CN110216560B - Plane polishing device - Google Patents
Plane polishing device Download PDFInfo
- Publication number
- CN110216560B CN110216560B CN201910489133.2A CN201910489133A CN110216560B CN 110216560 B CN110216560 B CN 110216560B CN 201910489133 A CN201910489133 A CN 201910489133A CN 110216560 B CN110216560 B CN 110216560B
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- Prior art keywords
- gripper
- workpiece
- polishing
- connecting rod
- swinging mechanism
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- 238000005498 polishing Methods 0.000 title claims abstract description 71
- 230000007246 mechanism Effects 0.000 claims abstract description 55
- 238000012545 processing Methods 0.000 claims description 11
- 238000013519 translation Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0015—Hanging grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The plane polishing device comprises a parallel swinging mechanism and a top swinging mechanism, wherein the parallel swinging mechanism is a crank rocker mechanism, and the top swinging mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating braking motor, a driving wheel, a belt, a driven wheel, a supporting rod, a connecting rod and a gripper, wherein the speed-regulating braking motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank-rocker mechanism, and the gripper is driven to drive the polishing disc to swing a processed workpiece; the grippers are arc-shaped, and the relative positions of the two grippers are unchanged. According to the invention, the crank rocker is used as a swinging mechanism of a core principle, and the reciprocating translational gripper at the upper end is matched, so that the movement of a workpiece on the polishing disk is more complicated and disordered, the polishing precision of the workpiece is higher, the polishing disk is more uniformly polished, and the service life is longer.
Description
Technical Field
The invention mainly relates to the field of plane polishing machines, in particular to a plane polishing device.
Background
The existing electronic process products such as crystal oscillator substrates, silicon wafers, lithium niobate substrates and the like have extremely high requirements on surface flatness, the two ends of the substrate are required to be parallel and have no crystal orientation error, the surface of a polishing die is required to meet the requirements according to the traditional polishing method, but the surface shape of the polishing die is easy to replace and needs to be further modified, and when the traditional polishing method is used for processing, the processing technology of operators is more strict, so that the traditional polishing method is low in production efficiency and more difficult to use. Therefore, in order to ensure the performance of the components and reduce the polishing cost, the electronic components are finally processed by adopting an ultra-precise polishing technology.
The ultra-precise plane polishing machine is a processing machine for various parts with high precision requirements, and when the ultra-precise plane polishing machine works, the motor drives the main shaft to rotate, the main shaft drives the polishing disk to rotate, and the parts do driven motion on the polishing disk, but the friction track of the parts is single, the polishing effect is poor, the abrasion to the same position of the polishing disk is serious, and the service life of the polishing disk is influenced.
Disclosure of Invention
In order to overcome the defects of poor polishing effect and short service life of the traditional plane polishing machine, the invention designs a plane polishing device which uses a crank rocker as a swinging mechanism of a core principle and is matched with a reciprocating translational gripper at the upper end, so that a workpiece moves on a polishing disc more complicated and disordered, the polishing precision of the workpiece is higher, the polishing disc is more uniformly polished, and the service life is longer.
The technical scheme adopted for solving the technical problems is as follows:
the plane polishing device comprises a parallel swinging mechanism and a top swinging mechanism, wherein the parallel swinging mechanism is a crank rocker mechanism, and the top swinging mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating braking motor, a driving wheel, a belt, a driven wheel, a supporting rod, a connecting rod and a gripper, wherein the speed-regulating braking motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank-rocker mechanism, and the gripper is driven to drive the polishing disc to swing a processed workpiece; the grippers are arc-shaped, and the relative positions of the two grippers are unchanged.
The top swing mechanism requires modification of the gripping motion of the workpiece as a rocker to achieve a small angle. Therefore, the stroke and the return stroke of the rocker mechanism designed by the patent are working strokes. The swinging mechanism is designed as a crank-rocker mechanism without quick return characteristic.
Further, the grip is arc-shaped with a central angle of 150 degrees, the tail part is extended to a certain extent, and two holes with different sizes are formed in the extension rod and are used for being connected with the support rod and the connecting rod.
The radius of the inner ring of the arc-shaped grip is r1, the radius of the outer ring is r2, r1 is less than r2, and r1 and r2 can take different values according to different polishing devices and different polishing disc sizes.
Preferably, two small holes are formed at two ends of the opening for installing and decorating a whole ring, and the whole ring can prevent the workpiece from flying out of the range of the gripper during processing movement, so that the workpiece is ensured to finish processing within a preset range.
According to different workpieces and different polishing devices, the swing angles of the workpieces are different, the swing angles of the rocking bars can take appropriate values correspondingly according to the different swing angles, and the lengths of the crank and the rocking bars are required to meet the following conditions:
wherein,the swing angle of the rocker is the length of the crank, and the length of the rocker is c.
The top swing mechanism comprises a rotating wheel, a telescopic connecting rod, a sliding block, a hydraulic cylinder and a workpiece clamp, wherein the rotating wheel, the telescopic connecting rod and the sliding block form a crank sliding block structure, a motor drives the rotating wheel to rotate, the sliding block is driven to reciprocate on a sliding rail through the telescopic connecting rod, the lower part of the sliding block is connected with the hydraulic cylinder, the bottom of the hydraulic rod is connected with the workpiece clamp, the hydraulic cylinder is provided with a control system, the lifting of the hydraulic cylinder can be manually controlled according to the thickness of a workpiece so as to adjust the contact between the workpiece and a polishing disc, and proper pressure is set, wherein the length l of the sliding block translation and the D between the polishing disc meet the following relation:
l≤kD
wherein k is a coefficient of 0.75 to 0.85.
Furthermore, the length of the telescopic connecting rod can be reasonably set according to the size of the polishing disc and other parameters, so that the translational amplitude of the clamp is changed, and the expected swinging and machining effects are realized.
Furthermore, the telescopic connecting rod is connected with the supporting rod and the gripper through a pin shaft.
The material of the grip is stainless steel.
The grippers and the workpiece clamp are operated in a staggered mode without intervals, and a control feedback system for increasing the motion randomness of the workpiece is arranged, and the operation steps are as follows:
the first step: firstly, inputting thickness and roughness parameters of a workpiece by the system;
and a second step of: the system inputs a random number randomly;
and a third step of: setting a random number as a clamp running distance;
fourth step: judging whether the taken random movement distance exceeds the operable range of the clamp, and if so, returning to the second step; if the current value does not exceed the current value, continuing to downwards;
fifth step: setting working parameters of the gripper and the upper end clamp according to the selected clamp running distance, wherein the working parameters comprise working time of the gripper and the upper end clamp and swinging speed of the gripper and the upper end clamp;
sixth step: and carrying out operation according to the set parameters to finish workpiece processing and outputting.
Furthermore, when the gripper works, the workpiece clamp does not reciprocate and translate, the position is right relative to the center of the polishing disc, the clamp does not clamp the workpiece, only the protection function is achieved, and the workpiece is prevented from flying out from the upper end; when the workpiece clamp works, the clamp clamps the workpiece, the polishing disk rotates and drives the workpiece to reciprocate and translate, and the gripper is stationary and does not move.
The technical conception of the invention is as follows: the crank rocker mechanism is convenient to manufacture, the kinematic pairs are low pairs, can bear larger load, and the speed can be controlled; although the flexibility in realizing the motion law of the driving rod is poor, in order to realize the semi-plane motion, as expected by the patent, the swinging motion is more suitable; the connecting rod mechanism is an advanced and reasonable mechanism and is practical.
The beneficial effects of the invention are mainly shown in the following steps: the polishing disc solves the problems that the workpiece machining precision is insufficient, the polishing disc is seriously worn and the service life is short due to the fact that the motion track of the workpiece is single when the workpiece is polished by the existing polishing machine, and provides a structure which enables the workpiece to be higher in polishing precision and efficiency, and the polishing disc is more uniform in wear, longer in service life and cost-saving.
Drawings
FIG. 1 is a front view of a plane polishing device mechanism of the present invention
FIG. 2 is a schematic view of a crank-rocker mechanism in a planar polishing apparatus according to the present invention
FIG. 3 is a schematic view of a gripper in a crank and rocker mechanism according to the present invention
FIG. 4 is a flow chart of an intelligent adjustment feedback optimization system for workpiece processing in the invention
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a plane polishing device is shown in fig. 1, and the main structure schematic diagram includes a parallel swinging mechanism and a translation mechanism at the upper end of a polishing disc, and referring to fig. 2, the parallel swinging mechanism is mainly a crank-rocker mechanism, and the translation mechanism at the upper end of the polishing disc is driven by a crank-slider mechanism.
The crank rocker mechanism is convenient to manufacture, the kinematic pairs are low pairs, the crank rocker mechanism can bear larger load, and the speed can be controlled. Although the flexibility in realizing the motion law of the driving rod is poor, in order to realize the semi-plane motion, it is more appropriate to realize the swinging motion as expected in this patent. The research of the link mechanism in the field is also mature, and the link mechanism is an advanced, reasonable and practical mechanism.
The parallel swinging mechanism mainly comprises a speed regulating driving wheel 9, a driven wheel 10, a belt 12, a supporting rod 14, a connecting rod 11, a gripper 13 and a trimming ring. The motor drives the driving wheel 9, the driving wheel 9 drives the driven wheel 10 to rotate through the belt 12, the two connecting rods 11 are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod 11 is respectively connected with the gripper 13 to form a crank rocker mechanism, and accordingly the gripper 13 is driven to drive the processed workpiece to swing on the polishing disc. The grippers 13 are arc-shaped, the relative positions of the two grippers are unchanged, and trimming rings are arranged at the two ends of the grippers to prevent the parts from being thrown out of the range of the grippers during processing.
The swing mechanism of the present embodiment needs to correct the gripping movement of the work as a rocker to achieve a small angle. Therefore, the stroke and the return stroke of the rocker mechanism designed by the patent are working strokes. The swinging mechanism is designed as a crank-rocker mechanism without quick return characteristic.
The grip (as shown in figure 3) is in an arc shape with a central angle of 150 degrees, the horizontal length of the grip is b, the tail part of the grip is prolonged to a certain extent, the horizontal length of the whole rocker is c, and two holes with different sizes are formed in the extension rod and are used for being connected with the support rod and the connecting rod. The radius of the inner ring of the arc-shaped gripper is r1, the radius of the outer ring is r2, r1 is smaller than r2, and r1 and r2 can take different values according to different polishing machines and different polishing disc sizes. Two small holes are formed in two ends of the opening and used for installing and decorating a whole ring, the whole ring can prevent a workpiece from flying out of the range of the gripper during machining movement, and the workpiece is guaranteed to finish machining within a preset range.
According to different workpieces and different polishing machines, the swing angles of the workpieces are different, the swing angles of the grippers 13 (namely, the rocking bars) can take appropriate values correspondingly according to the different swing angles, and the lengths of the connecting rods 11 and the grippers 13 (namely, the rocking bars) are as follows:
wherein,the swing angle of the gripper 13 (i.e. the rocker arm), a is the length of the connecting rod 11, and c is the length of the gripper 13 (i.e. the rocker arm).
Further, the method comprises the steps of,is the angle between the two extreme positions when the gripper 13 (i.e. the rocker) swings.
The polishing disc upper end structure comprises a rotating wheel 3, a compressible connecting rod 4, a sliding block 5, a hydraulic cylinder 6 and a clamp 7, wherein the rotating wheel 3, the connecting rod 4 and the sliding block 5 form a crank sliding block structure, a motor drives the rotating wheel 3 to rotate, the sliding block 5 is driven to reciprocate on a sliding rail through the connecting rod 4 to translate, the lower part of the sliding block 5 is connected with the hydraulic cylinder 6, the bottom of the hydraulic cylinder 6 is connected with the workpiece clamp 7, the hydraulic cylinder is provided with a control system, and the lifting of the hydraulic cylinder 6 can be manually controlled according to the thickness of a workpiece so as to adjust the contact between the workpiece and the polishing disc and set proper pressure. Wherein, the length l of the sliding block translation and the D between the polishing discs satisfy the following relation:
l≤kD
where k is a coefficient, taking 0.75-0.85.
Further, the length of the compressible connecting rod 4 can be reasonably set according to the size of the polishing disc and other parameters, so that the translational amplitude of the clamp is changed, and the expected swing and machining effect are realized.
Furthermore, the connecting rod 11 and the gripper 13 are connected by adopting a pin shaft, and other structures are connected by adopting threads and welded.
Further, the correction grip 13 and the upper clamp 7 are operated in a staggered manner without interval, and a control feedback system for increasing the motion randomness of the workpiece is arranged as shown in fig. 4. The operation steps are as follows:
the first step: the system inputs parameters such as thickness, roughness and the like of the workpiece.
And step two, the system inputs a random number randomly.
And a third step of: the random number is set as the jig running distance.
Fourth step: judging whether the taken random movement distance exceeds the operable range of the clamp, and if so, returning to the second step; if not, continuing to go down.
Fifth step: and setting working parameters of the grippers and the upper end clamps according to the selected clamp running distance, wherein the working parameters comprise working time of the grippers and the upper end clamps and swinging speed of the grippers and the clamps.
Sixth step: and carrying out operation according to the set parameters to finish workpiece processing and outputting.
Further, when the correction grip 13 works, the upper end clamp 7 does not reciprocate and translate, the position is just relative to the center of the polishing disc, the clamp 7 does not clamp the workpiece, only plays a role in protection, and the workpiece is prevented from flying out from the upper end; when the upper clamp 7 works, the clamp 7 clamps the workpiece, the polishing disk rotates and drives the workpiece to reciprocate and translate, and the correction grip 13 is stationary and does not move.
The embodiment solves the problems that the workpiece machining precision is insufficient, the polishing disc is seriously worn and the service life is short due to single motion track of the workpiece when the workpiece is polished by the existing polishing machine, provides a structure which enables the workpiece to be higher in polishing precision and efficiency, enables the polishing disc to be more uniformly worn, is longer in service life and saves cost.
The scope of the present invention includes, but is not limited to, the above embodiments, and any alterations, modifications, and improvements made by those skilled in the art are intended to fall within the scope of the invention.
Claims (2)
1. The plane polishing device is characterized by comprising a parallel swinging mechanism and a top swinging mechanism, wherein the parallel swinging mechanism is a crank rocker mechanism, and the top swinging mechanism is a crank slider mechanism; the parallel swinging mechanism comprises a speed-regulating braking motor, a driving wheel, a belt, a driven wheel, a supporting rod, a connecting rod and a gripper, wherein the speed-regulating braking motor drives the driving wheel, the driving wheel drives the driven wheel to rotate through the belt, the two connecting rods are respectively connected with the driving wheel and the driven wheel, the other end of each connecting rod is respectively connected with the gripper to form a crank rocker mechanism, and the gripper is driven to drive the polishing disc to swing a processed workpiece; the grippers are arc-shaped, and the relative positions of the two grippers are unchanged;
the grip is in an arc shape with a central angle of 150 degrees, the tail part is extended to a certain extent, and two holes with different sizes are formed in the extension rod and are used for being connected with the support rod and the connecting rod;
the radius of the inner ring of the gripper is r1, the radius of the outer ring of the gripper is r2, r1 is less than r2, and r1 and r2 can take different values according to different polishing machines and different polishing disc sizes;
two small holes are formed at two ends of the opening of the gripper and used for installing and decorating a whole ring, and the whole ring can prevent a workpiece from flying out of the range of the gripper during processing movement, so that the workpiece is ensured to finish processing within a preset range;
the swing angles of the workpieces are different aiming at different workpieces and different polishing machines, and the lengths of the connecting rod and the handles satisfy the following conditions:
wherein,the swinging angle of the gripper is a length of the connecting rod, and c is a length of the gripper;
the top swing mechanism comprises a rotating wheel, a telescopic connecting rod, a sliding block, a hydraulic cylinder and a workpiece clamp, wherein the rotating wheel, the telescopic connecting rod and the sliding block form a crank sliding block structure, a motor drives the rotating wheel to rotate, the sliding block is driven to reciprocate on a sliding rail through the telescopic connecting rod, the lower part of the sliding block is connected with the hydraulic cylinder, the bottom of the hydraulic rod is connected with the workpiece clamp, the hydraulic cylinder is provided with a control system, the lifting of the hydraulic cylinder can be manually controlled according to the thickness of a workpiece so as to adjust the contact between the workpiece and a polishing disc, and the pressure is set, wherein the length l of the sliding block translation and the D between the polishing disc meet the following relation: l is less than or equal to kD
Wherein k is a coefficient of 0.75 to 0.85.
2. The planar polishing apparatus as claimed in claim 1, wherein said telescopic link is coupled to said support bar and said gripper by a pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910489133.2A CN110216560B (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910489133.2A CN110216560B (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110216560A CN110216560A (en) | 2019-09-10 |
| CN110216560B true CN110216560B (en) | 2024-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910489133.2A Active CN110216560B (en) | 2019-06-06 | 2019-06-06 | Plane polishing device |
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| CN (1) | CN110216560B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110842742A (en) * | 2019-11-21 | 2020-02-28 | 苏州亮宇模具科技有限公司 | Grinding and polishing equipment capable of forming high-efficiency high-flatness and grinding and polishing method |
| CN110948366B (en) * | 2019-12-09 | 2024-07-09 | 华侨大学 | Polishing machine with adjustable swinging mechanism and polishing method |
| CN114935587B (en) * | 2022-07-25 | 2022-12-09 | 徐州康乃馨远红外设备有限公司 | High-sensitivity detection device based on infrared technology |
| CN116141177A (en) * | 2023-04-03 | 2023-05-23 | 上海菲利华石创科技有限公司 | Quartz ring step polishing device for semiconductor |
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| GB191514651A (en) * | 1915-10-16 | 1917-01-16 | William Taylor | Improvements in Apparatus for Polishing Lenses. |
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| US20160008944A1 (en) * | 2013-03-19 | 2016-01-14 | Jun Zha | Polishing device for optical elements and method thereof |
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| CN110216560A (en) | 2019-09-10 |
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