JP2011004035A - 屈曲振動片および屈曲振動片の製造方法 - Google Patents

屈曲振動片および屈曲振動片の製造方法 Download PDF

Info

Publication number
JP2011004035A
JP2011004035A JP2009143984A JP2009143984A JP2011004035A JP 2011004035 A JP2011004035 A JP 2011004035A JP 2009143984 A JP2009143984 A JP 2009143984A JP 2009143984 A JP2009143984 A JP 2009143984A JP 2011004035 A JP2011004035 A JP 2011004035A
Authority
JP
Japan
Prior art keywords
piezoelectric film
vibrating arm
electrode
bending vibration
vibration piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009143984A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011004035A5 (enExample
Inventor
Teruo Takizawa
照夫 瀧澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009143984A priority Critical patent/JP2011004035A/ja
Priority to US12/816,530 priority patent/US8304967B2/en
Publication of JP2011004035A publication Critical patent/JP2011004035A/ja
Publication of JP2011004035A5 publication Critical patent/JP2011004035A5/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009143984A 2009-06-17 2009-06-17 屈曲振動片および屈曲振動片の製造方法 Withdrawn JP2011004035A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009143984A JP2011004035A (ja) 2009-06-17 2009-06-17 屈曲振動片および屈曲振動片の製造方法
US12/816,530 US8304967B2 (en) 2009-06-17 2010-06-16 Flexural vibration piece, flexural vibrator, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009143984A JP2011004035A (ja) 2009-06-17 2009-06-17 屈曲振動片および屈曲振動片の製造方法

Publications (2)

Publication Number Publication Date
JP2011004035A true JP2011004035A (ja) 2011-01-06
JP2011004035A5 JP2011004035A5 (enExample) 2012-07-05

Family

ID=43353668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009143984A Withdrawn JP2011004035A (ja) 2009-06-17 2009-06-17 屈曲振動片および屈曲振動片の製造方法

Country Status (2)

Country Link
US (1) US8304967B2 (enExample)
JP (1) JP2011004035A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120056686A1 (en) * 2010-09-08 2012-03-08 Seiko Epson Corporation Vibrator element, vibrator, vibration device, and electronic device
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
JPWO2015111503A1 (ja) * 2014-01-24 2017-03-23 株式会社村田製作所 圧電振動子及び圧電振動装置
US11538981B2 (en) 2019-06-26 2022-12-27 Seiko Epson Corporation Vibration element, electronic apparatus, and vehicle

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6119134B2 (ja) * 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
US20160352307A1 (en) 2015-05-27 2016-12-01 Murata Manufacturing Co., Ltd. Mems resonator with high quality factor
US10291203B2 (en) 2016-07-12 2019-05-14 Murata Manufacturing Co., Ltd. Piezoelectric MEMS resonator with a high quality factor
CN114467254A (zh) * 2019-09-27 2022-05-10 株式会社村田制作所 弹性波装置
JP7689421B2 (ja) * 2020-11-30 2025-06-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP2023048349A (ja) * 2021-09-28 2023-04-07 セイコーエプソン株式会社 振動素子の製造方法
JP2023048348A (ja) * 2021-09-28 2023-04-07 セイコーエプソン株式会社 振動素子の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009005022A (ja) * 2007-06-20 2009-01-08 Seiko Epson Corp 音叉型振動子、発振器
JP2009081836A (ja) * 2007-09-05 2009-04-16 Seiko Epson Corp 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1958014A (en) * 1934-05-08 Piezo-electric crystal
US2955216A (en) * 1960-10-04 Reinforced hollow piezoelectric ceramic transducer structures
US2836737A (en) * 1953-07-20 1958-05-27 Electric Machinery Mfg Co Piezoelectric transducer
US3940974A (en) * 1974-05-06 1976-03-02 Minnesota Mining And Manufacturing Company Electrically compensated sensor
US4087715A (en) * 1976-11-18 1978-05-02 Hughes Aircraft Company Piezoelectric electromechanical micropositioner
US4308546A (en) * 1978-03-15 1981-12-29 Gould Inc. Ink jet tip assembly
JPS60181996U (ja) * 1984-05-11 1985-12-03 呉羽化学工業株式会社 電極端子取り出し構造体
US6498651B1 (en) * 1999-02-19 2002-12-24 Thomson-Csf Sextant Device for detecting activation movement for laser gyroscope
JP3791485B2 (ja) * 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
KR100704990B1 (ko) * 2005-08-08 2007-04-10 삼성전기주식회사 고정자 및 이를 이용한 세라믹스 튜브형 초음파 모터
JP4715652B2 (ja) 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP2010226609A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp 振動片および振動子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009005022A (ja) * 2007-06-20 2009-01-08 Seiko Epson Corp 音叉型振動子、発振器
JP2009081836A (ja) * 2007-09-05 2009-04-16 Seiko Epson Corp 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120056686A1 (en) * 2010-09-08 2012-03-08 Seiko Epson Corporation Vibrator element, vibrator, vibration device, and electronic device
US8525606B2 (en) 2011-02-02 2013-09-03 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic device
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
US9461615B2 (en) 2013-07-19 2016-10-04 Seiko Epson Corporation Vibrator element, vibrator, oscillator, electronic apparatus, and moving object
JPWO2015111503A1 (ja) * 2014-01-24 2017-03-23 株式会社村田製作所 圧電振動子及び圧電振動装置
US11538981B2 (en) 2019-06-26 2022-12-27 Seiko Epson Corporation Vibration element, electronic apparatus, and vehicle

Also Published As

Publication number Publication date
US8304967B2 (en) 2012-11-06
US20100320875A1 (en) 2010-12-23

Similar Documents

Publication Publication Date Title
JP2011004035A (ja) 屈曲振動片および屈曲振動片の製造方法
JP5513287B2 (ja) ピストン・ダイアフラムを有した圧電型マイクロスピーカ及びその製造方法
KR101561661B1 (ko) 진동막에 부착된 질량체를 가진 압전형 마이크로 스피커 및 그 제조 방법
KR101295215B1 (ko) 진동편, 진동자, 발진기 및, 전자 기기
WO2004038914A1 (ja) 圧電振動子、それを用いたフィルタ及び圧電振動子の調整方法
JP2010252302A (ja) 屈曲振動片およびそれを用いた発振器
JP4930381B2 (ja) 圧電振動装置
JP2010028536A (ja) 音叉型振動子及び発振器
CN103477459B (zh) 压电致动器以及具备该压电致动器的喷墨头
JP5375503B2 (ja) 屈曲振動片
CN104079250B (zh) 振子的制造方法、振子、以及振荡器
JP5531809B2 (ja) 屈曲振動片、屈曲振動子、発振器および電子機器
JP5233466B2 (ja) 振動子及び発振器、振動子の製造方法
JP2011234569A (ja) 振動発電デバイスおよびその製造方法
JP2008233029A (ja) 加速度センサおよび電子機器
JP2012015886A (ja) 振動片、振動子、発振器および電子機器
JP2010187059A (ja) ウォーク型振動片およびその製造方法
JP5822186B2 (ja) 振動子、発振器、および電子機器
JP6111966B2 (ja) 振動子の製造方法
JP5533349B2 (ja) 屈曲振動片、屈曲振動子、発振器、および電子機器
US20210313960A1 (en) Vibrator element
JP2025130341A (ja) トランスデューサ及びトランスデューサの製造方法
CN121124763A (zh) 一种压电驱动硅基mems谐振器
CN118730321A (zh) 一种谐振式温度传感器
JP2012034171A (ja) 振動片、振動子、発振器、および電子機器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120521

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120521

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130516

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130528

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20130624