JP2011024225A - Method for manufacturing crystal vibrator, crystal unit, and crystal oscillator; crystal vibrator; crystal unit; and information communication device - Google Patents

Method for manufacturing crystal vibrator, crystal unit, and crystal oscillator; crystal vibrator; crystal unit; and information communication device Download PDF

Info

Publication number
JP2011024225A
JP2011024225A JP2010179028A JP2010179028A JP2011024225A JP 2011024225 A JP2011024225 A JP 2011024225A JP 2010179028 A JP2010179028 A JP 2010179028A JP 2010179028 A JP2010179028 A JP 2010179028A JP 2011024225 A JP2011024225 A JP 2011024225A
Authority
JP
Japan
Prior art keywords
tuning fork
fork arm
crystal
arm
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010179028A
Other languages
Japanese (ja)
Other versions
JP2011024225A5 (en
JP5272121B2 (en
Inventor
Hirofumi Kawashima
宏文 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Piedek Technical Laboratory
Original Assignee
Piedek Technical Laboratory
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piedek Technical Laboratory filed Critical Piedek Technical Laboratory
Priority to JP2010179028A priority Critical patent/JP5272121B2/en
Publication of JP2011024225A publication Critical patent/JP2011024225A/en
Publication of JP2011024225A5 publication Critical patent/JP2011024225A5/en
Application granted granted Critical
Publication of JP5272121B2 publication Critical patent/JP5272121B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning-fork-type bending crystal vibrator vibrated in a bending mode, a crystal unit, a crystal oscillator, and method for manufacturings thereof. <P>SOLUTION: The tuning-fork-type bending crystal vibrator 45 vibrated in the bending mode is composed of a tuning-fork base part 48, a first tuning-fork arm 46, and a second tuning-fork arm 47, wherein the arms are connected to the tuning-fork base part. The method for manufacturing of the crystal vibrator includes a step of determining a tuning fork shape, the dimensions of grooves 49 and 50, and electrodes so that the tuning-fork-type bending crystal vibrator 45 includes a figure of merit M<SB>1</SB>and a frequency stabilization coefficient S<SB>1</SB>of a basic wave mode vibration and includes a figure of merit M<SB>2</SB>of a second-order harmonic wave mode vibration and a frequency stabilization coefficient S<SB>2</SB>, and that the relations M<SB>1</SB>>M<SB>2</SB>and S<SB>1</SB><S<SB>2</SB>can be obtained. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は屈曲モードで振動する音叉腕と音叉基部を具えて構成される音叉形状の水晶振動子と増幅器とコンデンサーと抵抗素子とを具えて構成される水晶発振器とその製造方法に関する。特に、小型化、高精度化、耐衝撃性、低廉化の要求の強い情報通信機器用の基準信号源として最適な水晶発振器で、新形状、新電極構成及び最適寸法を有する超小型の音叉形状の屈曲水晶振動子から構成され、基本波モード振動の周波数が出力信号である水晶発振器に関する。  The present invention relates to a crystal oscillator including a tuning fork-shaped crystal resonator, an amplifier, a capacitor, and a resistance element, each including a tuning fork arm and a tuning fork base that vibrate in a bending mode, and a method for manufacturing the crystal oscillator. In particular, it is a crystal oscillator that is ideal as a reference signal source for information communication equipment that is strongly demanded for miniaturization, high precision, shock resistance, and low cost, and has a new shape, new electrode configuration, and ultra-compact tuning fork shape with optimum dimensions. The present invention relates to a crystal oscillator in which the frequency of fundamental mode vibration is an output signal.

従来の水晶発振器は増幅器とコンデンサーと抵抗素子と音叉腕の上下面と側面に電極が配置された音叉型屈曲水晶振動子から成る水晶発振器がよく知られている。図9には、この従来例の水晶発振器に用いられている音叉形状の屈曲水晶振動子200の概観図を示す。図9において水晶振動子200は2本の音叉腕201,202と音叉基部230とを具えている。図10には図9の音叉腕の断面図を示す。図10に示すように、励振電極は音叉腕の上下面と側面に配置されている。音叉腕の断面形状は一般的には長方形をしている。一方の音叉腕の断面の上面には電極203が下面には電極204が配置されている。側面には電極205と206が設けられている。他方の音叉腕の上面には電極207が下面には電極208が、更に側面には電極209,210が配置され2電極端子H−H′構造を成している。今、H−H′間に直流電圧を印加すると電界は矢印方向に働く。その結果、一方の音叉腕が内側に曲がると他方の音叉腕も内側に曲がる。この理由は、x軸方向の電界成分Exが各音叉腕の内部で方向が反対になるためである。交番電圧を印加することにより振動を持続することができる。又、特開昭56−65517と特開2000−223992(P2000−223992A)では、音叉腕に溝を設け、且つ、電極構成について開示されている。
特開昭56−65517 特開昭2000−223992(P2000−223992A) 国際公開第00/44092
As a conventional crystal oscillator, a crystal oscillator composed of an amplifier, a capacitor, a resistance element, and a tuning fork-type bending crystal resonator in which electrodes are arranged on the upper, lower, and side surfaces of a tuning fork arm is well known. FIG. 9 shows an overview of a tuning-fork-shaped bent quartz crystal resonator 200 used in this conventional crystal oscillator. In FIG. 9, the crystal unit 200 includes two tuning fork arms 201 and 202 and a tuning fork base 230. FIG. 10 shows a cross-sectional view of the tuning fork arm of FIG. As shown in FIG. 10, the excitation electrodes are disposed on the upper and lower surfaces and side surfaces of the tuning fork arm. The cross-sectional shape of the tuning fork arm is generally rectangular. An electrode 203 is disposed on the upper surface of the cross-section of one tuning fork arm, and an electrode 204 is disposed on the lower surface. Electrodes 205 and 206 are provided on the side surfaces. An electrode 207 is arranged on the upper surface of the other tuning fork arm, an electrode 208 is arranged on the lower surface, and electrodes 209 and 210 are arranged on the side surfaces to form a two-electrode terminal HH ′ structure. Now, when a DC voltage is applied between H-H ', the electric field works in the direction of the arrow. As a result, when one tuning fork arm is bent inward, the other tuning fork arm is also bent inward. This is because the direction of the electric field component Ex in the x-axis direction is opposite in each tuning fork arm. By applying an alternating voltage, vibration can be sustained. JP-A-56-65517 and JP-A-2000-223992 (P2000-223992A) disclose a tuning fork arm with a groove and an electrode configuration.
JP-A-56-65517 JP 2000-223992 (P2000-223992A) International Publication No. 00/44092

音叉型屈曲水晶振動子では、電界成分Exが大きいほど等価直列抵抗Rが小さくなり、品質係数Q値が大きくなる。しかしながら、従来から使用されている音叉型屈曲水晶振動子は、図10で示したように、各音叉腕の上下面と側面の4面に電極を配置している。そのために電界が直線的に働かず、かかる音叉型屈曲水晶振動子を小型化させると、電界成分Exが小さくなってしまい、等価直列抵抗Rが大きくなり、品質係数Q値が小さくなるなどの課題が残されていた。同時に、時間基準として高精度な、即ち、高い周波数安定性を有し、高調波モード振動を抑えた屈曲水晶振動子を得ることが課題として残されていた。又、前記課題を解決する方法として、例えば、特開昭56−65517では音叉腕に溝を設け、且つ、溝の構成と電極構成について開示している。しかしながら、溝の構成、寸法と振動モード並びに基本波モード振動での等価直列抵抗Rと高調波モード振動での等価直列抵抗Rとの関係及び周波数安定性に関係するフィガーオブメリットMについては全く開示されていない。又、従来の水晶振動子や前記溝を設けた振動子を従来の回路に接続し、水晶発振回路を構成すると、基本波振動モードの出力信号が衝撃や振動などの影響で出力信号が高調波モード振動の周波数に変化、検出される等の問題が発生していた。このようなことから、衝撃や振動を受けても、それらの影響を受けない高調波モード振動を抑えた基本波モードで振動する音叉形状の屈曲水晶振動子を具えた水晶発振器が所望されていた。更に、水晶発振器の消費電流を低減するために、負荷容量Cを小さくすると高調波モードの振動がし易くなり、基本波モード振動の出力周波数が得られない等の課題が残されていた。それ故、基本波モードで振動する超小型で、等価直列抵抗Rの小さい、品質係数Q値が高くなるような新形状で、電気機械変換効率の良い溝の構成と電極構成を有する音叉形状の屈曲水晶振動子を具え、出力信号が基本波モード振動の周波数で、高い周波数安定性(高い時間精度)を有し、消費電流の少ない水晶発振器が所望されていた。The tuning-fork type flexural quartz crystal resonator, the more the equivalent series resistance R 1 becomes small electric field component Ex is large, the quality factor Q value increases. However, in the tuning fork-type bent quartz crystal resonator that has been conventionally used, as shown in FIG. 10, electrodes are arranged on the upper and lower surfaces and side surfaces of each tuning fork arm. For this reason, when the electric field does not work linearly and the tuning fork type quartz crystal resonator is reduced in size, the electric field component Ex becomes smaller, the equivalent series resistance R 1 becomes larger, the quality factor Q value becomes smaller, etc. There were still challenges. At the same time, there remains a problem to obtain a bent crystal resonator that has high accuracy as a time reference, that is, has high frequency stability and suppresses harmonic mode vibration. As a method for solving the above-mentioned problem, for example, Japanese Patent Laid-Open No. 56-65517 discloses a groove on a tuning fork arm, and discloses a groove structure and an electrode structure. However, with regard to the structure of the groove, dimensions and vibration modes, the relation between the equivalent series resistance R 1 in the fundamental mode vibration and the equivalent series resistance R n in the harmonic mode vibration, and the FIG. It is not disclosed at all. In addition, when a crystal oscillator is configured by connecting a conventional crystal resonator or a resonator with the groove to a conventional circuit, the output signal in the fundamental vibration mode is affected by impact or vibration, and the output signal becomes harmonic. Problems such as change and detection of the frequency of mode vibration have occurred. For this reason, there has been a demand for a crystal oscillator including a tuning-fork-shaped bent quartz crystal that vibrates in a fundamental wave mode that suppresses harmonic mode vibration that is not affected by shock or vibration. . Furthermore, in order to reduce the current consumption of the crystal oscillator, and to reduce the load capacitance C L liable to vibration harmonic mode, problems such as not to obtain the output frequency of the fundamental mode oscillation has been left. Therefore, a tuning fork shape that has an ultra-small size that vibrates in the fundamental mode, a small equivalent series resistance R 1, a high quality factor Q value, a groove configuration and an electrode configuration with good electromechanical conversion efficiency. Therefore, there has been a demand for a crystal oscillator that has a bent crystal resonator, an output signal having a fundamental mode vibration frequency, high frequency stability (high time accuracy), and low current consumption.

本発明は、以下の方法で従来の課題を有利に解決した屈曲モードで振動する音叉形状の水晶振動子を具えた水晶発振器とその製造方法を提供することを目的とするものである。  An object of the present invention is to provide a crystal oscillator including a tuning fork-shaped crystal resonator that vibrates in a bending mode, which advantageously solves the conventional problems by the following method, and a manufacturing method thereof.

即ち、本発明の水晶振動子の製造方法の第1の態様は、音叉基部と前記音叉基部に接続された少なくとも第1音叉腕と第2音叉腕とを備えて構成され、屈曲モードで振動する音叉型屈曲水晶振動子の製造方法で、研磨加工あるいはポリッシュ加工された水晶ウエハの上面と下面の各々に金属膜を形成する工程と、前記金属膜の上にレジストを塗布する工程と、前記音叉基部は切り欠き部分と、第1幅Sを備えた第1基部部分と前記第1幅Sより大きい、または等しい第2幅Sを備えた第2基部部分を備え、前記第1音叉腕と前記第2音叉腕の各々の一端部は前記第1基部部分に接続されていて、前記切り欠き部分を前記第1基部部分と前記第2基部部分の間に形成する工程と、前記音叉基部と前記第1音叉腕と前記第2音叉腕とを備えた音叉形状を形成する工程と、前記第1音叉腕と前記第2音叉腕の各音叉腕に溝を、又は前記第1音叉腕と前記第2音叉腕の各音叉腕と前記音叉基部に溝を形成する工程と、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された前記溝の面の上に電極を配置する工程と、前記第1音叉腕と前記第2音叉腕の各音叉腕の第1側面とその第1側面に対抗する第2側面の各側面に電極を配置する工程と、前記音叉型屈曲水晶振動子の第1電極端子を形成するために、前記第1音叉腕に形成された溝の面の上に配置された前記電極を、前記第2音叉腕の第1側面と第2側面の各側面に配置された前記電極に接続する工程と、前記音叉型屈曲水晶振動子の第2電極端子を形成するために、前記第2音叉腕に形成された溝の面の上に配置された前記電極を、前記第1音叉腕の第1側面と第2側面の各側面に配置された前記電極に接続する工程と、を含み、前記音叉型屈曲水晶振動子は基本波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、かつ、2次高調波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、M>MとS<Sの関係が得られるように、前記音叉形状と前記溝と前記電極の寸法を決定する工程を備えている水晶振動子の製造方法である。
本発明の水晶振動子の製造方法の第2の態様は、前記音叉基部と前記第1音叉腕と前記第2音叉腕とを備えた音叉形状は、化学的エッチング加工により形成され、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝は各音叉腕の長さ方向において分割されていて、前記音叉形状と各音叉腕の長さ方向に分割された前記溝は同時に形成されている第1の態様に記載の水晶振動子の製造方法である。
本発明の水晶振動子の製造方法の第3の態様は、前記音叉型屈曲水晶振動子の前記基本波モード振動の等価直列抵抗Rが、前記2次高調波モード振動の等価直列抵抗Rより小さくなるように、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝の長さ寸法と前記音叉型屈曲水晶振動子の全長の寸法を決定する工程を備えている第1の態様または第2の態様に記載の水晶振動子の製造方法である。
本発明の水晶振動子の製造方法の第4の態様は、前記第1音叉腕と前記第2音叉腕の間隔Wが、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝の溝幅Wより大きく、または等しく、間隔Wが0.05mm〜0.35mmの範囲内に、かつ、溝幅Wが0.03mm〜0.12mmの範囲内にあるように、前記第1音叉腕と前記第2音叉腕の各音叉腕と前記溝を形成する工程を備え、かつ、前記第1音叉腕と前記第2音叉腕の各音叉腕を形成する工程と前記溝を形成する工程とは異なる工程である第1の態様〜第3の態様のいずれか1つの態様に記載の水晶振動子の製造方法である。
That is, the first aspect of the method for manufacturing a crystal resonator according to the present invention includes a tuning fork base and at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, and vibrates in a bending mode. In the method for manufacturing a tuning fork-type bent quartz resonator, a step of forming a metal film on each of an upper surface and a lower surface of a polished or polished quartz wafer, a step of applying a resist on the metal film, and the tuning fork the base includes a cutout portion, the second base portion with said first base portion having a first width S 5 greater than the first width S 5, or equal to the second width S 6, the first fork One end of each of the arm and the second tuning fork arm is connected to the first base portion, and the notch portion is formed between the first base portion and the second base portion; and the tuning fork A base, the first tuning fork arm and the second tuning fork arm; Forming a tuning fork shape and a groove in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, or a groove in each tuning fork arm and the tuning fork base of the first tuning fork arm and the second tuning fork arm. Forming an electrode on the surface of the groove formed in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, and the first tuning fork arm and the second tuning fork arm In order to form a first electrode terminal of the tuning-fork-type bent quartz crystal resonator, a step of disposing electrodes on each side surface of a first side surface of each tuning-fork arm and a second side surface facing the first side surface, Connecting the electrodes disposed on the surface of the groove formed in one tuning fork arm to the electrodes disposed on each of the first side surface and the second side surface of the second tuning fork arm; In order to form the second electrode terminal of the type bending crystal resonator, the above-mentioned disposed on the surface of the groove formed in the second tuning fork arm Connecting a pole to the electrode disposed on each of the first and second side surfaces of the first tuning fork arm, wherein the tuning fork-type bending quartz crystal is a It has a merit M 1 and a frequency stability factor S 1 , and has a second harmonic mode vibration Figer of merit M 2 and a frequency stability factor S 2 , and the relationship of M 1 > M 2 and S 1 <S 2 A method for manufacturing a crystal resonator comprising the step of determining the tuning fork shape, the groove, and the dimensions of the electrodes so as to be obtained.
According to a second aspect of the method for manufacturing a crystal resonator of the present invention, a tuning fork shape including the tuning fork base, the first tuning fork arm, and the second tuning fork arm is formed by chemical etching, A groove formed in each tuning fork arm of the tuning fork arm and the second tuning fork arm is divided in the length direction of each tuning fork arm, and the groove divided in the length direction of each tuning fork arm and the length direction of each tuning fork arm simultaneously. It is a manufacturing method of the crystal unit given in the 1st mode formed.
A third aspect of the method for manufacturing a quartz oscillator of the present invention, the tuning-fork bent equivalent series resistance R 1 of the fundamental mode oscillation of the crystal oscillator, the second harmonic mode vibration of the equivalent series resistance R 2 A step of determining a length dimension of a groove formed in each tuning fork arm of the first tuning fork arm and the second tuning fork arm and a total length dimension of the tuning fork-type bent quartz resonator so as to be smaller. It is a manufacturing method of a crystal oscillator given in the 1st mode or the 2nd mode.
A fourth aspect of the method for manufacturing a quartz oscillator of the present invention, wherein the first tuning fork arm second tuning fork arms for spacing W 4 is formed on the tuning fork arms of said second tuning fork arms and the first tuning fork arms has been larger than the groove width W 2 of the groove, or equal, to within the range interval W 4 is 0.05 mm to 0.35 mm, and, as the groove width W 2 is in the range of 0.03mm~0.12mm The step of forming each tuning fork arm of the first tuning fork arm and the second tuning fork arm and the groove, and forming each tuning fork arm of the first tuning fork arm and the second tuning fork arm; The method for manufacturing a crystal resonator according to any one of the first to third aspects, which is a process different from the process of forming a groove.

本発明の水晶ユニットの製造方法の第1の態様は、第1の態様〜第4の態様のいずれか1つの態様に記載の水晶振動子の製造方法と、前記音叉型屈曲水晶振動子の前記2次高調波モード振動のフイガーオブメリットMが30より小さくなるように、前記音叉形状と前記溝と前記電極の寸法を決定する工程と、ケースと蓋を準備する工程と、前記ケースまたは前記蓋の固定部に前記音叉型屈曲水晶振動子を固定する工程と、前記音叉型屈曲水晶振動子の発振周波数を調整する工程と、を備えている水晶ユニットの製造方法である。
本発明の水晶ユニットの製造方法の第2の態様は、前記音叉型屈曲水晶振動子は基本波モード振動の基準周波数32.768kHzを備え、前記基準周波数に対して、周波数偏差が−9000PPM〜+5000PPMの範囲内にあるように水晶ウエハ内で周波数を調整する工程と、前記音叉型屈曲水晶振動子は表面実装型のケース、あるいは蓋又は円筒型のケースのリード線に固定され、その固定後に、前記基準周波数に対して、周波数偏差が−100PPM〜+100PPMの範囲内にあるように周波数を調整する工程と、を備えている第1の態様に記載の水晶ユニットの製造方法である。
本発明の水晶ユニットの製造方法の第3の態様は、前記第1音叉腕と前記第2音叉腕の各音叉腕に貫通穴を、又は前記音叉基部に貫通穴を形成する工程を備えている第1の態様または第2の態様に記載の水晶ユニットの製造方法である。
本発明の水晶発振器の製造方法の第1の態様は、第1の態様〜第4の態様のいずれか1つの態様に記載の水晶振動子の製造方法と、あるいは第1の態様〜第3の態様のいずれか1つの態様に記載の水晶ユニットの製造方法と、増幅器とコンデンサーと抵抗素子とを準備する工程と、前記音叉型屈曲水晶振動子の前記第1電極端子と前記第2電極端子を、前記増幅器と前記コンデンサーと前記抵抗素子に電気的に接続する工程と、を備えている水晶発振器の製造方法である。
本発明の水晶振動子の第1の態様は、音叉基部と前記音叉基部に接続された少なくとも第1音叉腕と第2音叉腕とを備えて構成され、屈曲モードで振動する音叉形状の音叉型屈曲水晶振動子で、前記音叉基部は切り欠き部分と、第1幅Sを備えた第1基部部分と前記第1幅Sより大きい、または等しい第2幅Sを備えた第2基部部分を備え、前記第1音叉腕と前記第2音叉腕の各々の一端部は前記第1基部部分に接続され、前記切り欠き部分が前記第1基部部分と前記第2基部部分の間に形成され、前記第1音叉腕と前記第2音叉腕の各音叉腕に溝が、又は前記第1音叉腕と前記第2音叉腕の各音叉腕と前記音叉基部に溝が形成され、前記音叉型屈曲水晶振動子の第1電極端子を形成するために、前記第1音叉腕に形成された溝の面の上に配置された電極が、前記第2音叉腕の第1側面と第2側面の各側面に配置された電極に接続され、かつ、前記音叉型屈曲水晶振動子の第2電極端子を形成するために、前記第2音叉腕に形成された溝の面の上に配置された電極が、前記第1音叉腕の第1側面と第2側面の各側面に配置された電極に接続され、前記音叉型屈曲水晶振動子は基本波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、かつ、2次高調波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、M>MとS<Sの関係が得られるように、前記音叉形状と前記溝と前記電極の寸法が決定されている水晶振動子である。
本発明の水晶ユニットの第1の態様は、第1の態様に記載の水晶振動子とケースと蓋とを備えて水晶ユニットは構成され、前記音叉型屈曲水晶振動子は前記ケースまたは前記蓋の固定部に導電接着剤によって固定されている水晶ユニットである。
本発明の水晶ユニットの第2の態様は、前記音叉型屈曲水晶振動子は全長lを有し、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝は、各音叉腕の長さ方向において分割されていて、分割された前記溝の少なくとも1個の溝の長さlが辺比l/l=0.2〜0.78の関係を備えるか、又は、分割された前記溝の長さ方向の加えられた溝の長さlが辺比l/l=0.2〜0.78の関係を備えている第1の態様に記載の水晶ユニットである。
本発明の情報通信機器の第1の態様は、第1の態様に記載の水晶振動子と、あるいは第1の態様または第2の態様に記載の水晶ユニットと、増幅器とコンデンサーと抵抗素子とを備えて水晶発振回路は構成され、前記音叉型屈曲水晶振動子の前記第1電極端子と前記第2電極端子が、前記増幅器と前記コンデンサーと前記抵抗素子とに電気的に接続され、前記水晶発振回路を備えて構成される水晶発振器を備えた情報通信機器で、前記水晶発振器は前記音叉型屈曲水晶振動子の基本波モード振動の発振周波数を出力信号として備え、前記出力信号が前記情報通信機器用の基準信号源として用いられる情報通信機器である。
According to a first aspect of the method for manufacturing a crystal unit of the present invention, there is provided a crystal resonator manufacturing method according to any one of the first to fourth aspects, and the tuning-fork type bent crystal resonator. as the second harmonic mode vibration of full Iga of merit M 2 is less than 30, and determining the size of the electrode and the tuning fork and the groove, a step of preparing a casing and a lid, said case or A method for manufacturing a crystal unit comprising: a step of fixing the tuning fork type bent quartz crystal resonator to a fixing portion of the lid; and a step of adjusting an oscillation frequency of the tuning fork type bent crystal resonator.
According to a second aspect of the method for manufacturing a crystal unit of the present invention, the tuning fork type bending crystal resonator has a fundamental frequency of 32.768 kHz of fundamental mode vibration, and a frequency deviation of −9000 PPM to +5000 PPM with respect to the reference frequency. Adjusting the frequency in the quartz wafer so that it is within the range of the above, and the tuning fork type bending quartz crystal unit is fixed to the surface mount type case, or the lead wire of the lid or the cylindrical type case, And a step of adjusting the frequency so that the frequency deviation is within a range of −100 PPM to +100 PPM with respect to the reference frequency.
A third aspect of the method for manufacturing a crystal unit according to the present invention includes a step of forming a through hole in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, or forming a through hole in the tuning fork base. It is a manufacturing method of a crystal unit given in the 1st mode or the 2nd mode.
A first aspect of the method for manufacturing a crystal oscillator according to the present invention is the method for manufacturing a crystal resonator according to any one of the first to fourth aspects, or the first to third aspects. A method of manufacturing a crystal unit according to any one of the aspects, a step of preparing an amplifier, a capacitor, and a resistance element, and the first electrode terminal and the second electrode terminal of the tuning-fork type bent crystal resonator And a step of electrically connecting to the amplifier, the capacitor, and the resistance element.
A first aspect of the crystal resonator according to the present invention includes a tuning fork-shaped tuning fork that includes a tuning fork base, and at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, and vibrates in a bending mode. in flexural crystal oscillator, and the tuning fork base cutout portion, the second base part provided with said first base portion having a first width S 5 greater than the first width S 5, or equal to the second width S 6 Each of the first tuning fork arm and the second tuning fork arm is connected to the first base portion, and the cutout portion is formed between the first base portion and the second base portion. A groove is formed in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, or a groove is formed in each tuning fork arm and the tuning fork base of the first tuning fork arm and the second tuning fork arm, and the tuning fork type The surface of the groove formed in the first tuning fork arm to form the first electrode terminal of the bent crystal resonator The electrode arranged on the top is connected to the electrode arranged on each of the first side surface and the second side surface of the second tuning fork arm, and forms the second electrode terminal of the tuning fork type bent crystal resonator. Therefore, an electrode disposed on a groove surface formed in the second tuning fork arm is connected to an electrode disposed on each of the first side surface and the second side surface of the first tuning fork arm, The tuning fork type bending crystal resonator has a fundamental mode vibration Figer of merit M 1 and a frequency stability factor S 1 , and a second harmonic mode vibration Figer of merit M 2 and a frequency stability factor S 2 . , M 1 > M 2 and S 1 <S 2 so that the tuning fork shape, the groove, and the electrode dimensions are determined so that the relationship of S 1 <S 2 is obtained.
According to a first aspect of the crystal unit of the present invention, the crystal unit includes the crystal resonator according to the first aspect, a case, and a lid, and the tuning fork-type bent crystal resonator includes the case or the lid. It is a crystal unit that is fixed to a fixed portion with a conductive adhesive.
According to a second aspect of the crystal unit of the present invention, the tuning fork-type bending crystal resonator has a total length l, and the grooves formed in the tuning fork arms of the first tuning fork arm and the second tuning fork arm are each tuning fork. Divided in the length direction of the arm, and the length l 1 of at least one of the divided grooves has a side ratio l 1 /l=0.2 to 0.78, or The crystal unit according to the first aspect, wherein the added groove length l 1 in the length direction of the divided grooves has a relationship of side ratio l 1 /l=0.2 to 0.78. is there.
According to a first aspect of the information communication device of the present invention, there is provided the crystal resonator according to the first aspect, or the crystal unit according to the first aspect or the second aspect, an amplifier, a capacitor, and a resistance element. A crystal oscillation circuit is provided, and the first electrode terminal and the second electrode terminal of the tuning-fork type bending crystal resonator are electrically connected to the amplifier, the capacitor, and the resistance element, and the crystal oscillation circuit An information communication device including a crystal oscillator configured with a circuit, wherein the crystal oscillator includes an oscillation frequency of a fundamental mode vibration of the tuning-fork type bending crystal resonator as an output signal, and the output signal is the information communication device. Is an information communication device used as a reference signal source.

このように、本発明は屈曲モードで振動する音叉形状の水晶振動子を具えた水晶発振器で、しかも、音叉形状の溝と電極の構成を改善し、増幅回路と帰還回路との関係を示すことにより、高調波モード振動を抑え、基本波モードで振動する周波数を出力する水晶発振器を得る事ができる。  As described above, the present invention is a crystal oscillator including a tuning fork-shaped crystal resonator that vibrates in a bending mode, and further improves the configuration of the tuning-fork-shaped groove and electrode, and shows the relationship between the amplifier circuit and the feedback circuit. Thus, it is possible to obtain a crystal oscillator that suppresses harmonic mode vibration and outputs a frequency that vibrates in the fundamental wave mode.

加えて、音叉腕の中立線を挟んだ(含む)中央部に溝を設け、且つ、電極を配置し、溝の寸法の最適化を図る事により、等価直列抵抗Rが小さく、Q値が高く、電気機械変換効率の良い屈曲モードで振動する超小型の音叉形状の屈曲水晶振動子が得られる。と同時に、帰還回路の負荷容量を小さくできる。その結果、消費電流の少ない水晶発振器が得られる。In addition, by providing a groove at the center of (including) the tuning fork arm neutral line, and by arranging electrodes and optimizing the dimensions of the groove, the equivalent series resistance R 1 is reduced and the Q value is reduced. An ultra-small tuning-fork-shaped bent quartz resonator that vibrates in a bending mode that is high and has good electromechanical conversion efficiency can be obtained. At the same time, the load capacity of the feedback circuit can be reduced. As a result, a crystal oscillator with low current consumption can be obtained.

以下、本発明の実施例を図面に基づき具体的に述べる。図1は本発明の水晶発振器を構成する水晶発振回路図の一実施例である。本実施例では、水晶発振回路1は増幅器(CMOSインバータ)2、帰還抵抗4、ドレイン抵抗7、コンデンサー5,6と音叉形状の屈曲水晶振動子3から構成されている。即ち、水晶発振回路1は、増幅器2と帰還抵抗4から成る増幅回路8とドレイン抵抗7、コンデンサー5,6と屈曲水晶振動子3から成る帰還回路9から構成されている。更に、基本波モードで振動する音叉形状の屈曲水晶振動子3を具えて構成される水晶発振回路1の出力信号はバッフア回路(図示されていない)を通してドレイン側から出力される。即ち、基本波モード振動の周波数がバッフア回路を通して出力信号として出力される。本発明では、基本波モード振動の周波数は10kHz〜200kHzが用いられる。又、本発明では、前記出力信号の周波数を分周回路又は逓倍回路によって分周又は逓倍された周波数も基本波モード振動の周波数に含まれる。さらに詳細には、本実施例の水晶発振器は水晶発振回路とバッフア回路とを具えて構成されている。換言するならば、水晶発振回路は増幅回路と帰還回路から構成され、増幅回路は少なくとも増幅器から構成され、帰還回路は少なくとも音叉形状の屈曲水晶振動子とコンデンサーから構成されている。又、本実施例の水晶発振器に用いられる音叉形状の屈曲水晶振動子は図3から図6で詳述される。  Embodiments of the present invention will be specifically described below with reference to the drawings. FIG. 1 is an example of a crystal oscillation circuit diagram constituting a crystal oscillator of the present invention. In this embodiment, the crystal oscillation circuit 1 includes an amplifier (CMOS inverter) 2, a feedback resistor 4, a drain resistor 7, capacitors 5 and 6, and a tuning fork-shaped bent crystal resonator 3. That is, the crystal oscillation circuit 1 includes an amplifier circuit 8 including an amplifier 2 and a feedback resistor 4, a drain resistor 7, capacitors 5 and 6, and a feedback circuit 9 including a bent crystal resonator 3. Further, the output signal of the crystal oscillation circuit 1 including the tuning-fork-shaped bent crystal resonator 3 that vibrates in the fundamental wave mode is output from the drain side through a buffer circuit (not shown). That is, the frequency of the fundamental mode vibration is output as an output signal through the buffer circuit. In the present invention, the frequency of the fundamental wave mode vibration is 10 kHz to 200 kHz. In the present invention, the frequency obtained by dividing or multiplying the frequency of the output signal by a divider circuit or a multiplier circuit is also included in the fundamental mode vibration frequency. More specifically, the crystal oscillator of the present embodiment includes a crystal oscillation circuit and a buffer circuit. In other words, the crystal oscillation circuit is composed of an amplifier circuit and a feedback circuit, the amplifier circuit is composed of at least an amplifier, and the feedback circuit is composed of at least a tuning-fork-shaped bent crystal resonator and a capacitor. Further, the tuning-fork-shaped bent crystal resonator used in the crystal oscillator of this embodiment will be described in detail with reference to FIGS.

図2は図1の帰還回路図を示す。今、屈曲モードで振動する音叉形状の水晶振動子の角周波数をω、ドレイン抵抗7の抵抗をR、コンデンサー5、6の容量をC、C、水晶のクリスタルインピーダンスをRei,入力電圧をV,出力電圧をVとすると、帰還率βはβ=|V/|Vで定義される。但し、iは屈曲振動モードの振動次数を表し、例えば、i=1のとき、基本波モード振動、i=2のとき、2次高調波モード振動、i=3のとき、3次高調波モード振動である。即ち、i=nのとき、n次高調波モード振動であるが、以下単に、高調波モード振動と言う。更に、負荷容量CはC=C/(C+C)で与えられ、C=C=CgsとRd>>Reiとすると、帰還率βはβ=1/(1+kC )で与えられる。但し、kはω、R、Reiの関数で表される。又、Reiは近似的に等価直列抵抗Rに等しくなる。FIG. 2 shows the feedback circuit diagram of FIG. Now, the angular frequency of the tuning-fork-shaped quartz crystal vibrating in the bending mode is ω i , the resistance of the drain resistor 7 is R d , the capacitances of the capacitors 5 and 6 are C g and C d , and the crystal impedance of the crystal is R ei , When the input voltage is V 1 and the output voltage is V 2 , the feedback rate β i is defined by β i = | V 2 | i / | V 1 | i . However, i represents the vibration order of the bending vibration mode. For example, when i = 1, fundamental mode vibration, when i = 2, second harmonic mode vibration, when i = 3, third harmonic mode It is vibration. That is, when i = n, it is n-order harmonic mode vibration, but hereinafter simply referred to as harmonic mode vibration. Further, the load capacity C L is given by C L = C g C d / (C g + C d ), and when C g = C d = C gs and Rd >> R ei , the feedback rate β i is β i = 1 / (1 + kC L 2 ) However, k is expressed by a function of ω i , R d , and R ei . R ei is approximately equal to the equivalent series resistance R i .

このように、帰還率βと負荷容量Cとの関係から、負荷容量Cが小さくなると、基本波振動モードと高調波振動モードの共振周波数の帰還率はそれぞれ大きくなることが良く分かる。それ故、負荷容量Cが小さくなると、基本波モード振動よりも高調波モード振動の方が発振し易くなる。その理由は高調波モード振動の最大振動振幅が基本波モード振動の最大振動振幅より小さいために、発振持続条件である振幅条件と位相条件を同時に満足するためである。Thus, from the relationship between the feedback rate β i and the load capacitance C L , it is well understood that the feedback rates of the resonance frequencies of the fundamental vibration mode and the harmonic vibration mode increase as the load capacitance C L decreases. Therefore, when the load capacity CL is reduced, the harmonic mode vibration is more likely to oscillate than the fundamental mode vibration. The reason is that since the maximum vibration amplitude of the harmonic mode vibration is smaller than the maximum vibration amplitude of the fundamental mode vibration, the amplitude condition and the phase condition which are oscillation continuation conditions are satisfied simultaneously.

本発明の水晶発振器は、消費電流が少なく、しかも、出力周波数が高い周波数安定性(高い時間精度)を有する、基本波モード振動の周波数である水晶発振器を提供することを目的としている。それ故、消費電流を少なくするために、本実施例では、負荷容量Cは10pF以下を用いる。より消費電流を少なくするには、消費電流は負荷容量に比例するので、C=8pF以下が好ましい。ここで言う、容量C、Cは回路の浮遊容量を含まない数値であるが、実際には、回路構成により浮遊容量が存在する。それ故、本実施例では、この回路構成による浮遊容量を含んだ負荷容量Cは18pF以下を用いる。また、高調波モードの振動を抑え、発振器の出力信号が基本波モード振動の周波数を得るために、α/α>β/βとαβ>1を満足するように本実施例の水晶発振回路は構成される。但し、α、αは基本波モード振動と高調波モード振動の増幅回路の増幅率で、β、βは基本波モード振動と高調波モード振動の帰還回路の帰還率である。即ち、n=2、3のとき、それぞれ、2次、3次高調波モード振動である。An object of the crystal oscillator of the present invention is to provide a crystal oscillator having a frequency of fundamental mode vibration that has low current consumption and high frequency stability (high time accuracy). Therefore, in order to reduce current consumption, in the present embodiment, the load capacitance C L is used under 10pF. In order to further reduce the current consumption, since the current consumption is proportional to the load capacity, C L = 8 pF or less is preferable. The capacitances C g and C d referred to here are numerical values that do not include the stray capacitance of the circuit, but actually there are stray capacitances depending on the circuit configuration. Therefore, in this embodiment, the load capacitance C L containing the stray capacitance of this circuit configuration uses the following 18 pF. Further, in order to suppress the harmonic mode vibration and the output signal of the oscillator obtains the frequency of the fundamental mode vibration, the main signal is satisfied so that α 1 / α n > β n / β 1 and α 1 β 1 > 1 are satisfied. The crystal oscillation circuit of the embodiment is configured. However, α 1 and α n are amplification factors of the fundamental wave mode vibration and the harmonic mode vibration amplification circuit, and β 1 and β n are feedback rates of the feedback circuit of the fundamental wave mode vibration and the harmonic mode vibration. That is, when n = 2 and 3, they are the second and third harmonic mode vibrations, respectively.

換言するならば、増幅回路の基本波モード振動の増幅率αと高調波モード振動の増幅率αとの比が帰還回路の高調波モード振動の帰還率βと基本波モード振動の帰還率βとの比より大きく、かつ、基本波モード振動の増幅率αと基本波モード振動の帰還率βの積が1より大きくなるように構成される。このような構成により、消費電流の少ない、出力信号が基本波モード振動の周波数である水晶発振器が実現できる。更に、高い周波数安定性については後述される。In other words, the ratio of the amplification factor α 1 of the fundamental mode vibration of the amplifier circuit and the amplification factor α n of the harmonic mode vibration is the feedback of the feedback factor β n of the harmonic mode vibration of the feedback circuit and the fundamental mode vibration. greater than the ratio of the rate beta 1, and the product of the feedback factor beta 1 amplification factor alpha 1 and the fundamental mode vibration of the fundamental wave mode vibration is configured to be greater than 1. With such a configuration, it is possible to realize a crystal oscillator that consumes less current and whose output signal has a frequency of fundamental mode vibration. Further, high frequency stability will be described later.

又、本実施例の水晶発振回路を構成する増幅回路の増幅部は負性抵抗−RLでその特性を示すことができる。i=1のとき基本波モード振動の負性抵抗で、i=nのとき高調波モード振動の負性抵抗である。即ち、n=2,3のとき、2次、3次高調波モード振動の負性抵抗である。本実施例の水晶発振器は、増幅回路の基本波モード振動の負性抵抗の絶対値|−RL|と基本波モード振動の等価直列抵抗Rとの比が増幅回路の高調波モード振動の負性抵抗の絶対値|−RL|と高調波モード振動の等価直列抵抗Rとの比より大きくなるように発振回路が構成されている。即ち、|−RL|/R>|−RL|/Rを満足するように構成されている。このように水晶発振回路を構成することにより、高調波モード振動の発振起動が抑えられ、その結果、基本波モード振動の発振起動が得られるので基本波モード振動の周波数が出力信号として得られる。Further, the amplifying part of the amplifying circuit constituting the crystal oscillation circuit of the present embodiment can exhibit the characteristic by a negative resistance -RL i . When i = 1, it is a negative resistance of fundamental mode vibration, and when i = n, it is a negative resistance of harmonic mode vibration. That is, when n = 2, 3, it is the negative resistance of the second and third harmonic mode vibration. In the crystal oscillator of this embodiment, the ratio of the absolute value | −RL 1 | of the negative resistance of the fundamental mode vibration of the amplifier circuit to the equivalent series resistance R 1 of the fundamental mode vibration is the harmonic mode vibration of the amplifier circuit. The oscillation circuit is configured to be larger than the ratio of the absolute value | -RL n | of the negative resistance to the equivalent series resistance R n of the harmonic mode vibration. That is, it is configured to satisfy | −RL 1 | / R 1 > | −RL n | / R n . By configuring the crystal oscillation circuit in this way, the oscillation activation of the harmonic mode vibration is suppressed, and as a result, the oscillation activation of the fundamental wave mode vibration is obtained, so that the frequency of the fundamental wave mode vibration is obtained as the output signal.

図3は本発明の第1実施例の水晶発振器に用いられる屈曲モードで振動する音叉形状の屈曲水晶振動子10の外観図とその座標系を示すものである。座標系O、電気軸x、機械軸y、光軸zからなるO−xyzを構成している。本実施例の音叉形状の屈曲水晶振動子10は音叉腕20、音叉腕26と音叉基部40とから成り、音叉腕20と音叉腕26は音叉基部40に接続されている。また、音叉腕20と音叉腕26はそれぞれ上面と下面と側面とを有する。更に、音叉腕20の上面には中立線を挟んで、即ち、中立線を含むように溝21が設けられ、又、音叉腕26の上面にも音叉腕20と同様に溝27が設けられるとともに、さらに、音叉基部40に溝32と溝36とが設けられている。なお、角度θは、x軸廻りの回転角であり、通常0〜10°の範囲で選ばれる。又、音叉腕20、26の下面にも上面と同様に溝が設けられている。  FIG. 3 shows an external view of a tuning-fork-shaped bent quartz resonator 10 that vibrates in the bending mode used in the crystal oscillator of the first embodiment of the present invention and its coordinate system. An O-xyz including a coordinate system O, an electric axis x, a mechanical axis y, and an optical axis z is configured. The tuning fork-shaped bent quartz crystal resonator 10 according to this embodiment includes a tuning fork arm 20, a tuning fork arm 26 and a tuning fork base 40, and the tuning fork arm 20 and the tuning fork arm 26 are connected to the tuning fork base 40. The tuning fork arm 20 and the tuning fork arm 26 have an upper surface, a lower surface, and a side surface, respectively. Further, a groove 21 is provided on the upper surface of the tuning fork arm 20 with a neutral line interposed therebetween, that is, so as to include the neutral line, and a groove 27 is provided on the upper surface of the tuning fork arm 26 in the same manner as the tuning fork arm 20. Further, the tuning fork base 40 is provided with a groove 32 and a groove 36. The angle θ is a rotation angle around the x axis, and is usually selected in the range of 0 to 10 °. Further, grooves on the lower surfaces of the tuning fork arms 20 and 26 are provided in the same manner as the upper surface.

図4は、図3の音叉形状の屈曲水晶振動子10の音叉基部40のD−D′断面図を示す。図4では図3の水晶振動子の音叉基部40の断面形状並びに電極配置について詳述する。音叉腕20と連結する音叉基部40には溝21,22が設けられている。同様に、音叉腕26と連結する音叉基部40には溝27,28が設けられている。更に、溝21と溝27との間には更に溝32と溝36とが設けられている。又、溝22と溝28との間にも溝33と溝37とが設けられている。そして、溝21と溝22には電極23,24が、溝32,33,36,37には電極34,35,38,39が、溝27と溝28には電極29,30が配置され、音叉基部40の両側面には電極25,31が配置されている。詳細には、溝の側面に電極が配置され、前記電極に対抗して極性の異なる電極が配置されている。  4 shows a DD ′ cross-sectional view of the tuning fork base 40 of the tuning fork-shaped bent quartz resonator 10 of FIG. 4, the cross-sectional shape and electrode arrangement of the tuning fork base 40 of the crystal resonator of FIG. 3 will be described in detail. The tuning fork base 40 connected to the tuning fork arm 20 is provided with grooves 21 and 22. Similarly, the tuning fork base 40 connected to the tuning fork arm 26 is provided with grooves 27 and 28. Further, a groove 32 and a groove 36 are further provided between the groove 21 and the groove 27. A groove 33 and a groove 37 are also provided between the groove 22 and the groove 28. The electrodes 21 and 24 are disposed in the grooves 21 and 22, the electrodes 34, 35, 38, and 39 are disposed in the grooves 32, 33, 36, and 37, and the electrodes 29 and 30 are disposed in the grooves 27 and 28, respectively. Electrodes 25 and 31 are disposed on both side surfaces of the tuning fork base 40. Specifically, electrodes are disposed on the side surfaces of the grooves, and electrodes having different polarities are disposed to oppose the electrodes.

また、音叉形状の屈曲水晶振動子10は厚みtを有し、溝は厚みtを有している。ここで言う厚みtは溝の一番深いところの厚みを言う。その理由は水晶は異方性の材料のために、化学的エッチング法では各結晶軸の方向によりエッチングスピードが異なる。それ故、化学的エッチング法では溝の深さにバラツキが生じ、図4に示した一様な形状に加工するのが極めて難しいためである。本実施例では、溝の厚みtと音叉腕又は音叉腕と音叉基部の厚みtとの比(t/t)が0.79より小さくなるように、好ましくは、0.01〜0.79となるように溝が音叉腕又は音叉腕と音叉基部に形成されている。特に、音叉基部の歪みを大きくするために、音叉基部の溝の厚みと音叉基部の厚みの比を0.01〜0.025にする事が好ましい。このように形成することにより、音叉腕又は音叉腕と音叉基部の溝側面電極とそれに対抗する側面の電極との間の電界Exが大きくなる。すなわち、電気機械変換効率の良い屈曲振動子が得られる。即ち、容量比の小さい音叉形状の屈曲水晶振動子が得られる。更に、本実施例では、音叉基部の溝と溝との間にさらに溝32,33,36,37が設けられているので、その電界強度はより一層大きくなり、より電気機械変換効率が良くなる。又、本実施例では、音叉基部40の上面に溝32,36が、下面に溝33,37が設けられているが、片面にのみ設けても良い。Further, the bent quartz resonator 10 of the tuning fork has a thickness t, groove has a thickness t 1. The thickness t 1 here refers to the thickness of the deepest part of the groove. The reason for this is that quartz is an anisotropic material, and the etching speed varies depending on the direction of each crystal axis in the chemical etching method. Therefore, the chemical etching method causes variations in the depth of the groove, and it is extremely difficult to process the uniform shape shown in FIG. In the present embodiment, the ratio (t 1 / t) between the groove thickness t 1 and the tuning fork arm or the tuning fork arm and the tuning fork base thickness t is preferably less than 0.79. A groove is formed in the tuning fork arm or the tuning fork arm and the tuning fork base so as to be 79. In particular, in order to increase the distortion of the tuning fork base, it is preferable to set the ratio of the groove thickness of the tuning fork base and the thickness of the tuning fork base to 0.01 to 0.025. By forming in this way, the electric field Ex between the tuning fork arm or the tuning fork arm and the groove side surface electrode of the tuning fork base and the side electrode facing it increases. That is, a flexural vibrator with good electromechanical conversion efficiency can be obtained. That is, a tuning fork-shaped bent quartz crystal resonator with a small capacity ratio can be obtained. Furthermore, in this embodiment, since the grooves 32, 33, 36, and 37 are further provided between the grooves of the tuning fork base, the electric field strength is further increased and the electromechanical conversion efficiency is further improved. . Further, in this embodiment, the grooves 32 and 36 are provided on the upper surface of the tuning fork base 40 and the grooves 33 and 37 are provided on the lower surface, but they may be provided only on one side.

更に、電極25,29,30,34,35は一方の同極に、電極23,24,31,37,38,39は他方の同極になるように配置されていて、2電極端子構造E−E′を構成する。即ち、z軸方向に対抗する溝電極は同極に、且つ、x軸方向に対抗する電極は異極になるように構成されている。今、2電極端子E−E′に直流電圧を印加(E端子に正極、E′端子に負極)すると電界Exは図4に示した矢印のように働く。電界Exは水晶振動子の側面と溝内の側面とに配置された電極により電極に垂直に、即ち、直線的に引き出されるので、電界Exが大きくなり、その結果、発生する歪の量も大きくなる。従って、音叉形状の屈曲水晶振動子を小型化させた場合でも、等価直列抵抗Rの小さい、品質係数Q値の高い屈曲モードで振動する音叉形状の水晶振動子が得られる。Further, the electrodes 25, 29, 30, 34, and 35 are arranged to have one same polarity, and the electrodes 23, 24, 31, 37, 38, and 39 are arranged to have the other same polarity. -E '. That is, the groove electrode that opposes the z-axis direction has the same polarity, and the electrode that opposes the x-axis direction has a different polarity. Now, when a DC voltage is applied to the two-electrode terminal EE ′ (the positive electrode is applied to the E terminal and the negative electrode is applied to the E ′ terminal), the electric field Ex works as indicated by the arrows shown in FIG. Since the electric field Ex is drawn perpendicularly to the electrodes by the electrodes arranged on the side surface of the crystal unit and the side surface in the groove, that is, linearly, the electric field Ex is increased, and as a result, the amount of distortion generated is large. Become. Therefore, even when the tuning fork-shaped bent quartz crystal is reduced in size, a tuning-fork-shaped quartz crystal that vibrates in a bending mode having a small equivalent series resistance R 1 and a high quality factor Q value can be obtained.

図5は図3の音叉形状の屈曲水晶振動子10の上面図を示すものである。図5では溝21,27の配置及び寸法について特に詳述する。音叉腕20の中立線41を挟むようにして溝21が設けられている。他方の音叉腕26も中立線42を挟むようにして溝27が設けられている。更に、本実施例の音叉形状の屈曲水晶振動子10では、音叉基部40の、溝21と溝27との間に挟まれた部分にも溝32と溝36とが設けられている。それら溝21,27及び溝32,36を設けたことで、音叉形状の屈曲水晶振動子10には、先に述べたように、電界Exが図4に示した矢印のように働き、電界Exは水晶振動子の側面と溝内の側面とに配置された電極により電極に垂直に、即ち、直線的に引き出され、特に音叉基部の電界Exが大きくなり、その結果、発生する歪の量も大きくなる。このように、本実施例の音叉形状の屈曲水晶振動子10の形状と電極構成とは、音叉型屈曲水晶振動子を小型化した場合でも電気的諸特性に優れた、即ち、等価直列抵抗Rの小さい、品質係数Q値の高い水晶振動子が実現できる。FIG. 5 shows a top view of the tuning-fork-shaped bent quartz crystal resonator 10 of FIG. In FIG. 5, the arrangement and dimensions of the grooves 21 and 27 will be particularly described in detail. A groove 21 is provided so as to sandwich the neutral line 41 of the tuning fork arm 20. The other tuning fork arm 26 is also provided with a groove 27 so as to sandwich the neutral line 42. Further, in the tuning fork-shaped bent quartz crystal resonator 10 of this embodiment, the groove 32 and the groove 36 are also provided in the portion of the tuning fork base 40 sandwiched between the groove 21 and the groove 27. By providing the grooves 21 and 27 and the grooves 32 and 36, the electric field Ex acts on the tuning fork-shaped bent quartz resonator 10 as indicated by the arrow shown in FIG. Is drawn perpendicularly to the electrodes by the electrodes arranged on the side surface of the crystal unit and the side surface in the groove, that is, linearly, and in particular, the electric field Ex of the tuning fork base is increased, and as a result, the amount of distortion generated is also increased. growing. As described above, the shape and electrode configuration of the tuning-fork-shaped bent quartz crystal resonator 10 of this embodiment are excellent in electrical characteristics even when the tuning-fork-shaped bent quartz resonator is downsized, that is, equivalent series resistance R A crystal resonator with a small quality factor Q of 1 can be realized.

更に、部分幅W、Wと溝幅Wとすると、音叉腕20,26の腕幅WはW=W+W+Wで与えられ、通常はWとWの一部又は全部がW≧Wまたは、W<Wとなるように構成される。又、溝幅WはW≧W、Wを満足する条件で構成される。更に具体的に述べると、本実施例では、溝幅Wと音叉腕幅Wとの比(W/W)が0.35より大きく、1より小さくなるように、好ましくは、0.35〜0.95で、溝の厚みtと音叉腕の厚みt又は音叉腕と音叉基部の厚みtとの比(t/t)が0.79より小さくなるように、好ましくは、0.01〜0.79となるように溝が音叉腕に形成されている。このように形成することにより、音叉腕の中立線41と42を基点とする慣性モーメントが大きくなる。即ち、電気機械変換効率が良くなるので、等価直列抵抗Rの小さい、Q値の高い、しかも、容量比の小さい音叉形状の屈曲水晶振動子を得る事ができる。Further, assuming that the partial widths W 1 and W 3 and the groove width W 2 , the arm width W of the tuning fork arms 20 and 26 is given by W = W 1 + W 2 + W 3 , and usually a part of W 1 and W 3 or All are configured such that W 1 ≧ W 3 or W 1 <W 3 . Further, the groove width W 2 is configured under the condition that satisfies W 2 ≧ W 1 and W 3 . More specifically, in this embodiment, the ratio (W 2 / W) of the groove width W 2 to the tuning fork arm width W is larger than 0.35 and smaller than 1, preferably 0.35. The ratio (t 1 / t) between the groove thickness t 1 and the tuning fork arm thickness t or the tuning fork arm and tuning fork base thickness t (t 1 / t) is preferably less than 0.79. Grooves are formed in the tuning fork arm so as to be 01 to 0.79. By forming in this way, the moment of inertia with the tuning fork arm neutral lines 41 and 42 as base points is increased. That is, since the electro-mechanical conversion efficiency is improved, a small equivalent series resistance R 1, a high Q value, moreover, it is possible to obtain a bending crystal oscillator of a small tuning fork capacity ratio.

これに対して、溝21および溝27の長さlについて本実施例では、溝21,27が音叉腕20,26から音叉基部40の長さlにまで延在し、基部の溝の長さlとなるような寸法とされている。それ故、音叉腕20,26に設けられた溝の長さは(l−l)で与えられ、Rの小さい振動子を得るために、(l−l)/(l−l)が0.4〜0.8の値を有する。更に、音叉形状の屈曲水晶振動子10の全長lは要求される周波数や収納容器の大きさなどから決定される。と共に、基本波モードで振動する良好な音叉形状の屈曲水晶振動子を得るためには、溝の長さlと全長lとの間には密接な関係が存在する。On the other hand, with respect to the length l 1 of the groove 21 and the groove 27, in this embodiment, the grooves 21 and 27 extend from the tuning fork arms 20 and 26 to the length l 2 of the tuning fork base 40, The dimensions are such that the length l 3 is obtained. Therefore, the length of the groove provided in the tuning fork arms 20 and 26 is given by (l 1 −l 3 ), and in order to obtain a vibrator having a small R 1 , (l 1 −l 3 ) / (l− l 2 ) has a value of 0.4 to 0.8. Further, the overall length l of the tuning fork-shaped bent quartz crystal resonator 10 is determined from the required frequency, the size of the storage container, and the like. At the same time, in order to obtain a good tuning-fork-shaped bent quartz crystal resonator that vibrates in the fundamental wave mode, there is a close relationship between the groove length l 1 and the total length l.

すなわち、音叉腕20,26又は音叉腕20,26と音叉基部40に設けられた溝の長さlと音叉形状の屈曲水晶振動子の全長lとの比(l/l)が0.2〜0.78となるように溝の長さは設けられる。このように形成する理由は、不要振動である高調波モード振動、特に、2次、3次高調波モード振動を抑圧する事ができると共に基本波モード振動の周波数安定性を高めることができる。それ故、基本波モードで容易に振動する良好な音叉形状の屈曲水晶振動子が実現できる。さらに詳述するならば、基本波モードで振動する音叉形状の屈曲水晶振動子の等価直列抵抗Rが高調波モード振動の等価直列抵抗Rより小さくなる。即ち、R<R(n=2,3のとき、2次、3次高調波モード振動の等価直列抵抗)となり、増幅器(CMOSインバータ)、コンデンサー、抵抗素子、本実施例の音叉形状の屈曲水晶振動子等から成る水晶発振器において、振動子が基本波モードで容易に振動する良好な水晶発振器が実現できる。又、溝の長さlは音叉腕の長さ方向に分割されていても良く、その中の少なくとも1個が前記辺比(l/l)を満足すれば良いか、又は、分割された溝の長さ方向の加えられた溝の長さが前記辺比(l/l)を満足すれば良い。That is, the ratio (l 1 / l) between the tuning fork arms 20 and 26 or the tuning fork arms 20 and 26 and the length l 1 of the groove provided in the tuning fork base 40 and the total length l of the tuning fork-shaped bent crystal resonator is 0. The length of the groove is provided to be 2 to 0.78. The reason for forming in this way is that it is possible to suppress harmonic mode vibrations, particularly secondary and third harmonic mode vibrations, which are unwanted vibrations, and to improve the frequency stability of fundamental wave mode vibrations. Therefore, a good tuning fork-shaped bent quartz crystal that easily vibrates in the fundamental wave mode can be realized. If More specifically, the equivalent series resistance R 1 of the bending quartz oscillator tuning fork vibrating at the fundamental mode is smaller than the equivalent series resistance R n of the harmonic mode vibration. That is, R 1 <R n (equivalent series resistance of the second and third harmonic mode vibration when n = 2, 3), and the amplifier (CMOS inverter), the capacitor, the resistance element, and the tuning fork shape of the present embodiment. In a crystal oscillator composed of a bent crystal resonator or the like, a good crystal oscillator in which the resonator easily vibrates in the fundamental wave mode can be realized. Further, the groove length l 1 may be divided in the length direction of the tuning fork arm, and at least one of them may satisfy the side ratio (l 1 / l) or may be divided. It is sufficient that the length of the added groove in the length direction of the groove satisfies the side ratio (l 1 / l).

また、この実施例では、音叉基部40は図5中、振動子10の長さlの下側部分全体とされ、又、音叉腕20及び音叉腕26は、図5中、振動子10の長さlの部分から上側の部分全体とされている。本実施例では音叉の叉部は矩形をしているが、本発明は前記形状に限定されるものではなく、音叉の叉部がU字型をしていても良い。この場合も矩形の形状と同じように、音叉腕と音叉基部との寸法の関係は前記関係と同じである。更に、本実施例では、溝は音叉腕と音叉基部に設けられているが、本発明はこれに限定されるものでなく、音叉腕にのみ溝を設けても良く、同様の効果が得られる。この場合、溝の長さl=0となる。また、本発明で言う溝の長さlとは、音叉腕にのみ溝が設けられている時には、溝幅Wと音叉腕幅Wとの比(W/W)が0.35より大きく、且つ、1より小さくなるように形成された溝の長さである。更に、前記音叉腕に設けられた溝が、音叉基部にまで延在し、音叉基部に延在した溝の間にさらに溝が設けられている時には、溝の長さlを含む長さがlである。しかし、音叉腕の溝が音叉基部に延在しているが、その溝の間にさらに溝が設けられていない時には、長さlは音叉腕の溝の長さである。Further, in this embodiment, in the tuning fork base portion 40 is 5, is the entire lower portion of the length l 2 of the transducer 10, also tuning fork arms 20 and tuning fork arms 26, in FIG. 5, the vibrator 10 there is a whole upper portion from the portion of the length l 2. In this embodiment, the tuning fork fork has a rectangular shape. However, the present invention is not limited to the shape described above, and the tuning fork fork may have a U-shape. In this case, as in the rectangular shape, the dimensional relationship between the tuning fork arm and the tuning fork base is the same as that described above. Further, in this embodiment, the groove is provided in the tuning fork arm and the tuning fork base, but the present invention is not limited to this, and the groove may be provided only in the tuning fork arm, and the same effect can be obtained. . In this case, the groove length l 3 = 0. Further, the length l 1 of the groove in the present invention, when the grooves only in the tuning fork arms are provided, the ratio of the groove width W 2 and the tuning fork arm width W (W 2 / W) is than 0.35 The length of the groove formed to be larger and smaller than 1. Further, when the groove provided in the tuning fork arm extends to the tuning fork base, and a groove is further provided between the grooves extending to the tuning fork base, the length including the groove length l 3 is set. l 1 . However, when the tuning fork arm groove extends to the tuning fork base, but no further groove is provided between the grooves, the length l 1 is the length of the tuning fork arm groove.

換言するならば、音叉形状の音叉腕の中立線を挟んだ、即ち、中立線を含む音叉腕の上下面に各々少なくとも1個の溝が長さ方向に設けられ、前記溝の両側面に電極が配置され、前記溝側面の電極とその電極に対抗する音叉腕側面の電極とが互いに異極となるように構成されていて、音叉腕に生ずる慣性モーメントが大きくなるように前記各々少なくとも1個の溝の内少なくとも1個の溝幅Wと音叉腕幅Wとの比(W/W)が0.35より大きく、1より小さく、且つ、前記溝の厚みtと音叉腕の厚みtとの比(t/t)が0.79より小さくなるように溝が形成されている。In other words, at least one groove is provided in the length direction on the upper and lower surfaces of the tuning fork arm that includes the neutral line, ie, the tuning fork arm including the neutral line, and electrodes are formed on both sides of the groove. Are arranged such that the electrode on the side surface of the groove and the electrode on the side surface of the tuning fork arm that opposes the electrode are different from each other, and each of the at least one of the at least one so as to increase the moment of inertia generated in the tuning fork arm. The ratio (W 2 / W) of the groove width W 2 of at least one of the grooves to the tuning fork arm width W is larger than 0.35 and smaller than 1, and the thickness t 1 of the groove and the thickness of the tuning fork arm The groove is formed so that the ratio (t 1 / t) to t is smaller than 0.79.

更に、本実施例の音叉腕の間隔はWで与えられ、間隔Wと溝幅WはW≧Wを満足するように構成され、間隔Wは0.05mm〜0.35mmで、溝幅Wは0.03mm〜0.12mmの値を有する。このように構成する理由は超小型の屈曲水晶振動子で、かつ、音叉形状と音叉腕の溝をフオトリソグラフィ技術を用いて別々(別々の工程)に形成でき、更に、基本波モード振動の周波数安定性が高調波モード振動の周波数安定性より高くすることができる。この場合、厚みtは通常0.05mm〜0.15mmの水晶ウエハが用いられる。しかし、本発明は本実施例に限定されるものでなく、0.15mmより厚い水晶ウエハを使用してもよい。Further, the interval between the tuning fork arms of the present embodiment is given by W 4 , and the interval W 4 and the groove width W 2 are configured to satisfy W 4 ≧ W 2 , and the interval W 4 is 0.05 mm to 0.35 mm. in, the groove width W 2 has a value of 0.03Mm~0.12Mm. The reason for this configuration is an ultra-compact bent quartz crystal unit, and the tuning fork shape and tuning fork arm groove can be formed separately (separate steps) using photolithography technology. The stability can be higher than the frequency stability of the harmonic mode vibration. In this case, a quartz wafer having a thickness t of usually 0.05 mm to 0.15 mm is used. However, the present invention is not limited to this embodiment, and a quartz wafer thicker than 0.15 mm may be used.

更に詳述するならば、音叉形状の屈曲水晶振動子の誘導性と電気機械変換効率と品質とを表すフイガーオブメリットMは屈曲水晶振動子の品質係数Q値と容量比rの比(Q/r)によって定義される。即ち、M=Q/rで与えられる。但し、iは音叉形状の屈曲水晶振動子の振動次数を表し、i=1のとき基本波モード振動、i=2のとき2次高調波モード振動、i=3のとき3次高調波モード振動である。また、音叉形状の屈曲水晶振動子の並列容量に依存しない機械的直列共振周波数fと並列容量に依存する直列共振周波数fの周波数差ΔfはフイガーオブメリットMに反比例し、その値Mが大きい程Δfは小さくなる。従って、Mが大きい程、音叉形状の屈曲水晶振動子の共振周波数は並列容量の影響を受けないので、屈曲水晶振動子の周波数安定性は良くなる。即ち、時間精度の高い音叉形状の屈曲水晶振動子が得られる。More specifically, the Figer of Merit M i representing the inductivity, electromechanical conversion efficiency, and quality of a tuning-fork-shaped bent quartz crystal is expressed by the quality factor Q i value of the bent quartz crystal and the capacitance ratio r i . It is defined by the ratio (Q i / r i ). That is, M i = Q i / r i is given. However, i represents the vibration order of a tuning-fork-shaped bent quartz crystal. When i = 1, fundamental mode vibration, when i = 2, second harmonic mode vibration, when i = 3, third harmonic mode vibration. It is. Also, the frequency difference Δf of the series resonance frequency f r which depends on the parallel capacitance and mechanical series resonance frequency f 8 that is independent of the parallel capacitance of the flexural quartz crystal tuning fork is inversely proportional to the off Iga of merit M i, the value As M i increases, Δf decreases. Therefore, as M i is large, the resonance frequency of the bending quartz crystal tuning fork is not affected by the parallel capacitance, the frequency stability of a flexural quartz crystal resonator is improved. That is, a tuning fork-shaped bent quartz crystal with high time accuracy can be obtained.

さらに詳細には、前記音叉形状と溝と電極とその寸法の構成により、基本波モード振動のフイガーオブメリットMが高調波モード振動のフイガーオブメリットMより大きくなる。即ち、M>Mとなる。但し、nは高調波モード振動の振動次数を表し、n=2、3のとき、2次、3次高調波モード振動のフイガーオブメリットである。一例として、基本波モード振動の周波数が32.768kHzで、W/W=0.5、t/t=0.34、l/l=0.48のとき、製造によるバラツキが生ずるが、音叉形状の屈曲水晶振動子のM、MはそれぞれM>65、M<30となる。即ち、高い誘導性と電気機械変換効率の良い(容量比rと等価直列抵抗Rの小さい)、品質係数の大きい基本波モードで振動する屈曲水晶振動子を得ることができる。その結果、基本波モード振動の周波数安定性が2次高調波モード振動の周波数安定性より良くなると共に、2次高調波モード振動を抑圧することができる。従って、本実施例の屈曲水晶振動子から構成される水晶発振器は基本波モード振動の周波数が出力信号として得られ、かつ、高い周波数安定性(優れた時間精度)を有する。換言するならば、本実施例の水晶発振器はエージングによる周波数変化が極めて小さく成るという著しい効果を有する。また、本発明の基本波モード振動の基準周波数は既に述べたように、10kHz〜200kHzが用いられる。特に、32.768kHzは広く使用され、例えば、その周波数偏差は−100PPM〜+100PPMの範囲内にあるように周波数調整される。More specifically, the configuration of the tuning fork shape, the groove, the electrode, and the dimensions thereof makes the fibre-of-merit M 1 of the fundamental mode vibration larger than the fibre-of-merit M n of the harmonic mode vibration. That is, M 1 > M n . However, n represents the vibration order of the harmonic mode vibration, and when n = 2 and 3, it is the fibre of merit of the second and third harmonic mode vibration. As an example, at the frequency of the fundamental mode oscillation 32.768kHz, when W 2 /W=0.5,t 1 /t=0.34,l 1 /l=0.48, although variations due to manufacturing may occur M 1 and M 2 of the tuning-fork-shaped bent quartz crystal resonator satisfy M 1 > 65 and M 2 <30, respectively. That is, it is possible to obtain a bent quartz crystal resonator that vibrates in a fundamental wave mode with high inductivity and good electromechanical conversion efficiency (capacity ratio r 1 and equivalent series resistance R 1 is small) and a large quality factor. As a result, the frequency stability of the fundamental wave mode vibration becomes better than the frequency stability of the second harmonic mode vibration, and the second harmonic mode vibration can be suppressed. Therefore, the crystal oscillator composed of the bent crystal resonator of this embodiment can obtain the frequency of the fundamental mode vibration as an output signal and has high frequency stability (excellent time accuracy). In other words, the crystal oscillator of this embodiment has a remarkable effect that the frequency change due to aging becomes extremely small. Further, as described above, 10 kHz to 200 kHz is used as the reference frequency of the fundamental mode vibration of the present invention. In particular, 32.768 kHz is widely used. For example, the frequency deviation is adjusted so that the frequency deviation is within a range of −100 PPM to +100 PPM.

図6は本発明の第2実施例の水晶発振器に用いられる屈曲モードで振動する音叉形状の水晶振動子45の上面図である。音叉形状の屈曲水晶振動子45は、音叉腕46,47と音叉基部48とを具えて構成されている。即ち、音叉腕46,47の一端部が音叉基部48に接続されている。本実施例では、音叉基部48に切り欠き部53、54が設けられている。又、音叉腕46、47には中立線51、52を挟んで(含む)溝49、50が設けられている。更に、本実施例では溝49、50は音叉腕46、47の一部に設けられていて、溝49、50はそれぞれ幅Wと長さlを有する。更に詳述するならば、溝の面積S=W×lで示し、Sは0.025〜0.12mmの値を有するように構成される。このように溝の面積を構成する理由は化学的エッチング法による溝の形成が容易で、しかも、電気機械変換効率が良くなる溝の形成ができる。と同時に、基本波モード振動の品質係数Q値の高い屈曲モードで振動する音叉形状の水晶振動子が得られる。その結果、出力信号が基本波モード振動の周波数である水晶発振器が実現できる。FIG. 6 is a top view of a tuning-fork-shaped crystal resonator 45 that vibrates in a bending mode used in the crystal oscillator according to the second embodiment of the present invention. The tuning fork-shaped bent quartz crystal unit 45 includes tuning fork arms 46 and 47 and a tuning fork base 48. That is, one end of the tuning fork arms 46 and 47 is connected to the tuning fork base 48. In this embodiment, the tuning fork base 48 is provided with notches 53 and 54. Further, the tuning fork arms 46 and 47 are provided with grooves 49 and 50 with (including) the neutral lines 51 and 52, respectively. Further, the grooves 49 and 50 in this embodiment is provided in a part of the tuning fork arms 46 and 47, the grooves 49 and 50 each have a width W 2 and length l 1. More specifically, the groove area S = W 2 × 11 is shown, and S is configured to have a value of 0.025 to 0.12 mm 2 . The reason for configuring the groove area in this way is that it is easy to form a groove by a chemical etching method, and it is possible to form a groove with improved electromechanical conversion efficiency. At the same time, a tuning fork-shaped crystal resonator that vibrates in a bending mode having a high quality factor Q value of fundamental mode vibration can be obtained. As a result, it is possible to realize a crystal oscillator whose output signal has a frequency of fundamental mode vibration.

上記溝の面積Sでは、溝と音叉腕を別々の工程で加工できる。しかし、音叉腕とそれに設けられた溝を同時に加工するには、音叉腕の厚みtと溝幅Wと音叉腕の間隔Wと面積Sを最適寸法にする必要が有る。即ち、音叉腕の厚みtが0.06mm〜0.15mmのとき、溝幅Wが0.02mm〜0.068mmの範囲内に、更に、面積Sは0.023mm〜0.088mmの範囲内にあり、間隔Wは0.05mm〜0.35mmとなるように構成される。このように構成する理由は水晶の結晶性を利用し、その結晶性から貫通穴でない溝(音叉腕の長さ方向に分割された溝を含む)と音叉形状を同時に形成することができる。また、図6には示されていないが、音叉腕46,47の下面にも溝49,50と対抗する位置に溝が設けられている。In the groove area S, the groove and the tuning fork arm can be processed in separate steps. However, in processing the tuning fork arms and grooves provided in it at the same time, should there be an interval W 4 and the area S of the thickness t and groove width W 2 and the tuning fork arm of the tuning fork arms to the optimum dimensions. In other words, the tuning fork arms of thickness t when 0.06Mm~0.15Mm, within the groove width W 2 is 0.02Mm~0.068Mm, further area S of 0.023mm 2 ~0.088mm 2 in the range, the interval W 4 is configured to be 0.05 mm to 0.35 mm. The reason for such a configuration is that the crystallinity of quartz is used, and from the crystallinity, a groove (including a groove divided in the length direction of the tuning fork arm) and a tuning fork shape can be formed simultaneously. Although not shown in FIG. 6, grooves are also provided on the lower surfaces of the tuning fork arms 46 and 47 at positions facing the grooves 49 and 50.

更に、音叉基部48に設けられた切り欠き部53、54の音叉部側の幅寸法はWで与えられ、切り欠き部53、54の端部側の寸法はWで与えられる。そして、音叉基部48の端部側で表面実装型のケースや円筒型のケースに半田や接着剤によって固定されるとき、振動子の振動エネルギーの損失を小さくするには、W≧Wを満たす必要がある。また、切り欠き部53、54も振動子の固定による振動部のエネルギー損失を小さくすることができる。図6で示されている音叉腕の腕幅W、部分幅W、W、溝幅Wと間隔W及び溝の長さlと音叉振動子の全長lとの関係は図5で述べられているので、ここでは省略する。Furthermore, the width of the tuning fork portion of the cutout portions 53 and 54 provided in the fork base 48 is given by W 5, the dimensions of the end of the cutout portions 53 and 54 is given by W 6. In order to reduce the vibration energy loss of the vibrator when it is fixed to the surface mount type case or the cylindrical type case on the end side of the tuning fork base 48 with solder or adhesive, W 6 ≧ W 5 is set. It is necessary to satisfy. Further, the notches 53 and 54 can also reduce the energy loss of the vibration part due to the fixation of the vibrator. The relationship between the arm width W, the partial widths W 1 and W 3 , the groove width W 2 , the interval W 4, the groove length 11 and the overall length 1 of the tuning fork vibrator shown in FIG. Is omitted here.

図7は本発明の第3実施例の水晶発振器に用いられる水晶ユニットの断面図である。水晶ユニット170は音叉形状の屈曲水晶振動子70、ケース71と蓋72を具えて構成されている。更に詳述するならば、振動子70はケース71に設けられた固定部74に導電性接着剤76や半田によって固定される。又、ケース71と蓋72は接合部材73を介して接合される。本実施例では、振動子70は図3と図6で詳細に述べられた音叉形状の屈曲水晶振動子10、45の内の一個と同じ振動子である。又、本実施例の水晶発振器では回路素子は水晶ユニットの外側に接続される。即ち、音叉形状の屈曲水晶振動子のみがユニット内に収納されている。この時、屈曲水晶振動子は真空中のユニット内に収納されている。本実施例では、表面実装型の水晶ユニットを示したが、円筒型のユニットに屈曲水晶振動子を収納しても良い。即ち、円筒型の水晶ユニットが得られる。  FIG. 7 is a cross-sectional view of a crystal unit used in the crystal oscillator of the third embodiment of the present invention. The crystal unit 170 includes a tuning fork-shaped bent crystal resonator 70, a case 71, and a lid 72. More specifically, the vibrator 70 is fixed to a fixing portion 74 provided on the case 71 with a conductive adhesive 76 or solder. The case 71 and the lid 72 are joined via a joining member 73. In this embodiment, the vibrator 70 is the same vibrator as one of the tuning-fork-shaped bent quartz crystal vibrators 10 and 45 described in detail in FIGS. 3 and 6. In the crystal oscillator of this embodiment, the circuit element is connected to the outside of the crystal unit. That is, only a tuning fork-shaped bent quartz crystal is housed in the unit. At this time, the bent crystal resonator is housed in a vacuum unit. In this embodiment, a surface-mounted crystal unit is shown, but a bent crystal unit may be housed in a cylindrical unit. That is, a cylindrical crystal unit is obtained.

更に、ケースの部材はセラミックスかガラス、蓋の部材は金属かガラス、そして、接合部材は金属か低融点ガラスでできている。又、本実施例で述べられた振動子とケースと蓋との関係は以下に述べられる図8の水晶発振器にも適用される。  Further, the case member is made of ceramic or glass, the lid member is made of metal or glass, and the joining member is made of metal or low-melting glass. Further, the relationship between the vibrator, the case, and the lid described in this embodiment is also applied to the crystal oscillator of FIG. 8 described below.

図8は本発明の第4実施例の水晶発振器の断面図を示す。水晶発振器190は水晶発振回路とケース91と蓋92とを具えて構成されている。本実施例では、水晶発振回路はケース91と蓋92から成る水晶ユニット内に収納されている。又、水晶発振回路は音叉形状の屈曲水晶振動子90と帰還抵抗を含む増幅器98とコンデンサー(図示されていない)とドレイン抵抗(図示されていない)とを具えて構成されていて、増幅器98はCMOSインバータが用いられる。  FIG. 8 is a sectional view of a crystal oscillator according to a fourth embodiment of the present invention. The crystal oscillator 190 includes a crystal oscillation circuit, a case 91, and a lid 92. In this embodiment, the crystal oscillation circuit is housed in a crystal unit composed of a case 91 and a lid 92. The crystal oscillation circuit includes a tuning fork-shaped bent crystal resonator 90, an amplifier 98 including a feedback resistor, a capacitor (not shown), and a drain resistor (not shown). A CMOS inverter is used.

更に、本実施例では、振動子90はケース91に設けられた固定部94に接着剤96や半田によって固定される。これに対して、増幅器98はケース91に固定されている。また、ケース91と蓋92は接合部材93を介して接合されている。本実施例の振動子90は図3と図6で詳細に述べられた音叉形状の屈曲水晶振動子10、45の中の振動子が用いられる。  Further, in this embodiment, the vibrator 90 is fixed to a fixing portion 94 provided in the case 91 by an adhesive 96 or solder. On the other hand, the amplifier 98 is fixed to the case 91. Further, the case 91 and the lid 92 are joined via a joining member 93. As the vibrator 90 of this embodiment, the vibrator in the tuning fork-shaped bent quartz crystal vibrators 10 and 45 described in detail in FIGS. 3 and 6 is used.

次に、本発明の水晶発振器の製造方法について述べる。上記音叉形状の屈曲水晶振動子は半導体の技術を用いたフオトリソグラフィ法と化学的エッチング法によって形成される。まず、研磨加工あるいはポリッシュ加工された水晶ウエハの上下面に金属膜(例えば、クロムそしてその上に金)をスパッタリング法又は蒸着法により形成する。次に、その金属膜の上にレジストが塗布される。そして、フオトリソ工程により、それらレジストと金属膜が音叉形状を残して除去された後、化学的エッチング法により、音叉腕と音叉基部を具えた音叉形状が形成される。この音叉形状を形成するときに、音叉基部に切り欠き部を形成しても良い。更に、音叉形状の面上に前記工程で示した金属膜とレジストが塗布され、フオトリソ工程と化学的エッチング法により、音叉腕又は音叉腕と音叉基部に溝が形成される。  Next, a method for manufacturing the crystal oscillator of the present invention will be described. The tuning fork-shaped bent quartz crystal resonator is formed by a photolithography method using a semiconductor technique and a chemical etching method. First, metal films (for example, chromium and gold thereon) are formed on the upper and lower surfaces of a polished or polished quartz crystal wafer by sputtering or vapor deposition. Next, a resist is applied on the metal film. Then, after the resist and the metal film are removed while leaving the tuning fork shape by a photolitho process, a tuning fork shape including a tuning fork arm and a tuning fork base is formed by a chemical etching method. When forming this tuning fork shape, a notch may be formed in the tuning fork base. Further, the metal film and resist shown in the above process are applied on the tuning fork-shaped surface, and grooves are formed in the tuning fork arm or the tuning fork arm and the tuning fork base by a photolitho process and a chemical etching method.

次に、溝を有する音叉形状に金属膜とレジストが再び塗布されて、フオトリソ工程により、電極が形成される。即ち、音叉腕の側面の電極と溝の側面の電極は極性が異なるように対抗して配置される。さらに詳述するならば、第1の音叉腕の側面電極と第2の音叉腕の溝の電極は同極に、第1の音叉腕の溝の電極と第2の音叉腕の側面電極は同極に構成され、第1の音叉腕の溝の電極と側面電極は極性が異なるように構成される。即ち。2電極端子が振動子に形成される。その結果、2電極端子に交番電圧を印加する事により、音叉腕は逆相で屈曲振動する。本実施例では、音叉形状の形成の後に溝を音叉腕又は音叉腕と音叉基部に形成しているが、本発明は前記実施例に限定されるものではなくて、まず、溝を形成してから音叉形状を形成してもよい。又は、音叉形状と溝を同時に形成しても良い。更に、この工程での溝の寸法等については前記した寸法と同じであり既に述べられているので、ここでは省略する。  Next, a metal film and a resist are again applied to the tuning fork shape having a groove, and an electrode is formed by a photolitho process. That is, the electrode on the side surface of the tuning fork arm and the electrode on the side surface of the groove are arranged to oppose each other so as to have different polarities. More specifically, the side electrode of the first tuning fork arm and the electrode of the groove of the second tuning fork arm have the same polarity, and the electrode of the groove of the first tuning fork arm and the side electrode of the second tuning fork arm have the same polarity. The electrode of the groove | channel of a 1st tuning fork arm and a side electrode are comprised so that polarity may differ. That is. Two electrode terminals are formed on the vibrator. As a result, by applying an alternating voltage to the two electrode terminals, the tuning fork arm bends and vibrates in reverse phase. In this embodiment, the groove is formed in the tuning fork arm or the tuning fork arm and the tuning fork base after the tuning fork shape is formed. However, the present invention is not limited to the above embodiment, and the groove is first formed. A tuning fork shape may be formed. Or you may form a tuning fork shape and a groove | channel simultaneously. Further, the dimensions and the like of the grooves in this step are the same as those described above and have already been described, and therefore are omitted here.

この実施例の工程により、水晶ウエハには多数個の音叉形状の屈曲水晶振動子が形成されている。それ故、次の工程では、このウエハの状態で、最初の周波数調整がレーザ又はプラズマエッチング又は蒸着にて行われる。と共に、不良振動子はマーキングされるかウエハから取り除かれる。また、本工程では10kHz〜200kHzの基準周波数に対して、周波数偏差は−9000PPM〜+5000PPMの範囲内にあるように周波数調整がなされる。更に、次の工程では、形成された振動子は表面実装型のケース、あるいは蓋又は円筒型のケースのリード線に接着材あるいは半田等で固定される。その固定後に、第2回目の周波数調整がレーザ又はプラズマエッチング又は蒸着にて行われる。本工程では、周波数偏差は−100PPM〜+100PPMの範囲内にあるように周波数調整がなされる。又、本発明での固定後に周波数調整が行われるということは、固定後すぐに周波数調整しても良いし、あるいは固定後にケースと蓋を接続した後に周波数調整をしても良い。即ち、固定後にいかなる工程を入れても、その後に周波数調整をすれば良く、本発明はこれらを全て包含するものである。又、ケースと蓋を接続した後の周波数調整はガラスを介してレーザで行われる。  By the process of this embodiment, a large number of tuning fork-shaped bent quartz resonators are formed on the quartz wafer. Therefore, in the next step, the initial frequency adjustment is performed by laser or plasma etching or vapor deposition in this wafer state. At the same time, the defective vibrator is marked or removed from the wafer. In this step, the frequency is adjusted so that the frequency deviation is within the range of −9000 PPM to +5000 PPM with respect to the reference frequency of 10 kHz to 200 kHz. Further, in the next step, the formed vibrator is fixed to a lead wire of a surface mount type case, a lid or a cylindrical case with an adhesive or solder. After the fixing, the second frequency adjustment is performed by laser, plasma etching or vapor deposition. In this step, the frequency is adjusted so that the frequency deviation is within the range of −100 PPM to +100 PPM. The fact that the frequency adjustment is performed after fixing in the present invention may be performed immediately after fixing, or may be performed after connecting the case and the lid after fixing. That is, whatever process is performed after fixing, the frequency may be adjusted after that, and the present invention encompasses all of these. The frequency adjustment after the case and the lid are connected is performed with a laser through glass.

尚、第3回目の周波数調整がなされるときには、前記2回目の周波数調整による周波数偏差は−950PPM〜+950PPMの範囲内にあるように周波数調整がなされる。又、上記実施例では、前記ウエハの状態で、最初の周波数調整を行い、それと共に、不良振動子はマーキングされるかウエハから取り除かれているが、本発明はこれに限定されるものでなく、本発明は水晶ウエハにできた多数個の音叉形状の屈曲水晶振動子をウエハの状態で検査し、良振動子か不良振動子かを検査する工程を含めば良い。即ち、不良振動子はマーキングされるか、ウエハから取り除かれるか、コンピュタに記憶される。このような工程を含むことにより、不良振動子を早く見つけることができ、次工程に流れないので、歩留まりを上げることができる。その結果、安価な屈曲水晶振動子を得る事ができる。  When the third frequency adjustment is performed, the frequency adjustment is performed so that the frequency deviation due to the second frequency adjustment is in the range of −950 PPM to +950 PPM. In the above embodiment, the first frequency adjustment is performed in the state of the wafer, and at the same time, the defective vibrator is marked or removed from the wafer. However, the present invention is not limited to this. The present invention may include a step of inspecting a large number of tuning-fork-shaped bent quartz crystal resonators formed on a quartz wafer in the state of the wafer and inspecting whether the resonator is a good resonator or a defective resonator. That is, the defective vibrator is marked, removed from the wafer, or stored in a computer. By including such a process, a defective vibrator can be found quickly, and since it does not flow to the next process, the yield can be increased. As a result, an inexpensive bent quartz resonator can be obtained.

更に、周波数調整後に、前記振動子はケースと蓋となるユニットに真空中で収納され、水晶ユニットが得られる。蓋がガラスで構成されているときには、収納後、第3回目の周波数調整がレーザにて行われる。本工程では、周波数偏差は−50PPM〜+50PPMの範囲内にあるように周波数調整がなされる。本実施例では、周波数調整は3回の別々の工程で行われるが、少なくとも2回の別々の工程で行えば良い。例えば、第3回目の工程の周波数調整はしなくても良い。更に次の工程では、前記した振動子の2電極端子が増幅器とコンデンサーと抵抗素子に電気的に接続される。換言するならば、増幅回路はCMOSインバータと帰還抵抗素子とを具えて構成され、帰還回路は音叉形状の屈曲水晶振動子とドレイン抵抗素子とゲート側のコンデンサーとドレイン側のコンデンサーとを具えて構成されるように電気的に接続される。又、前記第3回目の周波数調整は水晶発振回路を構成後に行っても良い。  Furthermore, after adjusting the frequency, the vibrator is housed in a unit serving as a case and a lid in a vacuum to obtain a crystal unit. When the lid is made of glass, the third frequency adjustment is performed with a laser after storage. In this step, the frequency is adjusted so that the frequency deviation is within the range of −50 PPM to +50 PPM. In this embodiment, the frequency adjustment is performed in three separate steps, but may be performed in at least two separate steps. For example, the frequency adjustment in the third process may not be performed. Further, in the next step, the two electrode terminals of the vibrator are electrically connected to the amplifier, the capacitor, and the resistance element. In other words, the amplifier circuit includes a CMOS inverter and a feedback resistor element, and the feedback circuit includes a tuning fork-shaped bent crystal resonator, a drain resistor element, a gate-side capacitor, and a drain-side capacitor. Electrically connected. The third frequency adjustment may be performed after the crystal oscillation circuit is configured.

以上、図示例に基づき説明したが、この発明は上述の例に限定されるものではなく、上記第1実施例から第4実施例の水晶発振器に用いられる音叉形状の屈曲水晶振動子では、音叉腕又は音叉腕と音叉基部に溝を設けているが、例えば、音叉腕に貫通穴(t=0)を設けてもよい。即ち、貫通穴は溝の特別の場合で、本発明の溝は前記貫通穴をも包含するものである。又、上記実施例では、音叉腕は2本で構成されているが、本発明は3本以上の音叉腕を包含するものである。この場合、少なくとも2本の音叉腕が逆相で振動するように電極が構成されていれば良い。Although the present invention has been described based on the illustrated example, the present invention is not limited to the above-described example. In the tuning-fork-shaped bent crystal resonator used in the crystal oscillators of the first to fourth embodiments, the tuning fork Although the groove is provided in the arm or the tuning fork arm and the tuning fork base, for example, a through hole (t 1 = 0) may be provided in the tuning fork arm. That is, the through hole is a special case of a groove, and the groove of the present invention includes the through hole. In the above embodiment, the tuning fork arm is composed of two, but the present invention includes three or more tuning fork arms. In this case, the electrodes may be configured so that at least two tuning fork arms vibrate in opposite phases.

更に、本実施例では、溝が中立線を挟む(含む)ように音叉腕に設けられているが、本発明はこれに限定されるものでなく、中立線を残して、その両側に溝を形成しても良い。この場合、音叉腕の中立線を含めた部分幅Wは0.05mmより小さくなるように構成される。又、各々の溝の幅は0.04mmより小さくなるように構成され、溝の厚みtと音叉腕の厚みtの比は0.79以下に成るように構成される。このような構成により、MをMより大きくする事ができる。Further, in this embodiment, the groove is provided on the tuning fork arm so as to sandwich (include) the neutral line, but the present invention is not limited to this, and the groove is formed on both sides of the neutral line. It may be formed. In this case, partial width W 7 including the neutral line of the tuning fork arms are configured to be less than 0.05 mm. Further, the width of each groove is configured to be smaller than 0.04 mm, and the ratio of the thickness t 1 of the groove to the thickness t of the tuning fork arm is configured to be 0.79 or less. With such a configuration, M 1 can be made larger than M n .

更に、第1実施例〜第4実施例の水晶発振器とそれに用いられる音叉形状の屈曲水晶振動子について述べてきたが、これらの実施例の水晶発振器に用いられる水晶振動子はケースと蓋とから構成される、いわゆるユニット内に収納され、水晶ユニットを構成する。即ち、ケース又は蓋に設けられた固定部に導電性接着剤又は半田等によって固定部に本実施例の振動子は固定され、さらに、ケースと蓋とは接合部材を介して接合されていて、ケース内は真空になるように構成されている。このように構成することにより、等価直列抵抗Rの小さい、超小型の水晶ユニットを実現することができる。Furthermore, the crystal oscillators of the first to fourth embodiments and the tuning-fork-shaped bent crystal resonators used in the crystal oscillators have been described. The crystal resonators used in the crystal oscillators of these embodiments include a case and a lid. The crystal unit is configured by being housed in a so-called unit. That is, the vibrator of the present embodiment is fixed to the fixing portion by a conductive adhesive or solder or the like on the fixing portion provided on the case or the lid, and the case and the lid are bonded via the bonding member, The case is configured to be a vacuum. With this configuration, a small equivalent series resistance R 1, it is possible to realize a subminiature quartz crystal unit.

更に、第1実施例〜第4実施例の水晶発振器に用いられる音叉形状の屈曲水晶振動子の基本波モード振動での容量比rは2次高調波モード振動の容量比rより小さくなるように構成されている。このような構成により、同じ負荷容量Cの変化に対して、基本波モードで振動する屈曲水晶振動子の周波数変化が2次高調波モードで振動する屈曲水晶振動子の周波数変化より大きくなる。即ち、基本波モード振動の方が2次高調波モード振動より周波数の可変範囲を広くとることができる。さらに詳細には、負荷容量C=18pF付近では、そのC値が1pF変わると、基本波モード振動の周波数変化は2次高調波モード振動の周波数変化より大きくなる。それ故、基本波モード振動では、負荷容量Cの可変量が小さくても、周波数の可変範囲を広くできるという著しい効果を有する。これにより、コンデンサーの可変容量の範囲を小さくできるので、用いるコンデンサーの数を少なくできる。その結果、安価な水晶発振器が得られる。Furthermore, smaller than the capacity ratio r 1 is the capacitance ratio r 2 of the second harmonic mode vibration of the fundamental wave mode oscillation in the flexural quartz crystal tuning fork for use in the crystal oscillator of the first to fourth embodiments It is configured as follows. With such a configuration, with respect to the same change in the load capacitance C L, greater than the frequency change of the bending quartz oscillator frequency change of the bending quartz oscillator which oscillates at the fundamental mode oscillates at the second harmonic mode. That is, the fundamental mode vibration can take a wider frequency variable range than the second harmonic mode vibration. More particularly, in the vicinity of the load capacitance C L = 18 pF, when the C L value changes 1 pF, the frequency change in the fundamental mode oscillation is greater than the frequency variation of the second harmonic mode vibration. Therefore, the fundamental mode vibration has significant effect even with a small variable amount of load capacitance C L, it can widen the variable range of frequency. Thereby, since the range of the variable capacitance of the capacitor can be reduced, the number of capacitors to be used can be reduced. As a result, an inexpensive crystal oscillator can be obtained.

また、音叉形状の屈曲水晶振動子の容量比r、rはそれぞれr=C/C、r=C/Cで与えられる。但し、Cは等価回路の並列容量で、CとCは等価回路の基本波モード振動と2次高調波モード振動の等価容量である。更に、音叉形状の屈曲水晶振動子の基本波モード振動と2次高調波モード振動の品質係数はQ値とQ値で与えられる。そして、前記実施例の音叉形状の屈曲水晶振動子は、基本波モードで振動する共振周波数の並列容量による依存性が2次高調波モードで振動する共振周波数の並列容量による依存性より小さく成るように構成される。即ち、r/2Q 2</2Q を満たすように構成されている。このような構成により、基本波モードで振動する共振周波数の並列容量による影響が無視できるほど極めて小さくなるので、高い周波数安定性を有する基本波モードで振動する屈曲水晶振動が得られる。又、本発明では、r/2Q とr/2Q をそれぞれSとSと置き、SとSをそれぞれ基本波モード振動と2次高調波モード振動の周波数安定係数と呼ぶ。即ち、S=r/2Q とS=r/2Q で与えられる。The capacitance ratios r 1 and r 2 of the tuning fork-shaped bent quartz crystal resonator are given by r 1 = C 0 / C 1 and r 2 = C 0 / C 2 , respectively. However, C 0 is the parallel capacity of the equivalent circuit, and C 1 and C 2 are the equivalent capacity of the fundamental mode vibration and the second harmonic mode vibration of the equivalent circuit. Further, the quality factor of the fundamental mode vibration and the second harmonic mode vibration of the tuning fork-shaped bent quartz crystal resonator is given by Q 1 value and Q 2 value. In the tuning fork-shaped bent quartz resonator of the above embodiment, the dependency of the resonance frequency oscillating in the fundamental wave mode due to the parallel capacitance is smaller than the dependency of the resonance frequency oscillating in the second harmonic mode due to the parallel capacitance. Configured. That is, it is configured to satisfy r 1 / 2Q 1 2 < r 2 / 2Q 2 2 . With such a configuration, the influence of the parallel capacitance of the resonance frequency oscillating in the fundamental wave mode is so small that it can be ignored, so that a bent crystal oscillation oscillating in the fundamental wave mode having high frequency stability can be obtained. Further, in the present invention, r 1 / 2Q 1 2 and r 2 / 2Q 2 2 are respectively set as S 1 and S 2 , and S 1 and S 2 are respectively frequency-stable for fundamental mode vibration and second harmonic mode vibration. Called coefficient. That is, S 1 = r 1 / 2Q 1 2 and S 2 = r 2 / 2Q 2 2 are given.

更に、本実施例の屈曲水晶振動子の音叉形状と溝は化学的、物理的と機械的方法の内の少なくとも一つの方法を用いて加工される。物理的方法では、例えば、イオン化した原子、分子を飛散させて加工するものである。又、機械的方法では、例えば、ブラスト加工用の粒子を飛散させて加工するものである。前例では、加工に粒子を用いるので、本発明では、これを粒子法による加工と言う。  Further, the tuning fork shape and the groove of the bent quartz crystal resonator of this embodiment are processed using at least one of chemical, physical and mechanical methods. In the physical method, for example, ionized atoms and molecules are scattered and processed. In the mechanical method, for example, particles for blasting are scattered and processed. In the previous example, since particles are used for processing, in the present invention, this is called processing by a particle method.

以上述べたように、本発明の水晶発振器とその製造方法を提供する事により多くの効果が得られることを既に述べたが、その中でも特に、次の如き著しい効果が得られる。
(1)音叉形状の屈曲水晶振動子の基本波モード振動のフイガーオブメリットMが高調波モード振動のフイガーオブメリットMより大きい振動子を具えて水晶発振器は構成され、更に、増幅回路の基本波モード振動の負性抵抗の絶対値|−RL|と基本波モード振動の等価直列抵抗Rとの比が増幅回路の高調波モード振動の負性抵抗の絶対値|−RL|と高調波モード振動の等価直列抵抗Rとの比より大きくなるように水晶発振器は構成されているので、音叉形状の屈曲水晶振動子を具えて構成された水晶発振器の出力信号が基本波モード振動の周波数で、消費電流の少ない、かつ、高い周波数安定性を有する水晶発振器が得られる。
(2)更に、増幅回路の基本波モード振動の増幅率αと高調波モード振動の増幅率αとの比が帰還回路の高調波モード振動の帰還率βと基本波モード振動の帰還率βとの比より大きく、かつ、基本波モード振動の増幅率αと基本波モード振動の帰還率βの積が1より大きくなるように水晶発振器は構成されているので、負荷容量が小さくても、水晶発振器の出力信号は、基本波モード振動の周波数が出力信号として得られると共に、消費電流の少ない、高い時間精度を有する水晶発振器が実現できる。
(3)音叉形状と溝をフォトリソグラフィ法と化学的エッチング法によって形成でき、量産性に優れ、更に1枚の水晶ウエハ上に多数個の振動子を一度にバッチ処理にて形成できるので、安価な水晶振動子が得られる。と同時に、それを具えた安価な水晶ユニットと水晶発振器が実現できる。
(4)基本波モード振動のフイガーオブメリットMが高調波モード振動のフイガーオブメリットMより大きい振動子を具えて水晶発振器は構成されるので、出力信号が基本波モード振動の周波数が得られると共に、高い周波数安定性を有する水晶発振器が実現できる。即ち、高い時間精度を有する水晶発振器が実現できる。
As described above, it has already been described that many effects can be obtained by providing the crystal oscillator of the present invention and the manufacturing method thereof, and among them, the following remarkable effects can be obtained.
(1) crystal oscillator off Iga of merit M 1 of the fundamental wave mode vibrations comprises a full Iga of merit M n greater than oscillator harmonic mode oscillation in the flexural quartz crystal tuning fork is configured, furthermore, amplification The absolute value of the negative resistance of the fundamental mode vibration of the circuit | −RL 1 | and the equivalent series resistance R 1 of the fundamental mode vibration of the circuit is the absolute value of the negative resistance of the harmonic mode vibration of the amplifier circuit | −RL. Since the crystal oscillator is configured to be larger than the ratio between n | and the equivalent series resistance R n of the harmonic mode vibration, the output signal of the crystal oscillator configured with a tuning-fork-shaped bent crystal resonator is fundamental. A crystal oscillator with low current consumption and high frequency stability at the frequency of wave mode vibration can be obtained.
(2) Furthermore, the ratio of the amplification factor α 1 of the fundamental mode vibration of the amplifier circuit and the amplification factor α n of the harmonic mode vibration is the feedback of the feedback factor β n of the harmonic mode vibration of the feedback circuit and the fundamental mode vibration. greater than the ratio of the rate beta 1, and, since the crystal oscillator is constructed as the product of the feedback factor beta 1 amplification factor alpha 1 and the fundamental mode vibration of the fundamental wave mode vibration is greater than 1, the load capacitance Even if the frequency is small, the output signal of the crystal oscillator can obtain the frequency of the fundamental mode oscillation as the output signal, and a crystal oscillator with low current consumption and high time accuracy can be realized.
(3) Tuning fork shape and groove can be formed by photolithography method and chemical etching method, which is excellent in mass productivity, and furthermore, since many vibrators can be formed on one crystal wafer at a time by batch processing, it is inexpensive. Crystal unit can be obtained. At the same time, an inexpensive crystal unit and crystal oscillator with it can be realized.
(4) Since the full Iga of merit M 1 of the fundamental wave mode vibration crystal oscillator comprises a full Iga of merit M n greater than oscillator harmonic mode vibration is configured, the output signal of the fundamental mode vibration frequencies And a crystal oscillator having high frequency stability can be realized. That is, a crystal oscillator having high time accuracy can be realized.

本発明の音叉形状の屈曲水晶振動子は小型化しても、等価直列抵抗Rが小さく、かつ、容量比が小さくなる。それ故、その音叉形状の屈曲水晶振動子を搭載した水晶発振器は超小型で、高い周波数安定性を有するので、特に高い信頼性を必要とする情報通信機器等の電子機器に適用できる。It is bent crystal oscillator miniaturization of the tuning fork shape of the present invention, the equivalent series resistance R 1 decreases, and the capacity ratio decreases. Therefore, the crystal oscillator equipped with the tuning-fork-shaped bent crystal resonator is ultra-compact and has high frequency stability, and thus can be applied to electronic devices such as information communication devices that require particularly high reliability.

本発明の水晶発振器を構成する水晶発振回路図の一実施例である。It is one Example of the crystal oscillation circuit diagram which comprises the crystal oscillator of this invention. 図1の帰還回路図を示す。The feedback circuit diagram of FIG. 1 is shown. 本発明の第1実施例の水晶発振器に用いられる屈曲モードで振動する音叉形状の水晶振動子の外観図とその座標系を示す。FIG. 2 shows an external view of a tuning-fork-shaped crystal resonator that vibrates in a bending mode used in the crystal oscillator according to the first embodiment of the present invention and its coordinate system. 図3の音叉形状の屈曲水晶振動子の音叉基部のD−D′断面図を示す。FIG. 4 shows a DD ′ cross-sectional view of the tuning fork base of the tuning fork-shaped bent crystal resonator of FIG. 3. 図3の音叉形状の屈曲水晶振動子の上面図を示す。FIG. 4 is a top view of the tuning fork-shaped bent quartz crystal resonator of FIG. 3. 本発明の第2実施例の水晶発振器に用いられる屈曲モードで振動する音叉形状の水晶振動子の上面図である。FIG. 6 is a top view of a tuning-fork-shaped crystal resonator that vibrates in a bending mode used in a crystal oscillator according to a second embodiment of the present invention. 本発明の第3実施例の水晶発振器に用いられる水晶ユニットの断面図である。It is sectional drawing of the crystal unit used for the crystal oscillator of 3rd Example of this invention. 本発明の第4実施例の水晶発振器の断面図を示す。Sectional drawing of the crystal oscillator of 4th Example of this invention is shown. 従来の水晶発振器に用いられる音叉形状の屈曲水晶振動子の斜視図とその座標系を示す。A perspective view and a coordinate system of a tuning fork-shaped bent quartz crystal used in a conventional crystal oscillator are shown. 図9の音叉形状水晶振動子の音叉腕の断面図である。FIG. 10 is a cross-sectional view of a tuning fork arm of the tuning fork-shaped crystal resonator of FIG. 9.

1 増幅回路
9 帰還回路
入力電圧
出力電圧
溝幅
W 音叉腕の腕幅
,W 音叉腕の部分幅
音叉腕の間隔
音叉腕の中立線を含む部分幅
溝の長さ
音叉基部の長さ
l 音叉形状の屈曲水晶振動子の全長
t 音叉腕又は音叉腕と音叉基部の厚み
溝の厚み
1 amplifying circuit 9 feedback circuit V 1 input voltage V 2 output voltage W 2 groove width W tuning arm width W 1 , W 3 tuning fork arm width W 4 tuning fork arm spacing W 7 tuning fork arm including neutral line Width l Length of 1 groove l 2 Length of tuning fork base l Overall length of a tuning fork-shaped bent crystal resonator t Tuning fork arm or tuning fork arm and tuning fork base thickness t 1 groove thickness

Claims (12)

音叉基部と前記音叉基部に接続された少なくとも第1音叉腕と第2音叉腕とを備えて構成され、屈曲モードで振動する音叉型屈曲水晶振動子の製造方法で、
研磨加工あるいはポリッシュ加工された水晶ウエハの上面と下面の各々に金属膜を形成する工程と、
前記金属膜の上にレジストを塗布する工程と、
前記音叉基部は切り欠き部分と、第1幅Sを備えた第1基部部分と前記第1幅Sより大きい、または等しい第2幅Sを備えた第2基部部分を備え、前記第1音叉腕と前記第2音叉腕の各々の一端部は前記第1基部部分に接続されていて、前記切り欠き部分を前記第1基部部分と前記第2基部部分の間に形成する工程と、
前記音叉基部と前記第1音叉腕と前記第2音叉腕とを備えた音叉形状を形成する工程と、前記第1音叉腕と前記第2音叉腕の各音叉腕に溝を、又は前記第1音叉腕と前記第2音叉腕の各音叉腕と前記音叉基部に溝を形成する工程と、
前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された前記溝の面の上に電極を配置する工程と、
前記第1音叉腕と前記第2音叉腕の各音叉腕の第1側面とその第1側面に対抗する第2側面の各側面に電極を配置する工程と、
前記音叉型屈曲水晶振動子の第1電極端子を形成するために、前記第1音叉腕に形成された溝の面の上に配置された前記電極を、前記第2音叉腕の第1側面と第2側面の各側面に配置された前記電極に接続する工程と、
前記音叉型屈曲水晶振動子の第2電極端子を形成するために、前記第2音叉腕に形成された溝の面の上に配置された前記電極を、前記第1音叉腕の第1側面と第2側面の各側面に配置された前記電極に接続する工程と、を含み、前記音叉型屈曲水晶振動子は基本波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、かつ、2次高調波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、M>MとS<Sの関係が得られるように、前記音叉形状と前記溝と前記電極の寸法を決定する工程を備えていることを特徴とする水晶振動子の製造方法。
A tuning fork-type bending quartz crystal vibrator comprising a tuning fork base and at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, and vibrating in a bending mode.
Forming a metal film on each of an upper surface and a lower surface of a polished or polished quartz wafer;
Applying a resist on the metal film;
Wherein comprising a tuning fork base cutout portion, the second base portion with said first base portion having a first width S 5 greater than the first width S 5, or equal to the second width S 6, the first One end of each of the 1 tuning fork arm and the second tuning fork arm is connected to the first base portion, and the cutout portion is formed between the first base portion and the second base portion;
Forming a tuning fork shape including the tuning fork base, the first tuning fork arm, and the second tuning fork arm; and a groove in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, or the first tuning fork arm. Forming a groove in the tuning fork arm and each tuning fork arm of the second tuning fork arm and the tuning fork base;
Disposing an electrode on the surface of the groove formed in each tuning fork arm of the first tuning fork arm and the second tuning fork arm;
Disposing an electrode on each of the first side surface of each tuning fork arm of the first tuning fork arm and the second tuning fork arm and each side surface of the second side facing the first side surface;
In order to form the first electrode terminal of the tuning fork-type bending crystal resonator, the electrode disposed on the surface of the groove formed in the first tuning fork arm is connected to the first side surface of the second tuning fork arm. Connecting to the electrode disposed on each side of the second side;
In order to form the second electrode terminal of the tuning fork type quartz crystal resonator, the electrode disposed on the surface of the groove formed in the second tuning fork arm is connected to the first side surface of the first tuning fork arm. Connecting to the electrodes disposed on each side surface of the second side surface, the tuning fork-type bending quartz crystal resonator having a fundamental mode vibration Figer of merit M 1 and a frequency stability factor S 1 , and comprises a second full harmonic mode vibration Iga of merit M 2 and the frequency stability factor S 2, M 1> as the relationship M 2 and S 1 <S 2 is obtained, the said tuning fork and the groove A method of manufacturing a crystal resonator, comprising a step of determining a dimension of an electrode.
前記音叉基部と前記第1音叉腕と前記第2音叉腕とを備えた音叉形状は、化学的エッチング加工により形成され、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝は各音叉腕の長さ方向において分割されていて、前記音叉形状と各音叉腕の長さ方向に分割された前記溝は同時に形成されていることを特徴とする請求項1に記載の水晶振動子の製造方法。The tuning fork shape including the tuning fork base, the first tuning fork arm, and the second tuning fork arm is formed by chemical etching, and is formed on each tuning fork arm of the first tuning fork arm and the second tuning fork arm. 2. The quartz crystal according to claim 1, wherein the groove is divided in the length direction of each tuning fork arm, and the shape of the tuning fork and the groove divided in the length direction of each tuning fork arm are formed simultaneously. A method for manufacturing a vibrator. 前記音叉型屈曲水晶振動子の前記基本波モード振動の等価直列抵抗Rが、前記2次高調波モード振動の等価直列抵抗Rより小さくなるように、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝の長さ寸法と前記音叉型屈曲水晶振動子の全長の寸法を決定する工程を備えていることを特徴とする請求項1または請求項2に記載の水晶振動子の製造方法。Equivalent series resistance R 1 of the fundamental mode vibration of the tuning fork type flexural quartz resonator, the second harmonic mode to be less than the equivalent series resistance R 2 of the vibration, the first fork arm and the second tuning fork 3. The crystal according to claim 1, further comprising a step of determining a length dimension of a groove formed in each tuning fork arm of the arm and a total length dimension of the tuning fork-type bent quartz crystal resonator. A method for manufacturing a vibrator. 前記第1音叉腕と前記第2音叉腕の間隔Wが、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝の溝幅Wより大きく、または等しく、間隔Wが0.05mm〜0.35mmの範囲内に、かつ、溝幅Wが0.03mm〜0.12mmの範囲内にあるように、前記第1音叉腕と前記第2音叉腕の各音叉腕と前記溝を形成する工程を備え、かつ、前記第1音叉腕と前記第2音叉腕の各音叉腕を形成する工程と前記溝を形成する工程とは異なる工程であることを特徴とする請求項1〜請求項3のいずれか1項に記載の水晶振動子の製造方法。An interval W 4 between the first tuning fork arm and the second tuning fork arm is greater than or equal to a groove width W 2 of a groove formed in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, and the interval W Each tuning fork of the first tuning fork arm and the second tuning fork arm so that 4 is in the range of 0.05 mm to 0.35 mm and the groove width W 2 is in the range of 0.03 mm to 0.12 mm. A step of forming an arm and the groove, and the step of forming each tuning fork arm of the first tuning fork arm and the second tuning fork arm is different from the step of forming the groove. The manufacturing method of the crystal oscillator of any one of Claims 1-3. 請求項1〜請求項4のいずれか1項に記載の水晶振動子の製造方法と、前記音叉型屈曲水晶振動子の前記2次高調波モード振動のフイガーオブメリットMが30より小さくなるように、前記音叉形状と前記溝と前記電極の寸法を決定する工程と、ケースと蓋を準備する工程と、前記ケースまたは前記蓋の固定部に前記音叉型屈曲水晶振動子を固定する工程と、前記音叉型屈曲水晶振動子の発振周波数を調整する工程と、を備えていることを特徴とする水晶ユニットの製造方法。Smaller than the method of manufacturing the crystal oscillator, the tuning-fork bend the second harmonic mode vibration of full Iga of merit M 2 of crystal oscillator 30 according to any one of claims 1 to 4 The steps of determining the tuning fork shape, the dimensions of the groove and the electrode, the step of preparing a case and a lid, and the step of fixing the tuning fork-type bent quartz crystal to the fixing portion of the case or the lid, And a step of adjusting the oscillation frequency of the tuning-fork type bent quartz resonator. 前記音叉型屈曲水晶振動子は基本波モード振動の基準周波数32.768kHzを備え、前記基準周波数に対して、周波数偏差が−9000PPM〜+5000PPMの範囲内にあるように水晶ウエハ内で周波数を調整する工程と、前記音叉型屈曲水晶振動子は表面実装型のケース、あるいは蓋又は円筒型のケースのリード線に固定され、その固定後に、前記基準周波数に対して、周波数偏差が−100PPM〜+100PPMの範囲内にあるように周波数を調整する工程と、を備えていることを特徴とする請求項5に記載の水晶ユニットの製造方法。The tuning-fork type bending crystal resonator has a fundamental frequency of 32.768 kHz of fundamental mode vibration, and adjusts the frequency within the quartz wafer so that the frequency deviation is within the range of −9000 PPM to +5000 PPM with respect to the reference frequency. And the tuning fork type quartz crystal resonator is fixed to a lead wire of a surface mounting type case, a lid or a cylindrical type case, and after the fixing, a frequency deviation of −100 PPM to +100 PPM with respect to the reference frequency And a step of adjusting the frequency so as to be within the range. 前記第1音叉腕と前記第2音叉腕の各音叉腕に貫通穴を、又は前記音叉基部に貫通穴を形成する工程を備えていることを特徴とする請求項5または請求項6に記載の水晶ユニットの製造方法。7. The method according to claim 5, further comprising a step of forming a through hole in each tuning fork arm of the first tuning fork arm and the second tuning fork arm, or forming a through hole in the tuning fork base. A method for manufacturing a crystal unit. 請求項1〜請求項4のいずれか1項に記載の水晶振動子の製造方法と、あるいは請求項5〜請求項7のいずれか1項に記載の水晶ユニットの製造方法と、増幅器とコンデンサーと抵抗素子とを準備する工程と、前記音叉型屈曲水晶振動子の前記第1電極端子と前記第2電極端子を、前記増幅器と前記コンデンサーと前記抵抗素子に電気的に接続する工程と、を備えていることを特徴とする水晶発振器の製造方法。A method for manufacturing a crystal resonator according to any one of claims 1 to 4, or a method for manufacturing a crystal unit according to any one of claims 5 to 7, an amplifier and a capacitor, Providing a resistance element; and electrically connecting the first electrode terminal and the second electrode terminal of the tuning fork-type bent quartz crystal resonator to the amplifier, the capacitor, and the resistance element. A method of manufacturing a crystal oscillator. 音叉基部と前記音叉基部に接続された少なくとも第1音叉腕と第2音叉腕とを備えて構成され、屈曲モードで振動する音叉形状の音叉型屈曲水晶振動子で、前記音叉基部は切り欠き部分と、第1幅Sを備えた第1基部部分と前記第1幅Sより大きい、または等しい第2幅Sを備えた第2基部部分を備え、前記第1音叉腕と前記第2音叉腕の各々の一端部は前記第1基部部分に接続され、前記切り欠き部分が前記第1基部部分と前記第2基部部分の間に形成され、前記第1音叉腕と前記第2音叉腕の各音叉腕に溝が、又は前記第1音叉腕と前記第2音叉腕の各音叉腕と前記音叉基部に溝が形成され、前記音叉型屈曲水晶振動子の第1電極端子を形成するために、前記第1音叉腕に形成された溝の面の上に配置された電極が、前記第2音叉腕の第1側面と第2側面の各側面に配置された電極に接続され、かつ、前記音叉型屈曲水晶振動子の第2電極端子を形成するために、前記第2音叉腕に形成された溝の面の上に配置された電極が、前記第1音叉腕の第1側面と第2側面の各側面に配置された電極に接続され、前記音叉型屈曲水晶振動子は基本波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、かつ、2次高調波モード振動のフイガーオブメリットMと周波数安定係数Sを備え、M>MとS<Sの関係が得られるように、前記音叉形状と前記溝と前記電極の寸法が決定されていることを特徴とする水晶振動子。A tuning fork-type bending quartz crystal vibrator having a tuning fork shape and comprising a tuning fork base and at least a first tuning fork arm and a second tuning fork arm connected to the tuning fork base, wherein the tuning fork base is notched. When, a second base portion having a first base portion and larger than the first width S 5 having a first width S 5, or equal to the second width S 6, the said first fork arm second One end of each tuning fork arm is connected to the first base portion, the notch portion is formed between the first base portion and the second base portion, and the first tuning fork arm and the second tuning fork arm. A groove is formed in each tuning fork arm, or a groove is formed in each tuning fork arm and tuning fork base of the first tuning fork arm and the second tuning fork arm to form a first electrode terminal of the tuning fork type bending crystal resonator. In addition, an electrode disposed on the surface of the groove formed in the first tuning fork arm is provided with the second tuning fork arm. Formed on the second tuning fork arm to be connected to electrodes disposed on each of the first side surface and the second side surface of the arm and to form a second electrode terminal of the tuning fork-type bending quartz crystal unit An electrode disposed on the surface of the groove is connected to an electrode disposed on each of the first side surface and the second side surface of the first tuning fork arm, and the tuning fork-type bending crystal resonator is configured to perform fundamental mode vibration. Feiger of merit M 1 and frequency stability factor S 1 , and second order harmonic mode vibration of fibre of merit M 2 and frequency stability factor S 2 , M 1 > M 2 and S 1 <S 2 The quartz resonator is characterized in that the tuning fork shape, the groove, and the electrode dimensions are determined so that the following relationship is obtained. 請求項9に記載の水晶振動子とケースと蓋とを備えて水晶ユニットは構成され、前記音叉型屈曲水晶振動子は前記ケースまたは前記蓋の固定部に導電接着剤によって固定されていることを特徴とする水晶ユニット。A crystal unit comprising the crystal resonator according to claim 9, a case, and a lid, wherein the tuning fork-type bent crystal resonator is fixed to a fixing portion of the case or the lid with a conductive adhesive. A featured crystal unit. 前記音叉型屈曲水晶振動子は全長lを有し、前記第1音叉腕と前記第2音叉腕の各音叉腕に形成された溝は、各音叉腕の長さ方向において分割されていて、分割された前記溝の少なくとも1個の溝の長さlが辺比l/l=0.2〜0.78の関係を備えるか、又は、分割された前記溝の長さ方向の加えられた溝の長さlが辺比l/l=0.2〜0.78の関係を備えていることを特徴とする請求項10に記載の水晶ユニット。The tuning fork type bending crystal resonator has a total length l, and grooves formed in the tuning fork arms of the first tuning fork arm and the second tuning fork arm are divided in the length direction of each tuning fork arm. The length l 1 of at least one of the grooves formed has a relationship of side ratio l 1 /l=0.2 to 0.78, or is added in the length direction of the divided grooves 11. The crystal unit according to claim 10, wherein the length l 1 of the groove has a relationship of the side ratio l 1 /l=0.2 to 0.78. 請求項9に記載の水晶振動子と、あるいは請求項10または請求項11に記載の水晶ユニットと、増幅器とコンデンサーと抵抗素子とを備えて水晶発振回路は構成され、前記音叉型屈曲水晶振動子の前記第1電極端子と前記第2電極端子が、前記増幅器と前記コンデンサーと前記抵抗素子とに電気的に接続され、前記水晶発振回路を備えて構成される水晶発振器を備えた情報通信機器で、前記水晶発振器は前記音叉型屈曲水晶振動子の基本波モード振動の発振周波数を出力信号として備え、前記出力信号が前記情報通信機器用の基準信号源として用いられることを特徴とする情報通信機器。A crystal oscillation circuit comprising the crystal resonator according to claim 9, or the crystal unit according to claim 10 or 11, an amplifier, a capacitor, and a resistance element, and the tuning fork type bending crystal resonator An information communication apparatus comprising a crystal oscillator comprising the crystal oscillation circuit, wherein the first electrode terminal and the second electrode terminal are electrically connected to the amplifier, the capacitor, and the resistance element. The crystal oscillator includes an oscillation frequency of the fundamental mode vibration of the tuning-fork type bending crystal resonator as an output signal, and the output signal is used as a reference signal source for the information communication device. .
JP2010179028A 2002-01-11 2010-07-22 Quartz crystal unit, crystal unit, crystal oscillator, information communication device, and manufacturing method thereof Expired - Lifetime JP5272121B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010179028A JP5272121B2 (en) 2002-01-11 2010-07-22 Quartz crystal unit, crystal unit, crystal oscillator, information communication device, and manufacturing method thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002040795 2002-01-11
JP2002040795 2002-01-11
JP2010179028A JP5272121B2 (en) 2002-01-11 2010-07-22 Quartz crystal unit, crystal unit, crystal oscillator, information communication device, and manufacturing method thereof

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007168148A Division JP4697196B6 (en) 2002-01-11 2007-05-30 Crystal unit and crystal oscillator manufacturing method

Publications (3)

Publication Number Publication Date
JP2011024225A true JP2011024225A (en) 2011-02-03
JP2011024225A5 JP2011024225A5 (en) 2013-01-10
JP5272121B2 JP5272121B2 (en) 2013-08-28

Family

ID=39846312

Family Applications (11)

Application Number Title Priority Date Filing Date
JP2008105122A Expired - Fee Related JP4650753B2 (en) 2002-01-11 2008-03-17 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2008105123A Expired - Fee Related JP4650754B2 (en) 2002-01-11 2008-03-17 Crystal unit manufacturing method and crystal oscillator manufacturing method
JP2010013550A Expired - Lifetime JP5266437B2 (en) 2002-01-11 2010-01-05 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2010173989A Expired - Fee Related JP4756426B2 (en) 2002-01-11 2010-07-14 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2010179028A Expired - Lifetime JP5272121B2 (en) 2002-01-11 2010-07-22 Quartz crystal unit, crystal unit, crystal oscillator, information communication device, and manufacturing method thereof
JP2010183451A Expired - Fee Related JP5401653B2 (en) 2002-01-11 2010-08-02 Quartz crystal manufacturing method and crystal unit manufacturing method
JP2013152060A Expired - Lifetime JP5515054B2 (en) 2002-01-11 2013-07-03 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013153042A Expired - Lifetime JP5515055B2 (en) 2002-01-11 2013-07-04 Quartz crystal unit, crystal unit, crystal oscillator, and method of manufacturing the same
JP2013158250A Expired - Fee Related JP5428068B2 (en) 2002-01-11 2013-07-11 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013270240A Expired - Fee Related JP5531319B2 (en) 2002-01-11 2013-12-09 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013273755A Expired - Fee Related JP5651822B2 (en) 2002-01-11 2013-12-11 Crystal resonator, crystal unit, and crystal oscillator manufacturing method

Family Applications Before (4)

Application Number Title Priority Date Filing Date
JP2008105122A Expired - Fee Related JP4650753B2 (en) 2002-01-11 2008-03-17 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2008105123A Expired - Fee Related JP4650754B2 (en) 2002-01-11 2008-03-17 Crystal unit manufacturing method and crystal oscillator manufacturing method
JP2010013550A Expired - Lifetime JP5266437B2 (en) 2002-01-11 2010-01-05 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2010173989A Expired - Fee Related JP4756426B2 (en) 2002-01-11 2010-07-14 Crystal resonator, crystal unit, and crystal oscillator manufacturing method

Family Applications After (6)

Application Number Title Priority Date Filing Date
JP2010183451A Expired - Fee Related JP5401653B2 (en) 2002-01-11 2010-08-02 Quartz crystal manufacturing method and crystal unit manufacturing method
JP2013152060A Expired - Lifetime JP5515054B2 (en) 2002-01-11 2013-07-03 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013153042A Expired - Lifetime JP5515055B2 (en) 2002-01-11 2013-07-04 Quartz crystal unit, crystal unit, crystal oscillator, and method of manufacturing the same
JP2013158250A Expired - Fee Related JP5428068B2 (en) 2002-01-11 2013-07-11 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013270240A Expired - Fee Related JP5531319B2 (en) 2002-01-11 2013-12-09 Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2013273755A Expired - Fee Related JP5651822B2 (en) 2002-01-11 2013-12-11 Crystal resonator, crystal unit, and crystal oscillator manufacturing method

Country Status (1)

Country Link
JP (11) JP4650753B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016092602A (en) * 2014-11-05 2016-05-23 富士通株式会社 Method of measuring characteristics of quartz resonator
US10128457B2 (en) 2014-09-18 2018-11-13 AGC Inc. Light-emitting device and power-generating device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013042425A (en) * 2011-08-18 2013-02-28 Seiko Epson Corp Piezoelectric vibration piece and piezoelectric module
JP6038001B2 (en) * 2013-10-30 2016-12-07 ユニ・チャーム株式会社 Method for producing recycled pulp from used sanitary products
WO2016043205A1 (en) * 2014-09-19 2016-03-24 株式会社村田製作所 Resonator and resonance device
US10960577B2 (en) * 2015-08-07 2021-03-30 Unicharm Corporation Method for recovering pulp fiber from used sanitary product and recycled pulp obtained thereby
JP2019102848A (en) * 2017-11-28 2019-06-24 セイコーエプソン株式会社 Vibration device, manufacturing method for vibration device, electronic apparatus, and movable body

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665517A (en) * 1979-10-15 1981-06-03 Ebauches Sa Piezoelectric vibrator
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017592A (en) * 1973-06-14 1975-02-24
JPS5252597A (en) * 1975-10-27 1977-04-27 Citizen Watch Co Ltd Bend type piezoelectric vibrator
JPS535588A (en) * 1976-07-05 1978-01-19 Seiko Instr & Electronics Ltd Manufacture of piezoelectric oscillator
JPS5368593A (en) * 1976-11-30 1978-06-19 Sharp Corp Production of crystal vibrator piece
JPS55138916A (en) * 1979-04-18 1980-10-30 Seiko Instr & Electronics Ltd Composite crystal resonator
JPS5824884A (en) * 1982-07-28 1983-02-14 Seiko Instr & Electronics Ltd Quartz time piece
JP2756559B2 (en) * 1987-11-11 1998-05-25 セイコーインスツルメンツ株式会社 Manufacturing method of piezoelectric vibrator
JPH0382210A (en) * 1989-08-25 1991-04-08 Seiko Electronic Components Ltd Method of adding weight to crystal resonator
JPH03252207A (en) * 1990-02-28 1991-11-11 Nec Corp Overtone quartz oscillating circuit
JP3542403B2 (en) * 1995-04-19 2004-07-14 東洋通信機株式会社 Piezoelectric vibrator and oscillator
JP3322153B2 (en) * 1997-03-07 2002-09-09 セイコーエプソン株式会社 Tuning fork type crystal vibrating piece
JP2954199B1 (en) * 1998-09-25 1999-09-27 日本電気アイシーマイコンシステム株式会社 Oscillation control circuit
JP2000223992A (en) * 1999-01-29 2000-08-11 Seiko Instruments Inc Piezoelectric vibrator and manufacture therefor
JP2001085755A (en) * 1999-09-09 2001-03-30 Matsushita Electric Ind Co Ltd Piezoelectric composite board and piezoelectric element
JP3729249B2 (en) * 2000-09-01 2005-12-21 セイコーエプソン株式会社 Vibrating piece manufacturing method, vibrating piece, vibrator having vibrating piece, oscillator, and mobile phone device
JP3551907B2 (en) * 2000-09-11 2004-08-11 セイコーエプソン株式会社 Clock signal supply device and control method therefor
JP2002261575A (en) * 2000-12-25 2002-09-13 Seiko Epson Corp Vibrating piece, vibrator, oscillator and electronic equipment
JP3931662B2 (en) * 2001-01-15 2007-06-20 セイコーエプソン株式会社 Vibrating piece, vibrator, oscillator and electronic device
JP3975681B2 (en) * 2001-03-02 2007-09-12 セイコーエプソン株式会社 Vibrating piece manufacturing method, vibrating piece, vibrator, oscillator, and portable telephone device
JP3969131B2 (en) * 2001-03-27 2007-09-05 セイコーエプソン株式会社 Piezoelectric vibrator and manufacturing method thereof
JP2003273649A (en) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk Electronic equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665517A (en) * 1979-10-15 1981-06-03 Ebauches Sa Piezoelectric vibrator
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10128457B2 (en) 2014-09-18 2018-11-13 AGC Inc. Light-emitting device and power-generating device
JP2016092602A (en) * 2014-11-05 2016-05-23 富士通株式会社 Method of measuring characteristics of quartz resonator

Also Published As

Publication number Publication date
JP2013258740A (en) 2013-12-26
JP5515055B2 (en) 2014-06-11
JP2010283875A (en) 2010-12-16
JP2008228334A (en) 2008-09-25
JP2008259216A (en) 2008-10-23
JP2014099888A (en) 2014-05-29
JP2010141908A (en) 2010-06-24
JP5272121B2 (en) 2013-08-28
JP5531319B2 (en) 2014-06-25
JP5515054B2 (en) 2014-06-11
JP5401653B2 (en) 2014-01-29
JP2013243753A (en) 2013-12-05
JP4650754B2 (en) 2011-03-16
JP4650753B2 (en) 2011-03-16
JP4756426B2 (en) 2011-08-24
JP2013225937A (en) 2013-10-31
JP2014090488A (en) 2014-05-15
JP5651822B2 (en) 2015-01-14
JP2010288306A (en) 2010-12-24
JP5266437B2 (en) 2013-08-21
JP5428068B2 (en) 2014-02-26

Similar Documents

Publication Publication Date Title
JP2005039767A (en) Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
JP5531319B2 (en) Crystal resonator, crystal unit, and crystal oscillator manufacturing method
JP2005039768A (en) Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
JP2003273703A (en) Quartz vibrator and its manufacturing method
JP3749917B2 (en) Manufacturing method of crystal oscillator
JP4074934B2 (en) Crystal oscillator and manufacturing method thereof
JP4697196B2 (en) Crystal unit and crystal oscillator manufacturing method
JP4697196B6 (en) Crystal unit and crystal oscillator manufacturing method
JP4074935B2 (en) Quartz crystal oscillator and crystal oscillator manufacturing method
JP4697190B2 (en) Manufacturing methods for crystal units and crystal units
JP4697190B6 (en) Manufacturing methods for crystal units and crystal units
JP2007202210A (en) Crystal unit having flexural mode quartz crystal resonator
JP2003273696A (en) Method for manufacturing crystal unit and method of manufacturing crystal oscillator
JP4453017B6 (en) Manufacturing method of crystal unit
JP4453017B2 (en) Manufacturing method of crystal unit
JP4411492B6 (en) Quartz crystal unit, crystal unit, crystal oscillator and information communication equipment
JP4411496B6 (en) Portable device equipped with crystal oscillator and manufacturing method thereof
JP2003273647A (en) Crystal oscillator and method of manufacturing the same
JP2003273695A (en) Crystal unit and crystal oscillator
JP2003273699A (en) Crystal unit and crystal oscillator
JP2003273702A (en) Quartz unit, its manufacturing method, and quartz oscillator
JP2003273697A (en) Crystal oscillator, and method of manufacturing crystal oscillator
JP2007202211A (en) Mobile apparatus mounted with crystal oscillator, and manufacturing method thereof
JP2006325240A (en) Crystal resonator, crystal unit, crystal oscillator and information communication apparatus

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121009

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121009

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121211

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121214

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130212

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121214

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130312

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5272121

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term