JP2010194480A - Pressure control valve, and droplet ejection device including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure control valve capable of preventing unstable opening/closing actions of a valve element caused by a pressure receiver membrane, and a droplet ejection device including the same. <P>SOLUTION: The pressure control valve 27 that opens/closes a valve element 84 disposed in a communication flow path 78 communicating with a primary chamber 75 and a secondary chamber 76 in a valve housing 71 on the basis of the atmospheric pressure by virtue of a pressure receiver membrane 73 constituting one face of the secondary chamber 76 to control the pressure of a functional liquid supplied from a functional liquid feeder 41 into the primary chamber 75, and supplies the functional liquid to a functional droplet ejection head 14 of an inkjet type via the secondary chamber 76, is characterized in that the pressure receiver membrane 73 is constituted of a circular metal film. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a pressure adjusting valve that supplies a functional liquid under reduced pressure from a functional liquid supply means to a functional liquid droplet ejection head, and a liquid droplet ejection apparatus including the pressure adjustment valve.

2. Description of the Related Art Conventionally, there is known a pressure adjustment valve for reducing the functional liquid in a sub tank to a predetermined pressure and supplying it to a functional liquid droplet ejection head (see Patent Document 1). This pressure regulating valve is formed through the primary chamber communicating with the sub tank formed in the valve housing, the secondary chamber communicating with the functional liquid droplet ejection head, and the partition between the primary chamber and the secondary chamber. The communication channel, the valve body for opening and closing the communication channel from the primary chamber side using the communication channel opening edge on the primary chamber side as a valve seat, and one surface of the secondary chamber, A diaphragm (pressure receiving film body) made of a resin film that opens and closes based on atmospheric pressure and a valve body spring that biases the valve body in the valve closing direction are provided.
In this case, when the pressure in the secondary chamber is lowered by the droplet ejection from the functional droplet ejection head, the pressure receiving film body is deformed by atmospheric pressure, and the pressure receiving plate presses the valve body toward the primary chamber. Thus, the valve is opened, and the functional liquid flows into the secondary chamber through the communication channel. When the inflow of the functional liquid proceeds, the pressure in the secondary chamber will eventually increase, the pressure receiving film body will protrude convexly and the pressure receiving plate will move away from the valve body, and at the same time the valve spring will The body moves forward and closes.

JP 2006-163733 A

  However, in such a pressure regulating valve, the pressure-receiving film body is formed of a resin thin film with low rigidity, so that it deforms unevenly due to gravity or air flow, or wrinkles or There was a problem that sagging was likely to occur. For this reason, there has been a problem that the valve body does not open and close properly and smoothly and the decompression characteristics become unstable.

  An object of the present invention is to provide a pressure regulating valve capable of preventing an unstable opening / closing operation of a valve body caused by a pressure-receiving film body and a droplet discharge device including the pressure regulating valve.

  In the pressure regulating valve of the present invention, a valve body provided in a communication flow path that communicates a primary chamber and a secondary chamber in a valve housing has an atmospheric pressure reference by a pressure-receiving film body that constitutes one surface of the secondary chamber. A pressure adjusting valve that opens and closes and supplies the functional liquid supplied from the functional liquid supply means to the primary chamber to the ink jet type functional liquid droplet ejection head via the secondary chamber. Is made of a circular metal film.

  According to this configuration, since the pressure-receiving film body is made of a highly rigid metal film as compared with the resin film, the pressure-receiving film body is deformed uniformly without being affected by gravity or airflow. Further, when the pressure receiving membrane body is attached to the valve housing, wrinkles and the like do not occur. For this reason, the pressing force by the pressure receiving film body is appropriately transmitted to the valve body, and the valve body can be opened and closed stably and accurately in accordance with the unevenness of the pressure receiving film body. In addition, it is preferable that the metal film to be used is a chemical-resistant thing with respect to the functional liquid comprised with raw materials, such as stainless steel and aluminum.

  In this case, the valve body is disposed in the primary chamber and directly opens / closes, a holding portion that holds the valve body main body, and extends from the holding portion through the communication flow path and comes into contact with the pressure receiving membrane body. It is preferable that the operation shaft portion is in contact with the center position of the pressure receiving film body.

  According to this configuration, since the operating shaft portion abuts on the center position of the pressure receiving film body and is directly pressed from the pressure receiving film body, the opening / closing operation can be performed more accurately and appropriately in accordance with the movement of the pressure receiving film body. . Moreover, since it is not necessary to provide a separate pressure receiving plate as in the above prior art, the number of parts of the pressure regulating valve can be reduced.

  A liquid droplet ejection apparatus according to the present invention includes the pressure adjusting valve, a functional liquid supply unit, and a functional liquid droplet ejection head, and moves the functional liquid droplet ejection head relative to the workpiece while moving the functional liquid droplet ejection head relative to the workpiece. Then, drawing is performed by discharging the functional liquid.

  According to this configuration, the functional liquid can be stably supplied from the functional liquid supply means to the functional liquid droplet ejection head at an appropriate pressure, and the drawing quality of the functional liquid droplet ejection head on the workpiece can be improved.

It is a perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is an external appearance perspective view of a carriage. It is a front and back external perspective view of a functional liquid droplet ejection head. It is a schematic diagram of a functional liquid supply apparatus. It is a top view of a pressure regulating valve. It is AA sectional drawing of the pressure control valve which concerns on 1st Embodiment. It is AA sectional drawing of the pressure control valve which concerns on 2nd Embodiment.

  Hereinafter, with reference to the accompanying drawings, a droplet discharge device including a pressure regulating valve according to an embodiment of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed. The pressure regulating valve supplies the functional liquid to the functional liquid droplet ejection head at a constant pressure.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 is disposed on an X-axis support base 11 supported by a stone surface plate, and extends in the X-axis direction, which is the main scanning direction, to extend a workpiece W. Is disposed on a pair of Y-axis support bases 13 that are bridged across the X-axis table 2 via a plurality of columns 12 and in the sub-scanning direction. A Y-axis table 3 extending in the Y-axis direction, and 13 carriage units 4 suspended in a movable manner on the Y-axis table 3 and mounted with a plurality (twelve) functional liquid droplet ejection heads 14; , Is composed of. Further, the droplet discharge device 1 includes a chamber 5 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 5 and supplies the functional liquid to the functional droplet discharge head 14. And a supply unit 6. In addition, a tank cabinet 7 for storing a main tank 51 and the like for storing the functional liquid is provided in a part of the side wall of the chamber 5. The droplet discharge device 1 discharges the functional liquid supplied from the functional liquid supply unit 6 by discharging the functional droplet discharge head 14 in synchronization with the driving of the X-axis table 2 and the Y-axis table 3. Then, a predetermined drawing pattern is drawn on the workpiece W.

  The droplet discharge device 1 includes a maintenance device 8 including a flushing unit 15, a suction unit 16, a wiping unit 17, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 14. The function of the functional liquid droplet ejection head 14 is maintained and recovered. In the droplet discharge device 1 of the present embodiment, the workpiece W is drawn with the carriage unit 4 facing the area where the X-axis table 2 and the Y-axis table 3 intersect, and the Y-axis table 3 and the maintenance device 8 (suction unit) 16, the carriage unit 4 faces the area where the wiping unit 17) intersects, and the function of the functional liquid droplet ejection head 14 is maintained and recovered.

  As shown in FIGS. 2 and 3, the X-axis table 2 includes a set table 21 that sucks and sets the workpiece W, an X-axis first slider 22 that slidably supports the set table 21 in the X-axis direction, and the above-described configuration. An X-axis second slider 23 that slidably supports the flushing unit 15 and the discharge performance inspection unit 18 in the X-axis direction, and extends in the X-axis direction, and the X-axis first slider 22 and the X-axis second slider 23 are X A pair of left and right X-axis linear motors (not shown) that move in the axial direction.

  The Y-axis table 3 includes 13 bridge plates 24 each having 13 carriage units 4 suspended therein, 13 sets of Y-axis sliders (not shown) that support the bridge plates 24 in both ends, and a pair of Y-axis tables. A pair of Y-axis linear motors (not shown) are provided on the shaft support base 13 and move the bridge plate 24 in the Y-axis direction. In addition, the Y-axis table 3 performs sub-scanning of the functional liquid droplet ejection head 14 during drawing via each carriage unit 4 and causes the functional liquid droplet ejection head 14 to face the suction unit 16 and the wiping unit 17. In this case, the carriage units 4 can be moved independently and individually, or the 13 carriage units 4 can be moved together.

  As shown in FIG. 4, each carriage unit 4 includes three color droplets of R, G, and B, each of four (total 12) functional droplet ejection heads 14 and 12 functional droplet ejection heads 14. Each is divided into two groups, and a head unit 26 including a head plate 25 that supports each functional liquid droplet ejection head 14 so as to be disposed in the same horizontal plane is provided. In addition, each carriage unit 4 is capable of performing θ correction (θ rotation) on the pressure adjusting valve 27 (details will be described later) for supplying the functional liquid to the functional liquid droplet ejection head 14 under reduced pressure on the basis of atmospheric pressure. A θ rotation mechanism 28 to be supported and a suspension member 29 (both see FIG. 3) for supporting the head unit 26 on the bridge plate 24 via the θ rotation mechanism 28 are provided. In addition, each carriage unit 4 is provided with a sub-tank 46 (see FIG. 1) for temporarily storing the functional liquid (actually provided on the bridge plate 24). A functional liquid is supplied to each functional liquid droplet ejection head 14 at a constant pressure by the valve 27.

  As shown in FIG. 5, the functional liquid droplet ejection head 14 is a so-called double ink jet head, which is a functional liquid introduction part 31 having two connection needles 34, and a double head connected to the functional liquid introduction part 31. A substrate 32 and a head main body 33 that discharges the functional liquid are provided below the head substrate 32 (see FIG. 5A). The functional liquid introduction unit 31 has two connection needles 34 corresponding to the number of nozzle rows 39, and the functional liquid from the sub tank 46 is supplied via the functional liquid supply system 48 (see FIG. 6). It has become so. The head main body 33 includes a double pump unit 35 composed of a piezoelectric element or the like, and a nozzle plate 36 having a nozzle surface 38 on which a plurality of discharge nozzles 37 are formed. A large number of discharge nozzles 37 formed on the nozzle surface 38 of the nozzle plate 36 constitute two nozzle rows 39 arranged in parallel with each other and shifted by a half nozzle pitch position. , 180 discharge nozzles 37 arranged at an equal pitch (see FIG. 5B). The functional waveform is discharged from each discharge nozzle 37 by applying the drive waveform output from the control device to each pump unit 35 (piezoelectric element).

  Next, the functional liquid supply unit 6 will be described with reference to FIG. The functional liquid supply unit 6 supplies three sets of functional liquid supply devices (functional liquid supply means) 41 corresponding to the three colors described above, and a nitrogen gas supply that supplies compressed nitrogen gas for control to the main tank 51, the sub tank 46, and the like. A facility 42, a compressed air supply facility 43 for supplying compressed air for controlling various on-off valves, and a gas exhaust facility 44 for exhausting gas from each part are provided. The three sets of functional liquid supply devices 41 are connected to the functional liquid droplet ejection heads 14 corresponding to the three colors, respectively, so that the functional liquids of the corresponding colors are supplied to the functional liquid droplet ejection heads 14 of the respective colors. Is done.

  Each functional liquid supply device 41 includes a main tank unit 45 having two main tanks 51 and 51 that constitute a functional liquid supply source, 13 sub tanks 46 corresponding to each carriage unit 4, a main tank unit 45, The upstream-side functional liquid channel 47 connecting each sub-tank 46, the pressure adjusting valve 27 for supplying the functional liquid from the sub-tank 46 to the functional liquid droplet ejection head 14 under reduced pressure, and each sub-tank 46 and each pressure adjusting valve 27 are connected. 13 sets of downstream-side functional liquid channels 49. The functional liquid in each main tank 51 is pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 42 connected thereto, and is supplied to the 13 sub-tanks 46 opened to the atmosphere via the gas exhaust equipment 44 in the upstream side functional liquid. It is selectively supplied via the flow path 47. Then, the functional liquid in the sub tank 46 is supplied to each functional liquid droplet ejection head 14 at a constant pressure via the downstream functional liquid flow path 49 and the pressure adjustment valve 27.

  The upstream functional liquid channel 47 has an upstream end connected to the main tank unit 45 and a downstream end connected to the sub tank 46 via a 13-branch channel 52. The upstream functional liquid channel 47 has a bubble removing unit 53 for removing bubbles in the functional liquid and an air vent for removing bubbles mixed in the upstream functional liquid channel 47 on the upstream side. A unit 54 is interposed. The functional liquid supplied from the main tank unit 45 is divided into 13 parts by the 13 branch flow paths 52 and supplied to each sub tank 46.

  Next, the pressure regulating valve 27 will be described with reference to FIGS. The pressure regulating valve 27 includes a regulating valve main body 61 constituting a main part, an inflow connector 62 inserted and joined to the inflow side of the regulating valve main body 61, and an outflow connector 63 inserted and joined to the outflow side of the regulating valve main body 61. ing. The inflow connector 62 is connected to the downstream functional liquid channel 49 connected to the sub tank 46 via the inflow side presser nut 64, and the outflow connector 63 is connected to the functional liquid via the outflow side presser nut 65. A head connection tube 100 connected to the droplet discharge head 14 is connected.

  The regulating valve main body 61 (pressure regulating valve 27) includes a valve housing 71 having a concave front center portion and a rear central portion, a lid body 72 that defines the primary chamber 75 together with the valve housing 71, and pressure received by the valve housing 71. A film body pressing member 74 that defines a secondary chamber 76 together with the valve housing 71 by fixing a film body 73 (details will be described later). That is, the pressure regulating valve 27 is a vertical type in which the pressure receiving film body 73 is disposed in the vertical direction. The primary chamber 75 and the secondary chamber 76 are coaxially arranged with a partition wall 77 constituting a part of the valve housing 71, and the primary portion (axial center) of the partition wall 77 has a primary portion. A communication channel 78 communicating with the chamber 75 and the secondary chamber 76 is formed in a straight shape. The lid body 72 and the film body pressing member 74 are assembled to the valve housing 71 by screwing so as to be sandwiched from the front-rear direction (not shown), both of which have an axis passing through the center of the circular pressure receiving film body 73 It has a circular outer shape that is a concentric circle.

  In the valve housing 71, a rear ring-shaped end surface 101 which is a peripheral portion of the rear surface thereof is formed flat, and is covered with a lid body 72 to which the rear seal ring 103 is attached. On the other hand, a front annular groove 105 having a rectangular cross section is formed in the front ring-shaped end surface 104 which is the front peripheral edge of the valve housing 71, and the front ring-shaped end surface 104 and the pressure receiving film body 73 are formed in the front annular groove 105. A front seal ring 106 that seals between the two is attached.

  The lid body 72 is formed in a circular plate shape so as to cover the rear ring-shaped end surface 101, and a lid vertical step portion with which the valve body spring 85 is engaged is formed at the center of the inner surface, and its peripheral edge. A rear annular groove 102 having a rectangular cross section is formed in the part so as to surround the lid vertical step. A rear seal ring 103 that seals between the rear ring-shaped end face 101 and the lid 72 is mounted in the rear annular groove 102. That is, the lid 72 is butt-joined with the valve housing 71 via the rear seal ring 103 in a liquid-tight manner, and holds the primary chamber 75 in a liquid-tight manner. On the other hand, the film body pressing member 74 is formed in a circular ring shape so as to hold the front ring-shaped end face 104, and the front seal ring 106 is set on the valve housing 71 and the pressure receiving film body 73 is aligned with the screw. It has been stopped. That is, the film body pressing member 74 is liquid-tightly butt-joined to the valve housing 71 via the front seal ring 106 and the pressure-receiving film body 73, and holds the secondary chamber 76 liquid-tight. In addition, although mentioned later for details, since the pressure receiving film | membrane body 73 is comprised with the highly rigid metal film, it is preferable to fix to the valve housing 71 in the state which gave tension | tensile_strength.

  The primary chamber 75 is formed by a rear surface of the valve housing 71 having a partition wall 77 as a main body and a lid 72. In addition, an inflow port 81 extending obliquely in the radial direction from the primary chamber 75 is formed in the upper portion of the primary chamber 75, and a primary chamber side opening 82 connected to the communication channel 78 is opened in the center. Yes. The primary chamber side opening 82 faces a valve body 84 that opens and closes the communication flow path 78 from the primary chamber 75 side. Correspondingly, the peripheral portion of the primary chamber side opening 82 A valve seat 83 to which the valve body 84 is separated is formed. The valve body 84 is biased by a weak force in the valve closing direction (secondary chamber 76 side) by the engaged valve body spring 85.

  The secondary chamber 76 is formed by the front surface of the valve housing 71 and the pressure receiving film body 73. In addition, an outlet port 86 extending directly below is formed in the lower portion of the secondary chamber 76, and a secondary chamber side opening 87 connected to the communication channel 78 is opened in the center. A vertical stepped portion 117 is formed in the peripheral portion of the secondary chamber side opening 87 so as to go around the front surface of the valve housing 71. The vertical stepped portion 117 has a pressure receiving film body 73 in the forward direction. The energizing film body spring 88 is disposed so as to fit about half.

  The valve body 84 includes a valve body main body 94 that performs a valve function, and a valve holder 95 that holds the valve body main body 94. The valve body 84 opens and closes by being separated from and contacting the peripheral edge of the primary chamber side opening 82 serving as the valve seat 83 on the basis of the atmospheric pressure by the pressure receiving film body 73, and the functional liquid is primary by repeating this opening and closing. It flows intermittently from the chamber 75 into the secondary chamber 76.

  The valve body 94 is a so-called O-ring made of a chemical-resistant perfluoro rubber material, and is harder than the normally used silicone rubber valve body 94. And the front-end part of the valve body main body 94 with which the valve holder 95 was mounted | worn is separated from the valve seat 83, and there exists a function of a valve.

  The valve holder 95 is formed in a substantially “T” cross section, and is formed on the holder base 96 and a thick disc-shaped holder base 96 engaged with the valve body spring 85 from the rear in the axial direction on the same axis. A holding portion 97 that directly holds the valve body main body 94, a retaining portion 98 that is connected to the holding portion 97 and holds the valve body main body 94 in a retaining state, and an operating shaft that extends from the tip of the retaining portion 98. Part 99. The valve body 94 is mounted over the retaining portion 98 from the operating shaft 99 side. The operating shaft 99 (valve holder 95) is inserted into the communication channel 78, and the tip thereof is in contact with the pressure receiving film body 73.

  In the pressure regulating valve 27 configured as described above, for example, when the pressure in the secondary chamber 76 is lowered by the droplet ejection of the functional droplet ejection head 14, the pressure receiving film body 73 is deformed into a concave shape by the atmospheric pressure. The pressure receiving film body 73 directly pushes the valve body 84 (valve opening operation). As a result, the valve body 84 is opened, and the functional liquid flows from the primary chamber 75 into the secondary chamber 76 via the communication channel 78. As the inflow of the functional liquid proceeds, the pressure in the secondary chamber 76 eventually increases, and the pressure-receiving film body 73 is convexly deformed toward the outside. Thereby, the pressure receiving film body 73 moves forward away from the valve body 84, and at the same time, the valve body 84 moves forward and closes (valve closing operation).

  Thus, the pressure regulating valve 27 opens and closes the communication flow path 78 by the pressure receiving film body 73 being deformed by the balance between the atmospheric pressure and the internal pressure of the secondary chamber 76 connected to the functional liquid droplet ejection head 14. At that time, force acts on the valve spring 85 and the membrane spring 88 in a distributed manner, and the valve body 84 opens and closes very slowly by the elastic force of the valve body 94. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 84 is suppressed, and the ejection drive of the functional liquid droplet ejection head 14 is not affected.

  Here, the pressure-receiving film body 73 will be described in detail. The pressure-receiving film body 73 is a metal material that is chemically resistant to functional liquids such as stainless steel and aluminum, and is formed in a circular thin film film shape. Since the pressure-receiving film body 73 is made of a metal film that is sufficiently rigid with respect to the resin film, the pressure-receiving film body 73 is hardly affected by the surrounding air current (atmosphere) in the rhythm (behavior) operation by the atmospheric pressure, and from the central portion. Uniformly deforms irregularities. As a result, the opening and closing operation of the valve body 84 is appropriately performed by the operation shaft portion 99 being in contact with the central portion of the pressure receiving film body 73. Note that the contact portion with which the operating shaft portion 99 contacts the center portion of the pressure-receiving film body 73 may be formed of mold resin or the like. Further, the metal material of the pressure-receiving film body 73 is determined by the solvent of the functional liquid, and is not particularly limited, and the manufacturing method thereof is arbitrary.

  Next, with reference to FIG. 9, a pressure regulating valve 27 according to a second embodiment of the present invention will be described. In order to avoid repeated descriptions, the description will focus on the parts that are different from the first embodiment. As described above, the pressure-receiving film body 73 is preferably attached to the valve housing 71 in a tensioned state. Therefore, in this embodiment, the shape of the joint portion between the front ring-shaped end surface 104 of the valve housing 71 and the film body pressing member 74 is devised, and when the film body pressing member 74 is bonded to the front ring-shaped end surface 104, pressure is received. The film body 73 is automatically stretched.

  That is, on the front ring-shaped end surface 104 of the valve housing 71, an annular receiving surface 112 that is recessed via an annular inclined step portion 111 is formed outside the front annular groove 105, and correspondingly, the membrane On the back surface (joint surface) of the body pressing member 74, an annular contact surface 113 that is convex via an annular inclined step portion 111 is formed. When the pressure-receiving film body 73 is placed on the front ring-shaped end face 104 and the film-body pressing member 74 is pushed in, the pressure-receiving film body 73 is pulled outward in the radial direction by the mutual inclined step portions 111, Can be installed with tension. The annular receiving surface 112 side may be convex and the annular contact surface 113 side may be concave.

  According to the above configuration, since the pressure-receiving film body 73 is composed of a highly rigid metal film, it is not easily affected by gravity or airflow, and is uniformly deformed. Further, when the pressure receiving film body 73 is attached to the valve housing 71, wrinkles or the like do not occur. Therefore, the pressing force by the pressure receiving film body 73 is appropriately transmitted to the valve body 84, and the unevenness of the pressure receiving film body 73 is changed. Correspondingly, the valve body 84 can be opened and closed stably and accurately. In addition, since the pressure receiving film body 73 is composed of only one metal film, the center is not determined in advance, so that it is easy to position and attach to the valve housing 71. Can do.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus 14 ... Functional liquid drop discharge head 27 ... Pressure adjusting valve 41 ... Functional liquid supply apparatus 71 ... Valve housing 73 ... Pressure receiving film body 75 ... Primary chamber 76 ... Secondary chamber 78 ... Communication flow path 84 ... Valve body 94 ... Valve body 99 ... Operating shaft W ... Workpiece

Claims (3)

Supply of functional fluid by opening and closing the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber in the valve housing with reference to the atmospheric pressure by the pressure-receiving film body constituting one surface of the secondary chamber. A pressure adjusting valve for adjusting the pressure of the functional liquid supplied from the means to the primary chamber and supplying the functional liquid to the ink jet type functional liquid droplet ejection head through the secondary chamber;
The pressure regulating valve, wherein the pressure-receiving membrane body is made of a circular metal film. The valve body is disposed in the primary chamber and directly opens and closes, a holding body for holding the valve body main body, and the pressure receiving film body extending from the holding section through the communication channel. An actuating shaft that abuts
The pressure regulating valve according to claim 1, wherein the operating shaft portion is in contact with a center position of the pressure receiving film body. A pressure regulating valve according to claim 1 or 2,
The functional liquid supply means;
The functional liquid droplet ejection head,
A liquid droplet ejection apparatus for performing drawing by ejecting a functional liquid onto the work while moving the functional liquid droplet ejection head relative to the work.

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