deposited in the electroformed part are manufactured. Can do.

In particular, according to this manufacturing method, fiber bodies that are difficult to be uniformly eutected by the usual composite plating can be easily and surely co-deposited in a state of being uniformly dispersed inside the electroformed part. Can do. Therefore, the strength of the electroformed part can be increased over the whole, and excellent wear resistance can be exhibited.
Moreover, since it is not necessary to mix a dispersion liquid into an electroforming liquid or to perform pre-processing etc. on the fiber body itself, it can manufacture efficiently. Moreover, since it is not necessary to change anything about the electroforming liquid, it is easy to manage the electroforming liquid. Also in this respect, efficient production can be performed.

  In the mechanical component according to the present invention, in the mechanical component according to the present invention, at least a part of the side surface of the electroformed part is a sliding surface on which another component is slid, and the side surface holds lubricating oil. A plurality of possible oil retaining holes are formed.

  In the present invention, since at least a part of the side surface of the electroformed part is a sliding surface, it can be used as a sliding component such as a gear. In particular, since a plurality of oil retaining holes are formed on the side surface including the sliding surface, the lubricating oil can be retained. Accordingly, it is possible to effectively reduce the frictional resistance generated during sliding. Therefore, it can be used as a sliding component having excellent durability.

  The method for manufacturing a mechanical component according to the present invention is the above-described method for manufacturing a mechanical component according to the present invention, wherein, in the forming step, an unmixed layer made of the photosensitive material is formed on the conductive film, and then the unmixed The mixed layer is formed on the layer.

In the present invention, in the forming step, first, a fibrous body is not mixed, and an unmixed layer made of only a photosensitive material is formed on the conductive film. Thereafter, a mixed layer is formed on the unmixed layer. Therefore, an unmixed layer can be interposed between the mixed layer and the conductive film, and the fibrous body contained in the mixed layer can be prevented from directly contacting the conductive film.
Here, when the fibrous body is in direct contact with the conductive film, a part of the conductive film may be blocked by the fibrous body and not exposed when the electroformed groove is formed by the development process. However, by first forming an unmixed layer on which the fibrous body is not mixed on the conductive film, there is no such concern, and the conductive film can be completely exposed by the development process. Therefore, the machine part can be manufactured more precisely.

  The method for manufacturing a mechanical component according to the present invention is characterized in that, in the above-described method for manufacturing a mechanical component according to the present invention, the fibrous body is formed of an optically transparent material.

  In the present invention, since the fiber body is a light-transmitting material formed of an optically transparent material, the mixed layer can be reliably exposed without light being blocked by the fiber body during exposure. Therefore, the electroformed groove can be formed with higher accuracy, and as a result, the machine part can be manufactured more precisely.

  The method for manufacturing a machine part according to the present invention is the above-described method for manufacturing a machine part according to the present invention, wherein, in the removing step, an excess portion of the fibrous body is removed by chemical dissolution, and the electroforming is performed by the dissolution. A plurality of oil retaining holes capable of retaining lubricating oil are formed on the side surface of the body.

In the present invention, in the above-described removal step (step of removing the excess portion of the fiber body protruding from the outer surface of the electroformed body), the excess portion of the fiber body is not chemically processed such as polishing but chemically processed. Remove by complete dissolution. Then, in addition to the surplus part which protruded from the outer surface of the electroformed body, the fiber body is dissolved from the outer surface to the part which slightly enters the inside of the electroformed body. Thereby, a several recessed part can be formed in the side surface of an electroformed part, and these recessed parts can be functioned as an oil retaining hole which can hold | maintain lubricating oil.
Therefore, the side surface of the electroformed part can effectively reduce the frictional resistance generated during sliding, and can be used as a sliding surface, and mechanical parts are preferably used as sliding parts such as gears. be able to.

According to the mechanical component according to the present invention, since the fiber body co-deposited together with the metal is uniformly dispersed inside, the strength can be increased over the whole, and excellent wear resistance can be exhibited. . In particular, it can be suitably used for a gear for a watch having a large number of sliding times.
Moreover, according to the manufacturing method of the machine component which concerns on this invention, it can manufacture efficiently by the method using electroforming. Moreover, there is no need for mixing of the dispersion, pretreatment of the fiber body, management of the electroforming liquid, and the like as in the prior art.

The top view of the movement front side of the mechanical timepiece which has the 2nd wheel which is a machine part concerning the present invention (a part of parts are omitted and a receiving member is shown with a virtual line). It is a top view of the center wheel & pinion shown in FIG. FIG. 3 is an enlarged top view of the vicinity of a tooth portion of the center wheel & pinion shown in FIG. It is a flowchart at the time of manufacturing the 2nd wheel shown in FIG. It is a figure which shows 1 process at the time of manufacturing the center wheel shown in FIG. 2, Comprising: It is a figure of the state which formed the electrically conductive film on the silicon substrate. It is a figure of the state which formed the mixed layer which disperse | distributed the fiber body inside the photosensitive material on the electrically conductive film shown in FIG. It is a top view of the photoresist mask used at the time of exposure. It is a figure which shows the state which set the photoresist mask shown in FIG. 7 above the mixed layer. It is a figure which shows the state which formed the electroformed groove | channel in the mixing layer by exposure and image development after the state shown in FIG. It is a figure which shows the state which immersed the whole silicon substrate in the electroforming liquid after the state shown in FIG. It is a figure which shows the state which electrocasted after the state shown in FIG. 10, and made the electrocast body grow in the electrocast groove. It is a figure which shows the state which adjusted the thickness of the remaining electroformed body while removing the electroformed body which overflowed from the electroformed groove | channel after the state shown in FIG. It is a figure which shows the state which removed the silicon substrate, the electrically conductive film, and the mixed layer after the state shown in FIG. 12, and took out the electrocasting body. It is a figure which shows the state which removed the excess part of the fiber body which protruded from the electroformed body after the state shown in FIG. It is a figure which shows the modification of the manufacturing method of the mechanical components based on this invention, Comprising: After forming the unmixed layer which consists only of photosensitive materials on a electrically conductive film, the state which formed the mixed layer on the unmixed layer FIG. It is a figure which shows the modification of the manufacturing method of the machine component which concerns on this invention, Comprising: While removing the excess part of the fiber body which protruded from the electroformed body by chemical melt | dissolution, a plurality of oil retaining holes were formed in the side surface by the melt | dissolution. It is a figure of the state formed. It is the perspective view which expanded the tooth | gear part vicinity of the center wheel & pinion produced by the method shown in FIG. It is a figure which shows the modification of the machine component which concerns on this invention, Comprising: It is a perspective view which shows a part of escape wheel. It is a figure which shows the modification of the machine component which concerns on this invention, Comprising: It is a perspective view which shows a part of back pressing.

  Hereinafter, an embodiment of a mechanical component and a manufacturing method thereof according to the present invention will be described with reference to FIGS. In this embodiment, a second wheel which is one of the gears constituting the mechanical timepiece will be described as an example of the mechanical part.

  First, a mechanical timepiece will be described with reference to FIG. FIG. 1 is a plan view of the movement front side. As shown in FIG. 1, a movement 100 of a mechanical timepiece has a base plate 102 constituting a substrate of the movement 100. A winding stem 110 is rotatably incorporated in the winding stem guide hole 102 a of the main plate 102. The position of the winding stem 110 in the axial direction is determined by a switching device including a setting lever 190, a yoke 192, a yoke spring 194, and a back presser 196. The chisel wheel 112 is rotatably provided on the guide shaft portion of the winding stem 110. When the winding stem 110 is rotated in a state where the winding stem 110 is in the first winding stem position (0th stage) closest to the inside of the movement 100 along the rotation axis direction, the spelling is not illustrated. The chichi wheel 112 rotates through the rotation of the car. The round hole wheel 114 is rotated by the rotation of the chichi wheel 112. Further, the square hole wheel 116 is rotated by the rotation of the round hole wheel 114. By rotating the square hole wheel 116, the mainspring (not shown) housed in the barrel complete 120 is wound up.

  The center wheel & pinion 124 is rotated by the rotation of the barrel complete 120. The escape wheel & pinion 130 rotates through the rotation of the fourth wheel 128, the third wheel 126, and the second wheel 124. The barrel wheel 120, the second wheel 124, the third wheel 126, and the fourth wheel 128 constitute a front wheel train. The escapement and speed control device for controlling the rotation of the front train wheel is composed of a balance with hairspring 140, escape wheel 130, and ankle 142.

  When the center wheel & pinion 124 rotates, a cylindrical pinion (not shown) simultaneously rotates based on the rotation, and a minute hand (not shown) attached to this pinion pin displays “minute”. Further, the hour wheel (not shown) is rotated through the rotation of the minute wheel based on the rotation of the hour pinion, and the hour hand (not shown) attached to the hour wheel displays “hour”.

  The barrel wheel 120 described above is rotatably supported with respect to the main plate 102 and the barrel holder 160. The second wheel 124, the third wheel 126, the fourth wheel 128, and the escape wheel 130 are supported rotatably with respect to the main plate 102 and the train wheel bridge 162, respectively. The ankle 142 is supported so as to be rotatable with respect to the main plate 102 and the ankle receiver 164.

Next, the second wheel & pinion 124 of this embodiment will be described in more detail.
As shown in FIGS. 2 and 3, the second wheel & pinion 124 is driven into the center of the gear portion 124a and a metal gear portion (electroformed portion) 124a formed to a predetermined thickness by electroforming. The shaft member 125 is mainly configured.
FIG. 2 is a plan view of the center wheel & pinion 124. FIG. 3 is an enlarged top view of the vicinity of the gear portion 124 b of the center wheel & pinion 124.

  The gear portion 124a is a plate-like member whose upper surface and lower surface are flat surfaces, and has a plurality of gear portions 124b along the periphery. The plurality of gear portions 124 b mesh with the pinion portion of the third wheel & pinion 126. At this time, the side surface of the gear portion 124b is a sliding surface on which the pinion portion of the third wheel & pinion 126 comes into contact and slides. That is, the entire side surface of the gear portion 124a is a sliding surface.

Further, inside the gear portion 124a, there are a plurality of fiber bodies 12 that are uniformly dispersed throughout and co-deposited with the metal of the gear portion 124a. The fiber body 12 of this embodiment is an optically transparent glass fiber, and has a size of, for example, a diameter of about 1 μm to several tens of μm and a length of about 10 μm to 1 cm.
In FIG. 3, the length of the fibrous body 12 is merely an image. The fibrous body 12 is contained in a state where one of the two terminals is in contact with the outer peripheral surface or the inner peripheral surface of the gear portion 124a.
The gear portion 124a is uniformly enhanced throughout the entire length by these fiber bodies 12, and exhibits extremely excellent wear resistance. This point will be described later.

  The shaft member 125 is a member attached by being driven into a holding hole 124c provided at the center of the gear portion 124a, and the central axis thereof is the same as the central axis of the gear portion 124a. An upper shaft portion (not shown) is provided at the upper end portion of the shaft member 125, and a lower shaft portion and an abacus ball portion (not shown) are provided at the lower end portion. A pinion portion 125a is provided between the gear portion 124a and the lower shaft portion. The pinion portion 125a meshes with the barrel wheel of the barrel complete 120, thereby transmitting the rotational force of the barrel gear to the shaft member 125 and rotating the gear portion 124a.

Next, a method for manufacturing the above-described second wheel & pinion 124 will be described below with reference to the flowchart shown in FIG.
The manufacturing method of this embodiment includes a forming step (S1), an exposure step (S2), a developing step (S3), an electroforming step (S4), a thickness adjusting step (S5), and a removing step (S6). This is a method of manufacturing by performing. Hereinafter, each of these steps will be described in detail.

First, a formation process (S1) is performed.
First, as shown in FIG. 5, after preparing a silicon substrate (base material) 10, a conductive film 11 is formed on the surface of the silicon substrate 10. The conductive film 11 can be formed using, for example, gold, silver, copper, nickel, or the like. Moreover, as a formation method, various film-forming methods, such as sputtering, vapor deposition, and electroless plating, can be used, for example. Moreover, as a film thickness of the electrically conductive film 11, it is preferable that it is the range of several nm-several micrometers, for example.

  Next, as shown in FIG. 6, a mixed layer 14 in which the fibrous body 12 is dispersed inside the photosensitive material 13, that is, a photoresist film containing the fibrous body 12 is formed on the conductive film 11. Specifically, first, a plurality of glassy fiber bodies 12 are mixed into the paste-like photosensitive material 13 at a predetermined ratio (a ratio of several% to several tens% with respect to the weight ratio of the photosensitive material 13). The fiber body 12 is dispersed by stirring or the like. Then, the mixed layer 14 is formed by applying the photosensitive material 13 in which the fibrous body 12 is dispersed by a screen printing method or the like.

In particular, unlike the plating solution that is a liquid, the photosensitive material 13 is in a paste form having a viscosity and is difficult to flow, so that the fibrous body 12 mixed therein can be uniformly dispersed. it can. In addition, when forming the mixed layer 14, it forms so that it may become thickness comparable as the thickness of the gear part 124a, or more. The photosensitive material 13 may be either a positive type or a negative type, but in the present embodiment, a case where a negative type is used will be described as an example.
At this point, the forming step (S1) is finished.

Next, an exposure step (S2) is performed.
First, as shown in FIG. 7, a photoresist mask (mask) M is prepared which is patterned into the shape of the gear portion 124a and is opened in other regions. Then, as shown in FIG. 8, the photoresist mask M is set above the mixed layer 14.
In FIG. 8, the photoresist mask M shown in FIG. 7 is shown in a cross-sectional view taken along line AA. At this time, in order to make the drawings easy to see, the sizes and intervals are changed. The same applies to the subsequent drawings.

After setting the photoresist mask M, light is irradiated from above the mask M, and the mixed layer 14 is partially exposed through the photoresist mask M. In the case of this embodiment, an area that is not masked by the photoresist mask M is exposed. At this time, since the fibrous body 12 included in the mixed layer 14 is glass and is optically transparent and light transmissive, exposure can be reliably performed without light being blocked by the fibrous body 12. .
At this point, the exposure process (S2) is completed.

Next, a developing process (S3) is performed.
That is, after removing the photoresist mask M, the exposed mixed layer 14 is developed using a developer (not shown). Then, since the photosensitive material 13 is a negative type, as shown in FIG. 9, the area | region which is not exposed is melt | dissolved. Thus, the mixed layer 14 is partially removed following the outer shape of the gear portion 124a, and the electroformed groove 15 where the conductive film 11 is exposed can be formed following the outer shape of the gear portion 124a.
In particular, since the fiber body 12 is uniformly dispersed in the photosensitive material 13 as described above, the photosensitive material 13 is completely dissolved by development, but the fiber body 12 remains without being dissolved. . Therefore, a part of the fiber body 12 is left protruding from the inner wall surface of the electroformed groove 15. That is, it is possible to form the electroformed groove 15 in which the fibrous body 12 protrudes innumerably from the inner wall surface.
At this point, the developing process (S3) is finished. In addition, the mixed layer 14 in the state in which the electroformed groove 15 is formed is used as an electroforming mold.

Next, an electroforming process (S4) is performed.
First, as shown in FIG. 10, the entire silicon substrate 10 is immersed in the electroforming liquid W stored in the processing tank 20. In addition, in performing this electroforming process (S4), the electroforming liquid W is selected according to the metal material which should be electroformed. For example, when nickel electroforming is performed, a sulfamic acid bath, a watt bath, a sulfuric acid bath, or the like is used.

  If nickel electroforming is performed using a sulfamic acid bath, a sulfamic acid bath containing nickel sulfamate hydrate as a main component is placed in the treatment tank 20. Further, the anode electrode 21 made of a metal material to be electroformed is immersed in a sulfamic acid bath. As the anode electrode 21, for example, a plurality of balls made of a metal material to be electroformed are prepared, and the metal balls are put in a metal cage made of titanium or the like.

  Then, after immersing the silicon substrate 10 in the sulfamic acid bath, the conductive film 11 formed on the silicon substrate 10 is connected to the cathode of the power source, and the anode electrode 21 is connected to the anode of the power source to start electroforming. . Then, the metal constituting the anode electrode 21 is ionized and moves in the sulfamic acid bath, and is deposited as a metal on the conductive film 11 exposed in the electroformed groove 15, and this metal gradually grows. And as shown in FIG. 11, a metal is made to grow until it becomes the electroformed body 25 which plugs up the electroformed groove | channel 15 completely at least.

  At this time, since the electroformed groove 15 follows the outer shape of the gear portion 124a as described above, the grown electroformed body 25 also follows the outer shape of the gear portion 124a. In particular, since a part of the fiber body 12 protrudes innumerably from the inner wall surface in the electroformed groove 15, the metal can be deposited while taking up these fiber bodies 12 during electroforming. Accordingly, the fiber body 12 eutectoid in the grown metal is contained in the electroformed body 25 in a state of being uniformly dispersed throughout.

  At this point, the electroforming process (S4) ends. In addition, when performing this process, a processing tank 20 is connected to a valve (not shown) via a pipe (not shown), and a filter for filtering (not shown) is further provided on the pipe, thereby the processing tank. Preferably, the sulfamic acid bath discharged from 20 is filtered. Furthermore, it is preferable that the filtered sulfamic acid bath is returned into the treatment tank 20 by an injection pipe (not shown) and the sulfamic acid bath is circulated.

Next, a thickness adjustment step (S5) is performed.
First, the silicon substrate 10 is pulled up from the treatment tank 20 and cleaned with pure water or the like. Then, as shown in FIG. 12, the electroformed body 25 overflowing from the electroformed groove 15 is removed, and the thickness is adjusted so that the remaining electroformed body 25 has the thickness of the gear portion 124a. This method may be performed by polishing such as CMP (chemical mechanical polishing).

Then, after removing the last mixed layer 14, the conductive film 11, and the silicon substrate 10 and taking out the electroformed body 25, the outer surface of the electroformed body 25 among the fiber bodies 12 taken into the electroformed body 25. The removal process which removes the excess part which protruded from (S6) is performed.
Specifically, first, the remaining mixed layer 14 is removed by an ashing process or a stripping solution method, and the silicon substrate 10 and the conductive film 11 are removed by a CMP method or the like. Thereby, as shown in FIG. 13, the electroformed body 25 from which a part of the fiber body 12 protrudes can be taken out. Subsequently, the excess portion of the protruding fiber body 12 is removed by machining or etching such as polishing as shown in FIG.

  As a result, a metal gear portion 124a having a plurality of fibrous bodies 12 that are uniformly dispersed throughout the interior and co-deposited together with metal deposition can be produced by electroforming. The second wheel 124 shown in FIG. 2 can be manufactured by driving the shaft member 125 into the holding hole 124c formed at the center of the gear portion 124a.

As described above, according to the manufacturing method of the present embodiment, the fiber body 12 that is difficult to uniformly eutect with the usual composite plating is easily and reliably dispersed uniformly in the gear portion 124a. It can be co-deposited in the state. Accordingly, the strength of the gear portion 124a can be increased uniformly over the entire area, and very excellent wear resistance can be exhibited.
In particular, since the number of sliding times is large and a strong rotational force is transmitted from the barrel wheel, the second wheel & pinion 124 is required to have high wear resistance. However, according to the manufacturing method of the present embodiment, this requirement is met. A satisfactory high-quality second wheel & pinion 124 can be obtained.

  Moreover, since it is not necessary to mix a dispersion liquid into the electroforming liquid W or to perform pre-processing etc. on the fiber body 12 itself, it can manufacture efficiently. Moreover, since it is not necessary to change anything about the electroforming liquid W, management of the electroforming liquid W and the like are easy. Also in this respect, efficient production can be performed.

  Furthermore, since electroforming is used, the gear portion 124a can be precisely manufactured, and high quality can be achieved. And since it can manufacture in the same process as a general electroforming method except disperse | distributing the fiber body 12 to the photosensitive material 13, it can manufacture very efficiently, without an increase in a manufacturing process. Therefore, it can lead to cost reduction of the center wheel & pinion 124.

  Further, the mechanical timepiece including the movement 100 having the center wheel & pinion 124 according to the present embodiment is one in which the durability of the timepiece itself is improved, the cost is reduced, and the quality is improved.

  The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, in the above-described embodiment, the case where the negative photosensitive material 13 is used has been described as an example, but a positive photosensitive material may be used. In this case, a photoresist mask opened in the shape of the gear portion 124a may be used. By doing so, a similar electroformed groove 15 can be formed.

  In the above-described embodiment, the case where the fibrous body 12 is mixed into the photosensitive material 13 and then applied by the screen printing method or the like has been described as an example in the forming step of forming the mixed layer 14. However, the present invention is not limited to this case. For example, after applying the photosensitive material 13 on the conductive film 11, the fiber body 12 is sprayed from above the photosensitive material 13, and then the fiber body 12 spread by heating the photosensitive material 13 is put inside. A method of dispersing may be used. Even with such a method, the mixed layer 14 in which the fibrous body 12 is dispersed inside the photosensitive material 13 can be formed.

  Moreover, in the said embodiment, although the fiber body 12 was made into optically transparent glass, it is not limited to glass, You may employ | adopt what was formed with other materials. Any material that does not react with at least the electroforming liquid W or the developer may be used. For example, the fiber body 12 may be formed of alumina, zirconia, or the like. In this case, since the strength of the fiber body 12 itself can be further increased, the wear resistance can be further improved. In addition, the fiber body 12 may be formed of ceramic fiber, carbon fiber, or the like that is more resistant to the electroforming liquid W.

  However, it is preferable to form the fiber body 12 with easy-to-use and easy-to-use glass. In particular, when the glass fiber body 12 is used, the mixed layer 14 can be reliably exposed without being blocked by the fiber body 12 at the time of exposure, so that the electroformed groove 15 can be formed with higher accuracy. Thus, the gear portion 124a can be manufactured precisely.

In addition, when the fiber body 12 is formed of a light non-transparent material, not all of the light travels vertically, so the mixed layer 14 in which the fiber body 12 is mixed so that a part of oblique light can be transmitted. An unmixed layer made only of the photosensitive material 13 not mixed with the fiber body 12 is preferably formed below.
That is, as shown in FIG. 15, in the formation process, the fibrous body 12 is not mixed on the conductive film 11, and an unmixed layer 30 made of only the photosensitive material 13 is formed. It is preferable to form the mixed layer 14 thereon.

  By doing so, the unmixed layer 30 can be interposed between the mixed layer 14 and the conductive film 11, and the fibrous body 12 included in the mixed layer 14 can be prevented from directly contacting the conductive film 11. it can. Here, when the fibrous body 12 is in direct contact with the conductive film 11, when the electroformed groove 15 is formed by the developing process, a part of the conductive film 11 may be blocked by the fibrous body 12 and not exposed. There is sex. However, by first forming the unmixed layer 30 in which the fibrous body 12 is not mixed on the conductive film 11, there is no such concern, and the conductive film 11 can be completely exposed by the development process. Therefore, the gear part 124a can be manufactured more precisely.

Moreover, in the said embodiment, when removing the excess part of the fiber body 12 by a removal process, it removed by machining, such as grinding | polishing, However, You may remove by chemical melt | dissolution by solutions, such as a hydrofluoric acid. In this case, as shown in FIG. 16, the fiber body 12 is dissolved from the outer surface to a portion that slightly enters the inside of the electroformed body 25 in addition to the surplus portion protruding from the outer surface of the electroformed body 25. . Accordingly, as shown in FIGS. 16 and 17, a plurality of recesses can be formed on the side surface of the gear portion 124a, and these recesses can function as the oil retaining holes 31 capable of holding the lubricating oil.
Therefore, the side surface of the gear portion 124a, which is a sliding surface, can be used as an oil retaining surface with excellent oil retaining performance, and the frictional resistance generated during sliding can be effectively reduced. Therefore, the center wheel & pinion 124 can be used as a sliding component having excellent durability.

  16 and 17, the oil retaining holes 31 are exaggerated for easy understanding of the figure while the fibrous body 12 is not shown. Actually, the diameter of the oil retaining hole 31 is about the diameter of the fiber body 12.

In the above embodiment, the case where the mechanical component is applied to the second wheel & pinion 124 has been described as an example. However, the present invention is not limited to the second wheel & pinion 124.
For example, the mechanical parts according to the present invention may be applied to the third wheel 126 and the fourth wheel 128, or may be applied to the escape wheel 130. In particular, as shown in FIG. 18, in the escape wheel 130, a part of the side surface is a sliding surface 132a on which the claw stone of the ankle 142 is slid, so that the oil retaining hole 31 is applied to the entire side surface by the method described above. Is preferably formed. By carrying out like this, it can be set as the reliable escape wheel which is excellent in abrasion resistance and excellent in durability. In FIG. 18 as well, the oil retaining hole 31 is exaggerated for easy understanding.

  Further, the mechanical component according to the present invention may be applied to a back presser 196 whose side surface is a sliding surface 196a with the setting lever 190 as shown in FIG. Even in this case, it is preferable to form the oil retaining hole 31 over the entire sliding surface 196a. In FIG. 19 as well, the oil retaining hole 31 is exaggerated for easy understanding.

  Furthermore, the mechanical component according to the present invention may be applied to other timepiece components. For example, the present invention may be applied to a bearing that supports a shaft portion of each gear, a lever called a jumper that engages with an internal gear of a date dial for displaying a date, and the like.

  The mechanical component according to the present invention is not limited to a component for a mechanical timepiece, and can be suitably used as a component for a small precision machine.

M ... Photoresist mask (mask)
10 ... Silicon substrate (base material)
DESCRIPTION OF SYMBOLS 11 ... Conductive film 12 ... Fiber body 13 ... Photosensitive material 14 ... Mixed layer 15 ... Electroformed groove 25 ... Electroformed body 30 ... Non-mixed layer 31 ... Oil retaining hole 124 ... Second wheel (mechanical part)
124a ... Gear part (electroformed part)

Claims (6)

An electroformed part formed to a predetermined thickness by electroforming;
And a plurality of fiber bodies dispersed throughout the electroformed part and eutectoid in the electroformed part. The machine part according to claim 1,
At least a part of the side surface of the electroformed part is a sliding surface on which other parts are slid,
A machine part, wherein a plurality of oil retaining holes capable of retaining lubricating oil are formed on the side surface. A method of manufacturing a machine part comprising: an electroformed part formed to a predetermined thickness; and a plurality of fibrous bodies dispersed throughout the electroformed part and eutectoid in the electroformed part. And
Forming a mixed layer in which the fibrous body is dispersed inside the photosensitive material on the conductive film formed on the surface of the substrate; and
An exposure step of partially exposing the mixed layer through a mask;
Developing the exposed mixed layer to expose the conductive film following the outer shape of the electroformed part, and forming an electroformed groove in which a part of the fibrous body protrudes from the inner wall surface;
Electroforming is performed using the conductive film as an electrode, and metal is deposited on the conductive film exposed in the electroformed groove while taking in the fibrous body protruding from the inner wall surface, and the electroformed groove is at least completely formed. An electroforming process for growing until a closed electroformed body is formed;
A thickness adjusting step of removing the electroformed body overflowing from the electroformed groove and adjusting the thickness so that the thickness of the remaining electroformed body becomes the thickness of the electroformed part;
After removing the electroformed body after thickness adjustment, a removing step of removing an excess portion protruding from the outer surface of the electroformed body out of the fibrous body taken into the electroformed body,
A method for manufacturing a machine part, comprising: In the manufacturing method of the machine component of Claim 3,
In the forming step, after forming an unmixed layer made of the photosensitive material on the conductive film, the mixed layer is formed on the unmixed layer. In the manufacturing method of the machine component of Claim 3 or 4,
A method of manufacturing a machine part, wherein the fiber body is formed of an optically transparent material. In the manufacturing method of the machine parts given in any 1 paragraph of Claims 3-5,
In the removing step, the excess portion of the fibrous body is removed by chemical dissolution, and a plurality of oil retaining holes capable of retaining lubricating oil are formed on the side surface of the electroformed body by the dissolution. To manufacture machine parts.

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