JP2011040186A5 - - Google Patents

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Publication number
JP2011040186A5
JP2011040186A5 JP2009184270A JP2009184270A JP2011040186A5 JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5 JP 2009184270 A JP2009184270 A JP 2009184270A JP 2009184270 A JP2009184270 A JP 2009184270A JP 2011040186 A5 JP2011040186 A5 JP 2011040186A5
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JP
Japan
Prior art keywords
substrate
layer
organic material
light
recess
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Application number
JP2009184270A
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English (en)
Japanese (ja)
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JP5137917B2 (ja
JP2011040186A (ja
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Priority to JP2009184270A priority Critical patent/JP5137917B2/ja
Priority claimed from JP2009184270A external-priority patent/JP5137917B2/ja
Publication of JP2011040186A publication Critical patent/JP2011040186A/ja
Publication of JP2011040186A5 publication Critical patent/JP2011040186A5/ja
Application granted granted Critical
Publication of JP5137917B2 publication Critical patent/JP5137917B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009184270A 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法 Expired - Fee Related JP5137917B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009184270A JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009184270A JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Publications (3)

Publication Number Publication Date
JP2011040186A JP2011040186A (ja) 2011-02-24
JP2011040186A5 true JP2011040186A5 (cg-RX-API-DMAC7.html) 2012-08-30
JP5137917B2 JP5137917B2 (ja) 2013-02-06

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ID=43767763

Family Applications (1)

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JP2009184270A Expired - Fee Related JP5137917B2 (ja) 2009-08-07 2009-08-07 成膜用基板、成膜方法及び発光素子の作製方法

Country Status (1)

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JP (1) JP5137917B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3287291A1 (en) * 2016-08-26 2018-02-28 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method and system for applying a patterned structure on a surface
JP6851649B2 (ja) * 2016-12-21 2021-03-31 エヌシーシー ナノ， エルエルシー 機能材料を基板上に堆積させるための方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8153201B2 (en) * 2007-10-23 2012-04-10 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing light-emitting device, and evaporation donor substrate
JP2009146715A (ja) * 2007-12-13 2009-07-02 Sony Corp ドナー基板および表示装置の製造方法
JP4992975B2 (ja) * 2008-06-16 2012-08-08 東レ株式会社 パターニング方法およびこれを用いたデバイスの製造方法ならびにデバイス
JP4600569B2 (ja) * 2008-06-25 2010-12-15 ソニー株式会社 ドナー基板および表示装置の製造方法
JP5258666B2 (ja) * 2009-04-22 2013-08-07 株式会社半導体エネルギー研究所 発光装置の作製方法および成膜用基板

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