JP2011040186A5 - - Google Patents
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- Publication number
- JP2011040186A5 JP2011040186A5 JP2009184270A JP2009184270A JP2011040186A5 JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5 JP 2009184270 A JP2009184270 A JP 2009184270A JP 2009184270 A JP2009184270 A JP 2009184270A JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- organic material
- light
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims description 22
- 239000011368 organic material Substances 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims 4
- 239000007924 injection Substances 0.000 claims 4
- 230000001678 irradiating Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000005525 hole transport Effects 0.000 claims 2
- 230000031700 light absorption Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N Tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009184270A JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009184270A JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011040186A JP2011040186A (ja) | 2011-02-24 |
| JP2011040186A5 true JP2011040186A5 (es) | 2012-08-30 |
| JP5137917B2 JP5137917B2 (ja) | 2013-02-06 |
Family
ID=43767763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009184270A Expired - Fee Related JP5137917B2 (ja) | 2009-08-07 | 2009-08-07 | 成膜用基板、成膜方法及び発光素子の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5137917B2 (es) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3287291A1 (en) | 2016-08-26 | 2018-02-28 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and system for applying a patterned structure on a surface |
| KR102239833B1 (ko) * | 2016-12-21 | 2021-04-13 | 엔씨씨 나노, 엘엘씨 | 기능성 재료를 기판 상에 증착시키기 위한 방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8153201B2 (en) * | 2007-10-23 | 2012-04-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing light-emitting device, and evaporation donor substrate |
| JP2009146715A (ja) * | 2007-12-13 | 2009-07-02 | Sony Corp | ドナー基板および表示装置の製造方法 |
| KR101529111B1 (ko) * | 2008-06-16 | 2015-06-16 | 도레이 카부시키가이샤 | 패터닝 방법, 이것을 사용한 디바이스의 제조방법 및 디바이스 |
| JP4600569B2 (ja) * | 2008-06-25 | 2010-12-15 | ソニー株式会社 | ドナー基板および表示装置の製造方法 |
| JP5258666B2 (ja) * | 2009-04-22 | 2013-08-07 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法および成膜用基板 |
-
2009
- 2009-08-07 JP JP2009184270A patent/JP5137917B2/ja not_active Expired - Fee Related
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