JP2010210661A - Functional liquid supply device and droplet discharge device including the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a functional liquid supply device capable of appropriately reducing pressure to supply a functional liquid to a functional liquid droplet discharge head regardless of the change in installation height of a functional liquid tank, and a droplet discharge device including the same. <P>SOLUTION: A first pressure adjustment valve on the side of a functional liquid supply means and a second pressure adjustment valve on the side of an inkjet-type functional liquid droplet discharge head are provided in series in a functional liquid supply flow passage connecting the functional liquid supply means and the inkjet-type functional liquid droplet discharge head, and each of the pressure adjustment valves has such a pressure reduction function that a valve body provided in a connection flow passage connecting a primary chamber and a secondary chamber in a valve housing is opened/closed on the basis of an atmospheric pressure reference by a pressure receiving film body constituting one surface of the secondary chamber to supply the functional liquid supplied from an inlet port to the primary chamber through the secondary chamber, to an outlet port while adjusting the pressure. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a functional liquid supply apparatus that supplies a functional liquid to a functional liquid droplet ejection head under reduced pressure from a functional liquid supply means via a pressure regulating valve, and a liquid droplet ejection apparatus including the functional liquid supply apparatus.

2. Description of the Related Art Conventionally, there is known a functional liquid supply device for a droplet discharge device that supplies a functional liquid from a functional liquid tank to a functional droplet discharge head under reduced pressure via a pressure adjustment valve (see Patent Document 1). This pressure regulating valve comprises a valve body provided in a communication channel that communicates a primary chamber connected to a functional liquid tank and a secondary chamber connected to a functional liquid droplet discharge head, and constitutes one surface of the secondary chamber. At the same time, the diaphragm (pressure receiving film body) facing the outside is opened and closed on the basis of atmospheric pressure, and the functional liquid is supplied to the functional liquid droplet ejection head at a predetermined pressure.
The functional liquid tank is mounted on a bridge plate provided on the uppermost part of the carriage unit mounted on the Y-axis table, and the pressure adjusting valve is disposed in the vicinity of the functional liquid droplet ejection head provided on the lowermost part of the carriage unit. It is installed. In other words, the pressure regulating valve is arranged in the vicinity of the functional liquid droplet ejection head so as not to affect the ejection characteristics of the functional liquid droplet ejection head, while the functional liquid tank, which is a heavy object, is influenced by inertia as much as possible. It is mounted on a bridge plate provided on the slider of the Y-axis table so as not to reach the functional liquid droplet ejection head.

JP 2006-082538 A

In such a conventional functional liquid supply apparatus, the installation position of the functional liquid tank with respect to the functional liquid droplet ejection head tends to increase as the size of the liquid droplet ejection apparatus increases. In such a case, high pressure also acts on the primary side of the pressure regulating valve, and the valve body is difficult to open, so the absolute value of the pressure on the secondary side changes, resulting in the ejection characteristics of the functional liquid droplet ejection head. May have an impact.
That is, in the structure of the pressure regulating valve described above, when the valve body is closed, the water head from the functional liquid tank acts abruptly as the valve body approaches the valve seat. On the other hand, when the valve body is opened, a force that overcomes the water head from the functional liquid tank is applied from the pressure receiving film body. For this reason, the higher the pressure on the primary side, the more difficult it is to open the valve body, and the absolute value of the pressure on the secondary side decreases as it adversely affects the discharge operation of the functional droplet discharge head. . Therefore, there is a problem that the pressure regulating valve cannot be used for general purposes as the height of the functional liquid tank is changed.

  The present invention relates to a functional liquid supply device capable of supplying a functional liquid to a functional liquid droplet ejection head under reduced pressure at an appropriate constant pressure even when the installation height of the functional liquid tank is changed, and a liquid droplet ejection apparatus including the functional liquid supply device An object is to provide an apparatus.

  The functional liquid supply apparatus of the present invention is provided with two pressure regulating valves in series in a functional liquid supply flow path that communicates the functional liquid supply means and the ink jet type functional liquid droplet ejection head, Is supplied from the functional liquid supply means to the functional liquid droplet ejection head at an appropriate pressure with a small fluctuation range, and the two pressure regulating valves each have a first pressure on the side of the functional liquid supply means having a pressure reducing function. The first pressure regulating valve and the second pressure regulating valve both communicate with the primary chamber and the secondary chamber in the valve housing. The valve body provided in the communication flow path is opened and closed with reference to the atmospheric pressure by the pressure receiving membrane body constituting one surface of the secondary chamber, and the pressure of the functional liquid supplied from the inlet port to the primary chamber is adjusted to 2 It is supplied to the outflow port through the next chamber. That.

  According to this configuration, the supply pressure of the functional liquid from the functional liquid supply means can be reduced in two stages by the first pressure adjustment valve and the second pressure adjustment valve, and supplied to the functional liquid droplet ejection head. . As a result, the pressure reducing function and pressure fluctuation suppressing function borne by each pressure regulating valve can be substantially halved, and the supply pressure from the functional liquid supply means may be changed as the apparatus becomes larger. This can be used universally without changing the design of the pressure regulating valve or by a slight design change. The functional liquid supply means may be a tank unit that supplies natural liquid to the functional liquid droplet ejection head, or may be a pressurized liquid gas that is supplied by pressure liquid or a pressure feeding unit that uses a pump.

  In this case, the first pressure regulating valve has a function of reducing the pressure mainly so that the primary pressure in the second pressure regulating valve becomes an appropriate operating pressure, and the second pressure regulating valve mainly serves the functional liquid droplet ejection head. It is preferable to have a function of reducing the pressure fluctuation range in the functional liquid droplet ejection head while reducing the pressure so that the outflow pressure becomes an appropriate operating pressure.

  According to this configuration, not only can the functional liquid decompressed to a predetermined pressure be supplied to the functional liquid droplet ejection head, but also a decompressed functional liquid with a small pressure fluctuation can be supplied to the functional liquid droplet ejection head. Therefore, it can function properly without impairing the ejection characteristics of the functional liquid droplet ejection head.

  In these cases, it is preferable that the pressure receiving film body of the second pressure regulating valve is configured with a low responsiveness as compared with the pressure receiving film body of the first pressure regulating valve.

  Further, it is preferable that the second pressure regulating valve is interposed in the functional liquid supply channel in the vicinity of the upstream side of the functional liquid droplet ejection head.

  According to this configuration, the functional liquid can be stably supplied to the functional liquid droplet ejection head at a predetermined pressure with a reduced pressure, and the pressure fluctuation of the supplied functional liquid can be suppressed as much as possible. In particular, if the pressure-receiving film body is configured with a low responsiveness, the opening and closing operation of the valve body becomes slow and slow, so that the pressure fluctuation can be effectively suppressed.

  A droplet discharge device of the present invention includes the above-described functional liquid supply device, and performs drawing by discharging a functional liquid onto a work while moving the functional liquid drop discharge head relative to the work. And

  According to this configuration, the functional liquid can be stably supplied to the functional liquid droplet ejection head under reduced pressure, so that the ejection drive of the functional liquid droplet ejection head can be stabilized and the drawing quality on the workpiece can be improved. be able to.

It is a perspective view of the droplet discharge device concerning this embodiment. FIG. 4 is a perspective view (a) of a lower half portion of a carriage unit (head unit) mounted on a droplet discharge device and a plan view (b) schematically showing a head unit mounted with a functional droplet discharge head. It is a front and back external perspective view of a functional liquid droplet ejection head. It is a piping system diagram of a functional liquid supply device. It is the systematic diagram which showed the functional droplet supply apparatus typically. It is the longitudinal cross-sectional view (a) by the side of the inflow port of a pressure regulating valve, and the longitudinal cross-sectional view (b) by the side of an outflow port.

  Hereinafter, with reference to the accompanying drawings, a liquid droplet ejection apparatus including a functional liquid supply apparatus according to an embodiment of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a functional droplet discharge head (inkjet head) into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be each pixel of the EL device, a filter element of a color filter, and the like are formed. The functional liquid supply device reduces the functional liquid to an appropriate pressure via a pressure adjustment valve and supplies the functional liquid to the functional liquid droplet ejection head.

  As shown in FIG. 1, the droplet discharge device 1 is disposed on an X-axis support base 12a supported by a stone surface plate, extends in the X-axis direction that is the main scanning direction, and moves the workpiece in the X-axis direction. And a Y-axis that is arranged on a pair of Y-axis support bases 13a spanned across the X-axis table 12 via a plurality of support columns 11 and that is in the sub-scanning direction A Y-axis table 13 extending in the direction, and 13 carriage units 14 suspended in a movable manner on the Y-axis table 13 and mounted with a plurality (12) of functional liquid droplet ejection heads 25. ing. Further, the droplet discharge device 1 includes a chamber 15 that houses these devices in an atmosphere in which temperature and humidity are controlled, and a functional liquid that passes through the chamber 15 and supplies the functional liquid to the functional droplet discharge head 25. A supply unit 16 (functional liquid supply means), and a tank cabinet 50 that houses a main tank 40 and the like that form a main part of the functional liquid supply unit 16 is provided in a part of the side wall of the chamber 15. Yes. The droplet discharge device 1 is controlled in its entirety by the control device 17, and the functional droplet supply head 25 is discharged and driven in synchronization with the driving of the X-axis table 12 and the Y-axis table 13, thereby supplying the functional liquid. The three color functional droplets supplied from the unit 16 are ejected, and a predetermined drawing pattern is drawn on the work.

  The droplet discharge device 1 includes a maintenance device 18 including a flushing unit 21, a suction unit 22, a wiping unit 23, and a discharge performance inspection unit 24. These units are used for maintenance of the functional droplet discharge head 25. The function of the functional liquid droplet ejection head 25 is maintained / recovered. In the droplet discharge device 1 of the present embodiment, the workpiece is drawn with the carriage unit 14 facing the portion where the X-axis table 12 and the Y-axis table 13 intersect, and the Y-axis table 13 and the maintenance device 18 (suction unit 22). , The carriage unit 14 faces the portion where the wiping unit 23) intersects, and the function of the functional liquid droplet ejection head 25 is maintained and recovered.

  As shown in FIG. 2, each carriage unit 14 includes three color droplets of R, G, and B, each of four (total 12) functional droplet ejection heads 25 and 12 functional droplet ejection heads 25. A head unit 19 including a head plate 26 that is supported in two groups is provided. Each carriage unit 14 is suspended from a bridge plate 13b that spans a pair of Y-axis support bases 13a (see FIG. 1). In addition, a sub tank 41 is mounted on the bridge plate 13b. A natural liquid head is used from the sub tank 41, and a functional liquid droplet ejection head of each carriage unit 14 is passed through two pressure adjusting valves 27 and 28 described later. The functional liquid is supplied to 25 (see FIG. 5). The number of carriage units 14 and the number of functional liquid droplet ejection heads 25 mounted on each carriage unit 14 are arbitrary.

  As shown in FIG. 3, the functional liquid droplet ejection head 25 is a so-called double ink jet head, which is a functional liquid introduction part 31 having two connection needles 34 and 2 sideways connected to the side of the functional liquid introduction part 31. A series of head substrates 32, two series of pump units 33 that are continuous below the head substrate 32, and a nozzle plate 35 that is coupled to the pump unit 33 are provided. Two third flow paths 43c, which will be described later, are connected to the functional liquid introduction unit 31, and two nozzle rows NL are arranged in parallel to each other on the nozzle surface NF of the nozzle plate 35. The nozzle row NL includes 180 discharge nozzles 36 arranged at an equal pitch. The head substrate 32 is connected to the control device 17 via a flexible flat cable (not shown), and the drive waveform output from the control device 17 is applied to each pump unit 33 (piezoelectric element thereof). Thus, the functional liquid is discharged from each discharge nozzle 36.

  As shown in FIGS. 1 and 4, the functional liquid supply unit (functional liquid supply means) 16 includes three (three colors) main tanks 40 housed in a tank cabinet 50 provided in the chamber 15, and each bridge plate. A plurality of (13) sub-tanks 41 disposed on 13 b and a tank communication channel 42 connecting the main tank 40 and the plurality of sub-tanks 41 are provided. In addition, each sub tank 41 is connected to each functional liquid droplet ejection head 25 by a functional liquid supply channel 43, and two pressure regulating valves provided in the sub tank 41, the functional liquid supply channel 43 and the functional liquid supply channel 43. 27 and 28 constitute each functional liquid supply device 29. The functional liquid sent from the main tank 40 is stored in each sub tank 41 through the tank communication channel 42. The functional liquid in the sub tank 41 in the functional liquid supply device 29 is supplied to the functional liquid droplet ejection head 25 via the functional liquid supply flow path 43 and the two pressure regulating valves 27 and 28 according to the driving of each functional liquid droplet ejection head 25. Is supplied under reduced pressure with natural head.

  As shown in FIG. 1, the flushing unit 21 has a pair of pre-drawing flushing units 21a and a regular flushing unit 21b, and is performed immediately before the drawing process or when the drawing process is suspended such as when the work is replaced. The discarded liquid is discharged from the functional droplet discharge head 25. The suction unit 22 includes 13 cap units 44, and forcibly sucks the functional liquid from the discharge nozzles 36 of the respective functional liquid droplet discharge heads 25 and performs capping. The wiping unit 23 wipes the nozzle surface NF of the functional liquid droplet ejection head 25 after suction. The ejection performance inspection unit 24 inspects the presence / absence of ejection of the functional liquid droplet ejection head 25 and the flight bend.

  Next, each functional liquid supply device 29 will be described in detail with reference to FIG. The functional liquid supply device 29 is connected in series to the sub-tank 41 (functional liquid supply means), the functional liquid supply flow path 43 as a tube connecting the functional liquid droplet ejection head 25, and the functional liquid supply flow path 43. The first pressure regulating valve 27 on the upstream side and the second pressure regulating valve 28 on the downstream side are provided. As described above, the sub tank 41 is mounted on the bridge plate 13b, receives the supply of the functional liquid from the main tank 40, and supplies the functional liquid to the functional liquid droplet ejection head 25 (four in the embodiment). .

  The functional liquid supply flow path 43 is configured by a gas-impermeable tube, and includes a first flow path 43a that connects the sub tank 41 and the first pressure adjustment valve 27, and a first pressure adjustment valve 27 and a second pressure adjustment valve 28. It has the 2nd flow path 43b to connect, and the 3rd flow path 43c which connects the 2nd pressure regulating valve 28-functional droplet discharge head 25. That is, in the first pressure regulating valve 27, the first flow path 43a is connected to the primary side and the second flow path 43b is connected to the secondary side, and the second pressure regulating valve 28 is connected to the second flow path 43b on the primary side. Is connected to the second flow path 43c on the secondary side. The first flow path 43a is provided with an opening / closing valve 43d, which functions when, for example, the functional liquid is replenished from the main tank 40 to the sub tank 41, or when the carriage unit 14 is replaced (head replacement). The liquid supply channel 43 is closed. The third flow path 43 c is branched and connected to the four functional liquid droplet ejection heads 25.

  The first pressure regulating valve 27 and the second pressure regulating valve 28 of the embodiment are exactly the same, and the functional liquid in the sub tank 41 is decompressed in two stages and supplied to the functional liquid droplet ejection head 25. In this case, the first pressure regulating valve 27 has a function of reducing the pressure so that the primary pressure in the second pressure regulating valve 28 becomes an appropriate operating pressure, and the second pressure regulating valve 28 mainly functions. A function of reducing the pressure fluctuation range in the functional liquid droplet ejection head 25 and reducing the pressure so that the outflow pressure to the liquid droplet ejection head 25 becomes an appropriate operating pressure is provided. Therefore, at the height level, the second pressure adjustment valve 28 is located in the vicinity of the functional liquid droplet ejection head 25 (mounted on the head plate 26), and the first pressure adjustment valve 27 is the sub tank 41 and the second pressure adjustment valve. 28 at a substantially intermediate position. In the present embodiment, as described above, the first pressure regulating valve 27 specializes in reducing the pressure on the primary side of the second pressure regulating valve 28. Therefore, the liquid of the functional liquid from the main tank 40 to the pressure regulating valve is used. The surface management is not so accurate. That is, the functional liquid may be supplied directly from the main tank 40 by pressure liquid supply without using the sub tank 41.

  In the functional liquid supply device 29 of the embodiment, four functional liquid droplet ejection heads 25 (same color) are arranged for one sub tank 41 (see FIG. 4), and the first pressure regulating valve 27 and the second pressure regulating valve. 28 also supplies the functional liquid to the four functional liquid droplet ejection heads 25, but the first pressure regulating valve 27 and the second pressure regulating valve 28 are provided for each of the four (plurality) functional liquid droplet ejection heads 25. It may be. Further, the number of the first pressure adjusting valve 27 may be one corresponding to the sub tank 41, and the number of the second pressure adjusting valve 28 may be four (plural) corresponding to the functional liquid droplet ejection head 25. In either case, it is necessary to branch the flow path, but it goes without saying that the plurality of branched flow paths are configured to have the same pressure loss.

  The first pressure adjustment valve 27 is disposed at a position lower than the sub tank 41 and higher than the second pressure adjustment valve 28, and the functional liquid supplied from the sub tank 41 is supplied to the second pressure adjustment valve 28 as an atmospheric pressure reference ( The regulating valve main body 60A constituting the main part, the inflow connector 61A plugged into the inflow side of the regulating valve main body 60A, and the outflow connector plugged into the outflow side of the regulating valve main body 60A 62A. The inflow connector 61A is connected to the first flow path 43a connected to the sub tank 41, and the outflow connector 62A is connected to the second flow path 43b connected to the second pressure regulating valve 28.

  The second pressure regulating valve 28 is disposed at a lower position than the first pressure regulating valve 27 and in the vicinity of the functional liquid droplet ejection head 25, and the functional liquid supplied from the first pressure regulating valve 27 is further used as an atmospheric pressure reference. The pressure is reduced by (constant pressure) and supplied to the functional liquid droplet ejection head 25. Like the first pressure regulating valve 27, the regulating valve main body 60B, which is the main part, and the inflow side of the regulating valve main body 60B are inserted. A joined inflow connector 61B and an outflow connector 62B inserted into and joined to the outflow side of the regulating valve main body 60B are provided. The inflow connector 61B is connected to the second flow path 43b connected to the first pressure regulating valve 27, and the outflow connector 62B is connected to the third flow path 43c connected to the functional liquid droplet ejection head 25. Yes.

  Hereinafter, the structure of the first pressure regulating valve 27 will be described with reference to FIG. In addition, since the 2nd pressure regulating valve 28 also has the substantially similar structure, in order to avoid duplication of description, it serves as the following description.

  The regulating valve main body 60 has a substantially disc shape, a valve housing 64 in which the front and rear central portions are formed in a concave shape, a lid 65 defining a primary chamber 67 together with the valve housing 64, and a valve housing 64. The pressure receiving film body 84 (diaphragm) is fixed to form a donut-shaped film body pressing member 66 that defines a secondary chamber 68 together with the valve housing 64. An adjustment valve communication channel 69 that communicates the next chamber 67 and the secondary chamber 68 is formed. The valve housing 64, the lid body 65, and the film body pressing member 66 are formed of a corrosion resistant material such as stainless steel.

  The lid body 65 and the membrane body pressing member 66 have an outer shape that is concentric with an axis passing through the center of the circular pressure receiving membrane body 84, and are screwed so as to sandwich the valve housing 64 from the front-rear direction. Further, the lid body 65 and the film body pressing member 66 are fixed to each other with the seal ring S interposed between the valve housing 64 and the primary chamber 67 and the secondary chamber 68 are liquid-tight. .

  The primary chamber 67 is formed in a substantially cylindrical shape that is concentric with the pressure receiving membrane body 84, and an inflow port 71 that extends obliquely in the radial direction from the primary chamber 67 is formed in the upper portion of the primary chamber 67. An adjustment valve communication channel 69 is opened at the center of the primary chamber 67. Then, on the primary chamber 67 side of the adjustment valve communication channel 69, a valve body 70 that opens and closes the adjustment valve communication channel 69 faces the opening peripheral edge of the adjustment valve communication channel 69 as a valve seat. Further, the valve body 70 is biased with a weak force in the valve closing direction (secondary chamber 68 side) by a valve body biasing spring 72 interposed between the valve body 70 and the lid body 65.

  As shown in FIG. 6A, the inflow port 71 includes an inflow joint receiving portion 73 into which the inflow connector 61 is inserted and joined, a filter housing portion 74 that houses a filter 75 connected to the inflow joint receiving portion 73, and a filter housing. And an inflow passage portion 76 communicating with the portion 74 and the primary chamber 67. An inflow connection port portion 61 a of the inflow connector 61 is inserted and joined to the inflow joint receiving portion 73. A filter 75 is accommodated in the filter accommodating portion 74 in a state where it is biased by a presser spring 77 interposed between the inflow connector 61.

  The secondary chamber 68 has a pressure receiving film body 84 attached to the valve housing 64 by a film body pressing member 66, and the pressure receiving film body 84 as a whole is formed on the bottom surface by the inner wall 68 a formed in a concave shape in the valve housing 64 and the pressure receiving film body 84. It is formed in the shape of a truncated cone. That is, the inner wall 68a is formed in a bottomed mortar shape having a tapered portion 68b. Further, at the lower part of the secondary chamber 68, an outflow port 81 (an outflow channel portion 86) extending right below from the secondary chamber 68 opens into a tapered portion 68b (see FIG. 6B). . Further, the adjustment valve communication channel 69 described above is opened at the center of the secondary chamber 68, and between the peripheral portion of the adjustment valve communication channel 69 on the secondary chamber 68 side and the pressure receiving film body 84. Is provided with a film body biasing spring 82 that biases the pressure receiving film body 84 in the forward direction.

  The pressure receiving film body 84 (diaphragm) includes a film body main body 84a made of a resin film, and a resin pressure receiving plate 84b bonded to the central portion of the film body main body 84a. The pressure receiving plate 84b is formed in a disc shape concentric with the membrane body main body 84a and has a sufficiently small diameter with respect to the membrane body main body 84a, and the valve body 70 is in contact with the center thereof. .

  The valve body 70 is made of an elastic material, and opens and closes the adjustment valve communication channel 69 by being separated from and contacting the peripheral edge of the adjustment valve communication channel 69 serving as a valve seat on the primary chamber 67 side. Further, the distal end portion of the valve body 70 extends through the adjustment valve communication channel 69, and the distal end portion comes into contact with the pressure receiving plate 84b so as to open and close.

  As shown in FIG. 6B, the outflow port 81 has the same form as the inflow port 71, and an outflow joint receiving portion 85 into which the outflow connector 62 is inserted and joined, and the outflow joint receiving portions 85 and 2 And an outflow passage portion 86 communicating with the next chamber 68. The outflow connection port portion 62 a of the outflow connector 62 is inserted and joined to the outflow joint receiving portion 85. The inflow port 71 and the outflow port 81 differ depending on the flow direction of the functional liquid and the presence or absence of the filter 75, but the basic form of the joint portion is the same.

  With the above configuration, in the first pressure regulating valve 27 and the second pressure regulating valve 28, when the pressure in the secondary chamber 68 decreases due to the outflow and discharge of the functional liquid, the pressure receiving film body 84 is deformed rearward (inward), The pressure receiving plate 84 b pushes the valve body 70 backward to open the valve, and the functional liquid flows from the primary chamber 67 into the secondary chamber 68. When the inflow of the functional liquid proceeds and the pressure in the secondary chamber 68 increases, the pressure receiving film body 84 is deformed forward (outside), and the valve body 70 is closed. Thus, the first pressure regulating valve 27 and the second pressure regulating valve 28 open and close the regulating valve communication channel 69 by the pressure receiving film body 84 being deformed by the balance between the atmospheric pressure and the internal pressure of the secondary chamber 68. To do.

  At that time, force acts on the valve body biasing spring 72 and the film body biasing spring 84 in a distributed manner, and the valve body 70 opens and closes very slowly by the elastic force of the valve body 70. For this reason, the pressure fluctuation (cavitation) due to the opening and closing of the valve body 70 is suppressed, and the influence on the outflow of the functional liquid from the secondary chamber 68 is suppressed. Of course, since the pulsation and the like generated on the primary chamber 67 side is also cut off by the valve body 70, it can be absorbed (damper function).

  In the first pressure regulating valve 27, the head of the sub tank 41 is applied to the primary chamber 67A side, and the pressure of the secondary chamber 68A is adjusted by the above-described pressure reducing function, and the valve body 70A is opened and closed by the head of the sub tank 41. Also suppresses pressure fluctuations resulting from operation. That is, the first pressure regulating valve 27 is decompressed and supplies the functional liquid to the second pressure regulating valve 28 at a constant pressure.

  Although the second pressure regulating valve 28 has been depressurized by the first pressure regulating valve 27, the first pressure regulating valve 27 is installed at a lower position than the second pressure regulating valve 28, so that the first pressure regulating valve 27 is located on the primary chamber 67B side. The head of the first pressure regulating valve 27 is acting. Similar to the first pressure regulating valve 27, the pressure reducing function described above further reduces the pressure on the secondary chamber 68B side, and effectively suppresses pressure fluctuations resulting from the opening / closing operation of the valve body 70B. Thus, by considering the height positions of the first pressure regulating valve 27 and the second pressure regulating valve 28, the same pressure regulating valves 27, 28 are allowed to perform different main functions, and the functional liquid droplet ejection head 25 is used. A functional liquid with an appropriate pressure and very little pressure fluctuation is supplied to the liquid. That is, the first pressure regulating valve 27 adjusts so that the secondary pressure is always constant even if the height of the sub tank 41 changes. Thereby, even if the height of the sub tank 41 changes, the second pressure regulating valve 28 is constantly supplied with a constant pressure of functional fluid to the primary side, so that the pressure regulation is performed stably, and the secondary side pressure Can be adjusted with high accuracy.

In order to exhibit the main function more remarkably, the first pressure regulating valve 27 and the second pressure regulating valve 28 may be partially different as follows. For example, the membrane body 84Ba constituting the pressure receiving membrane body 84B of the second pressure regulating valve 28 is composed of a resin film or metal film thicker than the membrane body 84Aa of the first pressure regulating valve 27, and the atmospheric pressure and the secondary chamber It is assumed that the response to the balance fluctuation with the internal pressure of 68 is low. Further, the diameter of the pressure receiving film body 84B is increased. As a result, the opening / closing operation of the valve body 70A becomes slow, and the pressure fluctuation can be further suppressed.
On the other hand, in the first pressure regulating valve 27, the membrane body 84Aa is thinned, or the diameter of the pressure receiving membrane body 84A is reduced. Thereby, the responsiveness of 70 A of valve bodies can improve, and the pressure reduction function of the 1st pressure regulation valve 27 can be improved.

  The functional liquid supply device 29 according to the present embodiment includes the first pressure adjusting valve 27 and the second pressure adjusting valve 28 having the pressure reducing function and the pressure fluctuation suppressing function as described above. Reduces pressure and pressure fluctuation in two stages. For this reason, the functional liquid can be decompressed to a desired pressure, and a stable functional liquid with a smaller pressure fluctuation range can be supplied to the functional liquid droplet ejection head 25. Further, according to this configuration, it is possible to supply a functional liquid with a stable pressure even if the installation position of the sub tank 41 with respect to the functional liquid droplet ejection head is changed. That is, the functional liquid droplet ejection head 25 can perform a drawing operation on the work with high accuracy.

  1: Liquid droplet ejection device 14: Carriage unit 16: Functional liquid droplet supply unit 25: Functional liquid droplet ejection head 27: First pressure adjustment valve 28: Second pressure adjustment valve 29: Functional liquid supply device 41: Sub tank 64: Valve Housing 67: Primary chamber 68: Secondary chamber 69: Regulating valve communication flow path 70: Valve body 84: Pressure receiving membrane body

Claims (5)

Two pressure regulating valves are provided in series in a functional liquid supply channel that communicates the functional liquid supply means and the ink jet type functional liquid droplet ejection head, and the functional liquid is supplied from the functional liquid supply means to the function. A functional liquid supply device that supplies liquid droplet discharge heads with an appropriate pressure with a small fluctuation range,
The two pressure regulating valves each comprise a first pressure regulating valve on the functional liquid supply means side having a pressure reducing function and a second pressure regulating valve on the functional liquid droplet ejection head side,
Each of the first pressure regulating valve and the second pressure regulating valve includes a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber in the valve housing. The pressure-sensitive film body constituting the surface opens and closes with reference to atmospheric pressure, and the functional liquid supplied from the inflow port to the primary chamber is pressure-adjusted and supplied to the outflow port through the secondary chamber. A functional liquid supply device. The first pressure regulating valve mainly has a function of reducing pressure so that the primary pressure in the second pressure regulating valve becomes an appropriate operating pressure,
The functional liquid supply apparatus according to claim 1, wherein the second pressure regulating valve mainly has a function of suppressing a fluctuation range of pressure in the functional liquid droplet ejection head.   3. The function according to claim 1, wherein the pressure-receiving film body of the second pressure-regulating valve is configured with a low responsiveness as compared to the pressure-receiving film body of the first pressure-regulating valve. Liquid supply device.   4. The functional liquid supply according to claim 1, wherein the second pressure regulating valve is interposed in the functional liquid supply flow path in the vicinity of the upstream side of the functional liquid droplet ejection head. 5. apparatus. A functional liquid supply device according to any one of claims 1 to 4,
A liquid droplet ejection apparatus for performing drawing by ejecting a functional liquid onto the work while moving the functional liquid droplet ejection head relative to the work.

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