JP2014151384A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw capable of accurately cutting a workpiece by suppressing sudden change in swing.SOLUTION: A wire saw 1 includes: a wire row composed of wires 11 wound between multiple groove rollers 9a, 9b; wire drive means for making the wires 11 travel in one direction or reciprocate; and a swing mechanism 16 for swinging a workpiece W. The wire saw cuts the workpiece W by pressing the workpiece W against the wire row. The swing mechanism 16 includes: a workpiece holding table 40 for holding the workpiece W, and pivotally supported so as to be rotatable in a direction orthogonal to the wire row, around a substantial center of the workpiece W as the swing center; and a drive mechanism for rotating the workpiece holding table 40. The swing by the swing mechanism 40 is configured so that time variation of a swing angle forms an arc curve.

Description

  The present invention relates to a wire saw that presses and cuts a workpiece such as silicon, sapphire, silicon carbide, or ceramics against a traveling wire. More specifically, the present invention relates to a wire saw that cuts a workpiece while swinging the workpiece or the wire.

  Conventionally, a wire array is formed by winding a wire between a plurality of groove rollers, and the wire travels in one direction or reciprocates, and while supplying a machining fluid to the wire, silicon, sapphire, silicon carbide, ceramics A wire saw is known that presses a workpiece such as a wire against the wire row and cuts it.

  In the wire saw, a free abrasive grain type wire saw that cuts a workpiece while supplying a slurry in which abrasive grains such as silicon carbide and diamond are mixed with an oil-based or water-soluble cutting fluid as a working fluid to the vicinity of the cutting portion, and a wire surface Using a fixed abrasive wire in which diamond or other abrasive grains are fixed by electrodeposition or resin, the workpiece is supplied with oily or water-soluble machining liquid or machining liquid with a surfactant added to water near the cutting part. There is known a fixed-abrasive wire saw that cuts.

  In the both types of wire saws, the workpiece is pressed against the wire row formed between the groove rollers and cut. However, as the cutting progresses, the cutting load increases and it becomes difficult to discharge the cutting waste. A method of cutting while swinging is proposed (for example, Patent Document 1). In addition, a method of cutting while swinging the wire row instead of swinging the workpiece has been proposed (for example, Patent Document 2 and Patent Document 3).

  In the method of cutting while swinging the wire or workpiece as described above, the contact amount between the workpiece and the wire is reduced as a whole, so that the cutting load is reduced and the supply of slurry or machining fluid to the cutting section is reduced. It becomes smooth, the cutting speed is improved, and the cutting waste is easily discharged.

  And the swing control of the wire saw of patent document 2 is control that the change with respect to the time of a swing angle draws a trapezoid as shown to Fig.12 (a). In other words, acceleration is performed at a constant acceleration in the plus direction until a predetermined swing angle is reached, and when the predetermined swing angle is reached, the swing angle is maintained for a certain period of time. The swing angle is repeatedly performed.

  In addition, the swing control of the wire saw disclosed in Patent Document 3 is such that the change of the swing angle with respect to time becomes a zigzag as shown in FIG. That is, acceleration is performed at a constant acceleration in the plus direction until a predetermined swing angle is reached, and acceleration is performed at a constant acceleration in the negative direction after reaching the predetermined swing angle.

Japanese Patent No. 3539773 Japanese Patent Laid-Open No. 10-264143 JP2013-840

  By the way, the swing mechanism of Patent Document 1 holds a workpiece on one end of a swing arm, and drives the other end portion of the swing arm left and right using an intermediate portion of the swing arm as a fulcrum. The workpiece is swung around the fulcrum.

  However, the wire saw of Patent Document 1 has a problem that the apparatus itself becomes large because the swing arm itself requires a certain amount of stroke. Further, when a plurality of workpieces are swung, if a plurality of workpieces are fixed on a single swing arm, there is a problem that the work cannot be cut with high accuracy because the way of contacting the workpiece with the wire row is different. Furthermore, since the fulcrum is located at a position away from the workpiece, there is a problem that the swinging width is increased, the distance between the groove rollers forming the wire row must be increased, the tension of the wire row is reduced, There is a problem that the cutting accuracy is lowered. Further, when a plurality of workpieces are arranged in the horizontal direction and individually swung, it is necessary to provide a plurality of rocking arms, and there is a problem that the apparatus is further increased in size.

  In addition, the control of the swing mechanism of the wire saw of Patent Document 2 described above is based on the change of the swing angle with respect to time when the swing direction of the wire row is reversed (that is, when the swing angle is switched from the plus direction to the minus direction). Is controlled to have a trapezoidal shape, and the control method is such that the change of the swing angle and the swing speed becomes abrupt.

  In addition, the control of the swing mechanism of the wire saw of Patent Document 3 controls the change of the swing angle with respect to time in a zigzag manner by instantaneously reversing the swing angle between the plus direction and the minus direction. Similar to the wire saw disclosed in Patent Document 2, the control method is such that the change of the swing angle and the swing speed becomes abrupt.

  By the way, in cutting with a wire saw, it is known that when cutting conditions such as a wire speed, a processing temperature, and a swing angle are rapidly changed, a processing accuracy is lowered at a portion where the condition change is large.

  However, the conventional wire saw swinging method employs a control method in which the swing angle and swing speed change abruptly as described in Patent Document 2 and Patent Document 3 described above. However, there is a problem that the machining accuracy is lowered, such as a step or undulation on the cut surface of the workpiece. Furthermore, there is a problem that a load on the wire increases due to a sudden change in the swing angle or swing speed, or that the wire is disconnected due to a sudden change in tension.

  Accordingly, an object of the present invention is to provide a wire saw that is improved in cutting accuracy by swinging with a small and simple mechanism when performing swing cutting with a wire saw and reducing changes in swing angle and swing speed. It is in.

The invention according to claim 1 is a wire row formed by wires wound between a plurality of groove rollers, wire driving means for moving the wire in one direction or reciprocating, and swinging for swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against the wire row,
The swing mechanism is
A workpiece holding table that holds the workpiece and is pivotally supported in a direction orthogonal to the wire row with a substantially center of the workpiece as a swing center;
A drive mechanism for rotating the work holding table,
The rocking by the rocking mechanism is a wire saw that employs a configuration in which at least the time change of the rocking angle when the rocking direction is reversed draws an arcuate curve.

The invention of claim 2 is the wire saw of claim 1,
The swing mechanism is
At least one rotational drive mechanism;
A disc fixed to the rotational drive mechanism;
A fixed shaft erected at an eccentric position of the disc;
Including at least one link rod having one end pivotally supported by the fixed shaft;
The wire saw adopting a configuration in which the rotational movement by the rotation driving mechanism is converted into the rocking movement of the work by pivotally supporting the other end of the link bar on the work holding table.

The invention of claim 3 is the wire saw of claim 1,
The swing mechanism is
At least one rotational drive mechanism;
A rotation transmission mechanism for transmitting rotation of the rotation drive mechanism to rotate the work holding table;
A wire saw employing a configuration in which the work holding table is swung while the rotation drive mechanism is rotated forward and backward.

According to a fourth aspect of the present invention, there is provided a wire array formed of wires wound between a plurality of groove rollers, wire driving means for traveling the wire in one direction or reciprocating, and swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against the wire row,
The swing mechanism is
A pivot member pivotally supported by the groove roller and pivotally supported with respect to the body frame of the wire saw;
A rotation drive mechanism that swings by rotating the rotating member forward and backward,
The rocking by the rocking mechanism is a wire saw that employs a configuration in which at least the time change of the rocking angle when the rocking direction is reversed draws an arcuate curve.

  A fifth aspect of the invention is a wire saw according to any one of the first to fourth aspects, wherein the arcuate curve is a sine curve or a curve approximated to a sine curve.

These are the whole schematic drawings of the wire saw which concerns on the 1st Embodiment of this invention. These are top views of the rocking | swiveling mechanism part of the wire saw which concerns on the 1st Embodiment of this invention. These are the AA direction arrow directional views of FIG. FIG. 3 is a front view with a part of FIG. 2 cut away. (A) And (b) is explanatory drawing of the rocking | fluctuation operation | movement of the wire saw which concerns on the 1st Embodiment of this invention. (C) And (d) is explanatory drawing of rocking | fluctuation operation | movement of the wire saw which concerns on the 1st Embodiment of this invention. These are the right view of the rocking | fluctuation mechanism part of the wire saw which concerns on the 2nd Embodiment of this invention. These are BB direction arrow directional views of FIG. (A) thru | or (c) are operation | movement charts showing one Embodiment of the rocking | fluctuation operation | movement of the wire saw of this invention. These are the whole schematic drawings of the wire saw which concerns on the 3rd Embodiment of this invention. (A) thru | or (c) are operation | movement chart diagrams showing rocking | fluctuation operation | movement of the wire saw which concerns on another embodiment of this invention. (A) And (b) is an operation | movement chart figure showing the rocking | fluctuation operation | movement of the conventional wire saw.

  A first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is a schematic view showing the entire wire saw according to the first embodiment of the present invention. As shown in the figure, the wire saw 1 winds a wire 11 supplied from a supply reel 2 between groove rollers 9a and 9b in which a plurality of grooves are engraved to form a wire row, and then winds the wire reel 1 around a collection reel 3. It has come to be taken.

  As shown in FIG. 1, the wire saw 1 includes a supply reel 2, a plurality of guide rollers 4 on the supply side, a tension roller 5, two groove rollers 9 a and 9 b, a machining liquid supply nozzle (not shown), and between the groove rollers 9 a and 9 b. Are provided with a support roller 10, a tension roller 6, a plurality of collection-side guide rollers 7, and a work holding unit 16.

  For example, in the case of the fixed abrasive method, the supply reel 2 is wound with a fixed abrasive wire in which abrasive grains such as diamond are fixed to the surface of the wire 11 by electrodeposition or resin. Further, a supply reel motor 12 is connected to the supply reel 2 so that forward rotation and reverse rotation can be freely performed. In addition, a traverse mechanism (not shown) is provided in the vicinity of the supply reel 2 so that the wire 11 is smoothly fed and wound.

  The wire 11 fed from the supply reel 2 is guided to a plurality of guide rollers 4, and is guided to the groove rollers 9a and 9b via tension rollers 5 provided in the middle. The tension roller 5 is pivotally supported at the tip of a swinging tension arm. The guide roller 4 immediately after the tension roller 5 is provided with a load cell 8. The tension of the wire 11 is read and a predetermined tension is applied to the wire 11 by controlling the tension arm. ing.

  A plurality of grooves (not shown) are engraved on the outer periphery of the two groove rollers 9a and 9b, and the wire 11 guided to the two groove rollers 9a and 9b is wound around the groove to be a wire. A column is formed. A drive motor 15 for rotating the groove roller 9 forward or backward is connected to at least one of the groove rollers 9a and 9b.

  Further, a support roller 10 in which a groove corresponding to the groove roller 9 is engraved is pivotally supported on the workpiece W cutting side (the upper side in the drawing) of the intermediate portion between the groove rollers 9a and 9b. The support roller 10 prevents a gap between the groove rollers 9a and 9b from expanding when cutting a plurality of workpieces W to reduce the tension of the wire 11 in the wire row, and prevents the cutting accuracy from being lowered.

  The wire 11 passing through the groove roller 9 is guided to a plurality of guide rollers 7 and, like the supply side, passes through a guide roller 7 provided with a load cell 8 and a tension roller 6 and is collected by a collection side traverser (not shown). The reel 3 is wound up. A recovery reel motor 13 is connected to the recovery reel 3 in the same manner as the supply side, and the recovery reel 3 can freely rotate forward and backward.

  The work holding part 16 is provided on the groove roller 9 in this embodiment. The work holding unit 16 includes a lifting mechanism 17 and a swing mechanism 20.

  Although details of the elevating mechanism 17 are omitted, the elevating mechanism 17 elevates and lowers the swing mechanism 20 by combining the elevating motor 14 and an appropriate ball screw (not shown). Moreover, the workpiece | work W is sent toward the said wire row | line | column by driving the said raising / lowering mechanism 17 and lowering | hanging the workpiece | work holding | maintenance part 16. FIG.

  The swing mechanism 20 is provided above and below a support plate 21 as shown in FIG. 1, and the support plate 21 is held by the elevating mechanism 17 via a support column erected on the support plate 21. ing.

  As shown in FIGS. 2 to 4, the swing mechanism 20 includes a support plate 21, a swing motor 23 provided on the support plate 21, a work holding table 40 provided below the support plate 21, A table holding frame 50 that pivotally supports the work holding table 40 and a link portion 24 that converts the rotational force of the swing motor 3 into a swing motion are provided.

  As shown in FIG. 3, the work holding table 40 is formed in an L shape facing downward when viewed from the side, and is formed of a base portion 40c and a support portion 40d provided in parallel to the support plate 21. . A detachable working table 43 is fitted and fixed below the base portion 40c. A dummy member 44 made of ceramic, carbon, or the like is bonded to the processing table 43, and the workpiece W is bonded to the lower surface of the dummy member 44 to hold the workpiece W. The illustrated wire 11 is drawn thicker than the actual diameter for easy understanding, and the pitch is also drawn wider than the actual.

  Below the support plate 21, a table holding frame 50 is fixed vertically to the support plate 21, and the support portion 40 d of the work holding table 40 is positioned so as to face the table holding frame 50. . A swing shaft 41 is fixed to the support portion 40d at a position substantially corresponding to the center axis of the workpiece W. The swing shaft 41 is supported by a table holding frame 50 via a bearing 42 and a bearing 51, and the work holding table 40 is rotatable with respect to the table holding frame 50. In the present embodiment, the table holding frame 50 and the work holding table 40 are provided in the same pair on the left and right.

  Further, swing arms 28a and 28b are erected on the upper surface of each of the pair of work holding tables 40, and both swing arms 28a and 28b are provided with two openings 29a and 29b provided in the support plate 21, respectively. And protrudes on the support plate 21.

  One end of the first link 33 is pivotally supported on the back side near the upper end of the swing arm 28a. On the other hand, one end of the second link 34 is pivotally supported on the front side near the upper end of the swing arm 28b. The other end side of the first link 33 and the other end side of the second link 34 are both supported by an eccentric shaft 32 that is eccentrically provided on the disc 31. The disc 31 is connected to the rotating shaft 30 of the swing motor 23 at the center thereof. The swing motor 23 is fixed to a motor fixing frame 22 erected on the support plate 21.

  Therefore, when the swing motor 23 is driven in one direction as shown in FIG. 4, the eccentric shaft 32 rotates around the rotation shaft 30, and the first link 33 and the second link 34 connected to the eccentric shaft 32 As a result of the crank motion, both the work holding tables 40, 40 swing together through the swing arms 28a, 28b. It should be noted that the swing angle and the swing speed can be appropriately changed by appropriately adjusting the eccentric amount of the eccentric shaft 32 and the lengths of the first link 33 and the second link 34.

  The above is the configuration of the wire saw according to the first embodiment of the present invention. Next, the swing operation of the wire saw according to the first embodiment of the present invention will be described based on FIGS. 5 and 6.

  FIG. 5A shows an initial state of the swinging operation, and the left and right workpieces W are both in parallel with the wire row. This state is a state where the swing angle is 0 °. At this time, for example, the wire 11 reciprocates as shown in FIG. 9B. Further, a machining fluid is supplied near the cutting portion.

  FIG. 5B shows a state in which the swing motor 23 is driven and the disk 31 is rotated by 90 °. At this time, the swing arm 28a is pushed leftward by the first link 33, and the work holding table 40a tilts to the left. On the other hand, the swing arm 28b is pulled leftward by the second link 34, and the work holding table 40b is also tilted to the left. For convenience, the state in which the work holding table 40 is inclined in the left direction is defined as a state in which the work holding table 40 is swung in the plus direction.

  FIG. 6C shows a state in which the disk 31 is further rotated by 90 ° from the state of FIG. At this time, as in FIG. 5A, the left and right workpieces W are both in parallel with the wire row (swing angle 0 °).

  FIG. 6D shows a state in which the disk 31 is further rotated by 90 ° from the state of FIG. At this time, the left and right workpieces W are in a state of being inclined in the right direction, being located at positions symmetrical with respect to FIG. This state is assumed to be a state of swinging in the minus direction.

  In the first embodiment of the present invention, since the rotational motion is converted into the swing motion via the crank mechanism, the change of the swing angle and the swing speed is, for example, shown in FIGS. As shown in c), it changes while drawing a gentle arc. Thus, by changing the swing angle and swing speed so as to draw an arc, the impact when reversing the swing direction can be reduced, and the vibration of the workpiece during the swing and the load transmitted to the wire array can be drastically reduced. Fluctuations can be reduced. Further, it is possible to reduce the catch between the cut surface of the workpiece W and the wire 11 when the swinging direction is reversed, and to prevent the wire 11 from being disconnected. That is, since the rapid change of the cutting conditions at the time of cutting can be reduced, the cutting accuracy of the cutting workpiece W is improved.

  In the present embodiment, the swing of the workpiece W is such that the left and right workpieces W swing in the same direction in synchronization, but the arrangement of the first link 33 and the second link 34 is changed. Thus, they may swing differently. When the left and right workpieces W have the same shape and the same material, it is preferable that the left and right workpieces W be rocked in synchronization with each other as in this embodiment in order to match the cutting accuracy of the left and right workpieces W.

  Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the swing mechanism 20 according to the first embodiment is performed by driving control of the swing motor 55 without using a crank mechanism. In addition, the same member as the code | symbol used in 1st Embodiment is used for a common member.

  7 is a right side view of the rocking mechanism 20, and FIG. 8 is a partially cutaway BB direction view of FIG. As shown in FIG. 8, a motor fixing frame 56 is erected on the rear side of the support plate 21, and a swing motor 55 is fixed to one surface thereof.

  Drive pulleys 57 a and 57 b are coaxially fixed to the swing motor 55. Further, since it is the same as that of the first embodiment, a detailed description is omitted, but the pair of left and right workpiece holding tables 40 are pivotally supported by a pair of table holding frames 50 via a swing shaft 41, respectively. Yes.

  The pair of left and right swing shafts 41 and 41 extend so as to penetrate the respective table holding frames 50 and 50, and the driven pulleys 58a and 58b of the respective ends of the swing shafts 41 and 41 are fixed. ing.

  Timing belts 59 and 59 are wound around the driving pulley 57a and the driven pulley 58a and the driving pulley 57b and the driven pulley 58b through the opening 52, respectively. Therefore, the workpiece holding tables 40a and 40b are caused to swing by way of the timing belts 59 and 59 by rotating the swing motor 55 forward and backward.

  At this time, the swing angle and the swing speed are controlled by an arc-shaped change such as that performed by a crank motion through a swing mechanism control unit (not shown), for example, as shown in FIGS. 9A and 9B. Oscillation can be performed with a simple change.

  It should be noted that the curve drawn with respect to the time change of the swing speed and swing angle is preferably a sine curve, but is not limited to this, and may be a curve approximated to a sine curve, or a linear It is not limited to a sinusoidal curve as long as it is not a change but an arc-like change.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 10 is an overall schematic view of a wire saw according to the third embodiment of the present invention. As shown in FIG. 10, the wire saw 1 according to the third embodiment of the present invention is such that the wire saw according to the first embodiment and the second embodiment swings the workpiece W, whereas the wire saw side This is a wire saw that swings.

  Since the part related to the traveling of the wire 11 is the same as that of the wire saw 1 according to the first embodiment, the description will be made centering on the swing mechanism 61 different from the first embodiment. In addition, the same code | symbol is attached | subjected to the member common to 1st Embodiment.

  A main body base 60 is erected in the center of the figure, and a swing member 62 is supported on the main body base 60 so as to be rotatable around a swing shaft core 65 using a cross roller bearing (not shown) or appropriate guides. ing. A drive pulley 63 is provided in the vicinity of the swing member 62, and a swing motor 66 is connected to the drive pulley 63. The swinging member 62 has a gear formed on the outer periphery of a portion protruding to the back side of the main body base 60, and a timing belt 64 is stretched around the gear and the driving pulley 63.

  Further, two groove rollers 9a and 9b are rotatably supported on the swing member 62. The groove rollers 9a and 9b are configured to swing integrally with the swing member 62, and the wire train wound between the groove rollers 9a and 9b swings. .

  A control unit (not shown) is connected to the swing motor 66, and the swing motor 66 is driven while drawing an arc so that the swing angle and swing speed change gently. This control is the same as in the first embodiment and the second embodiment. In this embodiment, the swinging motor 62 is used to swing the swinging member 62. However, by applying the first embodiment, the swinging member 62 is swung through the crank mechanism. The swing speed may swing while drawing an arc.

  10 (a) to 10 (c) are charts of the swinging motion according to another embodiment of the present invention.

  FIG. 11A shows an embodiment in the case of rocking while keeping the rocking angle constant for a certain time. In this embodiment, after the rocking angle is constantly increased in the plus direction, it is changed while drawing an arc when switching to a constant and when the rocking angle is reversed in the minus direction. . Thus, by changing the swing angle while drawing an arc, a rapid change in swing can be prevented, and wire breakage prevention and cutting accuracy can be improved.

  FIG. 11B is a graph in which the change in the swing angle with time is more gradual than in the first embodiment. By gently changing the swing angle in this way, a sudden change in swing can be prevented, and the wire breakage can be prevented and the cutting speed can be improved.

  The above is the configuration of each embodiment of the present invention, but can be appropriately changed within the scope of the invention. For example, although there are two groove rollers in this embodiment, three or more groove rollers may be used. Also, one workpiece may be cut or a plurality of workpieces may be cut. In addition to cutting a single wire, two or more wires may be used. Moreover, it can be used not only for forming and cutting a wire row, but also for a single wire saw cut. Further, the swing angle and the swing speed can be appropriately selected according to the size and material of the workpiece to be cut. Further, the traveling speed of the wire, the reciprocating traveling, and the one-way traveling can be appropriately selected.

W Work 1 Wire saw 2 Supply reel 3 Recovery reel 4 Guide pulley 5 Tension pulley 6 Tension pulley 7 Guide pulley 8 Load cell 9 Groove roller 9a Groove roller 9b Groove roller 10 Support roller 11 Wire 12 Supply reel motor 13 Recovery reel motor 14 Lifting motor 15 Drive motor 16 Work holding portion 17 Elevating mechanism 20 Oscillating mechanism 21 Support plate 22 Motor fixed frame 23 Oscillating motor 28 Oscillating arm 29 Opening portion 30 Rotating shaft 31 Disc 32 Eccentric shaft 33 First link 34 Second link 40 Workpiece Holding table 40a Base portion 41 Oscillating shaft 42 Bearing 43 Processing base 44 Dummy member 45 Oscillating shaft core 50 Table holding frame 51 Bearing 52 Opening portion 55 Oscillating motor 56 Motor fixing frame 57a First drive pulley 57b Second drive Pulley 58a first driven pulley 58b second driven pulley 59 timing belt 60 body base 61 swing mechanism 62 swing member 63 driving pulley 64 timing belt 65 pivot axis

  The present invention relates to a wire saw that presses and cuts a workpiece such as silicon, sapphire, silicon carbide, or ceramics against a traveling wire. More specifically, the present invention relates to a wire saw that cuts a workpiece while swinging the workpiece or the wire.

  Conventionally, a wire array is formed by winding a wire between a plurality of groove rollers, and the wire travels in one direction or reciprocates, and while supplying a machining fluid to the wire, silicon, sapphire, silicon carbide, ceramics A wire saw is known that presses a workpiece such as a wire against the wire row and cuts it.

  In the wire saw, a free abrasive grain type wire saw that cuts a workpiece while supplying a slurry in which abrasive grains such as silicon carbide and diamond are mixed with an oil-based or water-soluble cutting fluid as a working fluid to the vicinity of the cutting portion, and a wire surface Using a fixed abrasive wire in which diamond or other abrasive grains are fixed by electrodeposition or resin, the workpiece is supplied with oily or water-soluble machining liquid or machining liquid with a surfactant added to water near the cutting part. There is known a fixed-abrasive wire saw that cuts.

  In the both types of wire saws, the workpiece is pressed against the wire row formed between the groove rollers and cut. However, as the cutting progresses, the cutting load increases and it becomes difficult to discharge the cutting waste. A method of cutting while swinging is proposed (for example, Patent Document 1). In addition, a method of cutting while swinging the wire row instead of swinging the workpiece has been proposed (for example, Patent Document 2 and Patent Document 3).

  In the method of cutting while swinging the wire or workpiece as described above, the contact amount between the workpiece and the wire is reduced as a whole, so that the cutting load is reduced and the supply of slurry or machining fluid to the cutting section is reduced. It becomes smooth, the cutting speed is improved, and the cutting waste is easily discharged.

  And the swing control of the wire saw of patent document 2 is control that the change with respect to the time of a swing angle draws a trapezoid as shown to Fig.12 (a). In other words, acceleration is performed at a constant acceleration in the plus direction until a predetermined swing angle is reached, and when the predetermined swing angle is reached, the swing angle is maintained for a certain period of time. The swing angle is repeatedly performed.

  In addition, the swing control of the wire saw disclosed in Patent Document 3 is such that the change of the swing angle with respect to time becomes a zigzag as shown in FIG. That is, acceleration is performed at a constant acceleration in the plus direction until a predetermined swing angle is reached, and acceleration is performed at a constant acceleration in the negative direction after reaching the predetermined swing angle.

Japanese Patent No. 3539773 Japanese Patent Laid-Open No. 10-264143 JP2013-840

  By the way, the swing mechanism of Patent Document 1 holds a workpiece on one end of a swing arm, and drives the other end portion of the swing arm left and right using an intermediate portion of the swing arm as a fulcrum. The workpiece is swung around the fulcrum.

  However, the wire saw of Patent Document 1 has a problem that the apparatus itself becomes large because the swing arm itself requires a certain amount of stroke. Further, when a plurality of workpieces are swung, if a plurality of workpieces are fixed on a single swing arm, there is a problem that the work cannot be cut with high accuracy because the way of contacting the workpiece with the wire row is different. Furthermore, since the fulcrum is located at a position away from the workpiece, there is a problem that the swinging width is increased, the distance between the groove rollers forming the wire row must be increased, the tension of the wire row is reduced, There is a problem that the cutting accuracy is lowered. Further, when a plurality of workpieces are arranged in the horizontal direction and individually swung, it is necessary to provide a plurality of rocking arms, and there is a problem that the apparatus is further increased in size.

  In addition, the control of the swing mechanism of the wire saw of Patent Document 2 described above is based on the change of the swing angle with respect to time when the swing direction of the wire row is reversed (that is, when the swing angle is switched from the plus direction to the minus direction). Is controlled to have a trapezoidal shape, and the control method is such that the change of the swing angle and the swing speed becomes abrupt.

  In addition, the control of the swing mechanism of the wire saw of Patent Document 3 controls the change of the swing angle with respect to time in a zigzag manner by instantaneously reversing the swing angle between the plus direction and the minus direction. Similar to the wire saw disclosed in Patent Document 2, the control method is such that the change of the swing angle and the swing speed becomes abrupt.

  By the way, in cutting with a wire saw, it is known that when cutting conditions such as a wire speed, a processing temperature, and a swing angle are rapidly changed, a processing accuracy is lowered at a portion where the condition change is large.

  However, the conventional wire saw swinging method employs a control method in which the swing angle and swing speed change abruptly as described in Patent Document 2 and Patent Document 3 described above. However, there is a problem that the machining accuracy is lowered, such as a step or undulation on the cut surface of the workpiece. Furthermore, there is a problem that a load on the wire increases due to a sudden change in the swing angle or swing speed, or that the wire is disconnected due to a sudden change in tension.

  Accordingly, an object of the present invention is to provide a wire saw that is improved in cutting accuracy by swinging with a small and simple mechanism when performing swing cutting with a wire saw and reducing changes in swing angle and swing speed. It is in.

The invention according to claim 1 is a wire row formed by wires wound between a plurality of groove rollers, wire driving means for moving the wire in one direction or reciprocating, and swinging for swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against the wire row,
The swing mechanism is
A workpiece holding table that holds the workpiece and is pivotally supported in a direction orthogonal to the wire row with a substantially center of the workpiece as a swing center;
A drive mechanism for rotating the work holding table,
The rocking by the rocking mechanism is a wire saw that employs a configuration in which at least the time change of the rocking angle when the rocking direction is reversed draws an arcuate curve.

The invention of claim 2 is the wire saw of claim 1,
The swing mechanism is
At least one rotational drive mechanism;
A disc fixed to the rotational drive mechanism;
A fixed shaft erected at an eccentric position of the disc;
Including at least one link rod having one end pivotally supported by the fixed shaft;
The wire saw adopting a configuration in which the rotational movement by the rotation driving mechanism is converted into the rocking movement of the work by pivotally supporting the other end of the link bar on the work holding table.

The invention of claim 3 is the wire saw of claim 1,
The swing mechanism is
At least one rotational drive mechanism;
A rotation transmission mechanism for transmitting rotation of the rotation drive mechanism to rotate the work holding table;
A wire saw employing a configuration in which the work holding table is swung while the rotation drive mechanism is rotated forward and backward.

According to a fourth aspect of the present invention, there is provided a wire array formed of wires wound between a plurality of groove rollers, wire driving means for traveling the wire in one direction or reciprocating, and swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against the wire row,
The swing mechanism is
A pivot member pivotally supported by the groove roller and pivotally supported with respect to the body frame of the wire saw;
A rotation drive mechanism that swings by rotating the rotating member forward and backward,
The rocking by the rocking mechanism is a wire saw that employs a configuration in which at least the time change of the rocking angle when the rocking direction is reversed draws an arcuate curve.

  A fifth aspect of the invention is a wire saw according to any one of the first to fourth aspects, wherein the arcuate curve is a sine curve or a curve approximated to a sine curve.

According to the present invention, since the swing angle and the swing speed are changed to draw an arc, the impact when the swing direction is reversed can be reduced, and the vibration of the workpiece during the swing and the load transmitted to the wire row can be reduced. Can be reduced. In addition, it is possible to reduce the catch between the cut surface of the workpiece and the wire when the swing direction is reversed, and to prevent the wire from being disconnected. Moreover, since the rapid change of the cutting conditions at the time of cutting can be reduced, the cutting accuracy of the cutting workpiece W is improved.

These are the whole schematic drawings of the wire saw which concerns on the 1st Embodiment of this invention. These are top views of the rocking | swiveling mechanism part of the wire saw which concerns on the 1st Embodiment of this invention. These are the AA direction arrow directional views of FIG. FIG. 3 is a front view with a part of FIG. 2 cut away. (A) And (b) is explanatory drawing of the rocking | fluctuation operation | movement of the wire saw which concerns on the 1st Embodiment of this invention. (C) And (d) is explanatory drawing of rocking | fluctuation operation | movement of the wire saw which concerns on the 1st Embodiment of this invention. These are the right view of the rocking | fluctuation mechanism part of the wire saw which concerns on the 2nd Embodiment of this invention. These are BB direction arrow directional views of FIG. (A) thru | or (c) are operation | movement charts showing one Embodiment of the rocking | fluctuation operation | movement of the wire saw of this invention. These are the whole schematic drawings of the wire saw which concerns on the 3rd Embodiment of this invention. (A) thru | or (c) are operation | movement chart diagrams showing rocking | fluctuation operation | movement of the wire saw which concerns on another embodiment of this invention. (A) And (b) is an operation | movement chart figure showing the rocking | fluctuation operation | movement of the conventional wire saw.

  A first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is a schematic view showing the entire wire saw according to the first embodiment of the present invention. As shown in the figure, the wire saw 1 winds a wire 11 supplied from a supply reel 2 between groove rollers 9a and 9b in which a plurality of grooves are engraved to form a wire row, and then winds the wire reel 1 around a collection reel 3. It has come to be taken.

  As shown in FIG. 1, the wire saw 1 includes a supply reel 2, a plurality of guide rollers 4 on the supply side, a tension roller 5, two groove rollers 9 a and 9 b, a machining liquid supply nozzle (not shown), and between the groove rollers 9 a and 9 b. Are provided with a support roller 10, a tension roller 6, a plurality of collection-side guide rollers 7, and a work holding unit 16.

  For example, in the case of the fixed abrasive method, the supply reel 2 is wound with a fixed abrasive wire in which abrasive grains such as diamond are fixed to the surface of the wire 11 by electrodeposition or resin. Further, a supply reel motor 12 is connected to the supply reel 2 so that forward rotation and reverse rotation can be freely performed. In addition, a traverse mechanism (not shown) is provided in the vicinity of the supply reel 2 so that the wire 11 is smoothly fed and wound.

  The wire 11 fed from the supply reel 2 is guided to a plurality of guide rollers 4, and is guided to the groove rollers 9a and 9b via tension rollers 5 provided in the middle. The tension roller 5 is pivotally supported at the tip of a swinging tension arm. The guide roller 4 immediately after the tension roller 5 is provided with a load cell 8. The tension of the wire 11 is read and a predetermined tension is applied to the wire 11 by controlling the tension arm. ing.

  A plurality of grooves (not shown) are engraved on the outer periphery of the two groove rollers 9a and 9b, and the wire 11 guided to the two groove rollers 9a and 9b is wound around the groove to be a wire. A column is formed. A drive motor 15 for rotating the groove roller 9 forward or backward is connected to at least one of the groove rollers 9a and 9b.

  Further, a support roller 10 in which a groove corresponding to the groove roller 9 is engraved is pivotally supported on the workpiece W cutting side (the upper side in the drawing) of the intermediate portion between the groove rollers 9a and 9b. The support roller 10 prevents a gap between the groove rollers 9a and 9b from expanding when cutting a plurality of workpieces W to reduce the tension of the wire 11 in the wire row, and prevents the cutting accuracy from being lowered.

  The wire 11 passing through the groove roller 9 is guided to a plurality of guide rollers 7 and, like the supply side, passes through a guide roller 7 provided with a load cell 8 and a tension roller 6 and is collected by a collection side traverser (not shown). The reel 3 is wound up. A recovery reel motor 13 is connected to the recovery reel 3 in the same manner as the supply side, and the recovery reel 3 can freely rotate forward and backward.

  The work holding part 16 is provided on the groove roller 9 in this embodiment. The work holding unit 16 includes a lifting mechanism 17 and a swing mechanism 20.

  Although details of the elevating mechanism 17 are omitted, the elevating mechanism 17 elevates and lowers the swing mechanism 20 by combining the elevating motor 14 and an appropriate ball screw (not shown). Moreover, the workpiece | work W is sent toward the said wire row | line | column by driving the said raising / lowering mechanism 17 and lowering | hanging the workpiece | work holding | maintenance part 16. FIG.

  The swing mechanism 20 is provided above and below a support plate 21 as shown in FIG. 1, and the support plate 21 is held by the elevating mechanism 17 via a support column erected on the support plate 21. ing.

  As shown in FIGS. 2 to 4, the swing mechanism 20 includes a support plate 21, a swing motor 23 provided on the support plate 21, a work holding table 40 provided below the support plate 21, A table holding frame 50 that pivotally supports the work holding table 40 and a link portion 24 that converts the rotational force of the swing motor 3 into a swing motion are provided.

  As shown in FIG. 3, the work holding table 40 is formed in an L shape facing downward when viewed from the side, and is formed of a base portion 40c and a support portion 40d provided in parallel to the support plate 21. . A detachable working table 43 is fitted and fixed below the base portion 40c. A dummy member 44 made of ceramic, carbon, or the like is bonded to the processing table 43, and the workpiece W is bonded to the lower surface of the dummy member 44 to hold the workpiece W. The illustrated wire 11 is drawn thicker than the actual diameter for easy understanding, and the pitch is also drawn wider than the actual.

  Below the support plate 21, a table holding frame 50 is fixed vertically to the support plate 21, and the support portion 40 d of the work holding table 40 is positioned so as to face the table holding frame 50. . A swing shaft 41 is fixed to the support portion 40d at a position substantially corresponding to the center axis of the workpiece W. The swing shaft 41 is supported by a table holding frame 50 via a bearing 42 and a bearing 51, and the work holding table 40 is rotatable with respect to the table holding frame 50. In the present embodiment, the table holding frame 50 and the work holding table 40 are provided in the same pair on the left and right.

  Further, swing arms 28a and 28b are erected on the upper surface of each of the pair of work holding tables 40, and both swing arms 28a and 28b are provided with two openings 29a and 29b provided in the support plate 21, respectively. And protrudes on the support plate 21.

  One end of the first link 33 is pivotally supported on the back side near the upper end of the swing arm 28a. On the other hand, one end of the second link 34 is pivotally supported on the front side near the upper end of the swing arm 28b. The other end side of the first link 33 and the other end side of the second link 34 are both supported by an eccentric shaft 32 that is eccentrically provided on the disc 31. The disc 31 is connected to the rotating shaft 30 of the swing motor 23 at the center thereof. The swing motor 23 is fixed to a motor fixing frame 22 erected on the support plate 21.

  Therefore, when the swing motor 23 is driven in one direction as shown in FIG. 4, the eccentric shaft 32 rotates around the rotation shaft 30, and the first link 33 and the second link 34 connected to the eccentric shaft 32 As a result of the crank motion, both the work holding tables 40, 40 swing together through the swing arms 28a, 28b. It should be noted that the swing angle and the swing speed can be appropriately changed by appropriately adjusting the eccentric amount of the eccentric shaft 32 and the lengths of the first link 33 and the second link 34.

  The above is the configuration of the wire saw according to the first embodiment of the present invention. Next, the swing operation of the wire saw according to the first embodiment of the present invention will be described based on FIGS. 5 and 6.

  FIG. 5A shows an initial state of the swinging operation, and the left and right workpieces W are both in parallel with the wire row. This state is a state where the swing angle is 0 °. At this time, for example, the wire 11 reciprocates as shown in FIG. 9B. Further, a machining fluid is supplied near the cutting portion.

  FIG. 5B shows a state in which the swing motor 23 is driven and the disk 31 is rotated by 90 °. At this time, the swing arm 28a is pushed leftward by the first link 33, and the work holding table 40a tilts to the left. On the other hand, the swing arm 28b is pulled leftward by the second link 34, and the work holding table 40b is also tilted to the left. For convenience, the state in which the work holding table 40 is inclined in the left direction is defined as a state in which the work holding table 40 is swung in the plus direction.

  FIG. 6C shows a state in which the disk 31 is further rotated by 90 ° from the state of FIG. At this time, as in FIG. 5A, the left and right workpieces W are both in parallel with the wire row (swing angle 0 °).

  FIG. 6D shows a state in which the disk 31 is further rotated by 90 ° from the state of FIG. At this time, the left and right workpieces W are in a state of being inclined in the right direction, being located at positions symmetrical with respect to FIG. This state is assumed to be a state of swinging in the minus direction.

  In the first embodiment of the present invention, since the rotational motion is converted into the swing motion via the crank mechanism, the change of the swing angle and the swing speed is, for example, shown in FIGS. As shown in c), it changes while drawing a gentle arc. Thus, by changing the swing angle and swing speed so as to draw an arc, the impact when reversing the swing direction can be reduced, and the vibration of the workpiece during the swing and the load transmitted to the wire array can be drastically reduced. Fluctuations can be reduced. Further, it is possible to reduce the catch between the cut surface of the workpiece W and the wire 11 when the swinging direction is reversed, and to prevent the wire 11 from being disconnected. That is, since the rapid change of the cutting conditions at the time of cutting can be reduced, the cutting accuracy of the cutting workpiece W is improved.

  In the present embodiment, the swing of the workpiece W is such that the left and right workpieces W swing in the same direction in synchronization, but the arrangement of the first link 33 and the second link 34 is changed. Thus, they may swing differently. When the left and right workpieces W have the same shape and the same material, it is preferable that the left and right workpieces W be rocked in synchronization with each other as in this embodiment in order to match the cutting accuracy of the left and right workpieces W.

  Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the swing mechanism 20 according to the first embodiment is performed by driving control of the swing motor 55 without using a crank mechanism. In addition, the same member as the code | symbol used in 1st Embodiment is used for a common member.

  7 is a right side view of the rocking mechanism 20, and FIG. 8 is a partially cutaway BB direction view of FIG. As shown in FIG. 8, a motor fixing frame 56 is erected on the rear side of the support plate 21, and a swing motor 55 is fixed to one surface thereof.

  Drive pulleys 57 a and 57 b are coaxially fixed to the swing motor 55. Further, since it is the same as that of the first embodiment, a detailed description is omitted, but the pair of left and right workpiece holding tables 40 are pivotally supported by a pair of table holding frames 50 via a swing shaft 41, respectively. Yes.

  The pair of left and right swing shafts 41 and 41 extend so as to penetrate the respective table holding frames 50 and 50, and the driven pulleys 58a and 58b of the respective ends of the swing shafts 41 and 41 are fixed. ing.

  Timing belts 59 and 59 are wound around the driving pulley 57a and the driven pulley 58a and the driving pulley 57b and the driven pulley 58b through the opening 52, respectively. Therefore, the workpiece holding tables 40a and 40b are caused to swing by way of the timing belts 59 and 59 by rotating the swing motor 55 forward and backward.

  At this time, the swing angle and the swing speed are controlled by an arc-shaped change such as that performed by a crank motion through a swing mechanism control unit (not shown), for example, as shown in FIGS. 9A and 9B. Oscillation can be performed with a simple change.

  It should be noted that the curve drawn with respect to the time change of the swing speed and swing angle is preferably a sine curve, but is not limited to this, and may be a curve approximated to a sine curve, or a linear It is not limited to a sinusoidal curve as long as it is not a change but an arc-like change.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 10 is an overall schematic view of a wire saw according to the third embodiment of the present invention. As shown in FIG. 10, the wire saw 1 according to the third embodiment of the present invention is such that the wire saw according to the first embodiment and the second embodiment swings the workpiece W, whereas the wire saw side This is a wire saw that swings.

  Since the part related to the traveling of the wire 11 is the same as that of the wire saw 1 according to the first embodiment, the description will be made centering on the swing mechanism 61 different from the first embodiment. In addition, the same code | symbol is attached | subjected to the member common to 1st Embodiment.

  A main body base 60 is erected in the center of the figure, and a swing member 62 is supported on the main body base 60 so as to be rotatable around a swing shaft core 65 using a cross roller bearing (not shown) or appropriate guides. ing. A drive pulley 63 is provided in the vicinity of the swing member 62, and a swing motor 66 is connected to the drive pulley 63. The swinging member 62 has a gear formed on the outer periphery of a portion protruding to the back side of the main body base 60, and a timing belt 64 is stretched around the gear and the driving pulley 63.

  Further, two groove rollers 9a and 9b are rotatably supported on the swing member 62. The groove rollers 9a and 9b are configured to swing integrally with the swing member 62, and the wire train wound between the groove rollers 9a and 9b swings. .

  A control unit (not shown) is connected to the swing motor 66, and the swing motor 66 is driven while drawing an arc so that the swing angle and swing speed change gently. This control is the same as in the first embodiment and the second embodiment. In this embodiment, the swinging motor 62 is used to swing the swinging member 62. However, by applying the first embodiment, the swinging member 62 is swung through the crank mechanism. The swing speed may swing while drawing an arc.

  10 (a) to 10 (c) are charts of the swinging motion according to another embodiment of the present invention.

  FIG. 11A shows an embodiment in the case of rocking while keeping the rocking angle constant for a certain time. In this embodiment, after the rocking angle is constantly increased in the plus direction, it is changed while drawing an arc when switching to a constant and when the rocking angle is reversed in the minus direction. . Thus, by changing the swing angle while drawing an arc, a rapid change in swing can be prevented, and wire breakage prevention and cutting accuracy can be improved.

  FIG. 11B is a graph in which the change in the swing angle with time is more gradual than in the first embodiment. By gently changing the swing angle in this way, a sudden change in swing can be prevented, and the wire breakage can be prevented and the cutting speed can be improved.

  The above is the configuration of each embodiment of the present invention, but can be appropriately changed within the scope of the invention. For example, although there are two groove rollers in this embodiment, three or more groove rollers may be used. Also, one workpiece may be cut or a plurality of workpieces may be cut. In addition to cutting a single wire, two or more wires may be used. Moreover, it can be used not only for forming and cutting a wire row, but also for a single wire saw cut. Further, the swing angle and the swing speed can be appropriately selected according to the size and material of the workpiece to be cut. Further, the traveling speed of the wire, the reciprocating traveling, and the one-way traveling can be appropriately selected.

W Work 1 Wire saw 2 Supply reel 3 Recovery reel 4 Guide pulley 5 Tension pulley 6 Tension pulley 7 Guide pulley 8 Load cell 9 Groove roller 9a Groove roller 9b Groove roller 10 Support roller 11 Wire 12 Supply reel motor 13 Recovery reel motor 14 Lifting motor 15 Drive motor 16 Work holding portion 17 Elevating mechanism 20 Oscillating mechanism 21 Support plate 22 Motor fixed frame 23 Oscillating motor 28 Oscillating arm 29 Opening portion 30 Rotating shaft 31 Disc 32 Eccentric shaft 33 First link 34 Second link 40 Workpiece Holding table 40a Base portion 41 Oscillating shaft 42 Bearing 43 Processing base 44 Dummy member 45 Oscillating shaft core 50 Table holding frame 51 Bearing 52 Opening portion 55 Oscillating motor 56 Motor fixing frame 57a First drive pulley 57b Second drive Pulley 58a first driven pulley 58b second driven pulley 59 timing belt 60 body base 61 swing mechanism 62 swing member 63 driving pulley 64 timing belt 65 pivot axis

Claims (5)

A wire array formed by wires wound between a plurality of groove rollers, wire driving means for moving the wire in one direction or reciprocating, and a swing mechanism for swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against a row,
The swing mechanism is
A workpiece holding table that holds the workpiece and is pivotally supported in a direction orthogonal to the wire row with a substantially center of the workpiece as a swing center;
A drive mechanism for rotating the work holding table,
The wire saw characterized in that the rocking by the rocking mechanism is configured such that at least a change in the rocking angle over time when the rocking direction is reversed draws an arcuate curve. The swing mechanism is
At least one rotational drive mechanism;
A disc fixed to the rotational drive mechanism;
A fixed shaft erected at an eccentric position of the disc;
Including at least one link rod having one end pivotally supported by the fixed shaft;
2. The wire saw according to claim 1, wherein the other end of the link bar is pivotally supported on the work holding table to convert the rotational motion by the rotational drive mechanism into the swing motion of the work. The swing mechanism is
At least one rotational drive mechanism;
A rotation transmission mechanism for transmitting rotation of the rotation drive mechanism to rotate the work holding table;
The wire saw according to claim 1, wherein the work holding table is swung while the rotation drive mechanism is rotated forward and backward. A wire array formed by wires wound between a plurality of groove rollers, wire driving means for moving the wire in one direction or reciprocating, and a swing mechanism for swinging the workpiece. A wire saw that cuts the workpiece by pressing the workpiece against a row,
The swing mechanism is
A pivot member pivotally supported by the groove roller and pivotally supported with respect to the body frame of the wire saw;
A rotation drive mechanism that swings by rotating the rotating member forward and backward,
The wire saw characterized in that the rocking by the rocking mechanism is configured such that at least a change in the rocking angle over time when the rocking direction is reversed draws an arcuate curve.   The wire saw according to any one of claims 1 to 4, wherein the arcuate curve is a sine curve or a curve approximated to a sine curve.

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