JP2010262981A - Inter-camera calibration device for electronic component mounting device - Google Patents

Inter-camera calibration device for electronic component mounting device Download PDF

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JP2010262981A
JP2010262981A JP2009110779A JP2009110779A JP2010262981A JP 2010262981 A JP2010262981 A JP 2010262981A JP 2009110779 A JP2009110779 A JP 2009110779A JP 2009110779 A JP2009110779 A JP 2009110779A JP 2010262981 A JP2010262981 A JP 2010262981A
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calibration
recognition camera
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electronic component
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JP5457069B2 (en
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Kiyohiko Shinjo
清彦 新庄
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Juki Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inter-camera calibration device for an electronic component mounting device, which is adaptive to displacement due to temperature variation and secular change accompanying long-time use at any time, and allows calibration of high precision by reducing movements of an optical member and unnecessary calibration operations as much as possible. <P>SOLUTION: The inter-camera calibration device 20 includes: two optical members 21 and 22 that can move integrally with a component recognition camera 4 and have a half-mirror; and one calibration mark 23 which is recognized by two cameras 2 and 4 through the optical members 21 and 22. Then, the two optical members 21 and 22 are arranged such that when the inter-camera calibration device 20 moves to a predetermined position for the mark recognition camera 2 together with the component recognition camera 4, the total lengths of optical paths from the cameras 2 and 4 to the one calibration mark 23 have specified relation. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、基板上に電子部品を搭載する電子部品実装装置に係り、特に、電子部品を認識する部品認識カメラと、基板の認識マークを認識するマーク認識カメラとを有し、これら二つのカメラ相互の焦点高さのずれ量を校正するカメラ間校正装置に関するものである。   The present invention relates to an electronic component mounting apparatus for mounting an electronic component on a substrate, and in particular, includes a component recognition camera that recognizes an electronic component and a mark recognition camera that recognizes a recognition mark on a substrate, and these two cameras The present invention relates to an inter-camera calibration apparatus that calibrates the amount of shift in the focal height between each other.

まず、従来の、この種の電子部品実装装置について、図面を参照しつつ説明する。なお、図4は、従来の電子部品実装装置のカバー内部にある主要部の一例の外観斜視図であり、図5はその部品搭載ヘッドの部分の正面図である。
図4に示すように、この電子部品実装装置100は、電子部品(不図示)を供給可能に電子部品実装装置本体に設置されている電子部品供給装置9と、ワークである基板Kの搬入および搬出をする回路基板搬送路10とを備えている。
First, a conventional electronic component mounting apparatus of this type will be described with reference to the drawings. 4 is an external perspective view of an example of a main part inside the cover of the conventional electronic component mounting apparatus, and FIG. 5 is a front view of the component mounting head.
As shown in FIG. 4, the electronic component mounting apparatus 100 includes an electronic component supply apparatus 9 installed in the electronic component mounting apparatus main body so that an electronic component (not shown) can be supplied, And a circuit board conveyance path 10 for carrying out.

電子部品供給装置9の近傍には、部品吸着ノズル5が電子部品を吸着した状態において、吸着位置ずれを認識可能な部品認識カメラ4が電子部品実装装置本体に配設されている。この部品認識カメラ4は、基板Kの高さよりも下方に設置され、上向きに搭載する電子部品の下部を撮像できるようになっている。
回路基板搬送路10上には、基板Kが載置されるようになっている。基板Kには、自身の位置を認識させるための画像認識用の認識マーク(不図示)が付設されている。また、回路基板搬送路10の上方には部品吸着ノズル5が垂直方向に移動可能な機構(不図示)を備えた部品搭載ヘッド3が配置されている。
In the vicinity of the electronic component supply device 9, a component recognition camera 4 capable of recognizing a suction position shift in a state where the component suction nozzle 5 sucks the electronic component is disposed in the electronic component mounting apparatus main body. This component recognition camera 4 is installed below the height of the substrate K, and can capture the lower part of the electronic component mounted upward.
A substrate K is placed on the circuit board transport path 10. The substrate K is provided with a recognition mark (not shown) for image recognition for recognizing its own position. A component mounting head 3 having a mechanism (not shown) that allows the component suction nozzle 5 to move in the vertical direction is disposed above the circuit board conveyance path 10.

この部品搭載ヘッド3は、図5に示すように、電子部品を吸着する部品吸着ノズル5を有する(同図の例では、連続した4つの小型部品用ノズルと1つの大型部品用ノズルとを有している)。また、この部品搭載ヘッド3には基板Kの認識マークを認識するマーク認識カメラ2が下向きに付設されている(同図の例では左右2つのカメラを有する)。さらに、この例の部品搭載ヘッド3には光学センサ8が設置され、この光学センサ8によって、直方体等の比較的単純な形状でかつ小型な電子部品は部品吸着ノズル5が吸着し、その位置や角度などの状態を部品認識カメラ4を用いずに認識可能になっている。そして、部品搭載ヘッド3は、マーク認識カメラ2および部品吸着ノズル5と共に、基板K上などの必要な位置に、所定のプログラムに基づいて、図4に示す、X軸移動機構6およびY軸移動機構7によって適宜にX軸およびY軸方向に移動されるようになっている。   As shown in FIG. 5, the component mounting head 3 has a component suction nozzle 5 for sucking an electronic component (in the example shown in the figure, four continuous small component nozzles and one large component nozzle are provided. is doing). Further, a mark recognition camera 2 for recognizing the recognition mark on the substrate K is attached to the component mounting head 3 downward (in the example of the figure, there are two cameras on the left and right). Furthermore, an optical sensor 8 is installed in the component mounting head 3 of this example, and the optical sensor 8 attracts the component suction nozzle 5 to a relatively simple and small electronic component such as a rectangular parallelepiped. A state such as an angle can be recognized without using the component recognition camera 4. Then, the component mounting head 3 together with the mark recognition camera 2 and the component suction nozzle 5 are moved to a necessary position on the substrate K or the like based on a predetermined program, as shown in FIG. The mechanism 7 is appropriately moved in the X-axis and Y-axis directions.

以上の構成において、この電子部品実装装置100では、まず、基板Kが、部品搭載ヘッド3の可動範囲内となる回路基板搬送路10の所定の場所に搬入されて位置決めされる。次に、部品搭載ヘッド3が電子部品供給装置9から電子部品Bを吸着した後に、基板K上の予めプログラムされた位置に電子部品Bを搭載する。そして、部品搭載ヘッド3は部品吸着と搭載を繰返し行ない、予めプログラムされた位置に全ての電子部品Bが搭載された後、基板Kが、回路基板搬送路10より搬出される。   In the above configuration, in the electronic component mounting apparatus 100, first, the substrate K is carried into a predetermined place of the circuit board transport path 10 that is within the movable range of the component mounting head 3 and positioned. Next, after the component mounting head 3 sucks the electronic component B from the electronic component supply device 9, the electronic component B is mounted at a preprogrammed position on the substrate K. The component mounting head 3 repeatedly picks and mounts the components, and after all the electronic components B are mounted at positions programmed in advance, the substrate K is unloaded from the circuit board transport path 10.

ここで、電子部品の吸着から搭載までの間には、例えば次の二つの搭載方法がある。
第一の方法としては、部品搭載ヘッド3の部品吸着ノズル5によって電子部品を吸着し、光学センサ8によって吸着した電子部品の位置ずれの状態を認識し、そのずれ量を、マーク認識カメラ2によって予め取得した基板Kの位置ずれ量に基づいて補正して、基板K上の予めプログラムされた位置に当該電子部品を搭載する方法がある。
Here, there are, for example, the following two mounting methods between the suction and mounting of the electronic component.
As a first method, the electronic component is adsorbed by the component adsorbing nozzle 5 of the component mounting head 3, the position of the electronic component adsorbed by the optical sensor 8 is recognized, and the amount of deviation is detected by the mark recognition camera 2. There is a method in which the electronic component is mounted at a pre-programmed position on the substrate K by correcting based on the positional deviation amount of the substrate K acquired in advance.

また、第二の方法としては、部品搭載ヘッド3の部品吸着ノズル5によって電子部品を吸着し、部品認識カメラ4によって吸着した電子部品の位置ずれの状態を認識し、そのずれ量を、第一の方法同様に、マーク認識カメラ2によって予め取得した基板Kの位置ずれ量に基づいて補正して、基板K上の予めプログラムされた位置に当該電子部品を搭載する方法がある。なお、これら第一ないし第二の方法とは別に、マーク認識カメラ2自身の位置補正方法として、特許文献1に記載の技術のように、カメラ内部の光学装置の位置ずれを補正する技術も存在する。   As a second method, the electronic component is adsorbed by the component adsorbing nozzle 5 of the component mounting head 3, the position deviation state of the electronic component adsorbed by the component recognition camera 4 is recognized, and the deviation amount is set to the first amount. Similarly to the above method, there is a method in which the electronic component is mounted at a pre-programmed position on the substrate K by correcting based on the positional deviation amount of the substrate K acquired in advance by the mark recognition camera 2. In addition to these first and second methods, there is a technique for correcting the positional deviation of the optical device inside the camera, such as the technique described in Patent Document 1, as a method for correcting the position of the mark recognition camera 2 itself. To do.

ここで、電子部品の搭載に対しては高い位置精度の市場要求があり、その解決手段として、上記第一ないし第二の方法を基に、例えば以下の3つの従来技術が知られている。
例えば特許文献2に記載の技術では、電子部品を部品吸着ノズルに吸着して、その吸着した電子部品を光学センサと部品認識カメラで検出し、光学センサによる検出結果を部品認識カメラによる検出結果に基づいて補正を行なっている。
Here, there is a market demand for high positional accuracy for mounting electronic components. For example, the following three conventional techniques are known based on the first and second methods.
For example, in the technique described in Patent Document 2, an electronic component is adsorbed by a component adsorption nozzle, the adsorbed electronic component is detected by an optical sensor and a component recognition camera, and a detection result by the optical sensor is converted into a detection result by the component recognition camera. Correction is performed based on this.

また、例えば特許文献3に記載の技術では、部品認識カメラとマーク認識カメラの間に透明体に設けられた一つの校正マークを配置し、部品認識カメラとマーク認識カメラの焦点高さを同じ高さにした状態で、部品認識カメラとマーク認識カメラがそれぞれ校正マークを撮像することで補正を行なっている。
また、例えば特許文献4に記載の技術では、部品認識カメラとマーク認識カメラの焦点高さが異なる配置の場合に、撮像光路長設定手段を校正位置に移動可能に設け、45°反射のプリズムなどで垂直の光路を水平の光路に変更し、さらに、前記プリズムとは別の45°反射のプリズムなどを用いて、前記水平の光路を垂直の光路に変更し、一つの校正マークを部品認識カメラとマーク認識カメラによってそれぞれ撮像することで補正を行なっている。
Further, for example, in the technique described in Patent Document 3, one calibration mark provided on a transparent body is arranged between a component recognition camera and a mark recognition camera, and the focal heights of the component recognition camera and the mark recognition camera are the same. In this state, the component recognition camera and the mark recognition camera make corrections by imaging the calibration marks.
Further, for example, in the technique disclosed in Patent Document 4, when the component recognition camera and the mark recognition camera are arranged at different focal heights, the imaging optical path length setting means is provided movably to the calibration position, and a 45 ° reflection prism or the like. The vertical optical path is changed to a horizontal optical path, and the horizontal optical path is changed to a vertical optical path using a 45 ° -reflecting prism other than the prism, and one calibration mark is changed to a component recognition camera. Correction is performed by taking images with a mark recognition camera.

特開2008−270649号公報JP 2008-270649 A 特開平8−255999号公報JP-A-8-255999 特開平7−162200号公報Japanese Unexamined Patent Publication No. 7-162200 特開2005−032988号公報JP 2005-032988 A

しかしながら、特許文献2に記載の技術では、光学センサによる検出結果を部品認識カメラによる検出結果に基づいて補正可能とするものの、他方、光学センサとマーク認識カメラとの相互のずれ量を取得するには、治具部品を部品吸着ノズルに吸着し、撮像後には、この治具部品を返却する動作が必要になる。したがって、生産タクトを考慮すると生産中に光学センサとマーク認識カメラとのずれ量を取得することは困難である。また、その結果、温度変化による変位や長時間の使用による経時変化に随時に対応することが困難である。したがって、二つのカメラ(ないしセンサ)相互の焦点高さのずれ量を校正する上で不十分である。   However, in the technique described in Patent Document 2, the detection result by the optical sensor can be corrected based on the detection result by the component recognition camera. On the other hand, the mutual shift amount between the optical sensor and the mark recognition camera is acquired. Requires the jig part to be sucked by the part suction nozzle, and after the imaging, the jig part needs to be returned. Therefore, when the production tact is taken into account, it is difficult to acquire the amount of deviation between the optical sensor and the mark recognition camera during production. As a result, it is difficult to cope with displacement due to temperature changes and changes with time due to long-term use. Therefore, it is insufficient for calibrating the amount of shift in the focal height between the two cameras (or sensors).

また、特許文献3に記載の技術では、部品認識カメラとマーク認識カメラの焦点高さを同じ高さにした状態で、これら二つのカメラ相互のずれ量を認識する必要がある。そのため、二つのカメラの焦点高さを同じにするための移動動作の分だけ生産タクトが長くなるといった問題がある。
具体的には、電子部品を基板に搭載するには、まず、基板を固定し、搬出入させる装置の上側を通過させる必要がある。そのため、電子部品供給装置から基板に搭載する工程において、搭載する電子部品は基板の高さよりも上側で移動させなければならない。つまり、無駄な動作を無くして生産タクトを短縮するためには、部品認識カメラの焦点高さを、基板の高さよりも上方で移動させる電子部品の高さに設定する必要がある。
In the technique described in Patent Document 3, it is necessary to recognize the shift amount between these two cameras in a state where the focal heights of the component recognition camera and the mark recognition camera are the same. Therefore, there is a problem that the production tact becomes longer by the amount of the moving operation for making the two cameras have the same focal height.
Specifically, in order to mount an electronic component on a substrate, it is first necessary to pass the upper side of a device that fixes and carries the substrate. For this reason, in the process of mounting the electronic component on the substrate from the electronic component supply device, the electronic component to be mounted must be moved above the height of the substrate. In other words, in order to eliminate the useless operation and shorten the production tact, it is necessary to set the focus height of the component recognition camera to the height of the electronic component that is moved above the height of the substrate.

一方、マーク認識カメラの焦点高さは、基板の画像認識マークを認識するために、その焦点高さを基板の上面高さに合わせる必要がある。そのため、二つのカメラを同じ焦点高さに移動する構成であると、部品認識カメラの焦点高さをマーク認識カメラの高さに合わせる必要が校正の都度生じる。つまり、部品認識カメラにて搭載する電子部品を撮像する工程において、わざわざ低い位置に下げる無駄な動作が必要となるため、毎回の搭載に時間がかかり、生産タクトが長くなってしまう。   On the other hand, the focus height of the mark recognition camera needs to be adjusted to the height of the upper surface of the substrate in order to recognize the image recognition mark on the substrate. Therefore, if the two cameras are moved to the same focal height, it is necessary to adjust the focal height of the component recognition camera to the height of the mark recognition camera every time calibration is performed. That is, in the process of imaging the electronic component to be mounted by the component recognition camera, a wasteful operation for lowering the position to a low position is required, so that it takes time for each mounting and the production tact becomes long.

また、生産タクトが伸びないようにするために、部品認識カメラが電子部品を撮像する際、および校正マークを撮像する際それぞれに対応可能とするように、部品認識カメラを垂直方向に移動可能な移動手段を別途に設ける構成も考えられる。しかし、この場合は、部品認識カメラを垂直方向に移動させることにより、部品認識カメラの位置がずれてしまい、高い精度で電子部品を搭載することが困難となってしまうおそれがある。   In addition, in order to prevent production tact from extending, the component recognition camera can be moved in the vertical direction so that the component recognition camera can cope with each imaging of the electronic component and the calibration mark. A configuration in which moving means is separately provided is also conceivable. However, in this case, by moving the component recognition camera in the vertical direction, the position of the component recognition camera may be shifted, and it may be difficult to mount the electronic component with high accuracy.

これに対し、特許文献4に記載の技術は、校正位置に移動可能な撮像光路長設定手段を設けたので、特許文献3に記載の技術の問題を解決可能なものの、撮像光路を変更させるために必要なプリズムなど光学部材の設置位置が、搭載する電子部品を部品認識カメラで撮像する位置と同じ空間になる。そのため、この撮像光路長設定手段は、光学部材を校正位置に移動させる必要が生じている。したがって、この光学部材自体の移動により、光学部材の位置がずれてしまい、結果として校正マーク認識時の精度が低くなり、高い精度で電子部品を搭載することが困難となってしまうという問題がある。   On the other hand, the technique described in Patent Document 4 is provided with an imaging optical path length setting unit that can be moved to the calibration position. Therefore, although the problem of the technique described in Patent Document 3 can be solved, the imaging optical path is changed. The installation position of an optical member such as a prism required for the above is the same space as the position where the electronic component to be mounted is imaged by the component recognition camera. Therefore, the imaging optical path length setting means needs to move the optical member to the calibration position. Therefore, the movement of the optical member itself shifts the position of the optical member, resulting in a problem that the accuracy at the time of recognition of the calibration mark is lowered and it is difficult to mount the electronic component with high accuracy. .

そこで、本発明は、このような問題点に着目してなされたものであって、二つのカメラ相互の焦点高さのずれ量の校正を、温度変化による変位や長時間の使用による経時変化に随時に対応可能にするとともに、光学部材の移動や不要な校正動作を可及的に少なくして高い精度での校正を可能とし得る電子部品実装装置用カメラ間校正装置を提供することを目的としている。   Therefore, the present invention has been made paying attention to such a problem, and the calibration of the shift amount of the focal height between the two cameras can be changed to a change due to a temperature change or a change over time due to a long time use. An object is to provide an inter-camera calibration apparatus for an electronic component mounting apparatus that can be adapted at any time and can perform calibration with high accuracy by minimizing movement of optical members and unnecessary calibration operations as much as possible. Yes.

上記課題を解決するために、本発明は、電子部品の吸着位置ずれを認識する部品認識カメラと、基板の認識マーク位置を認識するマーク認識カメラとを有し、これら二つのカメラの焦点高さが異なるレイアウトをもつ電子部品実装装置に用いられ、前記二つのカメラ相互の焦点高さのずれ量を校正するカメラ間校正装置であって、当該カメラ間校正装置は、一つの校正マークと、前記マーク認識カメラに対向配置された第一の光学部材と、該第一の光学部材と前記校正マークとの間に配置された第二の光学部材とを備え、前記部品認識カメラが電子部品を認識可能な高さを維持した状態で、前記部品認識カメラと共に前記マーク認識カメラに対する所定の校正位置に移動可能に設けられており、前記第一の光学部材は、前記校正マーク側から前記マーク認識カメラ側への光路および前記認識マーク側から前記マーク認識カメラ側への光路をそれぞれ確保するとともに、前記第二の光学部材は、前記校正マーク側から前記第一の光学部材側への光路および前記電子部品側から前記部品認識カメラ側への光路をそれぞれ確保してなり、さらに、当該カメラ間校正装置が前記所定の校正位置に位置したときに、前記一つの校正マークおよび前記二つの光学部材は、前記部品認識カメラから前記校正マークまでの光路長が、搭載する電子部品から前記部品認識カメラまでの距離と同じになるように配置されるとともに、前記マーク認識カメラから前記校正マークまでの光路長が、前記マーク認識カメラから基板の認識マークまでの距離と同じになるように配置されていることを特徴としている。   In order to solve the above-mentioned problems, the present invention has a component recognition camera that recognizes a displacement position of an electronic component and a mark recognition camera that recognizes a recognition mark position on a board, and the focal heights of these two cameras. Is used for an electronic component mounting apparatus having a different layout, and is an inter-camera calibration apparatus that calibrates the amount of deviation of the focal height between the two cameras, the inter-camera calibration apparatus comprising one calibration mark, A first optical member disposed opposite to the mark recognition camera; and a second optical member disposed between the first optical member and the calibration mark, wherein the component recognition camera recognizes an electronic component. While maintaining a possible height, the component recognition camera is provided so as to be movable to a predetermined calibration position with respect to the mark recognition camera, and the first optical member is provided from the calibration mark side. An optical path to the mark recognition camera side and an optical path from the recognition mark side to the mark recognition camera side are secured, and the second optical member is connected from the calibration mark side to the first optical member side. An optical path and an optical path from the electronic component side to the component recognition camera side, respectively, and when the inter-camera calibration device is located at the predetermined calibration position, the one calibration mark and the two The optical member is arranged so that the optical path length from the component recognition camera to the calibration mark is the same as the distance from the electronic component to be mounted to the component recognition camera, and from the mark recognition camera to the calibration mark. The optical path length is arranged to be the same as the distance from the mark recognition camera to the recognition mark on the substrate. .

本発明に係る電子部品実装装置用カメラ間校正装置によれば、カメラ間校正装置が部品認識カメラと一体に移動可能であり、マーク認識カメラに対する所定の校正位置に移動したときに、第一の光学部材は、校正マーク側からマーク認識カメラ側への光路および認識マーク側からマーク認識カメラ側への光路をそれぞれ確保するとともに、第二の光学部材は、校正マーク側から第一の光学部材側への光路および電子部品側から部品認識カメラ側への光路をそれぞれ確保しているので、各カメラは、このカメラ間校正装置を介することによって、各カメラに対して二つの光学部材自体を移動させることなく、同じ一つの校正マークを撮像することができる。   According to the inter-camera calibration apparatus for an electronic component mounting apparatus according to the present invention, the inter-camera calibration apparatus is movable together with the component recognition camera, and the first camera is moved to a predetermined calibration position with respect to the mark recognition camera. The optical member secures an optical path from the calibration mark side to the mark recognition camera side and an optical path from the recognition mark side to the mark recognition camera side, and the second optical member is from the calibration mark side to the first optical member side. Since the optical path from the electronic component side to the component recognition camera side is secured, each camera moves the two optical members themselves with respect to each camera through the inter-camera calibration device. The same calibration mark can be imaged without any problem.

そして、部品認識カメラの高さは、電子部品を認識可能な高さが維持された状態で所定の校正位置に位置されており、当該カメラ間校正装置が所定の校正位置に位置したときに、一つの校正マークおよび二つの光学部材は、部品認識カメラから校正マークまでの光路長が、搭載する電子部品から部品認識カメラまでの距離と同じになるように配置されるとともに、マーク認識カメラから校正マークまでの光路長が、マーク認識カメラから基板の認識マークまでの距離と同じになるように配置されている。よって、このカメラ間校正装置が装備された電子部品実装装置は、二つのカメラによって第一および第二の光学部材を介して一つの校正マークを撮像して二つのカメラ相互の焦点高さのずれ量を認識することで、該ずれ量を、電子部品を基板に搭載する際に補正可能であり、二つのカメラ相互のずれ量を短い時間で取得できる上、上記従来の技術のように、校正のために高さを変えるような無駄な動作が不要なので、その後遅滞なく、通常の生産動作に移行することができる。   And the height of the component recognition camera is positioned at a predetermined calibration position in a state where the height capable of recognizing the electronic component is maintained, and when the inter-camera calibration device is positioned at the predetermined calibration position, One calibration mark and two optical members are arranged so that the optical path length from the component recognition camera to the calibration mark is the same as the distance from the mounted electronic component to the component recognition camera, and the calibration from the mark recognition camera. The optical path length to the mark is arranged to be the same as the distance from the mark recognition camera to the recognition mark on the substrate. Therefore, the electronic component mounting apparatus equipped with this inter-camera calibration apparatus captures one calibration mark via the first and second optical members by the two cameras and shifts the focal height between the two cameras. By recognizing the amount, the amount of displacement can be corrected when the electronic component is mounted on the board, and the amount of displacement between the two cameras can be acquired in a short time, and calibration can be performed as in the conventional technique described above. Therefore, useless operations such as changing the height are unnecessary, so that the normal production operation can be performed without delay.

したがって、本発明に係る電子部品実装装置用カメラ間校正装置によれば、二つのカメラ相互の焦点高さのずれ量の校正を、温度変化による変位や長時間の使用による経時変化に随時に対応可能にするとともに、光学部材の移動や不要な校正動作を可及的に少なくして高い精度での校正が可能である。   Therefore, according to the inter-camera calibration apparatus for an electronic component mounting apparatus according to the present invention, it is possible to calibrate the displacement amount of the focal height between the two cameras at any time according to a change due to a temperature change or a change with time due to long-term use. In addition, it is possible to perform calibration with high accuracy by minimizing movement of the optical member and unnecessary calibration operation as much as possible.

本発明に係るカメラ間校正装置を備えた電子部品実装装置の斜視図である。1 is a perspective view of an electronic component mounting apparatus including an inter-camera calibration apparatus according to the present invention. 本発明に係るカメラ間校正装置を説明する模式図である。It is a schematic diagram explaining the inter-camera calibration apparatus according to the present invention. 部品認識カメラとマーク認識カメラの位置の関係を説明するための模式図である。It is a schematic diagram for demonstrating the relationship of the position of a component recognition camera and a mark recognition camera. 従来の電子部品実装装置の斜視図である。It is a perspective view of the conventional electronic component mounting apparatus. 従来の電子部品実装装置の部品搭載ヘッドの一例の正面図である。It is a front view of an example of the component mounting head of the conventional electronic component mounting apparatus.

以下、本発明の一実施形態について、図面を適宜参照しつつ説明する。なお、上記図4および図5に示した従来の電子部品実装装置と同様の構成については、同一の符号を付すとともにその説明を適宜省略する。
図1に、本発明の一実施形態に係るカメラ間校正装置を装備した電子部品実装装置を示す。同図に示すように、この電子部品実装装置1は、電子部品(不図示)を供給可能に電子部品実装装置本体に設置されている電子部品供給装置9と、ワークである基板Kの搬入および搬出をする回路基板搬送路10とを備えている。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings as appropriate. In addition, about the structure similar to the conventional electronic component mounting apparatus shown in the said FIG.4 and FIG.5, the same code | symbol is attached | subjected and the description is abbreviate | omitted suitably.
FIG. 1 shows an electronic component mounting apparatus equipped with an inter-camera calibration apparatus according to an embodiment of the present invention. As shown in the figure, this electronic component mounting apparatus 1 includes an electronic component supply device 9 installed in the electronic component mounting apparatus main body so that an electronic component (not shown) can be supplied, And a circuit board conveyance path 10 for carrying out.

電子部品供給装置9の近傍には、電子部品を認識可能な部品認識カメラ4が電子部品実装装置本体に配設されている。この部品認識カメラ4は、図3に示すように、基板Kの高さよりも下方に設置され、上向きに搭載する電子部品Bの下部を撮像できるようになっている。
回路基板搬送路10上には、基板Kが載置されるようになっている。基板Kには、自身の位置を認識させるための画像認識用の認識マーク(不図示)が付設されている。また、回路基板搬送路10の上方には部品搭載ヘッド3が配置されている。
In the vicinity of the electronic component supply device 9, a component recognition camera 4 capable of recognizing the electronic component is disposed on the electronic component mounting apparatus main body. As shown in FIG. 3, the component recognition camera 4 is installed below the height of the substrate K, and can capture an image of the lower part of the electronic component B mounted upward.
A substrate K is placed on the circuit board transport path 10. The substrate K is provided with a recognition mark (not shown) for image recognition for recognizing its own position. A component mounting head 3 is disposed above the circuit board conveyance path 10.

この部品搭載ヘッド3は、電子部品を吸着する部品吸着ノズル5を有する。また、この部品搭載ヘッド3には基板Kの認識マークを認識するマーク認識カメラ2が下向きに付設されている。そして、部品搭載ヘッド3は、マーク認識カメラ2および部品吸着ノズル5と共に、基板K上などの必要な位置に、所定のプログラムに基づいて、X軸移動機構6およびY軸移動機構7によって適宜にX軸およびY軸方向に移動されるようになっている。   The component mounting head 3 has a component suction nozzle 5 that sucks electronic components. Further, a mark recognition camera 2 for recognizing the recognition mark on the board K is attached to the component mounting head 3 downward. The component mounting head 3 is appropriately moved to a necessary position on the substrate K together with the mark recognition camera 2 and the component suction nozzle 5 by an X-axis moving mechanism 6 and a Y-axis moving mechanism 7 based on a predetermined program. It is moved in the X-axis and Y-axis directions.

ここで、この部品搭載ヘッド3には、部品認識カメラ4にカメラ間校正装置20が装着されており、このカメラ間校正装置20が、部品認識カメラ4と一体に、上記X軸移動機構6およびY軸移動機構7によってX軸およびY軸方向に移動されるようになっている。
以下、このカメラ間校正装置20について詳しく説明する。
図2に、上記カメラ間校正装置20の模式図を示す。同図は、部品認識カメラ4と一体に移動可能に設けられた当該カメラ間校正装置20が、マーク認識カメラ2に対する所定の校正位置に移動した状態を模式的に示している。ここで、この所定の校正位置の高さは、部品認識カメラ4が電子部品Bの搭載が可能な高さが維持された高さである。
Here, an inter-camera calibration device 20 is mounted on the component recognition camera 4 in the component mounting head 3, and the inter-camera calibration device 20 is integrated with the component recognition camera 4 and the X-axis moving mechanism 6 and The Y-axis moving mechanism 7 moves in the X-axis and Y-axis directions.
Hereinafter, the inter-camera calibration apparatus 20 will be described in detail.
FIG. 2 is a schematic diagram of the inter-camera calibration apparatus 20. The figure schematically shows a state in which the inter-camera calibration device 20 provided so as to be movable integrally with the component recognition camera 4 has moved to a predetermined calibration position with respect to the mark recognition camera 2. Here, the height of the predetermined calibration position is the height at which the component recognition camera 4 can maintain the electronic component B.

詳しくは、このカメラ間校正装置20には、同図に示すように、第一の光学部材としてのプリズムミラー21と、第二の光学部材としてのキューブ型のビームスプラッタ22と、一つの校正マーク23とが内蔵されている。
プリズムミラー21とビームスプラッタ22は、入射光の光路の変更および透過をさせるために、その光の一部を反射し且つそれ以外を透過可能なハーフミラーを有しており、これにより、入光された光の半分を透過するとともに、残りの半分については、45°の反射が可能になっている。また、校正マーク23は、その内部に照明を有する照明装置の筐体壁面のピンホールからなる。つまり、照明装置内部の照明によってピンホールが照射されることで、二つのカメラ2,4の位置補正用の校正マーク23がつくられるようになっている。
Specifically, the inter-camera calibration apparatus 20 includes a prism mirror 21 as a first optical member, a cube-type beam splatter 22 as a second optical member, and one calibration mark, as shown in FIG. 23 is built in.
The prism mirror 21 and the beam splatter 22 have a half mirror that reflects a part of the light and transmits the other part in order to change and transmit the optical path of the incident light. The half of the transmitted light is transmitted, and the other half can be reflected by 45 °. Moreover, the calibration mark 23 consists of a pinhole on the wall surface of the housing of the lighting device having illumination therein. That is, the calibration mark 23 for correcting the position of the two cameras 2 and 4 is created by irradiating the pinhole with the illumination inside the illumination device.

ここで、このカメラ間校正装置20は、上記ビームスプラッタ22が、当該カメラ間校正装置20が前記所定の校正位置に位置したときに、部品認識カメラ4の位置、プリズムミラー21の位置および校正マーク23の位置のいずれをも移動させることなく、図2での、部品認識カメラ4から校正マーク23までの光路長(同図中のL1+H2)が、図3での、部品認識カメラ4から搭載する電子部品Bまでの距離DBと同じになる長さに設定されている。さらに、図2での、マーク認識カメラ2から校正マーク23までの光路合計長(同図中のL1+L2+H1)が、図3に示すマーク認識カメラ2から基板Kまでの距離DMと同じになる長さに設定されている。 Here, the inter-camera calibration apparatus 20 is configured such that the beam splatter 22 is positioned when the inter-camera calibration apparatus 20 is located at the predetermined calibration position, the position of the component recognition camera 4, the position of the prism mirror 21, and the calibration mark. The optical path length from the component recognition camera 4 to the calibration mark 23 in FIG. 2 (L1 + H2 in FIG. 2) is mounted from the component recognition camera 4 in FIG. 3 without moving any of the positions 23. It is set to the same to become length as the distance D B to the electronic component B. Further, the total optical path length from the mark recognition camera 2 to the calibration mark 23 (L1 + L2 + H1 in FIG. 2) in FIG. 2 is the same as the distance D M from the mark recognition camera 2 to the substrate K shown in FIG. Is set.

次に、この電子部品実装装置の動作、および作用・効果について説明する。
以上の構成において、この電子部品実装装置1では、基板Kが、部品搭載ヘッド3の可動範囲内となる回路基板搬送路10の所定の場所に搬入されて位置決めされる。次に、部品搭載ヘッド3が電子部品供給装置9から電子部品Bを吸着した後に、基板K上の予めプログラムされた位置に電子部品Bを搭載する。そして、部品搭載ヘッド3は部品吸着と搭載を繰返し行ない、予めプログラムされた位置に全ての電子部品Bが搭載された後、基板Kが、回路基板搬送路10より搬出される。
Next, the operation, action and effect of the electronic component mounting apparatus will be described.
With the above configuration, in the electronic component mounting apparatus 1, the board K is carried into a predetermined place of the circuit board transport path 10 that is within the movable range of the component mounting head 3 and positioned. Next, after the component mounting head 3 sucks the electronic component B from the electronic component supply device 9, the electronic component B is mounted at a preprogrammed position on the substrate K. The component mounting head 3 repeatedly picks and mounts the components, and after all the electronic components B are mounted at positions programmed in advance, the substrate K is unloaded from the circuit board transport path 10.

ここで、この電子部品実装装置1では、部品認識カメラ4とマーク認識カメラ2相互のずれ量を測定する際には、まず、マーク認識カメラ2を、図2に示す、部品認識カメラ4の上方の、二つのカメラ2,4の校正マーク認識用としてあらかじめ決められた所定の校正位置に移動する(動作1)。ここで、この所定の校正位置の高さは、部品認識カメラ4が電子部品Bの搭載が可能な高さが維持されている。   Here, in this electronic component mounting apparatus 1, when measuring the amount of deviation between the component recognition camera 4 and the mark recognition camera 2, first, the mark recognition camera 2 is positioned above the component recognition camera 4 shown in FIG. 2. The two cameras 2 and 4 are moved to a predetermined calibration position determined in advance for recognition of calibration marks (operation 1). Here, the height of the predetermined calibration position is maintained such that the electronic component B can be mounted on the component recognition camera 4.

次に、この所定の校正位置において、部品認識カメラ4は、プリズムミラー21およびビームスプラッタ22を介して校正マーク23を撮像する(動作2)。同様に、この所定の校正位置において、マーク認識カメラ2は、ビームスプラッタ22を介して、同じ一つの校正マーク23を撮像する(動作3)。
前記の(動作1)〜(動作3)により、二つのカメラ2,4は、同じ校正マーク23を撮像するため、二つのカメラ2,4のずれ量を測定することができる。なお、ずれ量の測定方法自体は、従来同様であるため説明を省略する。これにより、このカメラ間校正装置20を備えた電子部品実装装置1によれば、電子部品を搭載する生産時に、二つのカメラ2,4のずれ量を補正することで高精度の搭載が可能になる。
Next, at this predetermined calibration position, the component recognition camera 4 images the calibration mark 23 via the prism mirror 21 and the beam splatter 22 (operation 2). Similarly, at this predetermined calibration position, the mark recognition camera 2 images the same calibration mark 23 via the beam splatter 22 (operation 3).
By the above (Operation 1) to (Operation 3), the two cameras 2 and 4 capture the same calibration mark 23, so that the shift amount between the two cameras 2 and 4 can be measured. Note that the measurement method of the deviation amount itself is the same as the conventional method, and thus the description is omitted. Thereby, according to the electronic component mounting apparatus 1 provided with the inter-camera calibration device 20, it is possible to mount with high accuracy by correcting the amount of deviation between the two cameras 2 and 4 during the production of mounting the electronic component. Become.

このように、この電子部品実装装置1によれば、部品認識カメラ4とマーク認識カメラ2は、カメラ間校正装置20のプリズムミラー21およびビームスプラッタ22を介して一つの校正マーク23を撮像して二つのカメラ2,4相互の焦点高さのずれ量を認識することで、該ずれ量を、電子部品Bを基板Kに搭載する際に随時に補正可能であり、二つのカメラ2,4相互のずれ量を短い時間で取得できる。   As described above, according to the electronic component mounting apparatus 1, the component recognition camera 4 and the mark recognition camera 2 image one calibration mark 23 through the prism mirror 21 and the beam splatter 22 of the inter-camera calibration apparatus 20. By recognizing the shift amount of the focal height between the two cameras 2 and 4, the shift amount can be corrected at any time when the electronic component B is mounted on the substrate K. Can be acquired in a short time.

つまり、このカメラ間校正装置20によれば、カメラ間校正装置20が部品認識カメラ4と一体に移動可能であり、マーク認識カメラ4に対する所定の校正位置に移動したときに、プリズムミラー21は、校正マーク23側からマーク認識カメラ4側への光路および基板の認識マーク側からマーク認識カメラ4側への光路をそれぞれ確保するとともに、ビームスプラッタ22は、校正マーク23側からプリズムミラー21側への光路および電子部品B側から部品認識カメラ4側への光路をそれぞれ確保しているので、各カメラ2,4は、このカメラ間校正装置20を介することによって、各カメラ2,4に対して二つの光学部材21,22自体を移動させることなく、同じ校正マーク23を同時に撮像することができる。   That is, according to the inter-camera calibration device 20, the inter-camera calibration device 20 can move integrally with the component recognition camera 4, and when the inter-camera calibration device 20 moves to a predetermined calibration position with respect to the mark recognition camera 4, the prism mirror 21 An optical path from the calibration mark 23 side to the mark recognition camera 4 side and an optical path from the recognition mark side of the substrate to the mark recognition camera 4 side are ensured, and the beam splatter 22 is provided from the calibration mark 23 side to the prism mirror 21 side. Since the optical path and the optical path from the electronic component B side to the component recognition camera 4 side are respectively secured, each camera 2, 4 is connected to each camera 2, 4 via the inter-camera calibration device 20. The same calibration mark 23 can be imaged simultaneously without moving the two optical members 21 and 22 themselves.

そのため、基板Kの搬出入の最中など生産タクトを損なわないタイミングで、マーク認識カメラ2を、部品認識カメラ4の上方の所定の校正位置に移動するだけで、該二つのカメラ2,4のずれ量を測定可能である。したがって、短時間で該ずれ量の取得が可能であり、基板Kを、搬出入時間を利用してずれ量を取得できるため、ずれ量の経時変化に随時に対応でき、常に高精度の部品搭載を確保できる。   Therefore, the mark recognition camera 2 is moved to a predetermined calibration position above the component recognition camera 4 at a timing that does not impair the production tact such as during the loading / unloading of the substrate K. The amount of deviation can be measured. Therefore, the amount of deviation can be acquired in a short time, and the amount of deviation can be acquired using the loading / unloading time of the substrate K. Therefore, it is possible to cope with changes in the amount of deviation over time, and high-precision component mounting is always possible. Can be secured.

また、この所定の校正位置は、部品認識カメラ4が電子部品Bの搭載が可能な高さが維持されており、この所定の校正位置にカメラ間校正装置20が位置したときに、一つの校正マーク23および二つの光学部材21,22は、部品認識カメラ4から校正マーク23までの光路長(L1+H2)が、搭載する電子部品Bから部品認識カメラ4までの距離DBと同じになるように配置されるとともに、マーク認識カメラ2から校正マーク23までの光路長(L1+L2+H1)が、マーク認識カメラ2から基板の認識マークまでの距離DMと同じになるように配置されているので、基板Kに搭載する電子部品を部品認識カメラ4で撮像する際に、その電子部品をマーク認識カメラ2の焦点高さまで下げる必要もない。そのため、生産タクトを可及的に短くすることができる。また、部品認識カメラ4自体を移動させる必要もないので、高い位置精度で補正量の取得が可能であり、これにより高い精度で電子部品Bを搭載できる。また、マーク認識カメラ2側に校正マーク23(カメラ間校正装置20)が固定されているので、高い位置精度で補正量の取得が可能であり、高い精度で電子部品を搭載できる。 The predetermined calibration position is maintained at a height at which the component recognition camera 4 can mount the electronic component B. When the inter-camera calibration device 20 is located at the predetermined calibration position, one calibration is performed. mark 23 and two optical members 21 and 22, so that the optical path length from the component recognition camera 4 to the calibration mark 23 (L1 + H2) is equal to the distance D B from the electronic component B is mounted to the component recognition camera 4 together are arranged, the optical path length from the mark recognition camera 2 to the calibration mark 23 (L1 + L2 + H1) is since it is arranged to be the same as the distance D M from the mark recognition camera 2 to the recognition mark of the substrate, the substrate K When the electronic component mounted on the camera is imaged by the component recognition camera 4, it is not necessary to lower the electronic component to the focus height of the mark recognition camera 2. Therefore, the production tact can be shortened as much as possible. Further, since it is not necessary to move the component recognition camera 4 itself, the correction amount can be acquired with high positional accuracy, and thus the electronic component B can be mounted with high accuracy. Further, since the calibration mark 23 (inter-camera calibration device 20) is fixed on the mark recognition camera 2 side, the correction amount can be acquired with high positional accuracy, and electronic components can be mounted with high accuracy.

なお、本発明に係る電子部品実装装置用カメラ間校正装置は、上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しなければ種々の変形が可能である。
例えば、上記実施形態では、第一の光学部材として、プリズムミラー21を用いた例で説明したが、これに限らず、プリズムミラー以外の透明体にハーフミラー処理を施すことで同様の効果が得られる。
The inter-camera calibration apparatus for an electronic component mounting apparatus according to the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the present invention.
For example, in the above-described embodiment, the example in which the prism mirror 21 is used as the first optical member has been described. However, the present invention is not limited thereto, and a similar effect can be obtained by performing a half mirror process on a transparent body other than the prism mirror. It is done.

また、例えば上記実施形態では、一つの校正マーク23が照明装置に固定されたピンホールによってつくられている例で説明したが、これに限らず、例えば、照明装置はそのままで、校正マーク23のみを照明装置とは離隔して照明装置の外部の光路上に設けることでマーク認識カメラ2の同軸落射照明として使用することができる。   Further, for example, in the above-described embodiment, an example in which one calibration mark 23 is formed by a pinhole fixed to the illumination device is described. However, the present invention is not limited to this. For example, the illumination device remains as it is and only the calibration mark 23 is used. Can be used as coaxial epi-illumination of the mark recognition camera 2 by being provided on the optical path outside the illuminating device apart from the illuminating device.

1 電子部品実装装置
2 マーク認識カメラ
3 部品搭載ヘッド
4 部品認識カメラ
5 部品吸着ノズル
6 X軸移動機構
7 Y軸移動機構
8 光学センサ
9 電子部品供給装置
10 回路基板搬送路
20 カメラ間校正装置
21 プリズムミラー(第一の光学部材)
22 ビームスプラッタ(第二の光学部材)
23 校正マーク
B 電子部品
K 基板
DESCRIPTION OF SYMBOLS 1 Electronic component mounting apparatus 2 Mark recognition camera 3 Component mounting head 4 Component recognition camera 5 Component adsorption nozzle 6 X-axis movement mechanism 7 Y-axis movement mechanism 8 Optical sensor 9 Electronic component supply apparatus 10 Circuit board conveyance path 20 Inter-camera calibration apparatus 21 Prism mirror (first optical member)
22 Beam splatter (second optical member)
23 Calibration mark B Electronic component K Substrate

Claims (1)

電子部品を認識する部品認識カメラ4と、基板Mの認識マークを認識するマーク認識カメラ2とを有し、これら二つのカメラの焦点高さが異なるレイアウトをもつ電子部品実装装置に用いられ、前記二つのカメラ相互の焦点高さのずれ量を校正するカメラ間校正装置20であって、
当該カメラ間校正装置20は、一つの校正マーク23と、前記マーク認識カメラ2に対向配置された第一の光学部材21と、該第一の光学部材と前記校正マーク23との間に配置された第二の光学部材22とを備え、前記部品認識カメラ4が電子部品を認識可能な高さを維持した状態で、前記部品認識カメラ4と共に前記マーク認識カメラ2に対する所定の校正位置に移動可能に設けられており、
前記第一の光学部材21は、前記校正マーク23側から前記マーク認識カメラ2側への光路および前記認識マーク側から前記マーク認識カメラ側への光路をそれぞれ確保するとともに、前記第二の光学部材22は、前記校正マーク23側から前記第一の光学部材21側への光路および前記電子部品側から前記部品認識カメラ側4への光路をそれぞれ確保してなり、
さらに、当該カメラ間校正装置20が前記所定の校正位置に位置したときに、前記一つの校正マーク23および前記二つの光学部材21,22は、前記部品認識カメラから前記校正マーク23までの光路長が、搭載する電子部品から前記部品認識カメラまでの距離と同じになるように配置されるとともに、前記マーク認識カメラ2から前記校正マーク23までの光路長が、前記マーク認識カメラ2から基板の認識マークまでの距離と同じになるように配置されていることを特徴とする電子部品実装装置用カメラ間校正装置20。
The component recognition camera 4 for recognizing an electronic component and the mark recognition camera 2 for recognizing a recognition mark on the board M are used in an electronic component mounting apparatus having a layout in which the focal heights of these two cameras are different from each other. An inter-camera calibration device 20 that calibrates the amount of deviation in the focal height between two cameras,
The inter-camera calibration device 20 is arranged between one calibration mark 23, a first optical member 21 arranged to face the mark recognition camera 2, and between the first optical member and the calibration mark 23. The second optical member 22 and the component recognition camera 4 can move to a predetermined calibration position with respect to the mark recognition camera 2 together with the component recognition camera 4 while maintaining a height at which the component recognition camera 4 can recognize electronic components. It is provided in
The first optical member 21 secures an optical path from the calibration mark 23 side to the mark recognition camera 2 side and an optical path from the recognition mark side to the mark recognition camera side, and the second optical member. 22 respectively secures an optical path from the calibration mark 23 side to the first optical member 21 side and an optical path from the electronic component side to the component recognition camera side 4;
Further, when the inter-camera calibration device 20 is located at the predetermined calibration position, the one calibration mark 23 and the two optical members 21 and 22 are arranged so that the optical path length from the component recognition camera to the calibration mark 23 is increased. Is arranged to be the same as the distance from the electronic component to be mounted to the component recognition camera, and the optical path length from the mark recognition camera 2 to the calibration mark 23 is the recognition of the substrate from the mark recognition camera 2 An inter-camera calibration apparatus 20 for an electronic component mounting apparatus, which is disposed so as to have the same distance as a mark.
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KR101779020B1 (en) * 2012-03-22 2017-09-18 한화테크윈 주식회사 Method for mounting components
CN114415464A (en) * 2021-12-30 2022-04-29 歌尔光学科技有限公司 Optical axis calibration device and system

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JP2008270649A (en) * 2007-04-24 2008-11-06 Juki Corp Surface mounting equipment, and camera position correction method thereof

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2008270649A (en) * 2007-04-24 2008-11-06 Juki Corp Surface mounting equipment, and camera position correction method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101779020B1 (en) * 2012-03-22 2017-09-18 한화테크윈 주식회사 Method for mounting components
CN114415464A (en) * 2021-12-30 2022-04-29 歌尔光学科技有限公司 Optical axis calibration device and system
CN114415464B (en) * 2021-12-30 2024-03-08 歌尔光学科技有限公司 Optical axis calibration device and system

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