JP2010535144A - 分散性ナノ粒子 - Google Patents
分散性ナノ粒子 Download PDFInfo
- Publication number
- JP2010535144A JP2010535144A JP2010506885A JP2010506885A JP2010535144A JP 2010535144 A JP2010535144 A JP 2010535144A JP 2010506885 A JP2010506885 A JP 2010506885A JP 2010506885 A JP2010506885 A JP 2010506885A JP 2010535144 A JP2010535144 A JP 2010535144A
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- particles
- group
- optionally substituted
- average
- silane
- Prior art date
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- 239000002105 nanoparticle Substances 0.000 title description 9
- 239000002245 particle Substances 0.000 claims abstract description 159
- 239000006185 dispersion Substances 0.000 claims abstract description 47
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000002296 dynamic light scattering Methods 0.000 claims abstract description 13
- 125000001931 aliphatic group Chemical group 0.000 claims abstract description 11
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 11
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 claims abstract description 9
- 150000003839 salts Chemical class 0.000 claims abstract description 6
- 150000007524 organic acids Chemical group 0.000 claims abstract 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 38
- 229910000077 silane Inorganic materials 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 19
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims description 18
- 235000012239 silicon dioxide Nutrition 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims description 11
- 150000004706 metal oxides Chemical class 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 8
- 239000007859 condensation product Substances 0.000 claims description 8
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000000839 emulsion Substances 0.000 claims description 6
- 230000007062 hydrolysis Effects 0.000 claims description 6
- 238000006460 hydrolysis reaction Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 5
- 239000002270 dispersing agent Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 125000005843 halogen group Chemical group 0.000 claims description 4
- 239000000725 suspension Substances 0.000 claims description 4
- 239000003463 adsorbent Substances 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910003849 O-Si Inorganic materials 0.000 claims description 2
- 229910003872 O—Si Inorganic materials 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 150000007942 carboxylates Chemical class 0.000 claims description 2
- 150000001768 cations Chemical class 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims description 2
- 125000004469 siloxy group Chemical group [SiH3]O* 0.000 claims description 2
- 125000000542 sulfonic acid group Chemical group 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 3
- 150000001735 carboxylic acids Chemical group 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 description 18
- -1 hydroxy, methoxy Chemical group 0.000 description 14
- 125000000524 functional group Chemical group 0.000 description 13
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 11
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 8
- 238000002955 isolation Methods 0.000 description 8
- 150000004760 silicates Chemical class 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 150000004756 silanes Chemical class 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 6
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- 239000000126 substance Substances 0.000 description 6
- 239000003125 aqueous solvent Substances 0.000 description 5
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- 239000011347 resin Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 4
- 239000002609 medium Substances 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 4
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 239000004922 lacquer Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000006254 rheological additive Substances 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 239000010457 zeolite Substances 0.000 description 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229920004482 WACKER® Polymers 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000003849 aromatic solvent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002118 epoxides Chemical group 0.000 description 2
- 238000011067 equilibration Methods 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000011164 primary particle Substances 0.000 description 2
- 230000005588 protonation Effects 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000001694 spray drying Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000004448 titration Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- QPVPSLIOCROZPE-UHFFFAOYSA-N 2-methylprop-2-enoic acid;trimethoxy(methyl)silane Chemical compound CC(=C)C(O)=O.CO[Si](C)(OC)OC QPVPSLIOCROZPE-UHFFFAOYSA-N 0.000 description 1
- YNEHCIJMLGCQIS-UHFFFAOYSA-N 2-methylprop-2-enoic acid;trimethoxy(propyl)silane Chemical compound CC(=C)C(O)=O.CCC[Si](OC)(OC)OC YNEHCIJMLGCQIS-UHFFFAOYSA-N 0.000 description 1
- GXDMUOPCQNLBCZ-UHFFFAOYSA-N 3-(3-triethoxysilylpropyl)oxolane-2,5-dione Chemical compound CCO[Si](OCC)(OCC)CCCC1CC(=O)OC1=O GXDMUOPCQNLBCZ-UHFFFAOYSA-N 0.000 description 1
- CCTFMNIEFHGTDU-UHFFFAOYSA-N 3-methoxypropyl acetate Chemical compound COCCCOC(C)=O CCTFMNIEFHGTDU-UHFFFAOYSA-N 0.000 description 1
- MKZHZHRXBKRYRP-UHFFFAOYSA-N 3-propyl-3-triethoxysilyloxolane-2,5-dione Chemical compound CCO[Si](OCC)(OCC)C1(CCC)CC(=O)OC1=O MKZHZHRXBKRYRP-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- NJLHHACGWKAWKL-UHFFFAOYSA-N ClP(Cl)=O Chemical compound ClP(Cl)=O NJLHHACGWKAWKL-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910008051 Si-OH Inorganic materials 0.000 description 1
- 229910008326 Si-Y Inorganic materials 0.000 description 1
- 229910020175 SiOH Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910002808 Si–O–Si Inorganic materials 0.000 description 1
- 229910006358 Si—OH Inorganic materials 0.000 description 1
- 229910006773 Si—Y Inorganic materials 0.000 description 1
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- SHPBBNULESVQRH-UHFFFAOYSA-N [O-2].[O-2].[Ti+4].[Zr+4] Chemical compound [O-2].[O-2].[Ti+4].[Zr+4] SHPBBNULESVQRH-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M acrylate group Chemical group C(C=C)(=O)[O-] NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
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- 125000000217 alkyl group Chemical group 0.000 description 1
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- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
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- 229910052810 boron oxide Inorganic materials 0.000 description 1
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- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- DRVWBEJJZZTIGJ-UHFFFAOYSA-N cerium(3+);oxygen(2-) Chemical class [O-2].[O-2].[O-2].[Ce+3].[Ce+3] DRVWBEJJZZTIGJ-UHFFFAOYSA-N 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
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- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical class [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
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- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- CVQVSVBUMVSJES-UHFFFAOYSA-N dimethoxy-methyl-phenylsilane Chemical compound CO[Si](C)(OC)C1=CC=CC=C1 CVQVSVBUMVSJES-UHFFFAOYSA-N 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- MRGLQWWTOOUADP-UHFFFAOYSA-L disodium;dioxido-oxo-(4-trihydroxysilylbutyl)-$l^{5}-phosphane Chemical compound [Na+].[Na+].O[Si](O)(O)CCCCP([O-])([O-])=O MRGLQWWTOOUADP-UHFFFAOYSA-L 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
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- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical group CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000005469 ethylenyl group Chemical group 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
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- 229910001195 gallium oxide Inorganic materials 0.000 description 1
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- 238000000227 grinding Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
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- VNBLTKHUCJLFSB-UHFFFAOYSA-N n-(trimethoxysilylmethyl)aniline Chemical compound CO[Si](OC)(OC)CNC1=CC=CC=C1 VNBLTKHUCJLFSB-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
−O1+n−SiR1 2−n−B [1]
の基を有する粉末状粒子(P)であり、その際、粒子(P)の平均直径は1〜12のpH範囲を有する水に分散後に200nm以下であり、光子相関分光法によりZ平均の形で平均流体力学的相当径として測定され、その際、R1は、場合により置換された炭素原子1〜12個を有する脂肪族又は芳香族炭化水素基を表し、Bは、少なくとも1個の有機酸官能基又はその塩を含む場合により置換された脂肪族又は芳香族炭化水素基を表し、nは0、1又は2の値である。
X1+nSiR1 2−n−B [2]
X1+nSiR1 2−n−C [3]
のシラン(S)又はそれから誘導される加水分解−及び縮合生成物又はシラン(S)及びそれから誘導される加水分解−及び縮合生成物から成る混合物と反応させるが、その際、一般式[3]の基Cは粒子の製造途中で基Bに変わり、(b)第2工程で粒子(P)を粉末として単離するが、その際、200nmの最大大きさを有するpH範囲1〜12で水中に分散後の粒子(P)の平均直径は、粉末として単離前の粒子の平均直径の0.5〜20倍に相当し、粒子(P)の平均直径は光子相関分光法によりZ平均の形で平均流動力学的相当径として測定され、その際、Xは、ハロゲン、ヒドロキシ−又はアルコキシ基、カルボキシレート、エノレート又はシロキシ基、−O−Si≡を表し、Cは、加水分解によって基Bに変えることができる官能性炭化水素基を表し、B、R1及びnは一般式[1]に記載したものを表す。
水5.00gを水性珪酸ゾル(GRACE DAVISON社のLUDOX(R)AS40、24nm、40質量%)6.25gに添加することによって製造した希釈した水性珪酸ゾルに、ナトリウム−[3−(トリヒドロキシシリル)プロピル メチルホスホネート]の水溶液((HO)3Si(CH2)3−O−P(O)(CH3)(ONa)、CAS84962−98−1、Aldrich No.435716、水中42%)0.60gを滴下し、混合物を5時間60℃に加熱する。溶剤を溜去後、無色粉末2.61gが得られるが、これは水に混入によって分散させることができる。水中の珪酸ゾルの平均粒度は(希釈したアンモニアでpH=11に調整)、動的光散乱を用いて(MALVERN社のZetasizer Nano)Z平均の形で平均流体力学的相当径として測定して、41nmであった。
イソプロパノール中の珪酸ゾル(NISSAN CHEMICAL社のIPA−ST、12nm、30質量%)15.0gに3−(トリエトキシシリル)プロピルコハク酸アンヒドリド(Silan GF20、WACKER CHEMIE AG、ミュンヒェン)0.46gを滴下し、混合物を6時間60℃に加熱する。溶剤を溜去後、無色粉末4.98gが得られるが、これは希釈したアンモニア(pH=10)中に混入によって分散させることができる。希釈したアンモニア(pH=10)中の珪酸ゾルの平均粒度は、動的光散乱を用いて(MALVERN社のZetasizer Nano)Z平均の形で平均流体力学的相当径として測定して、22nmであった。
ステーバー法によりテトラエトキシシランから製造した珪酸ゾル(SiO214.4質量%、30nm、アンモニア−安定化、pH=10)100gに、ナトリウム−[3−(トリヒドロキシシリル)プロピル メチルホスホネート]の水溶液((HO)3Si(CH2)3−O−P(O)(CH3)(ONa)、CAS84962−98−1、Aldrich No.435716、水中42%)0.34gを滴下し、混合物を2時間還流加熱する。珪酸ゾルが得られ、これは酸性、中性及び塩基性媒体(pH=2〜12)中で相応する非変性珪酸ゾルに比して高い安定性を有する。図1は、ゼータポテンシャルをpH値に関連させて表す。水中の珪酸ゾルの平均粒度は、動的光散乱を用いて(MALVERN社のZetasizer Nano)Z平均の形で平均流体力学的相当直径として測定して、シラン変性後に30nmであった。図1でゼータポテンシャル(ζ)をpH値に関連させて表す。滴定は0.5M KOH又は1.0M HNO3を用いる(SiO210質量%;イオンバックグラウンド:0.01M KCl)。シラン変性珪酸ゾルはpH範囲2〜12で非変性珪酸ゾルに比してより著しい負のゼータポテンシャルを示す。
ステーバー法によりテトラエトキシシランから製造した珪酸ゾル(SiO214.4質量%、30nm、アンモニア−安定化、pH=10)100gに、3−(トリエトキシシリル)プロピルコハク酸アンヒドリド(GF20、WACKER CHEMIE AG、ミュンヒェン)0.43gを滴下し、混合物を2時間還流加熱する。珪酸ゾルが得られ、これは酸性、中性及び塩基性媒体(pH=3.5〜12)中で相応する非変性珪酸ゾルに比して高い安定性を有する。図2は、ゼータポテンシャルをpH値に関連させて表す。水中の珪酸ゾルの平均粒度は、動的光散乱を用いて(MALVERN社のZetasizer Nano)Z平均の形で平均流体力学的相当径として測定して、シラン変性後に30nmであった。図2でゼータポテンシャル(ζ)をpH値に関連させて表す。滴定は0.5M KOH又は1.0M HNO3を使用(SiO210質量%;イオンバックグラウンド:0.01M KCl)。シラン変性珪酸ゾルはpH範囲3.5〜12で非変性珪酸ゾルに比してより著しい負のゼータポテンシャルを示す。
Claims (12)
- 表面に一般式[1]
−O1+n−SiR1 2−n−B [1]
の基を有する粉末状粒子(P)において、粒子(P)の平均直径は1〜12のpH範囲を有する水に分散後に200nm以下であり、光子相関分光法によりZ平均の形で平均流体力学的相当径として測定され、その際、
R1は、炭素原子1〜12個を有する場合により置換された脂肪族又は芳香族炭化水素基を表し、
Bは、少なくとも1個の有機酸官能基又はその塩を含む場合により置換された脂肪族又は芳香族炭化水素基を表し、
nは0、1又は2の値である、粉末状粒子(P)。 - Bが、少なくとも1個のカルボン酸官能基[−C(O)OH]、ホスホン酸官能基[−P(O)(OH)(OR2)、−O−P(O)(R2)(OR2)]又はスルホン酸官能基[−S(O)2(OH)]又はその塩を有する場合により置換された炭化水素基を表し、その際R2は場合により置換された脂肪族又は芳香族炭化水素基を表すことを特徴とする、請求項1に記載の粒子。
- 粒子がコロイド状酸化珪素又は金属酸化物をベースとすることを特徴とする、請求項1又は2に記載の粒子。
- 粒子が珪酸ゾルをベースとすることを特徴とする、請求項3に記載の粒子。
- 液体媒体中に分散させた粒子(P)の平均直径が、光子相関分光法によりZ平均の形で平均流動力学的相当径として測定して、最高200nmであることを特徴とする、請求項1から4までのいずれか1項に記載の粒子。
- 表面に一般式[1]
−O1+n−SiR1 2−n−B [1]
の基を有し、2段工程法で製造可能である粉末状粒子を製造するに当たり、
(a)第1工程で粒子(P1)を少なくとも1種の一般式[2]又は[3]
X1+nSiR1 2−n−B [2]
X1+nSiR1 2−n−C [3]
のシラン(S)又はそれから誘導される加水分解物及び縮合生成物又はシラン(S)及びそれから誘導される加水分解物及び縮合生成物から成る混合物と反応させるが、その際、一般式[3]の基Cは粒子(P)の製造途中で基Bに変わり、
(b)第2工程で粒子(P)を粉末として単離するが、その際、200nmの最大大きさを有するpH範囲1〜12で水中に分散後の粒子(P)の平均直径は、粉末として単離前の粒子の平均直径の0.5〜20倍に相当し、粒子(P)の平均直径は光子相関分光法によりZ平均の形で平均流動力学的相当径として測定されるが、その際、
Xは、ハロゲン、ヒドロキシ基又はアルコキシ基、カルボキシレート、エノレート又はシロキシ基、−O−Si≡を表し、
R1は、場合により置換された炭素原子1〜12個を有する脂肪族又は芳香族炭化水素基を表し、
Bは、少なくとも1個の有機酸官能基又はその塩を含む場合により置換された脂肪族又は芳香族炭化水素基を表し、
Cは、加水分解によって基Bに変えることができる官能性炭化水素基を表し、
nは0、1又は2の値である、粉末状粒子の製法。 - 出発粒子としてコロイド状酸化珪素又は金属酸化物−粒子を使用することを特徴とする、請求項6又は7に記載の粒子(P)の製法。
- 出発粒子として珪酸ゾルを使用することを特徴とする、請求項8に記載の粒子(P)の製法。
- 粒子(P1)を所望の分散剤中でシラン(S)と反応させて粒子(P)を製造することを特徴とする、請求項1から6までのいずれか1項に記載の粒子又は請求項7から9までのいずれか1項に記載の製法より製造した粒子を含有する、分散液の製法。
- 分散液が、請求項1から6までのいずれか1項に記載の粒子又は請求項7から9までのいずれか1項に記載の製法により製造した粒子を含有することを特徴とする、分散液。
- 請求項1から6までのいずれか1項に記載の粒子又は請求項7から9までのいずれか1項に記載の製法により製造した粒子を含有する、トナー、現像剤、電荷制御助剤、複合材料中の充填剤、紙塗被、ピッカリング・エマルジョン、半導体部品の研磨用の研磨粒子を含有する懸濁液、吸着剤、イオン交換体。
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DE102007021002A DE102007021002A1 (de) | 2007-05-04 | 2007-05-04 | Dispergierbare Nanopartikel |
PCT/EP2008/054833 WO2008135379A1 (de) | 2007-05-04 | 2008-04-22 | Dispergierbare nanopartikel |
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JP2020181007A (ja) * | 2019-04-23 | 2020-11-05 | 京セラドキュメントソリューションズ株式会社 | 磁性トナー |
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DE102009024754A1 (de) * | 2009-06-12 | 2011-02-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Organisch funktionalisierte Polysiloxan-Nanopartikel, Verfahren zu ihrer Herstellung und ihre Verwendung in Kompositen |
EP2440600A1 (de) | 2009-06-12 | 2012-04-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Organisch funktionalisierte polysiloxan-nanopartikel, verfahren zu ihrer herstellung und ihre verwendung |
DE102010044563B4 (de) * | 2010-09-07 | 2015-04-09 | Fachhochschule Lübeck | Stabile Dispersionen |
US20170066934A1 (en) * | 2015-09-03 | 2017-03-09 | Barry R. Knowlton | Coatings for increasing colour vibrancy and methods of applying same |
DE102016005656A1 (de) * | 2016-05-11 | 2017-11-16 | Surtec International Gmbh | Konversionsschichten für metallische Oberflächen |
DE102016209499A1 (de) * | 2016-05-31 | 2017-11-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Nanostrukturierte Mikropartikel aus silanisierten Primärpartikeln mit steuerbarer Redispergierbarkeit und Verfahren zu deren Herstellung |
WO2019143698A1 (en) * | 2018-01-16 | 2019-07-25 | Georgia Tech Research Corporation | Methods for forming water-repellent, long-term, durable and biomimetic coatings from inorganic silicas and silanes |
US10781343B2 (en) * | 2019-01-24 | 2020-09-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Acid polishing composition and method of polishing a substrate having enhanced defect inhibition |
TWI743989B (zh) * | 2019-11-15 | 2021-10-21 | 日商Jsr股份有限公司 | 化學機械研磨用組成物以及化學機械研磨方法 |
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KR20150063600A (ko) | 2012-11-30 | 2015-06-09 | 니타 하스 인코포레이티드 | 연마 조성물 |
US9593259B2 (en) | 2012-11-30 | 2017-03-14 | Nitta Haas Incorporated | Polishing composition |
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JP7234772B2 (ja) | 2019-04-23 | 2023-03-08 | 京セラドキュメントソリューションズ株式会社 | 磁性トナー |
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WO2008135379A1 (de) | 2008-11-13 |
EP2144968B1 (de) | 2012-06-06 |
US20100129750A1 (en) | 2010-05-27 |
EP2144968A1 (de) | 2010-01-20 |
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