JP2012020390A - Platy member polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a platy member polishing device capable of finishing pressing surfaces of a platy member and a polishing belt to uniform planes by bringing the pressing surfaces into uniform contact with each other and facilitating adjustment of acceleration/deceleration in pressing and driving speed of the polishing belt to efficiently polish the platy member in an optimum polishing condition.SOLUTION: This open reel type belt polishing device is capable of performing polishing to excellently smooth a surface of a polishing material 50 and finish the surface by making a pressure contact member 7 as a simple follow-up mechanism oscillatable in a direction orthogonal to a driving direction of the polishing belt 1, always uniformly adjusting pressure contact force of an electric cylinder 35 for lowering the pressure contact member 7 by performing a current ratio control, and reciprocating a holding base 40 mounted with the polishing material 50 thereon, while stably and continuously driving the polishing belt 1.

Description

  The present invention relates to a surface polishing apparatus for a plate member such as a lead frame, a printed circuit board or a copper plate used for assembling a semiconductor device.

  As a surface polishing device for a plate-like member, a driving roller that is rotationally driven by a driving device, one or more idler rollers that are rotatable, a polishing belt that runs while being hung between the rollers, and a non-polishing of the polishing belt A pressing mechanism that applies a pressing force to the surface (the back side of the belt) and a plate-like material to be polished that is disposed below the pressing mechanism and faces the polishing surface of the polishing belt (the front side of the belt) What is provided with the holding stand which hold | maintains a member is known.

  The polishing apparatus using the polishing belt as described above is roughly classified into an endless type and an open reel type depending on the method of hanging the polishing belt. In the endless type, the polishing belt is suspended endlessly between the driving roller and one or more idle rollers. In the open reel type, the abrasive belt is wound separately from the drive roller and one or more idle rollers. The polishing belt is hung as an open reel using the polishing belt supply reel and the polishing belt take-up reel that winds up the supplied polishing belt.

  For example, as an endless type, Japanese Patent Application Laid-Open No. H10-228561 discloses that “an endless sanding belt is formed by a plurality of rolls including a treading pressure pad disposed on the feeding path and guiding rollers disposed on both sides of the treading pad”. In a belt sander machine in which a belt grinding device provided with a belt guide mechanism to be delivered is provided to a feeding device, the stepping pressure pad and the belt guide mechanism are attached to a mounting frame and integrally connected. A rotating link is interposed between the vertical support shaft attached to the mounting frame and the vertical support shaft attached to the main body frame, and the mounting frame is reciprocally urged by a reciprocating drive device. Further, a belt sander machine characterized in that it is continuously reciprocally swung in a direction intersecting with the feeding direction around a spindle on the main body frame side is disclosed.

  On the other hand, as an open reel type, Patent Document 2 states, “A holding base capable of holding a plate-shaped member, a polishing tape capable of polishing a polishing surface of the plate-shaped member, and a tape transfer mechanism capable of transferring the polishing tape. And a pressure contact mechanism capable of pressing the tape surface of the polishing tape against the polishing surface of the plate-like member, and a tape plane movement mechanism for moving the polishing tape in a plane, wherein the tape plane movement mechanism is vertically arranged in parallel. A pair of support shafts, a rotation motor for rotating one of the pair of support shafts, and the one support shaft interposed between the one support shaft and the other support shaft. A rotation mechanism comprising a belt transmission mechanism for rotating the other support shaft by rotation of the other support shaft, a pressure contact member laid between the lower ends of the pair of support shafts, and between each support shaft and the pressure contact member With an eccentric ring mechanism interposed between Plate member polishing apparatus ", wherein there is disclosed.

  Further, Patent Document 3 discloses that “a gate-shaped airframe standing on a machine base, a holding base arranged on the base and capable of horizontally holding a plate-like member, and the holding base in the form of a gate. A feed mechanism that moves horizontally through the machine body, a polishing tape capable of polishing an upper surface, which is a surface to be polished of the plate member, and a surface of the polishing tape with respect to the surface to be polished of the plate member A tape transfer mechanism that can be transferred in a face-to-face manner, and a pressure contact member that presses the back surface of the polishing tape downward to press the surface of the polishing tape against the surface to be polished of the plate-like member. A movement guide mechanism capable of guiding the pressure contact member to be lifted and lowered in the pressing direction in a suspended manner is provided, and the pressure contact member can always be pressed downward, and the surface of the polishing tape and the surface to be polished of the plate-shaped member A pressure adjusting mechanism capable of adjusting the pressure contact force is provided, and the back surface of the polishing tape is moved from the middle of the lowering operation. A separation mechanism is provided for releasing the pressure contact of the polishing tape by raising the suspended pressure contact member that presses and presses the surface of the polishing tape against the surface to be polished of the plate member. A plate-shaped member polishing apparatus "is disclosed.

  Furthermore, Patent Document 4 states that “a product base on which a workpiece is placed on a bed is provided, and an abrasive belt frame is erected on both the left and right sides of the bed, and an abrasive belt is placed above each abrasive belt frame. A polishing belt take-up reel that winds up and a polishing belt take-up reel that winds up the polishing belt that is fed out from the polishing belt supply reel are provided, and left and right axis frames are erected on both sides of the polishing belt frame on the bed. The front-rear axis frame movable in the left-right direction with respect to the left-right axis frame is provided, the movable body movable in the front-rear direction is provided in the front-rear axis frame, and the pressing element movable in the up-down direction is provided in the movable body A deburring device characterized by the above is disclosed.

  In the above-mentioned endless type, the length (full length) of the polishing belt is limited by the arrangement distance of each roller, but in the open reel type, the size of the polishing belt supply reel and the polishing belt take-up reel is limited. However, since the polishing belt can be lengthened, it is possible to reduce the frequency of replacement of the polishing belt due to abrasion or dropping of abrasive grains accompanying the polishing operation. Therefore, in recent years, an oven reel type is often used.

JP-A-2-116464 Japanese Patent No. 3966030 Japanese Patent No. 3837706 JP 2000-288888 A

  The belt sander disclosed in Patent Document 1 reciprocally swings a polishing belt running at a high speed in a direction perpendicular to the traveling direction using a rotating link, so that the swing component and the material to be polished travel. In combination with the endless type, the polishing belt wears quickly and there is a problem in its durability and work efficiency.

  The plate-shaped member polishing apparatus disclosed in Patent Document 2 grinds while pressing the pressure contact member eccentrically. In order to follow the movement, a margin for the polishing belt is indispensable. Therefore, in order to secure a margin, it is necessary to perform adjustment work by reciprocating the polishing belt by forward / reverse driving of the feed motor after the predetermined number of polishing work, which reduces work efficiency. There are problems such as inviting.

  The plate-like member polishing apparatus disclosed in Patent Document 3 is configured to separate the tape transfer mechanism and related mechanisms, the press contact member and the lifting mechanism, and thereby enable the lifting and lowering portion to move up and down at high speed. However, the linkage part between the tape transfer mechanism and the pressure contact member by the winding motor and the tension motor is for the pressure adjustment because the pressure adjusting mechanism and the separation mechanism provided in the movement guide mechanism are combined for polishing work. There is a problem in that the configuration is complicated, for example, the tilting allowance mechanism and the vibration mechanism are arranged in each of them, in addition to having to match the ascending / descending range of the cylinder and the separating cylinder.

  The deburring device disclosed in Patent Document 4 classifies the flat part of the plate-like member and the burr that is a convex part, and polishes and removes only the burr, so that the polishing belt does not contact the flat part. A polishing belt that runs in a direction and a product base below the belt are arranged in parallel, and polishing work is performed only when a presser having a floating function that is movable in the X, Y, and Z axis directions contacts the burr. Therefore, there are problems that it is difficult to move the moving body provided with the pressing element at high speed and that it is difficult to improve the work efficiency because the polishing work is performed with the polishing belt stopped.

  The present invention provides a plate capable of efficiently polishing a plate-like member under optimum polishing conditions by bringing the pressing surface of the plate-like member and the polishing belt into uniform contact with each other to finish the flat surface and automatically adjusting the pressure. An object of the present invention is to provide an apparatus for polishing a shaped member.

The plate member polishing apparatus of the present invention includes a polishing belt guiding mechanism that reaches a polishing belt take-up reel through a guide roll group that guides the polishing belt from the polishing belt supply reel,
The polishing belt supply reel and the polishing belt take-up reel are synchronized with the first polishing belt feed roller in the guide roll group that guides the polishing belt and the second polishing belt feed roller that is spaced apart from the first polishing belt feed roller and disposed horizontally. An abrasive belt drive mechanism provided with an abrasive belt feed motor for driving;
A pressure contact member lowering electric cylinder is provided in a swing mechanism that swings in a direction perpendicular to the driving direction of the polishing belt. A pressing mechanism in which the arranged pressure contact member is rotatably provided along the driving direction of the polishing belt;
A holding table transfer mechanism provided with a holding table on which a plate-like member positioned below the pressing mechanism is fixed and mounted, and a holding table feeding electric cylinder for reciprocating the holding table in a direction parallel to the driving direction of the polishing belt And
The electric cylinder for lowering the pressure contact member is controlled by current ratio control.

  In the present invention, the pressing mechanism is provided in a sub-machine frame provided inside the machine frame provided with the polishing belt guiding mechanism and the polishing belt driving mechanism so that the rotation shaft extends in parallel with the driving direction of the polishing belt. The body mounting member is provided on the rotating shaft so as to extend in a direction perpendicular to the driving direction of the polishing belt and hang downward. The electric cylinder for lowering the pressure contact member is disposed on the body mounting member so that the rod faces downward. By fixing and providing the pressure contact member at the tip of the rod, the rod can be swung freely in a direction perpendicular to the driving direction of the polishing belt.

  Further, an adhesive sheet can be fixed to the upper surface of the holding table of the holding table transfer mechanism.

  In the plate member polishing apparatus of the present invention, since the pressure contact member mechanically swings following the warpage of the plate member, the plate member and the grinding surface of the polishing belt are uniformly brought into contact with each other. Can be finished in a uniform plane, and the pressure ratio of the pressure contact member can be automatically adjusted according to the condition of the surface to be ground by current ratio control, so that the plate-like member can be efficiently used under optimum polishing conditions. Can be polished.

It is a front fragmentary sectional view of the polish device of the present invention. It is side surface partial sectional drawing which shows the tension | tensile_strength provision mechanism of the grinding | polishing belt tension roller in the grinding | polishing apparatus of this invention. It is a schematic diagram of the grinding | polishing belt guidance mechanism in the grinding | polishing apparatus of this invention. It is a schematic diagram of the grinding | polishing belt drive mechanism in the grinding | polishing apparatus of this invention. It is a schematic diagram of the pressing mechanism of the polishing belt in the polishing apparatus of the present invention, (a) is a plan view, (b) is a side view.

  Hereinafter, embodiments of the present invention will be described based on examples shown in the drawings.

  FIG. 1 is a partial front sectional view of a plate member polishing apparatus of the present invention. In the figure, reference numeral 1 denotes an abrasive belt. Reference numeral 11 denotes a polishing belt supply reel, which is an actual winding reel of the polishing belt 1. The polishing belt 1 drawn out or transferred from the back surface of the polishing belt 1 comes into contact with the peripheral surface of the pressure contact member (roll-shaped contact wheel) 7, and the polishing surface on the front side is polished of the lead frame 50 as a plate-shaped member. It is opposed to the surface and is finally drawn into or transferred to the polishing belt take-up reel 12, which is an empty reel. That is, the polishing apparatus of the present invention is an open reel type polishing apparatus.

  A reel receiving cantilever 48 and a machine frame 47 of the polishing apparatus main body are erected at a central portion of the pedestal 45 at one part of a pedestal 45 provided at a required height on the base 46 of the polishing apparatus. 1 guide mechanism A and drive mechanism B are provided.

  In addition, a pressing mechanism C provided with a pressure contact member 7 is provided in a sub-machine frame 30 (described later) provided inside the machine frame 47. The pressure contact member 7 is a component of the pressing mechanism C and a component of the guiding mechanism A.

  Further, the holding table 40 on which the lead frame 50 is mounted is reciprocated from the other end of the pedestal 45 through the lower part of the pressure contact member 7, and the holding table 40 is moved from the mounting position of the lead frame 50 to the polishing work position. A holding table transfer mechanism D is provided on the base 46 so as to be movable to the base 46.

  Hereinafter, specific configurations of the polishing belt guiding mechanism A, the polishing belt driving mechanism B, the pressing mechanism C, and the holding table transfer mechanism D will be described.

  First, the polishing belt guiding mechanism A will be described.

  As shown in FIG. 1, the machine frame 47 has guide rolls 2 and 3 for guiding the polishing belt 1 to the upper part thereof, and a polishing belt tension roller 5 for guiding the polishing belt 1 and applying tension, and a lower part thereof. Guide rolls 6, 8, and 10 for subsequently guiding the polishing belt 1, a first polishing belt feed roller 4 in the vicinity of the other end of the machine frame 47 in the middle thereof, and a second polishing in the vicinity of the one end thereof. The belt feed roller 9 is rotatably disposed with its shaft portions supported by bearings. An independent pressure contact member 7 is disposed at an intermediate position between the polishing belt feed roller 4 and the second polishing belt feed roller 9 and at a lower position.

  Each guide roll 2, 3, 6, 8, 10 and polishing belt tension roller 5, polishing belt feed rollers 4 and 9, pressure contact member 7, and reel cantilever provided outside one side of machine frame 47 The rotating shafts of the polishing belt supply reel 11 and the polishing belt take-up reel 12 that are pivotally supported on the gantry 48 are arranged in parallel.

  The polishing belt tension roller 5 slidably supports the bearing portion, and an upward force is always applied by a tension spring 5 a having one end portion fixed to the machine frame 47. In the present embodiment, a roller with a built-in bearing is used as the polishing belt tension roller 5, and FIG. 2 shows an example of the tension applying mechanism. In the figure, 5b is a machine frame opening, 5c is a bearing built in both ends of the polishing belt tension roller 5, 5d is a guide member, 5e is a guide member, 5f is a fixing member between the machine frame 47 and the guide member 5d. Reference numeral 5g denotes a fixing member between the shaft portion of the polishing belt tension roller 5 and the tension spring 5a, and 5h denotes a fixing member between the machine frame 47 and the tension spring 5a.

  FIG. 3 is a schematic diagram of the polishing belt guiding mechanism A. FIG. As shown in the figure, the polishing belt 1 pulled out from below the polishing belt supply reel 11 is guided by the guide roll 2 to the guide roll 3 in the horizontal direction. The polishing belt 1 guided to the guide roll 3 is guided downward from the horizontal direction and guided upward by the first polishing belt feed roller 4 at the downward turning point, and then the polishing belt 1 is ground at the upward turning point. The belt is guided downward by the belt tension roller 5, moves while being in sliding contact with the lower surface of the peripheral surface portion of the press contact member 7 via the lower guide roll 6, guided upward by the guide roll 8, and then At the turning point, the polishing belt 1 is guided downward by the second polishing belt feed roller 9, and the polishing belt 1 is drawn from above the polishing belt take-up reel 12 via the lower guide roll 10.

  The polishing belt 1 from the polishing belt supply reel 11 to the polishing belt take-up reel 12 is always in a state of being given a constant tension by receiving an upward force from the polishing belt tension roller 5.

  Note that the position where the polishing belt 1 is pulled out and retracted from the polishing belt supply reel 11 and the polishing belt take-up reel 12 is defined by the rotation direction of the reels 11 and 12. For example, when arranged in the vertical position as in the embodiment, the same position when rotating in the same direction (both upward if they are above) and the relative position when rotating in opposite directions (one should be above) The other is down).

  Next, the polishing belt drive mechanism B will be described.

  FIG. 4 is a schematic diagram of the polishing belt drive mechanism B. As shown in FIG. As shown in the figure, an output pulley 21 is fixed to the output shaft of the polishing belt feed motor 20. The polishing belt feed motor 20 is fixed to the uppermost part of the machine frame 47 as shown in FIG.

  In order to reliably transmit the driving force of the polishing belt feed motor 20, the first drive pulley 21 a of the first polishing belt feed roller 4 is disposed vertically below the output pulley 21. This is because, in the embodiment, the first polishing belt feed roller 4 is located closest to the position where the polishing belt feed motor 20 is disposed.

  As shown in FIG. 3, the polishing belt 1 is U-shaped between the guide roll 3 and the polishing belt tension roller 5 in order to apply tension to the polishing belt 1, and the polishing belt feed roller 4. And the guide roll 6 are guided in an inverted U shape.

  Returning to FIG. 4, the shafts at both ends of the body portion of the first polishing belt feed roller 4 disposed at the bottom of the U-shape of the polishing belt 1 are connected to the output pulley of the polishing belt feed motor 20 on one side. The first drive pulley 21a corresponding to the first drive pulley 21 and the second drive pulley 22 are fixed to the other part.

  The shafts at both ends of the body of the second polishing belt feed roller 9 have a third drive pulley 23 corresponding to the second drive pulley 22 on the other side and a fourth drive pulley 24 and a fifth drive pulley on the other side. 26 and are fixed in parallel. The fourth drive pulley 24 is made to correspond to the sixth drive pulley 25 fixed to the mounting shaft 48 a of the polishing belt supply reel 11. The fifth drive pulley 26 corresponds to the seventh drive pulley 27 fixed to the mounting shaft 48 b of the polishing belt take-up reel 12.

  A first drive belt 21b is wound around an output pulley 21 and a first drive pulley 21a fixed to the output shaft of the polishing belt feed motor 20. Further, the second drive belt 22a is wound around the second drive pulley 22 fixed to the other portion of the shaft portion of the polishing belt feed roller 4 and the third drive pulley 23 fixed to the other portion of the second polishing belt feed roller 9. ing. Further, the third drive belt 24a is hung on the fourth drive pulley 24 fixed to one of the shaft portions of the second drive belt feed roller 9 and the sixth drive pulley 25 fixed to the mounting shaft 48a of the polishing belt supply reel 11. The fourth drive belt 26 a is hung around the fifth drive pulley 26 fixed together with the fourth drive pulley 24 and the seventh drive pulley 27 fixed to the mounting shaft 48 b of the polishing belt take-up reel 12. ing.

  By such a combined configuration of the pulleys and the driving belts of the respective parts, the first polishing belt feeding roller 4, the second polishing belt feeding roller 9 and the polishing belt are supplied by the driving force of the polishing belt feeding motor 20 by the rotation thereof. The reel 11 and the polishing belt take-up reel 12 are rotated. As a result, the polishing belt 1 is driven (shows a state in which it is pulled out, pulled in, traveled and transferred).

  The tension of the first drive belt 21b is adjusted by slidably supporting both bearing portions that support the polishing belt feed roller 4 with a pair of sliding frames, one end of which is the machine frame 47, and the other end. In addition to adjusting the distance between the two by a tension adjusting screw 20a (see FIG. 1) fixed to the bearing portion, the space between the base for fixing the polishing belt feed motor 20 to the machine frame 47 and the mounting seat for the machine frame 47 You may make it adjust as a movable type.

  Further, the rotation directions of the polishing belt supply reel 11 and the polishing belt take-up reel 12 are switched between the rotation directions of the polishing belt feed motor 20 that receives a control signal from a control device panel (which incorporates a control device) (not shown). It is decided by that. The rotation direction is switched after the polishing belt 1 accommodated in the polishing belt supply reel 11 is pulled out and wound on the polishing belt take-up reel 12 while the polishing performance of the polishing belt 1 is useful, When the polishing of the frame 50 is observed and polishing in the reverse direction is necessary, it is performed automatically or manually by the operator.

  Since the polishing belt supply reel 11 and the polishing belt take-up reel 12 are rotated in the same direction, the third driving belt 24a is knocked (the driving belt intersects at an intermediate portion thereof). This can be dealt with by staking either one, so that the fourth drive belt 26a side may be struck.

  Here, the polishing belt supply reel 11 and the polishing belt take-up reel 12 have guide rolls 2, 3, 6, 8, and 10, the polishing belt tension roller 5 and the polishing belt feed rollers 4 and 9 having both shaft portions as bearing portions. The mounting shafts 48a and 48b of the reels 11 and 12 can be pivoted to the individual upper and lower bearings provided on the reel receiving cantilever 48 as a cantilever type only on one side. It is pivotally supported. In addition, a meshing portion is provided between the hollow core portion of each of the reels 11 and 12 and the mounting shafts 48a and 48b that are pivotally supported by the reel receiving cantilever 48 so as to prevent rotation, and the mounting shafts 48a and 48b. At the other end, a retainer for the reels 11 and 12 is provided.

  The polishing belt tension roller 5 applies a certain tension to reliably transmit the driving force of the polishing belt feed motor 20 to the polishing belt 1 via the first polishing belt feed roller 4. Since it may be affected by fluctuations in the pressing force between the pressing member 7 and the lead frame 50 during the polishing operation, the peripheral speeds of the first polishing belt feed roller 4 and the second polishing belt feed roller 9 are supplied to the polishing belt. By setting the peripheral speed of the reel 11 and the polishing belt take-up reel 12 to be slower than the peripheral speed, a constant tension is applied to the polishing belt 1 by utilizing the slip of the third drive belt 24a and the fourth drive belt 26a. The difference in peripheral speed is that the diameters of the second drive pulley 22 of the first polishing belt feed roller 4 and the third drive pulley 23 of the second polishing belt feed roller 9 are the same, and the second polishing belt feed roller has the same diameter. The seventh drive pulley 27 of the polishing belt take-up reel 12 corresponding to the sixth drive pulley 25 and the fifth drive pulley 26 of the belt supply reel 11 corresponding to the fourth drive pulley 24 having the same diameter in any one of the portions 9. This is caused by making the diameter smaller than the diameter.

  As described above, the polishing belt 1 is always given a constant tension, so that the polishing belt supply reel 11, the polishing belt take-up reel 12, the first polishing belt feed roller 4 and the second polishing belt feed roller 9 are polished. Since the driving force of the belt feed motor 20 is transmitted without being slackened, the polishing belt 1 can be driven stably regardless of whether the driving direction is normal or reverse.

  When exchanging the polishing belt 1, a cylinder rod 36 of the electric cylinder 35 for lowering the pressure contact member, which will be described later, is retracted to the degeneration limit (raised from the arrangement position), and the contact between the pressure contact member 7 and the polishing belt 1 is made. After the cancellation, the removal fasteners at the tips of the mounting shafts 48a and 48b that respectively fix the polishing belt supply reel 11 and the polishing belt take-up reel 12 are opened and pulled out from the mounting shafts 48a and 48b. At the time of installation, reverse operation is performed. Further, since the direction in which the polishing belt 1 is pulled out is controlled in the forward and reverse directions, the polishing belt 1 is wound on either one of the polishing belt supply reel 11 and the polishing belt take-up reel 12 at the time of replacement. At the time of operation, the polishing belt supply reel is used as the pulling side of the polishing belt 1 and the polishing belt take-up reel is used as the winding side.

  Next, the pressing mechanism C will be described.

  Referring to FIG. 1, in this embodiment, as a pressing mechanism C of a polishing apparatus using the polishing belt 1, a pressing member 7 constituted by a shaft urethane roller is provided, and the pressing member 7 is pressed against a holding table 40. Pressure contact that raises and lowers from a standby position (a position that is sufficiently away from the surface of the holding table 40 before or after the polishing operation) to a position that contacts the upper surface of the holding table 40 (a position that can hold the required polishing pressure). A member lowering electric cylinder 35 is provided. Specifically, the pressing mechanism C is configured by disposing the pressure contact member 7 in a sub-machine frame 30 described later provided inside the machine frame 47.

  5A and 5B are schematic views of the polishing belt pressing mechanism C, where FIG. 5A is a plan view and FIG. 5B is a side view. As shown in the figure, the sub machine frame 30 is arranged in a direction orthogonal to the driving direction of the polishing belt, and is fixed to a pair of beam members 31 and 31 horizontally fixed at an upper portion of the machine frame 47 at a predetermined interval. The bearing members 32, 32 are provided at the center of the beam members 31, 31 in the longitudinal direction, and the shaft holes are oriented in a direction perpendicular to the length direction of the beam members 31, 31, and the bearings 32, 32 are pivotally supported. And the rotating shaft 33. That is, the rotating shaft 33 is disposed so as to extend in parallel with the driving direction of the polishing belt. The auxiliary machine frame 30 is disposed at a non-interference position in the horizontal intermediate portion between the above-described polishing belt feed roller 4 and the second polishing belt feed roller 9.

  A main body attachment member 34 whose vertical direction is perpendicular to the longitudinal direction of the rotation shaft 33 is fixedly suspended. That is, the main body attaching member 34 is fixed to the rotating shaft 33 so as to extend in a direction perpendicular to the driving direction of the polishing belt and to hang downward. As a result, the main body attachment member 34 can swing in the direction orthogonal to the driving direction of the polishing belt about the rotation shaft 33. The main body attachment member 34 constitutes the swing mechanism of the present invention. Then, the pressure contact member lowering electric cylinder 35 is fixed to the main body attachment member 34 via the fixing member 34a so that the tip of the cylinder rod 36 faces downward. In addition, it is preferable to arrange | position so that the vertical direction center line of the rotating shaft 33 and the center axis line of the cylinder rod 36 may correspond or parallel when the main body attachment member 34 is in a natural suspended state.

  A guide member 37 is provided on a side line parallel to the beam members 31, 31 of the main body of the electric cylinder 35 for lowering the pressure contact member. The guide member 37 is raised and lowered along the guide member 37, and its lower end is horizontally L-shaped. The guide member 38 is slidably provided so that the tip end portion of the cylinder rod 36 is fixed and the cylinder rod 36 is moved up and down.

  The L-shaped portion of the guide member 38 that is fixed to the cylinder rod 36 is centered on the lower surface thereof, and both ends of the extending member 38a provided in the direction perpendicular to the driving direction of the polishing belt are bent vertically downward. The bearing stand portions 38b and 38b are formed. The bearings 38c and 38c are fixed to the lower end surfaces of the bearing bases 38b and 38b, respectively. Further, the shafts at both ends of the pressure contact member 7 are pivotally supported by the both bearings 38c and 38c so that the bearings 38c and 38c are rotatable in accordance with the driving direction of the abutting polishing belt.

Further, a fixing support member is provided on each of the main body mounting member 34 and the extending member 38a, and a tension spring (balancer) 39 is disposed between them, and the power is turned off. Even if the function is lost, the cylinder rod 36 is prevented from abruptly descending due to the weight of the pressure contact member 7 or the like.

  As described above, the main body mounting member 34 is suspended and fixed to the rotation shaft 33 and is swingably suspended. Therefore, the direction perpendicular to the driving direction of the polishing belt 1 is the swing direction, and the pressure contact member The pressure contact member 7 that moves up and down by the lowering electric cylinder 35 does not swing in the driving direction of the polishing belt 1.

  The pressure contact member 7 pushes down the guided and transferred polishing belt from the back side by the advancement of the cylinder rod 36, and performs the polishing operation with a predetermined pressing force. And the polishing belt pushed down from the back surface side opposes the to-be-polished surface of the lead frame 50 mounted on the holding stand 40 transferred to the lower side. In order to transfer the holding table 40 below the polishing belt, a holding table transfer mechanism D is provided on the base 45 and the base 46 as shown in FIG.

  Next, the holding table transfer mechanism D will be described.

  As described above, the pedestal 45 is provided with a reel receiving cantilever pedestal 48 erected on one side of the pedestal 45 and a machine frame 47 of the main body of the polishing apparatus erected substantially at the center thereof. A holding table 40 that reciprocates through the nozzle is disposed.

  The holding base 40 passes through the lower part of the machine frame 47 from the other end, and reaches a front side of the reel receiving cantilever 48. A movable base 43b supported by a movable base plate 43a of a uniaxial slider (linear guide) 43. It is fixed to. The uniaxial slider 43 is disposed on the upper surface of the pedestal 45.

  On the base 46 in the lower position of the pedestal 45 for supporting the reel receiving cantilever 48 near the one end of the holding cylinder feed electric cylinder 41 parallel to the uniaxial slider 43 at the lower part of the pedestal 45 to which the uniaxial slider 43 is fixed. Provided.

  The attachment member 42a fixed to the tip of the rod 42 of the holding base feed electric cylinder 41 and the movable base plate 43a of the uniaxial slider 43 are integrated by a connecting member 44 so that the cylinder rod 42 of the holding base feed electric cylinder 41 advances and retreats. Synchronously, the movable base plate 43a of the uniaxial slider 43 is moved forward and backward to make the holding base 40 movable from the placement / extraction position of the lead frame 50, which is a plate-like member, to the polishing work position.

  The holding table 40 is arranged in the longitudinal direction in a direction orthogonal to the driving direction of the polishing belt 1, and is arranged in consideration of the width dimension of the polishing belt 1 and the major axis direction of the plate-like member 50.

  Further, from the work work area of the lead frame 50 on the holding table 40, there is some margin from the position where the polishing of the entire surface of the lead frame 50 on the holding table 40 can be completed in the normal retracted position of the electric cylinder 41 for feeding the holding table. The advancing / retreating distance of the cylinder rod 42 is set so as to have it.

  Further, a sheet 49 (for example, silicone rubber) having adhesiveness and a high friction coefficient is fixed to the upper surface of the holding base 40, and when the lead frame 50 is placed so as to be pressed against the surface, the sheet 49 is fixed to the adhesive surface. Thus, the lead frame 50 can be prevented from moving on the holding table 40 due to its friction coefficient during the polishing operation.

  In addition, what is shown by 42b in FIG. 1 is a movement stabilizer for stabilizing the forward / backward movement of the cylinder rod 42, and a wheel traveling on a rail disposed on the base 46 is used. Can be supported by a uniaxial slider similar to the holding table 40.

  In the above configuration, after the longitudinal direction of the strip-shaped lead frame 50 as the material to be polished is placed on the sheet 49 on the upper surface of the holding table 40 in the standby position in the direction perpendicular to the driving direction of the polishing belt 1, the holding table is fed. The electric cylinder 41 is driven to move the holding base 40 to the lower side of the pressing mechanism C, and the polishing belt feed motor 20 is driven to drive and transfer the polishing belt 1.

  When the holding base 40 reaches the lower part of the pressing mechanism C, the electric cylinder 35 for lowering the pressure contact member is operated, the cylinder rod 36 is extended (lowered), and the pressure force applied to the polishing belt 1 by the pressure contact member 7 indicates the set current value. The surface polishing is continuously performed together with the removal of burrs of the lead frame 50 which is applied according to the numerical control of the binary data and fixed by the sheet 49 having a high friction coefficient on the upper surface of the holding table 40.

  The polishing operation is performed until the short side (width) of the lead frame 50 on the holding base 40 is detached from the press contact member 7 from one end to the other end, and the lead frame 50 passes through the polishing zone of the press contact member 7. Later, or after the initial set time has elapsed, the operating direction of the pressure member lowering electric cylinder 35 is reversed, the cylinder rod 36 is degenerated (lifted), and the pressure of the polishing belt 1 by the pressure member 7 disappears. Then, after the polished lead frame 50 and the polishing belt 1 are separated from each other, the holding table feed electric cylinder 41 operates in a direction in which the cylinder rod 42 extends, and the holding table 40 returns to the initial placement position and is polished. The used lead frame 50 is taken out and the next lead frame is placed thereon, whereby the polishing operation is repeated.

  Since the lead frame is punched by a punch press, burrs are generated when the lead frame stands up, so in the case of polishing from one direction, a part of the burrs may fall in the polishing direction. When the holding table 40 is returned to the initial placement position, the polishing operation is performed again while the pressing mechanism C is lowered, that is, in the polishing operation state. At this time, if the transfer direction of the polishing belt 1 is reversed, the burrs that have fallen down can be removed more reliably.

  Even if the lead frame 50 is warped in the longitudinal (major axis) direction during the punching process, the pressing mechanism C is pivotally supported on the rotary shaft 33 as described above. It swings in the direction of warping, and a uniform pressure contact force can always be applied to the ground surface of the lead frame 50.

  Prior to polishing the lead frame 50, setting data corresponding to the situation such as the moving distance, the number of reciprocations, the moving speed, and the polishing speed according to the surface condition after processing the lead frame 50 is given to the controller of the polishing apparatus. By inputting with a control device panel (not shown), it is possible to automatically control the holding base feed electric cylinder 41, so that it is possible to cause the optimum holding base 40 to reciprocate.

  Further, sufficient polishing may not be performed due to factors such as the thickness of the lead frame 50 and variations in the height position when the lead frame 50 is placed on the holding table 40. In order to cope with this, the current value of the electric cylinder 35 for lowering the press contact member when the press contact member 7 contacts the average lead frame 50 with an optimum pressing force is set as a set current control value as a set value. Current ratio control that restores the pressure contact force of the electric cylinder 35 for lowering the pressure contact member to the set current value when the current value rises or falls (0 to 100%) by inputting a numerical value of binary data (0 to 255). And adjust so that the lead frame 50 is uniformly contacted. By performing such current ratio control, stable operation can be maintained and polishing accuracy can be improved, so that the lead frame surface can be polished and the surface finish can be polished.

  It should be noted that the setting current value is preferably changed for each lot because there is some variation in the condition of the surface to be polished. Further, in order to improve the efficiency of the polishing operation, not only the pressing of the polishing belt to the surface to be polished but also the transfer speed of the polishing belt and the feed speed of the holding base are important factors. It is easy to adjust the rotational speed and expansion / contraction speed of the polishing belt feed motor and the holding table feed electric cylinder.

A. Abrasive belt guide mechanism 1; Abrasive belt 2; Guide roll 3; Guide roll 4; First abrasive belt feed roller 5; Abrasive belt tension roller 5a; Tensile spring 6; Guide roll 7; Pressure contact member (contact wheel)
8; guide roll 9; second polishing belt feed roller 10; guide roll 11; polishing belt supply reel 12; polishing belt take-up reel

B. Polishing belt drive mechanism 20; Polishing belt feed motor 20a; Tension adjusting screw 21; Output pulley 21a; First drive pulley 21b; First drive belt 22; Second drive pulley 23; Third drive pulley 22a; 4th drive pulley 25; 6th drive pulley 24a; 3rd drive belt 26; 5th drive pulley 26a; 4th drive belt 27; 7th drive pulley

C. Press mechanism 30; Sub-machine frame 31; Beam member 32; Bearing 33; Rotating shaft 34; Main body attachment member 35; Pressure cylinder lowering electric cylinder 36; Cylinder rod 37; Guide member 38; Induction member 38a; Bearing base 38c; bearing 39; tension spring (balancer)

D. Holding table transfer mechanism 40; Holding table 41; Electric cylinder for holding table feeding 42; Cylinder rod 42a; Mounting member 42b; Moving stabilizer 43; Single axis slider (linear guide)
43a; Movable base plate 43b; Movable base 44; Connecting member 45; Base 46; Base 47; Machine frame 48; Reel receiving cantilever 48a; Mounting shaft 48b; Mounting shaft 49; Sheet 50; )

Claims (3)

A polishing belt guide mechanism from the polishing belt supply reel to the polishing belt take-up reel via a guide roll group for guiding the polishing belt;
The polishing belt supply reel and the polishing belt take-up reel are synchronized with the first polishing belt feed roller in the guide roll group that guides the polishing belt and the second polishing belt feed roller that is spaced apart from the first polishing belt feed roller and disposed horizontally. An abrasive belt drive mechanism provided with an abrasive belt feed motor for driving;
A pressure contact member lowering electric cylinder is provided in a swinging mechanism that swings in a direction orthogonal to the polishing belt drive direction, and the tip of the rod of the pressure contact member lowering electric cylinder is orthogonal to the polishing belt drive direction. A pressing mechanism in which the arranged pressure contact member is rotatably provided along the driving direction of the polishing belt;
A holding table transfer mechanism provided with a holding table on which a plate-like member positioned below the pressing mechanism is fixed and mounted, and a holding table feeding electric cylinder for reciprocating the holding table in a direction parallel to the driving direction of the polishing belt And
The plate member polishing apparatus, wherein the pressure contact member lowering electric cylinder is controlled by current ratio control.   The pressing mechanism is provided on a sub-machine frame provided inside the machine frame provided with the polishing belt guiding mechanism and the polishing belt driving mechanism so that a rotation shaft extends in parallel with the driving direction of the polishing belt. The main body mounting member is provided on the moving shaft so as to extend in a direction perpendicular to the driving direction of the polishing belt and hang downward.The electric cylinder for lowering the pressure contact member is fixed to the main body mounting member so that the rod faces downward. 2. The plate-like member polishing apparatus according to claim 1, wherein the pressure contact member is provided at the tip of the rod so that the rod member can swing in a direction orthogonal to the driving direction of the polishing belt.   The plate-like member polishing apparatus according to claim 1 or 2, wherein an adhesive sheet is fixed to an upper surface of the holding table of the holding table transfer mechanism.

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