JP2010208010A - Traverse control method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a traverse control technique capable of following a large change of winding pitch of a wire to prevent removal and disconnection of the wire. <P>SOLUTION: In a traverse device (1), a target position of the wire (3) is made a direction right-angled to an axial direction of a reel (4) between the reel (4) and a traverse roller (5) in a process for winding the wire (3) of the reel (4) of a wire saw (2) on the traverse roller (5) and a tension roller (14) and reciprocatively moving the traverse roller (5) in the axial direction of the reel (4). Reference resultant force (F1) of the wire (3) is detected at a position of the tension roller (14). Fluctuation resultant force (F2) based on displacement from the target position of the wire (3) is detected at a position of the traverse roller (5). In the traverse device (1), reciprocatively moving speed (V) of the traverse roller (5) is controlled based on fluctuation of a difference (ΔF) between the reference resultant force (F1) and the fluctuation resultant force (F2). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to a method and apparatus for controlling the moving speed of a traverse roller in a wire traverse device for a wire saw.

The reel on the delivery side is provided with the wires in an aligned winding state in order to supply the wire to the wire saw. The wire is supplied to the wire saw cutting position from the feeding-side reel through the feeding-side traverse device, and after cutting a workpiece such as a semiconductor at the cutting position, it is aligned with the winding-side reel through the winding-side traverse device. It is wound up as a wound state.

Thus, the traverse device is provided on both the reel on the sending side and the reel on the take-up side, and at a position close to each reel, the traverse roller is transverse to the traveling direction of the wire, in other words, By reciprocating in the axial direction of the reel, the wire is fed from the reel on the feeding side to the wire saw while maintaining the wire in a direction perpendicular to the axial direction of each reel, and the wire from the wire saw is fed on the winding side. Let the reel wind up.

In particular, when the wire winding is not accurate in the reel on the delivery side, a deviation occurs between the wire delivery position and the traverse roller position by traverse numerical control, and the wire delivery position and the traverse roller on the delivery reel. Will be out of sync with the reciprocal movement. For this reason, speed correction control is indispensable for the reciprocating movement of the traverse roller.

Patent Document 1 and Patent Document 2 disclose a touch roller type traverse control technique. The control technology arranges a pair of touch rollers so that the wire is sandwiched near the reel, and corrects the reciprocating speed of the traverse guide roller according to the contact between one of the touch rollers and the wire. The position of the traverse guide roller is made to follow the position of the wire.

In the conventional touch roller type traverse control, speed correction control is not executed until a wire comes into contact with any of the touch rollers. When the winding pitch of the wire is greatly out of order, the traverse guide roller cannot quickly follow the change in the large winding pitch due to a delay in the control system, so that the wire comes off from the guide roller or the wire is disconnected. There was a problem.

JP-A-6-297320 Japanese Patent Laid-Open No. 7-237816

Therefore, an object of the present invention is to provide a traverse control technique that can follow the drawbacks of the prior art, that is, a large change in the winding pitch of the wire, and to prevent the wire from being disconnected or disconnected.

In the traverse control method of the present invention, the wire (3) of the reel (4) for the wire saw (2) is wound around the traverse roller (5) and the tension roller (14), and the traverse roller (5 ) In the process of reciprocating in the axial direction of the reel (4), the target position of the wire (3) is perpendicular to the axial direction of the reel (4) between the reel (4) and the traverse roller (5). In the traverse device (1), the reference resultant force (F1) of the wire (3) is detected at the position of the tension roller (14) and the wire (3) is displaced from the target position at the position of the traverse roller (5). And the reciprocating speed (V) of the traverse roller (5) is controlled based on the fluctuation of the difference (ΔF) between the reference resultant force (F1) and the changing resultant force (F2). Yo It is to (claim 1).

In the traverse control method described above, the correction speed (ΔV) is obtained based on the fluctuation of the difference (ΔF) between the reference resultant force (F1) and the fluctuation resultant force (F2), and the speed of reciprocation of the traverse roller (5) ( V) is calculated by adding and subtracting the correction speed (ΔV) to the reference speed (V1) of the reciprocating movement of the traverse roller (5) (Claim 2).

Further, the traverse control device (10) of the present invention winds the wire (3) of the reel (4) for the wire saw (2) around the traverse roller (5) and the tension roller (14), and the traverse roller (5). In the process of reciprocating in the axial direction of the reel (4), the target position of the wire (3) is perpendicular to the axial direction of the reel (4) between the reel (4) and the traverse roller (5). In the traverse device (1), the reference resultant force detector (11) for detecting the reference resultant force (F1) of the wire (3) at the position of the tension roller (14), and the wire (3) at the position of the traverse roller (5). A fluctuation resultant force detector (12) for detecting a fluctuation resultant force (F2) based on a displacement from the target position, and a traverse roller (based on a difference (ΔF) between the reference resultant force (F1) and the fluctuation resultant force (F2)) Obtain a speed (V) of the reciprocating movement of), it has obtained the speed controller providing a speed command to the traverse motor (6) according to the speed (V) and (13) (claim 3).

In the traverse control device (10), the speed controller (13) sets the reference speed (V1) for reciprocal movement, and the fluctuation of the difference (ΔF) between the reference resultant force (F1) and the variable resultant force (F2). The correction speed (ΔV) is obtained based on the above, and the reciprocating speed (V) of the traverse roller (5) is calculated by adding or subtracting the correction speed (ΔV) to the reference speed (V1).

In the traverse control device (10), the straight path of the wire (3) is defined as one section, the tension roller (14) is disposed at one end of the one section, and the reference resultant force detector (11) The traverse roller (5) is installed at the other end of the one section, and the fluctuation resultant force detector (12) is installed at the position of the traverse roller (5). Claim 5).

In the traverse control device (10), the winding angle of the wire (3) at the position of the traverse roller (5) and the winding angle of the wire (3) at the position of the tension roller (14) are equal angle values. (Claim 6).

In the traverse control device (10), the roller shaft (7) of the traverse roller (5) is perpendicular to the axial direction of the reel (4).

In the traverse control device (10), the roller shaft (7) of the traverse roller (5) is held by the swing arm (9), and the swing arm (9) is in the axial direction of the reel (4). Are pivotably supported by a parallel pivot shaft (8).

According to the traverse control method of the present invention, in the traverse device (1), the reference resultant force (F1) of the wire (3) is detected at the position of the tension roller (14), and the wire is detected at the position of the traverse roller (5). The variation resultant force (F2) based on the displacement from the target position in (3) is detected, and the traverse roller (5) reciprocates based on the variation in the difference (ΔF) between the reference resultant force (F1) and the variation resultant force (F2). Therefore, the displacement of the wire (3) from the target position can be grasped as a continuous fluctuation value of the resultant force value at the position of the traverse roller (5). This makes it possible for the traverse roller (5) to follow even a large change in winding pitch, to increase the allowable range of the winding pitch of the wire (3), to remove the wire (3), to break the wire (3), etc. The problem is eliminated, and the reliability of traveling of the wire (3) with the wire saw (2) is improved (claim 1).

Addition / subtraction to the reference speed (V1) of the reciprocating movement of the traverse roller (5) using the correction speed (ΔV) obtained based on the change in the difference (ΔF) between the reference resultant force (F1) and the variable resultant force (F2) Since the speed (V) of the reciprocating movement of the traverse roller (5) is calculated, there is no significant change in the correction speed (ΔV) as the fluctuation, and the large fluctuation in the speed (V) can be suppressed and the speed control is stable. Thus, the responsiveness is also improved (claim 2).

In addition, according to the traverse control device (10) according to the present invention, the displacement of the wire (3) from the target position can be continuously grasped as the fluctuation resultant force (F2), and thus the traverse roller ( 5) can be followed, and the allowable range of the winding pitch of the wire (3) can be increased, and there are no problems such as disconnection of the wire (3), disconnection of the wire (3), and the wire (3 in the wire saw (2). ) Traveling reliability is improved, and the speed of the reciprocating movement of the traverse roller (5) is adjusted by a simple configuration using the reference resultant force detector (11), the variable resultant force detector (12), and the speed controller (13). Therefore, optimal control can be realized easily and inexpensively (Claim 3).

In the traverse control device (10), the reciprocating speed (V) of the traverse roller (5) is calculated by adding or subtracting the correction speed (ΔV) as a fluctuation to the constant reference speed (V1) of the reciprocating movement. Thus, there is no significant change in the correction speed (ΔV) as the fluctuation, the large fluctuation in the speed (V) is suppressed, the speed control of the speed (V) becomes stable, and the control responsiveness is improved. ).

In the traverse control device (10), the tension roller (14) and the reference resultant force detector (11) are installed on one end side of one section of the linear path of the wire (3), and on the other end side of the one section. Since the traverse roller (5) and the fluctuation resultant force detector (12) are installed, there is almost no change in the tension of the wire (3) at both ends of one section. As a result, the measurement of the reference resultant force (F1) and the fluctuation resultant force (F2) Sometimes, the detection error due to the difference in tension at both ends of one section does not appear, so the speed control accuracy is improved.

In the traverse control device (10), when the winding angle of the wire (3) at the position of the traverse roller (5) and the position of the tension roller (14) is set to be equal, a reference resultant force detector ( Since the difference (ΔF) is obtained by comparing the output of 11) and the output of the fluctuation resultant force detector (12) as they are without conversion, the signal processing becomes easy (Claim 6).

In the traverse control device (10), when the roller shaft (7) of the traverse roller (5) is in a direction perpendicular to the axial direction of the reel (4), the direction of the groove of the traverse roller (5) is the reel ( 4) Since the direction of displacement of the wire (3) coincides with the above, even if the wire (3) is slightly displaced, the wire (3) does not come off from the traverse roller (5), and there is little disconnection. (Claim 7).

In the traverse control device (10), the roller shaft (7) of the traverse roller (5) is held by the swing arm (9), and the swing arm (9) is parallel to the axial direction of the reel (4). When the winding diameter of the wire (3) on the reel (4) is changed, the swing arm is configured to support the reciprocating slider (17) by a swinging shaft (8). Since the groove direction of the traverse roller (5) always coincides with the direction of the wire (3) due to the swing of (9), the wire (3) is surely detached due to a change in the winding diameter of the wire (3). This can be prevented (claim 8).

It is a front view of the traverse device for wire saws which is a premise of the present invention. It is a top view of the support part of a traverse roller in the traverse device for wire saws used as the premise of the present invention. It is a block diagram of the traverse control device concerning the present invention. It is explanatory drawing of the control principle in the target position of a wire. It is explanatory drawing of the control principle at the time of driving | running | working of the + direction of a wire. It is explanatory drawing of the control principle at the time of driving | running | working of the-direction of a wire. It is explanatory drawing of the other measurement example of reference | standard resultant force. It is explanatory drawing of the other measurement example of reference | standard resultant force. It is explanatory drawing of the other measurement example of reference | standard resultant force. It is explanatory drawing of the other example of a measurement of reference | standard resultant force.

FIG. 1 shows the traverse device 1 in relation to a wire saw 2 to be incorporated. The traverse device 1 is provided on the winding side of the wire 3 in addition to the feeding side of the wire 3 with respect to the wire saw 2.

In FIG. 1, in order to supply the wire 3 to the wire saw 2, the delivery side traverse device 1 stores the wire 3 wound around the delivery side reel 4, pulls out the wire 3 from the reel 4, and has a groove. After being wound around the traverse roller 5, it is guided in the direction of the wire saw 2 via a grooved tension roller 14, a grooved dancer roller 15, and one or more grooved guide rollers 18. The wire saw 2 cuts the workpiece with the traveling wire 3. Thereafter, the wire 3 is guided to the winding side from one or more grooved guide rollers 18, and the grooved dancer roller 15, the grooved tension roller 14, and the grooved side of the winding side traverse device 1. The traverse roller 5 passes through the reel 4 on the take-up side.

In the illustrated example, the traverse device 1 on the sending side and the traverse device 1 on the take-up side have the same configuration. Therefore, as described above, the winding side traverse device 1 is also denoted by the same reference numerals as those of the sending side traverse device 1, and the following description is made on the particularly important sending side traverse device 1, A description of the traverse device 1 on the take side will be omitted as appropriate.

The reel 4 on the delivery side is rotatably supported by a support shaft 19 of the frame 20. At the time of feeding, the reel 4 is rotated by pulling out the wire 3 or, if necessary, actively driving in the feeding direction while maintaining the tension of the wire 3 at a predetermined value by a driving motor (not shown). Is done by.

The traverse roller 5 is reciprocated in the lateral direction with respect to the traveling direction of the wire 3 by the traverse motor 6 and the rotation / reciprocating linear motion converting means 16, in other words, in the axial direction of the reel 4. The wire 3 is maintained at the target position with the roller 5. Here, the target position of the wire 3 is set as a position where the adjacent wire 3 does not interfere with the position of the reel 4 and does not rub, that is, a direction perpendicular to the axial direction of the reel 4.

The rotation / reciprocating linear motion converting means 16 is actually constituted by a feed screw type linear motion unit. For this reason, the traverse motor 6 has a predetermined rotation speed applied to the slider 17 to be driven by changing the rotation direction, a constant rotation speed or a change in rotation speed with respect to the feed screw type linear motion unit as the rotation / reciprocating linear motion conversion means 16. Give reciprocal movement.

The rotation / reciprocating linear motion conversion means 16 can also be configured as a slider crank type unit. When configured as the above-described slider crank type unit, the traverse motor 6 drives the crank in the same rotational direction, and gives a predetermined linear reciprocating motion to the slider 17 by a link of the rotation of the crank.

In addition to FIG. 1, FIG. 2 shows a support example of the traverse roller 5. In order to support the traverse roller 5, the slider 17 holds one end of the swing arm 9 by a swing shaft 8 parallel to the axial direction of the reel 4 so that the swing arm 9 can swing. The traverse roller 5 is rotatably supported at the other end by a roller shaft 7 which is preferably perpendicular to the axial direction of the reel 4 and does not intersect therewith. It should be noted that the roller shaft 7 of the traverse roller 5 is directly attached to the detecting portion of the fluctuation resultant force detector 12 attached to the swing arm 9, or is swingable in a state displaceable in the direction in which the resultant force of the wire 3 is generated. It is attached to the other end of 9 and abuts against the detecting portion of the fluctuation resultant force detector 12 for detecting the resultant force.

Next, the tension roller 14 is supported rotatably with respect to the roller shaft 24. The roller shaft 24 of the tension roller 14 is directly attached to the detection unit of the reference resultant force detector 11 attached to the frame 20 or attached to the frame 20 so as to be displaceable in the resultant force generation direction of the wire 3. Is in contact with the detection portion of the reference resultant force detector 11.

The dancer roller 15 is supported by a biasing arm 22 of the rotation biasing means 21 and a roller shaft 23 at the tip of the biasing arm 22 so as to be displaceable in the arc direction. The rotation urging means 21 always applies a predetermined tension to the wire 3 while absorbing the change in the path length of the wire 3 by allowing the dancer roller 15 to swing in the arc direction. The dancer roller 15 can be configured as a direct acting urging means instead of the rotation urging means 21, and a specific example thereof will be described later with reference to FIG.

In the illustrated example, the traverse roller 5 and the tension roller 14 are adjacent to each other, and the wire 3 is stretched linearly between them to form one section of the wire path. The tension roller 14 is arranged on one end side of the one section, and the traverse roller 5 is installed on the other end side of the same one section. For this reason, the tension T of the wire 3 has the same value at the position of the traverse roller 5 and the position of the tension roller 14.

In addition, the winding angle of the wire 3 at the position of the traverse roller 5 and the winding angle of the wire 3 at the position of the tension roller 14 are equal as a preferable aspect for convenience of measurement when detecting the resultant force at each position. The angle value is set to a right angle as an example.

FIG. 3 shows the traverse control device 10 of the present invention. The traverse control device 10 has a reference resultant force detector 11, a fluctuation resultant force detector 12, and a speed controller 13 for correcting the reciprocating speed V of the traverse roller 5 on the premise of the traverse device 1. Yes.

The reference resultant force detector 11 is constituted by a force-electric signal conversion sensor such as a load cell or a magnetic amplification type sensor, and is displaced in the direction of generating a resultant force using the tension T of the wire 3 as a component force at the position of the tension roller 14. The resultant force at the position of the tension roller 14 is detected as a reference resultant force F1 of the wire 3 on the possible roller shaft 24, and an electric signal S1 proportional to the reference resultant force F1 is sent to the speed controller 13.

Here, since the reference resultant force F1 is a component force of the tension T of the wire 3 wound around the tension roller 14, the tension T of the wire 3 is 1/2 of the winding angle 90 °, and T = It is determined as F1 · cos 45 °. The tension T is controlled so that it always becomes a target value while the wire 3 is traveling, so that the reference resultant force F1 is always a constant value while the wire 3 is traveling.

On the other hand, the fluctuation resultant force detector 12 is constituted by a force-electric signal conversion sensor in the same manner as described above, and hits the traverse roller 5 at the position of the traverse roller 5 against the roller shaft 7 that can be displaced in the direction in which the resultant force is generated. The resultant force of the wire 3 in the state of being wound around is detected as an actual fluctuation resultant force F2 of the wire 3, and an electric signal S2 proportional to the fluctuation resultant force F2 is sent to the speed controller 13.

As described above, even at the position of the traverse roller 5, the tension T of the wire 3 is equal to the tension T at the position of the tension roller 14. Therefore, if the wire 3 is between the traverse roller 5 and the reel 4 at a target position, that is, perpendicular to the axial direction of the reel 4, the winding angle at the traverse roller 5 and the winding at the position of the tension roller 14 Since the angles have the same angle value, even if the traverse roller 5 is laterally moved (moved in the axial direction of the reel 4), the variable resultant force F2 at that position is equal to the reference resultant force F1.

However, when the wire 3 is displaced from the target position between the traverse roller 5 and the reel 4, the winding angle of the wire 3 with respect to the traverse roller 5 deviates from a right angle and changes in an acute angle direction or an obtuse angle direction. For this reason, even though the tension T does not change at the position of the traverse roller 5, the resultant resultant force F2 is larger than the reference resultant force F1 at an acute winding angle and is an obtuse winding angle. Furthermore, it fluctuates so as to be smaller than the reference resultant force F1.

As described above, during the lateral movement of the traverse roller 5, the wrapping angle of the wire 3 varies at the position of the traverse roller 5, so that the fluctuation resultant force F2 varies in proportion to the amount of change in the wrapping angle. This is a parameter for detecting the displacement (displacement) of the wire 3 from the target position. In the speed control (rotational speed control) of the traverse motor 6, focusing on the above points, the displacement (displacement) of the wire 3 from the target position is detected from the change in the winding angle of the wire 3 at the position of the traverse roller 5. ing.

The speed controller 13 compares the reference tension F1 based on the signal S1 and the variable tension F2 based on the signal S2, determines the reciprocating speed V of the traverse roller 5 based on the fluctuation of the difference ΔF, and determines the calculated speed V. Accordingly, a speed command signal S3 is given to the traverse motor 6. According to the illustrated example, the reference speed V1 of the reciprocating movement is set in the speed controller 13 by the reference speed setter 25, and the speed controller 13 determines acceleration or deceleration according to the sign of the difference ΔF. The correction speed ΔV is obtained according to the absolute value of the difference ΔF, and the correction speed ΔV is added to or subtracted from the reference speed V1 to generate a speed command signal S3. The traverse motor 6 is driven by this signal S3.

As described above, the winding angle of the wire 3 at the position of the traverse roller 5 and the winding angle of the wire 3 at the position of the tension roller 14 are set to be equal. For this reason, the signal S1 as the output of the reference resultant force detector 11 and the signal S2 as the output of the fluctuation resultant force detector 12 are ready to be compared. This facilitates signal processing.

However, when the winding angle of the wire 3 at the position of the traverse roller 5 and the winding angle of the wire 3 at the position of the tension roller 14 are set as an angle value that is not equal, the reference resultant force detector 11 or the variable resultant force By multiplying the output of the detector 12 by a coefficient or by interposing a converter in the transmission path of the signals S1 and S2, the signals S1 and S2 are converted to comparable levels and then compared. . Specific examples in which the wrapping angles are set as unequal angle values are illustrated in FIGS. 7 to 10 described later.

The traverse control device 10 on the delivery side drives the traverse motor 6 at a predetermined speed while periodically changing the rotation direction based on the command of the speed command signal S3, and the slider 17 is rotated by the rotation / reciprocating linear motion conversion means 16. Is reciprocated linearly in the axial direction of the reel 4, and the reciprocating motion of the slider 17 is synchronized with the winding pitch, so that the position of the wire 3 between the reel 4 and the traverse roller 5 is relative to the axial direction of the reel 4. The target position is maintained at a right angle. The reciprocating stroke is set in the range of the winding drum of the reel 4.

In such a traverse control process, when the winding pitch of the wire 3 greatly fluctuates on the reel 4 on the sending side and the position of the wire 3 is shifted from the target position between the reel 4 and the traverse roller 5, the speed is increased. The controller 13 returns the position of the wire 3 to the target position between the reel 4 and the traverse roller 5 by adjusting the speed V of the reciprocating movement in a direction that eliminates the deviation of the wire 3 from the target position.

4 to 6 show the change in the position of the wire 3 between the reel 4 and the traverse roller 5 during the reciprocating movement of the traverse roller 5, the reference resultant force F1 based on the signal S1 at that time and the variable resultant force F2 based on the signal S1. The relationship of size comparison is shown. In these drawings, as an example, the speed V in the direction in which the traverse roller 5 approaches the tension roller 14 is set as + sign, and conversely, the speed V in the direction in which the traverse roller 5 moves away from the tension roller 14 is set as-sign.

As shown in FIG. 4, if the wire 3 is in the target position in the process in which the traverse roller 5 is moving in either direction, the tension T is equal at each position of the traverse roller 5 and the tension roller 14, and Since the winding angle of the wire 3 is the same value, the reference resultant force F1 and the variable resultant force F2 are equal. Therefore, the difference ΔF between the reference resultant force F1 and the variable resultant force F2 is zero, that is, F1−F2 = ΔF = 0. As long as the wire 3 is maintained at the target position, the relationship ΔF = 0 does not change. In this case, control of speed correction is unnecessary for the speed V of the reciprocating movement of the traverse roller 5. This state is an ideal control mode.

Next, as shown in FIG. 5, when the traverse roller 5 is moving in the direction of the reciprocating speed + V, the winding angle of the wire 3 becomes an acute angle at the position of the traverse roller 5 as shown in a. Since F2> F1, the speed controller 13 receives the signal S1 and the signal S2 and generates a correction speed −ΔV corresponding to the variation of F1−F2 = −ΔF, and the correction speed −ΔV from the reference speed + V. Is generated to generate a signal S3 corresponding to the speed command {(+ V) − (− ΔV)} = + (V + ΔV), and the traverse motor 6 is accelerated by this signal S3. On the contrary, as shown in FIG. 4B, when the winding angle of the wire 3 becomes an obtuse angle at the position of the traverse roller 5, F2 <F1, so the speed controller 13 changes F1−F2 = + ΔF. A corresponding correction speed + ΔV is generated, and by subtracting the correction speed + ΔV from the reference speed + V, a signal S3 corresponding to the speed command {(+ V) − (+ ΔV)} = + (V−ΔV) is generated. The traverse motor 6 is decelerated by the signal S3.

Further, when the traverse roller 5 is moving in the direction of the reciprocating speed −V as shown in FIG. 6, the winding angle of the wire 3 becomes an acute angle at the position of the traverse roller 5 as shown in a. Since F2> F1, the speed controller 13 receives the signal S1 and the signal S2 and generates a correction speed −ΔV corresponding to the variation of F1−F2 = −ΔF, and the correction speed−from the reference speed −V− By subtracting ΔV, a signal S3 corresponding to the speed command {(−V) − (− ΔV)} = − (V−ΔV) is generated, and the traverse motor 6 is decelerated by this signal S3. On the contrary, as shown in FIG. 5b, when the winding angle of the wire 3 becomes an obtuse angle at the position of the traverse roller 5, F2 <F1, so the speed controller 13 changes F1-F2 = + ΔF. A corresponding correction speed + ΔV is generated, and by subtracting the correction speed + ΔV from the reference speed −V, a signal S3 corresponding to the speed command {(−V) − (+ ΔV)} = − (V + ΔV) is generated. The traverse motor 6 is accelerated by the signal S3.

Unlike the above example, when the speed V in the direction in which the traverse roller 5 approaches the tension roller 14 is set as a minus sign, and conversely, the speed V in the direction in which the traverse roller 5 moves away from the tension roller 14 is set as a plus sign, correction is performed. The speed ± ΔV is always added rather than subtracted from the reference speed ± V.

As described above, when the position of the wire 3 deviates from the target position due to a change in the winding pitch of the wire 3 during the reciprocating movement of the traverse roller 5, the speed controller 13 corrects the reference speed ± V. By adding / subtracting the speed ± ΔV and adjusting the speed V of the reciprocating movement of the traverse roller 5 in the direction of acceleration or deceleration, the position of the wire 3 is returned to the target position, and the position of the wire 3 is automatically set to the target position. To follow. Even if the position of the wire 3 deviates from the target position at the initial stage of activation, the position of the wire 3 moves to the target position in a short time by the above speed control and becomes stable there.

This speed control is performed not only when the reciprocating speed V of the traverse roller 5 is driven constant, but also when the speed V is gradually increased according to a predetermined speed pattern and accelerated, and the speed V is set to time. The present invention can be applied to any of the cases where the driving speed is gradually reduced as the time elapses.

As described above, since the roller shaft 7 of the traverse roller 5 is perpendicular to the axial direction of the reel 4, the direction of the groove of the traverse roller 5 is always the displacement of the wire 3 in the axial direction on the reel 4. It matches the direction. Therefore, even if the wire 3 is displaced in the axial direction of the reel 4, the wire 3 is not detached from the traverse roller 5 and the disconnection is reduced.

Further, the roller shaft 7 of the traverse roller 5 is held by a swing arm 9, and the swing arm 9 is swingable with respect to a reciprocating slider 17 by a swing shaft 8 parallel to the axial direction of the reel 4. Therefore, even if the winding diameter of the wire 3 on the reel 4 changes, the groove direction of the traverse roller 5 always coincides with the direction of the wire 3, which causes a change in the winding diameter of the wire 3. The disconnection of the wire 3 can be reliably prevented.

In the process of detecting the resultant force, there is almost no fluctuation in the tension of the wire 3 in one section of the linear path of the wire 3 between the traverse roller 5 and the tension roller 14, and each time the reference resultant force F1 and the variable resultant force F2 are detected, Due to the difference in the tension value at the measurement position, no error appears, so that the accuracy of speed control is improved.

The installation position of the reference resultant force detector 11 is not limited to the position of the tension roller 14, but may be another position. In FIG. 7, the reference resultant force detector 11 is installed at the position of the dancer roller 15, the dancer roller 15 is also used as the tension roller 14, and the reference resultant force detector 11 at the position of the dancer roller 15 (tension roller 14). This is an example of detecting the reference resultant force F1. For this reason, the roller between the traverse roller 5 and the dancer roller 15 (tension roller 14) becomes a guide roller 18 for simply changing the direction.

At the installation position of the dancer roller 15 in FIG. 7, the value of the tension T may be slightly different from the tension T at the position of the traverse roller 5 due to the bending of the wire 3 and the presence of the guide roller 18 in the wire path. Further, the winding angle of the wire 3 with respect to the dancer roller 15 is, for example, 180 °, which is different from the winding angle of 90 ° when the wire 3 at the position of the traverse roller 5 is at the target position. For this reason, the magnitude of the reference resultant force F1 is also different from the reference resultant force F1 in FIG.

Therefore, the measured value detected by the reference resultant force detector 11 at the position of the dancer roller 15 cannot be directly output to the speed controller 13 as the signal S1. In this case, as already described, the measured value of the reference resultant force detector 11 is compared with the variable resultant force F2 by multiplying the value by an appropriate coefficient or by interposing a converter in the transmission path of the output signal. The signal S1 corresponding to the reference force F1 at a possible level is calculated and sent to the speed controller 13.

FIG. 8 is an example in which the winding angle of the wire 3 at the tension roller 14 is set to an angle value different from the winding angle 90 ° of the wire 3 at the position of the traverse roller 5. The wire 3 is wound around the tension roller 14 with a winding angle of 180 °, for example, and then guided to a predetermined position such as the dancer roller 15 through one or more guide rollers 18 as necessary.

Next, in FIG. 9, the dancer roller 15 is arranged next to the traverse roller 5, and the dancer roller 15 also functions as the tension roller 14, and the reference resultant force detector 11 is located at the position of the dancer roller 15 (tension roller 14). This is an example of detecting the reference resultant force F1. The dancer roller 15 (tension roller 14) in FIG. 9 is rotatably supported by a horizontal urging arm 22 of the rotation urging means 21, and the wire 3 is supported by the dancer roller 15 (tension roller 14). After being wound at a winding angle of 180 °, for example, it is guided to a predetermined position such as the dancer roller 15. The urging arm 22 rotates in any direction with the horizontal direction as a reference position. However, the reference position is not limited to the horizontal direction, and can be set in an inclined direction with respect to the horizontal line. This example corresponds to the modification of FIG. 7, but in this modification, the guide roller 18 of FIG. 7 can be omitted. The omission of the guide roller 18 is preferable from the viewpoint of reducing the number of installed guide rollers 18 and reducing the rotational load and the number of components.

FIG. 10 shows an example in which the dancer roller 15 (tension roller 14) is movably supported by the direct acting biasing means 26 instead of the rotation biasing means 21. The direct acting urging means 26 is mainly required by an electric system, for example, a combination of a linear motor, an electric motor, and a linear motion converting means such as a rotation-feed screw / nut, or the like, or a spring, fluid pressure or weight of a weight. Generate energizing force in any direction.

From the examples of FIGS. 7 to 10, when the reference resultant force F1 is detected, the winding angle of the wire 3 on the tension roller 14 is not limited to 90 ° and can be set as an appropriate angle, and the reference resultant force detector 11 can be set. The installation position of the tension roller 14 is not limited to one section including the traverse roller 5 as one end, and the calculation processing of the signal S1 (reference resultant force F1) of a comparable level can be performed by arbitrarily calculating the wire 3 Can be selected.

As is apparent, the present invention is effective when the wire 3 wound around the reel 4 on the sending side is sent to the wire saw 2 and the winding of the wire 3 around the reel 4 is incomplete.

However, the present invention can also be used on the winding side. On the winding side, if the traverse roller 5 has reciprocated accurately, the wire 3 is in an aligned winding state on the reel 4 on the winding side, but when the wire 3 deviates from the target position for some reason. The traverse control device 10 on the winding side returns the wire 3 to the target position by adjusting the speed V of the traverse roller 5.

Note that the reel 4 can be installed in a horizontal position instead of a vertical position. When the reel 4 is placed horizontally, the traverse roller 5 reciprocates in the horizontal direction.

1 traverse device 2 wire saw 3 wire 4 reels 5 traverse roller Traverse motor 7 roller shaft 8 oscillating shaft 9 swing arm 10 traverse control unit 11 reference force detector 12 varies force detector 13 speed controller 14 the tension roller 15 da down Circulator 16 Rotation / reciprocating linear motion converting means 17 Slider 18 Guide roller 19 Support shaft 20 Frame 21 Rotating biasing means 22 Biasing arm 23 Roller shaft 24 Roller shaft 25 Reference speed setting device 26 Direct acting biasing means

T tension F1 reference resultant force F2 variable resultant force ΔF difference S1, S2, S1 signal V speed of reciprocating movement V1 reference speed ΔV correction speed

Claims (8)

In the process of winding the wire (3) of the reel (4) for the wire saw (2) around the traverse roller (5) and the tension roller (14) and reciprocating the traverse roller (5) in the axial direction of the reel (4). In the traverse device (1) between the reel (4) and the traverse roller (5), the target position of the wire (3) is perpendicular to the axial direction of the reel (4). The reference resultant force (F1) of the wire (3) is detected at the position, and the resultant resultant force (F2) based on the displacement from the target position of the wire (3) is detected at the position of the traverse roller (5). ) And the fluctuation resultant force (F2) based on the fluctuation of the difference (ΔF), the reciprocating speed (V) of the traverse roller (5) is controlled. The correction speed (ΔV) obtained based on the change in the difference (ΔF) between the reference resultant force (F1) and the fluctuation resultant force (F2) is added to or subtracted from the reference speed (V1) of the reciprocating movement of the traverse roller (5), The traverse control method according to claim 1, wherein the speed (V) of the reciprocating movement of the traverse roller is calculated. In the process of winding the wire (3) of the reel (4) for the wire saw (2) around the traverse roller (5) and the tension roller (14) and reciprocating the traverse roller (5) in the axial direction of the reel (4). In the traverse device (1) between the reel (4) and the traverse roller (5), the target position of the wire (3) is perpendicular to the axial direction of the reel (4). A reference resultant force detector (11) that detects the reference resultant force (F1) of the wire (3) at the position, and a variable resultant force (F2) based on the displacement of the wire (3) from the target position at the position of the traverse roller (5). The speed (V) of the reciprocating movement of the traverse roller (5) is obtained and obtained based on the fluctuation resultant force detector (12) to be detected and the fluctuation (ΔF) between the reference resultant force (F1) and the fluctuation resultant force (F2). Speed A speed controller for providing a speed command to the traverse motor (6) and (13) in response to V), the traverse control apparatus characterized by (10). The reference speed (V1) of the reciprocating movement is set in the speed controller (13), and the correction speed (ΔV) is obtained based on the variation of the difference (ΔF) between the reference resultant force (F1) and the varying resultant force (F2). The traverse control device (10) according to claim 3, wherein the reciprocating speed (V) of the traverse roller (5) is calculated by adding or subtracting the correction speed (ΔV) to the reference speed (V1). . The straight path of the wire (3) is defined as one section, a tension roller (14) is disposed at one end of the section, and a reference resultant force detector (11) is installed at the position of the tension roller (14). The traverse roller (5) is installed on the other end side of the one section, and the fluctuation resultant force detector (12) is installed at the position of the traverse roller (5). The traverse control device (10) as described. The winding angle of the wire (3) at the position of the traverse roller (5) and the winding angle of the wire (3) at the position of the tension roller (14) are set as equal angle values. Item 6. The traverse control device according to Item 5. The traverse roller according to claim 3, 4, 5, or 6, characterized in that the roller shaft (7) of the traverse roller (5) is perpendicular to the axial direction of the reel (4). Control device (10). The roller shaft (7) of the traverse roller (5) is held by the swing arm (9), and the swing arm (9) is reciprocated by the swing shaft (8) parallel to the axial direction of the reel (4). The traverse control device (10) according to claim 7, wherein the traverse control device (10) is swingably supported with respect to the slider (17).

Images