JP2011051893A5 - - Google Patents
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- Publication number
- JP2011051893A5 JP2011051893A5 JP2010264462A JP2010264462A JP2011051893A5 JP 2011051893 A5 JP2011051893 A5 JP 2011051893A5 JP 2010264462 A JP2010264462 A JP 2010264462A JP 2010264462 A JP2010264462 A JP 2010264462A JP 2011051893 A5 JP2011051893 A5 JP 2011051893A5
- Authority
- JP
- Japan
- Prior art keywords
- titania
- quartz glass
- less
- doped
- taniadopu
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 35
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 22
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 230000007062 hydrolysis Effects 0.000 claims description 2
- 238000006460 hydrolysis reaction Methods 0.000 claims description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010264462A JP2011051893A (ja) | 2010-11-29 | 2010-11-29 | ナノインプリントモールド用チタニアドープ石英ガラス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010264462A JP2011051893A (ja) | 2010-11-29 | 2010-11-29 | ナノインプリントモールド用チタニアドープ石英ガラス |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007150534A Division JP5042714B2 (ja) | 2007-06-06 | 2007-06-06 | ナノインプリントモールド用チタニアドープ石英ガラス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011051893A JP2011051893A (ja) | 2011-03-17 |
| JP2011051893A5 true JP2011051893A5 (enExample) | 2012-05-10 |
Family
ID=43941293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010264462A Pending JP2011051893A (ja) | 2010-11-29 | 2010-11-29 | ナノインプリントモールド用チタニアドープ石英ガラス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011051893A (enExample) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02310013A (ja) * | 1989-05-24 | 1990-12-25 | Sekisui Chem Co Ltd | 高周波誘導加熱方法及び加熱具 |
| JPH0466243A (ja) * | 1990-07-02 | 1992-03-02 | Yuasa Corp | 鉛鋳造用鋳型 |
| JP2000086259A (ja) * | 1998-09-07 | 2000-03-28 | Tosoh Corp | 真空紫外線用光学材料 |
| JP4060000B2 (ja) * | 1999-02-05 | 2008-03-12 | 株式会社サーモテック | 射出成形機用金型温度調整装置 |
| JP2001311801A (ja) * | 2000-04-28 | 2001-11-09 | Asahi Glass Co Ltd | 合成石英ガラス |
| JP3965552B2 (ja) * | 2001-12-26 | 2007-08-29 | 信越化学工業株式会社 | 合成石英ガラスの製造方法 |
| JP5367204B2 (ja) * | 2003-04-03 | 2013-12-11 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラスおよびＥＵＶリソグラフィ用光学部材 |
| JP4487783B2 (ja) * | 2005-01-25 | 2010-06-23 | 旭硝子株式会社 | ＴｉＯ２を含有するシリカガラスの製造方法およびＴｉＯ２を含有するシリカガラスを用いたＥＵＶリソグラフィ用光学部材 |
| JP4781003B2 (ja) * | 2005-04-28 | 2011-09-28 | 信越石英株式会社 | ナノインプリントスタンパー用シリカ・チタニアガラス |
-
2010
- 2010-11-29 JP JP2010264462A patent/JP2011051893A/ja active Pending
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