JP2000061805A - Wire type cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire type cutting device which can cut a plurality of workpieces at the same time while keeping the surface accuracy substantially the same degree as that of the conventional arrangement. SOLUTION: A first main roll part 10 is composed of grooved rolls 11, 12 and 13, and a second main roll part 20 is composed of groove rolls 21, 22 and 23. Workpiece feed devices 15, 25 are arranged above the first and second main roll parts 11, 12, respectively. A saw wire (w) paid out from a pay-out bobbin 31 in a pay-out feed mechanism 30 wound around the grooved rolls 11 to 13 in the first main roll 10 runs through a dancer mechanism 34, then is wound around the grooved rolls 21 to 23 in the second main roll part 20, and is finally wound on a winding bobbin 51 in winding mechanism 50. Workpieces 14, 25 to be cut are fed by the workpiece feed mechanism 15, 25 onto the running single saw wire (w), and accordingly, they are simultaneously cut.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire-type cutting apparatus suitable for cutting a so-called brittle material such as a semiconductor material, a magnetic material, and a ceramic into a wafer. 2. Description of the Related Art A wire-type cutting apparatus is also called a wire saw, in which a wire stretched over a plurality of groove rolls arranged in parallel is run, and the material to be cut is attached to the running wire. Is pressed to cut the material to be cut. In order to cut a plurality of materials to be cut simultaneously by one wire-type cutting apparatus, the following configuration can be considered. The gap between the groove rolls is widened, and a plurality of materials to be cut are pressed in parallel with the wire stretched there. Using a grooved roll that is long in the axial direction, a plurality of workpieces are pressed vertically (in the length direction). [0003] However, if the interval between the groove rolls is widened, the length of the wire (wire span) between the groove rolls is increased, and the wire is liable to swing, so that the surface accuracy of the wafer is deteriorated. In addition, when a groove roll that is long in the axial direction is used, a high load is applied to the groove roll, so that the groove roll needs to have high flexural rigidity. If the groove roll bends, the surface accuracy of the wafer deteriorates. DISCLOSURE OF THE INVENTION The present invention provides a method for simultaneously cutting a plurality of workpieces.
It is another object of the present invention to provide a wire-type cutting apparatus capable of cutting while maintaining the same surface accuracy as that of the related art. [0005] In the wire-type cutting apparatus according to the present invention, a plurality of main roll portions each constituted by a plurality of groove rolls on which a cutting wire is hung are arranged at intervals. Each of the plurality of main rolls is provided with a feeder for feeding a material to be cut toward the cutting wire hung between the groove rolls of the main roll. An adjusting mechanism for at least one of the speed and the tension is provided between the main roll portions which are adjacent to each other in the cutting wire hooking order. One cutting wire fed from the wire feeding mechanism is hung on the groove roll of the first main roll portion, and passed through the adjusting mechanism to the next main wire.
The main rolls are sequentially wound on a plurality of main rolls and an adjusting mechanism between them, so that the wire is wound on a groove roll of the roll, and is wound on a wire winding mechanism from the last main roll. Generally, a dancer mechanism is used as the adjustment mechanism. The use of the dancer mechanism enables the control of the wire speed (speed detection and adjustment based on the speed) and the control (adjustment) of the tension. The adjusting mechanism can be realized by a combination of a dancer mechanism and a capstan mechanism. In this case, it is possible to perform adjustment so that the tension on the inlet side and the tension on the outlet side of the adjustment mechanism have different values. The adjusting mechanism may, of course, include a tension setter, a tension detector, a speed setter or a speed controller as required. According to the present invention, the material to be cut is cut at each of the plurality of main rolls. A plurality of workpieces can be cut at the same time. It is not necessary to increase the interval between the groove rolls, and it is not necessary to necessarily increase the axial length of the groove rolls, so that the surface accuracy of the cut surface of the material to be cut does not decrease. One wire is used for cutting the material to be cut in a plurality of main rolls. However, if the number of the main rolls to be installed is not so large, there is no problem due to wire wear. The traveling speed and tension of the wire in the plurality of main rolls can be adjusted by the adjustment mechanism between the wire feeding mechanism and the first main roll if necessary and between the last main roll and the wire winding mechanism. By providing a (speed, tension) adjustment mechanism between the two, adjustment can be made to an appropriate value. DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the overall configuration of a wire type cutting machine (wire saw). [0008] Two main roll portions 10 and 20 are spaced apart. The main roll section 10 is composed of three groove rolls (or rollers) 11, 12 and 13. The main roll section 20 includes three groove rolls 21,
It consists of 22 and 23. In the main roll section 10, the groove roll 11
And the groove roll 12 are spaced from each other and are at the same height position. The groove roll 13 is disposed below an intermediate position between the groove rolls 11 and 12. When viewed from the side, the groove rolls 11 to 13 are respectively arranged at positions substantially corresponding to the vertices of an equilateral triangle. Grooves are formed at regular intervals on the peripheral surfaces of the groove rolls 11 to 13, respectively. The spacing between the grooves defines the thickness of the wafer formed by cutting. These groove rolls 11 to 13 are supported on a frame (not shown) rotatably and parallel to each other. [0010] Feeding device for workpiece (work feeding device)
(Only the work holder that moves forward and backward is shown.)
And the upper part in the middle. A work (material to be cut, ingot) 14 is detachably held at a tip end of a work holding portion of the work feeding device 15. The work 14 is moved up and down between the two groove rolls 11 and 12 by the work feeder 15 in the vertical direction. As will be described later, the saw wire w hung on the groove rolls 11 to 13 and the work 14 entering the saw wire w
A nozzle (not shown) for supplying a processing liquid containing abrasive grains toward the processing location is provided in the vicinity of a location (processing location) that makes contact. The configuration of another main roll unit 20 is the same as that of the main roll unit 10. A work feeder 25 is also arranged above the main roll section 20, and the work feeder 25 causes the work 24 to move up and down between the two groove rolls 21 and 22 in the vertical direction. A dancer mechanism 34 is provided between the main rolls 10 and 20. One saw wire (cutting wire) w
Is fed from the wire feeding mechanism 30, and the dancer mechanism 32,
It is supplied to the main roll unit 10 via the guide sheave 33. In the main roll section 10, the saw wire w is sequentially wound along the grooves of the groove rolls 11 to 13, and is wound by the number of grooves in each groove roll. The saw wire w is further supplied to the main roll section 20 via a dancer mechanism 34. Main roll section
In the same manner as in the case of 20, the groove rolls are wound sequentially along the grooves of the groove rolls 21 to 23, and are wound by the number of grooves of each groove roll. The saw wire w is further provided with a guide sheave 3
5, 36 and 37, the capstan mechanism 38, the dancer mechanism 39, and the guide sheave 40 are wound around the wire winding mechanism 50. In the main roll section 10, the groove roll 11
At least one of 13 to 13 is rotationally driven by a drive motor (not shown). For example, groove roll 13
Is a drive roll, and a belt wheel for power transmission is mounted on the shaft of the groove rolls 11 to 13, and the groove rolls 13
The torque is transmitted to the belt by a belt. The groove rolls 11 to 13 rotate in the same direction, and the saw wire w stretched on the groove rolls 11 to 13 travels in one direction. In the main roll section 20, similarly, for example, the groove roll 23 is driven to rotate by a drive motor (not shown). The drive motor of the main roll unit 10 and the drive motor of the main roll unit 20 may be the same motor. When the drive motor of the main roll unit 10 and the drive motor of the main roll unit 20 are separate motors, these motors are preferably driven so as to be synchronized with each other, or have a speed as described later. Controlled. In these main roll portions 10 and 20, the saw wire w runs horizontally between the groove rolls 11 and 12 and between the groove rolls 21 and 22. Work 1 by work feeders 15 and 25
4, 24 advance vertically downward to the horizontally running saw wire w. Saw wire w for workpieces 14 and 24 little by little
And feed the workpieces 14 and 24 to the groove rolls 11 and
A processing liquid containing abrasive grains is supplied from a nozzle to a processing location where the saw wire w is pressed horizontally against the saw wire w between the workpieces 12 and 21, and the saw wire w and the workpieces 14 and 24 are in contact with each other. As a result, the two works 14 and 24 are simultaneously cut into a plurality of wafers having a constant width. The feeding mechanism 30 for the saw wire w
A feeding bobbin (reel or drum) 31 around which the wire w is wound is included. The saw wire w fed from the feeding bobbin 31 is supplied to the dancer mechanism 32. The dancer mechanism 32 includes a fixed roll 32A and a dancer roll 32B movably held up and down. The saw wire w is successively reciprocated between the fixed roll 32A and the dancer roll 32B and is wound a plurality of times. Main roll section 10 and main roll section 20
The dancer mechanism 34 disposed between the
A and a dancer roll 34B held movably up and down. The saw wire w is wound between the fixed roll 34A and the dancer roll 34B a plurality of times. The capstan mechanism 38 includes two rotatably provided rolls 38A and 38B. Saw wire w
Is wound a plurality of times between these rolls 38A and 38B. The rotation of at least one of the rolls 38A or 38B is controlled by a motor or other drive or control mechanism. The dancer mechanism 39 also includes a fixed roll 39A and a dancer roll 39B held movably up and down. Saw wire w consists of these fixed roll 39A and dancer roll
Multiplied multiple times with 39B. The winding mechanism 50 for the saw wire w includes a winding bobbin 51. The winding bobbin 51 is driven to rotate by a drive motor (not shown). Main roll section
Saw used for cutting workpieces 14 and 24 in 10 and 20
The wire w is sequentially wound around the winding bobbin 51. A traverse mechanism (not shown) is provided for aligning and winding the saw wire w on the winding bobbin 51. The running speed control of the saw wire w of the wire type cutting machine is performed as follows, for example. It is assumed that the drive motor of the groove roll 23 of the main roll unit 20 is controlled to always rotate at a predetermined speed. When the traveling speed of the saw wire w in the main roll unit 10 is different from the traveling speed of the saw wire w in the main roll unit 20, the height position of the dancer roll 34B of the dancer mechanism 34 changes. I do. For example, if the wire speed in the main roll
If the wire speed is slower than 20, the dancer roll 34B will rise, and if it is earlier, it will fall. The position of the dancer roll 34B is detected. Based on the detected position, the speed of the drive motor of the groove roll 13 of the main roll unit 10 is controlled so that the height position of the dancer roll 34B is maintained at a predetermined position. Similarly, the drive motor (or brake) of the bobbin 31 of the feeding mechanism 30 is controlled according to the height position of the dancer roll 32B of the dancer mechanism 32. Further, the speed of the drive motor of the winding bobbin 51 of the winding mechanism 50 is controlled according to the height position of the dancer roll 39B of the dancer mechanism 39. The height position of the dancer roll in the dancer mechanism can be detected by various known means. The following mechanisms can detect the height position of the dancer roll and adjust the tension of the saw wire hung on the dancer mechanism. The dancer roll of the dancer mechanism is provided at the other end of the arm pivotally pivoted at one end. This arm is driven by an air cylinder (or hydraulic cylinder). Adjust the saw wire tension applied to the dancer roll by the pressure applied to the air cylinder. The height position of the dancer roll is detected based on the swing angle of the arm (the rotation angle of the pivot of the arm). The main roll unit 10 is controlled by the dancer mechanism 32.
Can be adjusted. To be more precise, the dancer mechanism 32 is provided between the wire feed-out mechanism 30 and the main roll 10 in a saw mechanism.
Adjust the tension of the wire w. The wire tension of the saw wire w passing through the main roll 10 or a sheave or a roller (for example, a guide sheave) 33 provided between the main roll 10 and the dancer mechanism 32 is a tension detector (not shown). Is detected by The air pressure of the air cylinder that drives the arm provided with the dancer roll 32B of the dancer mechanism 32 is adjusted so that the detected tension becomes substantially equal to the set value. Thus, the tension of the saw wire w supplied to the main roll unit 10 is controlled so as to be substantially constant at all times. The same air pressure as that of the dancer mechanism 32 is applied to an air cylinder that drives an arm of the dancer mechanism 34 provided with the dancer roll 34B. This gives
It is supplied to the main roll section 20 (the main roll section 10
The tension of the saw wire w (between and the main roll 20) is controlled to be equal to the tension of the saw wire w supplied to the main roll 10. Main roll section
A sheave or a roller is provided between the main roll unit 10 and the main roll unit 20, a wire tension applied to the sheave or the roller is detected by a tension detector, and the air cylinder pressure of the dancer mechanism 34 is controlled based on the detected tension. You can also. The capstan mechanism 38 separates the wire tension on the input side and the output side, and keeps the wire tension on the output side lower than the wire tension on the input side. Thus, the load applied to the winding bobbin 51 of the wire winding mechanism 50 can be reduced. The wire tension applied to the guide sheave 37 is detected by a tension detector (not shown). The torque of the motor that drives the roll 38A or 38B of the capstan mechanism 38 is controlled based on the detected tension. By the capstan mechanism 38, the main roll 20
Wire w from to the input side of the capstan mechanism 38
Is preferably controlled to be equal to the wire tension in the main roll portions 10, 20. The wire tension applied to the guide sheave 40 is detected by a tension detector (not shown). Set the dancer mechanism 39 so that the detected tension is equal to the set tension.
The air pressure of the air cylinder that drives the arm on which the roll 39B is mounted is adjusted. The dancer mechanism 39 controls the tension between the output side of the capstan mechanism 38 and the wire winding mechanism 50 to be a given value lower than the wire tension of the main roll portions 10 and 20. It goes without saying that the adjustment of the tension in the dancer mechanism can also be achieved by simply pulling the dancer roll downward with a weight or a spring. In the above embodiment, the wire tension from the wire feeding mechanism 30 to the capstan mechanism 38 is kept constant. The wire tension that moves to the main roll unit 10 and the wire tension that moves to the main roll unit 20 can have different values. In this case, the main roll 10 and the dancer mechanism
A capstan mechanism is provided between the main roll and the main roll.
The tension moving to 10 and the tension moving to the main roll 20 may be separated. In the embodiment described above, the main roll unit and the work feeding device (the main roll unit 10 and the work feeding device) are used.
15 sets, main roll 20 and work feeder 25)
Are provided in two sets. It goes without saying that three or more sets of the main roll section and the work feeder may be provided. A speed or tension adjusting mechanism (dancer mechanism) is provided between each pair.

[Brief description of the drawings] FIG. 1 shows an overall configuration of a wire-type cutting apparatus. [Explanation of symbols] 10, 20 Main roll section 11,12,13,21,22,23 Groove roll 30 Wire feeding mechanism 31 Feeding bobbin 50 Wire winding mechanism 51 Winding bobbin 32, 34, 39 dancer mechanism 38 Capstan mechanism w saw wire

Claims (1)

Claims: 1. A plurality of main roll portions each constituted by a plurality of groove rolls on which a cutting wire is hung are arranged at intervals, and a plurality of main roll portions are provided on the plurality of main roll portions.・ A feeder for feeding the material to be cut toward the cutting wire hung between the groove rolls of the roll portion is provided, and at least a speed and a tension between the main roll portions which are adjacent to each other in the order of the cutting wire hooking. An adjustment mechanism for one side is provided, and one cutting wire fed from the wire feeding mechanism is hung on the groove roll of the first main roll portion, and passes through the adjustment mechanism to the next main roll portion. A plurality of main rolls and the adjusting mechanism between them are sequentially wound so as to be wound on a grooved roll. Wound taken, wire type cutting device.