JP2011033027A - ターボ分子ポンプ・ロータ - Google Patents

ターボ分子ポンプ・ロータ Download PDF

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Publication number
JP2011033027A
JP2011033027A JP2010167827A JP2010167827A JP2011033027A JP 2011033027 A JP2011033027 A JP 2011033027A JP 2010167827 A JP2010167827 A JP 2010167827A JP 2010167827 A JP2010167827 A JP 2010167827A JP 2011033027 A JP2011033027 A JP 2011033027A
Authority
JP
Japan
Prior art keywords
rotor
pump
turbomolecular
recess
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010167827A
Other languages
English (en)
Japanese (ja)
Inventor
Helmut Bernhardt
ヘルムート・ベルンハルト
Bernhard Tatzber
ベルンハルト・タッツバー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of JP2011033027A publication Critical patent/JP2011033027A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2010167827A 2009-08-01 2010-07-27 ターボ分子ポンプ・ロータ Pending JP2011033027A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009035812A DE102009035812A1 (de) 2009-08-01 2009-08-01 Turbomolekularpumpenrotor

Publications (1)

Publication Number Publication Date
JP2011033027A true JP2011033027A (ja) 2011-02-17

Family

ID=43036975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010167827A Pending JP2011033027A (ja) 2009-08-01 2010-07-27 ターボ分子ポンプ・ロータ

Country Status (3)

Country Link
EP (1) EP2295813B1 (de)
JP (1) JP2011033027A (de)
DE (1) DE102009035812A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015137648A (ja) * 2014-01-21 2015-07-30 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993995A (ja) * 1982-10-23 1984-05-30 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− ポンプ
JPH0259294U (de) * 1988-10-25 1990-04-27
JP2002081397A (ja) * 2000-09-06 2002-03-22 Ebara Corp 真空ポンプ
JP2002138988A (ja) * 2000-11-06 2002-05-17 Ebara Corp 真空ポンプ
JP2002168249A (ja) * 2000-11-29 2002-06-14 Shimadzu Corp 回転機械
JP2006509951A (ja) * 2002-12-17 2006-03-23 ザ ビーオーシー グループ ピーエルシー 真空ポンプ排出装置
JP2007506019A (ja) * 2003-09-17 2007-03-15 メコス トラックスラー アクチェンゲゼルシャフト 電磁ベアリング装置および真空ポンプ
WO2009049988A1 (de) * 2007-10-11 2009-04-23 Oerlikon Leybold Vacuum Gmbh Mehrstufiger turbomolekularpumpen-pumpenrotor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
ATE362051T1 (de) 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
JP5087418B2 (ja) * 2008-02-05 2012-12-05 株式会社荏原製作所 ターボ真空ポンプ
DE102008056352A1 (de) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpenrotor

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993995A (ja) * 1982-10-23 1984-05-30 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− ポンプ
JPH0259294U (de) * 1988-10-25 1990-04-27
JP2002081397A (ja) * 2000-09-06 2002-03-22 Ebara Corp 真空ポンプ
JP2002138988A (ja) * 2000-11-06 2002-05-17 Ebara Corp 真空ポンプ
JP2002168249A (ja) * 2000-11-29 2002-06-14 Shimadzu Corp 回転機械
JP2006509951A (ja) * 2002-12-17 2006-03-23 ザ ビーオーシー グループ ピーエルシー 真空ポンプ排出装置
JP2007506019A (ja) * 2003-09-17 2007-03-15 メコス トラックスラー アクチェンゲゼルシャフト 電磁ベアリング装置および真空ポンプ
WO2009049988A1 (de) * 2007-10-11 2009-04-23 Oerlikon Leybold Vacuum Gmbh Mehrstufiger turbomolekularpumpen-pumpenrotor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015137648A (ja) * 2014-01-21 2015-07-30 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの為のローター装置の製造の為の方法および真空ポンプの為のローター装置

Also Published As

Publication number Publication date
EP2295813A2 (de) 2011-03-16
EP2295813A3 (de) 2015-08-19
DE102009035812A1 (de) 2011-02-03
EP2295813B1 (de) 2019-09-18

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