JP2011068492A - Carrying device for carrying plate-like object to be treated in surface treatment device, and holding chuck for the carrying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automatically, reliably and smoothly open/close a holding chuck which holds a plate-like treated object at both edges to be horizontally carried. <P>SOLUTION: To automatically open/close the holding chuck which holds the plate-like treated object at both edges to be horizontally carried, a chuck opening/closing guide engaging member 35 attached to the upper part of the holding chuck 9 to be rotationally driven while being mounted on a carrying drive means for rotationally driving it endlessly is engaged with a high-placed guide upper face 20a of a chuck opening/closing guide member 20. The chuck opening/closing guide engaging member 35 is a reverse lever 37 which has a rotary roller 40 to be rollingly engaged with the guide upper face. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus for carrying out surface treatment while sandwiching both side edges of a plate-like workpiece with a rotationally driven clamping chuck and transporting the workpiece in a horizontal state, and in particular, sandwiching both side edges of a plate-like workpiece. The present invention relates to an improvement in an automatic opening / closing control mechanism of a clamping chuck that is horizontally conveyed.

  As this type of processing apparatus, an electrolytic processing apparatus for a plate-like object disclosed in Patent Document 1 is known. In this electrolytic treatment apparatus, a plate-like object is supplied to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and is discharged again from the electrolysis chamber after the electrolysis treatment. A device for electrodeposition, a transport device for transporting a plate-like object through an electrolysis chamber, is driven to rotate endlessly, sandwiching the side edge of the plate-like object in the transport area and moving in the transport direction The device is configured as a row of individual clamps, and is provided with a device for causing clamping and opening of the plate-like object by the clamps at the start and end of the conveyance path of the plate-like object in the electrolytic chamber.

  In this Patent Document 1, two bending members 17 and 18 that are clamped under spring pressure are used as clamps for opening / closing control of the clamp, and one or both of the inclined surfaces 33 of the inclined rail 32 extending over the non-carrying area of the clamp are used. The plate-like object is opened when the bending member is engaged. In the embodiment of FIG. 2, the clamp is a compression that exists above the link joint 20 of both bending members and stretches between the upper arms 34 and 39 of the bending members for each of the bending members 17 and 18. When the spring 19 is provided and the upper bent end 34 of the bending member 17 is engaged with the inclined surface 33, the lower end 21 of the bending member 17 is swiveled around the connection point 20 to open the bending member. The lower end portions 21 and 22 of 17 and 18 are separated from each other so as to be in an open state.

  However, the clamp opening / closing control of this document is such that the lower end 21 of the bending member 17 pivots in the opening direction around the connection point 20 and the lower ends 21 and 22 of the bending members 17 and 18 are separated from each other. Therefore, in the opened state, the vertical spacing between the lower ends 21 and 22 of the bending members 17 and 18 cannot be increased. This makes it difficult to open the plate-like object held by the clamp, and particularly makes it difficult to hold the plate-like object by the clamp. That is, it is difficult to accurately supply a horizontal plate-like object to the open clamp with a narrow vertical separation width.

  In addition, the clamp opening / closing control of this document has a configuration in which the bent end 34 of the bending member is brought into surface contact with the inclined surface 33 of the inclined rail 32 and thus the resistance to the bending member moving and passing through the inclined surface is reduced. Large, making it difficult to smoothly open and close the clamp.

Japanese Patent Publication No. 6-31476

  In view of such circumstances, the present invention is attached to conveyance driving means that is rotationally driven endlessly, and sandwiches both side edges of the plate-shaped workpiece with a rotationally driven clamping chuck so that the workpiece is in a horizontal state. A chuck automatic opening / closing control mechanism capable of reliably and smoothly sandwiching and releasing a plate-like workpiece by a clamping chuck at the start and end portions of the workpiece conveyance path. An object is to provide a transport device.

  Furthermore, in the present invention, in the open state of the clamping chuck (the accepting / opening operation for clamping the workpiece at the conveyance start end, the releasing operation of the workpiece at the conveyance end), the upper and lower clamping portions of the chuck are The workpiece is horizontally and vertically spaced apart from the horizontal conveyance height level surface, and the workpiece is reliably and smoothly spaced at the gap between the upper and lower clamping portions at the conveyance start end portion for clamping the workpiece. An object of the present invention is to provide a transfer device including a chuck automatic opening / closing control mechanism that prevents a workpiece from being scratched at a transfer end portion that allows the workpiece to be stably supplied and to release the workpiece to be processed. To do.

  In order to solve the above-described problems, the present invention (invention of claim 1) is directed to a horizontal conveyance surface height level in which a plate-like workpiece having parallel side edges is moved up and down by a horizontal supply means. Is supplied to the surface treatment tank in a state, continuously transported and passed through the surface treatment tank in a horizontal state at the level of the horizontal conveyance surface, and after the surface treatment, the workpiece is unloaded from the surface treatment tank by the horizontal unloading means. In the apparatus for performing a surface treatment on an object to be processed, a transfer device for transferring the object to be processed in a horizontal state at a horizontal transfer surface height level over a passage section of the surface treatment tank is provided in the surface treatment tank. It is constituted by horizontal conveying means provided on both sides with the conveying path of the processed material therebetween, and each horizontal conveying means is driven endlessly and is driven by a conveying driving means having a linear conveying driving unit along the conveying path. while A plurality of sandwiching chucks are attached to each of the sandwiching chucks, and the sandwiching chucks sandwich and release the side edges of the workpiece in a horizontal state according to the height level of the horizontal conveyance surface in the vertical direction and the upper clamping unit. The holding chuck group of each horizontal transfer means is driven to rotate at a synchronized speed, and has a horizontal width interval in which the linear drive path portions on the transfer path side are parallel to each other and spaced apart from each other with the transfer path in between. The gripping chuck groups in each linear drive path on the conveyance path side synchronously sandwich the both side edges of the object to be processed, and the object to be processed has a horizontal conveyance surface height over the passage section of the surface treatment tank. The horizontal conveying means is configured to move in the conveying direction in a horizontal state depending on the height level, and the horizontal conveying means can clamp the side edge of the object to be processed from the open state of the clamping chuck that passes through the start end of the object conveying path. Control to a closed state, Each chuck has an automatic opening / closing control mechanism for controlling the holding chuck that passes through the terminal end of the workpiece conveyance path from a closed state to an open state in which the side edge of the workpiece can be opened. , Along the rotation drive path of the clamping chuck group, the position from the corner rotation drive path on the start end side to the position immediately before the start end of the transfer path in the rotation drive direction and the corner rotation in the rotation drive direction from the end of the transfer path A chuck opening / closing guide member having a high-level guide upper surface portion, each disposed at a position reaching the drive path portion, wherein the clamping chuck is a lower end portion of a fixed chuck rod attached to the transport driving means that is driven to rotate endlessly The lower holding portion is formed on the lower end of the movable chuck さ れ る that is held up and down by the fixed chuck 杆. The movable clamping rod is moved downward by the spring pressure of the compression spring, and the upper clamping portion of the movable chuck と and the lower clamping portion of the fixed chuck 制 御 are normally controlled to be closed in the vertical direction, and the clamping is performed. A chuck opening / closing guide engaging member is attached to the upper portion of the chuck, and this chuck opening / closing guide engaging member has an engaging portion that can be engaged with the upper surface of the upper guide of the chuck opening / closing guide member. When the chuck passes through the position of the chuck opening and closing guide member, the engaging portion is engaged with the upper surface of the upper guide, so that the movable chuck 杆 is moved up against the spring pressure of the compression spring, and is movable. The apparatus for conveying a plate-like object in a surface treatment apparatus, wherein the upper clamping part of the chuck と and the lower clamping part of the fixed chuck 杆 are controlled to be opened in the vertical direction. To provide.

  Further, according to the present invention (invention of claim 2), the clamping chuck is attached to the transport driving means that is endlessly rotated via an attachment member having a long hole in the vertical direction, and is movable up and down. In the open state of the chuck, the lower clamping portion of the chuck is moved to the lower limit position below the horizontal conveying surface height level of the workpiece by a dead weight of the chuck, In the closed state where the holding chuck passes from the start end to the end of the transfer path, the holding chuck is engaged with the chuck guide rail disposed along the linear drive path on the transfer path side at the upper limit position. A surface treatment apparatus configured to move in the conveyance direction and move in the conveyance direction while holding the upper limit position where the lower clamping portion of the chuck is located on the lower surface of the horizontal conveyance surface height level of the workpiece. Providing transport apparatus of the plate-shaped object to be processed in.

  In the present invention (invention of claim 3), the clamping chuck is attached to the transport driving means that is endlessly rotated via an attachment member having a long hole in the vertical direction, and can be moved up and down. In the open state of the chuck, the lower clamping portion of the chuck is moved to the lower limit position below the horizontal conveying surface height level of the workpiece by the dead weight of the chuck, Engaging the mounting base of the holding chuck moved from the corner rotation driving path on the part side to the start end of the conveyance path in the rotational driving direction with a chuck raising guide member having an inclined upper surface gradually becoming higher in the rotational driving direction; The lower chucking portion of the clamping chuck is guided so as to gradually move upward from the lower limit position to an upper limit position located on the lower surface of the level of the horizontal conveyance surface of the workpiece, and the clamping In a closed state in which the chuck passes from the start end to the end of the transfer path, the holding chuck is engaged with the chuck guide rail disposed along the linear drive path on the transfer path side, and the chuck is held under the chuck. Provided is a plate-like workpiece conveyance device in a surface treatment device configured to move in the conveyance direction while maintaining an upper limit position where the section is located on the lower surface of the horizontal conveyance surface height level of the workpiece.

  According to the present invention (inventions of claims 2 and 3), when the clamping chuck is in the open state, the upper clamping unit is moved up to a position where the workpiece can be opened, and the lower clamping unit is positioned horizontally with the workpiece. Located below the transfer surface height level with a gap between them, so that the upper and lower holding parts of the chuck are spaced apart from each other with respect to the horizontal transfer surface height level of the workpiece. Placed in position.

  According to the present invention (invention of claim 4), the chuck opening / closing guide member has an intermediate portion as a high-level guide upper surface portion in the rotational driving direction of the clamping chuck, and both sides of the high-level guide upper surface portion are the high-level guide upper surface portions. An apparatus for conveying a plate-like object to be processed in a surface treatment apparatus is provided in which the upper surface portion of the inclined guide is gradually lowered.

  According to the present invention (invention of claim 5), the chuck opening / closing guide engaging member is pivotally attached to the fixed chuck flange side by a fulcrum shaft with the bent portion of a substantially L-shaped reversing lever as a fulcrum. The tip of the lower arm portion of the reversing lever is pivotably connected to the upper portion of the movable chuck rod, and the tip of the upper arm portion of the reversing lever is rotated freely along the guide upper surface of the chuck opening / closing guide member. In an engaged state in which the rotating roller rolls along the upper surface portion of the high guide, the upper arm portion is reversed upward with the fulcrum shaft as an axis and connected to the lower arm portion. The plate-like object to be processed in the surface treatment apparatus is configured so that the movable chuck た is moved upward so that the upper holding portion of the movable chuck と and the lower holding portion of the fixed chuck 離間 are separated in the vertical direction. Providing a conveying device.

  According to the present invention (invention of claim 5), the movable chuck 杆 can be smoothly moved up and down by the lever action of the rotating roller and the reversing lever which can freely roll along the upper surface of the guide, and the clamping chuck can be opened and closed. Can be smooth.

  According to the present invention (invention of claim 6), the plate-like object to be processed, which is supplied to the surface treatment tank at the level of the horizontal conveyance surface by the horizontal supply means, Provided is a plate-like workpiece conveying apparatus in a surface treatment apparatus, which is provided with a workpiece supply guide member having an upper and lower guide portion that guides to a starting end position.

  Further, the present invention (invention of claim 7) is a surface treatment apparatus, wherein each horizontal transfer means is provided with a chuck guide rail for guiding a clamping chuck group that moves on the linear drive path portion on the transfer path side. Provided is a transport device for a plate-like workpiece.

  Further, according to the present invention (invention of claim 8), the chuck guide rail functions as a power supply rail for supplying a cathode current to an object to be processed conveyed through the clamping chuck. Provided is an apparatus for conveying a workpiece.

  In the present invention (invention of claim 9), the side edges of the plate-like object to be transported in the horizontal state according to the level of the level of the horizontal transport surface by the horizontal transport means in the passage section of the surface treatment tank are provided on the side edges. It is made of an insulating material such as plastic composed of an upper guide guide for side edges and a lower guide guide for side edges that guides continuously through a gap space serving as a shielding space from a position in the vertical direction across the passage section. Side edge guide guides are provided on both sides of the conveyance path, and the side edge upper guide guides when the movable chuck 移動 moves horizontally in the passage section below the movable chuck の of the clamping chuck. A substantially C-shaped avoiding portion that can avoid contact interference with the upper edge is provided, and the upper guide guide portion for the side edge portion is disposed in the opening of the avoiding portion, and Hold the clamping part downward A substantially C-shaped or substantially L-shaped support portion is formed at the lower portion of the fixed chuck rod, and the avoidance portion is held movably in the vertical direction in the support portion. Provided is a transport device for a plate-like workpiece in a surface treatment apparatus, wherein the lower sandwiching portion is formed in a protruding state facing upward in the lower end portion of the support portion.

  According to the present invention (invention of claim 9), the side edge guide guide is provided, and the clamping chuck is structured to be suitable for the arrangement of the side edge guide guide. Both side edges of the plate-like object to be conveyed in a horizontal state are guided at the level of the horizontal conveyance surface by the side edge guides, and both side edges of the plate-like object to which current is concentrated are By shielding (shielding) from the vertical position by the side edge guides made of insulating material, it is possible to prevent current from concentrating on both side edges of the plate-like object to be processed. The plating thickness can be made uniform. Therefore, when this invention is used as an electrolytic processing apparatus such as an electroplating processing apparatus, the effect is great.

  Further, the present invention (invention of claim 10) is attached to transport driving means that is rotationally driven endlessly, and is rotationally driven. One side edge of the plate-like object to be processed or a linear drive path portion in the rotational drive path is provided. It is a clamping chuck of a conveying device that clamps both side edges and conveys the workpiece in one direction in a horizontal state. This clamping chuck clamps the side edge of the workpiece with the plate surface up and down in the vertical direction. And a lower holding portion and an upper holding portion that are opened, and the lower holding portion is formed at the lower end portion of the fixed chuck 取 付 け that is attached to the conveyance driving means that is driven to rotate endlessly. The upper holding portion is formed at the lower end portion of the movable chuck 保持 to be held, the movable holding 杆 is moved downward by the spring pressure of the compression spring, and the upper holding portion of the movable chuck と and the lower holding portion of the fixed chuck に お い て are in a normal state. Up and down The chuck opening / closing guide engaging member is attached to the upper portion of the clamping chuck, and this chuck opening / closing guide engaging member is provided with a substantially L-shaped reversing lever. The bent portion is pivotally attached to the fixed chuck と し て side by a fulcrum shaft with the bent portion as a fulcrum portion, the tip of the lower arm portion of the reversing lever is pivotally connected to the upper portion of the movable chuck 、, and the upper arm portion of the reversing lever In the engaged state where the rotating roller rolls along the upper surface of the upper guide of the chuck opening / closing guide member provided along the rotation driving path, the upper arm portion is the fulcrum. Centering on the shaft as an axis, it is reversed upward so that the movable chuck 連結 connected to the lower arm is moved upward, and the upper clamping part of the movable chuck と and the lower clamping part of the fixed chuck 上下 are vertically moved. And configured to be controlled to were spaced open state, providing a clamping chuck of the transport apparatus of the plate-shaped object to be processed in the surface treatment apparatus.

  Further, according to the present invention (invention of claim 11), a gap space serving as a shielding space is formed on both side edges of the plate-like workpiece to be conveyed in a horizontal state by being held by the holding chuck from a position in the vertical direction. A plate-like object to be processed in a surface treatment apparatus provided with a side edge guide guide made of an insulating material such as plastic, comprising a side edge upper guide guide portion and a side edge lower guide guide portion that are continuously guided. In the holding chuck of the conveying apparatus, a substantially C-shaped avoiding portion capable of avoiding contact interference with the side edge portion upper guide guide portion when the movable chuck rod moves in the horizontal direction below the movable chuck rod. The side edge upper guide guide portion is arranged in the opening of the avoidance portion, and the upper sandwiching portion is formed in a protruding state in the lower direction at the lower end portion of the avoidance portion, Under the fixed chuck A substantially C-shaped or L-shaped support portion is formed in the support portion, and the avoidance portion is held in the support portion so as to be movable in the vertical direction, and the lower holding portion is disposed at the lower end portion of the support portion. Provided is a clamping chuck for a plate-like workpiece transfer device in a surface treatment device, which is formed in a protruding state directed in a direction.

  In the present invention (invention of claim 12), a flexible plate-like object to be processed having parallel side edges is continuously conveyed in a substantially horizontal state, and the object to be processed passes through the treatment liquid in this conveying process. In the apparatus for performing the surface treatment on the workpiece, horizontal conveying means are respectively provided on both sides of the plate-shaped workpiece to be conveyed, and each horizontal conveying means is a conveyance driving means that is rotationally driven endlessly. A large number of clamping chucks are attached at intervals, and both side edges of the plate-like workpiece are clamped by a clamping chuck group in the inner driving path parallel to each other with the conveyance path in between. Is a conveying device that conveys the plate in one direction in a substantially horizontal state with the plate surface up and down. Can be freely mounted on In addition, an object to be processed which is guided by a rolling roller provided in the clamping chuck to a vertical height varying rail disposed along the driving path and whose side edge is clamped by the clamping chuck is a surface treatment tank. The upper limit position that allows passage between the upper surface and the surface treatment tank and the lower limit position that allows the object to be processed sandwiched by the clamping chuck to be immersed in the treatment liquid in each surface treatment tank. A plate-like workpiece transfer device in a surface treatment apparatus, wherein the up-and-down height variation rail is an inclined portion that is continuous between the upper limit height portion and the lower limit height portion. provide.

  According to the present invention, in the apparatus for carrying out surface treatment while sandwiching both side edges of the plate-like workpiece by the rotationally driven clamping chuck and carrying the workpiece in a horizontal state, the starting end portion of the workpiece passage Further, the plate-like workpiece can be clamped and released by the clamping chuck at the end portion reliably and smoothly. The present invention is particularly useful when the plate-like object to be surface-treated is a thin plate or a flexible plate.

  Further, when the chuck is opened, the upper clamping unit is moved up to a position where the workpiece can be released, and the lower clamping unit is positioned below the horizontal conveyance surface height level of the workpiece to be spaced apart. Therefore, according to the present invention, the upper clamping part and the lower clamping part of the chuck are placed at positions spaced apart from each other with respect to the horizontal conveying surface height level of the workpiece. When the chuck is in the open state (accepting and opening operation for holding the workpiece at the conveyance start end, and opening the workpiece at the conveyance end portion), the upper and lower clamping portions of the chuck are placed on the horizontal conveyance surface of the workpiece. Since it is spaced apart from the height level in the vertical direction, at the conveyance start end for clamping the workpiece, the workpiece can be supplied more reliably and smoothly to the gap between the upper and lower clamping portions, At the end of conveyance to release the object to be processed Also in parts, it can be made to prevent a scratch on the object to be processed.

It is a top view which shows the outline of this invention. It is a front view which shows the outline of the carrying-in part of this invention. It is a side view which shows the outline of this invention. It is a front view which shows the outline of the chuck | zipper automatic opening / closing control mechanism of this invention. It is a side view which shows the outline of the chuck | zipper automatic opening / closing control mechanism of this invention. It is a top view which shows the outline of the carrying-in part of this invention. It is a schematic front view which shows other embodiment of this invention. It is a top view which shows the outline of the carrying-in part of FIG. It is a top view of other embodiments showing an outline of the present invention. It is a side view which shows other embodiment of this invention. It is a front view which shows other embodiment of this invention. It is a front view which shows the outline of other embodiment of this invention.

  Embodiments of the present invention will be described with reference to the drawings. 1 to 6 show the first embodiment, FIGS. 7 and 8 show the second embodiment, and FIGS. 9 to 11 show the third embodiment. The description without particular limitation is common to the embodiments of FIGS. 1 to 6, 7 and 8, and FIGS. 9 to 11.

  FIGS. 1 and 2 (only the carry-in portion is shown in FIG. 2) are in a horizontal state with a horizontal conveyance surface height level H in which the plate-like workpiece P is moved up and down from the supply position on the left side of the drawing. It is supplied to the surface treatment tank 1 by the horizontal supply means 2 (rotation drive roller), and the surface treatment tank 1 is continuously conveyed in the direction of the arrow A in the horizontal state by the horizontal conveyance surface height level H, and passes. An apparatus for performing a surface treatment on an object to be processed, in which the object to be processed is unloaded from the surface treatment tank 1 to the right by a horizontal unloading means 3 (rotation drive roller) in a horizontal state at the level of the horizontal conveying surface after the surface treatment. The outline is shown. In addition, as shown in FIG.1 and FIG.2 (only a carrying-in part is shown in FIG. 2), it corresponds to the carrying-in entrance 1a and the carrying-out exit 1b which carry in and carry out the plate-shaped to-be-processed object P of a horizontal state. Seal rollers 4 (4a, 4b) are disposed inside the treatment tank to prevent the treatment liquid from flowing out of the treatment tank. The lower seal roller 4a of the seal roller 4 (4a, 4b) also functions as a rotation drive roller similar to the rotation drive roller of the horizontal supply means 2 and the horizontal carry-out means 3. The plate-like workpiece P is required to have both side edges parallel to each other. However, in addition to the rectangular (printed circuit board or the like) shown in the figure, it may be a long strip having both side edges parallel to each other. . In this surface treatment tank, the plate-like workpiece is subjected to surface treatment such as plating or chemical treatment. The present invention can be widely applied as a transfer device for a surface treatment apparatus for a plate-like object to be processed, such as electrolytic treatment such as electroplating treatment or electroless treatment.

  A transport apparatus for transporting the plate-like workpiece P in a horizontal state with a horizontal transport surface height level H over a passage section 5 (section indicated by an arrow 5 in FIG. 1) of the surface treatment tank 1 is a surface treatment. It is comprised by the horizontal conveyance means 7 and 7 provided in the both sides of the conveyance path 6 of the to-be-processed object P in the tank 1 in between. Each of the horizontal conveying means 7, 7 has a plurality of clamping chucks 9, spaced equidistantly from the conveying driving means 8 having an inner linear driving part 8 a and an outer linear driving part 8 b that are driven to rotate endlessly. ..Attached and configured. This clamping chuck 9 is provided with a lower clamping part 25a and an upper clamping part 26a for clamping and releasing a side edge part of a workpiece in a horizontal state at a horizontal conveying surface height level H in the vertical direction. Will be described later. The linear drive unit 8a on the inner side along the conveyance path 6 of the workpiece is configured as a linear conveyance drive unit (8a). The length in the conveyance direction of the linear conveyance drive unit 8a (inner linear drive unit 8a) in each conveyance drive unit 8 is configured to be slightly longer than the passage section 5. The conveyance driving means 8 that is rotationally driven by the endless is a toothed belt 11 (which may be a chain transmission) that is wound around rollers 10 and 10 and is rotationally driven endlessly, and is provided in each horizontal conveying means 7 and 7. One roller 10 (right roller 10 shown in FIG. 1) is driven to rotate by a conveying motor (not shown). The roller 10 is provided with teeth that match the toothed belt 11.

  Each of the conveyance driving means 8 and 8 is synchronously driven at the same speed, and each of the clamping portions of the clamping chuck group 9 in the linear conveyance driving unit 8a (inner linear driving unit) of each conveyance driving means. The linear drive path portions 12a and 12a are parallel to each other, and the sandwiching chuck groups 9... Are rotated at symmetrical positions with the conveyance path 6 therebetween. The clamping chuck groups 9... In each of the linear drive path portions 12 a and 12 a have a horizontal width interval that is spaced apart with the conveyance path 6 therebetween, and this horizontal width interval is the object to be processed in the surface treatment tank 1. The width of the P conveying path 6 is configured as a width interval. The side edge portions of the workpiece P are simultaneously clamped by the clamping chuck groups 9... In the linear driving path portions 12 a, 12 a on the conveyance path 6 side in the horizontal conveyance means 7, 7. The workpiece is configured to move in the transport direction in a horizontal state with a horizontal transport surface height level H over the passage section 5. The conveyance speed of the object to be processed by the horizontal conveying means 7 and 7 is 0.5 m to 2 m per minute, and is variable depending on the surface treatment conditions of the object P to be processed. The conveyance speed of the object to be processed by the horizontal conveyance means 7, the supply speed by the horizontal supply means 2 and the carry-out speed by the horizontal carry-out means 3 are set to the same speed.

  In the case of a rectangular plate-shaped workpiece P, the clamping chuck groups 9... Attached at equal intervals to the conveyance driving means 8 (toothed belt 11) that is rotationally driven by the endless are at least a plurality of side edges. It is attached at intervals that can hold the points. In FIG. 1, the clamping chuck group 9... Is displayed only in a part of the range in the rotation drive path 12 indicated by a one-dot chain line, but the entire range of the conveyance drive unit 8 (toothed belt 11) is shown. Installed at a distance.

  Each horizontal transfer means 7, 7 includes a chuck guide rail 15 having a rectangular cross section for guiding the holding chuck groups 9... Moving on the linear drive path portions 12 a, 12 a on the inner side (transport passage 6 side), and an outer side. The chuck guide rails 16 each having a rectangular cross section for guiding the clamping chuck groups 9... Moving along the linear drive path portions 12 b and 12 b are provided in a fixed state. The length of the inner chuck guide rail 15 in the transport direction is configured to be slightly longer than the passage section 5 of the surface treatment tank 1. The inner chuck guide rails 15, 15 can hold the object to be processed held at the holding chuck 9 moving on the linear drive path 12 a in the passage section 5 at the level H of the horizontal conveyance surface. And when using this invention as electrolytic processing apparatuses, such as an electroplating processing apparatus, the chuck | zipper guide rail which guides the clamping chuck groups 9 ... which move the linear drive path | route parts 12a and 12a inside (conveyance path 6 side). 15 and 15 are made to function as power supply rails for supplying the current of the cathode to the workpiece conveyed through the clamping chuck 9.

  Each of the horizontal transfer means 7, 7 opens the holding chuck 9... Passing through the start end 5 a of the transfer path 6 (surface treatment tank passage section 5) of the workpiece P from the open state to the side edge of the workpiece. The holding chuck 9... Passing through the terminal end 5 b of the conveyance path 6 (surface treatment tank passage section 5) of the workpiece P is controlled from the closed state to the workpiece side. Each is provided with an automatic chuck open / close control mechanism that controls the edge to an openable state.

  The chuck automatic opening / closing control mechanism includes a chuck opening / closing guide member 20 having a high-level guide upper surface portion 20a. As shown in FIGS. 1 and 6 (only the carry-in portion is shown in FIG. 6), the high-level guide upper surface portion 20a of the chuck opening / closing guide member 20 has a rotational drive path 12 of the clamping chuck group 9. , The position from the corner rotation drive path portion 12c on the start end side to the position immediately before the start end portion 5a of the transport path 6 in the rotational drive direction, and the corner rotation on the end portion side in the rotational drive direction from the end portion 5b of the transport path 6 They are respectively arranged at positions reaching the drive path portion 12c. As shown in FIG. 4, the chuck opening / closing guide member 20 has an intermediate portion in the rotational drive direction of the clamping chuck 9 as a high-level guide upper surface portion 20a, and both sides of the high-level guide upper surface portion 20a gradually from the high-level guide upper surface portion. The lower surface of the inclined guide upper surface portion 20b. In FIG. 6, the alternate long and short dash line indicated by the symbol C indicates the rotational drive path of the engaging portion 36 (rotating roller 40) of the clamping chuck 9.

  The clamping chuck 9 is fixed to the conveying driving means 8 (toothed belt 11) that is rotationally driven endlessly by a bolt fastening means via an attachment member 23 or the like (which will be described later, although shown in FIGS. 7 and 8). In the embodiment, the holding chuck 9 is attached to the toothed belt 11 so as to be movable up and down.) The lower holding portion 25a is attached to the substantially horizontal bent portion at the lower end portion of the attached substantially L-shaped fixed chuck rod 25. The upper clamping portion 26a is formed at the lower end portion of the rod-shaped movable chuck rod 26 that is formed so as to be movable up and down by the fixed chuck rod 25, and the movable chuck rod 26 is compressed by a compression spring (compression coil spring) 27. The upper clamping part 26a of the movable chuck rod 26 and the lower clamping part 25a of the fixed chuck rod 25 are normally closed in the up-down direction (water is closed in this closed state). It is the clamping state can grasp the side edges of the state of the plate-shaped object to be processed in the vertical direction.) Are controlled to. More specifically, as shown in FIGS. 4 and 5, upper and lower holding members 25b and 25c are fixedly provided on the outer surface of the fixed chuck rod 25, and the rods are fixed by the upper and lower holding members 25b and 25c. A movable chuck rod 26 having a shape is held so as to be movable up and down, and a spring locking body 26b fixed to the movable chuck rod 26 is disposed between the upper and lower holding members 25b and 25c, and the upper holding member 25b and the spring engagement member are arranged. A compression coil spring 27 is loosely fitted around the rod portion of the movable chuck 26 between the stationary body 26b, and in a normal state, the compression coil spring 27 is in a closed state as shown in FIG. The spring locking body 26b is pushed down by the spring pressure to a downward movement position in contact with the lower holding member 25c. As shown in FIGS. 3 and 5, the outer surface of the toothed belt 11 (engagement teeth extending in the vertical direction are formed on the outer surface as well as the inner surface) via an attachment member 23. The back side of the L-shaped fixed chuck rod 25 is attached in a fixed state, and is attached so that the lower holding portion 25a is positioned outside.

  An engagement member 30 for a guide rail for movably engaging the chuck chuck 9 with the chuck guide rails 15 and 16 is attached to the inner side surface of the fixed chuck rod 25 in a fixed state. The engaging member 30 is configured to hold the chuck guide rails 15 and 16 having a rectangular cross section from the upper and lower portions so as to be slidable. The upper engaging member 30 a is slid in surface contact with the rail upper surface of the guide rail 15. Is formed long in the moving direction (see FIG. 4). As described above, the clamping chuck 9 that moves on the linear drive path 12a in the passage section 5 causes the workpiece P sandwiched by the clamping chuck to the horizontal conveyance surface height level H by the inner chuck guide rail 15. It can be held.

  A chuck opening / closing guide engaging member 35 is attached to the upper portion of the holding chuck 9. The chuck opening / closing guide engaging member 35 has an engaging portion 36 that can be engaged with the upper guide upper surface portion 20 a of the chuck opening / closing guide member 20, and the clamping chuck 9 passes through the position of the chuck opening / closing guide member 20. At this time, the engaging portion 36 is engaged with the upper guide upper surface portion 20a, so that the movable chuck rod 26 is moved up against the spring pressure of the compression spring 27, and the upper clamping portion of the movable chuck rod 26 is moved. 26a and the lower clamping part 25a of the fixed chuck rod 25 are opened and separated in the vertical direction (in this opened state, the side edge of the horizontal plate-shaped workpiece to be clamped is received and clamped. The side edges of the plate-like workpieces are open.).

  In the embodiment shown in FIGS. 4 and 5, the chuck opening / closing guide engaging member 35 is pivotably attached to the fixed chuck rod 25 side by a fulcrum shaft 38 with the bent portion of the substantially L-shaped reversing lever 37 as a fulcrum. The tip of the lower arm portion 37b of the reversing lever 37 is rotatably connected to the upper portion of the movable chuck rod 26 via a pin shaft 39, and the chuck opening / closing guide member is connected to the tip of the upper arm portion 37a of the reversing lever 37. A rotating roller 40 that can freely roll along 20 guide upper surface portions (20a, 20b) is attached, and this rotating roller 40 is configured as an engaging portion 36. The rotating roller 40 rolls along the upper guide upper surface portion 20a. In the moving engagement state, as shown by the alternate long and short dash line in FIG. 4, the upper arm portion 37a reverses upward with the fulcrum shaft 38 as an axis, and continues to the tip of the lower arm portion 37b. It has been are configured so as to move upward the movable chuck rod 26 against the spring pressure of the compression coil spring 37. The arrows in FIG. 4 indicate the moving direction of the clamping chuck 9. As shown in FIG. 4, the reversing lever 37 has a fulcrum portion (fulcrum shaft 38) disposed at a rear position in the chuck moving direction, and a rotating roller 40 at the tip of the upper arm portion 37a at a front position in the chuck moving direction. Are arranged. As can be seen from FIG. 4, the height position of the rotating roller 40 in the closed state of the clamping chuck is set to a position where it can ride on the inclined guide upper surface portion 20 b of the chuck opening / closing guide member 20.

  The angle D of the substantially L-shaped reversing lever 37, the angle of the upper arm portion 37a with respect to the horizontal transfer surface in the chuck closed state, the length of the reversing lever 37, that is, the connection between the fulcrum portion (fulcrum shaft 38) and the lower arm portion 37b. As shown in FIG. 4, the length between the portions (pin shaft 39) and the length between the fulcrum portion (fulcrum shaft 38) and the rotating roller 40 of the upper arm portion 37a are set so that the movable chuck rod 26 is placed on the workpiece. It is set so that it can move up and down in the vertical direction perpendicular to the horizontal conveyance surface.

  According to the chuck opening / closing guide engaging member 35 of this embodiment, the lever action of the rotating roller 40 and the reversing lever 37 that can roll along the guide upper surface portions (20a, 20b) of the chuck opening / closing guide member 20 is ensured and reliable. The movable chuck 26 can be moved up and down smoothly, and the clamping chuck 9 can be opened and closed reliably and smoothly.

  As shown in FIG. 1 to FIG. 3, the plate-like object P to be supplied to the surface treatment tank 1 at the horizontal conveyance surface height level H by the horizontal supply means 2 at the horizontal conveyance surface height level H. A workpiece horizontal supply guide member 42 having upper and lower horizontal guide portions 42a and 42b for guiding at least the position of the start end portion 5a of the conveyance path 6 is provided. The workpiece horizontal supply guide member 42 guides a portion close to the side edge of the workpiece. In addition, this to-be-processed object horizontal supply guide member 42 may be continuous over the full length of the moving direction in which the to-be-processed object is conveyed through the conveyance path 6, as shown in FIG. By providing the workpiece horizontal supply guide member 42, the workpiece supplied from the horizontal supply means 2 is held between the start end portion 5a of the conveyance path 6 while maintaining the horizontal conveyance surface height level H. Will be supplied to. The workpiece horizontal supply guide member 42 is particularly useful in the case of a thin plate or a flexible plate that is difficult to maintain the horizontal conveyance surface height level when the workpiece is free.

  Next, the embodiment of FIGS. 7 and 8 will be described. The feature of this embodiment is that the clamping chuck 9 can be moved up and down via an attachment member 45 having a long hole 45a that is vertically long on the conveying drive means 8 (toothed belt 11) that is rotationally driven endlessly. In the open state of the chuck 9 (the open state for receiving the object to be processed at the conveyance start end and the open state for releasing the object to be processed held at the terminal end of the conveyance) The chuck 9 is moved by its own weight so that the lower clamping portion 25a of the chuck is moved to a lower limit position below the horizontal conveyance surface height level H of the workpiece with a gap F. A symbol O in FIG. 7 indicates an opening interval between the upper and lower clamping portions 25a and 26a in the opened state. Then, the inclined upper surface 47a that gradually becomes higher in the rotational driving direction of the attachment base 31 of the clamping chuck 9 that is moved from the corner rotational driving path portion 12c on the side of the starting end portion 5a to the starting end portion 5a of the transport passage 6 in the rotational driving direction. An upper limit position where the lower holding portion 25a of the holding chuck 9 is slidably engaged with the inclined upper surface 47a of the chuck raising guide member 47 and located on the lower surface of the horizontal conveying surface height level H of the workpiece P from the lower limit position. In the closed state in which the holding chuck 9 is guided so as to gradually move upward and passes through the end portion 5b from the start end portion 5a of the transfer passage 6, the holding chuck 9 is moved to the straight line on the transfer passage 6 side. The chuck guide rail 15 disposed along the drive path portion 12a is engaged (slidably engaged), and the lower clamping portion 25a of the chuck is adjusted to the level of the horizontal conveyance surface of the workpiece. Is that which is configured to move in the transport direction while holding an upper limit position located on the lower surface of the H.

  In the opened state of the chuck, the upper clamping unit 26a is moved up to a position where the workpiece P can be opened by the chuck automatic opening / closing control mechanism, and the lower clamping unit 25a is set at the level of the horizontal conveyance surface of the workpiece P. Therefore, the upper clamping part 26a and the lower clamping part 25a of the chuck 9 are spaced apart from the horizontal conveyance surface height level H of the workpiece P. Placed in a remote location. Therefore, according to the present invention of this embodiment, as already described, the clamping chuck 9 is in an open state (accepting / opening operation for clamping the workpiece at the conveyance start end, workpiece to be processed at the conveyance end In the opening operation), the upper and lower clamping portions 25a and 26a of the chuck are spaced apart vertically from the horizontal conveyance surface height level H of the workpiece P, so that the workpiece is chucked. At the conveyance start end, the workpiece can be more reliably and smoothly supplied to the gap between the upper and lower clamping portions, and the workpiece is not damaged even at the conveyance termination portion that opens the chucked workpiece. Can be.

  Next, the embodiment of FIGS. 9 to 11 will be described. In this embodiment, both side edges of the plate-like workpiece P transported in the horizontal state by the horizontal transport surface height level H through the passage section 5 of the surface treatment tank 1 by the horizontal transport means 7 and 7 are defined as the passage sections. The side guide upper portion guide portion 43a having a rectangular cross section and the lower portion guide guide portion 43b having a rectangular cross section which are continuously guided from a position in the vertical direction through a gap space serving as a shielding space. Side edge guides 43 made of an insulating material such as plastic are provided in a fixed state on both sides of the conveyance path 6.

  Then, due to the provision of the side edge guide guide 43, this embodiment is characterized in that the clamping chuck 9 has the following configuration. In other words, it is possible to avoid contact interference with the side edge portion upper guide guide portion 43a when the movable chuck rod 26 moves horizontally in the passage section 5 below the movable chuck rod 26 of the clamping chuck 9. When an avoidance portion 26A having a U-shape or a substantially U-shape (see FIG. 10) is formed and the inner straight drive path portion 12a is moved, the opening side of the avoidance portion 26A is directed toward the conveyance path 6 side. The side edge upper guide guide portion 43a is arranged in the opening of the avoiding portion 26A, and the upper holding portion 26a is in a protruding state at the lower end portion of the avoiding portion 26A. It is formed. Further, a support portion 25A bent in a substantially C-shape or a substantially U-shape (see FIG. 10) at the lower portion of the fixed chuck rod 25 (this support portion is substantially L-shaped in addition to the substantially C-shape shown in FIG. 10). And the avoiding portion 26A is held in the support portion 25A so as to be movable in the vertical direction, and the lower clamping portion is provided at the lower end portion of the support portion 25A. 25a is formed in a protruding state facing upward.

  Note that the lower portions of the fixed chuck rod 25 and the movable chuck rod 26 of the clamping chuck 9 put in the processing liquid S are connected to the contact portions of the upper and lower clamping portions 25a and 25b as shown by two-dot chain lines in FIG. Except for the insulating and chemical resistant resin materials.

  In FIG. 9, both end portions in the longitudinal direction of the side edge guide guide 43 are extended beyond the passage section 5 of the surface treatment tank 1. As shown in FIG. 11 (FIG. 11 shows the carry-out side, but the same applies to the carry-in side), both ends of the guide guide 43 in the range beyond this range are the operations in which the clamping chuck 9 is opened ( The upper edge guide portions 43a for the side edges are not obstructed by the movement of the upper clamping portion 26a of the movable chuck rod 26 in the upward direction relative to the lower clamping portion 25a of the fixed chuck rod 25. An enlarged portion 44 having a lower end portion recessed upward is formed, and there is a gap between the position of each lower end portion of both end portions of the side edge portion upper guide guide portion 43a and the position of the horizontal conveyance surface height level H. It is widened in the vertical direction via the widened portion 44.

  Reference numeral 18 in FIG. 10 denotes a grease tray provided along the guide rails below the inner side (conveyance path 6 side) chuck guide rail 15 and the outer side chuck guide rail 16, and is applied to the guide rails. The grease is prevented from falling into the treatment liquid in the surface treatment tank 1.

  The embodiment of FIGS. 9 to 11 is characterized in that a side edge guide guide 43 made of an insulating material is provided, and the lower part of the movable chuck rod 26 and the fixed chuck rod 25 is improved to an optimum structure accordingly. Yes. Other configurations are substantially the same as those of the embodiment shown in FIGS.

  According to the invention shown in the embodiment of FIGS. 9 to 11, the side edge guide guide 43 is provided, and the sandwiching chuck 9 has a structure suitable for the arrangement of the side edge guide guide 43. Both side edges of the plate-like object P to be conveyed in the horizontal state through the passage section 5 of the surface treatment tank 1 are guided at the horizontal conveyance surface height level H by the side edge guides 43, and current is concentrated. The side edges of the plate-like workpiece P are shielded (shielded) from the vertical position by the side edge guide guides 43 made of an insulating material. Can be prevented, and the plating thickness of the plate-like workpiece P can be made uniform. Therefore, when the invention of this embodiment is used as an electrolytic processing apparatus such as an electroplating processing apparatus, the effect is great.

  Next, a plate-like workpiece transfer apparatus in the surface treatment apparatus shown in FIG. 12 will be described. The transport apparatus of this embodiment continuously transports a flexible plate-shaped workpiece P having parallel side edges in a substantially horizontal state, and passes the workpiece into the processing liquid during the transport process. In an apparatus for performing a surface treatment on an object, horizontal conveying means 7 (only one horizontal conveying means is shown in FIG. 12) are provided on both sides of a conveying path for a plate-like object to be processed. A number of clamping chucks 9 are attached at equal intervals to a conveyance driving means 8 (in the illustrated embodiment, a toothed belt 11 is used, but does not exclude chain driving). The both side edges of the plate-like object to be processed are held at the same time by the holding chuck groups 9... One side up and down almost horizontally It is intended to convey (to the right in FIG. 12).

  The conveying device shown in FIG. 12 is characterized in that the pinch chuck 9 is moved into the conveying driving means 8 (toothed belt 11) which is driven to rotate endlessly. 7 is formed longer than the vertical length of the long hole in the embodiment of FIG. 7), and is mounted so as to be movable up and down through a mounting member 45 and fixed vertically along the drive path 12a. The movement is guided by the variable rail 50. The up-and-down height variation rail 50 is formed as an inclined portion 50c that continues between the upper limit height portion 50a and the lower limit height portion 50b. The clamping chuck 9 is provided with rolling rollers 55 that roll along the upper and lower surfaces of the vertical height varying rail 50. When the clamping chuck 9 is engaged with and moved by the upper limit height portion 50a of the vertical height varying rail 50, the workpiece P having the side edge held by the clamping chuck is moved to the surface treatment tank 1 and the surface treatment tank. When the clamping chuck 9 is engaged with and moved by the lower limit height portion 50b of the vertical height variation rail 50, the side edge portion is moved by the clamping chuck. The object to be treated is transported at a lower limit position where it can be immersed in the treatment liquid in each surface treatment tank 1. A two-dot chain line indicated by a symbol R in FIG. 12 indicates a movement path of the upper and lower clamping portions 25 a and 26 a of the clamping chuck 9.

  This embodiment is useful as a transport device for a surface treatment apparatus using a chemical solution such as chemical plating.

P plate-like object 1 surface treatment tank 2 horizontal supply means 3 horizontal carry-out means H horizontal conveyance surface height level 5 passing section 5a start end 5b end 6 transfer path 7, 7 horizontal transfer means 8 transfer drive means (toothed Belt 11)
9 Clamping chuck 12 Clamping chuck rotation drive path 12a Inner linear drive path section 12b Outer linear drive path section 12c Corner rotation drive path section 15 Inner chuck guide rail 16 Outer chuck guide rail 20 Chuck opening / closing guide member 20a Higher guide Upper surface portion 20b Inclined guide upper surface portion 25 Fixed chuck 杆 26 Movable chuck 杆 25a Lower clamping portion 26a Upper clamping portion 26A Avoidance portion 25A Support portion 27 Compression spring 35 Chuck opening / closing guide engaging member 36 Engaging portion 37 Reversing lever 38 Support point shaft 40 Rotating roller 42 Workpiece horizontal supply guide member 43 Side edge guide guide 43a Side edge upper guide guide 43b Side edge lower guide guide 45 Mounting member 45a Long hole 47 Chuck raising guide member 47a Inclined upper surface F Clearance interval 50 Vertical height Variation rail 50a upper height limit portion 50b lower height portion 50c inclined portion

Claims (12)

  A plate-like workpiece having both side edges parallel to each other is supplied to the surface treatment tank in a horizontal state by a horizontal conveyance surface height level obtained by moving the plate surface up and down by a horizontal supply means. In an apparatus for performing a surface treatment on an object to be processed, the object to be processed is surface-treated in a state in which the object to be processed is transported and passed continuously in a horizontal state depending on the height level, and the object to be processed is unloaded from the surface treatment tank by the horizontal unloading means. A transport device for transporting in a horizontal state at a horizontal transport surface height level over the passage section of the processing tank is constituted by horizontal transport means provided on both sides of the surface processing tank with the transport path of the object to be processed in between. Each horizontal transfer means is configured by attaching a large number of clamping chucks at equal intervals to a transfer drive means having a linear transfer drive section along the transfer path, which is driven to rotate endlessly, The holding chuck includes a lower holding portion and an upper holding portion for holding and releasing a side edge portion of the workpiece in a horizontal state according to the level of the horizontal transfer surface in the vertical direction, and the holding chuck group of each horizontal transfer means is synchronized. The linear drive path portions on the conveyance path side are parallel to each other and have a lateral width spaced apart with the conveyance path in between, and are in each linear drive path section on the conveyance path side. A structure in which both side edges of the workpiece are synchronously clamped by the clamping chuck group, and the workpiece is moved in the conveyance direction in a horizontal state according to the level of the horizontal conveyance surface over the passage section of the surface treatment tank. The horizontal conveying means controls the clamping chuck that passes through the starting end of the workpiece conveyance path from an open state to a closed state in which the side edge of the workpiece can be clamped. The clamping chuck that passes through the end is closed The chuck automatic opening / closing control mechanism for controlling the side edge of the workpiece to be openable is provided, and the chuck automatic opening / closing control mechanism is provided on the start end side along the rotational drive path of the clamping chuck group. Higher guide upper surface portion disposed at a position from the corner rotation drive path portion to a position immediately before the start end portion of the conveyance path in the rotation drive direction and a position from the end portion of the conveyance path to the corner rotation drive path portion in the rotation drive direction. A chuck opening / closing guide member having a lower chucking portion is formed at a lower end portion of a fixed chuck rod attached to the transport driving means that is driven to rotate endlessly. The upper holding portion is formed at the lower end portion of the movable chuck さ れ る that is freely held, and the movable holding 下 is moved downward by the spring pressure of the compression spring. The upper clamping portion of the hook と and the lower clamping portion of the fixed chuck 制 御 are normally controlled to be closed in the vertical direction, and a chuck opening / closing guide engaging member is attached to the upper portion of the clamping chuck. The chuck opening / closing guide engaging member has an engaging portion that can be engaged with the upper surface of the chuck opening / closing guide member, and when the clamping chuck passes the position of the chuck opening / closing guide member, When the engaging portion is engaged with the upper surface of the upper guide, the movable chuck 杆 is moved up against the spring pressure of the compression spring, and the upper clamping portion of the movable chuck と and the lower clamping portion of the fixed chuck が are moved. A plate-shaped workpiece conveying apparatus in a surface treatment apparatus, wherein the apparatus is controlled to be in an open state separated in the vertical direction.   The clamping chuck is attached to the transport driving means that is rotationally driven endlessly through an attachment member having an elongated hole that is long in the vertical direction. When the chuck is in an open state, The lower clamping portion of the chuck is moved to a lower limit position below the horizontal conveyance surface height level of the workpiece to be spaced apart, and the clamping chuck passes from the start end portion of the conveyance path to the end portion. In the closed state, the clamping chuck is engaged with the chuck guide rail disposed along the linear drive path portion on the conveyance path side and moved in the conveyance direction at the upper limit position, and the lower clamping portion of the chuck is 2. The plate-like workpiece in the surface treatment apparatus according to claim 1, wherein the workpiece is moved in the conveyance direction while maintaining an upper limit position located on the lower surface of the level of the horizontal conveyance surface of the workpiece. Conveying apparatus of thing.   The clamping chuck is attached to the transport driving means that is rotationally driven endlessly through an attachment member having an elongated hole that is long in the vertical direction. When the chuck is in an open state, The lower clamping portion of the chuck is moved to a lower limit position below the horizontal conveying surface height level of the workpiece to be moved to a lower limit position, and from the corner rotation driving path portion on the start end side in the rotation driving direction. The attachment base of the clamping chuck moved to the start end of the conveyance path is engaged with a chuck raising guide member having an inclined upper surface that gradually becomes higher in the rotational driving direction, and the lower clamping part of the clamping chuck is covered from the lower limit position. The workpiece is guided so as to gradually move up to the upper limit position located on the lower surface of the level of the horizontal conveyance surface of the workpiece, and the clamping chuck is terminated from the beginning end of the conveyance path. In the closed state passing through the chuck, the clamping chuck is engaged with a chuck guide rail disposed along the linear drive path portion on the conveyance path side, and the lower clamping portion of the chuck has a horizontal conveyance surface height of the workpiece. The transport apparatus for a plate-like workpiece in the surface treatment apparatus according to claim 1, wherein the transport apparatus is configured to move in the transport direction while maintaining an upper limit position positioned on the lower surface of the height level.   The chuck opening / closing guide member has an intermediate portion in the rotation driving direction of the clamping chuck as a high-level guide upper surface portion, and both sides of the high-level guide upper surface portion as inclined guide upper surface portions that gradually become lower from the high-level guide upper surface portion. The apparatus for conveying a plate-like object in the surface treatment apparatus according to claim 1, 2 or 3.   The chuck opening / closing guide engaging member is pivotally attached to the fixed chuck 杆 side by a fulcrum shaft with the bent portion of a substantially L-shaped reversing lever as a fulcrum, and the tip of the lower arm portion of the reversing lever is connected to the movable chuck. The upper part of the reversing lever is connected to the upper part of the reversing lever, and a rotatable roller that can roll along the upper surface of the chuck opening / closing guide member is attached to the tip of the upper arm part of the reversing lever. In the engaged state of rolling along the upper surface of the guide, the upper arm portion is inverted upward with the fulcrum shaft as an axis, and the movable chuck 連結 connected to the lower arm portion is moved upward, The conveyance of the plate-like workpiece in the surface treatment apparatus according to claim 1, 2 or 3, wherein the upper clamping part and the lower clamping part of the fixed chuck 杆 are controlled to be opened in the vertical direction. Location.   A processing object having an upper and lower guide portion for guiding the plate-like workpiece supplied to the surface treatment tank at the level of the horizontal conveyance surface by the horizontal supply means to the start end position of the conveyance path at the level of the horizontal conveyance surface. The apparatus for conveying a plate-like object in the surface treatment apparatus according to claim 1, wherein an article supply guide member is provided.   2. The plate-like workpiece transfer device in the surface treatment apparatus according to claim 1, wherein each of the horizontal transfer means includes a chuck guide rail that guides a clamping chuck group that moves in the linear drive path on the transfer path side. .   The plate-like workpiece in the surface treatment apparatus according to claim 2, wherein the chuck guide rail functions as a feeding rail for feeding a cathode current to the workpiece conveyed through the clamping chuck. Transport device.   The both sides of the plate-like object to be conveyed in the horizontal state according to the level of the horizontal conveyance surface by the horizontal conveying means through the passage section of the surface treatment tank are shielded space from the vertical position over the passage section. A side edge guide guide made of an insulating material such as plastic comprising a side edge upper guide guide portion and a side edge lower guide guide portion that continuously guides through a gap space is formed on both sides of the conveyance path. A substantially C-shaped avoidance that avoids contact interference with the side edge portion upper guide guide portion when the movable chuck rod moves horizontally in the passage section below the movable chuck rod of the clamping chuck. The side edge upper guide guide portion is arranged in the opening of the avoidance portion, and the upper holding portion is formed in a protruding state in the lower direction at the lower end portion of the avoidance portion. , The fixed cha A substantially C-shaped or substantially L-shaped support portion is formed in the lower portion of the cup, and the avoidance portion is held in the support portion so as to be movable in the vertical direction. The conveying apparatus of the plate-shaped to-be-processed object in the surface treatment apparatus of Claim 1 formed in the protrusion state which turned the clamping part upward.   It is attached to the conveyance drive means that is rotationally driven by the endless, and is rotationally driven. The linearly driven path portion in this rotational drive path sandwiches one side edge or both side edges of the plate-like processed object, and the processed object is in a horizontal state. The clamping chuck of the conveying device that conveys in one direction is provided with a lower clamping part and an upper clamping part for clamping and releasing a side edge part of the workpiece with the plate surface up and down in the vertical direction, The lower holding portion is formed at the lower end portion of the fixed chuck 取 付 け attached to the transport driving means that is rotationally driven by the endless, and the upper holding portion is held at the lower end portion of the movable chuck さ れ る that is held up and down by the fixed chuck 杆. The movable clamping rod is moved downward by the spring pressure of the compression spring, and the upper clamping portion of the movable chuck と and the lower clamping portion of the fixed chuck 制 御 are controlled in a closed state in the normal state, And A chuck opening / closing guide engaging member is attached to the upper portion of the sandwiching chuck, and the chuck opening / closing guide engaging member is a fulcrum shaft on the fixed chuck shaft side with the bent portion of the substantially L-shaped reversing lever as a fulcrum portion. The tip of the lower arm of the reversing lever is pivotally connected to the upper part of the movable chuck 、, and a rotating roller is attached to the tip of the upper arm of the reversing lever. In the engaged state in which the roller rolls along the upper surface of the upper guide of the chuck opening / closing guide member provided along the rotation drive path, the upper arm reverses upward with the fulcrum shaft as the axis, and the lower arm The movable chuck 連結 connected to the upper part is moved upward, and the upper holding part of the movable chuck と and the lower holding part of the fixed chuck 制 御 are controlled to be opened in the vertical direction. Form was, clamping chuck of the transport apparatus of the plate-shaped object to be processed in the surface treatment apparatus.   The sandwiching chuck according to claim 10, wherein both side edges of the plate-like workpiece to be transported in a horizontal state while being sandwiched by the sandwiching chuck are continuously opened from a vertical position with a gap space serving as a shielding space. Transporting plate-like workpieces in a surface treatment apparatus provided with side edge guides made of an insulating material such as plastic, each composed of an upper guide guide for side edges and a lower guide guide for side edges. In the clamping chuck of the apparatus, a substantially C-shaped avoiding portion that can avoid contact interference with the side edge upper guide guide when the movable chuck 移動 moves in the horizontal direction is formed below the movable chuck 杆. The upper guide guide portion for the side edge portion is arranged in the opening of the avoiding portion, and the upper holding portion is formed in a protruding state in a downward direction at the lower end portion of the avoiding portion, and the fixing Chuck A substantially C-shaped or substantially L-shaped support part is formed in the part, and the avoidance part is held movably in the vertical direction in the support part, and the lower clamping part is provided at the lower end part of the support part. A clamping chuck of a plate-like workpiece conveying device in a surface treatment device, formed in a protruding state directed upward.   In an apparatus that continuously conveys a flexible plate-like workpiece having both side edges in parallel in a substantially horizontal state, and passes the workpiece through the treatment liquid in this conveyance process to perform surface treatment on the workpiece. Horizontal conveyance means are provided on both sides of the conveyance path of the plate-shaped workpiece, and each horizontal conveyance means has a large number of clamping chucks attached to the conveyance drive means that are rotationally driven endlessly. One side in a substantially horizontal state with the plate surface up and down by sandwiching both side edges of the plate-like workpiece with clamping chucks in the inner driving path parallel to each other with the conveyance path in between The clamping chuck is attached to the conveyance driving means that is endlessly driven to rotate up and down through an attachment member having a long slot in the vertical direction, along the drive path. Arranged An object to be processed, which is guided by a rolling roller provided on the sandwiching chuck to the vertical height variation rail and sandwiched at the side edge by the sandwiching chuck, straddles between the surface treatment tank and the surface treatment tank. The upper and lower positions that can be passed through and the lower limit position at which the workpiece to which the side edge is clamped by the clamping chuck can be immersed in the processing liquid in each surface treatment tank are conveyed. The thickness variation rail is a conveying device for a plate-like object to be processed in a surface treatment apparatus, in which a portion between an upper limit height portion and a lower limit height portion is an inclined portion that is continuous with both portions.

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