TW201408822A - Horizontal transportation type electrolytic plating treatment apparatus - Google Patents

Abstract

This invention provides a horizontal transportation type electrolytic plating treatment apparatus, in which an upper anode and an upper jet discharge pipe can be changed to a favorable arrangement position according to the change of a width interval of a transportation passage of each of plate objects to be treated with width sizes different from one another. According to the solution means, a first side anode (31) and a second side anode (32) facing each other are arranged to be shifted vertically with each other so that they can be overlapped at a front end side of each other, and thereby an upper anode (30) comprising the first side anode and the second side anode can be arranged according to a width of a horizontally transported plate object (P) to be treated. Similarly, a first side discharge pipe (41) and a second side discharge pipe (42) facing each other are arranged to be shifted horizontally with respect to each other, and thereby an upper jet discharge pipe (40) comprising the first side discharge pipe and the second side discharge pipe can be arranged according to a width of a horizontally transported plate object (P) to be treated.

Description

Horizontal transfer type electrolytic plating treatment device

The present invention relates to a horizontal continuous plating apparatus which continuously transports a plate-shaped workpiece such as a printed wiring board horizontally between upper and lower anodes disposed in a plating treatment liquid, and performs electrolytic treatment, particularly in an electrolytic plating sheet or a flexible sheet. A horizontal continuous plating device that is particularly useful for occasions.

An electrolytic treatment apparatus for a plate-like object of the patent document 1 (JP-A-63-76898) is known. The electrolytic treatment device supplies the plate-like object to the electrolysis chamber in a horizontal state, continuously passes through the electrolysis chamber for a certain residence time, and after the electrolysis treatment, the device for electrolytically depositing metal on the plate-like object is again removed from the electrolysis chamber, so that the plate is The object transporting device for transporting the electrolysis chamber is configured as a jig-like object that is rotationally driven in a ring-shaped direction by moving the side edge of the plate-like object in the conveyance region while moving in the conveyance direction, and is in a plate-like object located in the electrolysis chamber. The beginning and the end of the conveyance path are provided with means for holding and opening the plate-like object by means of a jig. Further, in the apparatus, an upper anode (upper anode) and a lower anode (lower anode) are fixedly disposed in the electrolytic solution tank in the electrolytic chamber. An electrolyte supply pipe is fixedly disposed at an upper and lower positions of the apparatus on the conveyance path of the plate-like object.

The first drawing of Patent Document 1 shows a device for sandwiching a plate-like object that passes between both sides, and it is described that it is necessary to handle a very thin plate-like object. However, in this document 1, it is not disclosed to hold the plate with both sides. Other instructions for the body.

[Previous Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. SHO 63-76898

In a device that performs a plating process while horizontally transporting a plate-shaped object to be processed such as a printed wiring board, when the plate-shaped object to be processed is a thin plate or a flexible plate, it is necessary to transport the jig group driven by the ring rotation. The device is disposed on the right and left sides of the transport path of the plate-shaped workpiece, and is disposed on the left and right sides of the transport device of the transport device to hold the both end portions of the plate-shaped workpiece. The inventors of the present invention have proposed a method of changing the width of a jig of a transporting device disposed on the left and right sides of a plate-shaped object to be processed having a different width and width when a plate-shaped object having a different width and width is used for plating. A device (interval of the lateral width of the conveyance path of the workpiece) (Japanese Patent Laid-Open No. 2011-38160).

However, when a wide-width lateral-sized upper anode is provided in a plate-shaped object to be processed having a wide lateral width, the device can be used to fit a plate-shaped object having a narrow lateral width so that the width of the conveyance path of the object to be processed is wide. When it is narrowed, the presence of the upper anode disposed between the jig groups on the left and right sides that are rotationally driven in a ring shape is hindered. For this reason, it is necessary to arrange an upper anode having a narrow lateral width in accordance with a plate-shaped object having a minimum lateral width. but When the upper anode having a narrow lateral width is fixed to the plate-shaped workpiece having the smallest lateral width, the lateral width of the upper anode can not be placed in a preferred position with respect to the wide laterally wide plate-shaped workpiece. The problem. In order to solve the above problems, the first problem of the present invention is to provide a device for adjusting the lateral width of the conveyance path of the object to be processed in accordance with the shape of the sheet-like object having different lateral widths. In order to change the lateral width interval of the conveyance path of the plate-shaped workpiece, it is possible to change the upper anode to a horizontal transfer type electrolytic plating treatment apparatus having a preferable arrangement position.

In the same manner, when the jet-shaped discharge pipe of the upper portion of the pipe length having a long lateral direction is fixed to the plate-shaped workpiece having a wide lateral width, the plate-shaped workpiece having a narrow lateral width is fitted to the treated object. When the lateral width interval of the conveyance path of the object is narrowed, the presence of the jet discharge pipe fixed to the upper portion between the jig groups on the right and left sides that are rotationally driven in the ring shape is hindered. For this reason, it is necessary to arrange the jet discharge pipe of the upper portion of the pipe length having a short lateral width in cooperation with the plate-shaped workpiece having the smallest lateral width. However, when the jet discharge pipe of the upper portion of the pipe length having a short lateral width is fixed to the plate-shaped workpiece having the smallest lateral width, the upper jet discharge pipe cannot be processed in a plate shape having a wide lateral width. The problem that the board surface (substrate surface) of the object is disposed at a preferred position. In order to solve this problem, the problem to be solved by the present invention (second problem) is to provide a device for adjusting the lateral width of the conveyance path of the workpiece to be treated with a sheet-like object having a different width and width. In order to change the lateral width interval of the conveyance path of the plate-shaped workpiece, it is possible to change the position of the discharge nozzle of the upper jet discharge pipe to a horizontal transfer type electrolytic plating treatment apparatus having a preferable arrangement position.

In order to solve the above problem (first problem), the present invention (the invention of claim 1) provides a horizontal transfer type electrolytic plating treatment apparatus, comprising: a plurality of clamps driven in a ring shape and having parallel side edges a conveying device that continuously transports the plate surface of the plate-shaped workpiece in the horizontal and vertical postures of the plating treatment liquid in the electrolytic plating bath, and the both sides of the plate-shaped workpiece (for example, the printed wiring board), and In the plating treatment liquid of the electrolytic plating treatment tank, the upper and lower positions of the conveyance path of the plate-shaped workpiece conveyed horizontally by the conveyance device are arranged in parallel with the plate surface of the workpiece, and the A plate-shaped or perforated plate-shaped anode disposed in a plurality of intervals at a predetermined interval in the conveyance direction of the workpiece, and the above-mentioned processed portion is supplied with a cathode current (cathode current) between the upper and lower anodes. The apparatus passes through the apparatus to apply an electrolytic plating treatment to the surface of the object to be processed, and the conveying device is disposed on both sides of the conveying path through the object to be processed. The first transport device and the second transport device each include a transport drive unit that is rotationally driven in a ring shape along the linear transport drive unit along the transport path, and the transport drive means is interposed therebetween. A plurality of the jigs are provided at intervals, and the jig is provided with a nip portion at the lower end portion that is held in the vertical direction and opened at the side end portion of the object to be processed in a horizontal state, and each of the conveyance driving means is rotationally driven at a synchronous speed. The conveyance drive lines of the respective gripping portions of the jig group of the linear conveyance drive unit of each of the conveyance driving means are parallel to each other and are spaced apart by the conveyance path at intervals, and are arranged at intervals of the width of each conveyance drive line. Handling of the treated object in the processing tank The horizontal width interval of the road is characterized in that a horizontal width adjustment device that can change a lateral width of the transport drive line of each transport device is provided, and the device is configured to set the transport drive of the first transport device The line is a conveyance reference line, and the conveyance line is disposed at a position where the lateral width of the conveyance path is narrowed or widened in a state where the conveyance drive line of the second conveyance device is parallel to each other, and the (2) The conveyance device moves forward and backward toward the first conveyance device in a lateral direction of the conveyance path (a direction orthogonal to the conveyance direction of the workpiece), and is configured to be disposed above the conveyance path of the plate-shaped workpiece. The plurality of anodes are divided into a first side anode (first side anode) disposed on the first conveyor side and a second side anode disposed on the second conveyor side (second side anode) The second side anode is attached to the second conveyor side so that the second side anode moves in the lateral direction in conjunction with the movement of the second conveyor unit in the lateral width direction of the horizontal width adjusting device, and is adjusted by the horizontal width. The anode of the first side and the second side of the anode means in a conveyance interval of the lateral width is narrowed passage state, the vertical deviation is disposed opposite to the side of the distal end portion may overlap each other.

In order to solve the above problem (second problem), the present invention (the invention of claim 2) provides a horizontal transfer type electrolytic plating treatment apparatus, comprising: a plurality of clamps driven in a ring shape and having two parallel A conveying device that continuously transports the plate surface of the plate-shaped workpiece in the horizontal and vertical postures of the plating treatment liquid in the electrolytic plating treatment tank at both side edges of the plate-shaped workpiece (for example, a printed wiring board) at the side edge portion Provided in the plating treatment liquid of the above electrolytic plating treatment tank, and water in the above-mentioned conveying device The upper and lower positions of the conveyance path of the plate-shaped workpiece to be conveyed are arranged in parallel with the plate surface of the workpiece, and a plate shape or a plurality of spaces are disposed in a predetermined space portion in the conveyance direction of the workpiece. An aperture-shaped anode; and the space portion disposed between the anodes disposed at an upper position or an upper position of the conveyance path of the workpiece, is interposed in a direction intersecting the conveyance direction of the workpiece A plurality of discharge nozzles are formed at intervals, and a discharge discharge pipe for discharging a plating treatment liquid is discharged from the discharge nozzles toward a surface of the workpiece, and the clamp is supplied with a cathode current (cathode current) between the upper and lower anodes. The apparatus is subjected to an electrolytic plating treatment on the surface of the object to be processed, and the conveyance device is a first conveyance device and a first device disposed on both sides of the conveyance path through the workpiece In the second transport device, each of the first and second transport devices includes a transport drive device that is rotationally driven in a ring shape along the transport path of the transport path. A plurality of the jigs are mounted at intervals, and the jig is provided at a lower end portion with a nip portion that is held in a vertical direction and opened at a side end portion of the object to be processed in a horizontal state, and each of the conveyance driving means is at a synchronous speed. The rotation drive has a horizontal width interval in which the respective conveyance drive lines of the respective clamp portions of the jig group of the linear conveyance drive unit of each conveyance drive unit are parallel to each other and separated by the conveyance path, and the conveyance drive lines are respectively arranged. The horizontal width interval is formed as a laterally wide interval of the conveyance path of the workpiece in the treatment tank, and is characterized in that a lateral width adjustment device that can change the lateral width of the conveyance drive line of each conveyance device is provided. a configuration in which the transport drive line of the first transport device is set as a transport reference line, and the transport reference line is in the second When the conveyance drive line of the conveyance device is parallel to each other, the conveyance path is disposed at a position in which the lateral width of the conveyance path is narrowed or widened, and the second conveyance device can be moved forward and backward toward the first conveyance device. In the lateral direction of the passage (the direction orthogonal to the conveyance direction of the workpiece), a plurality of the anodes disposed above the conveyance path of the sheet-like workpiece are divided into the first The first side anode (first side anode) on the conveyance device side and the second side anode (second side anode) disposed on the second conveyor side are attached to the second conveyor side so that the second side anode The lateral width adjustment device moves in the lateral direction in conjunction with the movement of the second conveyor in the horizontal width direction, and the lateral width adjustment device is vertically displaced in a state where the lateral width of the conveyance path is narrowed. The first side anode and the second side anode are disposed so as to overlap each other on the front end side, and the plurality of jet discharge tubes disposed above the conveyance path of the workpiece are divided into The first side discharge pipe provided on the first conveyance device side and the second side discharge pipe disposed on the second conveyance device side, and the second side discharge pipe is disposed on the second conveyance device side. The horizontal width adjustment device moves in the lateral direction in conjunction with the movement of the second conveying device in the lateral direction, and the first side discharge pipe and the second side discharge pipe are horizontally offset from each other. The direction in which the object is handled.

In order to solve the above problem (first problem), the present invention (the invention of claim 3) provides a horizontal transfer type electrolytic plating treatment apparatus, comprising: a plurality of clamps driven in a ring shape and having two parallel Both side edges of a plate-shaped object to be processed (for example, a printed wiring board) at the side edge portion The conveying device that continuously transports the plate surface of the plate-shaped workpiece in the plating solution of the electrolytic plating bath in a horizontal position in the vertical direction, and the plating treatment liquid disposed in the electrolytic plating bath, is carried by the above The upper and lower positions of the conveyance path of the plate-shaped workpiece to be conveyed by the apparatus are arranged in parallel with the plate surface of the workpiece, and the plate is arranged at a constant interval in the conveyance direction of the workpiece or An anode having a perforated plate, such that the above-mentioned workpiece is passed through the above-mentioned workpiece through a cathode current (cathode current) between the upper and lower anodes, thereby performing electrolytic plating on the surface of the object to be treated. In the apparatus for processing, the transport apparatus is configured by a first transport device and a second transport device that are disposed on both sides of a transport path through the workpiece, and the first and second transport devices are respectively provided along the The linear transport drive unit of the transport path is a transport drive unit that is driven to rotate in a ring shape. The transport drive unit is provided with a plurality of the clamps at intervals, and the clamp is provided at the lower end. The nip portion of the side end portion of the object to be processed that is horizontally held and opened in the vertical direction is driven by the respective conveyance driving means at a synchronous speed, and has a jig group that allows the linear conveyance drive unit located in each conveyance drive means The transport drive lines of the respective nip portions are parallel to each other and are spaced apart by the width of the transport path, and the lateral width of each transport drive line is used as the lateral width of the transport path of the processed object in the processing tank. In a configuration, the horizontal width adjusting device for changing the lateral width of the transport drive line of each transport device is provided, and the device is configured to set the central position at a distance from the lateral width of each transport drive line. The center line parallel to the drive line is the conveyance reference line, and the conveyance reference line is equally spaced from each other while the conveyance drive lines are parallel to each other. The horizontal width is disposed at a position in which the lateral width of the conveyance path is narrowed or widened, and each conveyance device is moved forward and backward toward the conveyance reference line in a lateral direction of the conveyance path (with respect to the workpiece) The plurality of anodes disposed above the conveyance path of the plate-shaped workpiece are divided into first anodes disposed on the first conveyor side and disposed on the first side The second side anode on the second conveyor side is attached to each of the first and second conveyors so that the anodes on the first side and the second side and the horizontal width adjusting device are first and second. Each of the transporting devices moves in the lateral direction in conjunction with the movement in the lateral direction, and the lateral width adjusting device disposes the first side and the opposite side in a state in which the lateral width of the transport path is narrowed. Each of the anodes on the second side can overlap the front end sides of each other.

In order to solve the above problem (second problem), the present invention (the invention of claim 4) provides a horizontal transfer type electrolytic plating treatment apparatus, comprising: a plurality of clamps driven in a ring shape and having two parallel A conveying device that continuously transports the plate surface of the plate-shaped workpiece in the horizontal and vertical postures of the plating treatment liquid in the electrolytic plating treatment tank at both side edges of the plate-shaped workpiece (for example, a printed wiring board) at the side edge portion In the plating treatment liquid disposed in the electrolytic plating treatment tank, the upper and lower positions of the conveyance path of the plate-shaped workpiece conveyed horizontally by the conveyance device are disposed in parallel with the plate surface of the workpiece, and a plate-shaped or perforated plate-shaped anode disposed in a plurality of fixed space portions in a conveyance direction of the workpiece; and the anode disposed at an upper position or an upper position of the conveyance path of the workpiece The space portion between the two is in the direction of conveyance of the object to be processed A plurality of discharge nozzles are formed at regular intervals in the direction of the fork, and a discharge discharge pipe for discharging the plating treatment liquid is discharged from the discharge nozzles toward the surface of the workpiece, and the clamp passes a cathode current between the upper and lower anodes ( The cathode current is supplied to the surface of the workpiece to be subjected to an electrolytic plating process, and the conveyance device is disposed on both sides of the conveyance path through the workpiece. The first transport device and the second transport device each include a transport drive unit that is rotationally driven in a ring shape along the linear transport drive unit along the transport path, and the transport drive means is interposed therebetween. A plurality of the jigs are provided at intervals, and the jig is provided with a nip portion at the lower end portion that is held in the vertical direction and opened at the side end portion of the object to be processed in a horizontal state, and each of the conveyance driving means is rotationally driven at a synchronous speed. The conveyance drive lines of the respective gripping portions of the jig group of the linear conveyance drive unit of each conveyance drive means are parallel to each other and above The horizontal width interval in which the conveyance paths are spaced apart from each other is formed by the lateral width interval of the conveyance path of the workpiece as the treatment tank, and the interval between the conveyance paths of the conveyance drive lines is set to be different from each other. A horizontal width interval adjusting device for transporting the width of the drive line, wherein the center line parallel to the transport drive line at a central position spaced apart from the lateral width of each transport drive line is set as a transport reference line, and the transport is performed. The reference line is disposed at a position where the lateral width of the conveyance path is narrowed or widened in a state where the conveyance drive lines are parallel to each other, and the respective conveyance devices are directed toward the conveyance reference line. The forward and backward movement is moved in the lateral direction of the conveyance path (the direction orthogonal to the conveyance direction of the workpiece), and is configured to be disposed in the plate shape. The plurality of anodes above the object transport path are divided into a first side anode disposed on the first conveyor side and a second side anode disposed on the second conveyor side, respectively, and are attached to the first and the first On the side of each of the transport devices 2, the anodes on the first side and the second side are moved in the lateral direction in conjunction with the movement of the first and second transporting devices in the horizontal width direction by the lateral width adjusting device. In the horizontal interval adjusting device, in the state in which the lateral width interval of the transport path is narrowed, the anodes on the first side and the second side facing each other in the up-and-down offset position are overlapped with each other at the distal end portion side, and The plurality of jet discharge pipes disposed above the conveyance path of the workpiece are divided into a first side discharge pipe disposed on the first conveyor side and a second side disposed on the second conveyor side The discharge pipes are disposed on the respective conveyance devices on the first and second sides, so that the first and second discharge pipes and the horizontal width adjustment device perform the first and second conveyance devices. The movement in the width direction is linked in the width direction The horizontal discharge of each of the opposing first and second discharge tubes is horizontally displaced in the conveyance direction of the workpiece.

According to the invention (the invention of the first and third aspects of the patent application), even if the lateral width of the conveyance path is widened or narrowed in accordance with the lateral width of the plate-shaped object to be conveyed horizontally, it is not only possible to correspond to the horizontal level. The lateral width of the upper plate-shaped object to be processed changes the lateral width of the upper anode, and the upper anode can be placed at the most appropriate position for the plate-shaped objects having different lateral widths. Thereby, it is possible to perform equal electric power on the plate-shaped workpiece after the change in the horizontal width. Plating treatment can solve the first problem.

Moreover, according to the invention (the invention of the second and fourth aspects of the patent application), even if the lateral width of the conveyance path is widened or narrowed in accordance with the lateral width of the plate-shaped object to be conveyed horizontally, it is not limited The horizontal width of the plate-shaped workpiece to be transported in a horizontal direction is changed to the tube length of the upper jet discharge tube, and the position of the plurality of discharge nozzles can be disposed at the most appropriate position on the plate surface of the plate-shaped workpiece having different lateral widths. The processing liquid is discharged uniformly toward the surface of the plate-shaped object to be processed having a wide width. Thereby, the plate-shaped workpiece after the change in the horizontal width can be uniformly plated, and the second problem can be solved.

Embodiments of the present invention will be described with reference to the drawings. In the first to fourth drawings, the transport device (the first transport device 5A and the second transport device 5B) is provided, and the plurality of jigs 7 that are rotationally driven in a ring shape hold the plate-shaped workpiece P having parallel side edges. (for example, the printed wiring board, hereinafter referred to as the board-shaped workpiece is the substrate P), the plate surface of the plate-shaped workpiece P is placed up and down in the plating solution E of the electrolytic plating bath 1 The posture is continuously conveyed in the direction of the arrow A; the anode 30 having a plate shape or a perforated plate shape (perforated plate or the like) is disposed in the plating treatment liquid E of the electrolytic plating treatment tank 1 and the plate of the workpiece P The surface is disposed in parallel with the upper and lower positions of the conveyance path 3 of the sheet-like workpiece P conveyed horizontally by the conveyance device, and is disposed in a plurality of space portions F having a constant interval in the conveyance direction of the workpiece P; the jet discharge tube 40, the space between the anodes 30 disposed in the upper position or the upper and lower positions of the conveyance path 3 of the workpiece P In the portion F, a plurality of discharge nozzles are formed at a constant interval in a direction orthogonal to the conveyance direction of the workpiece P, and the plating treatment liquid E is directed toward the surface of the workpiece P from the discharge nozzles (substrate The surface of the workpiece P that supplies the cathode current (cathode current) is passed between the upper and lower anodes 30 and 30, in which the metal ions are deposited in the treatment liquid of the treatment tank, and the level of the workpiece P is passed. The surface of the object to be treated is subjected to an electrolytic treatment such as plating treatment.

In the first embodiment, the plate-shaped workpiece P is supplied from the left side to the electrolytic plating bath 1 in a horizontal state in which the upper surface of the plate surface is horizontally conveyed, and is continuously conveyed in the direction of the arrow A through the plating processing tank 1 in a horizontal state. A schematic top view of the apparatus that is carried out from the electrolytic plating bath 1 in the right direction after the treatment. In addition, the horizontally long loading port 1b of the plate-shaped workpiece P in the horizontal state is carried out from the electrolytic plating bath 1 in the horizontally long loading port 1a of the electrolytic plating bath 1 The upper and lower sealing rollers (not shown) are horizontally disposed inside the processing tank 1 corresponding to the inlet 1a and the outlet 1b, and are sealed so that the plating solution E does not leak from the inlet 1a and the outlet 1b.

The conveyance device is configured to convey the sheet-like workpiece P horizontally across the passage section 2 (the section indicated by the arrow 2 in the first drawing) of the electrolytic plating treatment tank 1, and to provide the workpiece P to be electrolytically plated in the treatment tank 1 The conveyance path 3 is constituted by the first conveyance device 5A and the second conveyance device 5B on both sides of the gap. The first conveyance device 5A and the second conveyance device 5B are mounted on the conveyance means 6 of the linear drive unit 6a and the outer linear drive unit 6b which are parallel to each other in the form of an annular rotation drive, and are installed at equal intervals. Most of the fixtures 7... are constructed. The jig 7 is provided with a nip portion (clamp contact portion) for holding and opening the side end portion of the workpiece P in the vertical direction at the lower end portion. The linear drive unit 6a along the inside of the conveyance path 3 of the workpiece P constitutes a linear conveyance drive unit (6a). The length of the linear conveyance drive unit 6a (inner linear drive unit 6a) of each conveyance drive means 6 in the conveyance direction is slightly longer than the passage section 2. In the embodiment of the drawings, the conveyance drive means 6 that is rotationally driven in a ring shape is a toothed drive belt 9 that is driven to rotate in a ring shape by the roller 8, and one of the rollers 8 that is rotationally driven (for example, the first one) The roller 8) on the carry-out side of the figure. The roller 8 is provided with teeth that engage the tooth drive belt 9. The conveyance drive means 6 may be a chain-rotating drive chain that is attached to the sprocket. Further, the means for rotating the one of the rollers 8 (for example, the roller 8 on the carry-out side in the first drawing) may be provided as shown in Fig. 7, and the respective conveyances of the first conveying device 5A and the second conveying device 5B may be provided. In the embodiment of the fifth and sixth embodiments, the respective transport driving means 6 for the first transporting device 5A and the second transporting device 5B are rotationally driven by the individual transporting drive motor 50, and The rotation driving means for the separate conveyance drive motor 50 will be described later based on Figs.

The respective conveyance driving means 6 and 6 of the first conveyance device 5A and the second conveyance device 5B are synchronously rotationally driven in the direction of the arrow B at the same speed, and are located in the linear conveyance drive unit 6a (inside linear drive unit) of each conveyance drive means. Each of the conveyance drive lines (the conveyance drive line of the first conveyance device 5A is indicated by L1 and the conveyance drive line of the second conveyance device 5B is indicated by L2) is a conveyance drive line of each of the clamp portions (clamp contact portions) of the jig group 7 Formed to carry path 3 The jig groups 7 ... which are parallel to each other and to each other are rotationally driven for positions which are symmetrically spaced. Each of the conveyance drive lines L1 and L2 has a laterally wide interval W that is separated by the conveyance path 3, and the horizontal width interval W is configured as a lateral width interval of the conveyance path 3 of the workpiece P in the electrolytic plating treatment tank 1. The both sides of the workpiece P are held by the jig group 7 of the conveyance drive lines L1 and L2 of the respective conveyance devices 5A and 5B, and the objects to be processed are formed in the passage section 2 of the electrolytic plating treatment tank 1. Move in the direction of handling. The conveyance speed of the workpiece of the conveyance device is 0.5 m to 2 m in one minute, and is variable depending on the plating treatment conditions of the workpiece P.

In the case of the rectangular plate-shaped workpiece P, in the case of the rectangular plate-shaped workpiece P, the conveyance drive means 6 which is driven by the ring rotation drive is spaced apart from each other at a plurality of intervals. Further, in the first drawing, the jig group 7 is shown only in a range of a part of the rotational driving path, but is mounted over the entire range of the transport driving means 6 at equal intervals.

As can be understood from the second diagram, the first conveyance device 5A and the second conveyance device 5B are provided with the movement of the jig group 7 which guides the linear drive unit 6a (the linear conveyance drive unit 6a) located inside in a fixed state. Fixed rail 10. The length of the fixed rail 10 in the conveyance direction is configured to be slightly longer than the passage section 2 of the surface treatment tank 1. Further, when the present invention is used as an electrolytic treatment device such as a plating treatment device, the fixed rail 10 that moves the jig group 7 of the linear drive unit 6a (the linear conveyance drive unit 6a) that is located inside has the cathode current. The function of supplying power to the power supply rail through which the workpiece is conveyed through the jig 7 is supplied. Further, although omitted in FIG. 2, it is provided with a linear drive that is guided in a fixed state and located outside. The fixed rail 10 of the movement of the jig group 7 of the portion 6b. The fixed rail that guides the movement of the jig group 7 of the linear drive unit 6b located on the outer side has a recirculation path for supplying a reverse current (anode current) to the separation processing tank 12 disposed on the left and right sides of the electrolytic plating bath 1 The function of the power supply rail of the jig 7 can peel off the metal attached to the jig in the peeling treatment tank 12 of the return path.

Each of the first conveyance device 5A and the second conveyance device 5B includes a jig 7 that controls the start end portion 2a of the conveyance path 3 (the passage portion 2 of the electrolytic plating treatment tank) that passes through the workpiece P to be held from the open state. The holding state of the side edge portion of the workpiece P and the jig for controlling the jig 7 of the end portion 2b of the conveyance path 3 (the passage section 2 of the electrolytic plating treatment tank) passing through the workpiece P from the holding state to the open state Automatic opening and closing control means. The automatic opening and closing control means of the jig has a height difference between the front end position of the start end portion 2a and the end portion of the end portion 2b fixedly disposed in the rotation drive direction by the rotation drive path along the jig group 7 The jig opening/closing guide 60 of the guide surface (shown in FIG. 1) and the jig 7 that is rotationally driven in a ring shape are engaged with the jig opening guide 60. The automatic opening and closing control means for this jig will be described later based on Fig. 9.

A horizontal width adjusting device for changing the lateral width of the transport drive lines L1 and L2 is provided. By the lateral width adjusting device, the lateral width W of the conveyance path 3 of the workpiece in the electrolytic plating treatment tank 1 can be adjusted. In the horizontal interval adjusting device, in the embodiment of the first to sixth embodiments, the transport driving line L1 of the first transporting device 5A is set as In the state in which the conveyance line L1 is parallel to the conveyance drive line L2 of the second conveyance device 5B, the conveyance line L1 is configured such that the lateral width W disposed in the conveyance path 3 is narrowed or widened. The second conveyance device 5B at the position is driven forward in the lateral direction of the conveyance path 3 (a direction orthogonal to the conveyance direction A of the workpiece P) toward the first conveyance device 5A. In other words, in this embodiment, one of the conveyance devices (the second conveyance device 5B) is driven forward and backward in the lateral direction, and the width of each conveyance drive line L1, L2 of the first conveyance device 5A and the second conveyance device 5B can be changed. Interval W.

As can be understood from the fifth and sixth figures, the horizontal width adjusting device is configured to extend in the lateral direction in which the entire second conveying device 5B is retracted in the lateral direction and is spaced apart in the conveying direction. The lateral width direction movement guide means 20 of the plurality of laterally-width-moving guide rails 21 and the second conveyance means 5B movable in the lateral direction by the lateral direction movement guide means 20 are moved in the lateral width direction The guide rail 21 is formed by a lateral width direction driving means 25 which is a driving source for the lateral width adjusting motor 26 which is driven forward and backward in the lateral direction. When the second conveyance device 5B is driven in and out of the first conveyance device 5A, the lateral width W of the conveyance path 3 of the workpiece can be narrowed, and when the drive is driven backward, the conveyance path 3 of the workpiece can be made. The width interval W is widened.

The second conveyance device 5B is a stage 22 that can move the guide rail 21 to be held in each lateral direction. The stage 22 can be understood as a plurality of vertical and horizontal movements of the guide rail 21 in the lateral direction by the sixth embodiment. The rollers are held on the rail 21) to fix the support frame of the second handling device 5B The second conveying device 5B can be smoothly slid along the lateral direction moving rails 21.

As shown in FIGS. 5 and 6, the horizontal width direction driving means 25 includes a rotation shaft 27 that can freely rotate the shaft support by the horizontal width adjustment motor 26 as a forward and reverse rotation drive source (the rotation shaft 27 is oriented a lever member 28 that is fixed to the rotation shaft 27 in the lateral direction; a connecting member 29 that connects the operation portion of the lever member 28 to the stage 22 on the second conveyor 5B side, and When the lever member 28 rotates in the lateral direction, the stage 22 (the second conveyance device suspended on the stage) is moved forward and backward in the lateral direction by moving the guide rail 21 in the lateral direction.

In addition, the horizontal width direction driving means 25 may include the horizontal width adjusting motor 26 and the rotational driving force for obtaining the normal rotation or the reverse rotation of the motor, and the corresponding direction is the lateral width direction. Each of the stages 22 that are rotationally driven is wound around a horizontally-moving belt (toothed belt) that is stretched, and is driven in the lateral direction of each of the laterally-moving belts (toothed belts) to move the second conveying device 5B along The horizontal width direction moving rail 21 is driven forward and backward in the lateral direction.

In the horizontal width adjusting device of the embodiment of the first to sixth embodiments, the side edge of the plate-shaped workpiece P supplied to the parallel side edges of the electrolytic plating bath 1 is used as a reference supply line. The reference supply line and the conveyance drive line L1 (reference conveyance drive line) of the first conveyance device 5A are set, and the second supply device can be adjusted by matching the supply line of the other side of the workpiece P having different lateral widths. 5B's above handling drive line In the case of the L2 (variable conveyance drive line), even if the sheet-like workpiece P having a different width and width is used, the surface treatment can be performed while the both side edges are continuously conveyed while being horizontally conveyed.

As described above, the electrolytic plating treatment apparatus is disposed in parallel with the plate surface of the workpiece in the vertical position of the conveyance path 3 of the sheet-like workpiece P conveyed horizontally by the conveyance device, and conveys the object to be processed. An anode 30 having a plate shape or a perforated plate shape (perforated plate or the like) disposed in a plurality of fixed space portions F, and an anode 30 disposed between the anodes 30 at a position above and below the conveyance path 3 of the workpiece P In the space portion F, a plurality of discharge nozzles are formed at a constant interval in a direction orthogonal to the conveyance direction of the workpiece P, and the plating treatment liquid is applied to the surface of the workpiece P from the discharge nozzles ( The jet discharge tube 40 is discharged from the substrate surface.

However, in order to adjust the lateral width W of the jig 7 of the conveyance device (the first conveyance device 5A and the second conveyance device 5B) which are disposed on the right and left sides of the plate-shaped workpiece P having different lateral widths, for example, In the embodiment of the present invention, when the jigs 7 of one of the transporting devices (the second transporting device 5B) are configured to be movable in the lateral direction, the lateral width of the jig 7 that is movable in the lateral direction is spaced. The upper anode 30 is disposed in the moving range in the direction, and the upper anode 30 is disposed offset on the side of the jig 7 on which the other side of the plate-shaped workpiece P is conveyed and fixed, and the anode 30 surface is produced. The lateral width of the sheet-like workpiece P that is horizontally conveyed at both ends of the jig 7 group of the transport devices (the first transport device 5A and the second transport device 5B) on the left and right sides cannot be disposed at a preferred position. The problem.

In order to solve this problem, the present invention (the first item of the patent application scope) is as In the embodiment of the first to fourth embodiments, the plurality of anodes (upper anodes 30) disposed above the conveyance path 3 of the plate-shaped workpiece P are divided into the first conveyance device 5A. The first side anode (first side anode) 31 on the side and the second side anode (second side anode) 32 disposed on the second conveyor 5B side are attached to the second conveying device through the suspension holding member. In the fixing portion on the side of the fifth side, the outer end portion of the second side anode (second side anode) 32 moves in the lateral direction in conjunction with the movement of the lateral width adjusting device to form the second conveying device 5B in the lateral direction. In the state in which the lateral width W of the conveyance path 3 is narrowed, the first side anode 31 and the second side anode 32 are slid on the front end side of each other and can be stacked up and down. Ground offset configuration. In the second and third figures, the front end portion of the first side anode 31 is indicated by reference numeral 31a, and the front end portion of the second side anode 32 is indicated by reference numeral 32a.

According to the invention (the invention of claim 1), even if the horizontal width of the sheet-shaped workpiece P to be conveyed horizontally is such that the lateral width W of the conveyance path 3 is widened or narrowed, the second The side anode 32 moves in the lateral direction in conjunction with the movement of the second conveying device 5B formed by the lateral width adjusting device in the lateral direction, so that the opposing first side anode 31 and the second side anode 32 are at the front end of each other. Since the portion side can be overlapped and arranged in the vertical direction, the lateral width of the upper anode 30 formed by the first side anode 31 and the second side anode 32 can be changed in accordance with the lateral width of the plate-shaped workpiece P to be conveyed horizontally. Further, the anode 31 described above can be disposed at an optimum position with respect to the plate-shaped workpiece P having a different lateral width. By this, The plate-shaped workpiece after the change in the horizontal width is subjected to uniform plating treatment.

In addition, the horizontal width W of the jig 7 group of the conveyance devices (the first conveyance device 5A and the second conveyance device 5B) disposed on the left and right sides is adjusted in accordance with the plate-shaped workpiece P having different lateral widths. In the embodiment of the present invention, when the group of the jigs 7 of one of the conveying devices (the second conveying device 5B) is movable in the lateral direction, the movement of the jigs 7 that are movable in the lateral direction is formed. When the upper jet discharge pipe 40 is disposed in the upper portion, the upper jet discharge pipe 40 is disposed offset from the side of the jig 7 on the fixed side where the other end portion of the plate-shaped workpiece P is held. The discharge nozzle position of the upper jet discharge pipe 40 cannot be handled in a plate shape in which the jigs 7 of the transport devices (the first transfer device 5A and the second transfer device 5B) on the left and right sides are horizontally transported at the both end sides. The problem that the horizontal width of the object P is disposed at a preferred position.

In order to solve the above problem, the present invention (the second aspect of the patent application) is a plurality of the above-described ones of the first to fourth embodiments, and is disposed above the conveyance path 3 of the plate-shaped workpiece P. The jet discharge pipe (the upper jet discharge pipe) 40 is divided into a first side discharge pipe 41 disposed on the first conveyor 5A side and a second side discharge pipe 42 disposed on the second conveyor 5B side. Composition. The first side discharge pipe 41 and the second side discharge pipe 42 extend in a direction substantially orthogonal to the conveyance direction of the substrate P, and a plurality of discharge nozzles (not shown) are formed in the pipe. The treatment liquid can be discharged toward the substrate surface at a constant interval in a direction orthogonal to the conveyance direction of the substrate P. The second side discharge pipe 42 is fixed to the fixing portion on the side of the second conveying device 5B so as to be spaced from the horizontal width. The second conveying device 5B formed by the entire device moves in the lateral direction and moves in the lateral direction, and the first side discharge pipe 41 and the second side discharge pipe 42 are opposed to each other in the conveyance direction of the workpiece P. Horizontally offset.

According to the invention (the invention of claim 2), in addition to the effects of the above invention (the invention of claim 1), even if the horizontal width of the plate-shaped workpiece P conveyed horizontally is made, the conveyance path is made. When the horizontal width interval W of the third side is widened or narrowed, the second side discharge pipe 42 moves in the lateral direction in conjunction with the movement of the second conveyance device 5B formed by the horizontal width adjustment device in the lateral direction. The first side discharge pipe 41 and the second side discharge pipe 42 are horizontally displaced in the conveyance direction of the workpiece P, so that the lateral width of the sheet-shaped workpiece P to be conveyed horizontally can be changed. The first side discharge pipe 41 and the second side discharge pipe 42 form a pipe length of the upper jet discharge pipe 40, and can discharge a large number of the plate faces (substrate faces) of the plate-shaped workpiece P having different lateral widths. The position of the nozzle is placed at the most appropriate position, and the processing liquid can be uniformly discharged to the plate surface (substrate surface) of the plate-shaped workpiece having different lateral widths. Thereby, the plate-shaped workpiece after the change in the horizontal width can be uniformly plated.

As described above, the conveyance driving means 6 for the annular rotation drive is a toothed drive belt 9 (which may be a chain) that is driven to rotate in a ring shape by the roller 8, and rotationally drives the other roller 8 (for example, the first one) In the figure, the side roller 8) is shipped out. The means for rotationally driving the one of the rollers 8 (for example, the carry-out side roller 8 in Fig. 1) will be described below based on the embodiments of Figs.

The single transport motor 50 is used as the first transport device 5A. The spur gear (drive spur gear) 52 and the shaft support of the conveyance drive source 6 of the conveyance drive means 6 of the second conveyance means 5B are driven by the rotation of the shaft 51 in the vertical direction of the motor 50. The spur gear of the rotary driven shaft 53 (the driven spur gear) 54 that is disposed in parallel with the rotary drive shaft 51 is engaged, and the parallel two shafts (the rotary drive shaft 51 and the rotary driven shaft 53) are rotated in opposite directions to each other. a toothed belt is hung between the grooved roller 55a pivotally supported by the rotary drive shaft 51 and the grooved roller 55b coaxial with the roller 8 of the conveyance drive means 6 of the first conveyance device 5A ( The belt 56 is fixed, and the grooved roller 57a coaxially supported by the grooved roller 57a of the rotary driven shaft 53 and the roller 8 of the conveyance drive means 6 of the second conveyor 5B is A toothed belt (actuation belt) 58 is interposed so that the arrangement position of the grooved roller 57a of the rotation drive shaft 53 is shifted in the lateral direction with respect to the horizontal width adjustment device (2) The movement of the grooved roller 57b coaxial with the roller 8 of the conveyance driving means 6 of the conveying device 5B Since the moving positions are formed at a constant distance from each other, the conveyance driving means 6 of the first conveyance device 5A and the second conveyance device 5B are rotationally driven in opposite directions by the speed at which the individual conveyance drive motors 50 are synchronized. According to this driving means, it is possible to prevent the rotation of the clamps 7 on the left and right sides of the ring-shaped rotary drive from being displaced, and the both ends of the plate-shaped workpiece P can be horizontally held by the clamps 7 on the left and right sides. unit. Further, according to the present invention, the displacement prevention of the conveyance movement can be achieved under the variable condition of the lateral width W of the conveyance path 3 of the sheet-like workpiece P.

The horizontal width change of the conveyance drive lines L1 and L2 is changed. In the embodiment of the first aspect to the sixth embodiment, the first transport device (the second transport device 5B) is driven forward and backward in the lateral direction, and the first transport device 5A and the second transport device 5B can be changed. The lateral width of each of the transport drive lines L1 and L2 is W. Another embodiment of the horizontal width adjusting device is shown in Fig. 7.

In the horizontal width adjusting device of the embodiment of the present invention, the center position of the lateral width W of the conveyance drive line L1 of the first conveyance device 5A and the conveyance drive line L2 of the second conveyance device 5B is set to the conveyance drive line L1. The center line L3 parallel to the L2 is a conveyance reference line, and the horizontal width W of the conveyance path is simultaneously changed in a state in which the conveyance drive lines L1 and L2 are parallel to each other with respect to the conveyance reference line (center line) L3. Each of the conveying devices 5A, 5B, which is disposed in a narrow direction or a direction in which the direction is widened at the same time, is moved forward and backward at a simultaneous and equal moving distance toward the transport base line L3 at a horizontal width of the transport path 3 Direction (direction orthogonal to the conveyance direction A of the workpiece P). In other words, in the above-described embodiment, the left and right conveyance devices (the first conveyance device 5A and the second conveyance device 5B) are moved at approximately equal distances, and the respective conveyances of the first conveyance device 5A and the second conveyance device 5B can be changed. The lateral widths of the drive lines L1, L2 are spaced apart by W. In addition, Fig. 7 is a view showing only the jig 7 on the inside of the inside of the table, and the illustration of the jig 7 on the outside is omitted.

In the horizontal width adjusting device of FIG. 7, the first conveying device 5A and the second conveying device 5B are guided to extend in the lateral direction in the lateral direction, and are disposed at intervals in the conveying direction. Moving the guide means 20 in the lateral direction of the plurality of laterally moving guide rails 21, and By the lateral direction movement guide means 20, the respective conveyance means 5A, 5B which are movable in the lateral direction can move the guide rail 21 in the lateral width direction, and the lateral width adjustment motor 26 which can be driven forward and backward in the lateral direction can be driven. The horizontal width direction driving means 25 of the source is constituted. Each of the transporting devices 5A and 5B is a support frame for fixing the first transporting device 5A and the second transporting device 5B to each of the stages 22 that are movable and held in the lateral direction by the movable rails 21, so that the respective transporting devices 5A and 5B can be moved along The rail 21 is moved smoothly in the lateral direction.

As shown in Fig. 7, the horizontal width direction driving means 25 is provided with a single lateral width adjusting motor 26 provided on one side as a forward and reverse rotational driving source, and each of which is rotatable about a rotating shaft 27 of the shaft. The rotating shaft 27 is extended toward the conveying direction at a central position between the respective conveying devices 5A, 5B; a pair of lever members 28A fixed to the rotating shaft 27, whereby the rotating shaft 27 extends toward the symmetrical position 28B; the respective operating portions of the pair of lever members 28A and 28B are respectively coupled to the connecting member 29 of the stage 22 of the first conveying device 5A and the stage 22 of the second conveying device 5B, and the pair of lever members The rotation of the 28A and 28B in the lateral direction (rotation indicated by the arrow A in Fig. 7) causes the first conveying device 5A and the second conveying device 5B to move the guide rail 21 along the horizontal width direction at the same time, and is equally close to the width at the same time. Drive forward and backward in the direction or widening direction.

The rotation of the rotating shaft 27 in the forward and reverse directions (rotation indicated by the arrow A of the pair of lever members 28A and 28B) can also be rotated by the transmission means to rotate the driving force of the lateral width adjusting motor 26, but it is also possible to connect the rods ( Not shown in the drawing) the rotation drive shaft that connects the lateral adjustment motor 26 is pivoted toward the first A cam plate or a jig (not shown) that rotates in the direction and a lever (not shown) pivoted by the above-mentioned rotating shaft 27 are driven by the rotation of the lateral width adjusting motor 26 by changing the rotational motion to the swinging motion. In a rotation of the cam disc or the jig (not shown) whose shaft is pivoted, the lever (not shown) that is rotated (swinged) in the right and left direction gives the rotation shaft 27 a forward and reverse rotation.

Further, the lateral direction driving means 25 is not limited to the driving means of Fig. 7, and for example, the lateral width adjusting motor 26 corresponding to the first conveying device 5A and the second conveying device 5B may be provided on the left and right sides, as shown in Fig. 5, The horizontal width direction driving means 25 of the second conveying device 5B of Fig. 6 is driven.

Though not shown in the figure, the vertical position of the conveyance path 3 of the sheet-shaped workpiece P conveyed horizontally by the conveyance device is provided in parallel with the board surface of the workpiece P, and the workpiece P is placed on the workpiece P. The anode 30 in the form of a plate or a perforated plate (perforated plate or the like) disposed in a plurality of fixed space portions F, and the position or the upper and lower positions of the conveyance path 3 of the workpiece P are disposed. In the space portion F between the anodes 30, a plurality of discharge nozzles are formed at a constant interval in a direction orthogonal to the conveyance direction of the workpiece P, and the plating treatment liquid E is processed toward the above from the discharge nozzles. The jet discharge pipe 40 discharged from the plate surface (substrate surface) of the object P. In addition, as shown in Fig. 8, a plurality of the anodes (upper anodes) 30 disposed above the conveyance path 3 of the sheet-like workpiece P are separately disposed to be disposed on the side of the first conveyance device 5A. The first side anode 31 and the second side anode 32 disposed on the second conveying device 5B side are attached to the first and second conveying apparatuses 5A and 5B, respectively, so that the first side and the second side are Each of the anodes 31, 32 and the horizontal width adjusting device are formed The first and second respective transporting devices 5A and 5B move in the lateral direction in conjunction with the movement in the lateral direction, and the lateral width adjusting device is in a state in which the lateral width W of the transport path 3 is narrowed by the lateral width adjusting device. The anodes 31 and 32 on the first side and the second side of the opposing side are disposed so as to be vertically displaceable on the front end side of each other. In the eighth diagram, the front end portion of the first side anode 31 is indicated by reference numeral 31a, and the front end portion of the second side anode 32 is indicated by reference numeral 32a. In addition, as shown in Fig. 8, the plurality of the jet discharge pipes 40 disposed above the conveyance path 3 of the workpiece P are separately disposed so as to be disposed on the first side of the first conveyance device 5A side. The discharge pipe 41 and the second discharge pipe 42 disposed on the second transfer device 5B side are disposed on the first and second transfer devices 5A and 5B, respectively, so that the first side and the second side are respectively provided. The discharge pipes 41 and 42 move in the lateral direction in conjunction with the movement of the first and second conveying devices 5A and 5B formed by the horizontal width adjusting device in the lateral direction, and the first side and the second side are opposed to each other. Each of the discharge pipes 41 and 42 on the side is horizontally displaced in the conveyance direction of the workpiece P.

Next, the automatic opening and closing control means of the above-described jig will be described with reference to FIG. The jig automatic opening and closing control means is provided with a jig opening and closing guide 60 having a high position guiding upper surface portion 60a. The upper guiding upper surface portion 60a of the jig opening and closing guide 60 is fixedly disposed at the beginning of the conveying path 3 from the winding end portion of the rotation driving path of the jig group 7 to the conveying path 3 in the rotation driving direction. The position from the front position of the portion 2a and the position from the end portion 2b of the conveyance path 3 to the winding drive path portion on the end portion side in the rotation driving direction. As shown in Figure 9, the clamp opening and closing guide 60 is an upper portion guiding the upper surface portion 60a in the middle portion in the rotational driving direction of the jig 7, and guides both sides of the upper surface portion 60a at this high position as the inclined guiding lower surface portion 60b which gradually lowers the upper surface by the high guiding portion. The lower surface of the lower portion 60c is guided horizontally by the lower surface of the clamp opening and closing guide 60.

The jig 7 is substantially horizontally lower than the lower end portion of the substantially L-shaped fixing clamp 65 that is fixed in a state in which the conveyance driving means 6 (the toothed drive belt or the chain) that is rotationally driven by the ring is fixed by the bolting means. The bent portion forms the lower holding portion (lower contact) 65a, and the upper holding portion (upper contact) 66a is formed at a lower end portion of the movable lever 66 that is movable up and down and held by the fixed lever 65 so that the movable clamp is formed. The lever 66 is moved up and down by the elastic pressure of the compression spring (compression coil spring) 67, and controls the upper clamping portion (upper contact) 66a of the movable clamping lever 66 and the lower clamping portion (lower contact) 65a of the fixed clamping lever 65. In the normally closed state, the closed state is closed up and down (in this closed state, the state in which the side edges of the thin-plate-shaped workpiece in the horizontal state are held in the vertical direction) can be held.

As shown in Fig. 2, the jig 7 is attached to the inner side surface of the fixed clamp lever 65 in a fixed state, and the engaging member 70 for the fixed rail for the fixed rail 10 can be freely moved. The engaging member 70 is a fixed rail 10 that is slidably held in a cross-sectional shape from the upper and lower sides, and the above-described engaging member that slides in surface contact with the upper surface of the rail of the fixed rail 10 is formed in a long shape in the moving direction. As described above, the jig 7 that moves the conveyance drive lines L1 and L2 that have passed through the section 2 is guided by the inner fixed rail 10, and the workpiece P held by the jig 7 can be horizontally held. The jig 7 is made of metal, and the electric current (the current of the cathode) supplied from the inner fixed rail 10 can be supplied to the inside by the conductive jig 7 Treatment P.

A jig opening and closing engagement member 75 is attached to the upper portion of the jig 7. The jig opening/closing guide engagement member 75 is shown in Fig. 9. The bending portion of the substantially L-shaped inversion lever 77 is supported by the support shaft 78 so as to be pivotally supported on the side of the fixed clamp lever 65. The front end of the lower arm portion 77b of the reverse lever 77 is rotatably coupled to the upper portion of the movable clamp lever 66 via the pin shaft 79, and is attached to the front end of the upper arm portion 77a of the reverse lever 77 to open and close the guide along the clamp. a rotating roller 80 that guides the upper surface portion (60a, 60b) to rotate freely, and the rotating roller 80 is in an engaged state in which the upper surface portion 60a is rotated along the upper position of the clamp opening and closing guide 60, as in the first A dotted line in Fig. 9 indicates that the upper arm portion 77a is reversed upward with the fulcrum shaft 78 as an axis, so that the movable clamp lever 66 coupled to the front end of the lower arm portion 77b moves upward against the elastic pressure of the compression coil spring 67. The open state in which the upper clamping portion 66a of the movable clamp lever 66 and the lower clamp portion 65a of the fixed clamp lever 65 are separated in the up-and-down direction is controlled (the open state is the side edge of the plate-shaped workpiece that receives the held horizontal state). The state of supply and the maintenance of the plate-like object to be treated The side edges are in an open state. The arrow in Fig. 9 indicates the preferred moving direction of the jig 7. As shown in Fig. 9, the reverse lever 77 is disposed such that the fulcrum portion (the fulcrum shaft 78) is disposed at a rear position in the moving direction of the jig, and the rotating roller 80 at the tip end of the upper arm portion 77a is disposed in the moving direction of the jig. position. Further, as can be understood from Fig. 9, the height position of the rotating roller 80 in the closed state of the jig is set at a position which can be placed across the inclined guiding upper surface portion 60b of the above-described jig opening guide 60.

When the jig 7 is opened and closed by the above-mentioned jig, the jig is clamped The rotating roller 80 of the jig opening and closing engagement member 75 of the jig 7 is engaged with the upper surface portion (the upper guiding upper surface portion 60a) of the jig opening and closing guide 60 while the horizontal upper face of the above-described fixed clamping lever 65 of the jig 7 is The 65c is smoothly engaged with the horizontal guiding lower portion 60c of the clamp opening and closing guide 60, whereby the movable clamping lever 66 is moved upward against the elastic pressure of the compression coil spring 67, and the upper clamping portion 66a of the movable clamping lever 66 is controlled and fixed. The lower clamping portion 65a of the clamping lever 65 is formed in an open state in which the clamping portion 65a is separated from the vertical direction. By this, the clamp 7 of the start end portion 2a of the conveyance path 3 of the workpiece P is controlled from the open state to the closed state in which the side edge portion of the workpiece can be held, and the passage of the workpiece P is controlled. The jig 7 of the end portion 2b of the conveyance path 3 is in an open state from the closed state to the side edge portion where the object to be processed can be opened.

P‧‧‧ plate-shaped processed objects

1‧‧‧Electroplating treatment tank

E‧‧‧ plating solution

2‧‧‧ passage interval

2a‧‧‧ Beginnings

2b‧‧‧End Department

3‧‧‧Transportation path

5A‧‧‧1st handling device

5B‧‧‧2nd handling device

L1‧‧‧Transportation drive line for the first transport device

L2‧‧‧Transportation drive line for the second transport device

L3‧‧‧Transportation baseline

W‧‧‧Wide interval

6‧‧‧Transportation means

7‧‧‧ fixture

9‧‧‧With tooth drive belt or chain

10‧‧‧Fixed rails

12‧‧‧ peeling treatment tank

20‧‧‧Horizontal direction moving guidance

21‧‧‧Horizontal moving guide

22‧‧‧

25‧‧‧Horizontal drive

26‧‧‧Wide width adjustment motor

27‧‧‧Rotary axis

28‧‧‧Leverage components

29‧‧‧Connecting components

30‧‧‧Anode

31‧‧‧1st anode

32‧‧‧2nd anode

40‧‧‧Spray discharge tube

41‧‧‧1st side spit tube

42‧‧‧2nd side spit tube

50‧‧‧Moving drive motor

60‧‧‧Clamp opening and closing guide

60a‧‧‧High position to guide the upper face

65‧‧‧Fixed clamping rod

65a‧‧‧ Lower gripping section

66‧‧‧Active clamp

66a‧‧‧Upper gripping section

67‧‧‧Compression spring (compressed leaf spring)

75‧‧‧Clamp opening and closing guide engagement member

77‧‧‧Reverse lever

80‧‧‧Rotating roller

Fig. 1 is a schematic top view showing an embodiment of the present invention.

Fig. 2 is a schematic side view showing an embodiment of the present invention.

Fig. 3 is a schematic top plan view showing, in an enlarged manner, a main part of an embodiment of the present invention.

Fig. 4 is a schematic front view showing, in an enlarged manner, a main part of an embodiment of the present invention.

Fig. 5 is a schematic top view showing an enlarged embodiment of the present invention.

Fig. 6 is a schematic side view showing an enlarged embodiment of the present invention.

Fig. 7 is a schematic side view showing, in an enlarged manner, another embodiment of the present invention.

Figure 8 is an enlarged view of the main part of another embodiment of the present invention. Slightly above view.

Fig. 9 is a schematic front view showing an embodiment of the clamp opening and closing control.

1‧‧‧Electroplating treatment tank

3‧‧‧Transportation path

5A‧‧‧1st handling device

5B‧‧‧2nd handling device

6‧‧‧Transportation means

7‧‧‧ fixture

8‧‧‧Roller

9‧‧‧With tooth drive belt or chain

10‧‧‧Fixed rails

30‧‧‧Anode

31‧‧‧1st anode

32‧‧‧2nd anode

32a‧‧‧ front end of the second side anode

40‧‧‧Spray discharge tube

41‧‧‧1st side spit tube

42‧‧‧2nd side spit tube

65‧‧‧Fixed clamping rod

65a‧‧‧ Lower gripping section

66‧‧‧Active clamp

66a‧‧‧Upper gripping section

67‧‧‧Compression spring (compressed leaf spring)

70‧‧‧ engaging members

75‧‧‧Clamp opening and closing guide engagement member

E‧‧‧ plating solution

L1‧‧‧Transportation drive line for the first transport device

L2‧‧‧Transportation drive line for the second transport device

P‧‧‧ plate-shaped processed objects

W‧‧‧Wide interval

Claims (4)

A horizontal transfer type electrolytic plating treatment apparatus comprising: a plurality of clamps that are driven by a circular rotation and hold both side edges of a plate-shaped workpiece having parallel side edges, so that the surface of the plate-shaped workpiece is In the plating treatment liquid of the electrolytic plating treatment tank, the conveyance device that continuously conveys the horizontal posture in the vertical direction, and the plating treatment liquid disposed in the electrolytic plating treatment tank, and the plate-shaped workpiece to be conveyed horizontally by the conveyance device The upper and lower positions of the conveyance path are arranged in parallel with the plate surface of the workpiece, and a plate-shaped or perforated plate-shaped anode disposed at a predetermined interval in the conveyance direction of the workpiece is passed through the jig. The apparatus to which the cathode current is supplied between the upper and lower anodes passes horizontally, thereby applying an electrolytic plating treatment to the surface of the workpiece, and the conveying device is disposed between the objects to be processed a first transport device and a second transport device on both sides of the transport path, each of the first and second transport devices including a linear transport drive unit along the transport path In the conveyance driving means for driving in a ring shape, a plurality of the jigs are attached to the conveyance driving means at intervals, and the jig is provided at the lower end portion with a clip that is held in the vertical direction and opened at the side end portion of the object to be processed in a horizontal state. Each of the conveyance driving means is rotatably driven at a synchronous speed, and each conveyance drive line of each of the clamp portions of the jig group of the linear conveyance drive unit of each conveyance drive means is parallel to each other and spaced by the conveyance path. The horizontal width interval of each of the transporting lines is a horizontal width interval of the transport path of the processed object in the processing tank, and is characterized in that the horizontal direction of the transport driving line of each transporting device is changed. Wide interval The horizontal width adjusting device is configured to set the transport drive line of the first transport device as a transport reference line, and the transport guide line is in a state in which the transport drive lines of the second transport device are parallel to each other. The second conveyance device is moved forward and backward toward the first conveyance device in a lateral direction of the conveyance path, and is disposed at a position in which the lateral width of the conveyance path is narrowed or widened. The plurality of anodes above the conveyance path of the plate-shaped workpiece are divided into a first side anode disposed on the first conveyor side and a second side anode disposed on the second conveyor side, and are attached to the first anode. (2) the conveyance device side moves the second side anode in the lateral direction in conjunction with the movement of the second conveyance device in the lateral width direction by the lateral width adjustment device, and the lateral width adjustment device is transverse to the conveyance path In the state in which the interval is narrowed, the first side anode and the second side anode which are opposed to each other are vertically overlapped so that the front end portions of the first side can overlap each other. A horizontal transfer type electrolytic plating treatment apparatus comprising: a plurality of clamps that are driven by a circular rotation and hold both side edges of a plate-shaped workpiece having parallel side edges, so that the surface of the plate-shaped workpiece is In the plating treatment liquid of the electrolytic plating treatment tank, the conveyance device is continuously conveyed in a horizontal posture in the vertical direction; and the plating treatment liquid disposed in the electrolytic plating treatment tank is conveyed by the sheet-shaped workpiece conveyed horizontally by the conveyance device. a plate-shaped or perforated plate-shaped anode that is disposed in parallel with the plate surface of the workpiece and that is disposed in a predetermined space portion in the conveyance direction of the workpiece; The space portion between the anodes at the upper position or the upper and lower positions of the conveyance path of the workpiece is moved to the workpiece a plurality of discharge nozzles are formed at regular intervals in a direction in which the transport direction intersects, and a jet discharge pipe for discharging the plating treatment liquid is discharged from the discharge nozzles toward the surface of the workpiece, and the jig is passed between the upper and lower anodes. The apparatus that supplies current by the current passes horizontally, thereby applying an electrolytic plating treatment to the surface of the workpiece, and the conveying device is first disposed on both sides of the conveyance path through the workpiece. The transport device and the second transport device each include a transport drive unit that is rotationally driven in a ring shape along the linear transport drive unit along the transport path, and the transport drive means is installed at intervals. In the above-described plurality of jigs, the jig has a nip portion at the lower end portion that is held at the side end portion of the object to be treated in the vertical direction, and each of the conveyance driving means is rotatably driven at a synchronous speed. The conveyance drive lines of the respective gripping portions of the jig group of the linear conveyance drive unit of the conveyance driving means are parallel to each other and The horizontal width interval in which the conveyance paths are separated by the interval is formed by the lateral width interval of the conveyance path of the workpiece in the treatment tank, and the interval between the conveyance paths is changed. A horizontal width interval adjusting device for the horizontal width of the drive line, wherein the transport drive line of the first transport device is set as a transport reference line, and the transport drive line is transported by the transport device at the second transport device In a state in which the lines are parallel to each other, the second conveyance means moves forward and backward toward the horizontal direction of the conveyance path toward the first conveyance device in a direction in which the lateral width of the conveyance path is narrowed or widened. The plurality of anodes disposed above the conveyance path of the plate-shaped workpiece are divided into the respective arrangements The first side anode on the first conveyor side and the second side anode disposed on the second conveyor side are attached to the second conveyor side so that the second side anode and the horizontal width adjustment device are The movement of the second conveying device in the lateral direction is moved in the lateral direction, and the lateral width adjusting device is provided with the first anode on the vertical side in a state where the lateral width of the conveying path is narrowed. The second side anodes are overlapped with each other on the front end side, and the plurality of jet discharge pipes disposed above the conveyance path of the workpiece are divided into the first ones disposed on the first conveyance device side. The side discharge pipe and the second side discharge pipe disposed on the second conveyance device side, and the second side discharge pipe is disposed on the second conveyance device side, and the second width discharge adjustment device performs the second The movement of the conveying device in the lateral direction is moved in the lateral direction, and the opposing first side discharge pipe and the second side discharge pipe are horizontally displaced in the conveyance direction of the workpiece. A horizontal transfer type electrolytic plating treatment apparatus comprising: a plurality of clamps that are driven by a circular rotation and hold both side edges of a plate-shaped workpiece having parallel side edges, so that the surface of the plate-shaped workpiece is In the plating treatment liquid of the electrolytic plating treatment tank, the conveyance device that continuously conveys the horizontal posture in the vertical direction, and the plating treatment liquid disposed in the electrolytic plating treatment tank, and the plate-shaped workpiece to be conveyed horizontally by the conveyance device The upper and lower positions of the conveyance path are arranged in parallel with the plate surface of the workpiece, and a plate-shaped or perforated plate-shaped anode disposed at a predetermined interval in the conveyance direction of the workpiece is passed through the jig. The object to be processed which is supplied with the cathode current between the upper and lower anodes is horizontally passed, whereby the table of the object to be processed is The apparatus is subjected to an electrolytic plating treatment, and the conveying device is configured by a first conveying device and a second conveying device that are disposed on both sides of a conveying path through the workpiece, and the first and second conveying devices respectively A transport driving means for driving the linear transport drive unit along the transport path in a ring shape is provided. The transport drive means mounts a plurality of the jigs at intervals, and the jig has a vertical direction and an open level at the lower end portion. In the nip portion of the side end portion of the object to be processed, each of the conveyance driving means is rotationally driven at a synchronous speed, and each of the nip portions of the jig group of the linear conveyance drive unit located in each conveyance drive means is provided. The horizontal width interval in which the conveyance drive lines are parallel to each other and separated by the conveyance path, and the lateral width interval of each conveyance drive line is formed as a lateral width interval of the conveyance path of the workpiece in the treatment tank, and is characterized in that: The horizontal width adjusting device for changing the lateral width of the transport driving line of each transporting device can be changed, and the device is configured to be configured and transported. The center line parallel to the conveyance drive line at the center position of the lateral direction of the drive line is a conveyance reference line, and the conveyance reference line is disposed at the same horizontal width interval in a state where the conveyance drive lines are parallel to each other. When the lateral width of the passage is narrowed or widened, the transporting device moves forward and backward toward the conveyance reference line in the lateral direction of the conveyance path, and is configured to be disposed in the conveyance of the plate-shaped workpiece. The plurality of anodes above the passage are divided into a first side anode disposed on the first conveyor side and a second side anode disposed on the second conveyor side, and are respectively attached to the first and second anodes. The first and second moving of the anodes on the first side and the second side and the horizontal width adjusting device are performed on the conveying device side The movement in the lateral direction of the transport device moves in the lateral direction, and the lateral width adjustment device is provided with the first side and the second side opposite to each other in a state where the lateral width of the transport path is narrowed. Each of the anodes on the side allows the front end sides of each other to overlap. A horizontal transfer type electrolytic plating treatment apparatus comprising: a plurality of clamps that are driven by a circular rotation and hold both side edges of a plate-shaped workpiece having parallel side edges, so that the surface of the plate-shaped workpiece is In the plating treatment liquid of the electrolytic plating treatment tank, the conveyance device is continuously conveyed in a horizontal posture in the vertical direction; and the plating treatment liquid disposed in the electrolytic plating treatment tank is conveyed by the sheet-shaped workpiece conveyed horizontally by the conveyance device. a plate-shaped or perforated plate-shaped anode that is disposed in parallel with the plate surface of the workpiece and that is disposed in a predetermined space portion in the conveyance direction of the workpiece; a plurality of discharge nozzles are formed at a predetermined interval in a direction intersecting the conveyance direction of the workpiece in an upper position of the conveyance path of the workpiece or an upper portion of the space between the anodes, and the discharge nozzles are formed from the discharge nozzles The jet discharge pipe of the plating treatment liquid is discharged from the surface of the workpiece, and the clamp is supplied with the cathode current supplied between the upper and lower anodes. The apparatus for applying an electrolytic plating treatment to the surface of the workpiece to be horizontally passed, wherein the conveying device is a first conveying device and a second conveying device provided on both sides of a conveying path through the workpiece Each of the first and second conveying devices includes a conveyance driving means that is driven to rotate in a ring shape along the conveyance path of the conveyance path, and the conveyance means mounts a plurality of the jigs at intervals, and the jig It has vertical and vertical retention at the lower end Each of the conveyance means is rotatably driven at a synchronous speed, and each of the nip portions of the jig group of the linear conveyance drive unit located in each conveyance drive means is rotated at a side end portion of the object to be processed in a horizontal state. Each of the transport drive lines is parallel to each other and is spaced apart by a distance between the transport passages, and the lateral width of each transport drive line is formed as a lateral width of the transport path of the processed object in the processing tank. Providing a lateral width adjusting device capable of changing a lateral width interval of the transport drive line of each transport device, the device configured to set a center parallel to the transport drive line at a central position spaced apart from the lateral width of each transport drive line The line is a conveyance reference line, and the conveyance line is disposed at a position where the width of the conveyance path is narrowed or widened, with the horizontal width of the conveyance path being evenly spaced apart from each other in a state where the conveyance lines are parallel to each other. Each of the transporting devices moves forward and backward toward the transporting reference line in a lateral direction of the transport path, and is configured to be transported to the plate-shaped workpiece. The plurality of anodes above the road are divided into a first side anode disposed on the first conveyor side and a second side anode disposed on the second conveyor side, respectively, and are attached to each of the first and second sides. On the side of the conveyance device, the anodes on the first side and the second side are moved in the lateral direction in conjunction with the movement of the first and second conveyance devices in the horizontal width direction by the lateral width adjustment device, and the lateral width is increased. In the state in which the lateral width interval of the conveyance path is narrowed, the anodes of the first side and the second side that face each other vertically and vertically are disposed so that the front end portions of the anodes can overlap each other and are disposed The plurality of jet discharge pipes above the conveyance path of the workpiece are divided into a first discharge pipe disposed on the first transfer device side and disposed in the second transfer The second side discharge pipe on the transport device side is disposed on each of the first and second transfer device sides, and the first and second side discharge pipes and the horizontal width adjustment device are first. In the lateral direction, the first and the second side discharge tubes are horizontally displaced from each other in the horizontal direction in conjunction with the movement of the second conveyance device in the lateral direction.