JP2010237200A5 - - Google Patents
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- JP2010237200A5 JP2010237200A5 JP2010054436A JP2010054436A JP2010237200A5 JP 2010237200 A5 JP2010237200 A5 JP 2010237200A5 JP 2010054436 A JP2010054436 A JP 2010054436A JP 2010054436 A JP2010054436 A JP 2010054436A JP 2010237200 A5 JP2010237200 A5 JP 2010237200A5
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- sample
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- 238000000034 method Methods 0.000 claims 16
- 238000010894 electron beam technology Methods 0.000 claims 10
- 230000003287 optical effect Effects 0.000 claims 10
- 230000001678 irradiating effect Effects 0.000 claims 5
- 238000013507 mapping Methods 0.000 claims 3
- 239000002131 composite material Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 238000001878 scanning electron micrograph Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010054436A JP5662039B2 (ja) | 2009-03-12 | 2010-03-11 | 試料観察方法、試料検査方法、および試料観察装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009059206 | 2009-03-12 | ||
JP2009059206 | 2009-03-12 | ||
JP2010054436A JP5662039B2 (ja) | 2009-03-12 | 2010-03-11 | 試料観察方法、試料検査方法、および試料観察装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014246164A Division JP2015062200A (ja) | 2009-03-12 | 2014-12-04 | 試料観察方法及び試料検査方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010237200A JP2010237200A (ja) | 2010-10-21 |
JP2010237200A5 true JP2010237200A5 (enrdf_load_stackoverflow) | 2013-04-11 |
JP5662039B2 JP5662039B2 (ja) | 2015-01-28 |
Family
ID=43091621
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010054436A Active JP5662039B2 (ja) | 2009-03-12 | 2010-03-11 | 試料観察方法、試料検査方法、および試料観察装置 |
JP2014246164A Pending JP2015062200A (ja) | 2009-03-12 | 2014-12-04 | 試料観察方法及び試料検査方法 |
JP2016115096A Pending JP2016189335A (ja) | 2009-03-12 | 2016-06-09 | 試料観察方法及び試料観察装置 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014246164A Pending JP2015062200A (ja) | 2009-03-12 | 2014-12-04 | 試料観察方法及び試料検査方法 |
JP2016115096A Pending JP2016189335A (ja) | 2009-03-12 | 2016-06-09 | 試料観察方法及び試料観察装置 |
Country Status (1)
Country | Link |
---|---|
JP (3) | JP5662039B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5963453B2 (ja) | 2011-03-15 | 2016-08-03 | 株式会社荏原製作所 | 検査装置 |
JP6294130B2 (ja) * | 2014-04-04 | 2018-03-14 | 株式会社荏原製作所 | 検査装置 |
US10103004B2 (en) * | 2015-07-02 | 2018-10-16 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics |
US11538657B2 (en) | 2018-10-19 | 2022-12-27 | Hitachi High-Tech Corporation | Alignment system and seal for positional alignment |
CN118502306B (zh) * | 2024-05-23 | 2025-01-03 | 乳山市东方硅胶有限公司 | 一种硅胶颗粒生产设备控制方法及系统 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8030A (en) * | 1851-04-08 | Celia b | ||
JP2003173756A (ja) * | 2001-12-05 | 2003-06-20 | Ebara Corp | 電子線装置及び該装置を用いたデバイス製造方法 |
JP2004363085A (ja) * | 2003-05-09 | 2004-12-24 | Ebara Corp | 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法 |
JP2006156134A (ja) * | 2004-11-30 | 2006-06-15 | Hitachi Ltd | 反射結像型電子顕微鏡 |
JP4751635B2 (ja) * | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
JP4287850B2 (ja) * | 2005-10-14 | 2009-07-01 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム応用装置 |
JP4825530B2 (ja) * | 2006-02-06 | 2011-11-30 | 株式会社日立ハイテクノロジーズ | パターン欠陥検査方法および装置 |
JP4870450B2 (ja) * | 2006-02-27 | 2012-02-08 | 株式会社日立ハイテクノロジーズ | 検査装置、および検査方法 |
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2010
- 2010-03-11 JP JP2010054436A patent/JP5662039B2/ja active Active
-
2014
- 2014-12-04 JP JP2014246164A patent/JP2015062200A/ja active Pending
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2016
- 2016-06-09 JP JP2016115096A patent/JP2016189335A/ja active Pending