JP2010537439A - 半導体構成要素、特にソーラーセルの金属裏側コンタクトの製造方法 - Google Patents
半導体構成要素、特にソーラーセルの金属裏側コンタクトの製造方法 Download PDFInfo
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Abstract
【解決手段】 この方法とその使用によって、特にシリコンベースのソーラーセル(20)は、連続プロセスシーケンスにおける単純な方法で裏コンタクト(21)を備えることができ、ここで、プロセスシーケンスは、基板(22)を回転するための取り扱いシステムを必要とせず、特に、シルクスクリーニングステップを省くことができるので、特に効率的且つ経済的である。
【選択図】 図2
Description
Claims (21)
- 半導体素子(20)、好ましくはソーラーセル、特にシリコンベースのソーラーセルの裏側コンタクト(21)の製造方法であって、該裏側コンタクト(21)が基板(22)の該裏側に金属層(24)を備え、該半導体構成要素(20)が、更に、該基板(22)の前側及び/又は裏側に層(23、25、27、28)を持ち、該層(23、25、27、28)が堆積ツール(14、15、16)で堆積される、前記方法であって、
該金属層(24)が、インライン真空堆積システム(1)においてスパッタリング或いは気相堆積でターゲット(15)によって堆積され、該金属層(24)を堆積させる前後に少なくとも一つの追加層(23、25、27、28)が真空を中断せずに該インライン真空堆積システム(1)において堆積される、前記方法。 - 該基板(22)の裏側に該層(23、24、25)を堆積させる該堆積ツール(14、15、16)が、該基板(22)の前側に該層(27、28)を堆積させる該堆積ツールに対向して、該真空堆積システム(1)の製品流路に関して配置され、ここで、該基板(22)が、特にキャリヤの点状(punctiform)支持体上に置かれて、該キャリヤを通る該基板(22)のシャドーイングを避けるように、該堆積ツール(14、15、16)が設けられている、請求項1に記載の方法。
- 該基板(22)が、該堆積ツール(14、15、16)に沿った水平路において実質的に移動され、堆積方向が縦である、請求項1又は2に記載の方法。
- 該金属層(24)が、アルミニウム、銀、モリブデン及び/又はニッケルの群からの材料、又は材料混合物を含み、好ましくは、アルミニウムから構成され、ここで、該金属層が、特に、0.1μm〜10μm、好ましくは2μmの厚さで堆積される、請求項1〜3のいずれか1項に記載の方法。
- 該金属層(24)を堆積させるステップの前に、SiN:H、SiC:H、SiO2:H、又はa-Si:Hの群の材料から作られる、好ましくはSiN:Hから作られる不動態化層(23)が堆積される、請求項1〜4のいずれか1項に記載の方法。
- 該金属層(24)を堆積させた後、該基板の裏側の該金属層(24)を該基板(22)に接触させるために、該金属層(24)を強いレーザビームで部分的に融解させ、レーザファイヤ接触(LFC)が形成される、請求項1〜5のいずれか1項に記載の方法。
- 該金属層(24)を堆積させるステップの後、バリヤ層が堆積され、好ましくは、WTiから製造される、請求項1〜6のいずれか1項に記載の方法。
- 該金属層(24)を堆積させるステップの後、又は該バリヤ層を堆積させるステップの後、Ag、Ni、NiV、NiCr、又はCrの群からの材料の一層又は複数層を備える、はんだ付け可能な層(25)が堆積される、請求項5又は7に記載の方法。
- 少なくとも二層が、真空処理チャンバ内で堆積され、ここで、該基板(22)の裏側の層の堆積中に、該基板(22)の前側に層が堆積される、請求項1〜8のいずれか1項に記載の方法。
- 特に共通のキャリヤにおいて配置されているいくつかの基板が、一つ又は複数の層を同時に備える、請求項1〜9のいずれか1項に記載の方法。
- 少なくとも一つの堆積ツール(14、15、16)が、引き出し(drawer)として形成される、挿入可能な要素(11、12、13)における真空処理チャンバ内に設けられている、請求項1〜10のいずれか1項に記載の方法。
- 少なくとも二つのコーティングツールが、引き出しとして形成される、共通の挿入可能な要素における真空処理チャンバ内に設けられ、ここで、好ましくは、第一堆積ツールが前側を向き、第二堆積ツールが該基板の裏側を向いている、請求項1〜11のいずれか1項に記載の方法。
- 該層の少なくとも一つ、金属層(24)、バリヤ層、はんだ付け可能な層(25)が、気相堆積され、ここで、それぞれの該材料が、真空パススルーを通って蒸発器へワイヤとして設けられる、請求項1〜12のいずれか1項に記載の方法。
- 該層の少なくとも一つ、金属層(24)、バリヤ層、はんだ付け可能な層(25)が、気相堆積され、ここで、それぞれの該材料が、それぞれ二つの後の真空チャンバ内で、第一蒸発器と第二蒸発器において蒸発させ、該第一蒸発器における該材料が消費されるまで該第一蒸発器において蒸発させ、次に、それぞれの該第一蒸発器におけるそれぞれの該材料が消費される場合、他のそれぞれの真空処理チャンバにおいて該気相堆積を中断せずに該第二蒸発器によって該材料を蒸発させ、ここで、特に同時にそれぞれの該第一蒸発器が維持されている、請求項1〜12のいずれか1項に記載の方法。
- 該層(23、25)の少なくとも一つが、好ましくは、セラミックスパッタターゲットで金属層又は誘電体層のDCスパッタプロセスにおいて、少なくとも一つの回転可能なカソード(14、16)によって、或いは金属スパッタターゲットで誘電体層の反応性中周波数スパッタリングによってスパッタされる、請求項1〜14のいずれか1項に記載の方法。
- カソード数が、該カソードのスパッタ収率、達成すべき層の厚さ、達成すべき該真空処理システムのスループットによって選ばれる、請求項15に記載の方法。
- 少なくとも一つの真空処理チャンバおける真空処理システム(1)の使用であって、該真空処理システムが、請求項1〜16のいずれか1項に記載の方法を行うために少なくとも二つの堆積ツールを備えている、前記使用。
- 該真空処理システム(1)が、ほぼ水平な製品流路を持ち、ここで、堆積方向が縦に向いている、請求項17に記載の使用。
- 該真空処理システム(1)が、少なくとも一つの真空チャンバ(4、5、6)の内部に挿入することができ、更に/又はそれを前記内部から取り出すこともできる、少なくとも一つの挿入可能な要素(11、12、13)を持ち、ここで、少なくとも一つの堆積ツール(14,15,16)が該挿入可能な要素(11、12、13)に配置されている、請求項17又は18に記載の使用。
- 少なくとも一つの真空処理チャンバが、少なくとも二つの堆積ツールを持ち、ここで、第一堆積ツールが前側を向き、第二堆積ツールが該真空処理システムで堆積される一枚又は数枚の基板の裏側を向いている、請求項17〜19のいずれか1項に記載の使用。
- 該真空処理チャンバ(1)が、搬送ローラを持ち、一つ又は複数の該基板(22)、又はいくつかの基板のためのキャリヤが、該真空処理システム(1)によって搬送される、請求項17〜20のいずれか1項に記載の使用。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US96894907P | 2007-08-30 | 2007-08-30 | |
US60/968,949 | 2007-08-30 | ||
EP07017000.6 | 2007-08-30 | ||
EP07017000A EP2031659A1 (de) | 2007-08-30 | 2007-08-30 | Verfahren zur Erzeugung eines metallischen Rückkontaktes eines Halbleiterbauelements, insbesondere einer Solarzelle |
PCT/EP2008/006861 WO2009030374A1 (de) | 2007-08-30 | 2008-08-20 | Verfahren zur erzeugung eines metallischen rückkontaktes eines halbleiterbauelements, insbesondere einer solarzelle |
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JP2010537439A true JP2010537439A (ja) | 2010-12-02 |
JP4703782B2 JP4703782B2 (ja) | 2011-06-15 |
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DE102009061071B3 (de) * | 2009-02-27 | 2013-01-17 | Solarworld Innovations Gmbh | Halbleiterbauelement und Verfahren zur Herstellung eines Halbleiterbauelements |
DE102009010816B4 (de) * | 2009-02-27 | 2011-03-10 | Solarworld Innovations Gmbh | Verfahren zur Herstellung eines Halbleiter-Bauelements |
EP2309220A1 (en) | 2009-10-02 | 2011-04-13 | Applied Materials, Inc. | Coating thickness measuring device and method |
DE102011075352A1 (de) | 2011-05-05 | 2012-11-08 | Solarworld Innovations Gmbh | Verfahren zum Rückseitenkontaktieren einer Silizium-Solarzelle und Silizium-Solarzelle mit einer solchen Rückseitenkontaktierung |
DE102012101456A1 (de) | 2012-02-23 | 2013-08-29 | Schott Solar Ag | Verfahren zum Herstellen einer Solarzelle |
DE102013219560A1 (de) * | 2013-09-27 | 2015-04-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photovoltaische Solarzelle und Verfahren zum Herstellen einer metallischen Kontaktierung einer photovoltaischen Solarzelle |
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EP2031659A1 (de) | 2009-03-04 |
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