JP2007276054A - Work cutting method by wire saw, and wire saw - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform work cutting efficiently while effectively reducing only wire tension on the winding side by the use of a tension regulator for bringing the wire tension to prescribed target tension. <P>SOLUTION: In this wire saw, an advance drive cutting step for cutting the work 28 while advancing the wire W, a first change-over step for reversing the drive direction of the wire W, a retraction drive cutting step for cutting the work 28 while retracting the wire W, and a second change-over step for reversing the drive direction of the wire W to be returned to the advance drive cutting step are repeated by turns. In both cutting steps, only wire tension on the winding side is reduced by the use of tension operation devices 18A, 18B. Such wire tension change-over is performed between both change-over steps. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method and a wire saw for cutting a semiconductor ingot or the like using a wire saw.

  In recent years, a wire saw has been known as means for cutting out a large number of thin pieces (for example, wafers) from a workpiece such as a semiconductor ingot at a time. In this wire saw, the cutting wire drawn from the wire feeding bobbin is wound around the plurality of guide rollers and then collected on the wire winding bobbin. Then, in a state where the cutting wire is driven at a high speed in the longitudinal direction by the rotation of both the bobbins and the guide rollers, the semiconductor is arranged in a direction substantially orthogonal to a plurality of wires arranged between specific guide rollers. When a workpiece made of an ingot or the like is cut and fed, a large number of thin pieces are simultaneously cut out from the workpiece.

In such a wire saw, it is necessary to adjust the wire tension to an appropriate value in order to ensure stable processing accuracy. Therefore, Patent Document 1 below is provided with a tension adjusting device for adjusting the wire tension in a region from the wire feeding member to the guide roller and a region from the guide roller to the wire winding member. Have been disclosed. Each of the tension adjusting devices includes a load cell that detects the tension of the wire, and a pulley that is pressed against the wire to change the tension, and the wire tension detected by the load cell is kept constant. The pressing force of the pulley is adjusted.
Japanese Patent Laid-Open No. 9-94755

  In the wire saw, it is necessary to give a certain tension or more to the wire in order to stably cut the workpiece. On the other hand, the higher the tension, the greater the burden on the wire winding bobbin. is there. That is, the higher the tension of the wire taken up by the wire take-up bobbin, the easier it is for the wire to bite into the outer peripheral surface of the wire take-up bobbin, and the risk of shortening the life of the bobbin increases. In addition, when fixed abrasive grains are fixed to the wire, the force with which the wires come into pressure contact with each other on the wire winding bobbin is increased, which causes a disadvantage that the abrasive grains easily fall off.

  As a means for solving such inconvenience, it is conceivable to use the tension adjusting device described above and to make the wire tension on the winding side lower than the wire tension on the feeding side. However, in the wire saw, as a method of driving the wire, the wire is alternately moved in a forward direction (a direction from the wire feeding bobbin to the wire winding bobbin) and a backward direction (a direction from the wire winding bobbin to the wire feeding bobbin). In many cases, a reciprocating drive method for moving the wire saw is employed, and when the tension adjustment as described above is performed when the wire saw is operated by such a reciprocating drive method, the processing efficiency may be significantly reduced.

  That is, in the reciprocating drive method, a strong impact is generated when the drive direction of the wire is suddenly reversed. Therefore, in actuality, the wire is decelerated once and stopped, and the reverse speed driving is started for the first time from the stopped state. The operation of gradually accelerating is required, and it takes time to reverse the driving direction. In addition to this, when reversing the driving direction of the wire, the tension of the winding side wire that had been lowered until then is increased, and conversely, the tension of the feeding side wire that has been given high tension is increased. In addition, it is necessary to lower the wire tension, and if the fluctuation of the tension is abruptly performed, the wire may be broken or the like. Therefore, the increase / decrease of the wire tension must be gradually performed over a certain period of time. Therefore, in addition to the reversal of the driving direction of the wire, it takes time to increase or decrease the tension accompanying the reversal.

  In JP-A-8-323609, for the purpose of reducing only the wire tension on the winding side, between the wire feeding bobbin and the guide roller and between the guide roller and the wire winding bobbin. An auxiliary roller having a diameter smaller than that of the guide roller is provided, and the auxiliary roller is connected to a rotation shaft of the guide roller via a one-way clutch. According to this apparatus, only the auxiliary roller on the winding side is connected to the guide roller and the rotation is braked, so that the tension of the wire is divided at the auxiliary roller.

  However, this device only has a function of giving a constant step to the tension, and in order to adjust the tension of the wire, a tension adjusting device must be provided separately from the device. In other words, the device described in the above-mentioned Japanese Patent Application Laid-Open No. 8-323609 must be specially provided separately from the tension adjusting device, and there is an inconvenience that the configuration of the entire wire saw is increased accordingly.

  In view of such circumstances, the present invention efficiently cuts a workpiece while effectively reducing only the tension of the wire on the winding side by using a tension adjusting device for bringing the tension of the wire close to a predetermined target tension. The purpose is to provide technology to do this.

  As a means for solving the above-mentioned problems, the present invention uses a wire saw in which a cutting wire fed from a wire feeding device is wound around a plurality of guide rollers and wound around the wire winding device, and the guide thereof is used. In a method of cutting and feeding a plurality of wires arranged between rollers in an axial direction while cutting and feeding the workpiece by moving the workpiece relative to the wires, the wire is fed from the wire feeding device. The wire is wound up by the wire winding device, and the tension on the feeding side is pressed against the wire fed from the wire feeding device so that the tension of the wire approaches the first target tension. And the winding side tension applying member is pushed against the tension of the wire wound by the wire winding device. Adjusting the wire so that the wire approaches a second target tension that is lower than the first target tension. Reversely feeding the wire from the wire winding device, winding the wire with the wire winding device, and pressing the winding-side tension applying member against the wire fed from the wire winding device. The tension of the wire is adjusted so as to approach a third target tension higher than the second target tension, and the feeding side tension applying member is pressed against the wire wound by the wire feeding device. While adjusting the tension of the wire so as to approach the fourth target tension lower than the first target tension and the third target tension, The backward drive cutting process for advancing the cutting of the workpiece, and after the forward drive cutting process, the drive speed of the wire is decelerated, and the drive direction of the wire is accelerated after the drive direction is reversed, and the backward drive cutting is performed. After the first switching step transitioning to the step and the backward drive cutting step, the drive speed of the wire is decelerated, the direction of the drive is reversed, and then the drive speed of the wire is accelerated to the forward drive cutting step. The second switching step to be transferred is repeated in the order of the forward drive cutting step, the first switching step, the reverse drive cutting step, and the second switching step, and during the first switching step And adjusting the tension of the wire by the feeding-side tension applying member while lowering the target tension of the wire on the wire feeding device side from the first target tension to the fourth target tension, and The tension of the wire is adjusted by the winding-side tension applying member while increasing the target tension of the wire on the wire winding device side from the second target tension to the third target tension.

  According to this method, when the direction of driving of the wire is reversed in the first switching step, the tension of the wire is switched using the time required for the deceleration of the wire and the subsequent acceleration in the first switching step. Therefore, there is no loss time that occurs due to the tension switching.

  In particular, even during the first switching step, during the wire deceleration period, the transition from the first target tension to the fourth target tension and from the second target tension to the third target tension. If the transition is completed, the drive in the backward direction of the wire can be started after substantially adjusting the wire tension to an appropriate value on both the feeding side and the winding side.

  Further, in the present invention, the wire winding may be performed during the second switching step in place of the transition of the target tension in the first switching step or in addition to the transition of the target tension in the first switching step. The wire tension is adjusted by the winding side tension applying member while lowering the target tension of the wire on the apparatus side from the third target tension to the second target tension, and the target of the wire on the wire feeding apparatus side By adjusting the tension of the wire by the feeding-side tension applying member while increasing the tension from the fourth target tension to the first target tension, it is possible to eliminate the loss time due to the switching of the tension of the wire. .

  Also in the second switching step, during the wire deceleration period, the transition from the third target tension to the second target tension and the transition from the first target tension to the fourth target tension are performed. If completed, driving in the forward direction of the wire can be started after substantially adjusting the wire tension to an appropriate value on both the feeding side and the winding side.

  The operations for adjusting the tension of the wire in each of the steps include an operation of detecting the actual tension of the wire, and applying each tension to a predetermined portion of the wire so that the detected tension approaches a target tension. It is preferable to include an operation of pressing a member.

  The present invention also provides a wire saw for simultaneously cutting a workpiece at a plurality of locations using a cutting wire, wherein the rotation center axes are arranged in parallel to each other, and the wire is wound around the wire saw. A plurality of guide rollers, a wire feeding device for feeding the wire to the guide roller, a wire winding device for winding the wire from the guide roller, and a specific guide roller of the guide rollers Cutting and feeding means for cutting and feeding the workpiece to the wire by relatively moving a plurality of wires stretched between the workpiece and the workpiece, and feeding the wire from the wire feeding device And the forward drive cutting process which advances the cutting | disconnection of the said workpiece | work, winding this wire with the said wire winding device, and the said wire winding device The wire wound up by the reverse is fed out from the wire take-up device, and the retracted drive cutting step of cutting the workpiece while winding the wire by the wire feed device, and after the forward drive cutting step A first switching step of decelerating the drive speed of the wire and further reversing the direction of the drive and then accelerating the drive speed of the wire and proceeding to the reverse drive cutting step, and after the reverse drive cut step, A second switching step of decelerating the drive speed of the wire and reversing the direction of the drive and then accelerating the drive speed of the wire and proceeding to the forward drive cutting step, the forward drive cutting step, the first The operation of the wire feeding device and the wire winding device is controlled so as to be repeated in the order of 1 switching step, the backward drive cutting step, and the second switching step. A wire driving control means, a feeding side tension applying member pressed against the wire in a region between the wire feeding device and each guide roller, and changing the tension of the wire by changing the pressing force Including a side tension operating means and a winding side tension applying member pressed against the wire in a region between the wire winding device and each guide roller, and changing the pressing force changes the tension of the wire. In the winding-side tension operating means and the forward drive cutting step, the tension of the wire fed from the wire feeding device is brought close to the first target tension, and the tension of the wire wound by the wire winding device is changed to the first tension. The second target tension that is lower than the target tension of 1 is approached, and in the backward drive cutting step, the wire is wound out from the wire winding device. The tension of the wire to be pulled is brought close to a third target tension higher than the second target tension, and the tension of the wire wound by the wire feeding device is lower than the first target tension and the third target tension. Tension control means for activating each of the tension operation means so as to approach the fourth target tension, and the tension control means is a target tension of the wire on the wire feeding device side during the first switching step. The tension of the wire is adjusted while lowering the first target tension from the first target tension to the fourth target tension, and the target tension of the wire on the wire winding device side is changed from the second target tension to the third target tension. Each of the tension operating means is operated so as to adjust the tension of the wire while raising the target tension.

  In this wire saw as well, the tension control means moves the first target tension to the fourth target tension and the second target tension during the first switching step, particularly during the wire deceleration period. As long as the transition from the tension to the third target tension is completed, the drive in the backward direction of the wire can be started after adjusting the wire tension substantially to an appropriate wire tension on both the feeding side and the winding side.

  In the present invention, the tension control means may replace the target tension in the first switching step, or in addition to the target tension transition in the first switching step, in the second switching step. And adjusting the tension of the wire while decreasing the target tension of the wire on the wire winding device side from the third target tension to the second target tension, and the target tension of the wire on the wire feeding device side The tension operating means may be operated so as to adjust the tension of the wire while increasing the tension from the fourth target tension to the first target tension.

  Also in the second switching step, during the wire deceleration period, the transition from the third target tension to the second target tension and the transition from the first target tension to the fourth target tension are performed. If completed, driving in the forward direction of the wire can be started after substantially adjusting the wire tension to an appropriate value on both the feeding side and the winding side.

  The tension control means includes a tension detection means for detecting the tension of the wire in a region from the wire feeding device to the guide roller and a region from the guide roller to the wire take-up device, and the tension of the wire in accordance with each step. What includes target tension setting means for setting a target tension, and tension adjusting means for operating the tension operation means to bring the tension detected in each region close to the target tension set by the target tension setting means, Is preferred.

  As described above, according to the present invention, while effectively using the device that manipulates the tension of the wire by pressing the tension applying member against the wire, only the tension of the wire on the winding side is effectively reduced. There is an effect that the work can be cut by an efficient operation with little loss time.

  A preferred embodiment of the present invention will be described with reference to FIGS.

  The wire saw shown in FIG. 1 includes a pair of wire feeding / winding devices 10A and 10B and four guide rollers 24A, 24B, 26A and 26B arranged therebetween. Among these guide rollers, the guide rollers 24A and 24B are arranged at the same height position, and the guide rollers 26A and 26B are arranged at positions below the guide rollers 24A and 24B, respectively.

  Between the wire feeding / winding device 10A and the guide rollers 24A, 24B, 26A, and 26B, the fixed pulleys 12A, 14A, and 16A, the feeding-side tension operating device 18A, A fixed pulley 22A is provided, and the feeding-side tension operating device 18A includes a movable pulley 20A that is a feeding-side tension applying member. Similarly, between the wire feeding / winding device 10B and the guide rollers 24A, 24B, 26A, 26B, in order from the side closer to the wire winding device 10B, the fixed pulleys 12B, 14B, 16B, the winding side tension. An operating device 18B and a fixed pulley 22B are provided, and the winding side tension operating device 18B includes a movable pulley 20B which is a winding side tension applying member.

  Each of the wire feeding / winding devices 10A and 10B includes bobbins 9A and 9B around which a cutting wire W is wound, and bobbin driving motors 11A and 11B that rotationally drive the bobbins. The wire W fed out from the bobbin 9A of the one wire feeding / winding device 10A is hung in the order of the fixed pulleys 12A, 14A, 16A, the movable pulley 20A of the tension operating device 18A, and the fixed pulley 22A, and further the guide roller 24A. , 24B, 26B, 26A, and then wound around the fixed pulley 22B, the movable pulley 20B of the tension operating device 18B, and the fixed pulleys 16B, 14B, 12B in this order, and the other wire feeding / winding device. The wire W is wound around the bobbin 9B of 10B, and appropriate tension is applied to the wire W by the two tension operation devices 18A and 18B. Further, a roller drive motor 25 for rotating the rotation shaft is connected to a rotation shaft of a specific guide roller (guide roller 26A in the illustrated example) of the guide rollers 24A, 24B, 26B, and 26A.

  Then, when the rotation driving direction of the bobbins 9A and 9B by the bobbin driving motors 11A and 11B and the rotation driving direction of the guide roller 26A by the roller driving motor 25 are switched between forward and reverse, the wire W is fed out from the bobbin 9A and is moved to the bobbin. The state can be switched between a state wound around 9B and a state where the wire W is drawn out from the bobbin 9B and wound around the bobbin 9A.

  That is, in the wire saw according to this embodiment, a large number of wires W are stretched between the guide rollers 24A and 24B among the four guide rollers, and reciprocate in the longitudinal direction (axial direction). Driven. However, in the present invention, the number of the guide rollers can be freely set in a range of two or more regardless of the specific number.

  Above the wire W stretched between the guide rollers 24A and 24B, a work feeding device 30 for moving a cylindrical work (for example, a semiconductor ingot) 28 is provided. The workpiece feeding device 30 includes a workpiece holding unit 32 and a workpiece feeding motor 34. The workpiece holding unit 32 holds the workpiece 28 in a direction in which a target crystal orientation can be obtained based on the crystal axis. The workpiece feeding motor 34 is combined with a ball screw (not shown), 32 and the workpiece 28 are moved up and down integrally (that is, cut and fed). In this embodiment, the work feed motor 34 is constituted by a servo motor and also serves as a feed position detecting means for detecting the cutting feed position of the work 28.

  Above the wire W stretched between the guide rollers 24A and 24B, slurry supply devices 36A and 36B are provided at positions on the left and right sides of the work 28. These slurry supply devices 36 </ b> A and 36 </ b> B simultaneously supply a processing liquid (slurry) in which abrasive grains are mixed to each wire W that is driven at high speed, and attach this to the surface of the wire W.

  Therefore, in this wire saw, a large number of wires W stretched between the guide rollers 24A and 24B are simultaneously driven in the longitudinal direction at a high speed, and the machining fluid is supplied to the wires W from the slurry supply devices 36A and 36B. By cutting and feeding the workpiece 28 downward with respect to these wires W, a large number of wafers are simultaneously cut out from the workpiece 28 at the same time.

  Next, the structure of the tension operation devices 18A and 18B will be described with reference to FIGS. Since the configurations of the tension operating devices 18A and 18B are the same, the tension operating device 18A will be described as an example here.

  The movable pulley 20A is disposed between the fixed pulleys 16A and 22A, and the wire length changes as the movable pulley 20A moves up and down (specifically, when the movable pulley 20A descends, the wire length increases, and the movable pulley 20A The pulleys 16A, 20A, and 22A are arranged so that the wire length decreases when the height increases.

  A tension detector (tension detecting means) 40 is attached to the support member 38 of the fixed pulley 22A. The tension detector 40 detects the load applied to the support member 38 and, consequently, the tension of the wire W. As the tension detector 40, a load cell or a combination of a differential transformer and a spring can be used.

  The movable pulley 20A is attached to the tip of the lever 44 so as to be rotatable about a rotating shaft 42 orthogonal to the axial direction of the wire W. A rotation center shaft 46 is fixed to the base end of the lever 44, and the rotation center shaft 46 is connected to a swing cylinder 50 fixed to a fixed side plate 48. The swing cylinder 50 applies tension to the wire W by rotating the lever 44 and the movable pulley 20A around the rotation center shaft 46 and pressing the movable pulley 20A against the wire W. The tension is changed by increasing or decreasing the pressing force.

  An encoder 52 is connected to the rotation center shaft 46. The encoder 52 detects the rotation angle position of the rotation center shaft 46, in other words, the position of the movable pulley 20A.

  This wire saw is provided with a controller 60 as shown in FIG. The controller 60 has a function as tension control means, and includes tension adjustment means 62, speed adjustment means 64, and target tension setting means 66.

  The tension adjusting means 62 controls the swing cylinder 50 so that the wire tension detected by the tension detector 40 on each of the wire feeding side and the wire winding side is kept at the target tension T set by the target tension setting means 66. An electric signal is output to the pneumatic servo circuit 54 to be driven to adjust the driving force of the swing cylinder 50 and the wire tension. Specifically, for example, when the detected tension on the wire feeding / winding device 10A side is higher than the target tension T, the driving force of the swing cylinder 50 is reduced and the lever connected to the swing cylinder 50 is reduced. By rotating 44 upward, the force with which the movable pulley 20A supported by the lever 44 is pressed against the wire W is lowered. On the contrary, when the detected tension is lower than the target tension T, the driving force of the swing cylinder 50 is increased and the lever 44 is rotated downward to rotate counterclockwise in FIG. The force by which the movable pulley 20A is pressed against the wire W is increased.

  As the process for cutting the workpiece 28 while driving the wire W, the speed adjusting means 64 includes a forward drive cutting process, a first switching process, a backward drive cutting process, and a second switching process, which will be described in detail later. The direction and driving speed of bobbin driving by the bobbin driving motors 11A and 11B are adjusted so as to be repeatedly executed in this order.

  Here, the forward drive cutting step is a step of feeding the wire W from the wire feeding device 10A and advancing the cutting of the workpiece 28 while winding the wire W by the wire winding device 10B. In the reverse drive cutting step, the wire W taken up by the wire take-up device 10B is fed out from the wire take-up device 10B, and the wire W is taken up by the wire take-up device 10A. This is a process of proceeding with cutting.

  In the first switching step, after the forward drive cutting step, the drive speed of the wire W is decelerated, and further, the drive direction of the wire is accelerated after reversing the direction of the drive, and the backward drive cutting step. In the second switching step, after the backward drive cutting step, the wire drive speed is reduced, the drive direction is reversed, and then the wire drive speed is accelerated to advance the wire. This is a process for shifting to a drive cutting process.

  Note that the speed adjusting means 64 according to this embodiment is configured so that the position of the movable pulleys 20A and 20B detected by the encoder 52 is a reference position that is set in advance (here, the lever 44 is horizontal as shown by the solid line in FIG. 2). The control signal is also output to the bobbin drive motors 11A and 11B so that the rotational speeds of both the bobbins 9A and 9B are finely adjusted. For example, in the state where the wire W is fed out from the bobbin 9A and wound around the bobbin 9B, when it is detected that the movable pulley 20A on the feeding side is below the reference position, the movable pulley 20A is raised. Therefore, if the rotational speed of the bobbin 9A on the side serving as the wire feeding device is decreased and, conversely, when it is detected that the movable pulley 20A is located above the reference position, the movable pulley 20A is In order to lower, the rotational speed of the bobbin 9A on the side serving as the wire feeding device is increased. On the other hand, when it is detected that the movable pulley 20B on the wire winding side is in a position below the reference position, the bobbin 9B on the side serving as the wire winding device is lifted to raise the movable pulley 20B. When the rotational speed is increased and, conversely, when it is detected that the movable pulley 20B is at a position higher than the reference position, the bobbin 9B on the wire winding device side is lowered to lower the movable pulley 20B. Reduce the rotation speed.

  The target tension setting means 66 sets the target tension T of the wire W and inputs it to the tension adjustment means 62 as described above, and has a feature that the target tension T is changed according to each step. Yes. Specifically, the target tension T is changed as follows.

  1. Forward drive cutting step: The target tension T on the wire feeding device 10A side is fixed to the first target tension T1, and the second target tension T on the wire winding device 10B side is lower than the first target tension T1. The target tension T2 is fixed.

  2. First switching step: The target tension T on the wire winding device 10B side is gradually increased from the second target tension T2 to a third target tension T3 higher than the second target tension T2. Conversely, the target tension T on the wire feeding device 10A side is gradually lowered from the first target tension T1 to the fourth target tension T4 lower than the first target tension T1 and the third target tension T3. .

  3. Reverse drive cutting step: The target tension T on the wire winding device 10B side is fixed to the third target tension T3, and the target tension T on the wire feeding device 10A side is fixed to the fourth target tension T4.

  4). Second switching step: The target tension T on the wire feeding device 10A side is gradually increased from the fourth target tension T4 to the first target tension T1. Conversely, the target tension T on the wire winding device 10B side is gradually lowered from the third target tension T3 to the second target tension T2.

  In this embodiment, the first target tension T1 and the third target tension T3 are each set to 25 (N), and the second target tension T2 and the fourth target tension T4 are each 13 ( N). Further, the transition speed of the target tension T in each switching step is set so that the transition substantially coincides with the end of deceleration of the wire drive speed in the switching step (that is, when the wire W stops).

  Therefore, the relationship between each process and the target tension is summarized as shown in the following table.

  Next, details of the operation of the wire saw in each step will be described with reference to the graphs of FIGS.

1. In this process, the bobbin 9A of the wire feeding device 10A is rotationally driven in the feeding direction, and the bobbin 9B of the wire winding device 10B is driven in the winding direction, so that the wire W is fed from the bobbin 9A. And wound on the bobbin 9B. When the workpiece 28 is cut and fed together with the forward drive of the wire W, the workpiece 28 is cut.

  At this time, the target tension setting means 66 sets the target tension T of the wire W on the wire feeding device 10A side to the first target tension T1 (= 25N), and the target tension T of the wire W on the wire winding device 10B side. Is set to the second target tension T2 (= 13N). In response to the setting of the target tension T, the tension adjusting means 62 determines that the detected tension of the tension detector 40 on the wire feeding device 10A side and the detected tension of the tension detector 40 on the wire winding device 10B side are the first target. The driving force of each oscillating cylinder 50 is adjusted so as to approach the tension T1 and the second target tension T2.

  On the other hand, the detection signal of the encoder 52 (that is, the position detection signal of the movable pulley 20A) provided in the tension operating device 18A is taken into the speed adjusting means 64. The speed adjusting means 64 compares the detection position of the movable pulley 20A with a preset reference position. If the former is higher than the latter, the speed adjusting means 64 is a bobbin that is a wire feeding bobbin to lower the movable pulley 20A. Increase the rotational speed of 9A. On the other hand, when the former is lower than the latter, the rotational speed of the bobbin 9A, which is a wire feeding bobbin, is decreased to raise the movable pulley 20A. By such control, in a steady state, the movable pulley 20A is held substantially at the reference position, and the margin for movement is ensured.

  With the above control, the wire tension on the side of the wire feeding device 10A is kept substantially at the first target tension T1, thereby ensuring the wire tension necessary for good cutting of the workpiece 28 between the guide rollers 24A and 24B. The On the other hand, since the wire tension on the side of the wire winding device 10B is substantially suppressed to the second target tension T2, the biting of the wire W in the bobbin 9B of the wire winding device 10B is alleviated, and the strength of the device 10B is reduced. Burden is reduced.

2. First switching step When the forward drive cutting step reaches a preset first wire length (for example, 300 m), the process proceeds to the first switching step. In this step, first, the driving of the wire W is gradually decelerated. Then, when the speed becomes zero, this time, the driving direction of the wire W is reversed and gradually accelerated, and the process proceeds to the next backward driving cutting process. That is, the drive of the wire W is gradually switched from the forward drive to the backward drive.

  At this time, the target tension setting means 66 starts decreasing the target tension T on the wire feeding device 10A side and starts increasing the target tension T on the wire winding device 10B side almost simultaneously with the deceleration of the wire W. Almost simultaneously with the end of the deceleration, the target tension T on the wire feeding device 10A side is made to reach the fourth target tension T4 (= 13N), and the target tension T on the wire winding device 10B side is set to the third target tension T. The target tension T3 (= 25N) is reached. That is, the transition of each target tension T is completed during the deceleration period. Following this, the actual wire tension also increases or decreases, and when the backward drive is started, the wire tension on the wire winding device 10B side is increased to about 25N, and conversely the wire tension on the wire feeding device 10A side. Is lowered to approximately 13N.

3. Reverse drive cutting step In this step, the bobbin 9B of the wire winding device 10B is rotationally driven in the feeding direction, and the bobbin 9A of the wire feeding device 10A is driven in the winding direction, whereby the wire W is fed from the bobbin 9B. And wound around the bobbin 9A. At this time, as to the tension control, the wire tension on the wire winding device 10B side is brought close to the third target tension T3 (= 25N), and the wire tension on the wire feeding device 10A side is set to the fourth target tension T4 ( = 13N), the wire tension (≈25N) necessary for good cutting of the workpiece 28 can be secured between the guide rollers 24A and 24B, as in the forward drive cutting step. At the same time, the wire tension on the side of the wire feeding device 10A on the winding side can be suppressed (≈13N), and the strength burden on the device 10A can be reduced.

4). Second switching process When the backward drive cutting process reaches a second wire length (for example, 100 m) shorter than the first wire length, the process proceeds to the second switching process. Also in this step, first, the driving of the wire W is gradually decelerated, and when the speed becomes zero, the driving direction of the wire W is reversed and gradually accelerated, and the process proceeds to the forward driving cutting step. . That is, the drive of the wire W is gradually switched from the backward drive to the forward drive.

  At this time, the target tension setting means 66 starts increasing the target tension T on the wire feeding device 10A side and starts decreasing the target tension T on the wire winding device 10B side almost simultaneously with the deceleration of the wire W. Almost simultaneously with the end of the deceleration, the target tension T on the wire feeding device 10A side is returned to the first target tension T1 (= 25N), and the target tension T on the wire winding device 10B side is set to the second target tension T. Return to the target tension T2 (= 13N). That is, the return of each target tension T is completed during the deceleration period. Following this, the actual wire tension is also restored, and when the forward drive is resumed in the next forward drive cutting step, the wire tension on the wire feeding device 10A side is increased to approximately 25N, and conversely the wire winding The wire tension on the device 10B side is lowered to approximately 13N.

  As described above, according to this device, the tension for tension adjustment provided on the wire feeding device 10A side and the wire winding device 10B side, respectively, while adopting the reciprocating driving method in which the wire W is repeatedly moved forward and backward. By effectively using the operation devices 18A and 18B, the wire tension on the winding side is reduced while securing the wire tension required for stable cutting, and the bobbin on the winding side (bobbin 9B when moving forward, The strength burden on the bobbin 9A) can be reduced. In addition, since the tension is switched between the first switching process and the second switching process for reversing the wire, it is possible to prevent the occurrence of loss time due to the switching of the tension.

  In the above-described embodiment, the tension switching is completed within the deceleration period in each switching step. However, the tension switching period may be extended until the subsequent acceleration period. . However, if the tension switching is completed within the deceleration period, it becomes possible to start the wire driving after reversal with an appropriate tension.

  In the above embodiment, both the first switching process and the second switching process are used as the tension switching period, but only one of the switching processes is used as one tension switching period. Even if the other tension switching period protrudes from the other switching process, the work efficiency can be increased by eliminating the loss time due to the one tension switching period.

  In addition, the present invention can take the following aspects, for example.

  In the present invention, the first target tension T1 and the third target tension T3 may not be equal, and similarly, the second target tension T2 and the fourth target tension T4 may not be equal. These target tensions can be appropriately set within a range that satisfies the condition that the target tensions T2 and T4 are lower than the target tensions T1 and T3.

  In the present invention, the specific configuration of tension control is not particularly limited. For example, if the movable range of the movable pulleys 20A and 20B is sufficiently secured, fine adjustment of the wire driving speed by the speed adjusting means 64 can be omitted. Further, control may be performed so as to temporarily increase the wire tension (the tension of the wire portion contributing to the cutting of the work 28) at the beginning of the work cutting.

  The specific structures of the tension operation devices 18A and 18B can be changed as appropriate. For example, the movable pulleys 20A and 20B may be linearly displaced by a feed screw mechanism, a rack and pinion mechanism or the like while being guided by a rail or the like. Even when the lever 44 is used, the means for swinging the lever 44 is not limited to the swing cylinder 50, and for example, a servo motor may be used.

1 is an overall configuration diagram of a wire saw according to an embodiment of the present invention. It is a front view of the tension operation device provided in the wire saw. It is a top view of the tension operation device. It is a block diagram which shows the function structure of the controller with which the said wire saw is equipped. (A) (b) is a graph which shows the time change of the wire drive speed and wire tension in the said wire saw.

Explanation of symbols

W wire 9A bobbin of wire feeding device 9B bobbin of wire winding device 10A wire feeding device 10B wire winding device 18A feeding side tension operating device 18B winding side tension operating device 20A movable pulley (feeding side tension applying member)
20B Movable pulley (winding side tension applying member)
24A, 24B, 26A, 26B Guide roller 28 Work 30 Cutting feed device 40 Tension detector (tension detection means)
44 Lever 60 Controller 62 Tension adjusting means 64 Speed adjusting means 66 Target tension setting means

Claims (8)

Using a wire saw in which a cutting wire fed from a wire feeding device is wound around a plurality of guide rollers and taken up by a wire winding device, a plurality of wires arranged between the guide rollers are arranged in the axial direction. In the method of cutting and feeding the workpiece by moving the workpiece relative to these wires while driving,
The wire is fed out from the wire feeding device, and the wire is wound up by the wire winding device, and the feeding tension applying member is pressed against the wire fed out from the wire feeding device, thereby adjusting the tension of the wire. The wire is adjusted to be close to the first target tension, and the winding side tension applying member is pressed against the tension of the wire wound by the wire winding device, so that the wire is lower than the first target tension. A forward drive cutting step in which the workpiece is cut while being adjusted to approach the second target tension;
The wire taken up by the wire take-up device is fed out from the wire take-up device, and the wire is taken up by the wire take-up device, and the wire is taken out from the wire take-up device. By adjusting the take-up-side tension applying member, the tension of the wire is adjusted so as to approach a third target tension higher than the second target tension, and the feeding to the wire wound by the wire feeding device is performed. Retreat to advance the cutting of the workpiece while adjusting the tension of the wire so as to approach the fourth target tension lower than the first target tension and the third target tension by pressing the side tension applying member Driven cutting process;
A first switching step of decelerating the drive speed of the wire after the forward drive cutting step and further reversing the direction of the drive and then accelerating the drive speed of the wire and proceeding to the reverse drive cutting step;
A second switching step of decelerating the drive speed of the wire after the reverse drive cutting step, reversing the direction of the drive, accelerating the drive speed of the wire, and shifting to the forward drive cut step; Repetitively performing the forward drive cutting step, the first switching step, the backward driving cutting step, and the second switching step,
In addition, during the first switching step, the wire tension is reduced by the feeding side tension applying member while lowering the target tension of the wire on the wire feeding device side from the first target tension to the fourth target tension. And adjusting the tension of the wire by the winding side tension applying member while increasing the target tension of the wire on the wire winding device side from the second target tension to the third target tension. A method of cutting a workpiece with a featured wire saw. Using a wire saw in which a cutting wire fed from a wire feeding device is wound around a plurality of guide rollers and taken up by a wire winding device, a plurality of wires arranged between the guide rollers are arranged in the axial direction. In the method of cutting and feeding the workpiece by moving the workpiece relative to these wires while driving,
The wire is fed out from the wire feeding device, and the wire is wound up by the wire winding device, and the feeding tension applying member is pressed against the wire fed out from the wire feeding device, thereby adjusting the tension of the wire. The wire is adjusted to be close to the first target tension, and the winding side tension applying member is pressed against the tension of the wire wound by the wire winding device, so that the wire is lower than the first target tension. A forward drive cutting step in which the workpiece is cut while being adjusted to approach the second target tension;
The wire taken up by the wire take-up device is fed out from the wire take-up device, and the wire is taken up by the wire take-up device, and the wire is taken out from the wire take-up device. By adjusting the take-up-side tension applying member, the tension of the wire is adjusted so as to approach a third target tension higher than the second target tension, and the feeding to the wire wound by the wire feeding device is performed. Retreat to advance the cutting of the workpiece while adjusting the tension of the wire so as to approach the fourth target tension lower than the first target tension and the third target tension by pressing the side tension applying member Driven cutting process;
A first switching step of decelerating the drive speed of the wire after the forward drive cutting step and further reversing the direction of the drive and then accelerating the drive speed of the wire and proceeding to the reverse drive cutting step;
A second switching step of decelerating the drive speed of the wire after the reverse drive cutting step, reversing the direction of the drive, accelerating the drive speed of the wire, and shifting to the forward drive cut step; Repetitively performing the forward drive cutting step, the first switching step, the backward driving cutting step, and the second switching step,
In addition, during the second switching step, the wire tensioning member reduces the target tension of the wire on the wire winding device side from the third target tension to the second target tension. Adjusting the tension, and adjusting the tension of the wire by the feeding-side tension applying member while increasing the target tension of the wire on the wire feeding device side from the fourth target tension to the first target tension. A method of cutting a workpiece with a featured wire saw. In the cutting method of the workpiece | work by the wire saw of Claim 2,
During the first switching step, the tension of the wire is adjusted by the feeding-side tension applying member while lowering the target tension of the wire on the wire feeding device side from the first target tension to the fourth target tension. And adjusting the tension of the wire by the winding-side tension applying member while increasing the target tension of the wire on the wire winding device side from the second target tension to the third target tension. A method of cutting a workpiece with a wire saw. In the cutting method of the workpiece | work by the wire saw in any one of Claims 1-3,
As an operation for adjusting the tension of the wire in each step,
Detecting the actual tension of the wire;
A method of cutting a workpiece with a wire saw, comprising: pressing each of the tension applying members against a predetermined portion of the wire so that the detected tension approaches a target tension. A wire saw for simultaneously cutting a workpiece at a plurality of locations using a cutting wire,
A plurality of guide rollers which are arranged so that rotation center axes thereof are parallel to each other and around which the wire is wound;
A wire feeding device for feeding the wire to the guide roller;
A wire winding device for winding the wire from the guide roller;
Cutting feed means for cutting and feeding the workpiece to the wire by relatively moving a plurality of wires stretched between specific guide rollers of the guide rollers and the workpiece; ,
A forward drive cutting process in which the wire is fed from the wire feeding device and the workpiece is cut while the wire is wound by the wire winding device, and the wire wound by the wire winding device is On the contrary, the drive speed of the wire is reduced after the forward drive cutting process and the backward drive cutting process in which the work is cut while the wire is taken out from the wire winding apparatus and the wire is wound by the wire feeding apparatus. A first switching step in which the driving direction of the wire is further reversed and the driving speed of the wire is accelerated to shift to the backward driving cutting step, and the driving speed of the wire is reduced after the backward driving cutting step, A second switching step of reversing the driving direction and then accelerating the driving speed of the wire and shifting to the forward drive cutting step, Wire drive control for controlling the operation of the wire feeding device and the wire winding device so as to be repeated in the order of the forward drive cutting step, the first switching step, the backward driving cutting step, and the second switching step. Means,
A feeding-side tension operating means that includes a feeding-side tension applying member that is pressed against the wire in a region between the wire feeding device and each guide roller, and changes the tension of the wire by changing the pressing force;
Winding-side tension operating means that includes a winding-side tension applying member that is pressed against the wire in a region between the wire winding device and each guide roller, and changes the tension of the wire by changing the pressing force. When,
In the forward drive cutting step, the tension of the wire fed from the wire feeding device approaches a first target tension, and the tension of the wire wound by the wire winding device is lower than the first target tension. In the backward drive cutting step, the tension of the wire fed from the wire winding device is brought close to a third target tension higher than the second target tension and wound by the wire feeding device. Tension control means for operating each of the tension manipulating means so as to bring the tension of the wire to be taken close to the first target tension and the fourth target tension lower than the third target tension;
The tension control means adjusts the tension of the wire while lowering the target tension of the wire on the wire feeding device side from the first target tension to the fourth target tension during the first switching step, And each said tension operation means is operated so that the tension | tensile_strength of the said wire may be adjusted, raising the target tension | tensile_strength of the wire by the side of the said wire winding apparatus from the said 2nd target tension to the said 3rd target tension. A featured wire saw. A wire saw for simultaneously cutting a workpiece at a plurality of locations using a cutting wire,
A plurality of guide rollers which are arranged so that rotation center axes thereof are parallel to each other and around which the wire is wound;
A wire feeding device for feeding the wire to the guide roller;
A wire winding device for winding the wire from the guide roller;
Cutting feed means for cutting and feeding the workpiece to the wire by relatively moving a plurality of wires stretched between specific guide rollers of the guide rollers and the workpiece; ,
A forward drive cutting process in which the wire is fed from the wire feeding device and the workpiece is cut while the wire is wound by the wire winding device, and the wire wound by the wire winding device is On the contrary, the drive speed of the wire is reduced after the forward drive cutting process and the backward drive cutting process in which the work is cut while the wire is taken out from the wire winding apparatus and the wire is wound by the wire feeding apparatus. A first switching step in which the driving direction of the wire is further reversed and the driving speed of the wire is accelerated to shift to the backward driving cutting step, and the driving speed of the wire is reduced after the backward driving cutting step, A second switching step of reversing the driving direction and then accelerating the driving speed of the wire and shifting to the forward drive cutting step, Wire drive control for controlling the operation of the wire feeding device and the wire winding device so as to be repeated in the order of the forward drive cutting step, the first switching step, the backward driving cutting step, and the second switching step. Means,
A feeding-side tension operating means that includes a feeding-side tension applying member that is pressed against the wire in a region between the wire feeding device and each guide roller, and changes the tension of the wire by changing the pressing force;
Winding-side tension operating means that includes a winding-side tension applying member that is pressed against the wire in a region between the wire winding device and each guide roller, and changes the tension of the wire by changing the pressing force. When,
In the forward drive cutting step, the tension of the wire fed from the wire feeding device approaches a first target tension, and the tension of the wire wound by the wire winding device is lower than the first target tension. In the backward drive cutting step, the tension of the wire fed from the wire winding device is brought close to a third target tension higher than the second target tension and wound by the wire feeding device. Tension control means for operating each of the tension manipulating means so as to bring the tension of the wire to be taken close to the first target tension and the fourth target tension lower than the third target tension;
The tension control means adjusts the tension of the wire while lowering the target tension of the wire on the wire winding device side from the third target tension to the second target tension during the second switching step. And operating each of the tension operating means so as to adjust the tension of the wire while increasing the target tension of the wire on the wire feeding device side from the fourth target tension to the first target tension. A featured wire saw. The wire saw according to claim 6, wherein
The tension control means adjusts the tension of the wire while lowering the target tension of the wire on the wire feeding device side from the first target tension to the fourth target tension during the first switching step, And each said tension operation means is operated so that the tension | tensile_strength of the said wire may be adjusted, raising the target tension | tensile_strength of the wire by the side of the said wire winding apparatus from the said 2nd target tension to the said 3rd target tension. A featured wire saw. In the wire saw in any one of Claims 5-7,
The tension control means includes
Tension detecting means for detecting the tension of the wire in a region from the wire feeding device to the guide roller and a region from the guide roller to the wire winding device;
Target tension setting means for setting a target tension of the wire in accordance with each step;
A wire saw comprising: tension adjusting means for operating the tension operating means to bring the tension detected in each region close to the target tension set by the target tension setting means.

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