JP2011240449A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw that can highly accurately machine a wide workpiece and a narrow workpiece by including a mechanism for oscillating a wire in order to bring the oscillation axial center closer to a machining point and by making a distance between axes of a pair of guide rollers freely adjustable, in a single wire saw.SOLUTION: A wire saw cuts a workpiece by making one wire stretched over between a plurality of guide rollers travel and by pressing the workpiece against the wire. An oscillation plate 6 is pivotally supported to the front surface of a body plate 2 so as to be oscillated around the axial center 8. The oscillation plate 6 has guide rollers 7a, 7a provided at right and left sides so as to be symmetrical to each other with respect to the axial center 8. The axial center 8 becoming a base point for oscillation is brought closer to a wire 5 of a machining part. The wire 5 of the machining part and the oscillation axial center are brought close to each other in order to prevent the wire 5 from being separated from the machining part.

Description

  The present invention relates to a wire saw that cuts a workpiece with a single wire stretched between a pair of guide rollers. More specifically, the present invention relates to a swing mechanism of a cutting wire in a wire saw, a displacement mechanism of an inter-axis distance between the pair of guide rollers, and a wire saw capable of switching between single cutting (single) and multiple cutting (multi).

  Conventionally, a fixed abrasive wire in which abrasive grains such as diamond are fixed on a wire surface is placed between a pair of guide rollers, and a workpiece (for example, silicon, silicon carbide, A single wire saw is known that presses and cuts sapphire, a ceramic material, or the like) against the wire (for example, Patent Document 1).

  In the single wire saw, a window (corresponding to an opening, hereinafter referred to as an opening) is provided in the center of a vertically erected substrate (corresponding to a body frame, hereinafter referred to as a body frame), and a processing table is moved up and down in the opening. It is provided as possible.

  A pair of guide rollers and a pair of tension rollers for guiding the wire and applying tension to the wire are provided around the opening of the main body frame, and are supplied from a reel provided above the main body frame. The wire is wound around the guide roller and the tension roller so as to form a line.

  And while making the said wire drive | work, the workpiece fixed on the process table is pressed and cut | disconnected to this wire by the raise of a process table.

  By the way, the wire saw of the said patent document 1 presses the wire wound between a pair of guide pulleys flatly with respect to a workpiece, and the contact of a wire and a workpiece becomes a line contact, and is large to a wire. Since the load is applied, there are problems that the processing time becomes long and the processing accuracy is deteriorated.

  Therefore, when considering that the main body frame is swung in order to make the contact between the workpiece and the wire approach point contact by swinging the wire, the main body frame has a reel, a tension mechanism, etc. Since the weight is heavy, the swing mechanism has a problem of increasing the size.

  Further, the wire saw of Patent Document 1 is provided with a processing table in the opening, and a cut workpiece enters the opening, and therefore a swing axis can be installed in the opening. Can not. Therefore, it is necessary to install the rocking shaft core above the opening (above the center between the pair of guide pulleys).

  Also, in order to oscillate the workpiece itself, it is necessary to maintain the rigidity of the oscillating mechanism in accordance with the processing of heavy workpieces. There is a problem that it becomes difficult to bring the material closer to the processing point.

Japanese Examined Patent Publication No. 6-47233

  However, when the swing mechanism is enlarged as described above, there is a problem that the cost is further increased, contrary to the demand for processing a workpiece more simply and more compactly. Furthermore, there is a problem that as the swing axis moves away from the center between the pair of guide rollers, the wire moves away from the processing point when swinging, and the processing accuracy tends to vary.

  Further, the wire saw disclosed in Patent Document 1 has a guide roller shaft fixed to the main body frame, so that the guide cannot be dealt with when processing a wide workpiece or when processing a workpiece with a narrow width. Since the distance between the rollers is too wide, there is a problem that the wire does not travel stably and the processing accuracy is deteriorated.

  In addition, there is a demand to cut several wafers instead of one, but a multi-wire saw that cuts a large number of wafers is large, whereas a single wire saw needs to be cut multiple times. Because there is a problem that is wasteful.

  In addition, it is conceivable to provide a plurality of grooves on the guide roller of the wire saw disclosed in Patent Document 1. However, when a plurality of grooves are provided on a pair of guide rollers, the wire is provided a plurality of times between the pair of guide rollers. It is necessary to form a wire row by winding, but in this case, there is a problem that only a workpiece having a size (height direction) depending on the diameter of the guide roller can be processed.

  Here, when the guide roller diameter is increased, the wire saw becomes larger and the swing axis is moved away from the processing point of the wire, and the wire is separated from the processing point when swinging. There is a problem that the processing accuracy of an object deteriorates.

  Accordingly, an object of the present invention is to provide a mechanism for swinging a wire in a single wire saw, and by making the swing shaft core closer to the processing point and making the distance between the shafts of a pair of guide rollers adjustable. An object of the present invention is to provide a wire saw that can accurately process a wide workpiece and a narrow workpiece. It is another object of the present invention to provide a wire saw having a simple mechanism that can easily switch between single processing and multi-processing of several sheets.

  Therefore, the invention according to claim 1 cuts the workpiece by passing one wire between a plurality of guide rollers, running the wire, and pressing the workpiece against the wire passed between the guide rollers. In the wire saw, a swing plate that swings around a predetermined axis is pivotally supported on the front surface of the main body plate that is erected, and guide rollers that are symmetric with the swing center are arranged on the swing plate. A configuration in which the workpiece is cut with the wire while swinging the wire spanned between the guide rollers by swinging the swing plate about the shaft core. This is a wire saw.

  The invention according to claim 2 employs a configuration in which both guide rollers provided on the swing plate are provided so as to be movable to the left and right, and both guide rollers are moved toward and away according to the size of the workpiece. The wire saw according to claim 1.

  According to a third aspect of the present invention, the swing plate is attached to each of the guide roller and the guide roller, a roller shaft fixing portion for attaching a guide roller separately from the guide rollers above the shaft core. A plurality of grooved guide rollers, and a wire is wound around the three guide rollers to form a plurality of wire rows, and the workpiece is cut into a plurality of wafers by the wire rows. The wire saw according to claim 1 or 2, which is employed.

  According to the present invention, since the oscillating shaft core is provided between the pair of guide rollers, the machining point and the wire approach point contact, and the machining point and the wire are not separated from each other, so that the machining accuracy is improved.

  In addition, according to the present invention, the distance between the shafts of the pair of guide rollers is made displaceable, so that the tension of the wire in the processed portion is stable in both the wide workpiece and the narrow workpiece, Accurate machining can be performed.

  In addition, a guide roller having a plurality of grooves on the upper center of the swing frame can be detachably supported, and a pair of guide rollers can also be attached to and detached from the guide rollers having a plurality of grooves. Even for a workpiece, a machining space can be secured without depending on the diameter of the guide roller, and a multi-processing of a plurality of sheets can be performed with an easy and simple mechanism. Further, since the above can be performed with the guide roller diameter of the processing portion being constant, the control mechanism is not complicated.

It is a front view of the wire saw which concerns on 1st Embodiment of this invention. It is a partially cutaway perspective view of the front side of the wire saw according to the first embodiment of the present invention. It is a partially cutaway perspective view of the back side of the wire saw according to the first embodiment of the present invention. It is explanatory drawing showing rocking | fluctuation operation | movement of the wire saw of this invention. (A) And (b) is explanatory drawing showing the operation | movement which displaces between the axes | shafts of the wire saw of this invention. It is a front view of the wire saw which concerns on 2nd Embodiment of this invention. It is a partially cutaway perspective view of the front side of a wire saw according to a second embodiment of the present invention.

  A first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is a front view of a wire saw according to a first embodiment of the present invention, and FIG. 2 is a partially cutaway perspective view of the front side of the wire saw.

  As shown in FIG. 1, the wire saw 1 is provided with a supply reel 3 for supplying a fixed abrasive wire 5 on which diamond or the like is fixed on the upper left side of a vertically extending main body frame 2, and symmetrical with the supply reel 3. A recovery reel 4 for winding the wire 5 is provided. The supply reel 3 and the collection reel 4 are connected to appropriate drive motors (not shown) so as to be able to rotate forward and backward.

  The wire 5 fed out from the supply reel 3 passes through a supply-side tension roller 12 for applying a tension, and is passed over guide rollers 7a and 7a provided below the main body frame 2, whereby these guide rollers 7a. , 7a, the wire 5 for cutting the workpiece 18 is formed. The wire 5 passing through the guide roller 7a is wound around the collection reel 4 via the collection-side tension roller 12.

  A processing table 15 that moves up and down by an appropriate mechanism (not shown) is provided below the center of the guide roller 7a, and affixing table 16 is detachably fixed thereon. A dummy member 17 such as carbon or ceramics is affixed to the affixing table 16 with an adhesive or the like, and a workpiece 18 such as sapphire or silicon is affixed to the dummy member 17 with an adhesive or the like.

  While the work table 17 is raised and the work piece 18 is pressed against the row of wires 5 formed between the guide rollers 7a and 7a, the wire 5 travels in one direction or reciprocates to appropriately apply a working fluid (not shown). By supplying, the workpiece 18 is cut.

  As shown in FIG. 2 and FIG. 3, the front surface of the main body frame 2 is provided with a convex swing frame 6 that is pivotally supported with respect to the main body frame 2. On the front surface, two guide rollers 7a and 7a on the left and right are rotatably supported on the guide roller support plate 20 via the slide plate 21, respectively.

  The swing frame 6 is fixed to a front end of a swing shaft 8 provided through the main body frame 2, and the swing frame 6 is rotated by a predetermined angle to the left and right. The oscillating shaft 8 is oscillated left and right about the axis. The swing shaft 8 is provided so as to be positioned at the center between the guide rollers 7a and 7a. The swing of the swing frame 6 is performed on the swing shaft 8 between the guide rollers 7a and 7a. It swings to the left and right as a core.

  A driven pulley 28 is fixed to the rear end of the body frame 2 of the swing shaft 8, and a motor 25 that drives and rotates the driven pulley 28 is provided on the side of the driven pulley 28. The motor 25 is fixed to a motor fixing frame 26 extending to the rear of the main body frame 2. A driving pulley 27 is connected to the motor shaft of the motor 25, and a timing belt 29 is stretched between the driving pulley 27 and the driven pulley 28 to transmit the rotation of the motor shaft to the swing shaft 8. It has become.

  In addition, a long hole 10 is formed on the left and right sides of the swing frame 6 in two upper and lower steps, and a rail 11 is provided on the front surface of the swing frame 6 between the upper and lower long holes 10. It has been. The slide plate 21 is fitted to the rail 11 and can be moved to the left and right along the rail 11. A shaft that can move to the left and right in the long hole 10 is provided on the back surface of the slide plate 21. A fixing member 22 is provided so as to penetrate the hole 10 (not shown), and fixes the slide plate 21 at a predetermined position of the long hole 10 at the rear end of the shaft. The slide plate 21 is fixed at a predetermined position by screwing the fixing member 22 with a screw or the like and pressing it against the swing frame 6.

  Further, a roller shaft fixing hole 9 formed with a female screw is provided in the vicinity of the apex of the convex portion of the swing frame 6, and a third guide roller 7b used in a second embodiment to be described later is attached. ing.

  The above is the configuration of the wire saw 1 according to the first embodiment of the present invention. Next, the swinging operation of the present invention will be described with reference to FIG.

  As shown in FIG. 4, by rotating the motor 25 to the left and right while running the wire 5, the swing frame 6 swings and the guide rollers 7a and 7a swing. The wire 5 stretched between the guide rollers 7 a and 7 a swings around the swing shaft 8.

  Accordingly, the swing axis can be brought close to the center of the wire 5 of the processed portion, and the swinged wire 5 is less likely to be separated from the processed portion of the workpiece 18, thereby making the processing of the workpiece 18 more effective. Since it can be performed close to the contact, the processing accuracy is improved. If the swing axis is between the center between the guide rollers 7a and 7a and the center between the guide rollers 7a and 7a of the wire 5 stretched between the guide rollers 7a and 7a, the wire during swinging The separation from the processed portion of the fifth workpiece 18 can be reduced.

  Next, the operation of the inter-axis displacement in the wire saw of the present invention will be described below based on FIGS. 5 (a) and 5 (b).

  FIG. 5A shows the operation of the inter-axis displacement when machining the narrow workpiece 18a. When processing the workpiece 18a having such a small width, the left and right guide rollers 7a and 7a are moved inward as shown by the arrows in the drawing. The inward movement of the guide roller 7a is achieved by loosening the fixing member 22 of the slide plate 21 that supports the guide roller 7a, thereby moving the slide plate 21 in the inner direction along the long hole 10 and the rail 11. Thereafter, the fixing member 22 is tightened. The interval between the guide rollers 7a is set to a width that allows the workpiece 18a to pass along with the cutting.

  By reducing the distance between the left and right guide rollers 7a in this way, the bending of the wire 5 between the guide rollers 7a can be reduced even when the width of the workpiece 18a is small, and the tension of the wire 5 can be maintained. The processing accuracy of 18a is improved.

  FIG. 5B shows the operation of the inter-axis displacement when the workpiece 18b having a large width is machined. When processing such a wide workpiece 18b, the left and right guide rollers 7a and 7a are moved outward as indicated by the arrows in the drawing. The movement of the guide roller 7a in the outward direction is performed by moving the slide plate 21 in the outward direction along the long hole 10 and the rail 11 and fixing the guide roller 7a in a predetermined position by the fixing member 22 as described above. Here, the interval between the guide rollers 7a is set to a width that allows the workpiece 18b to pass along with the cutting.

  Next, a second embodiment of the present invention will be described with reference to FIGS. In addition, the same code | symbol is given about the member same as 1st Embodiment.

  As shown in FIGS. 6 and 7, in the second embodiment, instead of the guide roller 7a with one groove used in the first embodiment, a guide roller 7b with two or more grooves is used. Is used. Further, the roller shaft 23 formed with a male screw is screwed into the roller shaft fixing hole 9 provided in the convex upper portion of the swing plate 6, and three guide rollers 7b are provided.

  The wire 5 supplied from the supply reel 3 is hung on the supply-side tension roller 12 and wound around the three guide rollers 7b to form a wire row, and then recovered via the recovery-side tension roller 12. The reel 4 is wound up. Note that each of the guide rollers 7b has only a few wires 5 wound thereon, and thus rotates as the wire 5 travels without providing a drive source.

  Therefore, a multi-wire saw can be easily obtained simply by replacing the guide roller 7a with a guide roller 7b having a plurality of grooves and further providing a third guide roller 7b having a plurality of grooves in the originally prepared roller shaft fixing hole 9. In addition, by providing the third guide roller 7b, the size of the workpiece 18 in the height direction is not limited. That is, only the left and right guide rollers 7b can cut only the workpiece 18 having a size depending on the outer diameter of the guide roller 7b when a multi-wire saw is cut.

  With the configuration as described above, a single wire saw mainly for cutting off a single piece can be easily converted into a multi-wire saw, and a large-scale cutting test that has been conventionally performed with a large-sized multi-wire saw can be performed on a small scale. .

  The above is the embodiment of the present invention, but the present invention is not limited to the above, and modifications can be made as appropriate within the scope of the invention.

DESCRIPTION OF SYMBOLS 1 Wire saw 2 Main body frame 3 Supply reel 4 Collection | recovery reel 5 Wire 6 Oscillating frame 7a Guide roller 7b Guide roller 8 Oscillating shaft 9 Roller shaft fixing hole 10 Long hole 11 Rail 12 Tension roller 13 Tension arm 15 Work table 16 Pasting table 17 Dummy member 18 Workpiece 18a Workpiece (small)
18b Workpiece (Large)
20 Guide roller support plate 21 Slide plate 22 Fixing member 23 Roller shaft 25 Oscillating motor 26 Motor fixing frame 27 Drive pulley 28 Followed pulley 29 Timing belt

Claims (3)

In a wire saw in which one wire is stretched between a plurality of guide rollers, the workpiece is cut by running the wire and pressing the workpiece against the wire spanned between the guide rollers,
A swing plate that swings around a predetermined axis is pivotally supported on the front of the main body plate,
The swing plate is configured by providing guide rollers on the left and right so as to be symmetrical with the shaft core,
A wire saw characterized in that a workpiece is cut with a wire while swinging a wire spanned between the two guide rollers by swinging a swing plate about the shaft core.   The both guide rollers provided on the swing plate are provided so as to be movable to the left and right, and both guide rollers are moved closer to and away from each other according to the size of the workpiece to be displaced between the shafts. The wire saw according to 1.   The rocking plate includes a roller shaft fixing portion for attaching a guide roller separately from the guide rollers above the shaft core, and the guide rollers having a plurality of grooves attached to the guide rollers and the guide rollers, respectively. 3. A wire according to claim 1, wherein a wire is wound around the three guide rollers to form a plurality of wire rows, and the workpiece is cut into a plurality of wafers by the wire rows. Wire saw.

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