JP2010532717A5 - - Google Patents

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Publication number
JP2010532717A5
JP2010532717A5 JP2010513427A JP2010513427A JP2010532717A5 JP 2010532717 A5 JP2010532717 A5 JP 2010532717A5 JP 2010513427 A JP2010513427 A JP 2010513427A JP 2010513427 A JP2010513427 A JP 2010513427A JP 2010532717 A5 JP2010532717 A5 JP 2010532717A5
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JP
Japan
Prior art keywords
region
opening
metal contact
nanotube
insulating layer
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JP2010513427A
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English (en)
Japanese (ja)
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JP5674466B2 (ja
JP2010532717A (ja
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Priority claimed from US11/765,735 external-priority patent/US7964143B2/en
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Publication of JP2010532717A publication Critical patent/JP2010532717A/ja
Publication of JP2010532717A5 publication Critical patent/JP2010532717A5/ja
Application granted granted Critical
Publication of JP5674466B2 publication Critical patent/JP5674466B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010513427A 2007-06-20 2008-06-20 ナノチューブデバイスおよび製造方法 Expired - Fee Related JP5674466B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/765,735 2007-06-20
US11/765,735 US7964143B2 (en) 2007-06-20 2007-06-20 Nanotube device and method of fabrication
PCT/US2008/067604 WO2009017898A2 (en) 2007-06-20 2008-06-20 Nanotube device and method of fabrication

Publications (3)

Publication Number Publication Date
JP2010532717A JP2010532717A (ja) 2010-10-14
JP2010532717A5 true JP2010532717A5 (enExample) 2011-10-06
JP5674466B2 JP5674466B2 (ja) 2015-02-25

Family

ID=40136698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010513427A Expired - Fee Related JP5674466B2 (ja) 2007-06-20 2008-06-20 ナノチューブデバイスおよび製造方法

Country Status (5)

Country Link
US (2) US7964143B2 (enExample)
EP (1) EP2171132A4 (enExample)
JP (1) JP5674466B2 (enExample)
KR (1) KR101464283B1 (enExample)
WO (1) WO2009017898A2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8920619B2 (en) 2003-03-19 2014-12-30 Hach Company Carbon nanotube sensor
US8031514B2 (en) 2007-04-09 2011-10-04 Northeastern University Bistable nanoswitch
US7964143B2 (en) 2007-06-20 2011-06-21 New Jersey Institute Of Technology Nanotube device and method of fabrication
US20090045061A1 (en) * 2007-06-20 2009-02-19 New Jersey Institute Of Technology Nanotube Devices and Vertical Field Effect Transistors
EP2098484A1 (en) * 2008-02-15 2009-09-09 Imec Synthesis of zeolite crystals and formation of carbon nanostructures in patterned structures
US8362760B2 (en) * 2008-02-19 2013-01-29 West Virginia University Research Corporation, Wvu Office Of Technology Transfer Stimulus responsive nanoparticles
FR2928093B1 (fr) * 2008-02-28 2010-12-31 Commissariat Energie Atomique Dispositif de separation de molecules et procede de fabrication.
JP5717233B2 (ja) * 2010-02-16 2015-05-13 独立行政法人産業技術総合研究所 単層カーボンナノチューブの分離方法、分離装置、分離済単層カーボンナノチューブ含有ミセル分散溶液
US8317978B1 (en) * 2010-04-07 2012-11-27 Manning Thelma G Nitriding of carbon nanotubes
US9406580B2 (en) * 2011-03-16 2016-08-02 Synaptics Incorporated Packaging for fingerprint sensors and methods of manufacture
KR101311780B1 (ko) * 2011-06-09 2013-09-25 경희대학교 산학협력단 탄소나노튜브 수직 배향 방법 및 장치
CN103288033B (zh) * 2012-02-23 2016-02-17 清华大学 碳纳米管微尖结构的制备方法
WO2014109722A1 (en) 2013-01-14 2014-07-17 Kaya Cengiz A method for production and coating of antibacterial copper (ii) oxide (cuo) nano-tube
WO2014165001A1 (en) 2013-03-12 2014-10-09 Farrow, Reginald, C. Nanoprobe and methods of use
US10501315B2 (en) 2016-05-23 2019-12-10 New Jersey Institute Of Technology Analytical nanoscope on a chip for sub-optical resolution imaging
US9643179B1 (en) * 2016-06-24 2017-05-09 International Business Machines Corporation Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors
US9837403B1 (en) * 2016-09-27 2017-12-05 International Business Machines Corporation Asymmetrical vertical transistor
KR101829302B1 (ko) * 2016-10-24 2018-02-19 한국생산기술연구원 나노소재 어셈블리구조의 제작방법 및 그 방법을 실시하기 위한 장치
CN110178201B (zh) * 2017-01-13 2023-06-16 应用材料公司 用于低温氮化硅膜的方法及设备
US11467109B2 (en) * 2018-04-30 2022-10-11 The Hong Kong University Of Science And Technology Nanotube array gas sensor
KR102607332B1 (ko) * 2020-03-24 2023-11-29 한국전자통신연구원 전계 방출 장치
US11705312B2 (en) 2020-12-26 2023-07-18 Applied Materials, Inc. Vertically adjustable plasma source

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法
KR100314094B1 (ko) * 1999-08-12 2001-11-15 김순택 전기 영동법을 이용한 카본나노튜브 필드 에미터의 제조 방법
JP3581298B2 (ja) 2000-04-27 2004-10-27 シャープ株式会社 電界放出型電子源アレイ及びその製造方法
KR100360476B1 (ko) * 2000-06-27 2002-11-08 삼성전자 주식회사 탄소나노튜브를 이용한 나노 크기 수직 트랜지스터 및 그제조방법
DE10036897C1 (de) * 2000-07-28 2002-01-03 Infineon Technologies Ag Feldeffekttransistor, Schaltungsanordnung und Verfahren zum Herstellen eines Feldeffekttransistors
JP3590007B2 (ja) * 2001-06-25 2004-11-17 シャープ株式会社 電子放出素子およびその製造方法並びに該電子放出素子を用いた画像表示装置
JP3583387B2 (ja) * 2001-06-25 2004-11-04 シャープ株式会社 電子放出素子、その製造方法、及び電子放出素子を備えた画像表示装置
US7252749B2 (en) * 2001-11-30 2007-08-07 The University Of North Carolina At Chapel Hill Deposition method for nanostructure materials
US6784028B2 (en) * 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US6515325B1 (en) * 2002-03-06 2003-02-04 Micron Technology, Inc. Nanotube semiconductor devices and methods for making the same
US6891227B2 (en) 2002-03-20 2005-05-10 International Business Machines Corporation Self-aligned nanotube field effect transistor and method of fabricating same
US6830981B2 (en) * 2002-07-02 2004-12-14 Industrial Technology Research Institute Vertical nanotube transistor and process for fabricating the same
US6933222B2 (en) * 2003-01-02 2005-08-23 Intel Corporation Microcircuit fabrication and interconnection
US7045421B2 (en) * 2003-04-22 2006-05-16 Nantero, Inc. Process for making bit selectable devices having elements made with nanotubes
US6995046B2 (en) * 2003-04-22 2006-02-07 Nantero, Inc. Process for making byte erasable devices having elements made with nanotubes
KR101015498B1 (ko) * 2003-06-14 2011-02-21 삼성전자주식회사 수직 카본나노튜브 전계효과트랜지스터 및 그 제조방법
JP2005101191A (ja) * 2003-09-24 2005-04-14 Denso Corp 熱電変換型冷却装置およびその製造方法
US8859151B2 (en) * 2003-11-05 2014-10-14 St. Louis University Immobilized enzymes in biocathodes
US20050118494A1 (en) * 2003-12-01 2005-06-02 Choi Sung H. Implantable biofuel cell system based on nanostructures
US20050145838A1 (en) 2004-01-07 2005-07-07 International Business Machines Corporation Vertical Carbon Nanotube Field Effect Transistor
TWI293766B (en) 2004-01-14 2008-02-21 Ind Tech Res Inst A method for assembling carbon nanotubes and micro-probe and an apparatus thereof
US7211844B2 (en) * 2004-01-29 2007-05-01 International Business Machines Corporation Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage
US20050167655A1 (en) * 2004-01-29 2005-08-04 International Business Machines Corporation Vertical nanotube semiconductor device structures and methods of forming the same
US7135773B2 (en) * 2004-02-26 2006-11-14 International Business Machines Corporation Integrated circuit chip utilizing carbon nanotube composite interconnection vias
WO2005096430A1 (en) * 2004-03-15 2005-10-13 St. Louis University Microfluidic biofuel cell
US7091096B2 (en) * 2004-07-29 2006-08-15 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Method of fabricating carbon nanotube field-effect transistors through controlled electrochemical modification
JP2006049435A (ja) * 2004-08-02 2006-02-16 Sony Corp カーボンナノチューブ及びその配置方法と、これを用いた電界効果トランジスタとその製造方法及び半導体装置
US7470353B2 (en) * 2004-08-30 2008-12-30 Samsung Electro-Mechanics Co., Ltd. Method of manufacturing field emitter electrode using self-assembling carbon nanotubes and field emitter electrode manufactured thereby
KR100649586B1 (ko) * 2004-08-30 2006-11-28 삼성전기주식회사 탄소나노튜브의 셀프 어셈블링을 이용한 전계방출 에미터전극의 제조 방법 및 이에 따라 제조된 전계방출 에미터전극
JP4463070B2 (ja) 2004-10-15 2010-05-12 株式会社日立ハイテクノロジーズ カーボンナノチューブ精製方法、精製装置、及び精製キット
US20060103287A1 (en) 2004-11-15 2006-05-18 Li-Ren Tsuei Carbon-nanotube cold cathode and method for fabricating the same
US7535016B2 (en) * 2005-01-31 2009-05-19 International Business Machines Corporation Vertical carbon nanotube transistor integration
US7989349B2 (en) * 2005-04-15 2011-08-02 Micron Technology, Inc. Methods of manufacturing nanotubes having controlled characteristics
US20060249388A1 (en) * 2005-05-04 2006-11-09 Yu-Yang Chang Electrophoretic deposition method for a field emission device
JP5037804B2 (ja) * 2005-09-30 2012-10-03 富士通株式会社 垂直配向カーボンナノチューブを用いた電子デバイス
KR20070046602A (ko) * 2005-10-31 2007-05-03 삼성에스디아이 주식회사 전자 방출 소자, 이를 구비한 전자 방출 디스플레이 장치및 그 제조방법
US7964143B2 (en) 2007-06-20 2011-06-21 New Jersey Institute Of Technology Nanotube device and method of fabrication
US7736979B2 (en) * 2007-06-20 2010-06-15 New Jersey Institute Of Technology Method of forming nanotube vertical field effect transistor

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