JP2011054858A - Method of controlling drive of suction nozzle - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of controlling drive of a suction nozzle capable of preventing an electronic component and a substrate from getting damaged. <P>SOLUTION: The suction nozzle 12 is raised by a voice coil motor 31 from such a condition that the suction nozzle 12 is in contact with a lowering stopper. A drive-to-raise power of the voice coil motor 31 when the suction nozzle 12 separates from the lowering stopper is confirmed in advance based on a load detected by a load cell 15. While the confirmed drive-to-raise power is applied from the voice coil motor 31, a movable bracket 14 is lowered by a vertical motion motor 21, and a tip of the suction nozzle 12 is brought into contact with the electronic component C or the substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a suction nozzle drive control method.

  The conventional electronic component mounting apparatus has a head that is mounted with a suction nozzle and can move freely in the XY plane, receives the electronic component by suction from the feeder of the electronic component, and the head reaches the component mounting position on the board. The electronic component is mounted by moving and releasing the electronic component from the suction nozzle.

  Such a head is provided with a mechanism for raising the suction nozzle when the head is moved and lowering the suction nozzle when receiving and mounting the electronic component. Specifically, the head moves up and down a movable bracket supported so as to be movable up and down, and is supported so as to be rotatable and movable up and down with respect to the movable bracket and supports the suction nozzle so as to be movable up and down. A rotary case, a voice coil motor mounted on the movable bracket and moving the suction nozzle up and down via the rotary case, and a load cell provided on the rotary case and detecting a load generated at the tip of the suction nozzle.

  In such a head, when the electronic component is mounted on the substrate, the rotary case is moved by the vertical movement motor in a state where the rotary case is moved downward by the voice coil motor and brought into contact with the movable bracket so that the rotary case does not vibrate up and down. Lower the bracket. When the load cell detects that the tip of the suction nozzle is in contact with the substrate via the electronic component, the voice coil motor is driven in the upward direction so that the detected load becomes a predetermined target load, and the component mounting The load of the hour is adjusted (for example, refer to Patent Document 1).

  Also, an elastic body is provided between the suction nozzle and the movable part, and the spring constant of this elastic body is determined based on the mass of the movable part, the spring viscosity of the elastic body, and the initial strain rate between the electronic component and the suction nozzle immediately after the collision. There has been proposed a method for reducing the impact load on the electronic component or the substrate by calculating from the value (see, for example, Patent Document 2).

JP 2004-158743 A Patent No. 3659132

  However, in the technique described in Patent Document 1, when the suction nozzle comes into contact with the substrate via the electronic component, a pressing load by the voice coil motor is instantaneously applied to the electronic component or substrate, and the electronic component or substrate is attached to the substrate. There is a risk of damage. Even if monitoring is performed with a load cell so that an excessive load is not applied to an electronic component or a substrate, there is a reaction delay in the load cell or the voice coil motor, so it is difficult to suppress even an instantaneous load.

  Further, in the technique described in Patent Document 2, the spring constant of the elastic body is calculated to be lower because the friction of the sliding portion and the influence of deterioration over time are not taken into consideration. As a result, the impact load cannot be sufficiently reduced, and there is a risk of damaging electronic components and the board. In addition, since the influence of the friction of the sliding portion changes depending on the assembly state, it is difficult to simply consider a constant value in the formula.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a suction nozzle drive control method capable of preventing damage to an electronic component or a substrate.

In order to solve the above-mentioned problem, the invention according to claim 1
A movable body capable of ascending and descending, a first elevating drive source for giving an elevating operation to the moving body, an adsorption nozzle capable of elevating and lowering the movable body and adsorbing an electronic component at a tip, and the adsorption A second raising / lowering driving source for applying an raising / lowering operation to the nozzle, a load detecting means for detecting a load applied to the suction nozzle from the second raising / lowering driving source, and a lowering of the adsorption nozzle provided in the movable body In a drive control method of a suction nozzle in a head that mounts the electronic component sucked by the suction nozzle on a substrate
Based on the load detected by the load detection means, the suction nozzle is lifted from the lowering stopper by raising the suction nozzle from the state where the suction nozzle is in contact with the lowering stopper. A driving force confirmation step for confirming in advance the ascending driving force of the second raising / lowering driving source when being separated;
In the state where the ascending driving force confirmed in the driving force confirming step is applied from the second ascending / descending drive source, the moving body is lowered by the first ascending / descending drive source to move the tip of the suction nozzle. The electronic component or the substrate is brought into contact with the electronic component.

The invention according to claim 2 is the drive control method of the suction nozzle according to claim 1,
As the load detection means, a load change detected within a predetermined range when the suction nozzle is separated from the lowering stopper is used.
In the driving force confirmation step, when the rising driving force of the second raising / lowering driving source is changed by a predetermined time or a predetermined number of times, a change in the load detected by the load detecting means is within the predetermined range. If there is, the rising drive force of the second raising / lowering drive source before changing for the predetermined time or the predetermined number of times, the second raising / lowering drive source when the suction nozzle moves away from the lowering stopper It is characterized by an upward driving force.

  According to the first aspect of the present invention, the suction nozzle is lowered in a state in which the ascending driving force when the suction nozzle is separated from the descending stopper is applied to the second lifting drive source (for example, the voice coil motor). Unlike the conventional case, the tip of the suction nozzle is brought into contact with the electronic component or the substrate. When the suction nozzle is brought into contact with the electronic component or the substrate, the weight of the second lifting shaft or the downward pressing by the voice coil motor is performed. The load is not applied to the electronic component or the substrate. Therefore, it is possible to prevent damage to the electronic component and the substrate without having to reduce the lowering speed of the suction nozzle.

  Further, since the ascending driving force of the second elevating driving source when the suction nozzle moves away from the descending stopper is checked in advance based on the load detected by the load detecting means, the influence of sliding portion friction and deterioration with time Thus, it is possible to obtain an appropriate ascending driving force including the above. Therefore, it is possible to more reliably prevent damage to the electronic component and the board.

It is a perspective view of an electronic component mounting apparatus. It is side sectional drawing of the raising / lowering apparatus of the state from which the suction nozzle was spaced apart from the descent | fall stopper. It is side sectional drawing of the raising / lowering apparatus of the state in which the suction nozzle contacted the descent | fall stopper. It is a block diagram which shows the control structure of a raising / lowering apparatus. It is a flowchart of the drive control method of a suction nozzle. It is a timing chart of the drive control method of a suction nozzle. It is a flowchart of a driving force confirmation process. It is a timing chart of a driving force confirmation process.

(Overall configuration of electronic component mounting device)
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the electronic component mounting apparatus 100. Hereinafter, as shown in the drawing, two directions orthogonal to each other in the horizontal plane are respectively referred to as an X-axis direction (substrate transport direction) and a Y-axis direction (a direction orthogonal to the substrate transport direction), and a vertical direction orthogonal to these is referred to as a Z-axis direction. Shall.
The electronic component mounting apparatus 100 mounts various electronic components on a board. As shown in FIG. 1, the electronic component mounting apparatus 100 includes a plurality of electronic component feeders 101 and a plurality of electronic component feeders 101 that supply electronic components to be mounted. Electronic component mounting on a substrate provided in the middle of a substrate transfer path by the substrate transfer means 103, and a substrate transfer means 103 for transferring a substrate in the X-axis direction, and a pair of component supply sections composed of feeder banks 102 held side by side A substrate holding unit 104 for performing work, a lifting device 10 that holds a plurality (three in this example) of suction nozzles 12 so that they can be lifted and lowered, and a head that holds each electronic component by fixing each lifting device 10 106, and a head moving mechanism that drives and conveys the head 106 to an arbitrary position in a work area including two sets of the component supply unit and the substrate holding unit 104. A plurality of (three in this example) CCD cameras 108 that are mounted on the XY gantry 107, the head 106 and picked up by the suction nozzle 12, and the suction nozzle 12. An imaging mirror 120 that enables the CCD camera 108 to capture an image of the held electronic component from below is provided, and an operation control unit 110 that performs operation control of each of the above-described configurations.

  The operation control means 110 of the electronic component mounting apparatus 100 sucks the electronic components from the electronic component delivery unit 101 a of the electronic component feeder 101 to the suction nozzles 12. Further, the operation control means 110 performs image processing from captured image data obtained by imaging the electronic components sucked by the suction nozzles 12 by the respective CCD cameras 108, and positions of the electronic components relative to the nozzle tip and the nozzles. The angle (orientation) centered on the center line is obtained, the positioning of the suction nozzle 12 with respect to the substrate is corrected, the angle of the electronic component is corrected by rotating the suction nozzle 12, and the mounting control of the electronic component is performed.

(Suction nozzle lifting device)
FIG. 2 is a side sectional view of the lifting device 10 of the suction nozzle 12. As shown in this figure, the lifting device 10 for the suction nozzle 12 includes a main body frame 11 fixedly supported by a head 106, and a suction nozzle 12 held by a nozzle holder 13 for sucking and holding an electronic component C at its tip. The movable bracket 14 as a moving body supported by the main body frame 11 so as to be movable up and down, the first vertical moving means 20 for driving the movable bracket 14 in the vertical direction, and the movable bracket 14 and the movable bracket 14 are provided. The second vertical movement means 30 for driving the suction nozzle 12 along the vertical direction through the nozzle holder 13, the negative pressure supply means 40 for supplying a negative pressure to the suction nozzle 12, and the suction nozzle 12. A load cell 15 as load detecting means for detecting a load, and a rotation angle for adjusting the rotation angle of the suction nozzle 12 around an axis along the vertical direction A node unit 50, and an operation control unit 60 for controlling the operation of each configuration (see FIG. 4). Each part is described in detail below.

  The main body frame 11 is fixedly supported by the head 106 as described above, and is conveyed along the XY plane (horizontal plane) to, for example, the receiving position of the electronic component C or the mounting position of the substrate.

  The movable bracket 14 is supported at the lower part of the main body frame 11 through a linear guide 19 so as to be movable up and down. The movable bracket 14 is driven in the vertical direction by the first vertical movement means 20 provided on the main body frame 11.

The first vertical movement means 20 includes a rotary drive type vertical movement motor 21 (first lifting drive source) disposed at the upper part of the main body frame 11 with the output shaft directed downward, and a rotation angle amount thereof. Are coupled to the output shaft of the vertical movement motor 21 via a coupling and supported by the main body frame 11 so as to be rotatable along the vertical direction, and the ball screw shaft 23. It has a ball screw nut 24 to which vertical movement is applied.
The ball screw nut 24 is fixed to the movable bracket 14 and positions the movable bracket 14 in the vertical direction according to the rotation angle amount by the rotational drive of the vertical movement motor 21. Further, the encoder 22 outputs a detection signal to the operation control means 60, and the operation control means 60 can recognize the current position of the movable bracket 14 based on this and control the operation of the vertical movement motor 21. It is said.

The suction nozzle 12 is a tubular body having a tapered lower end portion, and suction holding is performed with the tip portion facing the electronic component C. The upper end portion of the suction nozzle 12 is connected to the nozzle holder 13.
The nozzle holder 13 is a cylindrical body that is provided at a lower end portion of a nozzle shaft 41 to be described later, and the suction nozzle 12 is detachably attached to the lower end portion.

  The negative pressure supply means 40 includes a nozzle shaft 41 having a lower end connected to the nozzle holder 13 and a gasket 42 connected to the upper end of the nozzle shaft 41. Among these, the gasket 42 can be connected to an intake pump or an ejector that is a negative pressure source (not shown) that supplies a negative pressure for the suction nozzle 12 to suck the electronic component.

The upper end of the nozzle shaft 41 extends to the vicinity of the upper portion of the main body frame 11 and is connected to the rotation angle adjusting means 50 through a spline structure which will be described later. The structure is given. That is, as a result, a rotation operation about the vertical vertical direction is given to the suction nozzle 12, and the orientation of the sucked electronic component can be adjusted.
Further, the lower portion of the nozzle shaft 41 is supported by an air bearing 43 provided on the movable bracket 14 so as to be rotatable and vertically movable about a vertical vertical axis. The air bearing 43 is a sleeve having an inner diameter slightly larger than the outer diameter of the lower portion of the nozzle shaft 41, and can supply the air to the gap with the nozzle shaft 41 to hold the nozzle shaft 41 at the center position. . Since the air bearing 43 supports the nozzle shaft 41 in a non-contact manner, no friction is generated, and the nozzle shaft 41 can be smoothly rotated and moved up and down.

The rotation angle adjustment means 50 includes an angle adjustment motor 51 (rotation drive source) disposed with the output shaft directed downward in the upper part of the main body frame 11, an encoder 52 for detecting the rotation angle amount, and angle adjustment. A spline nut 53 connected to the lower end of the output shaft of the motor 51 via a coupling is provided.
The angle adjusting motor 51 and the spline nut 53 are disposed concentrically with the nozzle shaft 41 described above, and the outer peripheral surface of the upper portion of the nozzle shaft 41 is a spline shaft that fits into the spline nut 53. Yes. The spline shaft and the spline nut 53 constitute a spline structure.
Thereby, the nozzle shaft 41 is given the torque of the angle adjustment motor 51 and can move up and down with respect to the angle adjustment motor 51 and the spline nut 53.
On the other hand, the encoder 52 outputs the rotation angle amount of the output shaft of the angle adjustment motor 51 to the operation control means 60, and based on this, the operation control means 60 causes the angle adjustment motor 51 to rotate by a predetermined angle amount. It is possible to perform rotational drive control. As a result, the suction nozzle 12 is rotationally driven from the output shaft of the angle adjustment motor 51 via the spline nut 52, the nozzle shaft 41 and the nozzle holder 13, and the electronic component C held by suction at the tip of the suction nozzle 12. It is possible to adjust the orientation.

  The second vertical movement means 30 is fixedly mounted on the upper part of the movable bracket 14 in an arrangement adjacent to the nozzle shaft 41, and has a voice coil motor 31 having an output shaft that reciprocates along the vertical vertical direction, and a voice coil. A support frame 32 that is supported by the lower end of the output shaft of the motor 31 and holds the load cell 15, a load arm 33 having one end connected to the nozzle shaft 41 and the other end supported by the support frame 32, and a load A pressurizing spring 34 interposed between the arm 33 and the load cell 15 and a support spring 35 interposed between the load arm 33 and the support frame 32 are provided.

  One end portion of the load arm 33 is connected to an intermediate position of the nozzle shaft 41 via a radial bearing 36, and allows the nozzle shaft 41 to rotate about the vertical axis. The nozzle 12) and the load arm 33 integrally move up and down. The load arm 33 is provided on the upper side of the air bearing 43 described above. When the suction nozzle 12 and the nozzle shaft 41 are lowered with respect to the movable bracket 14, the load arm 33 is formed at the upper end of the air bearing 43. It has a structure that abuts and regulates the downward movement downward (see FIG. 3). That is, the air bearing 43 also has a function as a lowering stopper that restricts the lowering operation of the suction nozzle 12 by the second vertical movement means 30.

  The support frame 32 has a rectangular frame shape and includes a top plate 32a and a bottom plate 32b facing each other. A lower end portion of the output shaft of the voice coil motor 31 is fixedly connected to an upper surface of the top plate 32a. A load cell 15 is fixedly installed downward on the lower surface of 32a. The other end of the load arm 33 is located between the top plate 32a and the bottom plate 32b of the support frame 32, and between the upper surface of the other end of the load arm 33 and the lower surface of the load cell 15 (load detection surface). The aforementioned pressurizing spring 34 is provided. Further, the above-described support spring 35 is disposed between the lower surface of the other end of the load arm 33 and the upper surface of the bottom plate 32 b of the support frame 32.

  Since the load arm 33 is sandwiched between the upper and lower springs 34 and 35 as described above, it is applied from the load arm 33 to the upper surface of the air bearing 43 by driving the output shaft of the voice coil motor 31. The load can be detected by the load cell 15. Further, the load applied from the load arm 33 may coincide with the load for pressurizing the electronic component toward the substrate at the tip of the suction nozzle 12, and in that case, the suction nozzle 12 is mounted with the electronic at the time of mounting. It is also possible to detect the load applied to the component.

  As shown in FIG. 4, the operation control means 60 includes a ROM 60 a in which a control program for executing various controls described later of the lifting device 10 of the suction nozzle 12 is written, and a vertical movement motor 21 and a voice coil motor 31 according to the control program. , The CPU 60b that centrally controls the operation of each part such as the angle adjustment motor 51 and the negative pressure supply means 40, and the RAM 60c that stores processing data of the CPU 60b in the work area.

Further, the operation control means 60 includes a setting input means 64 for performing input setting of data necessary for the operation control, an instruction input for starting the operation, and the like, and each motor 21 according to a control signal from the operation control means 60. Each drive circuit 61, 62, 63 for driving 31, 51, and each input circuit 65, 66, 67 for inputting the output of the encoder 22, 52, load cell 15 to the operation control means 60 as a detection signal are provided. .
The operation control unit 60 may be configured integrally with the operation control unit 110 of the electronic component mounting apparatus 100.

(Suction nozzle drive control method)
Next, a drive control method for the suction nozzle 12 executed by the CPU 60b when the electronic component C is mounted on the substrate will be described with reference to the flowchart of FIG. 5 and the timing chart of FIG. This is a process performed by the CPU 60b executing a predetermined program stored in the ROM 60a.
Here, the suction nozzle 12 picks up the electronic component C, and the angle adjustment motor 51 has already adjusted the direction of the electronic component C at the tip of the suction nozzle 12 to transport the head 106 to the mounting position of the substrate. It is assumed that it is in the state.

  First, the CPU 60b drives the vertical movement motor 21 to lower the tip of the suction nozzle 12 from the height Z3 when the head 106 is conveyed (FIG. 6 (1)) to the height Z2 at a high speed (step S1: Fig. 6 (2)). At this time, the voice coil motor (VCM) 31 is in a non-driven state (output V0), and the suction nozzle 12 is in the lowest position relative to the movable bracket 14, that is, the load arm 33 contacts the upper surface of the air bearing 43. Is in a state. The height Z2 is the height at which the suction nozzle 12 is lowered most when the voice coil motor 31 is not driven, and is set to a height at which the lower end of the suction nozzle 12 does not reach the electronic component C. . Further, the detected load of the load cell (LC) 15 in this state is L0.

  Next, the CPU 60b determines whether or not the tip of the suction nozzle 12 has reached the height Z2 based on the output of the encoder 22 (step S2), and determines that it has not reached (step S2). ; No), it returns to step S1.

  When it is determined that the tip of the suction nozzle 12 has reached the height Z2 (step S2; Yes), the CPU 60b stops the tip of the suction nozzle 12 at the height Z2 and at the same time, the voice coil motor 31. Is raised to V1 and the driving force for raising is applied to the voice coil motor 31 (step S3: FIG. 6 (3)). The output V1 of the voice coil motor 31 at this time is an output value set in advance by a driving force confirmation step described later, more specifically, an output value at which the load arm 33 is just separated from the upper surface of the air bearing 43. . Note that, when the tip of the suction nozzle 12 is stopped at the height Z2, a downward inertia force acts on the suction nozzle 12, but the load arm 33 is in contact with the upper surface of the air bearing 43. Therefore, the suction nozzle 12 does not move downward due to this inertial force, and the suction nozzle 12 and the electronic component C do not contact each other.

  Next, the CPU 60b drives the vertical movement motor 21 to start lowering the suction nozzle 12 at a low speed (step S4: FIG. 6 (4)). At this time, the output of the voice coil motor 31 remains V1. It should be noted that the lowering of the suction nozzle 12 at “low speed” in step S4 means that it is relatively slower than the lowering at “high speed” in step S1.

  Next, the CPU 60b determines whether or not the tip of the suction nozzle 12 has contacted the substrate via the electronic component C based on the change in output from the load cell 15 (step S5). Here, when the change in the output from the load cell 15 does not change from L0 to L1, the CPU 60b determines that the suction nozzle 12 is not in contact with the substrate (step S5; No), and performs step S5. repeat.

  On the other hand, when the change in the output from the load cell 15 has changed from L0 to L1 (FIG. 6 (5)), the CPU 60b determines that the suction nozzle 12 is in contact with the substrate (step S5; Yes). ), The Z-axis height at that time is stored in the RAM 60c as Z0, and a lowering driving force of the output V2 is applied to the voice coil motor 31 so that the electronic component C contacts the substrate with a predetermined load (step S6). .

  Next, the CPU 60b determines whether or not the tip of the suction nozzle 12 has reached the height Z1 based on the output of the encoder 22 (step S7), and determines that it has not reached (step S7). ; No), the said step S7 is repeated. In the present embodiment, the height Z1 is 1 mm below the upper surface of the substrate.

  If it is determined that the tip of the suction nozzle 12 has reached the height Z1 (step S7; Yes: FIG. 6 (6)), the CPU 60b stops the vertical movement motor 21 and sets the height Z1. At the same time, the output of the voice coil motor 31 is held at V2 so that the output of the load cell 15 is kept at L2 (step S8). Even if the tip of the suction nozzle 12 does not reach the height Z1, the output of the voice coil motor 31 may be held at V2 from step S6.

Next, the CPU 60b determines whether or not a predetermined pressurization time T1 has elapsed since the tip of the suction nozzle 12 has reached the height Z1 (step S9). S9; No), the step S9 is repeated. If the predetermined pressurization time T1 has elapsed (step S9; Yes: FIG. 6 (7)), the CPU 60b drives the vertical movement motor 21 to move the tip of the suction nozzle 12 to the height Z2. After being raised at a low speed (FIG. 6 (8)), it is raised at a high speed to the height Z3 (step S10: FIG. 6 (9)). At the same time, the CPU 60b returns the output of the voice coil motor 31 to V0.
Thus, the drive control of the suction nozzle 12 when the electronic component C is mounted on the substrate is completed.

(Driving force confirmation process)
Next, a driving force confirmation step for confirming in advance the output V1 of the voice coil motor 31 in step S3 in the drive control of the suction nozzle 12 will be described with reference to the flowchart of FIG. 7 and the timing chart of FIG. This process is a process performed by the CPU 60b executing a predetermined program stored in the ROM 60a.

  First, the tip of the suction nozzle 12 is not touched anywhere, and the load arm 33 is in contact with the upper surface of the air bearing 43, that is, the suction nozzle 12 is in contact with the lowering stopper (step) T1).

  Next, the CPU 60b applies a rising driving force of a predetermined step amount to the voice coil motor 31, and acquires the output value of the load cell 15 at this time (step T2). In the present embodiment, 5 gf is a predetermined step amount.

Next, the CPU 60b further applies a rising driving force of a predetermined step amount to the voice coil motor 31, and acquires the output value of the load cell 15 at this time (step T3).
Then, the CPU 60b determines whether or not the output value is within a predetermined in-position range with respect to the previously acquired output value (step T4). In the present embodiment, ± 4 gf is set as a predetermined in-position range.

Here, when the output value of the load cell 15 acquired in step T3 is not within the predetermined in-position range with respect to the previously acquired output value (step T4; No), the process proceeds to step T3.
If the output value of the load cell 15 acquired in step T3 is within the predetermined in-position range with respect to the output value acquired previously (step T4; Yes), the output value is continuously within the predetermined in-position range. It is determined whether or not the number of times has reached a predetermined number (step T5). In this embodiment, 20 times is a predetermined number.

In step T5, when the number of times of continuous entry within the predetermined in-position range is less than the predetermined number (step T5; No), the process proceeds to step T3.
Then, when the number of times of continuously entering the predetermined in-position range has reached the predetermined number (step T5; Yes), the output value of the voice coil motor 31 before being changed by the predetermined number of times is output as described above. Set as V1 (step T6). That is, in this embodiment, the value obtained by subtracting 5 gf × 20 times = 100 gf from the output value V3 of the last load cell 15 when the difference from the previous time is within the range of ± 4 gf for 20 consecutive times is the output V1. It becomes.

  According to this driving force confirmation process, when the load arm 33 is separated from the upper surface of the air bearing 43, the output value of the load cell 15 hardly changes. Therefore, the load arm 33 is moved to the air based on the change of the output value of the load cell 15. The output V1 (upward driving force) of the voice coil motor 31 when it is separated from the upper surface of the bearing 43, that is, when the suction nozzle 12 is separated from the lowering stopper can be obtained.

(Action / Effect)
According to the drive control method for the suction nozzle 12 described above, that is, in a state where the upward drive force when the suction nozzle 12 is separated from the lowering stopper is applied to the voice coil motor 31, the suction nozzle 12 is lowered to the suction nozzle 12. Since the tip of 12 is brought into contact with the substrate via the electronic component C, unlike the conventional case, a downward pressing load by the voice coil motor 31 is applied to the electronic component C or the substrate when the suction nozzle 12 and the substrate are in contact with each other. There is nothing. Therefore, it is possible to prevent damage to the electronic component C and the substrate without having to reduce the lowering speed of the suction nozzle 12.

  Further, since the upward driving force (output V1) of the voice coil motor 31 when the suction nozzle 12 moves away from the downward stopper is confirmed in advance based on the output value of the load detected by the load cell 15, the friction of the sliding portion is confirmed. In addition, an appropriate ascending driving force including the influence of deterioration over time can be obtained. Therefore, damage to the electronic component C and the substrate can be prevented more reliably.

  Further, since the state when the suction nozzle 12 is separated from the lowering stopper can be maintained, it is possible to prevent the suction nozzle 12 from coming into contact with the lowering stopper and the upper stopper when the suction nozzle 12 is raised and lowered.

(Other)
It should be noted that the present invention should not be construed as being limited to the above-described embodiment, and of course can be modified or improved as appropriate.

  For example, in the above embodiment, the drive control of the suction nozzle 12 is performed when the electronic component C is mounted on the substrate, but may be performed similarly when the electronic component C is sucked.

  In the driving force confirmation step, in step T5, the CPU 60b determines whether the output value of the load cell 15 is within a predetermined in-position range for a predetermined number of times with respect to the previously acquired output value. The predetermined time may be used instead of the predetermined number of times.

  Further, although the load arm 33 abuts downward and the load cell 15 detects the upward load, these vertical directions may be reversed. In this case, the output values of the voice coil motor 31 and the load cell 15 shown in FIGS.

12 Adsorption nozzle 14 Movable bracket (moving body)
15 Load cell (load detection means)
21 Vertical motor (first lifting drive source)
31 Voice coil motor (second lifting drive source)
43 Air bearing (lowering stopper)
106 Head C Electronic component

Claims (2)

A movable body capable of ascending and descending, a first elevating drive source for giving an elevating operation to the moving body, an adsorption nozzle capable of elevating and lowering the movable body and adsorbing an electronic component at a tip, and the adsorption A second raising / lowering driving source for applying an raising / lowering operation to the nozzle, a load detecting means for detecting a load applied to the suction nozzle from the second raising / lowering driving source, and a lowering of the adsorption nozzle provided in the movable body In a drive control method of a suction nozzle in a head that mounts the electronic component sucked by the suction nozzle on a substrate
Based on the load detected by the load detection means, the suction nozzle is lifted from the lowering stopper by raising the suction nozzle from the state where the suction nozzle is in contact with the lowering stopper. A driving force confirmation step for confirming in advance the ascending driving force of the second raising / lowering driving source when being separated;
In the state where the ascending driving force confirmed in the driving force confirming step is applied from the second ascending / descending drive source, the moving body is lowered by the first ascending / descending drive source to move the tip of the suction nozzle. A suction nozzle drive control method comprising contacting the electronic component or the substrate. As the load detection means, a load change detected within a predetermined range when the suction nozzle is separated from the lowering stopper is used.
In the driving force confirmation step, when the rising driving force of the second raising / lowering driving source is changed by a predetermined time or a predetermined number of times, a change in the load detected by the load detecting means is within the predetermined range. If there is, the rising drive force of the second raising / lowering drive source before changing for the predetermined time or the predetermined number of times, the second raising / lowering drive source when the suction nozzle moves away from the lowering stopper 2. The suction nozzle drive control method according to claim 1, wherein the suction drive force is increased.

Images