JP2015155119A - Wire saw and cutting work method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the fluctuation of a wire tension when swinging a wire of a wire saw, prevent breaking of the wire, and improve cutting accuracy.

SOLUTION: A wire saw 1 for cutting a traveling wire 2 while pressing a workpiece W against the traveling wire 2 comprises: a pair of reels 3, 4 for delivering and winding the wire 2 alternately; a swing disc 10 which swings around a swing shaft 10a; groove rollers 11a, 11b which are pivotally supported to the swing disc 10, and freely rotatable; a wire row 2a formed between the groove rollers 11a, 11b by being wound around the groove rollers 11a, 11b; a pair of tensioners 50, 60 which are on a wire travel path between both reels 3, 4, provided on the delivery side and the winding side of the wire row 2a respectively, provided with motors 53, 63 for applying a predetermined tension to the wire by swinging with its one end as a base point; and a control device 17 for controlling the wire saw 1. The control device 17 controls the tensioners 50, 60 in synchronization with the swing of the swing disc 10.

COPYRIGHT: (C)2015,JPO&INPIT

Description

  The present invention relates to a wire saw for cutting semiconductor materials such as silicon, sapphire, and SiC, ceramics, and a cutting method.

  Conventionally, a wire saw for cutting a workpiece such as a semiconductor ingot into a wafer shape is known. In this wire saw, a wire row is formed by winding a wire between a plurality of groove rollers, and the wire in the wire row travels in one direction or reciprocates. Then, by pressing the workpiece against the wire row, a large number of workpieces are simultaneously cut out in a wafer shape.

  In the wire saw, both ends of the wire are wound around the supply / recovery reel of the wire, respectively, and the wire fed from the supply-side reel is wound around the recovery-side recovery reel via a plurality of groove rollers. It is supposed to be. Further, when the wire traveling direction is switched, the supply side and the collection side are reversed, so that the wire is fed and wound.

  Further, when cutting the workpiece, as the cutting progresses, the cutting load increases and it becomes difficult to discharge the cutting waste. Therefore, a method is known in which the wire is cut while moving in a swinging arc (for example, Patent Document 1). .

  By moving the wire in a swinging arc as in Patent Document 1, the amount of contact between the workpiece and the wire is reduced, and the cutting load is reduced. By reducing the cutting load in this way, the cutting speed increases and the cutting waste is easily discharged.

  However, the wire saw disclosed in Patent Document 1 has a large fluctuation in the tension of the wire when the wire is moved in a swinging arc motion, which may cause problems such as a decrease in cutting accuracy and a break in the wire. That is, the wire length is displaced by the swinging arc motion of the groove roller between the supply-side and recovery-side wires drawn from the wire row and the respective guide pulleys that receive both wires. Is pulled, and the other wire is loosened.

  The displacement of the wire length as described above places a large load on the groove portions on the supply side and the collection side of the groove roller, so that the guides on both sides of the first groove and the groove roller corresponding to the supply side and the collection side of the groove roller respectively. There is a problem that the pulley is dug deeply. As described above, when the groove roller and the guide pulley are deeply dug and worn, there is a problem that the wire tension of the portion fluctuates or the wire is caught in the deeply dug groove and the wire is disconnected.

  Therefore, a wire saw having a winder speed control means for controlling the rotational speed of a winder (corresponding to a supply / recovery reel) in synchronism with the swinging as an apparatus for relieving the tension state and the slack state of the wire. Known (for example, Patent Document 2).

Japanese Unexamined Patent Publication No. 01-171753 JP 2012-236256 A

  The device of Patent Document 2 increases or decreases the speed of the winder so as to adjust the amount of winding and winding of the winder according to the wire length displacement amount of the wire travel path at the time of swinging.

  By the way, although the apparatus of the above-mentioned patent document 2 controls the drive of the winder, these winders are wound with multiple wires with steel wires as core wires, and are further thickened to maintain strength. Since it is formed, it becomes a heavy weight. When trying to control such a heavy winder during forward / reverse reversal of wire travel, there is a problem that it is difficult to control instantaneously because it is greatly affected by inertia (inertial force). In addition, a winder is often connected to a large motor to control the rotation of heavy objects as described above, and this large motor can be controlled by following a minute change in wire length. There was a difficult problem.

  When the wire length displacement amount at the time of swinging cannot be followed as described above, there is a problem that a load is applied to the wire and the wire is disconnected or the cutting accuracy is lowered due to fluctuations in the tension of the wire.

  Further, since the apparatus of Patent Document 2 controls the displacement caused by the swinging at the position farthest from the swinging part, that is, the rotational speed of the winder, the wire running corresponding to the wire length displacement is performed. There are problems that the path length becomes long, an error in the control amount occurs, and the time until the control is reflected becomes long. Thus, if the time until the control is reflected is long, the wire tension fluctuates, and there is a problem that the wire is broken or the cutting accuracy is lowered.

  Accordingly, an object of the present invention is to prevent wire breakage and improve cutting accuracy by speeding up the control and controlling it with high accuracy in order to immediately absorb the displacement of the wire length due to the swinging of the wire.

Therefore, the invention of claim 1
In a wire saw that presses a workpiece against a traveling wire and cuts the workpiece,
A pair of reels for alternately feeding and winding the wire; and
A swing disk that swings about a swing shaft formed substantially perpendicular to the direction in which the workpiece is pressed;
A plurality of groove rollers that are pivotally supported by the oscillating disk and are rotatable about a rotation axis parallel to the oscillating axis;
A wire row formed between the groove rollers by being wound around the plurality of groove rollers;
On the wire travel path between the reels, provided on the feeding side and the winding side of the wire row, respectively, a guide pulley is provided at one end thereof, and the other end side is pivoted from one end pivotally supported. A pair of tensioners provided with a motor for applying a predetermined tension to the wire,
A control device for controlling the wire saw;
With
The control device is a wire saw that employs a configuration in which the tensioner is controlled in synchronization with the swing of the swing disk.

The invention of claim 2 is the wire saw according to claim 1,
Both the tensioners are provided movably along the travel path of the wire,
This is a wire saw that employs a configuration in which each tensioner is moved in a direction to cancel the fluctuation of the wire length accompanying the swinging of the groove roller support portion.

The invention of claim 3 is the wire saw according to claim 1,
The control of the tensioner by the control device is a wire saw adopting a configuration in which the tension is controlled by increasing or decreasing the torque of the motor.

The invention of claim 4
In a wire saw cutting method for pressing a workpiece against a traveling wire and cutting the workpiece,
This is a wire saw cutting method employing a configuration in which each tensioner is moved in a direction to cancel the fluctuation of the wire length accompanying the swing of the swing disk.

  According to the present invention, each tensioner is controlled in synchronization with the swinging of the swinging disk, so that fluctuations in the tension of the wire due to the swinging of the swinging disk can be effectively suppressed. In addition, since the light weight tensioner is controlled, it is possible to follow up the wire tension fluctuation at high speed.

  In addition, according to the present invention, since the displacement of the wire length due to swinging can be mitigated at the tensioner portion close to the groove roller support portion, the error can be reduced and the control can be performed at high speed.

  Further, according to the present invention, since the guide pulley of the tensioner portion is used as it is, there is no need to newly provide a guide pulley, and there is no increase in cost due to an increase in the number of guide pulleys. Furthermore, the load on the wire due to the increase in the number of guide pulleys can be reduced.

These are the whole schematic front views of the wire saw of this invention. These are the right side sectional views of the wire saw of the present invention. These are the partially notched top views of the wire row | line formation part vicinity of the wire saw of this invention. These are explanatory drawings showing the rocking | fluctuation operation | movement of the wire saw of this invention. These are explanatory drawings showing the rocking | fluctuation operation | movement of the wire saw of this invention. (A) And (b) is explanatory drawing showing the change of the wire length in the travel route of a wire. These are flowcharts showing the rocking | fluctuation operation | movement of the wire saw which concerns on the 1st Embodiment of this invention. These are the time charts of tensioner control with respect to the swing angle of the wire saw in the present invention. These are explanatory drawings showing the rocking | fluctuation operation | movement of the wire saw which concerns on the 2nd Embodiment of this invention. These are flowcharts showing the rocking | fluctuation operation | movement of the wire saw which concerns on the 3rd Embodiment of this invention.

  A first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is an overall schematic front view of a wire saw of the present invention. As shown in FIG. 1, a wire saw 1 includes a supply reel 3 on which a wire 2 is wound many times, a recovery reel 4 for winding the wire 2, and traverser pulleys 5 and 6 that traverse the wire 2 in a predetermined direction. , A plurality of guide rollers 7a, 7b, 7c for guiding the wire 2 in a predetermined direction, tensioners 50, 60 for applying a predetermined tension to the wire 2, and the tension of the wire at the position of the guide roller 7b. A load cell 8, two groove rollers 11a and 11b in which the wire 2 is wound a plurality of times to form a wire row 2a, and an oscillating disk 10 that pivotally supports the groove rollers 11a and 11b. , A workpiece holding unit 20 that holds a workpiece W provided at an upper portion between the two groove rollers 11a and 11b and presses the workpiece W toward the wire row, and the wire Configured with a like control unit 17 for controlling the operation of over 1.

  As shown in FIG. 2, the oscillating disk 10 is pivotally supported via a bearing 33 such as a cross-roller bearing in a circular through hole opened in an upright body plate 16. It is rotatable around the core 10a. Further, as shown in FIGS. 2 and 3, a groove roller support portion 10b is provided below the front surface of the swing disk 10 so as to protrude forward. Between the groove roller support portion 10b and the swinging disc 10, a pair of groove rollers 11a and 11b having a large number of grooves formed on the surface are pivotally supported. The groove rollers 11 a and 11 b are connected to a main shaft motor 12 provided on the back side of the swing disk 10 by an appropriate transmission mechanism (not shown), and both the groove rollers 11 a and 11 b are connected to the main shaft motor 12. It can be freely rotated by driving.

  A swing motor 15 is provided below the main body plate 16, and the drive pulley 13 is fixed to the motor shaft of the swing motor 15. A gear (not shown) is formed on the outer periphery of the rear end of the swing disk 10, and a timing belt 14 is stretched between the gear and the drive pulley 13. Accordingly, by driving the swing motor 15, the swing disk 10 swings around the swing axis 10a integrally with the groove rollers 11a and 11b.

  A plurality of wires 2 are spirally wound around the groove rollers 11a and 11b to form a wire row 2a (see FIG. 3). Above the wire row 2a, there is provided a work holding portion 20 that holds the workpiece W and presses the workpiece W toward the wire row.

  The work holding unit 20 includes a work table 21 to which the work W is fixed, a support 32 that supports the work table 21, a table holding frame 27 fixed to the upper end of the support 32, and the table holding frame 27. And a drive unit that moves up and down.

  The workpiece W is bonded with a dummy member 35 that is cut together with the workpiece W so that the workpiece W is completely cut. The dummy member 35 is made of carbon, glass, ceramics, or the like. The dummy member 35 is fixed to the work table 34 by bonding or the like, and the work table 34 is fixed to the work table 21 with a member such as a screw so that the work W is held by the work holding unit 20. Yes.

  As shown in FIG. 2, the drive unit is perpendicular to the rotation axis of the groove rollers 11 a and 11 b along the front surface of the body plate 16 and the motor 23 fixed upward on the back surface of the body plate 16. And a ball screw 22 provided on the head. A driving pulley 24 is fixed to the motor shaft of the motor 23, and a driven pulley 26 is fixed to the upper end of the ball screw 22. A timing belt 25 is stretched between the drive pulley 24 and the driven pulley 26 through the opening 16 a of the main body plate 16.

  A support frame 29 is provided in parallel with the main body plate 16 with the ball screw 22 interposed therebetween, and a rail 30 is laid in the vertical direction along the ball screw 22 on the front surface of the support frame 29. On the back surface of the table holding frame 27, a nut member 28 that is screwed with the ball screw 22 and a guide 31 that is slidably fitted to the rail 30 are provided. Accordingly, by driving the motor 23, the work holding unit 20 moves up and down integrally with the work W.

  In the case of a fixed abrasive type wire saw, for example, a fixed abrasive wire in which a grindstone such as diamond is electrodeposited and fixed by a resin or the like is wound around a core wire formed of a steel wire. In the case of a loose abrasive wire saw, a wire in which a steel wire is subjected to copper plating or brass plating is wound. The supply reel 3 is connected to a motor 3a, and forwards and reverses the supply reel 3 to feed out the wire 2 and to wind the wire 2 at the time of running reversal.

  The wire 2 fed out from the supply reel 3 is fed out and wound at a predetermined pitch in the width direction of the supply reel 3 by the traverser 5. Thereafter, the wire 2 is guided to a plurality of guide pulleys 7a, a tension pulley 51 of a tensioner 50, and a guide pulley 7b provided with a load cell 8 for measuring the tension, and is guided to the groove roller 11a via the guide pulley 7c. . The wire 2 guided to the groove roller 11a is spirally wound around the grooves of the groove rollers 11a and 11b to form a wire row 2a.

  A machining liquid supply nozzle that supplies a machining liquid (not shown) extends in a direction orthogonal to the traveling direction of the wire 2 in the wire row 2a. In the case of a fixed abrasive grain type wire saw, the machining fluid supply nozzle is configured to spray a machining fluid obtained by adding a surfactant or the like to water toward the wire 2 or the workpiece W. In the case of a loose abrasive wire saw, a slurry in which SiC, diamond, or the like is mixed with oil, glycol, or the like is used as the processing liquid.

  Further, the wire 2 coming out of the groove roller 11b is guided to the traverser 6 via a plurality of guide pulleys 7c, 7b, 7a and a tension pulley 61 like the supply side so as to be wound around the recovery reel 4. It has become. A motor 4a is also connected to the recovery reel 4 in the same manner as the supply reel 3, and the wire 2 is wound and fed out by rotating the recovery reel 4 forward and backward.

  The supply side tensioner 50 is connected to a tension pulley 51 on which the wire 2 is hung, a tension arm 52 whose one end is pivotally supported on the tension pulley 51, and the other end of the tension arm 52, and an encoder is built therein. And a motor 53.

  The supply side tensioner 50 applies a predetermined tension to the wire 2 via the tension pulley 51 by driving the motor 53 and applying a predetermined force to the tension arm 52. When the tension of the wire 2 fluctuates, the tension arm 52 rotates about the axis of the motor 53, and the angle change of the tension arm 52 is read by an encoder built in the motor 53. The recovery-side tensioner 60 also includes a motor 63 with a built-in encoder, a tension arm 62, and a tension pulley 61 as in the case of the supply-side tensioner 50. Description is omitted.

  The control device 17 is configured to control the entire wire saw 1 and is connected to various drive sources provided in the wire saw 1 as indicated by a two-dot chain line in FIG. For example, the basic traveling control of the wire 2 is performed by controlling the speed ratio of the motor 3a, the spindle motor 12, and the motor 4a based on the tension fluctuation in the supply side and recovery side tensioners 50 and 60. ing.

  The control device 17 controls the swing motor 15 that drives the swing disk 10 and the motors 53 and 63 of the supply side and recovery side tensioners 50 and 60 in synchronization. For example, as shown in FIG. 4, when the swing disk 10 swings counterclockwise (− direction) from the reference position (the swing angle is 0 °), the drawing position 80a of the wire 2 of the groove roller 11a (see FIG. 4). 3) is away from the first guide pulley 7c on the supply side.

  This situation will be described with reference to FIG. When the groove roller 11a is located at the solid line position (corresponding to the reference position) as shown in the drawing, the wire length La between the groove roller 11a and the first guide pulley 7c on the supply side is expressed by La = L1 + R1. . When the swing disk 10 swings counterclockwise and the groove roller 11a is displaced from the solid line position to the two-dot chain line position, the wire length between the groove roller 11a and the first guide pulley 7c on the supply side is increased. The length Lb is expressed by Lb = L2 + R2, and La <Lb as illustrated.

  On the other hand, as shown in FIG. 5, for example, when the swing disk 10 swings clockwise (+ direction) from the reference position, the drawing position 80a (see FIG. 3) of the wire 2 of the groove roller 11a is It approaches the first guide pulley 7c on the supply side.

  This state will be described with reference to FIG. As illustrated, when the groove roller 11a is displaced from the solid line position to the two-dot chain line position by the clockwise rotation of the rocking disk 10, the gap between the groove roller 11a and the first guide pulley 7c on the supply side is illustrated. The wire length Lc is represented by Lc = L3 + R3, and La> Lc.

  The wire length between the drawing position 80b of the wire 2 of the groove roller 11b (see FIG. 3) and the first guide pulley 7c on the collection side also changes symmetrically with FIGS. .

  As described above, since the swinging operation that is normally performed is repeatedly performed at a constant speed in FIGS. 4 and 5 described above, the wire length between the groove rollers 11a and 11b and the corresponding first pulley 7c is as follows. Repeatedly changes that become shorter and longer.

  Here, in the wire saw 1 according to the first embodiment, the tension pulleys 51 and 61 are respectively moved by swinging the supply-side and collection-side tensioners 50 and 60 according to the swing of the swing disk 10. Is positioned in a direction to cancel the displacement of the wire length.

  As the swinging disk 10 swings counterclockwise (− direction) as shown in FIG. 4, the motor 53 of the supply side tensioner 50 is driven to rotate the tension arm 52 clockwise (+ direction). Let The amount of rotation of the tension arm 52 can be calculated from the amount of displacement of the wire length according to the swing angle from the reference position of the swing disk 10 set in advance in the control device 17. That is, the tension arm 52 is driven and controlled in a direction to cancel the displacement of the wire length in synchronization with the displacement of the wire length accompanying the change in the oscillation of the oscillation disk 10. The term “synchronization” as used herein includes not only the same period as the swinging change of the swinging disc 10 but also a period (substantially the same period) in which the displacement of the wire length can be canceled.

  As described above, the wire traveling of the wire saw 1 is basically performed by the encoder reading the fluctuation in tension on the supply side and collection side tensioners 50 and 60 as the angle change of the tension arms 52 and 62, and the tension arms 52 and 62 are parallel. The rotation ratio of the supply reel motor 3a, the main shaft motor 12, and the recovery reel motor 4a is controlled so as to be (reference position).

  However, if the displacement amounts of the tension arms 52, 62 controlled synchronously with the swing of the swing disk 10 are reflected in the rotation ratio of the motors 3a, 12, 4a, the swing disk 10 swings. In spite of the control for canceling the displacement of the wire length due to, the control is canceled out.

  Therefore, in the present invention, the amount of rotation of the tension arms 52 and 62 due to the swing of the swing disk 10 is not reflected in the rotation ratio of the motors 3a, 12 and 4a. That is, the origin positions of the tension arms 52 and 62 are displaced in accordance with the displacement of the wire length.

  However, if the encoder detects a tension fluctuation that is greater than or less than the displacement amount of the wire length due to the oscillation of the oscillation disk 10, the corresponding correction is performed in the same manner as in the normal control of the wire saw 1. The rotation ratio of each of the motors 3a, 12, 4a is controlled.

  As described above, the driving of the tension arms 52 and 62 by the swing of the swing disk 10 is directly performed with respect to the change in the wire length due to the swing of the swing disk 10, so that the supply reel 3 a is driven. The displacement of the wire length can be canceled immediately without the influence of the inertial force by the recovery reel 4a, and the fluctuation of the wire tension can be accurately reduced particularly when the wire traveling speed is increased.

  Further, as shown in FIG. 5, as the swing disk 10 swings clockwise (+ direction), the motor 63 of the collection side tensioner 60 is driven to rotate the tension arm 62 clockwise (− direction). Rock. The rotation amount of the tension arm 62 is also calculated in the same manner as in the supply side, and the tension arm 62 is driven and controlled in a direction to cancel the displacement of the wire length on the collection side.

  Next, the cutting operation of the wire saw 1 will be described. First, the workpiece W is set on the work table 21 in the wire saw 1, and predetermined parameters (for example, wire traveling speed, swing angle, swing speed, wire tension, wire supply amount, etc.) are input to the control device 17. . When the wire saw 1 is activated, a series of processes until the cutting of the workpiece W is completed is automatically performed according to the parameters.

  A dummy member 35 is bonded to the workpiece W so as to be cut to the end, and the dummy member 35 and the workpiece base 34 are fixed by bonding or the like. The work W fixed to the work table 34 is fixed to the work table 21 of the wire saw 1 with screws or the like through the work table 34.

  Next, when the wire saw 1 is activated, the supply reel 3 and the recovery reel 4 are driven in conjunction with the rotation of the groove rollers 11a and 11b, and the wire 2 travels. The wire 2 is supplied by a predetermined amount according to the difference between the forward travel amount and the reverse travel amount while repeating forward travel and reverse travel according to the set parameters as appropriate.

  As the wire 2 travels, the swing disk 10 is also controlled to swing at a predetermined angle and a predetermined speed according to a command from the control device 17. With this swing control, the supply side and recovery side tensioners 50 and 60 are also controlled as described above.

  FIG. 7 is a flowchart showing the operation of the swing control. First, when the wire saw 1 is activated (started), a position command is issued to the swing motor 15 (S1). From this position command value, the amount of displacement of the wire length at the position is calculated (S2). The swing motor 15 that has received the position command is driven based on the position command value, and the swing disc 10 starts swinging (S3).

  The supply-side and recovery-side tensioners 50 so that the displacement amount of the wire length calculated in the step S2 approximates to 0 in synchronization with the start of the swing operation of the swing disk 10 (including substantially the same period). 60 position control is performed (S4). After step S4, it is determined whether or not the swinging operation is finished (S5). If the swinging operation is not finished, the operation from step S1 is repeated. When the swing operation is completed, the swing operation is stopped (end). The steps S1 to S5 are described as proceeding in series for convenience, but actual control is performed almost simultaneously.

  FIGS. 8A to 8C are time charts of the supply side and recovery side tensioners 50 and 60 accompanying the swinging motion of the swinging disc 10. As shown in FIG. 8A, the swing disk 10 swings at a predetermined angle in a clockwise direction (+ direction) and a counterclockwise direction (− direction) at a predetermined speed.

  As shown in FIG. 8B, the supply-side tensioner 50 controls the movement of the tension pulley 51 in the supply-side tensioner 50 in synchronization with the angular displacement when the swing angle of the swing disk 10 is displaced in the + direction. Is done. By this movement control, the displacement of the wire length between the groove roller 11a and the supply-side first guide pulley 7c accompanying the swinging operation of the swinging disc 10 is canceled, so that the tension fluctuation of the wire 2 is alleviated. The wire 2 travels stably. When the swing angle of the swing disk 10 is displaced in the-direction, the supply-side tension pulley 51 is controlled to move in the opposite manner.

  As shown in FIG. 8C, when the swinging angle of the swinging disc 10 is displaced in the + direction, the recovery side tensioner 60 controls the movement of the tension pulley 61 in the recovery side tensioner 60 in synchronization with this angular displacement. Is done. By this movement control, the displacement of the wire length between the groove roller 11b and the collection-side first guide pulley 7c accompanying the swinging operation of the swinging disc 10 is canceled, so that the fluctuation in the tension of the wire 2 is alleviated. The wire 2 travels stably. When the swing angle of the swing disk 10 is displaced in the-direction, the supply-side tension pulley 61 is controlled to move in the opposite manner.

  As described above, the supply-side and recovery-side tensioners 50 and 60 are repeatedly controlled with the swing displacement of the swing disk 10.

  Next, a second embodiment of the present invention will be described with reference to FIG. In addition, the code | symbol of the part which is common in 1st Embodiment uses the same thing as 1st Embodiment, and abbreviate | omits description of a common part.

  FIG. 9 is a schematic front view of a part extracted from the supply side of the wire saw 1. Similar to the first embodiment, the supply side tensioner 50 includes a tension pulley 51, a tension arm 52, and a tension motor 53 incorporating an encoder, and these are integrally supported by a support frame 70. The support frame 70 is slidably fitted to a rail 71 laid in the vertical direction in the figure, and is movable in the vertical direction by an appropriate drive source (not shown). Although not shown, a mechanism similar to that on the supply side is provided on the collection side.

  The supply-side tensioner 50 moves in the downward direction (+ direction) to cancel the displacement of the wire length as the swing disk 10 swings in the clockwise direction (+ direction). Further, as the swing disk 10 swings counterclockwise (− direction), it moves in an upward direction (− direction) that cancels the displacement of the wire length. For the vertical movement of the supply side tensioner 50, a separate motor or the like may be provided exclusively for this movement, but the swing motor 15 of the swing disk 10 is driven synchronously using an appropriate link or belt. You may make it do. By using the swing motor 15 in this way, it is easy to achieve synchronization and the cost does not increase. Although not shown, the recovery-side tensioner 60 moves in the direction to cancel the displacement of the wire length as the swinging disc 10 swings in the same manner as the supply-side tensioner 50. Other mechanisms are the same as those in the first embodiment. The above is the configuration of the second exemplary embodiment of the present invention.

  Next, a third embodiment of the present invention will be described below. The basic configuration of the wire saw 1 is the same as that of the first embodiment, but in the third embodiment, the tensioner motor 53 of the supply side tensioner 50 and the tensioner motor 63 of the recovery side tensioner 60 are controlled by driving amounts. Instead, control is performed by changing the output torque.

  That is, when the swing disk 10 swings in the clockwise direction (+ direction), control is performed to increase the output torque value of the supply-side tensioner motor 53 and reduce the output torque value of the recovery-side tensioner motor 63. Do. Further, when the swing disk 10 swings counterclockwise (−), the output torque value of the supply side tensioner motor 53 is reduced, and the output torque value of the recovery side tensioner motor 63 is increased. I do. As in the first embodiment, these controls are synchronized (substantially the same) based on the amount of wire length displacement calculated according to the swing angle of the swing disk 10 input to the control device 17 in advance. (Including period).

  FIG. 10 is a flowchart of the third embodiment of the present invention. First, when the wire saw 1 is activated (started), a position command is sent to the swing motor 15 (S11). Subsequently, the displacement amount of the wire length at the position is calculated from the position command value (S22). When the displacement amount of the wire length is calculated, the swinging motion of the swinging disc 10 is started (S33). Next, the output torque of the tensioner motors 53 and 63 is increased / decreased according to the displacement amount of the wire length accompanying the swinging operation of the swinging disc 10 (S44). Subsequently, it is determined whether or not the swinging operation of the swinging disc 10 has been completed. If the swinging operation has not been completed, the operations from step S11 are repeated. When the swinging operation is finished, the operation is finished (end). The configuration of the wire saw 1 other than the above is the same as that of the first embodiment. The above is the configuration of the third exemplary embodiment of the present invention.

  The wire saw and the cutting method of the present invention are not limited to the above-described embodiment, and can be appropriately changed within the scope of the present invention. The wire saw of the present invention is not limited to the above-described wire saw 1, and can be widely applied to a wire saw that performs a cutting process by pressing a workpiece against a wire traveling while swinging.

  For example, you may use for the single wire saw cut | disconnected by one wire which does not form the wire row | line | column 2a. In this embodiment, the mechanism for swinging the wire is also configured to swing the swing disk using a bearing. However, various mechanisms such as an arc-shaped guide mechanism can be used.

  In the present invention, two wire saws are used for the groove roller, but three or more groove rollers may be used, and a plurality of groove rollers may be used. Further, the tensioner is driven by tension control by swinging the tension arm, but various types can be used as long as the displacement of the tension pulley can be detected and controlled. For example, the tension pulley may be directly displaced in each direction without using the tension arm, and the displacement of the position may be detected.

1 W Groove roller 12 Main shaft motor 13 Drive pulley 14 Timing belt 15 Oscillating motor 16 Body plate 17 Controller 20 Work support portion 21 Work table 22 Ball screw 23 Motor 24 Drive pulley 25 Belt 26 Driven pulley 27 Support frame 28 Nut member 29 Support frame 30 Rail 31 Guide 32 Post 33 Bearing 34 Work table 35 Dummy member 50 Supply side tensioner 51 Tension pulley 52 Tension arm 53 Motor 60 Recovery side tension Yona 61 tension pulley 62 the tension arm 63 motor 70 supporting frame 71 rails 80a extended position 80b drawn position

Claims (4)

In a wire saw that presses a workpiece against a traveling wire and cuts the workpiece,
A pair of reels for alternately feeding and winding the wire; and
A swing disk that swings about a swing shaft formed substantially perpendicular to the direction in which the workpiece is pressed;
A plurality of groove rollers that are pivotally supported by the oscillating disk and are rotatable about a rotation axis parallel to the oscillating axis;
A wire row formed between the groove rollers by being wound around the plurality of groove rollers;
On the wire travel path between the reels, provided on the feeding side and the winding side of the wire row, respectively, a guide pulley is provided at one end thereof, and the other end side is pivoted from one end pivotally supported. A pair of tensioners provided with a motor for applying a predetermined tension to the wire,
A control device for controlling the wire saw;
With
The wire saw according to claim 1, wherein the control device controls the tensioner in synchronization with the swing of the swing disk. Both the tensioners are provided movably along the travel path of the wire,
2. The wire saw according to claim 1, wherein each tensioner is moved in a direction to cancel the fluctuation of the wire length accompanying the swing of the swing disk.   The wire saw according to claim 1, wherein the control of the tensioner by the control device is performed by increasing or decreasing the torque of the motor. In a wire saw cutting method for pressing a workpiece against a traveling wire and cutting the workpiece,
A wire saw cutting method, wherein each tensioner is moved in a direction to cancel the fluctuation of the wire length accompanying the swing of the swing disk.

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